Double-piezoelectric sliding table control method and control circuit and double-piezoelectric sliding table
By using a dual piezoelectric slide control method and control circuit, the slider is moved by piezoelectric components that extend or retract synchronously, and kept stationary by opposing frictional forces. This solves the problem of accuracy and stability of probe driving in scanning tunneling microscopes and achieves high-precision and stable slider driving.
Patent Information
- Application Number
- CN202510917201.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-07-03
- Publication Date
- 2025-10-21
AI Technical Summary
The accuracy and stability of probe driving in existing scanning tunneling microscopes are low, mainly due to the non-parallel bonding direction between the piezoelectric ceramic and the slider and the inappropriate preload, which leads to changes in friction and affects the slider's motion performance.
A dual piezoelectric slide control method is adopted. By alternately executing sliding and homing steps, the slider is moved by the synchronous extension or contraction of the first and second piezoelectric components. In the homing step, the slider is kept stationary by using opposite and equal frictional forces. The voltage change rate is controlled by combining an operational amplifier circuit and a switching transistor.
It improves the accuracy and stability of the slider sliding process, reduces the impact of frictional changes on the slider position, and enhances the precision and stability of probe driving.
Smart Images
Figure CN120825080A_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the field of microscope technology, and in particular to a dual piezoelectric slide control method, a dual piezoelectric slide control circuit, and a dual piezoelectric slide. Background Art
[0002] In scanning tunneling microscopy (STM), the probe drive is crucial, as its performance directly impacts the microscope's imaging resolution, stability, and measurement accuracy. The probe is typically mounted on a slider, which is driven by the slider's movement. Piezoelectric ceramics, with their advantages such as nanometer-level displacement accuracy, fast response, compact structure, and ability to operate in extreme environments, are ideal for slider and probe drives in STMs.
[0003] Based on the driving principle of an inertial piezoelectric motor, a piezoelectric ceramic and a slider generate inertial telescopic motion when driven by a periodic sawtooth voltage waveform. While this structure is less difficult to manufacture and requires less precision than many other motor structures, it does have some shortcomings that need improvement.
[0004] For example, during installation, a preload is required to press the plastic block against the slider of the slide. However, this implementation encountered numerous challenges. First, the preload must be appropriate. Too little friction results in insufficient movement of the slider, while too much friction results in excessive friction, resulting in no relative motion between the slider and the piezoelectric ceramic during rapid motion. The slider then returns to its original position along with the piezoelectric ceramic, resulting in a macroscopically zero net displacement under prolonged actuation. Second, the piezoelectric ceramic, plastic block, and slider must be aligned. Otherwise, the plastic block and slider may become too tightly contacted or detached during motion. Furthermore, prolonged friction between the plastic block and slider can cause significant wear, altering the magnitude of the friction. These factors can severely impact the motion performance of the inertial piezoelectric motor, reducing the precision and stability of the probe drive in the scanning tunneling microscope. Summary of the Invention
[0005] In view of this, it is necessary to provide a dual piezoelectric slide control method and a dual piezoelectric slide control circuit, and a dual piezoelectric slide to solve the technical problems of low accuracy and stability of probe driving in scanning tunneling microscopes in the prior art.
[0006] In order to solve the above technical problems, in a first aspect, the present application provides a dual piezoelectric slide, comprising: A substrate, a slider, a first magnetic member, a second magnetic member, a first piezoelectric component, and a second piezoelectric component disposed on the substrate; The first magnetic member and the second magnetic member are magnetically attracted to opposite sides of the slider respectively; One end of the first piezoelectric component is fixed to the first magnetic element, and the other end is fixed to the base; one end of the second piezoelectric component is fixed to the second magnetic element, and the other end is fixed to the base; The first piezoelectric component and the second piezoelectric component are used to extend or contract along the sliding direction of the slider as the driving voltage changes. When the first piezoelectric component and the second piezoelectric component extend and / or contract, they drive the slider to move along the sliding direction.
[0007] In a second aspect, the present application provides a dual piezoelectric slide control method, which is applied to control the aforementioned dual piezoelectric slide. The dual piezoelectric slide control method includes: Alternately perform sliding steps and homing steps; The sliding step includes: applying the same driving voltage to the first piezoelectric component and the second piezoelectric component, wherein the driving voltage is a first rising edge voltage or a first falling edge voltage, so that the first piezoelectric component and the second piezoelectric component extend or contract simultaneously, thereby driving the slider to slide; The homing step includes: applying a constant driving voltage to the first piezoelectric component to keep the first piezoelectric component stationary, and applying a second rising edge voltage or a second falling edge voltage to the second piezoelectric component to extend or contract the second piezoelectric component; applying a constant driving voltage to the second piezoelectric component to keep the second piezoelectric component stationary, and applying the second rising edge voltage or the second falling edge voltage to the first piezoelectric component to extend or contract the first piezoelectric component.
[0008] In a possible embodiment, a first rising rate of the first rising edge voltage is smaller than a second rising rate of the second rising edge voltage, and a first falling rate of the first falling edge voltage is smaller than a second falling rate of the second falling edge voltage.
[0009] In a possible embodiment, applying the second rising edge voltage to the first piezoelectric component includes: A boost power supply is connected to increase the boost rate of the first rising edge voltage to form the second rising edge voltage.
[0010] In a possible embodiment, applying the second falling edge voltage to the first piezoelectric component includes: The first piezoelectric component is grounded to increase a decreasing rate of the first falling edge voltage to form the second falling edge voltage.
[0011] In a third aspect, the present application provides a dual piezoelectric slide control circuit for controlling the aforementioned dual piezoelectric slide, the dual piezoelectric slide control circuit comprising: a first control circuit and a second control circuit connected to the first piezoelectric component and the second piezoelectric component, respectively; The first control circuit includes a first operational amplifier circuit, the first operational amplifier circuit includes a first input pin and a first output pin, the first output pin is used to connect to the first piezoelectric component, and the first input pin is used to receive a driving voltage; The second control circuit includes a second operational amplifier circuit, the second operational amplifier circuit includes a second input pin and a second output pin, the second output pin is used to connect to the second piezoelectric component, and the second input pin is used to receive the driving voltage; When driving the slider to slide, the first operational amplifier circuit and the second operational amplifier circuit are used to apply the same driving voltage to the first piezoelectric component and the second piezoelectric component, where the driving voltage is a first rising edge voltage or a first falling edge voltage, so that the first piezoelectric component and the second piezoelectric component extend or contract simultaneously, thereby driving the slider to slide; When the second piezoelectric component is in its home position, the first operational amplifier circuit is further configured to apply a constant driving voltage to the first piezoelectric component to keep the first piezoelectric component stationary, and the second operational amplifier circuit is further configured to apply a second rising edge voltage or a second falling edge voltage to the second piezoelectric component to extend or contract the second piezoelectric component; When the first piezoelectric component is returned to its position, the first operational amplifier circuit is further used to apply a constant driving voltage to the second piezoelectric component to make the second piezoelectric component stationary, and the second operational amplifier circuit is further used to apply the second rising edge voltage or the second falling edge voltage to the first piezoelectric component to make the first piezoelectric component extend or contract.
[0012] In a possible embodiment, the first control circuit further includes: A boost circuit, the boost circuit comprising a boost power supply terminal and a boost switch circuit; The boost power supply terminal is used to connect a boost power supply, and the boost switch circuit is provided between the boost power supply terminal and the first output pin; The boost switch circuit is configured to connect the boost power supply terminal and the first output pin when the driving voltage is in the boost state, and disconnect the boost power supply terminal and the first output pin when the driving voltage is in the step-down state.
[0013] In a possible embodiment, the boost switching circuit includes a first switching transistor and a second switching transistor, the first switching transistor being arranged between the boost power supply terminal and the output pin, the second switching transistor being connected to the first switching transistor, and the second switching transistor being connected to the driving voltage; When the driving voltage is in the boost state, the second switch transistor is turned on to turn on the first switch transistor, and the boost power supply terminal is connected to the first output pin; When the driving voltage is in the step-down state, the second switching transistor is turned off to turn off the first switching transistor, and the boost power supply terminal and the first output pin are disconnected.
[0014] In a possible embodiment, the first control circuit further includes: A step-down circuit, comprising a step-down ground terminal and a step-down switch circuit; The step-down grounding terminal is used for grounding, and the step-down switch circuit is arranged between the step-down grounding terminal and the first output pin; The step-down switching circuit is configured to connect the step-down ground terminal and the first output pin when the driving voltage is in the step-down state, and disconnect the step-down ground terminal and the first output pin when the driving voltage is in the step-up state.
[0015] In a possible embodiment, the step-down circuit includes a third switching transistor, and the third switching transistor is arranged between the step-down ground terminal and the first output pin; When the driving voltage is in the boost state, the third switching transistor is disconnected to disconnect the step-down ground terminal and the first output pin; when the driving voltage is in the step-down state, the third switching transistor is connected to connect the step-down ground terminal and the first output pin.
[0016] The beneficial effects of the present application are as follows: in the dual piezoelectric slide control method, dual piezoelectric slide control circuit, and dual piezoelectric slide provided by the present application, in the sliding step, the first piezoelectric component and the second piezoelectric component are controlled to extend or contract simultaneously. At this time, the first magnetic component and the second magnetic component connected to the first piezoelectric component are driven to move in the extension or contraction direction of the first piezoelectric component and the second piezoelectric component, and the slider is simultaneously subjected to the dynamic friction force of the first magnetic component and the second magnetic component in the same direction, thereby driving the slider to slide; and in the return step, the first piezoelectric component is controlled to be stationary and the second piezoelectric component is extended or contracted. At this time, the slider is subjected to the static friction force of the first magnetic component and the dynamic friction force of the second magnetic component, and the two are in opposite directions and equal in size, so that the slider remains stationary and the second piezoelectric component returns to its position. Similarly, in the return step, In the step, controlling the second piezoelectric component to be stationary and the first piezoelectric component to extend or contract can keep the slider stationary while the first piezoelectric component returns to its position. After the first piezoelectric component and the second piezoelectric component return to their position, the sliding step can be executed again to drive the slider to slide. The driving of the slider can be achieved by alternately executing the sliding step and the returning step. Since the first piezoelectric component and the second piezoelectric component are controlled to extend or contract at the same time in the sliding step, the forces on both sides of the slider are balanced, and the sliding process is more stable, thereby improving the accuracy and stability of the slider sliding process. At the same time, since the slider is subjected to friction forces of equal magnitude and opposite directions from the first magnetic component and the second magnetic component in the returning step, the movement of the first magnetic component and the second magnetic component in the returning step has little effect on the position of the slider, further improving the accuracy and stability of the slider driving process. BRIEF DESCRIPTION OF THE DRAWINGS
[0017] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present application. For those skilled in the art, other drawings can be obtained based on these drawings without creative work.
[0018] Figure 1 A schematic diagram of the structure of a dual piezoelectric slide provided in an embodiment of the present application; Figure 2 A schematic flow chart of a dual piezoelectric slide control method provided in one embodiment of the present application; Figure 3 A schematic diagram of the movement process of the dual piezoelectric slide provided in an embodiment of the present application; Figure 4 A schematic diagram of the circuit structure of a dual piezoelectric slide control circuit provided in one embodiment of the present application; Figure 5 This is a waveform diagram of the driving voltage in the dual piezoelectric slide control circuit provided in one embodiment of the present application. DETAILED DESCRIPTION
[0019] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the embodiments described are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without making creative efforts are within the scope of protection of this application.
[0020] In the description of the embodiments of this application, unless otherwise specified, "plurality" means two or more. "And / or" describes the association relationship between associated objects, indicating that three relationships can exist. For example, "A and / or B" can mean: A exists alone, A and B exist simultaneously, or B exists alone.
[0021] The terms "first," "second," and so on, used in the embodiments of this application are for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, technical features designated as "first" or "second" may explicitly or implicitly include at least one such feature.
[0022] References herein to "embodiments" mean that a particular feature, structure, or characteristic described in connection with the embodiments may be included in at least one embodiment of the present application. The appearance of this phrase in various places in the specification does not necessarily refer to the same embodiment, nor does it constitute an independent or alternative embodiment that is mutually exclusive of other embodiments. It is understood, both explicitly and implicitly, by those skilled in the art that the embodiments described herein may be combined with other embodiments.
[0023] Please refer to Figure 1 The present application provides a dual piezoelectric slide, comprising: a substrate 100, a slider 200, a first magnetic member 300, a second magnetic member 400, a first piezoelectric component 500 and a second piezoelectric component 600 arranged on the substrate 100.
[0024] The first magnetic member 300 and the second magnetic member 400 are magnetically attracted to opposite sides of the slider 200, for example. Figure 1 As shown, they are arranged on the left and right sides of the slider 200. In some other embodiments of the present application, the first magnetic member 300 and the second magnetic member 400 can also be respectively arranged on the upper and lower sides of the slider 200.
[0025] Furthermore, in an embodiment of the present application, the magnetic attraction forces exerted by the first magnetic member 300 and the second magnetic member 400 on the slider 200 are equal. This ensures that the friction forces between the first magnetic member 300 and the second magnetic member 400 and the slider 200 are equal, thereby making the driving process of the slider 200 smoother. It is understood that in the present application, equality can specifically mean complete equality. However, in actual applications, due to the existence of errors, differences within a certain range (e.g., 1%, 2%, etc.) can be considered "equal" in the present application.
[0026] One end of the first piezoelectric component 500 is fixed to the first magnetic component 300, and the other end is fixed to the base. One end of the second piezoelectric component 600 is fixed to the second magnetic component 400, and the other end is fixed to the base. As the voltage applied to the first piezoelectric component 500 and the second piezoelectric component 600 changes, the first piezoelectric component 500 and the second piezoelectric component 600 can extend or contract along the sliding direction of the slider 200 according to the change of the driving voltage. When the first piezoelectric component 500 and the second piezoelectric component 600 extend and / or contract, they drive the first magnetic component 300 and the second magnetic component 400 fixed thereto to move along the sliding direction of the slider 200, and the slider 200 is driven to move along the sliding direction through the first magnetic component 300 and the second magnetic component 400.
[0027] To control the dual piezoelectric slide, please refer to Figure 2 The present application provides a dual piezoelectric slide control method, which may include the following steps: Step S101 : The first piezoelectric component 500 and the second piezoelectric component 600 are extended or contracted simultaneously to drive the slider 200 to slide.
[0028] In this step, the first piezoelectric component 500 and the second piezoelectric component 600 can be extended or contracted simultaneously by applying the same driving voltage to the first piezoelectric component 500 and the second piezoelectric component 600, and the slider can be driven to slide during the process of the first piezoelectric component 500 and the second piezoelectric component 600 extending or contracting simultaneously. Figure 5 The driving voltage is a serrated voltage that alternates over time, with a period of time when it is a rising voltage, i.e., a first rising voltage, and a period of time when it is a falling voltage, i.e., a first falling voltage. When the driving voltage is the first rising voltage, the first piezoelectric component 500 and the second piezoelectric component 600 extend simultaneously. When the driving voltage is the first falling voltage, the first piezoelectric component 500 and the second piezoelectric component 600 contract simultaneously.
[0029] Please refer to Figure 3When the slider 200 needs to be pushed to the left, a first rising edge voltage is applied to the first piezoelectric component 500 and the second piezoelectric component 600 at the same time, so that the first piezoelectric component 500 and the second piezoelectric component 600 extend at the same time. When the first piezoelectric component 500 and the second piezoelectric component 600 extend at the same time, the first magnetic component 300 and the second magnetic component 400 are pushed to move to the left, and a relative motion trend is generated between the first magnetic component 300 and the second magnetic component 400 and the slider 200. The slider 200 is simultaneously subjected to the leftward friction force of the first magnetic component 300 and the second magnetic component 400, thereby pushing the slider 200 to move to the left.
[0030] Similarly, when it is necessary to drive the slider 200 to move to the right, the first falling edge voltage is applied to the first piezoelectric component 500 and the second piezoelectric component 600 at the same time, so that the first piezoelectric component 500 and the second piezoelectric component 600 shrink at the same time. When the first piezoelectric component 500 and the second piezoelectric component 600 shrink at the same time, the first magnetic component 300 and the second magnetic component 400 are pulled to the right, and a relative movement trend is generated between the first magnetic component 300 and the second magnetic component 400 and the slider 200. The slider 200 is simultaneously subjected to the rightward friction force of the first magnetic component 300 and the second magnetic component 400, thereby driving the slider 200 to move to the right.
[0031] Step S102 : The first piezoelectric component 500 is kept stationary, and the second piezoelectric component 600 is extended or contracted.
[0032] In this step, please continue to refer to Figure 3 Since the extension length of the first piezoelectric component 500 and the second piezoelectric component 600 is limited, if the slider 200 needs to be moved to the left, the first piezoelectric component 500, the second piezoelectric component 600, the first magnetic component 300 and the second magnetic component 400 need to be moved to the right to the minimum contraction position. At this time, a constant driving voltage is applied to the first piezoelectric component 500 to control the voltage of the first piezoelectric component 500 to remain unchanged, so that the length of the first piezoelectric component 500 remains unchanged, the first piezoelectric component 500 is stationary, and the first magnetic component 300 is also stationary. A second falling edge voltage is applied to the second piezoelectric component 600 to de-energize the second piezoelectric component 600 and retract, pulling the second magnetic component 400 to move to the right. At this time, the slider 200 is subjected to the rightward dynamic friction force of the second magnetic component 400, and there is a tendency for the slider 200 and the first magnetic component 300 to move. At the same time, the slider 200 is subjected to the leftward static friction force of the first magnetic component 300, and the two are balanced with each other, so that the position of the slider 200 remains unchanged and remains stationary, and the second magnetic component 400 moves to the left and right to the minimum contraction position.
[0033] Similarly, in Figure 3In the opposite embodiment shown, if the slider is driven to move to the right in step S101, since the contraction length of the first piezoelectric component 500 and the second piezoelectric component 600 has a limit, if the slider 200 needs to be driven to move to the right, the first piezoelectric component 500, the second piezoelectric component 600, the first magnetic component 300 and the second magnetic component 400 need to be moved to the left to return to the maximum extension position. At this time, a constant driving voltage is applied to the first piezoelectric component 500 to control the voltage of the first piezoelectric component 500 to remain unchanged, so that the length of the first piezoelectric component 500 remains unchanged, the first piezoelectric component 500 is stationary, and the first magnetic component 300 is also stationary. A second rising edge voltage is applied to the second piezoelectric component 600 to electrically extend the second piezoelectric component 600, pushing the second magnetic component 400 to move to the left. At this time, the slider 200 is subjected to the leftward dynamic friction force of the second magnetic component 400, and there is a tendency for the slider 200 and the first magnetic component 300 to move. At the same time, the slider 200 is subjected to the rightward static friction force of the first magnetic component 300, and the two are balanced with each other, so that the position of the slider 200 remains unchanged and remains stationary, and the second magnetic component 400 moves to the left and returns to the maximum extension position.
[0034] Step S103 : The second piezoelectric component 600 is kept stationary, and the first piezoelectric component 500 is extended or contracted.
[0035] Similarly, please continue to refer to Figure 3 , a constant driving voltage is applied to the second piezoelectric component 600 to keep the voltage of the second piezoelectric component 600 unchanged, so that the length of the second piezoelectric component 600 remains unchanged, the second piezoelectric component 600 is stationary, and the second magnetic component 400 is also stationary. A second falling edge voltage is applied to the first piezoelectric component 500 to de-energize the first piezoelectric component 500 and retract, pulling the first magnetic component 300 to move to the right. At this time, the slider 200 is subjected to the rightward dynamic friction force of the first magnetic component 300, and there is a tendency for the slider 200 and the second magnetic component 400 to move. At the same time, the slider 200 is subjected to the leftward static friction force of the second magnetic component 400, and the two are balanced with each other, so that the position of the slider 200 remains unchanged and remains stationary, and the first magnetic component 300 moves to the left and right to the minimum contraction position.
[0036] Similarly, in Figure 3In the opposite embodiment shown, if the slider is driven to move to the right in step S101, since the contraction length of the second piezoelectric component 600 and the first piezoelectric component 500 is limited, if the slider 200 needs to be driven to move to the right, the second piezoelectric component 600, the first piezoelectric component 500, the second magnetic component 400 and the first magnetic component 300 need to be moved to the left to return to the maximum extension position. At this time, a constant driving voltage is applied to the second piezoelectric component 600 to control the voltage of the second piezoelectric component 600 unchanged, so that the length of the second piezoelectric component 600 remains unchanged, the second piezoelectric component 600 is stationary, and the second magnetic component 400 is also stationary. A second rising edge voltage is applied to the first piezoelectric component 500 to electrically extend the first piezoelectric component 500, pushing the first magnetic component 300 to move to the left. At this time, the slider 200 is subjected to the leftward dynamic friction force of the first magnetic component 300, and there is a tendency for the slider 200 and the second magnetic component 400 to move. At the same time, the slider 200 is subjected to the rightward static friction force of the second magnetic component 400, and the two are balanced with each other, so that the position of the slider 200 remains unchanged and remains stationary, and the first magnetic component 300 moves to the left and returns to the maximum extension position.
[0037] After step S103 is completed, the process returns to step S101.
[0038] Compared with the related art, in the dual piezoelectric slide control method provided in this embodiment, in the sliding step S101, by controlling the first piezoelectric component 500 and the second piezoelectric component 600 to extend or contract simultaneously, the first magnetic component 300 and the second magnetic component 400 connected to the first piezoelectric component 500 and the second piezoelectric component 600 are driven to move along the extension or contraction direction of the first piezoelectric component 500 and the second piezoelectric component 600, and the slider 200 is simultaneously subjected to the dynamic friction force of the first magnetic component 300 and the second magnetic component 400 in the same direction, thereby driving the slider 200 to slide; and in the homing steps S102 and S103, the first piezoelectric component 500 is controlled to be stationary and the second piezoelectric component 600 is extended or contracted. At this time, the slider 200 is subjected to the static friction force of the first magnetic component 300 and the dynamic friction force of the second magnetic component 400, which are opposite in direction and equal in magnitude, so that the slider 200 remains stationary and the second piezoelectric component 600 is returned to its position. Similarly, in the homing step In the step, controlling the second piezoelectric component 600 to be stationary and the first piezoelectric component 500 to extend or contract can keep the slider 200 stationary while the first piezoelectric component 500 returns to its position. After the first piezoelectric component 500 and the second piezoelectric component 600 return to their positions, the sliding step can be performed again to drive the slider 200 to slide. The sliding step and the returning step can be performed alternately to achieve the driving of the slider 200. Since the first piezoelectric component 500 and the second piezoelectric component 600 are controlled to extend or contract simultaneously in the sliding step, the forces on both sides of the slider 200 are balanced, and the sliding process is more stable, thereby improving the accuracy and stability of the sliding process of the slider 200. At the same time, since the slider 200 is subjected to the friction forces of equal magnitude and opposite directions from the first magnetic component 300 and the second magnetic component 400 in the returning step, the movement of the first magnetic component 300 and the second magnetic component 400 in the returning step has little effect on the position of the slider 200, further improving the accuracy and stability of the driving process of the slider 200.
[0039] Specifically, in an embodiment of the present application, the first rising edge voltage has a first rising edge rate smaller than the second rising edge voltage, and the first falling edge voltage has a first falling edge rate smaller than the second falling edge voltage.
[0040] In step S101, when the slider 200 needs to be moved, the first piezoelectric component 500 and the second piezoelectric component 600 are extended or retracted at a smaller first ramp-up rate or a smaller first ramp-down rate. This reduces the rate of extension or retraction of the first piezoelectric component 500 and the second piezoelectric component 600, increases the duration of friction, and allows the slider 200 to gradually accelerate and move along with the first magnetic component 300 and the second magnetic component 400. In steps S102 and S103, the first piezoelectric component 500 and the second piezoelectric component 600 are extended or retracted at a larger second ramp-up rate and a larger second ramp-down rate. This increases the rate of extension or retraction of the first piezoelectric component 500 and the second piezoelectric component 600 and reduces the duration of friction. This reduced duration of friction reduces the impulse applied to the slider 200, making it insufficient to cause significant displacement, and thus the slider 200 remains virtually stationary. This principle is commonly seen in everyday life, where a cup on a tablecloth remains in place when pulled quickly, while a slow pull causes the cup to move along with it.
[0041] In steps S102 and S103, increasing the voltage of the first piezoelectric component 500 at the second boost rate can specifically be accomplished by connecting a boost power supply and increasing the boost rate of the first rising edge voltage via the boost power supply to form the second rising edge voltage. Connecting the boost power supply can accelerate the boost process, shorten the relaxation time during the voltage rise process, and reduce the drive response time of the slider 200, resulting in a more precise drive process.
[0042] In steps S102 and S103, reducing the voltage of the first piezoelectric component 500 at the second voltage reduction rate can specifically be accomplished by grounding the first piezoelectric component 500 to increase the voltage reduction rate of the first falling edge voltage, thereby forming the second falling edge voltage. Grounding the first piezoelectric component 500 accelerates the voltage reduction process, shortens the relaxation time during the voltage reduction process, accelerates the return of the first magnetic element 300, minimizes the impact on the position of the slider 200, and further improves the accuracy of the slider 200's actuation.
[0043] In order to implement the above-mentioned dual piezoelectric slide control method, the embodiment of the present application further provides a dual piezoelectric slide control circuit, including a first control circuit and a second control circuit connected to the first piezoelectric component 500 and the second piezoelectric component 600 respectively. The circuit structures of the first control circuit and the second control circuit are the same, please refer to Figure 4The first control circuit includes a first operational amplifier circuit 401, which includes a first operational amplifier 4011 and a resistor connected to the operational amplifier 4011. The first operational amplifier 4011 includes a first input pin IN and a first output pin OUT. The first output pin OUT is used to connect to the first piezoelectric component 500, and the first input pin IN is used to receive a driving voltage V1. In addition, the first operational amplifier 4011 also includes a power pin V, which is used to connect to a power source to supply power to the first operational amplifier 4011.
[0044] Please refer to Figure 5 The driving voltage V1 includes a slow change stage and a sudden change stage. The voltage change rate of the driving voltage V1 in the slow change stage is smaller than the voltage change rate of the driving voltage V1 in the sudden change stage. In some embodiments of the present application, the driving voltage in the slow change stage can be used as the first rising edge voltage or the first falling edge voltage; and the driving voltage in the sudden change stage can be used as the second rising edge voltage or the second falling edge voltage. The driving voltage V1 is amplified by the operational amplifier circuit to control the extension or contraction of the first piezoelectric component 500. As the driving voltage V1 gradually increases, the first piezoelectric component 500 gradually extends. As the driving voltage V1 gradually decreases, the first piezoelectric component 500 gradually contracts.
[0045] Corresponding to step S101 in the aforementioned embodiment, when driving the slider to slide, the first operational amplifier circuit and the second operational amplifier circuit can simultaneously apply the same driving voltage to the first piezoelectric component 500 and the second piezoelectric component 600. The driving voltage is a first rising edge voltage or a first falling edge voltage, so that the first piezoelectric component 500 and the second piezoelectric component 600 extend or contract simultaneously, driving the slider to slide.
[0046] Corresponding to steps S102 and S103 in the aforementioned embodiment, when the second piezoelectric component 600 is in its home position, the first operational amplifier circuit applies a constant driving voltage to the first piezoelectric component 500 to keep the first piezoelectric component 500 stationary, and the second operational amplifier circuit applies a second rising edge voltage or a second falling edge voltage to the second piezoelectric component 600 to extend or contract the second piezoelectric component 600. When the first piezoelectric component 500 is in its home position, the first operational amplifier circuit applies a constant driving voltage to the second piezoelectric component 600 to keep the second piezoelectric component 600 stationary, and the second operational amplifier circuit applies a second rising edge voltage or a second falling edge voltage to the first piezoelectric component 500 to extend or contract the first piezoelectric component 500.
[0047] For further information, please refer to Figure 4The first control circuit may further include a boost circuit 402. The boost circuit 402 includes a boost power supply terminal and a boost switching circuit. The boost power supply terminal is used to connect to the boost power supply V2, and the boost switching circuit is provided between the boost power supply terminal and the first output pin OUT. The boost switching circuit is connected to a control signal V3. The control signal V3 connects the boost power supply terminal and the first output pin OUT when the driving voltage V1 is in a boost state (including a slow change phase and a sudden change phase), and disconnects the boost power supply terminal and the first output pin OUT when the driving voltage V1 is in a step-down state (including a slow change phase and a sudden change phase).
[0048] In which, the boost switching circuit includes a first switching transistor Q1 and a second switching transistor Q2, the first switching transistor Q1 is arranged between the boost power supply terminal and the first output pin OUT, the second switching transistor Q2 is connected to the first switching transistor Q1, and the second switching transistor Q2 is connected to the driving voltage V1; when the driving voltage V1 is in the boost state, the second switching transistor Q2 is turned on to turn on the first switching transistor Q1, and the boost power supply terminal 2042 and the first output pin OUT are connected; when the driving voltage V1 is in the step-down state, the second switching transistor Q2 is turned off to turn off the first switching transistor Q1, and the boost power supply terminal 2042 and the first output pin OUT are disconnected.
[0049] By connecting the boost power supply V2, the boost process can be made faster, the relaxation time of the voltage rising process can be shortened, the driving response time of the slider 200 can be shortened, and the driving process can be more precise.
[0050] Please continue to refer to Figure 4 The dual piezoelectric slide control circuit may further include: a step-down circuit 403, the step-down circuit 403 includes a step-down ground terminal and a step-down switch circuit; the step-down ground terminal is used for grounding, and the step-down switch circuit is arranged between the step-down ground terminal and the first output pin OUT; the step-down switch circuit is connected to a drive signal V4, and the drive signal V4 connects the step-down ground terminal and the first output pin OUT when the drive voltage V1 is in a step-down state, and disconnects the step-down ground terminal and the first output pin OUT when the drive voltage V1 is in a step-up state.
[0051] Specifically, the buck circuit includes a third switching transistor Q3, which is arranged between the buck ground terminal and the first output pin OUT; when the driving voltage V1 is in a boost state, the third switching transistor Q3 is disconnected so that the buck ground terminal and the first output pin OUT are disconnected; when the driving voltage V1 is in a buck state, the third switching transistor Q3 is connected so that the buck ground terminal and the first output pin OUT are connected.
[0052] By grounding the first piezoelectric component 500, the voltage reduction process can be accelerated, the relaxation time of the voltage reduction process can be shortened, the return speed of the first magnetic component 300 can be faster, the position of the slider 200 can be less affected, and the driving accuracy of the slider 200 can be further improved.
[0053] It is understandable that if Figure 5 The driving voltage shown includes a slow-changing stage and a sudden-changing stage, which is only a specific example of the driving circuit in the embodiment of the present application. In some other embodiments of the present application, the driving voltage may also include a boost stage and a buck stage with the same rate, and the boost rate and buck rate of the driving circuit are changed by the boost circuit and the buck circuit.
[0054] The above is a detailed introduction to the dual piezoelectric slide control method, control circuit, and dual piezoelectric slide provided in this application. Specific examples are used in this article to illustrate the principles and implementation methods of this application. The description of the above embodiments is only used to help understand the method of this application and its core idea; at the same time, for technical personnel in this field, based on the ideas of this application, there will be changes in the specific implementation methods and application scope. In summary, the content of this specification should not be understood as a limitation on this application.
Claims
1. A dual piezoelectric slide, characterized in that: include: A substrate, a slider, a first magnetic member, a second magnetic member, a first piezoelectric component, and a second piezoelectric component disposed on the substrate; The first magnetic member and the second magnetic member are magnetically attracted to opposite sides of the slider respectively; One end of the first piezoelectric component is fixed to the first magnetic element, and the other end is fixed to the base; one end of the second piezoelectric component is fixed to the second magnetic element, and the other end is fixed to the base; The first piezoelectric component and the second piezoelectric component are used to extend or contract along the sliding direction of the slider as the driving voltage changes. When the first piezoelectric component and the second piezoelectric component extend and / or contract, they drive the slider to move along the sliding direction.
2. A dual piezoelectric slide control method, characterized in that: Applied to controlling the dual piezoelectric slide as claimed in claim 1, the dual piezoelectric slide control method comprises: Alternately perform sliding steps and homing steps; The sliding step includes: applying the same driving voltage to the first piezoelectric component and the second piezoelectric component, wherein the driving voltage is a first rising edge voltage or a first falling edge voltage, so that the first piezoelectric component and the second piezoelectric component extend or contract simultaneously, thereby driving the slider to slide; The homing step includes: applying a constant driving voltage to the first piezoelectric component to keep the first piezoelectric component stationary, and applying a second rising edge voltage or a second falling edge voltage to the second piezoelectric component to extend or contract the second piezoelectric component; applying a constant driving voltage to the second piezoelectric component to keep the second piezoelectric component stationary, and applying the second rising edge voltage or the second falling edge voltage to the first piezoelectric component to extend or contract the first piezoelectric component.
3. The dual piezoelectric slide control method according to claim 2, characterized in that: A first rising rate of the first rising edge voltage is smaller than a second rising rate of the second rising edge voltage, and a first falling rate of the first falling edge voltage is smaller than a second falling rate of the second falling edge voltage.
4. The dual piezoelectric slide control method according to claim 3, characterized in that: The applying the second rising edge voltage to the first piezoelectric component comprises: A boost power supply is connected to increase the boost rate of the first rising edge voltage to form the second rising edge voltage.
5. The dual piezoelectric slide control method according to claim 3, characterized in that: Applying the second falling edge voltage to the first piezoelectric component includes: The first piezoelectric component is grounded to increase a decreasing rate of the first falling edge voltage to form the second falling edge voltage.
6. A dual piezoelectric slide control circuit, characterized in that: Applicable to controlling the dual piezoelectric slide as claimed in claim 1, the dual piezoelectric slide control circuit comprising: a first control circuit and a second control circuit connected to the first piezoelectric component and the second piezoelectric component, respectively; The first control circuit includes a first operational amplifier circuit, the first operational amplifier circuit includes a first input pin and a first output pin, the first output pin is used to connect to the first piezoelectric component, and the first input pin is used to receive a driving voltage; The second control circuit includes a second operational amplifier circuit, the second operational amplifier circuit includes a second input pin and a second output pin, the second output pin is used to connect to the second piezoelectric component, and the second input pin is used to receive the driving voltage; When driving the slider to slide, the first operational amplifier circuit and the second operational amplifier circuit are used to apply the same driving voltage to the first piezoelectric component and the second piezoelectric component, where the driving voltage is a first rising edge voltage or a first falling edge voltage, so that the first piezoelectric component and the second piezoelectric component extend or contract simultaneously, thereby driving the slider to slide; When the second piezoelectric component is in its home position, the first operational amplifier circuit is further configured to apply a constant driving voltage to the first piezoelectric component to keep the first piezoelectric component stationary, and the second operational amplifier circuit is further configured to apply a second rising edge voltage or a second falling edge voltage to the second piezoelectric component to extend or contract the second piezoelectric component; When the first piezoelectric component is returned to its position, the first operational amplifier circuit is further used to apply a constant driving voltage to the second piezoelectric component to make the second piezoelectric component stationary, and the second operational amplifier circuit is further used to apply the second rising edge voltage or the second falling edge voltage to the first piezoelectric component to make the first piezoelectric component extend or contract.
7. The dual piezoelectric slide control circuit according to claim 6, characterized in that: The first control circuit further includes: A boost circuit, the boost circuit comprising a boost power supply terminal and a boost switch circuit; The boost power supply terminal is used to connect a boost power supply, and the boost switch circuit is arranged between the boost power supply terminal and the first output pin; The boost switch circuit is used to connect the boost power supply terminal and the first output pin when the driving voltage is in a boost state, and disconnect the boost power supply terminal and the first output pin when the driving voltage is in a step-down state.
8. The dual piezoelectric slide control circuit according to claim 7, characterized in that: The boost switching circuit includes a first switching transistor and a second switching transistor, the first switching transistor being arranged between the boost power supply terminal and the first output pin, the second switching transistor being connected to the first switching transistor, and the second switching transistor being connected to the driving voltage; When the driving voltage is in a boosted state, the second switch transistor is turned on to turn on the first switch transistor, and the boost power supply terminal is connected to the first output pin; When the driving voltage is in a step-down state, the second switching transistor is turned off to turn off the first switching transistor, and the boost power supply terminal and the first output pin are disconnected.
9. The dual piezoelectric slide control circuit according to claim 6, characterized in that: Also includes: A step-down circuit, comprising a step-down ground terminal and a step-down switch circuit; The step-down grounding terminal is used for grounding, and the step-down switch circuit is arranged between the step-down grounding terminal and the first output pin; The step-down switching circuit is used to connect the step-down ground terminal and the first output pin when the driving voltage is in a step-down state, and to disconnect the step-down ground terminal and the first output pin when the driving voltage is in a step-up state.
10. The dual piezoelectric slide control circuit according to claim 9, characterized in that: The step-down circuit includes a third switch transistor, and the third switch transistor is arranged between the step-down ground terminal and the first output pin; When the driving voltage is in a boost state, the third switch transistor is turned off to disconnect the step-down ground terminal and the first output pin; when the driving voltage is in a step-down state, the third switch transistor is turned on to connect the step-down ground terminal and the first output pin.