Macro-micro combined electrode based on MEMS technology and preparation method thereof

Abstract

The application provides a macro-micro combined electrode based on MEMS technology and a preparation method thereof. The macro-micro combined electrode based on MEMS technology comprises a deep brain stimulation (DBS) macro electrode, a non-metal support sleeve and at least one metal stimulation contact, the metal stimulation contact is arranged on the surface of the first end of the non-metal support sleeve, and the first end is an end penetrating into the deep brain; a flexible micro-nano electrode array based on MEMS technology, which comprises a plurality of detection units arranged in parallel, each detection unit comprises a detection site and a wire, the detection site is attached to the surface of the first end, each detection site is used for detecting an electric signal of the deep brain, each wire is connected to the corresponding detection site, and each wire extends away from the first end along the non-metal support sleeve in the form of being attached to the surface of the non-metal support sleeve or penetrating into the non-metal support sleeve.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of brain-computer interface, and particularly relates to a macro-micro combined electrode based on MEMS technology and a preparation method thereof. BACKGROUND

[0002] A neural electrode is an effective tool for detecting neural signals. In the treatment of some mental diseases, existing drug treatment and traditional surgical methods often cannot achieve precise lesion positioning and effective personalized intervention. Especially in deep brain stimulation (DBS) surgery, how to accurately identify and locate the disease-related brain area and perform meticulous surgical operation and treatment has become the key to improving the treatment effect. Moreover, the existing regulation mode is human intervention, which increases the difficulty of post-treatment regulation for patients, and there is an urgent need for an electrode that can achieve closed-loop regulation for patients. However, the existing technology cannot meet the high-precision detection requirements and more accurate neural regulation. SUMMARY

[0003] In view of the demand for neural information collection of the electrode for closed-loop regulation of refractory mental diseases, the present application provides a macro-micro combined electrode based on MEMS technology and a preparation method thereof.

[0004] The present application provides a macro-micro combined electrode based on MEMS technology, comprising: a deep brain stimulation macro electrode comprising a non-metal support sleeve and at least one metal stimulation contact, the metal stimulation contacts being arranged at intervals on the surface of the first end portion of the non-metal support sleeve, the first end portion being the end that penetrates into the deep brain; a flexible micro-nano electrode array based on MEMS technology, comprising a plurality of detection units arranged in parallel, each detection unit comprising a detection site and a wire, the detection sites being attached to the surface of the first end portion, each detection site being used to detect one kind of electrical signal in the deep brain, and each wire being connected to the corresponding detection site, each wire extending away from the first end portion along the non-metal support sleeve in a manner of being attached to the surface of the non-metal support sleeve or passing through the inside of the non-metal support sleeve.

[0005] According to the present application, the non-metal support sleeve comprises a middle portion, and a first slit and a second slit are formed at both ends of the middle portion, respectively, the first slit being located between the middle portion and the first end portion, and each wire passes into the inside of the non-metal support sleeve from the first slit and passes out of the non-metal support sleeve from the second slit.

[0006] According to the embodiment of the present application, at least one third slit is formed on the first end portion, each third slit is located at the edge of a different metal stimulating contact on the side away from the second slit, and each wire enters or exits the third slit and then enters the interior of the non-metal support sleeve from the first slit to the connected detection site.

[0007] According to the embodiment of the present application, each detection site is attached to the metal stimulating contact.

[0008] According to the embodiment of the present application, the non-metal support sleeve further comprises a second end portion, and the intermediate portion is located between the first end portion and the second end portion; each detection unit further comprises a pad, and each wire is connected to the corresponding pad after exiting the second slit, and the pad is attached to the surface of the second end portion after being welded to an external extension circuit board.

[0009] According to the embodiment of the present application, each detection site is attached to the surface of the first end portion by a medical biocompatible material.

[0010] According to the embodiment of the present application, the medical biocompatible material comprises any one or a combination of polyethylene glycol, polylactic acid, poly-lactic-glycolic acid, silk fibroin, biocompatible UV glue, MED 2000 medical silicone glue.

[0011] According to the embodiment of the present application, the electrical signal comprises any one or more of an electrophysiological signal, a dopamine electrochemical signal, or a glutamate electrochemical signal.

[0012] According to the embodiment of the present application, the flexible micro-nano electrode array comprises a substrate insulating layer, at least one signal transmission layer, and a packaging insulating layer, and the plurality of detection units are located in the signal transmission layer, wherein the material of the substrate insulating layer and the packaging insulating layer comprises any one or a combination of polyimide, parylene, epoxy resin, polylactic acid, poly-lactic-glycolic acid, SU8, polyethylene terephthalate, polydimethylsiloxane, silica gel, and silicone rubber, and the material of the signal transmission layer comprises any one or a combination of gold, platinum, iridium, titanium, magnesium, molybdenum, platinum-iridium alloy, titanium alloy, graphite, carbon nanotube, and PEDOT.

[0013] The application further provides a preparation method of the macro-micro combined electrode based on the MEMS technology, comprising: obtaining a deep brain stimulation macro electrode, the deep brain stimulation macro electrode comprising a non-metal support sleeve and at least one metal stimulation contact, the metal stimulation contacts being arranged on the surface of a first end of the non-metal support sleeve, the first end being an end penetrating into the deep brain; obtaining a flexible micro-nano electrode array based on the MEMS technology, the flexible micro-nano electrode array comprising a plurality of detection units arranged in parallel, each detection unit comprising a detection site and a wire, each detection site being used for detecting an electrical signal of the deep brain, and each wire being connected to the corresponding detection site; attaching the detection sites to the surface of the first end, and attaching each wire to the surface of the non-metal support sleeve or into the interior of the non-metal support sleeve in the direction of the non-metal support sleeve away from the first end.

[0014] The macro-micro combined electrode based on the MEMS technology and the preparation method thereof have at least the following beneficial effects compared with the prior art:

[0015] 1) The flexible electrode prepared by the MEMS technology can provide more detailed spatial resolution and has lower rigidity, can be more closely contacted with the DBS macro electrode and the brain tissue, improves the biocompatibility of the neural electrode, and can realize higher-precision neural electrophysiological signal acquisition and analysis, provides real-time feedback for neural regulation, and supports adaptive closed-loop treatment at the cell level.

[0016] 2) The deep brain DBS macro electrode and the flexible neural micro-nano electrode array based on the MEMS technology are combined on the same device, so that the deep brain DBS stimulation regulation and the recording of multi-channel high-temporal-spatial resolution neural information can be realized at the same time.

[0017] 3) The wires of the flexible micro-nano electrode array are attached to the surface of the non-metal support sleeve or into the interior of the non-metal support sleeve, so that the middle wire part of the flexible micro-nano electrode array can be prevented from being damaged in the surgical process. BRIEF DESCRIPTION OF DRAWINGS

[0018] The above content and other purposes, features and advantages of the application will be more apparent through the following description of the embodiments of the application with reference to the accompanying drawings, in which:

[0019] Figure 1 a cross-sectional view of the macro-micro combined electrode according to the first embodiment of the application is schematically shown;

[0020] Figure 2 a distribution diagram of the detection sites of the macro-micro combined electrode according to the embodiment of the application is schematically shown;

[0021] Figure 3A cross-sectional view of a macro-micro combined electrode according to a second embodiment of the present application is schematically shown;

[0022] Figure 4 A structural view of a macro-micro combined electrode according to the second embodiment of the present application is schematically shown;

[0023] Figure 5 A cross-sectional view of a macro-micro combined electrode according to a third embodiment of the present application is schematically shown;

[0024] Figure 6 A structural view of a macro-micro combined electrode according to the third embodiment of the present application is schematically shown;

[0025] Figure 7 A structural view of a flexible micro-nano electrode array based on MEMS technology according to an embodiment of the present application is schematically shown;

[0026] Figure 8 A flow chart of a preparation method of a macro-micro combined electrode according to an embodiment of the present application is schematically shown.

[0027] BRIEF DESCRIPTION OF DRAWINGS

[0028] 10: DBS macro electrode; 11: non-metal support sleeve; 12: metal stimulation contact; 20: flexible micro-nano electrode array; 21: detection site; 22: wire; 23: pad; 31: first slit; 32: second slit; 33: third slit; 40: extension circuit board; 71: base insulating layer; 72: signal transmission layer; 73: encapsulation insulating layer. DETAILED DESCRIPTION

[0029] The technical content of the present application will be more clearly and conveniently understood by introducing the preferred embodiments of the present application with reference to the accompanying drawings of the specification. The present application can be embodied in many different forms and the protection scope of the present application is not limited to the embodiments mentioned herein.

[0030] It should be noted that, in the accompanying drawings or the description of the specification, similar or identical parts are denoted by the same reference numerals. In the accompanying drawings, the embodiments are denoted in a simplified or convenient manner. Furthermore, the elements or implementation manners not shown or described in the accompanying drawings are forms known to those skilled in the art. In addition, although this document can provide examples of parameters including specific values, the parameters do not need to be exactly equal to the corresponding values, but can be approximately equal to the corresponding values within an acceptable error tolerance or design constraint.

[0031] In the case of using expressions such as "at least one of A, B, and C", it generally means all and only any of the following: "A but not B and C; B but not A and C; C but not A and B; A and B but not C; A and C but not B; B and C but not A; or A and B and C", unless otherwise specifically stated in the disclosure. In the case of using expressions such as "A, B, and C, etc.", it generally means all and only any of the following: "A, B, and C; A, B, and D; A, B, and E; A, C, and D; A, C, and E; A, D, and E; B, C, and D; B, C, and E; B, D, and E; C, D, and E; or A, B, C, D, and E", unless otherwise specifically stated in the disclosure.

[0032] Figure 1 A cross-sectional view of a macro-micro combined electrode according to a first embodiment of the present application is schematically shown, Figure 2 A distribution view of detection sites of a macro-micro combined electrode according to an embodiment of the present application is schematically shown.

[0033] As Figure 1 shown, the macro-micro combined electrode based on MEMS technology can include a DBS macro electrode 10 and a flexible micro-nano electrode array 20 based on MEMS technology. That is, the flexible micro-nano electrode array 20 is prepared based on a micro-electro-mechanical system (MEMS). The electrode device based on MEMS technology has the characteristics of high integration, miniaturization and multi-function, and can realize precise recording of high-density cell-level neural electrical activity on a single device. The flexible electrode prepared by using MEMS technology can provide more detailed spatial resolution and has lower rigidity, which can be more closely contacted with the electrode and the brain tissue, thereby improving the biocompatibility of the neural electrode. The microsystem chip based on MEMS technology can realize higher precision of neural electrophysiological signal acquisition and analysis, provide real-time feedback for neural regulation, and support adaptive closed-loop treatment at the cell level.

[0034] Referring back to Figure 1 , the DBS macro electrode 10 can include a non-metal support sleeve 11 and at least one metal stimulation contact 12. In other words, the number of the metal stimulation contact 12 can be one or more. When there are multiple metal stimulation contacts 12, the metal stimulation contacts 12 are arranged at intervals on the surface of the first end portion of the non-metal support sleeve 11, and the first end portion is the end portion that penetrates into the deep brain (not shown in the figure). The metal stimulation contact 12 can provide neural electrical stimulation at different positions when the DBS macro electrode 10 is implanted into the deep brain. For example, as Figure 1 shown, the metal stimulation contact 12 can be 8, and these metal stimulation contacts 12 are arranged at fixed intervals at the end portion of the non-metal support sleeve 11, so as to realize neural stimulation at 8 different positions.

[0035] As Figure 1 and Figure 2 shown, the flexible micro-nano electrode array 20 can include a plurality of detection units arranged in parallel. Each detection unit can include a detection site 21 and a lead wire 22.

[0036] The detection site 21 can be attached to the surface of the first end, and stably record the neural electrical signals at different stimulation sites after the metal stimulation contact 12 generates neural electrical stimulation. In some embodiments, the detection site 21 can be attached to the metal stimulation contact 12 at the first end. In other embodiments, the detection site 21 can also be attached to an area on the first end that does not cover the metal stimulation contact 12, such as the area between two adjacent metal stimulation contacts 12. Alternatively, some detection sites 21 can be attached to the metal stimulation contact 12, while others can be left unattached, depending on the specific circumstances.

[0037] In some embodiments, the detection site 21 can be attached to the surface of the first end using a medical biocompatible material. For example, the medical biocompatible material can be any one or a combination of polyethylene glycol, polylactic acid, polylactic acid-glycolic acid copolymer, silk fibroin, biocompatible UV adhesive, and MED 2000 medical silicone adhesive.

[0038] The neural electrical signals detected at different detection sites 21 can be the same neural electrical signal or different neural electrical signals. The neural electrical signals can be electrophysiological signals, dopamine electrochemical signals, or glutamate electrochemical signals. In some embodiments, detection sites 21 can be made of platinum black, PEDOT / PSS, PEDOT / DSS, PPy, carbon nanotubes, or IrO. x Materials such as hydrogels can be used to detect electrophysiological signals. Furthermore, Nafion can be modified at the detection site 21 to detect dopamine electrochemical signals, or biological protein molecules such as glutamate oxidase can be modified to detect glutamate electrochemical signals. Thus, different detection sites 21 can achieve the detection of a variety of different neural electrical signals.

[0039] like Figure 1 As shown, each wire 22 can extend along the direction away from the first end of the non-metallic support sleeve 11 in a manner that is attached to the surface of the non-metallic support sleeve 11. That is, in this embodiment, both the detection site 21 of the flexible micro / nano electrode array 20 and the wire 22 can be attached to the surface of the DBS macro electrode 10. Thus, fixing the wire 22 to the non-metallic support sleeve 11 can prevent damage to the middle wire portion of the flexible micro / nano electrode array 20 during surgery.

[0040] In some embodiments, each wire 22 may extend along the direction away from the first end of the non-metallic support sleeve 11 in a manner that passes through the interior of the non-metallic support sleeve 11. Figure 3 A schematic cross-sectional view of a macro-micro combined electrode according to a second embodiment of the present invention is shown. Figure 4The structure diagram of the macro-micro combined electrode according to the second embodiment of the present application is shown schematically. The second embodiment ( Figure 3 ) and the first embodiment ( Figure 1 ) mainly differ in the positional relationship between the wire 22 and the non-metal support sleeve 11, and the same elements are given the same numbers.

[0041] As shown in Figure 3 , the wire 22 is connected to the detection site 21 and passes through the inside of the non-metal support sleeve 11. As shown in Figure 4 , the wire 22 in the middle part of the non-metal support sleeve 11 is invisible from the outside. Compared with being attached to the surface of the non-metal support sleeve 11, the wire 22 passes through the inside of the non-metal support sleeve 11, reducing the risk of failure and falling of the attached material, and thus better avoiding damage to the middle wire part of the flexible micro-nano electrode array 20 during the operation.

[0042] As an example, the wire 22 can be passed into the inside of the non-metal support sleeve 11 by means of an opening. As shown in Figure 3 , the wire can be introduced into the inside of the non-metal support sleeve 11 by means of a first slit 31, which is located between the middle part and the first end part of the non-metal support sleeve 11. It can be understood that the size of the first slit 31 should not be too large to reduce the impact on the structure of the non-metal support sleeve 11. In order to facilitate the wire 22 to pass through the slit, a lead (such as a tungsten wire) can be used for guidance.

[0043] According to the macro-micro combined electrode of the above embodiment, the flexible neural micro-nano electrode array is embedded or attached to the surface of the deep brain DBS macro electrode, which ensures that the integrated macro-micro electrode can record high-resolution cell-level neural signals while achieving deep brain stimulation, which is helpful for closed-loop adaptive regulation of major brain diseases. The embedded flexible micro-nano electrode array can avoid damage to the middle wire part of the flexible micro-nano electrode array during the operation, so as to ensure the use effect of the macro-micro combined electrode.

[0044] Figure 5 The cross-sectional view of the macro-micro combined electrode according to the third embodiment of the present application is shown schematically, Figure 6 The structure diagram of the macro-micro combined electrode according to the third embodiment of the present application is shown schematically.

[0045] As shown in Figure 3 , Figure 5 and Figure 6As shown, in some embodiments, after the wire 22 passes through the first slit 31 into the interior of the non-metallic support sleeve 11, a second slit 32 can be formed in the middle of the non-metallic support sleeve 11 to lead the wire 22 out from the interior of the non-metallic support sleeve 11. The first slit 31 and the second slit 32 can be the same size. In specific operations, the wire 22 can be guided by a lead wire (e.g., a tungsten wire) to pass through the first slit 31 and then out through the second slit 32, thereby reducing the difficulty of the wire 22 passing through the slits 31 and 32.

[0046] like Figure 5 and Figure 6 As shown, in some embodiments, after the wire 22 is led out from the non-metallic support sleeve 11, it can be soldered to the pad 23, which can be located at the second end of the non-metallic support sleeve 11. The second end is opposite to the first end across a middle portion. The pad 23 can be soldered to an external extension circuit board 40. The extension circuit board 40 includes, but is not limited to, PCB and FPC, and the soldering method includes, but is not limited to, flip-chip soldering and anisotropic conductive bonding (ACF bonding). The extension circuit board 40 can be attached to the surface of the DBS macro electrode 10, or it can pass through the non-metallic support sleeve 11, just like the wire 22 in some embodiments.

[0047] like Figure 5 As shown, in some embodiments, at least one third slit 33 is formed on the first end of the non-metallic support sleeve 11. Each third slit 33 is located on the side of the first slit 31 away from the second slit 32 and at the edge of a different metal stimulation contact 12. Each wire 22 starts from the detection point 21 it is connected to, passes through the third slit 33, and then passes through the first slit 31 into the interior of the non-metallic support sleeve 11. For example, there can be three third slits 33 side by side. The wire can pass through the first third slit 33 into the interior of the non-metallic support sleeve 11, then through the second third slit 33 out to the outside of the non-metallic support sleeve 11, and then through the third third slit 33 into the interior of the non-metallic support sleeve 11. In this way, the detection points 21 at different positions can be distributed to different positions at the first end, and the wires 22 located at the first end of the non-metallic support sleeve 11 are located as close as possible to the interior of the non-metallic support sleeve 11 to avoid damage to the wires 22 at the first end during the operation.

[0048] Figure 7 A schematic diagram of a flexible micro / nano electrode array based on MEMS technology according to an embodiment of the present invention is shown.

[0049] like Figure 7As shown, the flexible micro-nano electrode array 20 can include a base insulating layer 71, at least one signal transmission layer 72, and a packaging insulating layer 73, and a plurality of detection units are located in the signal transmission layer 72. The material of the base insulating layer 71 and the packaging insulating layer 73 includes one or more of polyimide (PI), Parylene, epoxy (EP), polylactic acid (PLA), poly-lactic-glycolic acid copolymer, SU8, polyethylene terephthalate (PET), polydimethylsiloxane (PDMS), silica gel, and silicone rubber. The material of the signal transmission layer 72 includes any one or a combination of gold, platinum, iridium, titanium, magnesium, molybdenum, platinum-iridium alloy, titanium alloy, graphite, carbon nanotube, and PEDOT. As an example, the thickness of the flexible micro-nano electrode array 20 can range from 300 nm to 200 μm.

[0050] In some embodiments, the preparation process of the flexible micro-nano electrode array 20 can include the steps of depositing a base film, evaporating a metal layer, peeling, depositing an insulating film, windowing, deep etching, and electrode releasing.

[0051] As an example, the specific preparation process of the flexible micro-nano electrode array 20 can be as follows: before plating, the silicon wafer is cleaned by oxygen plasma etching; an insulating layer with a thickness of 200 nm-50 μm is deposited; a conductive layer of negative glue AZ5214 is used for photoetching to pattern the metal layer, including cleaning the surface of the insulating layer by oxygen plasma etching, spinning the glue AZ5214, pre-baking, mask exposure, reverse baking to denature the photoresist, general exposure, developing with NaOH solution, cleaning with deionized water, nitrogen blowing, and drying in an oven; the surface is cleaned by oxygen plasma etching and the metal layer is evaporated, and the metal layer material includes but is not limited to chromium, gold, silver, carbon, and other metals or organic materials; the excess metal is peeled off; an insulating layer with a thickness of 200 nm-50 μm is deposited; a positive glue AZ4620 is used for windowing photoetching to pattern, and oxygen plasma etching is used for deep etching to expose the detection sites; a positive glue AZ4903 is used as a mask for deep etching photoetching to release the electrodes, and the electrode preparation is completed after completely removing the photoresist and other impurities.

[0052] Based on the macro-micro combined electrode of the above embodiments, the present application further provides a preparation method of the macro-micro combined electrode. Figure 8 A flowchart of the preparation method of the macro-micro combined electrode according to an embodiment of the present application is schematically shown.

[0053] As shown in Figure 8 The preparation method of the macro-micro combined electrode can include steps S810-S830.

[0054] In step S810, a deep brain stimulation (DBS) macroelectrode 10 is obtained. The DBS macroelectrode 10 comprises a non-metal support sleeve 11 and at least one metal stimulation contact 12, which is arranged on the surface of the first end of the non-metal support sleeve 11, and the first end is the end that penetrates into the deep brain.

[0055] In step S820, a flexible micro-nano electrode array 20 based on MEMS technology is obtained. The flexible micro-nano electrode array 20 comprises a plurality of detection units arranged in parallel, each detection unit comprising a detection site 21 and a wire 22, each detection site 21 being used for detecting an electrical signal in the deep brain, and each wire 22 being connected to the corresponding detection site 21.

[0056] In step S830, the detection site 21 is attached to the surface of the first end, and each wire 22 is attached to the surface of the non-metal support sleeve 11 or penetrates into the interior of the non-metal support sleeve 11 in the direction of the non-metal support sleeve 11 away from the first end.

[0057] Some details of the preparation method of the macro-micro combined electrode can be referred to the content of the macro-micro combined electrode. It should be noted that the preparation method of the macro-micro combined electrode has the same or similar technical features and beneficial effects as the macro-micro combined electrode of the above-mentioned embodiments, and will not be described here.

[0058] All the above embodiments are only used to illustrate the technical solutions of the present application, but not to limit it; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that the technical solutions recorded in the foregoing embodiments can still be modified, or some technical features can be replaced by equivalents; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present application.

Claims

1. A macro-micro hybrid electrode based on MEMS technology, characterized in that, include: A deep brain stimulation macroelectrode includes a non-metallic support sleeve and at least one metallic stimulation contact. The metallic stimulation contacts are spaced apart on the surface of a first end of the non-metallic support sleeve, which is an end that penetrates deep into the brain. The metallic stimulation contacts are used to provide neural electrical stimulation at different locations when the deep brain stimulation macroelectrode is implanted deep into the brain. A flexible micro / nano electrode array based on MEMS technology includes multiple detection units arranged in parallel. Each detection unit includes a detection site and a wire. The detection sites are all attached to the surface of the first end. Each detection site is used to detect an electrical signal of a corresponding stimulation site in the deep brain after the metal stimulation contact generates the neural electrical stimulation. The electrical signal detected by the multiple detection sites includes one or more of electrophysiological signals, dopamine electrochemical signals, or glutamate electrochemical signals. Each wire is connected to a corresponding detection site. Each wire is attached to the surface of the non-metallic support sleeve or runs through the interior of the non-metallic support sleeve away from the first end. Extending in the direction of the portion, the non-metallic support sleeve includes a middle portion, with a first slit and a second slit formed at both ends of the middle portion, the first slit being located between the middle portion and the first end portion. Each of the wires enters the interior of the non-metallic support sleeve through the first slit and exits to the exterior of the non-metallic support sleeve through the second slit. At least one third slit is formed on the first end portion, each of the third slits being located on the side of the first slit away from the second slit and at the edge of a different metallic stimulation contact. Each wire, starting from the detection point to which it is connected, enters or exits through the third slit and then enters the interior of the non-metallic support sleeve through the first slit.

2. The macro-micro combined electrode according to claim 1, characterized in that, Each of the detection sites is attached to the metal stimulation contact.

3. The macro-micro combined electrode according to claim 1, characterized in that, The non-metallic support sleeve also includes a second end, and the middle portion is located between the first end and the second end; Each of the detection units also includes a pad, and each of the wires passes through the second slit and connects to the corresponding pad. The pad is soldered to the external extension circuit board and then attached to the surface of the second end.

4. The macro-micro combined electrode according to claim 1, characterized in that, Each of the detection sites is attached to the surface of the first end using a medical biocompatible material.

5. The macro-micro combined electrode according to claim 4, characterized in that, The medical biocompatible material includes any one or a combination of polyethylene glycol, polylactic acid, polylactic acid-glycolic acid copolymer, silk fibroin, biocompatible UV adhesive, and MED 2000 medical silicone adhesive.

6. The macro-micro combined electrode according to claim 1, characterized in that, The flexible micro / nano electrode array includes a substrate insulating layer, at least one signal transmission layer, and an encapsulation insulating layer stacked sequentially. Multiple detection units are located in the signal transmission layer. The substrate insulating layer and the encapsulation insulating layer are made of one or more of the following: polyimide, parylene, epoxy resin, polylactic acid, polylactic-co-hydroxyacetic acid copolymer, SU8, polyethylene terephthalate, polydimethylsiloxane, silicone, and silicone rubber. The signal transmission layer is made of any one or a combination of gold, platinum, iridium, titanium, magnesium, molybdenum, platinum-iridium alloy, titanium alloy, graphite, carbon nanotubes, and PEDOT.

7. A method for fabricating a macro-micro hybrid electrode based on MEMS technology, characterized in that, include: A deep brain stimulation macroelectrode is obtained, the deep brain stimulation macroelectrode includes a non-metallic support sleeve and at least one metallic stimulation contact, the metallic stimulation contact is arranged at intervals on the surface of a first end of the non-metallic support sleeve, the first end being an end that penetrates deep into the brain, the metallic stimulation contact being used to provide neural electrical stimulation at different locations when the deep brain stimulation macroelectrode is implanted deep into the brain. A flexible micro / nano electrode array based on MEMS technology is obtained. The flexible micro / nano electrode array includes multiple detection units arranged in parallel. Each detection unit includes a detection site and a wire. Each detection site is used to detect an electrical signal of a corresponding stimulation site in the deep brain after the nerve electrical stimulation is generated by the metal stimulation contact. The electrical signals detected by the multiple detection sites include one or more of electrophysiological signals, dopamine electrochemical signals, or glutamate electrochemical signals. Each wire is connected to the corresponding detection site. The detection site is attached to the surface of the first end, and each wire is attached to the surface of the non-metallic support sleeve or inserted into the interior of the non-metallic support sleeve along the direction away from the first end. Each of the wires is inserted into the interior of the non-metallic support sleeve through the first slit and exits into the exterior of the non-metallic support sleeve through the second slit. The non-metallic support sleeve includes a middle portion, with the first slit and the second slit formed at both ends of the middle portion. The first slit is located between the middle portion and the first end portion. At least one third slit is formed on the first end portion. Each third slit is located on the side of the first slit away from the second slit and at the edge of a different metallic stimulation contact. Each wire, starting from the detection point it is connected to, is inserted or exited through the third slit and then inserted into the interior of the non-metallic support sleeve through the first slit.

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