Shock absorber and damping system

Abstract

The application relates to a shock absorber and a shock absorbing system, and belongs to the technical field of precise shock absorbing. The shock absorber comprises a bottom plate and a top plate which are arranged in a relative interval, a shock absorbing cavity arranged between the bottom plate and the top plate, a horizontal positive stiffness component and a vertical positive stiffness component. The top plate is connected with the shock absorbing cavity in a movable mode along the depth direction of the shock absorbing cavity. The shock absorbing cavity is arranged in an interval with the bottom plate. The vertical positive stiffness component connects the shock absorbing cavity and the bottom plate together and is used for providing the vertical positive stiffness and horizontally damping the top plate. The horizontal positive stiffness component is located outside the shock absorbing cavity and is connected with the top plate and the bottom plate and is used for providing the horizontal positive stiffness, thereby realizing the decoupling of the horizontal stiffness and the vertical stiffness of the shock absorber, ensuring the stable positive stiffness in the horizontal direction, effectively isolating the interference of the vertical vibration on the horizontal damping performance, and greatly improving the overall performance of the shock absorber.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of precision damping, in particular to a damper and a damping system. BACKGROUND

[0002] With the continuous improvement of the precision of super-precision machining equipment and measuring instruments, the vibration of the working environment tends to be of smaller amplitude and lower frequency, and thus more stringent requirements are put forward for the damping performance of the damping table. The traditional passive vibration isolation technology is composed of mass-spring-damper, and due to the inherent contradiction between low-frequency vibration transmissibility and high-frequency vibration attenuation rate, it cannot meet the damping requirements of super-precision equipment. Therefore, it is urgent to develop new technologies and methods to improve this situation.

[0003] Active damping is an important technology to solve the above problems. An active damping system is generally composed of passive vibration isolation elements and active actuators, such as an active damper composed of an air spring and a voice coil motor in parallel, an active damper composed of a vibration isolation rubber and a piezoelectric ceramic, an active damper composed of an air spring and a pneumatic actuator, etc. Such active dampers can realize the functions of low-frequency suppression and high-frequency isolation.

[0004] However, the horizontal stiffness and vertical stiffness of the above active dampers are obviously coupled, which is not conducive to improving the overall damping performance of the damper. SUMMARY

[0005] The purpose of the present application is to provide a damper and a damping system to realize the decoupling of the horizontal stiffness and the vertical stiffness of the damper, thereby improving the overall damping performance of the damper.

[0006] The damper provided by the embodiments of the present application comprises: a damper characterized by comprising a bottom plate and a top plate arranged in relative spacing, a damping cavity arranged between the bottom plate and the top plate, a horizontal positive stiffness component and a vertical positive stiffness component; wherein the top plate is connected with the damping cavity in a manner that it can move along the depth direction of the damping cavity, the damping cavity is arranged in spacing with the bottom plate, and the vertical positive stiffness component connects the damping cavity and the bottom plate together and is used for providing vertical positive stiffness and horizontally damping the top plate; the horizontal positive stiffness component is located outside the damping cavity and is connected with the top plate and the bottom plate, and is used for providing horizontal positive stiffness.

[0007] The horizontal negative stiffness assembly is located outside the damping cavity and is configured to provide horizontal negative stiffness; and when the top plate moves relative to the bottom plate in the horizontal direction, the horizontal negative stiffness assembly generates an action force applied to the top plate, and the magnitude of the action force is less than that of the action force generated by the horizontal positive stiffness assembly.

[0008] The horizontal negative stiffness assembly comprises a first magnet group and a second magnet group, wherein the first magnet group is arranged on a surface of the damping cavity facing the bottom plate, the second magnet group is arranged on a region of the bottom plate facing the damping cavity and corresponding to the first magnet group, and each first magnet in the first magnet group is arranged in opposite spacing correspondence with each second magnet in the second magnet group.

[0009] The bottom plate is provided with a through hole penetrating the bottom plate at a region of the bottom plate facing the damping cavity and corresponding to the first magnet group; the horizontal negative stiffness assembly further comprises a magnet base, at least a part of the magnet base is accommodated in the through hole and connected with the bottom plate, the magnet base is arranged in opposite spacing with the damping cavity, and the second magnet group is arranged on a surface of the magnet base facing the damping cavity; and the position of the magnet base in the depth direction of the through hole is adjustable to realize the second magnet group away from or close to the first magnet group.

[0010] The vertical negative stiffness assembly is located inside the damping cavity and is configured to provide vertical negative stiffness; and when the top plate moves relative to the bottom plate in the vertical direction, the vertical negative stiffness assembly generates an action force applied to the top plate, and the magnitude of the action force is less than that of the action force generated by the vertical positive stiffness assembly.

[0011] The vertical negative stiffness assembly comprises a stator magnet and a mover magnet arranged in opposite spacing in the horizontal direction, wherein the stator magnet is connected with the inner bottom wall surface of the damping cavity, and the mover magnet is connected with the top plate.

[0012] The vertical negative stiffness assembly further comprises a first leaf spring and a second leaf spring, the first leaf spring and the second leaf spring are arranged parallel to a horizontal plane, and the first leaf spring is arranged opposite to the second leaf spring, a first end of the first leaf spring along a horizontal direction is connected to an inner bottom wall surface of the damping cavity, and a second end of the first leaf spring along the horizontal direction is connected to a bottom end of the mover magnet; a first end of the second leaf spring along the horizontal direction is connected to the inner bottom wall surface of the damping cavity, and a second end of the second leaf spring along the horizontal direction is connected to a top end of the mover magnet.

[0013] The vertical negative stiffness assembly further comprises a lower fixed block, a first leaf spring outer ring pad, a stator magnetic ring outer frame and a second leaf spring outer ring pad, and on the inner bottom wall surface of the damping cavity, the lower fixed block, the first leaf spring, the first leaf spring outer ring pad, the stator magnetic ring outer frame, the second leaf spring outer ring pad and the second leaf spring are sequentially stacked; the lower fixed block is connected to the inner bottom wall surface of the damping cavity, a first end of the first leaf spring along a horizontal direction is connected between the lower fixed block and the first leaf spring outer ring pad, the stator magnetic ring outer frame is connected between the first leaf spring outer ring pad and the second leaf spring outer ring pad, and a first end of the second leaf spring along the horizontal direction is connected to the second leaf spring outer ring pad; the stator magnet is arranged on the stator magnetic ring outer frame.

[0014] The vertical positive stiffness assembly comprises a support rod group, the support rod group comprises a plurality of support rods, the plurality of support rods are arranged in parallel and spaced apart, and the support rods are arranged vertically, and bottom ends and top ends of the support rods are respectively connected to the bottom plate and the damping cavity.

[0015] The side wall of the damping cavity is provided with a plurality of accommodation grooves facing the end surface of the bottom plate, the accommodation grooves at least partially penetrate the side wall of the damping cavity, and the plurality of accommodation grooves correspond to the plurality of support rods respectively, one end of the support rod is fixed to the bottom plate, the other end of the support rod extends into the corresponding accommodation groove, and is connected to the bottom of the corresponding accommodation groove.

[0016] The horizontal positive stiffness assembly comprises a spring, a spring mounting bracket and a spring fixing assembly, the spring mounting bracket is fixed to the bottom plate, the spring is arranged horizontally, a first end of the spring is fixed to the spring mounting bracket, and a second end of the spring is fixed to the top plate through the spring fixing assembly.

[0017] The horizontal positive stiffness assembly further comprises a rigid rope, a first end of the rigid rope is fixed on the spring mounting bracket, a second end of the rigid rope extends horizontally from the spring mounting bracket and is connected with the first end of the spring, so that the first end of the spring is fixed on the spring mounting bracket through the rigid rope, and the length of the second end of the rigid rope extending horizontally from the spring mounting bracket is adjustable.

[0018] The number of the horizontal positive stiffness assemblies is at least two, the at least two horizontal positive stiffness assemblies comprise at least one first horizontal positive stiffness assembly and at least one second horizontal positive stiffness assembly, the first horizontal positive stiffness assembly is configured to generate a first horizontal action force applied to the top plate when the top plate moves relative to the bottom plate along a first horizontal direction, the direction of the first horizontal action force is opposite to the direction of the top plate moving relative to the bottom plate along the first horizontal direction, and the second horizontal positive stiffness assembly is configured to generate a second horizontal action force applied to the top plate when the top plate moves relative to the bottom plate along a second horizontal direction, the direction of the second horizontal action force is opposite to the direction of the top plate moving relative to the bottom plate along the second horizontal direction, and the first horizontal direction is perpendicular to the second horizontal direction.

[0019] The damping cavity is open at one end along the vertical direction and is closed at the other end, and the opening of the damping cavity is opposite to the top plate, the damper further comprises a cover plate between the bottom plate and the top plate, the cover plate is connected with the top plate and is arranged opposite to the inner bottom wall surface of the damping cavity in a spaced manner, and the cover plate is connected with the side wall of the damping cavity in a movable manner along the depth direction of the damping cavity and forms a sealed cavity with the damping cavity.

[0020] The damper further comprises a sensor assembly and a motor assembly arranged between the bottom plate and the top plate, the sensor assembly is configured to detect the movement of the top plate, the motor assembly comprises a stator and a rotor, and one of the stator and the rotor is connected with the bottom plate and the other is connected with the top plate.

[0021] The damping system comprises the damper.

[0022] The application has the beneficial effects that: the damper and the damping system provided by the application, the damper is applied to the damping system, by designing the horizontal positive stiffness component for providing horizontal positive stiffness and the vertical positive stiffness component for providing vertical positive stiffness in the damper into two independent structures, the decoupling of the horizontal stiffness and the vertical stiffness of the damper is realized, which makes the damper be able to more flexibly cope with vibration in different directions, and improves the damping effect and stability. Further, by the ingenious position layout of the horizontal positive stiffness component and the vertical positive stiffness component, not only the stable positive stiffness in the horizontal direction is ensured, but also the interference of the vertical vibration on the horizontal damping performance is effectively isolated, so that the overall performance of the damper is greatly improved. BRIEF DESCRIPTION OF DRAWINGS

[0023] The technical scheme and other beneficial effects of the application will be apparent through the following detailed description of the specific embodiments of the application combined with the drawings.

[0024] Figure 1 is a perspective structural schematic diagram of the damper provided by the embodiment of the application;

[0025] Figure 2 is a side structural schematic diagram of the damper provided by the embodiment of the application;

[0026] Figure 3 is another perspective structural schematic diagram of the damper provided by the embodiment of the application;

[0027] Figure 4 is another perspective structural schematic diagram of the damper provided by the embodiment of the application;

[0028] Figure 5 is a cross-sectional structural schematic diagram of the damper provided by the embodiment of the application;

[0029] Figure 6 is a bottom structural schematic diagram of the damper provided by the embodiment of the application;

[0030] Figure 7 is a structural schematic diagram of the rigid rope and the rotating shaft pin connection provided by the embodiment of the application;

[0031] Figure 8 is a perspective structural schematic diagram of the partial structure of the damper including the damping cavity in the transparent display state of the damping cavity provided by the embodiment of the application;

[0032] Figure 9 is another perspective structural schematic diagram of the partial structure of the damper including the damping cavity in the transparent display state of the damping cavity provided by the embodiment of the application;

[0033] Figure 10is a perspective structural schematic view of a part structure of a shock absorber provided by an embodiment of the present application;

[0034] Figure 11 is a perspective structural schematic view of another part structure of a shock absorber provided by an embodiment of the present application;

[0035] Figure 12 is a top structural schematic view of a first leaf spring and a second leaf spring provided by an embodiment of the present application;

[0036] Figure 13 is a perspective structural schematic view of a part structure of a vertical negative stiffness assembly provided by an embodiment of the present application;

[0037] Figure 14 is a perspective structural schematic view of another part structure of a vertical negative stiffness assembly provided by an embodiment of the present application;

[0038] Reference signs:

[0039] 10 - damper; 100 - damping chamber; 100A - sealed chamber; 101 - side wall; 102 - inner bottom wall surface; 103 - accommodation groove; 104 - first accommodation groove; 11 - bottom plate; 111 - through hole; 12 - top plate; 15 - cover plate; 151 - first protruding portion; 31 - sealing film; 32 - outer pressure piece of sealing film; 33 - inner pressure piece of sealing film; 41 - support rod top pressing block; 42 - support rod bottom pressing block; 43 - stop block; 16 - sensor assembly; 161 - speed sensor; 162 - displacement sensor; 17 - first motor assembly; 171 - first stator; 172 - first rotor; 173 - first motor support; 18 - second motor assembly; 181 - second stator; 182 - second rotor; 183 - second motor support; 200 - horizontal positive stiffness assembly; 200A - first horizontal positive stiffness assembly; 200B - second horizontal positive stiffness assembly; 201 - spring; 202 - spring mounting support; 2021 - connecting plate; 203 - spring fixing assembly; 2031 - spring fixing block; 2032 - spring clamping block; 204 - rigid rope; 205 - rotating shaft pin; 206 - locking component; 300 - vertical positive stiffness assembly; 300A - support rod group; 301 - support rod / first support rod; 302 - support rod / second support rod; 303 - support rod / third support rod; 304 - support rod / fourth support rod; 400 - horizontal negative stiffness assembly; 401 - first magnet group; 4011 - first magnet; 402 - second magnet group; 4021 - second magnet; 403 - magnet base; 4031 - second accommodation groove; 404 - flat head set screw; 405 - locking screw; 500 - vertical negative stiffness assembly; 501 - stator magnet / outer magnetic ring group; 5011 - outer magnetic ring; 5012 - outer magnetic ring spacer; 502 - rotor magnet / inner magnetic ring group; 503 - first leaf spring; 504 - second leaf spring; 505 - lower fixing block; 506 - first leaf spring outer ring spacer; 507 - stator magnetic ring outer frame; 508 - second leaf spring outer ring spacer; 509 - inner magnetic ring column; 510 - connecting block; 511 - first spacer; 512 - second spacer; 513 - lower limit block; K1 - scale; F1 - stepped surface. DETAILED DESCRIPTION

[0040] In order to make the purpose, technical scheme and advantages of the present application more clear, the present application is further described in detail below in combination with the drawings and examples. The examples of the examples are shown in the drawings, wherein the same or similar reference numerals represent the same or similar elements or elements with the same or similar functions throughout. The examples described below by referring to the drawings are exemplary and are only used to explain the present application, and cannot be understood as limiting the present application. In addition, it should be understood that the specific examples described herein are only used to explain the present application and not to limit the present application.

[0041] In the following description, a second component being connected to a first component can include embodiments in which the second component is directly connected to the first component and embodiments in which the second component is connected to the first component by way of an additional component such that the second component is not directly connected to the first component.

[0042] In the following description, a second component being connected to a first component can include embodiments in which the second component is directly connected to the first component and embodiments in which the second component is connected to the first component by way of an additional component such that the second component is not directly connected to the first component.

[0043] In describing the structure of the components, when a layer, a region is referred to as being "on" or "above" another layer, another region, it can mean directly on or above another layer, another region, or further including another layer or region therebetween. Also, if the components are flipped, the layer, the region will be "under" or "below" another layer, another region. Furthermore, features, structures or characteristics described below can be combined in any suitable manner in one or more embodiments.

[0044] In addition, the directional terms mentioned in the embodiments of the present application, such as [up], [down], [front], [back], [left], [right], [inward], [outward], [lateral] and the like, are only the directions of the reference drawings. Therefore, the directional terms used are used to illustrate and understand the embodiments of the present application, and not to limit the embodiments of the present application. In each of the drawings, similar elements are denoted by the same reference numerals. For the sake of clarity, each part in the drawings is not drawn to scale. In addition, some related parts can not be shown in the drawings.

[0045] The following detailed description will be made in conjunction with specific embodiments. It should be noted that the sequence of the following embodiments is not intended to limit the preferred order of the embodiments.

[0046] Please refer to Figures 1 to 6 , Figure 1 is a perspective view of a shock absorber provided by an embodiment of the present application, Figure 2 is a side view of a shock absorber provided by an embodiment of the present application, Figure 3 is another perspective view of a shock absorber provided by an embodiment of the present application, Figure 4 is another perspective view of a shock absorber provided by an embodiment of the present application, Figure 5 is a cross-sectional view of a shock absorber provided by an embodiment of the present application, Figure 6 is a bottom view of a shock absorber provided by an embodiment of the present application. As Figures 1 to 6As shown, the damper 10 includes a bottom plate 11 and a top plate 12 arranged in opposite directions, and a damping cavity 100, a horizontal positive stiffness component 200 and a vertical positive stiffness component 300 arranged between the bottom plate 11 and the top plate 12. The top plate 12 is connected with the damping cavity 100 in a manner that the top plate 12 can move along the depth direction of the damping cavity 100. The damping cavity 100 is arranged in a spaced manner with the bottom plate 11. The vertical positive stiffness component 300 connects the damping cavity 100 and the bottom plate 11 together, and is used to provide vertical positive stiffness and to horizontally damp the top plate 12. The horizontal positive stiffness component 200 is arranged outside the damping cavity 100, and is connected with the top plate 12 and the bottom plate 11, and is used to provide horizontal positive stiffness.

[0047] It should be noted that the vertical direction in the embodiments of the present application can refer to any direction perpendicular to the horizontal plane, and the horizontal direction in the embodiments of the present application can refer to any direction parallel to the horizontal plane. Specifically, the depth direction of the damping cavity 100 can be parallel to the vertical direction.

[0048] In the embodiments, as shown in Figure 5 In the damper 10, the damping cavity 100 can provide a sealed cavity 100A, which can be directly the damping cavity 100, or can be formed after the damping cavity 100 is sealed. Specifically, the air pressure in the sealed cavity 100A is adjustable, and when the top plate 12 moves along the depth direction of the damping cavity 100, the size of the sealed cavity 100A along the vertical direction can be reduced to increase the air pressure in the sealed cavity 100A, or the size of the sealed cavity 100A along the vertical direction can be increased to reduce the air pressure in the sealed cavity 100A, so that the sealed cavity 100A can achieve the function of vertically damping the top plate 12.

[0049] Specifically, the damper 10 can have an operating state and a non-operating state. When the damper 10 is in the operating state, the sealed cavity 100A is filled with gas, so that the top plate 12 is floated under the action of the air pressure in the sealed cavity 100A. When the top plate 12 is in the floated state, if the top plate 12 is disturbed vertically, the top plate 12 will move along the depth direction of the damping cavity 100, so as to achieve the function of vertically damping the top plate 12 by changing the air pressure in the sealed cavity 100A.

[0050] When the damper 10 is in the non-operating state, the air pressure in the sealed cavity 100A is insufficient to float the top plate 12, and at this time the top plate 12 is in a landed state and is supported by other structures in the damper 10.

[0051] In the embodiments, as shown in Figure 2As shown, in the above damper 10, the vertical positive stiffness component 300 can provide vertical support to the damping cavity 100 to achieve the lifting of the damping cavity 100, so that the damping cavity 100 is suspended above the bottom plate 11. At the same time, the vertical positive stiffness component 300 also has the function of horizontally damping the top plate 12. Specifically, when the top plate 12 is disturbed horizontally when the damper 10 is in the working state, the damping cavity 100 will vibrate horizontally synchronously with the top plate 12, which makes the vertical positive stiffness component 300 connected with the damping cavity 100 can absorb and consume the energy of horizontal vibration, thereby effectively reducing the amplitude of the top plate 12 in the horizontal direction, and improving the horizontal damping performance of the damper 10. In addition, the horizontal damping function of the vertical positive stiffness component 300 is independent of the vertical positive stiffness it provides, which means that the vertical positive stiffness component 300 can effectively damp the top plate 12 in the horizontal direction without affecting the stability of the vertical support.

[0052] In the present embodiment, when the top plate 12 moves horizontally relative to the bottom plate 11 when the damper 10 is in the working state, the horizontal positive stiffness component 200 can generate a first action force applied to the top plate 12, the direction of the first action force is opposite to the direction of the top plate 12 moving horizontally relative to the bottom plate 11, and the size of the first action force is proportional to the size of the displacement of the top plate 12 moving horizontally relative to the bottom plate 11, thereby realizing the horizontal positive stiffness component 200 providing horizontal positive stiffness in the damper 10.

[0053] When the top plate 12 moves vertically relative to the bottom plate 11 when the damper 10 is in the working state, the vertical positive stiffness component 300 can generate a second action force applied to the top plate 12, the direction of the second action force is opposite to the direction of the top plate 12 moving vertically relative to the bottom plate 11, and the size of the second action force is proportional to the size of the displacement of the top plate 12 moving vertically relative to the bottom plate 11, thereby realizing the vertical positive stiffness component 300 providing vertical positive stiffness in the damper 10.

[0054] It should be noted that in the present embodiment, by designing the horizontal positive stiffness component 200 for providing horizontal positive stiffness and the vertical positive stiffness component 300 for providing vertical positive stiffness in the damper 10 as two independent structures, the decoupling of the horizontal stiffness and the vertical stiffness of the damper 10 is realized, which makes the damper 10 more flexible to deal with vibrations in different directions, and improves the damping effect and stability. Further, through the ingenious position layout of the horizontal positive stiffness component 200 and the vertical positive stiffness component 300, the damper 10 not only ensures to provide stable positive stiffness in the horizontal direction, but also effectively isolates the interference of vertical vibration on the horizontal damping performance, thereby greatly improving the overall performance of the damper 10.

[0055] In some embodiments, as shown in Figure 5 In some embodiments, as shown in

[0056] In some embodiments, as shown in Figure 5 In some embodiments, as shown in

[0057] In some embodiments, as shown in Figure 5 In some embodiments, as shown in

[0058] The sealing membrane 31 may be made of a flexible material to ensure that the cover plate 15 can move along the depth direction of the vibration damping cavity 100.

[0059] In some embodiments, such as Figure 1 and Figure 2 As shown, the horizontal stiffness component 200 may include a spring 201, a spring mounting bracket 202, and a spring fixing component 203. The spring 201 is arranged horizontally, meaning its length direction is parallel to the horizontal plane. One end of the spring 201 along its length direction (hereinafter referred to as the first end) is fixed to the spring mounting bracket 202, and the other end of the spring 201 along its length direction (hereinafter referred to as the second end) is fixed to the top plate 12 via the spring fixing component 203. The spring mounting bracket 202 is fixed to the bottom plate 11, for example, by means of screws, thereby connecting the first end of the spring 201 to the bottom plate 11 via the spring mounting bracket 202.

[0060] Specifically, the horizontal stiffness component 200 may also include a rigid rope 204, one end of which (hereinafter referred to as the first end) is fixed to the spring mounting bracket 202, and the other end of which (hereinafter referred to as the second end) extends horizontally from the spring mounting bracket 202 and is connected to the first end of the spring 201, so that the first end of the spring 201 is fixed to the spring mounting bracket 202 by the rigid rope 204.

[0061] Furthermore, the length of the second end of the rigid rope 204 extending horizontally from the spring mounting bracket 202 is adjustable. By adjusting the length of the second end of the rigid rope 204 extending horizontally from the spring mounting bracket 202, the tension of the second end of the rigid rope 204 on the first end of the spring 201 can be increased or decreased, thereby adjusting the deformation of the spring 201 and flexibly adapting to the vibration reduction requirements under different working conditions.

[0062] It should be noted that in the overall structural arrangement of the vibration damper 10, the design of the horizontal positive stiffness component 200 not only improves the dynamic response capability of the system but also enhances the maintainability and adaptability of the structure, thus maintaining good working performance under complex working conditions. Through the coordinated adjustment of the spring 201 and the rigid rope 204, precise control of the system stiffness can be achieved, thereby meeting the performance requirements under different load conditions. This adjustment method is not only simple in structure and convenient to operate, but also has high reliability and repeatability. In practical applications, by adjusting the horizontal extension length of the rigid rope 204, the preload of the spring 201 can be effectively controlled, thereby optimizing the static and dynamic characteristics of the system.

[0063] In some examples, the spring 201 described above may specifically be a tension spring. The rigid rope 204 described above may specifically be a steel wire rope.

[0064] In some examples, as shown in Figure 1 To fix the second end of the spring 201 on the top plate 12, the spring fixing assembly 203 can include a spring fixing block 2031 and a spring clamping block 2032. The spring fixing block 2031 is fixed to the top plate 10, for example, by screwing. The spring clamping block 2032 is detachably connected to the spring fixing block 2031, and the spring clamping block 2032 and / or the spring fixing block 2031 is provided with a clamping portion (for example, a recess) for clamping the second end of the spring 201. By connecting the spring clamping block 2032 to the spring fixing block 2031, the second end of the spring 201 can be clamped and fixed between the spring clamping block 2032 and the spring fixing block 2031, thereby stably fixing the second end of the spring 201 on the top plate 12. By providing a detachable spring clamping block 2032, the installation state of the spring 201 can be easily replaced or adjusted, while ensuring the stability and reliability of the connection. In addition, this detachable structure also facilitates quick disassembly when the spring 201 is fatigued or needs maintenance, improving the flexibility and service life of the overall structure.

[0065] Exemplarily, the spring fixing block 2031 and the spring clamping block 2032 can be connected by a bolt, so as to clamp and release the second end of the spring 201. This bolt connection structure can adjust the clamping force according to actual needs, preventing the spring 201 from being offset or falling off due to uneven stress. In addition, the clamping portion surface can be provided with anti-skid lines or elastic gaskets to enhance the clamping stability and reduce the wear of the spring 201.

[0066] Exemplarily, as shown in Figure 1 The spring fixing block 2031 can be an L-shaped structure, and the short plate of the L-shaped structure is fixedly connected to the top plate 12 by a screw. The spring clamping block 2032 is detachably connected to the long plate of the L-shaped structure, and the second end of the spring 201 is clamped between the spring clamping block 2032 and the long plate of the L-shaped structure, so as to fix the second end of the spring 201 on the top plate 12 by the spring fixing assembly 203, and facilitate the maintenance of the spring 201.

[0067] In some examples, as shown in Figure 1 and Figure 2As shown, in order to adjust the length of the second end of the rigid rope 204 extending horizontally from the spring mounting bracket 202, the spring mounting bracket 202 can include a connecting plate 2021 and a rotating shaft pin 205. The connecting plate 2021 is arranged vertically with the bottom plate 11 and connected to the side (i.e. the upper side) of the bottom plate 11 facing the top plate 12. For example, the connecting plate 2021 can be directly connected to the side (i.e. the upper side) of the bottom plate 11 by welding or screws.

[0068] Specifically, the connecting plate 2021 is provided with a mounting hole penetrating the connecting plate 2021, and the rotating shaft pin 205 penetrates the mounting hole, and the opposite ends of the rotating shaft pin 205 along the length direction thereof protrude out of the opposite sides (hereinafter referred to as the first side and the second side) of the connecting plate 2021, respectively. The mounting hole can be located at the top end of the connecting plate 2021, and can be at the same horizontal level as the part of the spring fixing assembly 203 for fixing the second end of the spring 201 (for example, the clamping part of the spring fixing block 2031 and / or the spring clamping block 2032 for clamping the second end of the spring 201 is located at the same horizontal level. In addition, as shown in Figure 7 As shown, the first end of the rigid rope 204 can be fixed to the part of the rotating shaft pin 205 located at the first side of the connecting plate 2021, and the second end of the rigid rope 204 can be wound around the part of the rotating shaft pin 205 located at the first side of the connecting plate 2021 for several turns, and then extend horizontally to the first end of the spring 210 and be connected together with the first end of the spring 210. In this way, by rotating the rotating shaft pin 205, the length of the second end of the rigid rope 204 extending horizontally from the spring mounting bracket 202 can be adjusted, so as to adapt to different installation requirements and improve the flexibility of the device.

[0069] For example, as shown in Figure 1 and Figure 2 As shown, the horizontal positive stiffness assembly 200 can further include a locking component 206 for fixing the relative position between the rotating shaft pin 205 and the connecting plate 2021 after adjusting the horizontal extension length of the rigid rope 204, to prevent the rotating shaft pin 205 from shifting or loosening during use. This design not only has a simple structure and is easy to adjust, but also can effectively improve the stability and reliability of the overall device, and is suitable for spring connection and tensioning requirements in various complex working conditions.

[0070] Exemplarily, the locking component 206 can be a locking nut or a positioning pin, etc. For example, when a locking nut is used as the locking component 206, the locking nut can be connected on the second side surface of the connecting plate 2021 and abut on the end surface of the portion of the rotating shaft pin 205 located on the second side of the connecting plate 2021, so as to fix the position of the rotating shaft pin 205 and prevent it from rotating or moving axially during use.

[0071] Exemplarily, as shown in Figure 2 the shock absorber 10 can also be provided with a scale K1 having scales for indicating the length of the second end of the rigid rope 204 extending horizontally from the spring mounting bracket 202, so as to facilitate improving the efficiency and accuracy of adjusting the length of the second end of the rigid rope 204 extending horizontally from the spring mounting bracket 202.

[0072] Specifically, as shown in Figure 2 the scale K1 can be arranged on the outer side wall surface of the damping cavity 100.

[0073] In some embodiments, as shown in Figure 3 the number of the horizontal positive stiffness assemblies 200 can be at least two, and the at least two horizontal positive stiffness assemblies 200 can include at least one first horizontal positive stiffness assembly 200A and at least one second horizontal positive stiffness assembly 200B.

[0074] And the first horizontal positive stiffness assembly 200A is configured to generate a first horizontal action force applied to the top plate 12 when the top plate 12 moves relative to the bottom plate 11 along a first horizontal direction, the direction of the first horizontal action force being opposite to the direction of the movement of the top plate 12 relative to the bottom plate 11 along the first horizontal direction, and the magnitude of the first horizontal action force being in a positive proportional relationship with the displacement magnitude of the movement of the top plate 12 relative to the bottom plate 11 along the first horizontal direction.

[0075] The second horizontal positive stiffness assembly 200B is configured to generate a second horizontal action force applied to the top plate 12 when the top plate 12 moves relative to the bottom plate 11 along a second horizontal direction, the direction of the second horizontal action force being opposite to the direction of the movement of the top plate 12 relative to the bottom plate 11 along the second horizontal direction, and the magnitude of the second horizontal action force being in a positive proportional relationship with the displacement magnitude of the movement of the top plate 12 relative to the bottom plate 11 along the second horizontal direction.

[0076] Wherein, the first horizontal direction and the second horizontal direction are both parallel to the horizontal plane, and the first horizontal direction is perpendicular to the second horizontal direction. Exemplarily, the top plate 12 has a rectangular structure in a top view, and the first horizontal direction and the second horizontal direction can be parallel to the length direction and the width direction of the top plate 12, respectively.

[0077] Thus, no matter in which direction the top plate 12 is subjected to horizontal disturbance, the corresponding horizontal positive stiffness assembly 200 can provide a counteracting force, thereby achieving effective support and damping of the top plate 12.

[0078] It should be noted that the specific structure of the first horizontal positive stiffness assembly 200A and the specific structure of the second horizontal positive stiffness assembly 200B in the present embodiment can be understood with reference to the structure of the horizontal positive stiffness assembly 200 described above, and thus will not be described here.

[0079] In some examples, as shown in Figure 3 , in order to enhance the stability of the damper 10 in the horizontal direction, the at least two horizontal positive stiffness assemblies 200 included in the damper 10 can be located outside the damping cavity 100 and arranged around the damping cavity 100. In this way, not only can the space utilization of the damper 10 be effectively improved, but also subsequent manual adjustment of the horizontal positive stiffness assembly 200 can be facilitated to achieve the purpose of adjusting the horizontal positive stiffness of the horizontal positive stiffness assembly 200.

[0080] For example, as shown in Figure 3 , the damper 10 can include two horizontal positive stiffness assemblies 200, i.e., a first horizontal positive stiffness assembly 200A and a second horizontal positive stiffness assembly 200B, and the first horizontal positive stiffness assembly 200A and the second horizontal positive stiffness assembly 200B can be located on two adjacent outer sides of the damping cavity 100 and can share the same spring mounting bracket 202. In this way, not only can the damping effect and stability of the damper 10 be improved, but also the structure of the damper 10 can be made more compact and reasonable.

[0081] In the above embodiment, as shown in Figure 2 , Figure 8 and Figure 9 , the vertical positive stiffness assembly 300 can include a support rod group 300A, which can be specifically a support rod group 300A. Specifically, each support rod 301 / 302 / 303 / 304 in the support rod group 300A can be arranged vertically, i.e., the length direction of each support rod 301 / 302 / 303 / 304 in the support rod group 300A can be perpendicular to the horizontal plane, and the two ends (i.e., the bottom end and the top end) of each support rod 301 / 302 / 303 / 304 in the support rod group 300A along its length direction can be connected with the bottom plate 11 and the damping cavity 100, respectively, to achieve the connection of the bottom plate 11 and the damping cavity 100 of the damper 10 through the support rod group 300A.

[0082] Specifically, the support rod group 300A can include a plurality of support rods 301 / 302 / 303 / 304, such as can specifically consist of a plurality of support rods 301 / 302 / 303 / 304, which can be arranged in parallel and spaced apart, and can be uniformly distributed along the outer periphery of the damping cavity 100. Through such an arrangement, the stress on the damping cavity 100 in the vertical direction can be more uniform, thereby improving the stability and damping performance of the damper 10. In addition, the plurality of support rods 301 / 302 / 303 / 304 can also be arranged in different numbers and spacings according to actual needs to adapt to different load conditions and damping requirements. For example, in the scenario of bearing a larger vertical load, the number of support rods 301 / 302 / 303 / 304 can be increased or support rods 301 / 302 / 303 / 304 with a larger diameter can be selected, thereby improving the overall load-carrying capacity of the vertical stiffness component 300.

[0083] In some embodiments, as shown in FIG. 1, the damping cavity 100 can be provided with a plurality of accommodation grooves 103 on the side (i.e., the bottom side) facing the bottom plate 11, each of which at least partially penetrates the side wall 101 of the damping cavity 100, and each of which corresponds to one of the plurality of support rods 301 / 302 / 303 / 304 included in the support rod group 300A, such as one-to-one correspondence. Figure 10 In some embodiments, as shown in FIG. 1, the damping cavity 100 can be provided with a plurality of accommodation grooves 103 on the side (i.e., the bottom side) facing the bottom plate 11, each of which at least partially penetrates the side wall 101 of the damping cavity 100, and each of which corresponds to one of the plurality of support rods 301 / 302 / 303 / 304 included in the support rod group 300A, such as one-to-one correspondence.

[0084] Specifically, the opening width of the accommodation groove 103 can be greater than the width of the corresponding support rod 301 / 302 / 303 / 304, so that the portion of the support rod 301 / 302 / 303 / 304 extending into the corresponding mounting groove 103 can horizontally sway, thereby improving the horizontal damping effect of the support rod 301 / 302 / 303 / 304.

[0085] It should be noted that the design of the support rod group 300A allows the support rods 301 / 302 / 303 / 304 to elastically deform to absorb and disperse the horizontal forces when the damping cavity 100 is subjected to horizontal forces, without significantly affecting the vertical support force. In specific implementation, the material, size and number of the support rods 301 / 302 / 303 / 304 in the support rod group 300A can be adjusted according to actual needs to meet the comprehensive requirements of vertical stiffness and horizontal flexibility under different working conditions.

[0086] In some examples, as shown in Figure 8 and Figure 9 The support rod group 300A can specifically consist of four support rods 301 / 302 / 303 / 304 (i.e., a first support rod 301, a second support rod 302, a third support rod 303 and a fourth support rod 304). The side wall 101 of the damping cavity 100 has a rectangular shape in the top view, and the four support rods 301 / 302 / 303 / 304 can be arranged at the four corner positions of the rectangle, thereby uniformly distributing the support force and enhancing the stability and carrying capacity of the overall structure.

[0087] In some examples, the support rods 301 / 302 / 303 / 304 in the support rod group 300A can be made of elastic material, which will elastically deform when subjected to horizontal forces.

[0088] In some examples, as shown in Figure 8 and Figure 9As shown, the above-mentioned shock absorber 10 can further include a plurality of support rod top pressing blocks 41 corresponding to the above-mentioned plurality of support rods 301 / 302 / 303 / 304 included in the above-mentioned support rod group 300A, for example, the plurality of support rod top pressing blocks 41 can correspond one-to-one to the above-mentioned plurality of support rods 301 / 302 / 303 / 304 included in the above-mentioned support rod group 300A. And each support rod top pressing block 41 can be provided on the outer circumferential side of the side wall 101 of the damping cavity 100 corresponding to the top end of the corresponding support rod 301 / 302 / 303 / 304, and can be at least partially embedded on the outer circumferential side of the side wall 101 of the damping cavity 100, and can be detachably connected with the side wall 101 of the damping cavity 100. By connecting the support rod top pressing block 41 with the side wall 101 of the damping cavity 100, the top end of the corresponding support rod 301 / 302 / 303 / 304 can be clamped and fixed between the support rod top pressing block 41 and the side wall 101 of the damping cavity 100, and the support rod bottom pressing block 41 can also abut against the top end face of the corresponding support rod 301 / 302 / 303 / 304, thereby achieving stable fixation of the top end of the support rod 301 / 302 / 303 / 304 on the side wall 101 of the damping cavity 100 at the bottom of the corresponding accommodating groove 103, and preventing the support rod 301 / 302 / 303 / 304 from moving upward. By providing detachable support rod top pressing blocks 41, it is convenient to replace or adjust the installation state of the support rods 301 / 302 / 303 / 304, while ensuring the stability and reliability of the connection. In addition, such a detachable structure also facilitates quick disassembly when the support rods 301 / 302 / 303 / 304 are fatigued or need to be maintained, improving the flexibility and service life of the overall structure.

[0089] In some examples, as Figure 8 and Figure 9As shown, the damper 10 can further include a plurality of support rod bottom pressing blocks 42 corresponding to the plurality of support rods 301 / 302 / 303 / 304 included in the support rod group 300A, for example, the plurality of support rod bottom pressing blocks 42 can correspond to the plurality of support rods 301 / 302 / 303 / 304 included in the support rod group 300A one by one. And each support rod bottom pressing block 42 can be provided on the outer circumferential side of the bottom plate 11 corresponding to the bottom end of the corresponding support rod 301 / 302 / 303 / 304, and can be at least partially embedded on the outer circumferential side of the bottom plate 11, and can be detachably connected with the bottom plate 11. By connecting the support rod bottom pressing block 42 with the bottom plate 11, the bottom end of the corresponding support rod 301 / 302 / 303 / 304 can be clamped and fixed between the support rod bottom pressing block 42 and the bottom plate 11, and the support rod bottom pressing block 42 can also abut against the bottom end face of the corresponding support rod 301 / 302 / 303 / 304, thereby realizing the stable fixation of the bottom end of the support rod 301 / 302 / 303 / 304 on the bottom plate 11, and preventing the downward movement of the support rod 301 / 302 / 303 / 304. By providing the detachable support rod bottom pressing block 42, it is convenient to replace or adjust the installation state of the support rod 301 / 302 / 303 / 304, while ensuring the stability and reliability of its connection. In addition, such a detachable structure also facilitates quick disassembly when the support rod 301 / 302 / 303 / 304 is fatigued or needs to be maintained, improving the flexibility and service life of the overall structure.

[0090] Further, the damper 10 can further include a stop block 43 detachably connected with the bottom plate 11 and abutting on the side of the support rod bottom pressing block 42 away from the bottom end of the corresponding support rod 301 / 302 / 303 / 304, to realize the prevention of horizontal displacement of the support rod bottom pressing block 42 relative to the bottom plate 11 by the stop block 43, thereby improving the firmness of the connection between the bottom end of the support rod 301 / 302 / 303 / 304 and the bottom plate 11.

[0091] In the above embodiment, as Figure 5As shown, the damper 10 can further include a horizontal negative stiffness component 400 located between the bottom plate 11 and the top plate 12 and configured to provide a horizontal negative stiffness in the damper 10. Specifically, when the top plate 12 moves relative to the bottom plate 11 in a horizontal direction in the working state of the damper 10, the horizontal negative stiffness component 400 is capable of generating a third action force applied to the top plate 12, the third action force having the same direction as the movement of the top plate 12 relative to the bottom plate 11 in the horizontal direction and a magnitude proportional to the displacement of the top plate 12 relative to the bottom plate 11 in the horizontal direction, thereby achieving the horizontal negative stiffness provided by the horizontal negative stiffness component 400 in the damper 10.

[0092] In addition, when the top plate 12 moves relative to the bottom plate 11 in the horizontal direction in the working state of the damper 10, the magnitude of the action force applied to the top plate 12 generated by the horizontal negative stiffness component 400 (i.e., the third action force) is smaller than the magnitude of the action force applied to the top plate 12 generated by the horizontal positive stiffness component 200 (i.e., the first action force), thereby ensuring that the overall structure remains stable in the normal state. When the external excitation increases, for example, under the action of an earthquake or strong wind, the horizontal negative stiffness unit can gradually offset the positive stiffness effect, reduce the equivalent stiffness of the system, and thereby achieve efficient dissipation of vibration energy. By adjusting the matching relationship between the horizontal negative stiffness unit and the horizontal positive stiffness unit, the overall mechanical properties of the damper 10 can be optimized to meet the vibration isolation requirements under different working conditions. The structure design is reasonable, not only improves the adaptability of the damper in complex environments, but also enhances the adjustability and robustness of the system, and has good engineering application prospects. In addition, the horizontal negative stiffness component 400 and the horizontal positive stiffness component 200 work together, and the dynamic mechanical balance formed between the horizontal negative stiffness component 400 and the positive stiffness component 200 during the long-term operation of the damper 10 can effectively inhibit the occurrence of structural resonance.

[0093] In some embodiments, as Figure 5 , Figure 10 and Figure 11As shown, the horizontal negative stiffness component 400 can include a first magnet group 401 and a second magnet group 402. The first magnet group 401 is arranged on the surface of the damping cavity 100 facing the base plate 11, and the second magnet group 402 is arranged on the side of the base plate 11 facing the damping cavity 100 corresponding to the region of the first magnet group 401. Each first magnet 4011 in the first magnet group 401 is arranged in opposite spacing corresponding to each second magnet 4021 in the second magnet group 402, so that the first magnet 4011 in the first magnet group 401 can move synchronously with the damping cavity 100 during the horizontal movement of the damping cavity 100 relative to the base plate 11. During the horizontal movement of the damping cavity 100 relative to the base plate 11, due to the relative movement between the first magnet 4011 in the first magnet group 401 and the second magnet 402 in the second magnet group 402, a magnetic repulsion force same as the direction of the horizontal movement of the damping cavity 100, i.e. the third acting force, is generated. The size of the magnetic repulsion force is in direct proportion to the horizontal offset of the first magnet 4011 in the first magnet group 401 relative to the second magnet 402 in the second magnet group 402. When the damping cavity 100 moves horizontally, the distance between the first magnet 4011 in the first magnet group 401 and the second magnet 402 in the second magnet group 402 changes, thereby changing the size and direction of the magnetic repulsion force. The magnetic repulsion force can effectively offset or weaken the positive stiffness effect brought by external excitation, and realize the negative stiffness characteristic. By reasonably designing the arrangement mode, pole direction and magnet number of the first magnet group 401 and the second magnet group 402, the horizontal negative stiffness component 400 can exhibit the desired mechanical response under different displacement amplitudes. This design not only realizes the dynamic stiffness adjustment capability of the damper in the horizontal direction, but also provides a strong guarantee for the stability of the system. By precisely controlling the magnetic field distribution and interaction force, the damper can maintain high efficient vibration isolation performance under complex and variable working conditions. In addition, the structure has good scalability, and the layout and parameter configuration of the magnet group can be flexibly adjusted according to actual needs, further improving the adaptability and reliability of the damper, and showing broad application potential.

[0094] In some examples, as Figure 5 As shown, the surface of the damping cavity 100 facing the base plate 11 can be provided with a first accommodating groove 104 corresponding to each first magnet 4011 in the first magnet group 401, so as to facilitate the positioning and installation of each first magnet 4011 in the first magnet group 401 on the surface of the damping cavity 100 facing the base plate 11.

[0095] Exemplarily, as Figure 5 As shown, each first magnet 4010 in the first magnet group 401 can be embedded in the corresponding first accommodating groove 104.

[0096] In some examples, as shown in Figure 5 The side of the bottom plate 11 corresponding to the region of the first magnet group 401 can be provided with a through hole 111 penetrating the bottom plate 11. The horizontal negative stiffness assembly 400 can further include a magnet base 403, at least part of which is accommodated in the through hole 111 and connected with the bottom plate 11, and the magnet base 403 is arranged in spaced relation to the damping cavity 100.

[0097] Specifically, the second magnet group 402 of the horizontal negative stiffness assembly 400 can be arranged on the surface (i.e. the upper surface) of the magnet base 403 facing the damping cavity 100. The position of the magnet base 403 in the depth direction of the through hole 111 can be adjusted to achieve the second magnet group 402 away from or close to the first magnet group 401.

[0098] Exemplarily, as shown in Figure 5 The surface of the magnet base 403 facing the damping cavity 100 can be provided with a second accommodating groove 4031 corresponding to each second magnet 4021 in the second magnet group 402, so as to facilitate the positioning and installation of each second magnet 4021 in the second magnet group 402 on the surface of the magnet base 403 facing the damping cavity 100.

[0099] Exemplarily, as shown in Figure 5 Each second magnet 4021 in the second magnet group 402 can be embedded in the corresponding second accommodating groove 4031.

[0100] Exemplarily, as shown in Figure 10 and Figure 11 The first magnet group 401 can specifically consist of sixteen first magnets 4011, and the second magnet group 402 can specifically consist of sixteen second magnets 4021, and the sixteen first magnets 4011 and the sixteen second magnets 4021 are arranged in spaced relation one by one to form sixteen magnet pairs.

[0101] Specifically, the sixteen magnet pairs are arranged in spaced relation, for example, can be divided into two groups, each group of magnet pairs consists of eight magnet pairs, and the eight magnet pairs in one group of magnet pairs can be arranged along a first circle, and the eight magnet pairs in the other group of magnet pairs can be arranged along a second circle, the first circle and the second circle are concentric circles, and the diameter of the first circle is smaller than the diameter of the second circle, thereby forming an inner and outer two-layer magnet array. Such a layout not only improves the arrangement density of the magnets, but also effectively enhances the interaction effect of the magnetic field.

[0102] In some specific examples, as shown in Figure 6As shown, in order to realize the adjustable position of the magnet base 403 in the depth direction of the through hole 111, the horizontal negative stiffness assembly 400 can further include a flat head set screw 404 and a locking screw 405. Moreover, the inner side wall of the through hole 111 can be provided with a stepped surface F1 opposite to the surface (i.e. the upper surface) of the magnet base 403 facing the damping cavity 100, and the edge area of the magnet base 403 can be connected to the stepped surface F1 by the locking screw 405 to realize the connection of the magnet base 403 to the bottom plate 11 by the locking screw 405. Further, the flat head set screw 404 can pass through the magnet base 403 from the surface (i.e. the lower surface) of the magnet base 403 away from the damping cavity 100 and abut on the stepped surface F1, so that the position of the magnet base 403 in the through hole 111 can be changed by adjusting the screwing depth of the flat head set screw 404, and then the magnetic action distance between the magnet group and the damping cavity 100 is adjusted. In this way, the horizontal negative stiffness demand under different working conditions can be flexibly adapted, while the stability and reliability of the system during the adjustment process are ensured. Further, in the above structure, the cooperation of the locking screw 405 and the flat head set screw 404 makes the magnet base 403 be able to be stably locked after completing the position adjustment, preventing the loosening phenomenon caused by external vibration or long time running. The design of the double screw cooperative fastening not only improves the connection stiffness of the overall structure, but also enhances the maintaining ability of the adjustment accuracy, ensuring the continuous effectiveness of the magnetic field action.

[0103] Exemplarily, as Figure 6As shown, the number of the locking screws 405 can be three, and the number of the flat head set screws 404 can also be three. The three locking screws 405 and the three flat head set screws 404 can be arranged alternately along the four peripheral edges of the magnet base 403, forming a uniform support and locking layout. This multi-point cooperative fixing structure can effectively prevent the magnet base 403 from tilting or deviating during adjustment, thereby ensuring that the magnetic field action between the magnet group and the damping cavity 100 always remains uniform and stable. In addition, the reasonable arrangement of the three flat head set screws 404 on the lower surface of the magnet base 403 not only provides precise fine-tuning capability, but also effectively avoids the problem of local stress concentration caused by uneven single-point stress, further improving the reliability and service life of the overall system. In actual application, the arrangement of the three locking screws 405 and the flat head set screws 404 can also be optimized and adjusted according to specific working conditions, such as by changing the screw spacing or adding auxiliary positioning structures to improve the adjustment sensitivity and carrying capacity. In addition, in order to further enhance the axial positioning stability of the magnet base 403 within the through hole 111, an elastic gasket or a high-precision guide column can be added between the lower surface and the step surface F1 of the magnet base 403, thereby realizing double limitation in the axial and radial directions. This structure not only improves the installation precision of the magnet base 403, but also effectively suppresses the slight shaking caused by high-frequency vibration, ensuring the stability of the magnetic field action area.

[0104] In the above embodiment, as shown in Figure 5 The damper 10 can further include a vertical negative stiffness component 500 arranged between the bottom plate 11 and the top plate 12. The vertical negative stiffness component 500 is located inside the damping cavity 100 and is configured to provide vertical negative stiffness. Specifically, when the top plate 12 moves vertically relative to the bottom plate 11 in the working state of the damper 10, the vertical negative stiffness component 500 generates a fourth force applied to the top plate 12. The fourth force has the same direction as the vertical movement of the top plate 12 relative to the bottom plate 11, and the magnitude of the fourth force is directly proportional to the displacement of the vertical movement of the top plate 12 relative to the bottom plate 11, thereby realizing the vertical negative stiffness component 500 providing vertical negative stiffness in the damper 10.

[0105] In addition, when the top plate 12 moves vertically relative to the bottom plate 11 in the working state of the damper 10, the magnitude of the force applied to the top plate 12 by the vertical negative stiffness component 500 (i.e., the fourth force) is less than the magnitude of the force applied to the top plate 12 by the vertical positive stiffness component 300 (i.e., the second force).

[0106] In some embodiments, the vertical negative stiffness assembly 500 can include a stator magnet 501 and a mover magnet 502 arranged in relative horizontal spacing, wherein the stator magnet 501 is connected with the inner bottom wall surface 102 of the damping cavity 100, and the mover magnet 502 is connected with the top plate 12, so that the mover magnet 502 of the vertical negative stiffness assembly 500 can move synchronously with the top plate 12 during the vertical movement of the top plate 12. And during the vertical movement of the top plate 12, due to the relative movement between the mover magnet 502 and the stator magnet 501, a magnetic repulsion force in the same direction as the vertical movement of the top plate 12, i.e. the fourth acting force, is generated. The size of this magnetic repulsion force is in a positive proportional relationship with the vertical Z offset of the mover magnet 502 relative to the stator magnet 501, thereby ensuring that the negative stiffness provided by the vertical negative stiffness assembly 500 is related to the movement distance of the top plate 12.

[0107] In some specific embodiments, as shown in Figure 5 The vertical negative stiffness assembly 500 can further include a first leaf spring 503 and a second leaf spring 504, both of which are arranged parallel to the horizontal plane, and the first leaf spring 503 and the second leaf spring 504 are arranged in relative horizontal spacing. The first end of the first leaf spring 503 along the horizontal direction is connected with the inner bottom wall surface 102 of the damping cavity 100, and the second end of the first leaf spring 503 along the horizontal direction is connected with the bottom end of the mover magnet 502. The first end of the second leaf spring 504 along the horizontal direction is connected with the inner bottom wall surface 102 of the damping cavity 100, and the second end of the second leaf spring 504 along the horizontal direction is connected with the top end of the mover magnet 502, so as to realize the restriction of the movement of the bottom end and the top end of the mover magnet 502 in the horizontal direction by the first leaf spring 503 and the second leaf spring 504 respectively, and improve the impact resistance of the damper 10.

[0108] Specifically, as shown in Figure 5 The vertical negative stiffness assembly 500 can further include a lower fixed block 505, a first leaf spring outer ring pad 506, a stator magnetic ring outer frame 507, and a second leaf spring outer ring pad 508. And on the inner bottom wall surface 102 of the damping cavity 100, the lower fixed block 505, the first leaf spring 503, the first leaf spring outer ring pad 506, the stator magnetic ring outer frame 507, the second leaf spring outer ring pad 508, and the second leaf spring 504 are sequentially stacked.

[0109] The lower fixing block 505 is connected with the inner bottom wall surface 101 of the damping cavity 100, for example, can be fixedly connected with the inner bottom wall surface 101 of the damping cavity 100 through a screw. The first leaf spring 503 is connected between the lower fixing block 505 and the first leaf spring outer circle pad 506 along the horizontal first end. The stator magnetic ring outer frame 507 is connected between the first leaf spring outer circle pad 506 and the second leaf spring outer circle pad 508. The second leaf spring 504 is connected with the second leaf spring outer circle pad 508 along the horizontal first end, so as to realize that the horizontal first end of the first leaf spring 503 is connected with the inner bottom wall surface 102 of the damping cavity 100 through the lower fixing block 505, and also realize that the horizontal first end of the second leaf spring 504 is connected with the inner bottom wall surface 102 of the damping cavity 100 through the second leaf spring outer circle pad 508, the stator magnetic ring outer frame 507, the first leaf spring outer circle pad 506, the first leaf spring 503 and the lower fixing block 505.

[0110] In addition, the stator magnet 501 is arranged on the stator magnetic ring outer frame 507. As shown in Figure 5 for example, the stator magnetic ring outer frame 507 can be a cylindrical structure 507 with two ends open along the vertical direction, and in the vertical negative stiffness assembly 500, the stator magnet 501 can be arranged on the inner side surface of the cylindrical structure 507, the top end of the mover magnet 502 can be connected with the horizontal second end of the second leaf spring 504 and the top plate 12, and the bottom end of the mover magnet 502 can pass through the cylindrical structure 507 and be connected with the horizontal second end of the first leaf spring 503.

[0111] In some examples, as shown in Figure 12 for example, the first leaf spring 503 and the second leaf spring 504 can be butterfly leaf springs 503 / 504, and the horizontal first end and the second end of the first leaf spring 503 are respectively the outer side end and the inner side end of the butterfly leaf spring 503, and the horizontal first end and the second end of the second leaf spring 504 are respectively the outer side end and the inner side end of the butterfly leaf spring 504.

[0112] In some examples, as shown in Figure 5As shown, the stator magnet 501 can specifically be an outer magnetic ring set 501, and the mover magnet 502 can specifically be an inner magnetic ring set 502. The vertical negative stiffness assembly 500 can further include an inner magnetic ring column 509. The inner magnetic ring column 509 is vertically arranged, i.e., the length direction of the inner magnetic ring column 509 is perpendicular to the horizontal plane. The inner magnetic ring set 502 is fixedly sleeved on the inner magnetic ring column 509. The outer magnetic ring set 501 is sleeved on the outer circumferential side of the inner magnetic ring set 502 and is fixed with the stator magnetic ring outer frame 507. The top end of the inner magnetic ring column 509 is connected with the second end of the second leaf spring 504 along the horizontal direction and the top plate 12. The bottom end of the inner magnetic ring column 509 is connected with the second end of the first leaf spring 503 along the horizontal direction. Thus, the top end of the mover magnet 502 is connected with the second end of the second leaf spring 504 along the horizontal direction and the top plate 12 through the inner magnetic ring column 509. Meanwhile, the bottom end of the mover magnet 502 is connected with the second end of the first leaf spring 503 along the horizontal direction through the inner magnetic ring column 509.

[0113] In some specific examples, as shown in Figure 5 、 Figure 13 and Figure 14 , the vertical negative stiffness assembly 500 can further include a connecting block 510. The connecting block 510 is located directly above the second end of the second leaf spring 504 along the horizontal direction and is connected with the second end of the second leaf spring 504 along the horizontal direction and the top end of the inner magnetic ring column 509. Thus, the second end of the second leaf spring 504 along the horizontal direction is connected between the connecting block 510 and the top end surface of the inner magnetic ring column 509. Meanwhile, the connecting block 510 is connected with the top plate 12, such as being connected to the top plate 12 through the sealing film inner pressure piece 33 and / or the cover plate 15. Thus, the top end of the inner magnetic ring column 509 is connected with the top plate 12 through the connecting block 510.

[0114] In some specific examples, as shown in Figure 5 、 Figure 13 and Figure 14 , the vertical negative stiffness assembly 500 can further include a first pad 511 and a second pad 512. The first pad 511 and the second pad 512 are respectively located directly above and directly below the second end of the first leaf spring 503 along the horizontal direction and are connected with the second end of the first leaf spring 503 along the horizontal direction. Thus, the second end of the first leaf spring 503 along the horizontal direction is connected between the first pad 511 and the second pad 512. Meanwhile, the bottom end of the inner magnetic ring column 509 is connected with the first pad 511. Thus, the bottom end of the inner magnetic ring column 509 is connected with the second end of the first leaf spring 503 along the horizontal direction through the first pad 511.

[0115] Specifically, as shown in Figure 5 、 Figure 13 and Figure 14As shown, the vertical negative stiffness assembly 500 can further include a lower limit block 513 located directly below and spaced apart from the second pad block 512, and fixed to the inner bottom wall surface 102 of the damping cavity 100, to achieve the vertical limiting protection of the second end of the first leaf spring 503 in the horizontal direction, to avoid the elastic failure or structural damage of the first leaf spring 503 due to excessive displacement.

[0116] Exemplarily, the outer magnetic ring group 501 can include one outer magnetic ring, or can include a plurality of outer magnetic rings 5011 stacked in the vertical direction (as shown in Figure 13 Specifically, as shown in Figure 13 The outer magnetic ring group 501 includes a plurality of outer magnetic rings 5011 stacked in the vertical direction, and an outer magnetic ring spacer 5012 is arranged between any two vertically adjacent outer magnetic rings 5011 in the plurality of outer magnetic rings 5011, to space apart the adjacent outer magnetic rings 5011 in the outer magnetic ring group 501.

[0117] Exemplarily, the inner magnetic ring group 502 can include one inner magnetic ring, or can include a plurality of inner magnetic rings 5021 stacked in the vertical direction (as shown in Figure 14 Specifically, as shown in Figure 14 The inner magnetic ring group 502 includes a plurality of inner magnetic rings 5021, and an inner magnetic ring spacer 5022 is arranged between any two vertically adjacent inner magnetic rings 5021 in the plurality of inner magnetic rings 5021, to space apart the adjacent inner magnetic rings 5021 in the inner magnetic ring group 502.

[0118] It should be noted that in specific implementation, the magnet combination and parameter matching of the vertical negative stiffness assembly 500 can be finely designed, for example, by adjusting the number, magnetic pole arrangement, and gap between the inner magnetic ring 5012 and the outer magnetic ring 5011, more accurate vertical negative stiffness control can be achieved to meet different vertical negative stiffness requirements of the damper 10.

[0119] In the above embodiment, as shown in Figures 1 to 5 The damper 10 can further include a first motor assembly 17 arranged between the bottom plate 11 and the top plate 12, and including a first stator 171 and a first rotor 172, wherein one of the first stator 171 and the first rotor 172 is connected with the bottom plate 11, and the other is connected with the top plate 12. And the first rotor 172 can be configured to move in the vertical direction relative to the first stator 171 to achieve the vertical active damping function of the damper 10.

[0120] Specifically, as shown in Figures 1 to 5As shown in the figure, the first motor assembly 17 can further include a first motor bracket 173 fixed with the bottom plate 11, and the first stator 171 included in the first motor assembly 17 can be mounted on the first motor bracket 173 to realize the connection of the first stator 171 with the bottom plate 11 through the first motor bracket 173.

[0121] In the above embodiment, as Figures 1 to 5 shown, the damper 10 can further include a second motor assembly 18 arranged between the bottom plate 11 and the top plate 12, and including a second stator 181 and a second rotor 182, wherein one of the second stator 181 and the second rotor 182 is connected with the bottom plate 11, and the other is connected with the top plate 12. And the second rotor 182 can be configured to move horizontally relative to the second stator 181 to realize the horizontal active damping function of the damper 10.

[0122] Specifically, as Figures 1 to 5 shown, the second motor assembly 18 can further include a second motor bracket 183 fixed with the bottom plate 11, and the second stator 181 included in the second motor assembly 18 can be mounted on the second motor bracket 183 to realize the connection of the second stator 181 with the bottom plate 11 through the second motor bracket 183.

[0123] It should be noted that in the above damper 10, the number and arrangement position of the first motor assembly 17 and the second motor assembly 18 can be set according to actual needs, which are not limited in the case.

[0124] In the above embodiment, the damper 10 can further include a sensor assembly 16 and a controller arranged between the bottom plate 11 and the top plate 12. Wherein the sensor assembly 16 is used to detect the motion of the top plate 12. The controller is used to: control the first motor assembly 17 and / or the second motor assembly 18 to work according to the detection result of the sensor assembly 16; and / or control the sealed cavity 100A to intake or exhaust according to the detection result of the sensor assembly 16. In this way, by controlling the output of the motor assembly and the intake and exhaust of the sealed cavity 100A, the vibration state of the top plate 12 can be changed, thereby realizing the damping effect of the damper 10.

[0125] Exemplarily, as Figures 1 to 5 shown, the sensor assembly 16 can include a speed sensor 161 and / or a displacement sensor 162.

[0126] The speed sensor 162 is installed on the top plate 12 and is configured to detect the movement speed of the top plate 12. Specifically, the speed sensor 162 can include a horizontal speed sensor and a vertical speed sensor, wherein the horizontal speed sensor is used to detect the movement speed of the top plate 12 along the horizontal direction, and the vertical speed sensor is used to detect the movement speed of the top plate 12 along the vertical direction.

[0127] The displacement sensor 162 is configured to detect the movement displacement of the top plate 12. Specifically, the displacement sensor 162 can include a horizontal displacement sensor and a vertical displacement sensor, wherein the horizontal displacement sensor is used to detect the movement displacement of the top plate 12 along the horizontal direction, and the vertical displacement sensor is used to detect the movement displacement of the top plate 12 along the vertical direction.

[0128] In the above embodiment, the damper 10 can be used as a damping table for damping of semiconductor equipment and / or precision machine tools and other precision equipment.

[0129] As can be seen from the above, the damper provided by the embodiment can decouple the horizontal stiffness and the vertical stiffness of the damper by designing the horizontal positive stiffness component for providing horizontal positive stiffness and the vertical positive stiffness component for providing vertical positive stiffness into two independent structures, which makes the damper more flexible to deal with vibrations in different directions, and improves the damping effect and stability. Further, the damper can not only ensure stable positive stiffness in the horizontal direction, but also effectively isolate the interference of vertical vibration on the horizontal damping performance by the ingenious position layout of the horizontal positive stiffness component and the vertical positive stiffness component, thereby greatly improving the overall performance of the damper.

[0130] The embodiment of the present application also provides a damping system, which comprises the damper of any of the above embodiments.

[0131] Specifically, in the damping system, the damper comprises a bottom plate and a top plate arranged in a relative spacing manner, and a damping cavity, a horizontal positive stiffness component and a vertical positive stiffness component arranged between the bottom plate and the top plate, wherein the top plate is connected with the damping cavity in a movable manner along the depth direction of the damping cavity, the damping cavity is arranged in a spacing manner with the bottom plate, the vertical positive stiffness component connects the damping cavity and the bottom plate together and is used to provide vertical positive stiffness and horizontally damp the top plate, and the horizontal positive stiffness component is located outside the damping cavity and is connected with the top plate and the bottom plate and is used to provide horizontal positive stiffness.

[0132] Specifically, the damping system can further comprise a load, which can be fixed above the top plate of the damper, so as to realize damping of the load.

[0133] Exemplarily, the load can be a semiconductor equipment, a precision machine tool or other precision equipment.

[0134] In some embodiments, the number of dampers included in the above-mentioned damping system can be multiple (for example, at least three), and the above-mentioned damping system can further include a workbench installed above the multiple dampers, so that the height of the workbench at the positions of the respective dampers can be detected by sensors, and based on the detection results of the sensors, the output of the motor and / or the air intake and exhaust of the sealed cavity in the damper can be controlled to make the workbench always in a horizontal state.

[0135] It should be noted that the damping system provided by the embodiments of the present application can achieve the beneficial effects that any of the dampers provided by the embodiments of the present application can achieve due to the dampers provided by the embodiments of the present application. Details are described in the foregoing embodiments, which will not be repeated here.

[0136] The above only describes the preferred embodiments of the present application and is not intended to limit the present application. Any modifications, equivalent replacements and improvements made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A vibration damper, characterized in that, It includes a bottom plate and a top plate arranged at relative intervals, as well as a vibration damping cavity, a horizontal positive stiffness component, and a vertical positive stiffness component disposed between the bottom plate and the top plate; The top plate is connected to the vibration damping cavity in a manner that allows it to move along the depth direction of the vibration damping cavity. The vibration damping cavity and the bottom plate are spaced apart. The vertical positive stiffness component connects the vibration damping cavity and the bottom plate together and is used to provide vertical positive stiffness and perform horizontal vibration damping on the top plate. The horizontal positive stiffness component is located outside the vibration damping cavity and is connected to the top plate and the bottom plate, and is used to provide horizontal positive stiffness. The vibration damper also includes a horizontal negative stiffness component disposed between the bottom plate and the top plate. The horizontal negative stiffness component is located outside the vibration damping cavity and is used to provide horizontal negative stiffness. Furthermore, when the top plate moves horizontally relative to the bottom plate, the magnitude of the force applied to the top plate by the horizontal negative stiffness component is less than the magnitude of the force applied to the top plate by the horizontal positive stiffness component. The horizontal negative stiffness component includes a first magnet group and a second magnet group. The first magnet group is disposed on the surface of the damping cavity facing the base plate, and the second magnet group is disposed on the side of the base plate facing the damping cavity corresponding to the area of ​​the first magnet group. Each first magnet in the first magnet group and each second magnet in the second magnet group are arranged at intervals relative to each other in a one-to-one correspondence.

2. The vibration damper according to claim 1, characterized in that, The base plate has a through hole on the side facing the vibration damping cavity, corresponding to the area of ​​the first magnet assembly; The horizontal negative stiffness component also includes a magnet base, at least a portion of which is accommodated in the through hole and connected to the base plate. The magnet base is spaced apart from the vibration damping cavity, and the second magnet group is specifically disposed on the surface of the magnet base facing the vibration damping cavity. Furthermore, the position of the magnet base in the depth direction of the through hole is adjustable to allow the second magnet group to move away from or closer to the first magnet group.

3. The vibration damper according to claim 1, characterized in that, The vibration damper also includes a vertical negative stiffness component disposed between the bottom plate and the top plate. The vertical negative stiffness component is located inside the vibration damping cavity and is used to provide vertical negative stiffness. Furthermore, when the top plate moves vertically relative to the bottom plate, the force exerted on the top plate by the vertical negative stiffness component is less than the force exerted on the top plate by the vertical positive stiffness component.

4. The vibration damper according to claim 3, characterized in that, The vertical negative stiffness assembly includes a stator magnet and a mover magnet arranged at horizontal intervals, wherein the stator magnet is connected to the inner bottom wall of the vibration damping cavity, and the mover magnet is connected to the top plate.

5. The vibration damper according to claim 4, characterized in that, The vertical negative stiffness component further includes a first leaf spring and a second leaf spring. The first leaf spring and the second leaf spring are both arranged parallel to the horizontal plane, and the first leaf spring and the second leaf spring are spaced apart from each other. The first end of the first leaf spring in the horizontal direction is connected to the inner bottom wall of the vibration damping cavity, and the second end of the first leaf spring in the horizontal direction is connected to the bottom end of the moving magnet. The first end of the second leaf spring in the horizontal direction is connected to the inner bottom wall of the vibration damping cavity, and the second end of the second leaf spring in the horizontal direction is connected to the top end of the moving magnet.

6. The vibration damper according to claim 5, characterized in that, The vertical negative stiffness component further includes a lower fixing block, a first leaf spring outer ring pad, a stator magnetic ring outer frame, and a second leaf spring outer ring pad. On the inner bottom wall of the vibration damping cavity, the lower fixing block, the first leaf spring, the first leaf spring outer ring pad, the stator magnetic ring outer frame, the second leaf spring outer ring pad, and the second leaf spring are stacked in sequence. Furthermore, the lower fixing block is connected to the inner bottom wall of the vibration damping cavity, the first end of the first leaf spring in the horizontal direction is connected between the lower fixing block and the outer ring pad of the first leaf spring, the outer frame of the stator magnetic ring is connected between the outer ring pad of the first leaf spring and the outer ring pad of the second leaf spring, the first end of the second leaf spring in the horizontal direction is connected to the outer ring pad of the second leaf spring; and the stator magnet is disposed on the outer frame of the stator magnetic ring.

7. The vibration damper according to claim 1, characterized in that, The vertical positive stiffness component includes a support rod group, which includes multiple support rods arranged in parallel at intervals and vertically. The bottom and top ends of the support rods are respectively connected to the base plate and the vibration damping cavity.

8. The vibration damper according to claim 7, characterized in that, The sidewall of the vibration damping cavity is provided with a plurality of receiving grooves on the end face of the bottom plate. The receiving grooves at least partially penetrate the sidewall of the vibration damping cavity, and the plurality of receiving grooves correspond to the plurality of support rods respectively. One end of the support rod is fixed to the bottom plate, and the other end of the support rod extends into its corresponding receiving groove and is connected to the bottom of its corresponding receiving groove.

9. The vibration damper according to claim 1, characterized in that, The vibration damper also includes a sensor assembly and a motor assembly disposed between the base plate and the top plate; The sensor assembly is configured to detect the movement of the top plate; The motor assembly includes a stator and a mover, with one of the stator and the mover connected to the base plate and the other connected to the top plate.

10. A vibration reduction system, characterized in that, Includes the vibration damper as described in any one of claims 1 to 9.

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