Thermal shock testing device, system and method for SiC coating graphite piece

Abstract

The invention provides a thermal shock testing device, system and method for a SiC coating graphite piece. The thermal shock test device for the SiC coating graphite piece comprises a heating chamber, a transition chamber and a cooling chamber, wherein a moving mechanism for carrying the graphite piece and switching the graphite piece between the heating chamber and the cooling chamber is arranged in the transition chamber; an induction coil for heating the graphite piece is arranged in the heating chamber; the cooling chamber is used for spraying a cooling substance to the graphite piece, and the cooling substance is a mixture of liquid inert gas and silicon dioxide wrapped paraffin phase change microcapsules. The problems of insufficient upper limit of heating temperature, poor heating uniformity of special-shaped parts, water-cooling weight loss, ultrahigh-temperature heat loss of graphite parts and the like are solved.

Description

Technical Field

[0001] The present invention relates to the technical field of thermal shock testing of SiC-coated graphite parts, and in particular to a thermal shock testing device, system and method for SiC-coated graphite parts. Background Art

[0002] SiC-coated graphite components are core materials for third-generation semiconductor manufacturing (such as MOCVD equipment bases and crucibles for single-crystal silicon growth furnaces). Their thermal shock resistance directly determines the quality of epitaxial wafers and component lifespan. Thermal shock resistance is a crucial property of graphite. When a material expands (or contracts) due to sudden heating (or cooling), the deformation of its various components is constrained, generating thermal stress. When this thermal stress exceeds the material's ultimate strength, it can cause cracking, flaking, and fracture, leading to failure. A material's thermal shock resistance, in addition to being influenced by heat transfer conditions, is primarily determined by its coefficient of thermal expansion, thermal conductivity, fracture toughness, specific heat, and strength. Therefore, thermal shock resistance testing is frequently required during material research.

[0003] Existing thermal shock testing primarily relies on a muffle furnace, an indirect heating device that converts electrical energy into heat via a resistance wire. Graphite samples are placed in the muffle furnace and heated to the target temperature. After holding the temperature, they are removed and transferred to a water tank or air for cooling. Failure is assessed by weighing or visually observing any coating peeling.

[0004] In actual use, the SiC-coated graphite parts were placed in a muffle furnace and heated to 1000°C. After keeping warm for 15 minutes, they were transferred to room temperature water for cooling. After 15 cycles of testing, it was found that the SiC coating oxidized and gained weight in the early stage of thermal shock, and cracks appeared in the later stage, resulting in mass loss, making it impossible to accurately monitor its weight loss rate.

[0005] Furthermore, the semiconductor industry's testing of SiC-coated graphite components requires simulating actual operating conditions, such as repeated exposure to high temperatures of 1600-2200°C and rapid cooling, as well as use in an inert atmosphere. However, existing muffle furnaces struggle to meet the ultra-high temperature testing requirements above 1600°C.

[0006] Furthermore, existing heating methods cannot effectively and uniformly heat irregularly shaped or large parts (such as crucibles and curved pedestals). Furthermore, even in an inert gas atmosphere, both water and air cooling present challenges. Water cooling presents the following drawbacks: At high temperatures, reactions occur: SiC + 2H₂O → SiO₂ + CH₄ (weight gain) and C + H₂O → CO + H₂ (weight loss), causing the graphite substrate and silicon carbide coating to react with deionized water at high temperatures, resulting in mass loss and biased results. Air cooling also presents drawbacks: The slow rate makes it unsuitable for ultra-high temperature quenching. Furthermore, air cooling of irregularly shaped parts creates dead zones, leading to temperature differences exceeding 300°C between different areas of the sample. Argon has a specific heat capacity of only 0.52 J / g·K, requiring a high pressure of 8 MPa to achieve a cooling rate of 100°C / s, and this still results in temperature differences in dead zones.

[0007] In addition, regarding the professional names involved in this case, those skilled in the art generally identify them as follows: Thermal shock testing: A key method for evaluating a material's performance stability under rapid temperature fluctuations, thermal shock testing simulates cycles of high temperature and rapid cooling (e.g., water cooling) to examine a material's resistance to crack initiation and propagation. The test setup typically includes a high-temperature resistance furnace, a cooling system, and automated temperature control equipment. Evaluation criteria include crack count, propagation rate, and thermal shock life (i.e., the number of cycles before failure). This test is particularly important for high-temperature applications such as ceramics and fiberglass insulation materials, as it can reveal failure mechanisms under thermal stress. Relevant standards include GB / T2423.5 and IEC60068-2-14.

[0008] Coating and Substrate: The bonding performance between the coating and the substrate relies on multiple mechanisms, including mechanical intercalation, chemical bonding, and diffusion. Mechanical intercalation enhances the anchoring effect by roughening the substrate surface (e.g., sandblasting); chemical bonding achieves a strong connection through covalent or ionic bonds between atoms, such as the use of silane coupling agents on glass substrates; and diffusion forms a new bonding layer through interfacial atomic interpenetration. Optimization strategies, including substrate surface pretreatment (grinding, chemical etching) and the introduction of gradient interface designs to reduce thermal stress, can significantly improve coating adhesion and corrosion resistance, especially in high-temperature or corrosive environments.

[0009] Silicon carbide-coated graphite materials: Silicon carbide-coated graphite materials utilize a protective silicon carbide layer deposited on a graphite substrate (commonly using CVD or PVD techniques). This coating combines the electrical and thermal conductivity of graphite with the high-temperature resistance (>1600°C) and oxidation resistance of silicon carbide. This coating protects the graphite from direct contact with oxygen, acids, and alkalis, significantly extending its service life. It is particularly suitable for consumables such as susceptors and etching rings in semiconductor MOCVD equipment. Under extreme operating conditions (such as high-frequency thermal cycling), its thermal shock and wear resistance significantly surpasses that of pure graphite.

[0010] Argon shielding: As an inert gas, argon is widely used to isolate oxygen and protect graphite materials during processing. In welding and metal smelting, argon blanketing prevents high-temperature oxidation. Semiconductor manufacturing (such as MOCVD equipment) requires high-purity argon (99.999%) to maintain an oxygen-free environment to prevent sample contamination and abnormal discharge. In materials analysis (such as high-temperature tensile testing), argon ensures test accuracy. Summary of the Invention

[0011] The purpose of the present invention is to provide a thermal shock testing device, system and method for SiC-coated graphite parts, which solves the problems of insufficient upper limit of heating temperature, poor heating uniformity of special-shaped parts, water cooling weight loss, and ultra-high temperature heat loss of graphite parts.

[0012] The technical solution of the present invention is: a thermal shock testing device for SiC-coated graphite parts, comprising a heating chamber, a transition chamber, and a cooling chamber, wherein the transition chamber is provided with a moving mechanism for carrying the graphite parts and switching the graphite parts between the heating chamber and the cooling chamber; The heating chamber is provided with an induction coil for heating the graphite part; The cooling chamber is used to spray a cooling material onto the graphite parts. The cooling material is a mixture of liquid inert gas and silica-encapsulated paraffin phase-change microcapsules. Preferably, the thermal shock testing apparatus for SiC-coated graphite parts includes a thermal shock chamber and an intelligent control system for controlling the operation of the thermal shock chamber and collecting operational data. The thermal shock chamber has a door on one side, and a heating chamber, a transition chamber, and a cooling chamber are sequentially arranged within the chamber from the door. Argon gas pipes are provided in each of the heating chamber, transition chamber, and cooling chamber to allow for the flow of argon gas.

[0013] Preferably, an annular ejector for ejecting cooling material onto the graphite parts is provided in the cooling chamber; and a heat insulating layer is provided outside the heating chamber and the transition chamber.

[0014] Preferably, an inner door is provided between the heating chamber and the transition chamber, and between the transition chamber and the cooling chamber. Preferably, the moving mechanism comprises a slide rail, a robotic arm sliding on the slide rail, and a clamp provided at the end of the robotic arm for clamping the graphite part, wherein the slide rail is installed in the transition chamber.

[0015] Preferably, the slide rail is provided with a weighing instrument for measuring the weight of the graphite part and transmitting the weight to the intelligent control system.

[0016] Preferably, the thermal shock testing device for SiC-coated graphite parts further comprises an in-situ detection system disposed in the cooling chamber for collecting temperature change data on the surface of the graphite parts and transmitting the data to the intelligent control system.

[0017] Preferably, the phase change starting temperature of the silica-coated paraffin phase change microcapsules is 50°C, and the phase change ending temperature is 25°C.

[0018] The present invention also provides a thermal shock testing system for SiC-coated graphite parts, comprising: A heating system that uses an electromagnetically coupled thermal field combined with an alternating magnetic field to generate eddy current heating in the SiC-coated graphite part itself; The cooling system suspends silicon dioxide-coated paraffin phase change microcapsules in liquid inert gas and sprays them onto the surface of the graphite parts through an ejector to cool the graphite parts; A moving mechanism, the moving mechanism is used to send the graphite parts heated in the heating system into a cooling system for cooling; An intelligent control system is used to control the coordinated actions of the heating system, cooling system and moving mechanism.

[0019] Preferably, the testing system further comprises an in-situ detection system, which is used to monitor the surface temperature field and morphology change data of the graphite part during the cooling process, and send the monitoring data to the intelligent control system.

[0020] The present invention also provides a method for performing a thermal shock test using the above thermal shock test device, comprising: Clamp the graphite part on the moving mechanism; The moving mechanism is started and the graphite part clamped on it is placed into the heating chamber. The heating chamber uses a combination of electromagnetic coupling thermal field and alternating magnetic field to generate eddy current heating in the graphite part itself. After heating is completed, the moving mechanism is started to transport the graphite part to the cooling chamber, where a mixed spray of silica-coated paraffin phase change microcapsules and liquid inert gas is generated. The spray is sprayed onto the surface of the graphite part to achieve zero-water intervention cooling; the test is completed.

[0021] Preferably, before cooling, the starting temperature and ending temperature of the silica-wrapped paraffin phase change microcapsules are set; during cooling, the temperature of the graphite part is obtained; if the obtained temperature is greater than the set starting temperature, the silica-wrapped paraffin phase change microcapsules are triggered to melt and absorb heat; if the obtained temperature is less than the set ending temperature, the silica-wrapped paraffin phase change microcapsules are solidified and argon gas is purged for recovery.

[0022] Preferably, the phase change starting temperature of the silica-coated paraffin phase change microcapsules is set to 50°C, and the phase change ending temperature of the silica-coated paraffin phase change microcapsules is set to 25°C.

[0023] Compared with the related art, the present invention has the following beneficial effects: 1. This invention uses the electromagnetic eddy current effect to cause the SiC-coated graphite component to self-heat, eliminating the limitations of physical heating elements. Based on Joule's law Q=I2Rt, a high-frequency magnetic field induces strong eddy currents in the SiC coating, resulting in a measured heating rate of ≥300°C / min. This breakthrough achieves an ultra-high temperature environment of 1600-2200°C, accurately simulating the actual working conditions of a semiconductor thermal field. Second, the present invention completely solves the problem of thermal field distortion of large crucibles / curved bases through electromagnetic coupling self-heating, and can effectively and evenly heat special-shaped and large parts; 3. The present invention uses silicon dioxide to encapsulate paraffin phase change microcapsules, which have a latent heat of 200 J / g (384 times the sensible heat of argon). By controlling the particle size (5-20 μm), ultra-large-area heat exchange is achieved, and the liquid argon carrier isolates oxidation, achieving rapid cooling (target cooling rate ≥ 100 ° C / s); 4. The present invention innovatively adopts a mixture of liquid inert gas and silica-encapsulated paraffin phase change microcapsules as a cooling material, which is applied in thermal shock testing, avoiding the occurrence of chemical reactions similar to water cooling and improving the accuracy of thermal shock test results; at the same time, the silica-encapsulated paraffin phase change microcapsules can be recycled and reused, which helps to reduce the cost of use. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 This is a schematic structural diagram of the thermal shock testing device for SiC-coated graphite parts provided by the present invention.

[0025] In the accompanying drawings: 1. Thermal shock chamber; 11. Cabin door; 12. Heating chamber; 13. Transition chamber; 14. Cooling chamber; 15. Induction coil; 16. Thermal insulation layer; 17. Annular ejector; 18. Moving mechanism; 181. Slide rail; 182. Robotic arm; 183. Clamp; 19. Argon gas tube; 110. Inner cabin door; 2. In-situ detection system; 3. Intelligent control system; 31. Control cabinet; 32. Computer; 10. Heating system; 20. Cooling system; 30. Graphite parts. DETAILED DESCRIPTION

[0026] The present invention will be described in detail below with reference to the accompanying drawings and in conjunction with the embodiments. It should be noted that the embodiments and features of the embodiments may be combined unless they conflict. For ease of description, the words "upper," "lower," "left," and "right" appear below merely to indicate the directions of upper, lower, left, and right in the accompanying drawings and do not limit the structure.

[0027] like Figure 1 As shown, the thermal shock testing device for SiC-coated graphite parts provided in this embodiment includes a thermal shock chamber 1 , an in-situ detection system 2 and an intelligent control system 3 .

[0028] A door 11 is provided on one side of the thermal shock chamber 1. A heating chamber 12, a transition chamber 13, and a cooling chamber 14 are provided in the thermal shock chamber 1 in order from the door 11. The transition chamber 13 is provided with a moving mechanism 18 for carrying a graphite component 30 and switching the graphite component 30 between the heating chamber 12 and the cooling chamber 14.

[0029] The moving mechanism 18 includes a slide rail 181, a robotic arm 182 that slides on the slide rail 181, and a clamp 183 at the end of the robotic arm 182 for clamping the graphite piece 30. The slide rail 181 is installed in the transition chamber 13. A weighing instrument is installed on the slide rail 181 to measure the weight of the graphite piece 30, calculate the weight loss rate, and transmit the calculated weight loss rate to the intelligent control system 3.

[0030] An induction coil 15 is installed within the heating chamber 12. An annular ejector 17 is installed within the cooling chamber 14. Thermal insulation layers 16 are provided on the exterior of the heating chamber 12 and transition chamber 13. Corundum insulation is used as the thermal insulation layer 6. Inner doors 110 are installed between the heating chamber 12 and transition chamber 13, and between the transition chamber 13 and cooling chamber 14. These inner doors 110 are opened and closed by the intelligent control system 3.

[0031] The heating chamber 12, transition chamber 13, and cooling chamber 14 are each equipped with argon gas pipes 19 that allow argon gas to flow in and provide argon protection. The intelligent control system 3 includes a control cabinet 31 and a computer 32. The control cabinet 31 includes a PLC and industrial computer dual system, safety fuses, and other components. The computer 32 is used to view and store data such as photos, videos, and tables.

[0032] The cooling chamber 14 is provided with an in-situ detection system 2 for collecting surface temperature variation data of the graphite piece 30 and transmitting the data to the intelligent control system 3 .

[0033] The intelligent control system 3 is used to control the coordinated actions of the heating system 10, the cooling system 20 and the moving mechanism 18, and to collect test data during operation.

[0034] The present invention also provides a thermal shock testing system for SiC-coated graphite parts, comprising a heating system 10 , a cooling system 20 , a moving mechanism 18 , an intelligent control system 3 and an in-situ detection system 2 .

[0035] The heating system 10 uses a high-frequency electromagnetically coupled thermal field generator to generate eddy current heating in the SiC-coated graphite part itself through an alternating magnetic field (frequency 10-50kHz), achieving a non-contact temperature jump (heating rate ≥300°C / min), breaking through the upper temperature limit of the physical heating body and achieving the semiconductor operating conditions of 1600~2200°C.

[0036] The cooling system 20 suspends silica-coated paraffin phase-change microcapsules (particle size 5-20 μm) in liquid argon and then coats the graphite piece 30 via a spray system. When the temperature of the graphite piece 30 exceeds 50°C, the microcapsules absorb heat and melt, absorbing up to 200 J / g of latent heat. When the temperature drops below 25°C, a high-pressure argon flow instantly sweeps away any remaining microcapsules (recovery rate >99%), achieving zero-water cooling.

[0037] The use of silica-encapsulated paraffin phase change microcapsules in thermal shock testing of graphite parts can fully utilize their material properties and avoid chemical reactions when the graphite parts cool down, which can cause quality loss and data deviation.

[0038] The silica-coated paraffin phase change microcapsules have three core characteristics: efficient absorption, chemical inertness and controllable particle size.

[0039] (1) High latent heat absorption capacity: The latent heat of paraffin phase change reaches 200 J / g (384 times the sensible heat absorption capacity of argon), which can efficiently absorb the heat of graphite parts during the phase change process (solid to liquid), achieving rapid cooling (target cooling rate ≥100℃ / s).

[0040] (2) Chemical stability: The SiO2 shell isolates the paraffin from contact with the high-temperature SiC coating / graphite substrate, avoiding chemical reactions similar to water cooling (such as SiC + 2H2O → SiO2 + CH4 or C + H2O → CO + H2); the paraffin core does not decompose in an inert argon environment and does not react with graphite or SiC.

[0041] (3) Particle Size Controllability (5-20μm): Micron-sized particles create a large surface area, improving heat exchange efficiency. Small particles can evenly coat the surface of irregularly shaped components, avoiding temperature differences caused by airflow dead zones (traditional air cooling can cause temperature differences of >300°C between different areas of the component).

[0042] The specific solid-state relationship between the silicon dioxide-coated paraffin phase change microcapsules and the temperature of the graphite parts is shown in Table 1: Table 1: Specific solid-state correlation parameters of silicon dioxide-coated paraffin phase change microcapsules and graphite temperature The moving mechanism 18 is used to transport graphite parts heated in the heating system 10 to the cooling system 20 for cooling. The moving mechanism 18 comprises a robotic arm 182, fabricated by weaving and sintering SiC-coated carbon fibers, mounted on a slide rail 181 and capable of movement along the slide rail 181. The robotic arm 182 exhibits strong high-temperature and oxidation resistance and excellent mechanical properties. It is equipped with a low-heat-capacity fixture 183. The dual-station design of the slide rail 181 enables rapid transfer of graphite samples between high-temperature and cooling zones.

[0043] The in-situ detection system 2 includes an infrared thermal imager, an optical microscope camera, and an analytical electronic balance to monitor the changes in the surface temperature field distribution of the graphite part during the cooling process, record the evolution of the surface morphology of the graphite part 30, and monitor the quality of the graphite part 30 in real time.

[0044] The intelligent control system 3 utilizes a dual PLC and industrial computer system, enabling precise programmable control of parameters such as holding temperature, holding time, transfer rate, cooling rate, and number of cycles, automating the entire thermal shock experiment process. The intelligent control system 3 also incorporates a safety fuse mechanism that automatically shuts down the system if a temperature difference exceeds 5% or if infrared energy surges, protecting both the equipment and the experimenter.

[0045] The present invention also provides a method for performing thermal shock testing using the above-mentioned thermal shock testing device for SiC-coated graphite parts, comprising: S1, open the hatch 11, clamp the graphite piece 30 on the fixture 183 of the moving mechanism 18, and close the hatch 11.

[0046] S2, start the robotic arm 182, place the graphite piece 30 clamped thereon into the heating chamber 12; and adjust the distance between the induction coil 15 and the graphite piece 30 (5-15 cm, the specific distance can be adjusted according to the size of the graphite piece sample) by raising and lowering the robotic arm 182 to achieve uniform heating.

[0047] S3, the heating chamber 12 uses a combination of electromagnetic coupling thermal field and alternating magnetic field to make the graphite piece 30 generate eddy current heating.

[0048] S4, after the heating is completed, the inner door 110 is opened, and the robotic arm 182 is driven to slide along the slide rail 181 to transport the graphite piece 30 to the cooling chamber 14.

[0049] In step S5, a mixed spray of silica-coated paraffin wax phase-change microcapsules and liquid inert gas is generated in the cooling chamber 14 and sprayed onto the surface of the graphite piece 30, achieving zero-water cooling. When the graphite sample temperature exceeds 50°C, the microcapsules melt, the paraffin absorbs latent heat, and the liquid argon carrier simultaneously evaporates and removes sensible heat, achieving a dual cooling effect. When the graphite sample temperature drops below 25°C, the paraffin solidifies and the microcapsules regain their rigidity. High-pressure argon gas at 0.5-1 MPa is then introduced to peel the solidified microcapsules from the sample surface. Gas-solid separation is achieved through multi-stage filtration, enabling recovery.

[0050] S6, the graphite piece 30 is weighed during the cooling process of the graphite piece 30, and the weighing data is transmitted to the intelligent control system 3 to calculate the weight loss rate.

[0051] S7 , collecting the surface temperature field and morphology change data of the graphite piece 30 during the cooling process of the graphite piece 30 , and transmitting the data to the computer 32 for collection.

[0052] S8, outputting the thermal shock test results of the graphite part 30 based on the collected data and in accordance with relevant standards. The test is completed.

[0053] This invention, designed for SiC-coated graphite semiconductor materials, provides a thermal shock heating and cooling method combining high-frequency electromagnetic coupling and phase-change microcapsules. This method utilizes electromagnetic eddy currents to induce self-heating in the SiC-coated graphite component, eliminating the limitations of a physical heating element. Based on Joule's law Q=I²Rt, the high-frequency magnetic field induces strong eddy currents in the SiC coating, resulting in a measured heating rate of ≥300°C / min. This breakthrough achieves ultra-high temperatures of 1600-2200°C, accurately simulating the actual thermal field conditions of semiconductors.

[0054] The present invention solves the problem of thermal field distortion caused by conventional heating, in which the heating intensity of the angular area of ​​the special-shaped part is 3-5 times higher than that of the flat area, by electromagnetic coupling self-heating.

[0055] The present invention uses microcapsules with a phase change latent heat of 200 J / g (384 times the sensible heat of argon), realizes ultra-large area heat exchange through particle size control (5-20 μm), and isolates oxidation with a liquid argon carrier, thus solving the problems existing in water cooling and air cooling.

[0056] The above descriptions are merely embodiments of the present invention and are not intended to limit the patent scope of the present invention. Any equivalent structure or equivalent process transformation made using the contents of the present invention description and drawings, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present invention.

Claims

1. A thermal shock testing device for SiC coated graphite parts, characterized in that: The invention comprises a heating chamber (12), a transition chamber (13) and a cooling chamber (14), wherein the transition chamber (13) is provided with a moving mechanism (18) for carrying a graphite piece and switching the graphite piece between the heating chamber (12) and the cooling chamber (14); the heating chamber (12) is provided with an induction coil (15) for heating the graphite piece; the cooling chamber (14) is used to spray a cooling substance onto the graphite piece, wherein the cooling substance is a mixture of liquid inert gas and silicon dioxide-encapsulated paraffin phase change microcapsules.

2. The thermal shock testing device for SiC coated graphite parts according to claim 1, characterized in that: The invention also includes a thermal shock chamber (1) and an intelligent control system (3) for controlling the operation of the thermal shock chamber (1) and collecting the operation data of the thermal shock chamber (1). A door (11) is provided on one side of the thermal shock chamber (1). A heating chamber (12), a transition chamber (13) and a cooling chamber (14) are provided in the thermal shock chamber (1) in sequence from the door (11). The heating chamber (12), the transition chamber (13) and the cooling chamber (14) are all provided with an argon gas pipe (19) capable of introducing argon gas.

3. The thermal shock testing device for SiC coated graphite parts according to claim 1, characterized in that: The moving mechanism (18) includes a slide rail (181), a mechanical arm (182) sliding on the slide rail (181), and a clamp (183) provided at the end of the mechanical arm (182) for clamping the graphite piece. The slide rail (181) is installed in the transition chamber (13).

4. The thermal shock testing device for SiC coated graphite parts according to claim 3, characterized in that: The slide rail (181) is provided with a weighing instrument for measuring the weight of the graphite piece and transmitting the weight to the intelligent control system (3).

5. The thermal shock testing device for SiC coated graphite parts according to claim 1, characterized in that: It also includes an in-situ detection system (2) located in the cooling chamber (14) for collecting graphite piece surface temperature change data and transmitting the data to the intelligent control system (3).

6. The thermal shock testing device for SiC coated graphite parts according to claim 1, characterized in that: The phase change starting temperature of silica-coated paraffin phase change microcapsules is 50℃, and the phase change ending temperature is 25℃.

7. A thermal shock testing system for SiC coated graphite parts, characterized in that: include: A heating system (10), wherein the heating system (10) uses an electromagnetic coupling thermal field combined with an alternating magnetic field to cause the SiC-coated graphite part to generate eddy current heating; A cooling system (20) suspends silicon dioxide-coated paraffin phase change microcapsules in a liquid inert gas and sprays the suspended microcapsules onto the surface of the graphite part through an ejector (17) to cool the graphite part; A moving mechanism (18), wherein the moving mechanism (18) is used to send the graphite piece heated in the heating system (10) into the cooling system (20) for cooling; An intelligent control system (3) is provided, wherein the intelligent control system (3) is used to control the coordinated actions of the heating system (10), the cooling system (20) and the moving mechanism (18).

8. The thermal shock testing system for SiC-coated graphite parts according to claim 7, characterized in that: It also includes an in-situ detection system (2), which is used to monitor the surface temperature field and morphology change data of the graphite part during the cooling process, and sends the monitoring data to the intelligent control system (3).

9. A method for performing thermal shock testing on SiC-coated graphite parts using the thermal shock testing device according to any one of claims 1 to 6, characterized in that: include: Clamping the graphite piece (30) on the moving mechanism (18); The moving mechanism (18) is started, and the graphite piece (30) clamped thereon is placed into the heating chamber (12); the heating chamber (12) uses a combination of electromagnetic coupling thermal field and alternating magnetic field to cause the graphite piece (30) to generate eddy current heating; After the heating is completed, the moving mechanism (18) is started to transport the graphite piece (30) to the cooling chamber (14). A mixed spray of silicon dioxide-coated paraffin phase change microcapsules and liquid inert gas is generated in the cooling chamber (14). The spray is sprayed onto the surface of the graphite piece (30), achieving zero-water intervention cooling; and the test is completed.

10. The method according to claim 9, characterized in that Before cooling, the starting temperature and ending temperature of the silica-wrapped paraffin phase change microcapsules are set; during cooling, the temperature of the graphite part is obtained; if the obtained temperature is greater than the set starting temperature, the silica-wrapped paraffin phase change microcapsules are triggered to melt and absorb heat; if the obtained temperature is less than the set ending temperature, the silica-wrapped paraffin phase change microcapsules are solidified and purged with argon gas for recovery.

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