High-purity hydrogen peroxide purification device and purification process thereof

Abstract

The invention provides a high-purity hydrogen peroxide purification device and a purification process thereof. The high-purity hydrogen peroxide purification device comprises a raw material box; the evaporation and purification assembly is arranged on one side of the raw material box, and the evaporation and purification assembly is communicated with the raw material box and used for purifying hydrogen peroxide; the collecting box is connected with the evaporation and purification assembly and is used for storing the purified hydrogen peroxide; the low-temperature purification assembly is arranged on one side of the collection box and is communicated with the collection box; one end of the evaporation and purification assembly is connected with a condensation pipe, and one end of the condensation pipe is communicated with the collection box. Raw materials are put into the raw material box, then input into the evaporation purification assembly through the water suction pump for evaporation purification, input into the collection box after purification, and then pass through the low-temperature purification assembly for low-temperature purification, so that the purification effect is enhanced, the quality of hydrogen peroxide is improved, and the hydrogen peroxide purification device is convenient to use.

Description

Technical Field

[0001] This invention relates to the field of hydrogen peroxide production equipment, and in particular to a high-purity hydrogen peroxide purification device and its purification process. Background Technology

[0002] Currently, high-concentration, high-purity hydrogen peroxide aqueous solution is one of the important raw materials in the semiconductor electronics industry. Its purity has a very important impact on the yield, electrical performance, and reliability of integrated circuits.

[0003] The prior art can be referenced in Chinese authorized utility model patent with publication number CN212222418U, which is specifically a hydrogen peroxide purification device, including a raw material tank, the raw material tank being connected to the liquid inlet of a plate evaporator, the gas outlet of the plate evaporator being connected to the gas inlet of a first condenser, the gas outlet of the first condenser being connected to the gas inlet of a second condenser, a first liquid outlet and a second liquid outlet being provided below the first condenser, the first liquid outlet being connected to the raw material tank, the second liquid outlet being connected to a storage tank, a baffle plate being rotatably installed inside the first condenser, the baffle plate rotating to switch the connection between the inside of the first condenser and the first liquid outlet or the second liquid outlet, and the liquid outlet of the second condenser being connected to a cooling water tank.

[0004] The aforementioned prior art has the following shortcomings in practical implementation: the prior art can only be purified through evaporators and condensers, the purification method is singular, the purification quality is generally poor, and it consumes a lot of energy during condensation. Summary of the Invention

[0005] To address the aforementioned problems, this invention proposes a high-purity hydrogen peroxide purification device and its purification process, thereby resolving the issues present in the prior art.

[0006] To achieve the above objectives, the present invention provides a high-purity hydrogen peroxide purification device and purification process, comprising: a raw material tank;

[0007] An evaporation and purification component is arranged on one side of the raw material tank and is connected to the raw material tank for purifying hydrogen peroxide.

[0008] A collection box, which is connected to the evaporation and purification assembly, is used to store purified hydrogen peroxide;

[0009] A low-temperature purification component is arranged on one side of the collection box and is connected to the collection box;

[0010] One end of the evaporation and purification component is provided with a condenser tube connection, and one end of the condenser tube is connected to the collection box;

[0011] The condenser tube is provided with a first cooling tube on its outside, a first water cooling tube is provided at the top of the first cooling tube, and a second water cooling tube is provided at the bottom of the first cooling tube. Both the first water cooling tube and the second water cooling tube are connected to the inside of the first cooling tube.

[0012] A defrosting chamber is provided on one side of the low-temperature purification component. The defrosting chamber is connected to the low-temperature purification component and is used to store ice. The defrosting chamber is provided with multiple second copper pipes and a first copper pipe. The second copper pipes and the first copper pipes are arranged opposite each other. Multiple third copper pipes are arranged between the second copper pipes and the first copper pipes. The two ends of the third copper pipes are respectively connected to the second copper pipes and the third copper pipes. A first water tank and a second water tank are arranged opposite each other on one side of the defrosting chamber. The second copper pipe is connected to the first water tank, and the first copper pipe is connected to the second water tank. The first water-cooling pipe and the second water-cooling pipe are respectively connected to the first water tank and the second water tank through a water pump.

[0013] A storage box is provided on one side of the defrosting box, and the storage box is connected to the defrosting box through a third conveying pipe. A drain pipe is provided on the other side of the defrosting box.

[0014] Furthermore, the condenser tube has two tapered tubes arranged opposite each other inside, and a plurality of second cooling tubes are arranged between the two tapered tubes. One end of the first water-cooling tube is provided with a first branch pipe, and one end of the second water-cooling tube is provided with a second branch pipe. The first branch pipe and the second branch pipe are respectively connected to the two tapered tubes.

[0015] Furthermore, the evaporation and purification assembly includes an evaporator, which is disposed on one side of the raw material tank. The liquid inlet of the evaporator is connected to a first delivery pipe, one end of which is connected to the raw material tank via a water pump. The gas outlet of the evaporator is provided with a collection hopper, one end of which is connected to the condenser pipe.

[0016] Furthermore, the low-temperature purification component includes a low-temperature refrigeration temperature controller, and a second conveying pipe is internally connected to the low-temperature refrigeration temperature controller. One end of the second conveying pipe is connected to the collection box via a water pump. A material conveying box is provided on one side of the low-temperature refrigeration temperature controller, and the material conveying box is connected to the defrosting box.

[0017] Furthermore, the inner top of the low-temperature refrigeration temperature controller is provided with an isolation plate, and the inner wall of the low-temperature refrigeration temperature controller is provided with two first electric telescopic rods, the output end of the first electric telescopic rods passing through the isolation plate and connected to a discharge plate.

[0018] Furthermore, a second electric telescopic rod is provided at the bottom of the low-temperature refrigeration temperature control unit, and a baffle is connected to the output end of the second electric telescopic rod.

[0019] Furthermore, the top of the low-temperature refrigeration temperature control unit is provided with a mounting bracket, the top of the mounting bracket is provided with a feeding box, and the bottom of the feeding box extends into the interior of the second conveying pipe through a pipe.

[0020] Furthermore, a connecting pipe is provided between each of the plurality of first copper tubes and the plurality of second copper tubes.

[0021] A purification process for a high-purity hydrogen peroxide purification device includes the following steps:

[0022] Step 1: Place the raw materials into the raw material tank, and then use a water pump to input them into the evaporator to purify hydrogen peroxide;

[0023] Step 2: The gas enters the interior of the condenser tube, and the water coolant is pumped into the first cooling tube by the water pump. The water coolant cools the condenser tube and condenses the gas, completing the evaporation and purification. The purified hydrogen peroxide is then fed into the collection tank.

[0024] Step 3: The hydrogen peroxide inside the collection box is fed into the low-temperature refrigeration temperature control unit through the water pump and the second delivery pipe. Then, through low-temperature condensation, the additive can be added into the hydrogen peroxide through the feeding box for condensation. The water first freezes into ice blocks. Then, the second electric telescopic rod is activated to move the baffle downward, allowing the uncondensed hydrogen peroxide to flow into the defrosting box. Finally, it is fed into the storage box for storage.

[0025] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0026] 1. Place the raw materials into the raw material tank, and then pump them into the evaporation and purification unit for evaporation and purification. After purification, the raw materials are transferred to the collection tank and then purified at low temperature in the low-temperature purification unit. This enhances the purification effect, improves the quality of hydrogen peroxide, and makes it easier to use.

[0027] 2. After evaporation, the gas enters the condenser tube. A water pump then pumps coolant into the first cooling tube, where the coolant cools the condenser tube, facilitating condensation and purification. The resulting ice, formed after low-temperature purification, enters the defrosting chamber. A water pump then pumps coolant into the first and second copper tubes, creating a circulation system. The heated coolant transfers heat to the ice through the first and second copper tubes, accelerating its melting. Simultaneously, the ice cools the coolant, facilitating condensation and ensuring energy efficiency for user convenience.

[0028] Third, the coolant can be introduced into the second cooling pipe through the first and second branch pipes, and then the coolant can be introduced into the second cooling pipe for circulation. The coolant and the second cooling pipe can further cool the gas and accelerate the condensation efficiency.

[0029] To better understand and implement this invention, the following detailed description is provided in conjunction with the accompanying drawings. Attached Figure Description

[0030] Figure 1 This is a schematic diagram of the first three-dimensional structure of the present invention;

[0031] Figure 2 This is a schematic diagram of the second three-dimensional structure of the present invention;

[0032] Figure 3 This is a schematic diagram of the third three-dimensional structure of the present invention;

[0033] Figure 4 This is a schematic diagram of the structure of the first water-cooling pipe in this invention;

[0034] Figure 5 This is a schematic diagram of the internal structure of the first cooling tube in this invention;

[0035] Figure 6 This is a schematic diagram of the internal structure of the condenser tube in this invention;

[0036] Figure 7 This is a diagram showing the internal structure of the purification chamber in this invention;

[0037] Figure 8 This is a diagram of the internal structure of the defrosting chamber in this invention;

[0038] Figure 9 This is a schematic diagram of the connecting pipe in this invention.

[0039] In the diagram: 1. Raw material bin; 2. Evaporator; 3. First conveying pipe; 4. Collection hopper; 5. First cooling pipe; 6. Collection box; 7. Second conveying pipe; 8. Low-temperature refrigeration temperature controller; 9. Mounting frame; 10. Discharge box; 11. Conveying box; 12. Thawing box; 13. Third conveying pipe; 14. Storage box; 15. Drain pipe; 16. Condenser pipe; 17. First water-cooling pipe; 18. First branch pipe; 19. Second water-cooling pipe; 20. Second branch pipe; 21. First water tank; 22. Second water tank; 23. Conical pipe; 24. Second cooling pipe; 25. Isolation plate; 26. First electric telescopic rod; 27. Discharge plate; 28. Baffle; 29. ​​Second electric telescopic rod; 30. First copper pipe; 31. Second copper pipe; 32. Third copper pipe; 33. Connecting pipe. Detailed Implementation

[0040] To provide a clearer understanding of the technical features, objectives, and effects of the present invention, specific embodiments of the present invention will now be described with reference to the accompanying drawings. However, the scope of protection of the present invention is not limited to the following description.

[0041] Reference Figure 1-9 As shown, a high-purity hydrogen peroxide purification device and its purification process include: a raw material tank 1; an evaporation purification component arranged on one side of the raw material tank 1 and connected to the raw material tank 1 for purifying hydrogen peroxide; a collection tank 6 connected to the evaporation purification component for storing the purified hydrogen peroxide; a low-temperature purification component arranged on one side of the collection tank 6 and connected to the collection tank 6; and a condenser pipe 16 connected to one end of the evaporation purification component, with one end of the condenser pipe 16 connected to the collection tank 6.

[0042] A first cooling pipe 5 is provided on the outside of the condenser pipe 16. A first water cooling pipe 17 is provided on the top of the first cooling pipe 5. A second water cooling pipe 19 is provided on the bottom of the first cooling pipe 5. Both the first water cooling pipe 17 and the second water cooling pipe 19 are connected to the inside of the first cooling pipe 5.

[0043] A defrosting chamber 12 is provided on one side of the low-temperature purification component. The defrosting chamber 12 is connected to the low-temperature purification component and is used to store ice. The interior of the defrosting chamber 12 is provided with multiple second copper pipes 31 and first copper pipes 30. The second copper pipes 31 and first copper pipes 30 are arranged opposite each other. Multiple third copper pipes 32 are arranged between the second copper pipes 31 and first copper pipes 30. The two ends of the third copper pipes 32 are connected to the second copper pipes 31 and the third copper pipes 32, respectively. A first water tank 21 and a second water tank 22 are arranged opposite each other on one side of the defrosting chamber 12. The second copper pipes 31 are connected to the first water tank 21, and the first copper pipes 30 are connected to the second water tank 22. The first water cooling pipe 17 and the second water cooling pipe 19 are connected to the first water tank 21 and the second water tank 22, respectively, through water pumps. A connecting pipe 33 is provided between the multiple first copper pipes 30 and the multiple second copper pipes 31.

[0044] A storage box 14 is provided on one side of the defrosting box 12. The storage box 14 is connected to the defrosting box 12 through a third conveying pipe 13. A drain pipe 15 is provided on the other side of the defrosting box 12.

[0045] This invention provides a technical solution where, during use, raw materials are placed inside a raw material tank 1 and then pumped into an evaporation and purification component for evaporation and purification. After purification, the material is transferred to a collection tank 6 and then further purified at low temperatures using a low-temperature purification component. This enhances the purification effect, improves the quality of hydrogen peroxide, and facilitates use. After evaporation, the gas enters a condenser tube 16. A water pump then pumps coolant into a first cooling tube 5, cooling the condenser tube 16 and condensing it, thus completing the purification process. The ice formed after low-temperature purification enters a defrosting chamber 12. A water pump then pumps coolant into a first copper pipe 30 and a second copper pipe 31, circulating the coolant. The heated coolant, passing through the first and second copper pipes 30 and 31, transfers heat to the ice, accelerating its melting. Simultaneously, the ice cools the coolant, facilitating condensation, ensuring energy efficiency, and providing convenience for operators. The purified hydrogen peroxide can be stored in storage tank 14.

[0046] Preferably, the condenser tube 16 has two tapered tubes 23 arranged opposite each other inside, and a plurality of second cooling tubes 24 are arranged between the two tapered tubes 23. One end of the first water cooling tube 17 is provided with a first branch tube 18, and one end of the second water cooling tube 19 is provided with a second branch tube 20. The first branch tube 18 and the second branch tube 20 are respectively connected to the two tapered tubes 23.

[0047] Specifically, the coolant can be introduced into the second cooling pipe 24 through the first branch pipe 18 and the second branch pipe 20, and then the coolant can be introduced into the second water cooling pipe 19 for circulation. The coolant and the second cooling pipe 24 can further cool the gas and accelerate the condensation efficiency.

[0048] Preferably, the evaporation and purification assembly includes an evaporator 2, which is located on one side of the raw material tank 1. The liquid inlet of the evaporator 2 is connected to a first conveying pipe 3, one end of which is connected to the raw material tank 1 via a water pump. The gas outlet of the evaporator 2 is provided with a collection hopper 4, one end of which is connected to a condenser pipe 16.

[0049] Specifically, hydrogen peroxide can be purified through the evaporator 2, raw materials can be fed into the evaporator 2 through the first conveying pipe 3, and steam can be fed into the condenser 16 through the collection hopper 4.

[0050] Preferably, the low-temperature purification component includes a low-temperature refrigeration temperature controller 8, with a second conveying pipe 7 internally connected to the low-temperature refrigeration temperature controller 8. One end of the second conveying pipe 7 is connected to the collection box 6 via a water pump. A material conveying box 11 is provided on one side of the low-temperature refrigeration temperature controller 8, and the material conveying box 11 is connected to the thawing box 12.

[0051] The inner top of the low-temperature refrigeration temperature controller 8 is provided with an isolation plate 25, and the inner wall of the low-temperature refrigeration temperature controller 8 is provided with two first electric telescopic rods 26. The output end of the first electric telescopic rod 26 passes through the isolation plate 25 and is connected to the discharge plate 27. The inner bottom of the low-temperature refrigeration temperature controller 8 is provided with a second electric telescopic rod 29, and the output end of the second electric telescopic rod 29 is connected to a baffle 28.

[0052] The low-temperature refrigeration temperature control unit 8 is equipped with a mounting bracket 9 on its top, and a feeding box 10 is installed on the top of the mounting bracket 9. The bottom of the feeding box 10 extends into the interior of the second conveying pipe 7 through a pipe.

[0053] Specifically, the hydrogen peroxide inside the collection box 6 can be introduced into the low-temperature refrigeration temperature controller 8 through the water pump and the second delivery pipe 7. Then, through low-temperature condensation, the additive can be added into the hydrogen peroxide through the feeding box 10 to facilitate condensation. The water contained in the raw material first freezes into ice. Then, the second electric telescopic rod 29 is activated to move the baffle 28 downward, allowing the uncondensed hydrogen peroxide to flow into the defrosting box 12. Then, it is introduced into the storage box 14 for storage. After that, the first electric telescopic rod 26 is activated to move the discharge plate 27, and the ice is pushed into the defrosting box 12 through the discharge plate 27 for defrosting.

[0054] A purification process for a high-purity hydrogen peroxide purification device includes the following steps:

[0055] Step 1: Place the raw materials into the inside of the raw material tank 1, and then use a water pump to input them into the evaporator 2 to purify the hydrogen peroxide;

[0056] Step 2: The gas enters the interior of the condenser tube 16, and the water coolant is pumped into the interior of the first cooling tube 5 by the water coolant to cool the condenser tube 16 and condense it, thus completing the evaporation and purification. The purified hydrogen peroxide is then fed into the collection box 6.

[0057] Step 3: The hydrogen peroxide inside the collection box 6 is fed into the low-temperature refrigeration temperature control unit 8 through the water pump and the second delivery pipe 7. Then, through low-temperature condensation, the additive can be added into the hydrogen peroxide through the feeding box 10 for condensation. The water first freezes into ice blocks. Then, the second electric telescopic rod 29 is activated to move the baffle 28 downward, so that the uncondensed hydrogen peroxide flows into the defrosting box 12 and then into the storage box 14 for storage.

[0058] Workflow: During use, raw materials are placed into the raw material tank 1, then pumped into the evaporation and purification component for evaporation and purification. After purification, the raw materials are transferred to the collection tank 6, and then further purified at low temperatures using the low-temperature purification component to enhance the purification effect. The gas enters the condenser tube 16, where a water pump supplies coolant to the first cooling tube 5. The coolant cools the condenser tube 16, condensing the gas and completing the purification process. The resulting ice blocks from the low-temperature purification enter the defrosting chamber 12, where a water pump supplies coolant to the first copper tube 30 and the second copper tube 31, circulating the coolant. The heated coolant passes through the first and second copper tubes 30 and 31, transferring heat to the ice blocks to accelerate melting. Simultaneously, the ice blocks cool the coolant, facilitating condensation.

[0059] Hydrogen peroxide can be purified by the evaporator 2. The raw material can be fed into the evaporator 2 through the first conveying pipe 3. The steam can be fed into the condenser 16 through the collection hopper 4. The hydrogen peroxide in the collection box 6 can be fed into the low-temperature refrigeration temperature controller 8 through the water pump and the second conveying pipe 7. Then, it is condensed at low temperature. The additive can be added into the hydrogen peroxide through the feeding box 10 to facilitate condensation. The water contained in the raw material first freezes into ice. Then, the second electric telescopic rod 29 is activated to move the baffle 28 downward, so that the uncondensed hydrogen peroxide flows into the defrosting box 12. Then it is fed into the storage box 14 for storage. After that, the first electric telescopic rod 26 is activated to move the discharge plate 27. The discharge plate 27 pushes the ice into the defrosting box 12 for defrosting.

[0060] The above-disclosed embodiments are merely preferred embodiments of the present invention and should not be construed as limiting the scope of the present invention. Therefore, equivalent variations made in accordance with the claims of the present invention are still within the scope of the present invention.

Claims

1. A high-purity hydrogen peroxide purification device, characterized in that, include: Raw material box (1); An evaporation and purification assembly is arranged on one side of the raw material tank (1), and the evaporation and purification assembly is connected to the raw material tank (1) for purifying hydrogen peroxide; Collection box (6), which is connected to the evaporation and purification assembly, is used to store purified hydrogen peroxide; A low-temperature purification component is arranged on one side of the collection box (6) and is connected to the collection box (6); One end of the evaporation and purification component is connected to a condenser tube (16), and one end of the condenser tube (16) is connected to the collection box (6); The condenser tube (16) is provided with a first cooling tube (5) on its outside. The top of the first cooling tube (5) is provided with a first water cooling tube (17) and the bottom of the first cooling tube (5) is provided with a second water cooling tube (19). The first water cooling tube (17) and the second water cooling tube (19) are both connected to the inside of the first cooling tube (5). A thawing box (12) is provided on one side of the low-temperature purification component. The thawing box (12) is connected to the low-temperature purification component and is used to store ice. The interior of the thawing box (12) is provided with a plurality of second copper pipes (31) and a first copper pipe (30). The second copper pipes (31) and the first copper pipes (30) are arranged opposite to each other. A plurality of third copper pipes (32) are arranged between the second copper pipes (31) and the first copper pipes (30). The two ends of the third copper pipes (32) are respectively connected to the second copper pipes (31) and the third copper pipes (32). A first water tank (21) and a second water tank (22) are arranged opposite to each other on one side of the thawing box (12). The second copper pipe (31) is connected to the first water tank (21). The first copper pipe (30) is connected to the second water tank (22). The first water cooling pipe (17) and the second water cooling pipe (19) are respectively connected to the first water tank (21) and the second water tank (22) through a water pump. A storage box (14) is provided on one side of the defrosting box (12), and the storage box (14) is connected to the defrosting box (12) through a third conveying pipe (13). A drain pipe (15) is provided on the other side of the defrosting box (12).

2. The high-purity hydrogen peroxide purification device according to claim 1, characterized in that: The condenser tube (16) has two tapered tubes (23) arranged opposite each other inside, and a plurality of second cooling tubes (24) are arranged between the two tapered tubes (23). One end of the first water cooling tube (17) is provided with a first branch tube (18), and one end of the second water cooling tube (19) is provided with a second branch tube (20). The first branch tube (18) and the second branch tube (20) are respectively connected to the two tapered tubes (23).

3. The high-purity hydrogen peroxide purification device according to claim 1, characterized in that: The evaporation and purification assembly includes an evaporator (2), which is located on one side of the raw material tank (1). The liquid inlet of the evaporator (2) is connected to a first conveying pipe (3), one end of which is connected to the raw material tank (1) via a water pump. The gas outlet of the evaporator (2) is provided with a collection hopper (4), one end of which is connected to the condenser pipe (16).

4. The high-purity hydrogen peroxide purification device according to claim 1, characterized in that: The low-temperature purification component includes a low-temperature refrigeration temperature controller (8), and a second conveying pipe (7) is provided inside the low-temperature refrigeration temperature controller (8). One end of the second conveying pipe (7) is connected to the collection box (6) through a water pump. A material conveying box (11) is provided on one side of the low-temperature refrigeration temperature controller (8), and the material conveying box (11) is connected to the defrosting box (12).

5. The high-purity hydrogen peroxide purification device according to claim 4, characterized in that: The inner top of the low-temperature refrigeration temperature controller (8) is provided with an isolation plate (25), and the inner wall of the low-temperature refrigeration temperature controller (8) is provided with two first electric telescopic rods (26). The output end of the first electric telescopic rod (26) passes through the isolation plate (25) and is connected to a discharge plate (27).

6. The high-purity hydrogen peroxide purification device according to claim 4, characterized in that: The low-temperature refrigeration temperature controller (8) is equipped with a second electric telescopic rod (29) at the bottom, and the output end of the second electric telescopic rod (29) is connected to a baffle (28).

7. The high-purity hydrogen peroxide purification device according to claim 4, characterized in that: The low-temperature refrigeration temperature controller (8) is provided with a mounting bracket (9) on top, and a feeding box (10) is provided on top of the mounting bracket (9). The bottom of the feeding box (10) extends into the interior of the second conveying pipe (7) through a pipe.

8. The high-purity hydrogen peroxide purification device according to claim 1, characterized in that: A connecting pipe (33) is provided between each of the first copper pipes (30) and the second copper pipes (31).

9. A purification process for a high-purity hydrogen peroxide purification device, characterized in that, Includes the following steps: Step 1: Put the raw materials into the inside of the raw material box (1), and then input them into the evaporator (2) through the water pump to purify the hydrogen peroxide; Step 2: The gas enters the interior of the condenser tube (16), and the water coolant is pumped into the interior of the first cooling tube (5) by the water pump. The condenser tube (16) is cooled by the water coolant and condensed to complete the evaporation and purification. The purified hydrogen peroxide is then fed into the collection box (6). Step 3: The hydrogen peroxide inside the collection box (6) is fed into the low-temperature refrigeration temperature controller (8) through the water pump and the second delivery pipe (7). Then, the hydrogen peroxide is condensed at low temperature. The additive can be added into the hydrogen peroxide through the feeding box (10) for condensation. The water first freezes into ice. Then, the second electric telescopic rod (29) is started to drive the baffle (28) to move downward, so that the uncondensed hydrogen peroxide flows into the defrosting box (12) and is then fed into the storage box (14) for storage.

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