Non-invasive ultrasonic gas concentration and flow synchronous measuring device

Abstract

The invention discloses a non-invasive ultrasonic gas concentration and flow synchronous measurement device, and relates to the field of gas measurement equipment. The clamp body clamps and wraps the gas pipeline, and the clamp body is provided with a mounting space; the transducer assembly comprises a pair of ultrasonic transducers, each ultrasonic transducer comprises a sound wave generating surface, and a non-zero included angle is formed between the sound wave generating surface and the extending direction of the gas pipeline; the flexible ultrasonic transmission assembly comprises an acoustic coupling piece and an acoustic wave absorbing piece, the acoustic coupling piece is used for constructing a sound wave conduction path from the ultrasonic transducer to the gas pipeline in the first direction, and the acoustic wave absorbing piece is used for attenuating structural waves propagating in the second direction along the outer wall of the gas pipeline. By adopting the scheme, high-efficiency and high-precision gas concentration and flow measurement is realized on the premise of non-intrusive gas measurement equipment.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of gas measurement equipment, and particularly relates to a non-invasive ultrasonic gas concentration and flow synchronous measurement device. BACKGROUND

[0002] With the rapid development of industrial automation and precision manufacturing technology, the accurate measurement of gas flow and composition parameters is increasingly important in many industries, especially in the semiconductor manufacturing process, such as chemical vapor deposition (CVD), metal organic chemical vapor deposition (MOCVD), and atomic layer deposition (ALD) vapor deposition processes, which all require accurate monitoring of reaction gases and byproduct gases to ensure process stability and yield. Therefore, gas detection equipment is widely used in semiconductor process chambers, delivery pipelines, and environmental monitoring links. In order to achieve continuous and efficient gas parameter monitoring, the industry generally uses ultrasonic, thermal, and spectral detection methods, among which ultrasonic detection is widely concerned due to its non-contact, fast response, and simultaneous measurement of multiple parameters.

[0003] Currently, traditional ultrasonic gas flow meters mostly use invasive or pipe section structures, which require the measurement cavity to be connected in series to the process pipeline to form an independent sound channel for flow measurement. Although such structures can obtain high signal strength, they can easily cause pressure loss, particle contamination, and leakage risk in semiconductor gas delivery systems, increasing equipment maintenance costs and potentially affecting process cleanliness and system safety. On the other hand, when applying an external liquid flow meter technology directly to gas media, the acoustic impedance of gas is much lower than that of liquid, resulting in a significant decrease in sound transmission efficiency and severe signal attenuation, making it difficult to achieve stable and effective sound energy transmission. As a result, the signal-to-noise ratio is low, the propagation time measurement error is large, and it cannot meet the high-precision flow and sound velocity measurement requirements.

[0004] Existing external wall ultrasonic measurement structures can achieve gas flow detection to some extent, but most of them only focus on single flow rate measurement, and the transducer coupling method and structure design cannot meet the high precision and stability requirements of sound velocity measurement for gas concentration measurement. Especially in semiconductor process gases, sound wave propagation is also affected by multiple factors such as pipe wall vibration, gas molecular composition fluctuation, and thermal field disturbance, resulting in unstable signals and measurement results prone to drift. Therefore, how to achieve efficient and high-precision gas concentration and flow measurement under the premise of non-invasive gas measurement equipment has become a technical problem to be solved. SUMMARY

[0005] The present application relates to the technical field of gas measurement equipment, and particularly relates to a non-invasive ultrasonic gas concentration and flow synchronous measurement device.

[0006] To achieve the above object, the technical scheme of the present application is as follows: A non-invasive ultrasonic gas concentration and flow synchronous measurement device, comprising: A gas pipeline; A clamp body clamping and covering the outside of the gas pipeline, the clamp body being provided with a mounting space; A transducer assembly comprising a pair of ultrasonic transducers arranged in the mounting space, the ultrasonic transducers comprising a sound wave generating surface, the sound wave generating surface and the extension direction of the gas pipeline forming a non-zero angle; A flexible ultrasonic transmission assembly located between the clamp body and the outer wall of the gas pipeline and adhering to the outer wall of the gas pipeline, comprising an acoustic coupling member and an acoustic wave absorbing member, the acoustic coupling member being located between the sound wave generating surface and the outer wall of the gas pipeline, and the acoustic wave absorbing member being arranged on the outer wall of the gas pipeline and located between the two ultrasonic transducers; Wherein, the acoustic impedance value of the acoustic coupling member is between the acoustic impedance of the piezoelectric material of the ultrasonic transducer and the acoustic impedance of the gas pipeline, the acoustic coupling member is used to build an acoustic wave conduction path from the ultrasonic transducer to the gas pipeline in a first direction, and the acoustic wave absorbing member is used to attenuate structural waves propagating in a second direction along the outer wall of the gas pipeline.

[0007] Further, the outer wall of the gas pipeline is provided with a first mounting groove, and the acoustic coupling member is partially embedded and fixed in the first mounting groove.

[0008] Further, the outer wall of the gas pipeline is provided with a second mounting groove, and the acoustic wave absorbing member is partially embedded and fixed in the second mounting groove, and the first mounting groove and the second mounting groove are left with a mounting gap.

[0009] Further, along the direction perpendicular to the sound wave generating surface, the profile of the acoustic coupling member on the outer wall of the gas pipeline completely envelopes the projection profile of the sound wave generating surface.

[0010] Further, the acoustic coupling member is a flexible composite material layer, the flexible composite material layer comprising a high molecular polymer matrix and a high-density filler dispersed in the high molecular polymer matrix, the high-density filler comprising at least one of tungsten powder, silicon dioxide or boron nitride powder.

[0011] Further, the composition of the flexible composite material layer comprises: The high molecular polymer matrix is high temperature vulcanized silicone rubber, with a volume percentage of 40% to 45%; The high-density filler is micron-level tungsten powder, with a volume percentage of 45% to 50%; and a modified filler.

[0012] Further, the modified filler comprises: a first modified filler, which is hexagonal boron nitride powder, and the volume percentage is 5% to 8%; a second modified filler, which is fumed silica, and the volume percentage is 2% to 4%.

[0013] Further, the acoustic coupling member is a first arc-shaped gasket, and the inner surface curvature of the first arc-shaped gasket is matched with the outer wall curvature of the gas pipeline.

[0014] Further, the acoustic wave absorbing member is a second arc-shaped gasket, and the inner surface curvature of the second arc-shaped gasket is matched with the outer wall curvature of the gas pipeline, and the arc length of the second arc-shaped gasket is greater than or equal to the arc length of the first arc-shaped gasket.

[0015] Further, the ultrasonic transducer comprises a shell, a piezoelectric ceramic sheet arranged in the shell, and an acoustic wave coupling body; the acoustic wave coupling body is arranged between the piezoelectric ceramic sheet and the gas pipeline, and is used for turning the acoustic wave propagation direction perpendicular to the acoustic wave emitting surface of the piezoelectric ceramic sheet by a predetermined angle, so as to point to the gas pipeline.

[0016] Further, the acoustic wave coupling body is a block structure with a slope surface, and the acoustic wave coupling body is composed of the flexible composite material layer.

[0017] Further, the clamp body comprises a first clamping part, a second clamping part, and a fastener, the first clamping part and the second clamping part are hinged and are formed with a clamping space for accommodating the gas pipeline, and the fastener is connected between the first clamping part and the second clamping part.

[0018] Further, the fastener comprises a fastening pin and a knob threadedly matched with the fastening pin.

[0019] Further, the acoustic wave emitting surface and the acoustic wave receiving surface are both towards the inner wall of the gas pipeline, and the non-zero angle between the acoustic wave emitting surface and / or the acoustic wave receiving surface and the inner wall of the gas pipeline can be changed, so as to adjust the reflection times of the ultrasonic waves in the gas pipeline.

[0020] The non-invasive ultrasonic gas concentration and flow synchronous measurement device has the beneficial effects that: the clamp body is clamped and wrapped on the outer wall of the gas pipeline, so that the precise positioning and installation angle control of the transducer assembly in the clamp body are realized. The pair of ultrasonic transducers in the transducer assembly are arranged at a non-zero angle, and the sound wave generating surfaces thereof form a fixed geometric relationship with respect to the extension direction of the pipeline, so that the ultrasonic waves emitted can establish multiple reflections inside the gas pipeline, and then the ultrasonic waves fully contact the gas, so that the measurement accuracy is improved. The flexible ultrasonic transmission assembly is arranged between the clamp body and the outer wall of the gas pipeline, so that the sealing property of clamping is maintained, and the transducer sound waves can be stably transmitted to the outer wall of the pipeline. The flexible ultrasonic transmission assembly includes an acoustic coupling member and an acoustic wave absorbing member, and the two members play a synergistic role in the sound field path. The acoustic coupling member is arranged between the sound wave generating surface of the ultrasonic transducer and the outer wall of the gas pipeline, and the acoustic impedance value thereof is between the piezoelectric material of the transducer and the material of the gas pipeline, so that the interface reflection is significantly reduced through impedance matching, the sound wave transmission efficiency is improved, and the sound energy is efficiently conducted to the gas pipeline in the first direction. The acoustic wave absorbing member is arranged on the outer wall of the gas pipeline and between the two ultrasonic transducers, and is used for absorbing the structure wave propagating in the second direction along the pipeline wall, and suppressing the interference caused by the ultrasonic wave component and the pipeline wall reflection of the gas pipeline, clamp vibration and environmental noise. Through the above scheme, efficient and high-precision gas flow rate and flow measurement can be realized in a non-invasive manner. BRIEF DESCRIPTION OF DRAWINGS

[0021] Figure 1 FIG. 1 is a schematic diagram of the overall structure of the non-invasive ultrasonic gas concentration and flow synchronous measurement device of the present application; Figure 2 FIG. 2 is a side view of the non-invasive ultrasonic gas concentration and flow synchronous measurement device of the present application; Figure 3 FIG. 3 is a schematic diagram of the A-A perspective view of the non-invasive ultrasonic gas concentration and flow synchronous measurement device of the present application; Figure 2 Figure 4 FIG. 4 is a front view of the non-invasive ultrasonic gas concentration and flow synchronous measurement device of the present application; Figure 5 FIG. 5 is an exploded view of the non-invasive ultrasonic gas concentration and flow synchronous measurement device of the present application; Figure 6 FIG. 6 is a sectional view of the ultrasonic transducer of the embodiment of the present application.

[0022] ​1, gas pipeline; 2, clamp body; 21, first clamping part; 22, second clamping part; 23, fastening shaft pin; 24, fastening pin; 25, linking shaft pin; 26, knob; 3, ultrasonic transducer; 31, shell; 32, piezoelectric ceramic sheet; 33, acoustic coupling body; 34, potting adhesive; 35, conductive copper column; 4, flexible ultrasonic transmission assembly; 41, acoustic coupling member; 42, acoustic wave absorbing member. DETAILED DESCRIPTION

[0023] To make the objects, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be described clearly and completely below. Obviously, the described embodiments are some but not all of the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the protection scope of the present application. Unless otherwise defined, the technical terms or scientific terms used herein should be understood as the common meanings of the terms to those of ordinary skill in the art to which the present application belongs. The terms such as "comprise" and the like used herein are intended to encompass the elements or components appearing before the terms and the equivalents thereof, and do not exclude other elements or components.

[0024] The accompanying drawings are referred to in the description of the embodiments of the present application. Figure 1 The accompanying drawings are referred to in the description of the embodiments of the present application. Figure 6 The specific embodiments of the present application are further described in detail.

[0025] Reference is made to the accompanying drawings throughout the following detailed description. Figures 1-6 In some embodiments of the present application, a non-invasive ultrasonic gas concentration and flow rate synchronous measurement device mainly comprises a gas pipeline 1, a clamp body 2, a transducer assembly and a flexible ultrasonic transmission assembly 4. The device performs non-contact acoustic measurement on the gas in the inner cavity by arranging an ultrasonic transducer 3 on the outer wall of the gas pipeline 1, and realizes synchronous high-precision measurement of the gas flow rate and concentration by combining the geometric angle configuration of the ultrasonic transducer 3 and the structure and arrangement of the flexible ultrasonic transmission assembly 4. The acoustic coupling member 41 is used to construct an acoustic wave transmission path from the ultrasonic transducer 3 to the gas pipeline 1 in the first direction, and the acoustic wave absorbing member 42 is used to attenuate the structural wave propagating in the second direction along the outer wall of the gas pipeline 1. The whole structure takes into account the acoustic energy transmission efficiency and anti-interference ability on the premise of ensuring non-invasive installation, thereby significantly improving the precision and stability of non-invasive gas measurement.

[0026] In some embodiments of the present application, the acoustic coupling member 41 has a profile on the outer wall of the gas conduit 1 that completely envelops the projection profile of the sound generating surface in the direction perpendicular to the sound generating surface. With the above scheme, the sound energy field generated by the ultrasonic transducer 3 at the sound generating surface is not an ideal absolute plane wave, and the energy distribution thereof can have a certain diffusion angle. If the projection area of the acoustic coupling member 41 is less than or equal to the sound generating surface, part of the sound energy emitted from the edge of the transducer will not be effectively introduced into the wall of the gas conduit 1 through the coupling member, but will be reflected or scattered and lost. By letting the profile of the coupling member "completely envelop" the profile of the sound generating surface, it is ensured that all effective sound energy emitted from the transducer can be "captured" and guided to the gas conduit 1, thereby minimizing the loss of sound energy transmission and facilitating the subsequent acquisition of detection signals with high signal-to-noise ratio.

[0027] In some embodiments of the present application, the gas conduit 1 is the main flow path in the gas transmission process, which can be a metal or non-metal conduit structure, such as a stainless steel pipe, an aluminum pipe or an engineering plastic pipe. The gas conduit 1 serves to provide a stable gas flow channel, and its outer wall is the coupling interface for ultrasonic sound energy transmission. In order to achieve measurement without cutting and intrusion, the present application fixes the detection structure on the outer wall surface of the conduit by an external clamp, so that the sound energy of the transducer effectively enters the conduit through the flexible acoustic medium and interacts with the internal gas.

[0028] Specifically, the clamp body 2 is used to clamp and cover the gas conduit 1, and an installation space is provided in the interior thereof for accommodating the transducer assembly and the flexible ultrasonic transmission assembly 4. The clamp is designed in a detachable structure, including a first clamping part 21 and a second clamping part 22, which are connected by hinging and locked by a fastener, so that the assembly can be completed without damaging the gas conduit 1. This design facilitates in-service installation and maintenance, and is particularly suitable for the gas supply pipe network system already deployed in the semiconductor production line. By adjusting the installation angle and fastening force of the clamp, the incident angle of the transducer sound wave and the sound path can be accurately controlled, thereby ensuring the measurement repeatability.

[0029] In some embodiments of the present application, a pair of ultrasonic transducers 3 are installed inside the clamp, and arranged at a non-zero angle along the extension direction of the gas pipeline 1. Under the drive of the controller, the two transducers alternately emit and receive ultrasonic pulse signals, forming two propagation paths in the forward and reverse directions. By measuring the time difference of ultrasonic propagation in the two directions, and combining the sound path length and the incident angle parameters, the average flow rate of the gas can be calculated. Further, by combining the forward and reverse flow times, the sound speed of the gas is obtained, and according to the physical function relationship between the sound speed and the composition or concentration of the gas, the gas concentration can be deduced, realizing the simultaneous measurement of flow rate and concentration. By using the above scheme, through the specific angle arrangement of the ultrasonic transducers 3 and the matching of the flexible acoustic medium, efficient acoustic energy transmission and accurate sound speed measurement are realized under the condition of external clamping and non-invasive, thereby solving the technical problems of serious signal attenuation, strong structural wave interference and difficult to guarantee precision in the traditional external clamping technology.

[0030] In some embodiments of the present application, the transducer assembly includes a pair of ultrasonic transducers 3 arranged in the mounting space of the clamp body 2. Specifically, the mounting space is a hole-shaped area. Each ultrasonic transducer 3 includes a shell 31, a piezoelectric ceramic sheet 32, and an acoustic coupling body 33. Preferably, the piezoelectric ceramic sheet 32 is electrically connected with a conductive copper column 35, and the conductive copper column 35 is filled with potting glue 34 between the shell 31. The potting glue 34 is used for insulation and to improve the impact resistance of the shell 31 and the conductive copper column 35. The shell 31 is used to protect the internal sensitive unit from mechanical impact and environmental pollution, and its material can be aluminum alloy or engineering plastic, which has good mechanical stability and thermal conductivity. The piezoelectric ceramic sheet 32 is installed at a fixed position in the shell 31, and generates ultrasonic vibration or generates an electric signal in response to incident sound waves through a driving signal. In order to realize the direction control of the acoustic wave at a non-zero angle, the piezoelectric ceramic sheet 32 is fixedly installed between the acoustic coupling body 33.

[0031] In some embodiments of the present application, the acoustic coupling body 33 is a block structure with a slope surface, which is made of a flexible composite material layer to change the direction of sound wave propagation. Specifically, the cross section of the acoustic coupling body 33 is a right trapezoidal shape, and the inclined edge is directed towards the outer wall of the gas pipeline 1. Among them, the ultrasonic wave propagates vertically in the piezoelectric ceramic sheet 32, and after refraction through the acoustic coupling body 33, it is directed at a set angle to the inner cavity of the gas pipeline 1, thereby forming an ultrasonic wave propagation path. Through the geometric design of the structure of the acoustic coupling body 33, the incident angle can be flexibly adjusted to match the gas pipeline 1 of different pipe diameters and different flow rate ranges.

[0032] Preferably, a non-zero angle, for example 30° to 45°, is formed between the sound wave generating surface of the ultrasonic transducer 3 and the extension direction of the gas pipeline 1. The presence of the non-zero angle ensures that the sound wave propagates in the pipeline at a certain length of oblique path, forming a measurable time difference. If the incident angle is zero, the ultrasonic wave only vertically enters, and the flow rate information cannot be obtained; if the angle is too large, the sound wave attenuation is enhanced, and the reflection interference is increased. By arranging at a suitable non-zero angle, the sound wave can be reflected multiple times in the gas medium, fully interacting with the gas, and improving the signal resolution and sound path stability.

[0033] Further, the sound wave generating surface includes a sound wave emitting surface and a sound wave receiving surface, both of which are directed towards the inner wall of the pipeline. By adjusting the structure of the sound wave coupling body 33 or the angle of the ultrasonic transducer, the emitting surface or the receiving surface can form an adjustable angle with the inner wall of the pipeline, thereby adjusting the number of reflections and the propagation path of the sound wave in the pipeline. Through the angle control design of the ultrasonic emission and reception of the ultrasonic transducer 3, the sound wave can form a stable propagation channel in the gas medium, realizing high-resolution measurement of flow rate and sound speed. The sound wave coupling body 33 adopts a flexible composite material layer, which can not only realize direction conversion but also reduce reflection loss, significantly improving the utilization rate of sound energy. At the same time, through the angle-adjustable arrangement, the applicability of the device to different pipe diameters and different medium conditions can be expanded.

[0034] In some embodiments of the present application, the flexible ultrasonic transmission assembly 4 is located between the clamp body 2 and the outer wall of the gas pipeline 1 and is attached to the outer wall. The assembly is composed of an acoustic coupling member 41 and an acoustic wave-absorbing member 42, which work together in the sound field path to ensure that the sound wave is effectively transmitted from the transducer to the gas medium in the gas pipeline 1, while suppressing the structural noise propagating in the pipe wall. The acoustic coupling member 41 is located between the sound wave generating surface of the ultrasonic transducer 3 and the outer wall of the gas pipeline 1, and is used to build a sound conduction path in the first direction. Its acoustic impedance value is between the piezoelectric material of the transducer and the material of the gas pipeline 1, thereby realizing acoustic impedance matching and reducing reflection loss of the sound wave at the interface.

[0035] In some embodiments of the present application, the acoustic coupling member 41 is a flexible composite material layer in the present application, which includes a high molecular polymer matrix and a high-density filler dispersed therein. Preferably, the polymer matrix is high-temperature vulcanized silicone rubber, accounting for 40% to 45% of the total volume; the high-density filler is micron-sized tungsten powder, accounting for 45% to 50%; and a modified filler is added to optimize the acoustic and mechanical properties.

[0036] In some embodiments of the present application, the modified filler includes hexagonal boron nitride powder (5-8% by volume) and fumed silica (2-4% by volume). Boron nitride has excellent thermal conductivity and acoustic propagation characteristics, and silica can improve the uniformity and interfacial adhesion of the composite system. Through the composite system, the acoustic impedance value of the acoustic coupling member can be increased by 5-10 MRay, between the piezoelectric material of the ultrasonic transducer about 30 MRayl and the stainless steel pipe wall about 45 MRayl, effectively bridging the difference between the piezoelectric ceramic sheet and the metal pipe wall, significantly improving the energy transmission efficiency to achieve efficient acoustic energy transmission; at the same time, due to the flexible nature of the flexible composite material, it has anti-skid and damping shock absorbing functions.

[0037] In some embodiments of the present application, the acoustic coupling member 41 is a first arc-shaped gasket, the inner surface curvature of which is adapted to the curvature of the outer wall of the gas pipeline 1, so that it can be fully fitted without air gap. Projected in the direction perpendicular to the sound wave generating surface, the profile of the acoustic coupling member 41 on the outer wall of the pipeline completely envelopes the projected profile of the sound wave generating surface, to ensure complete coverage of acoustic energy without side leakage. Through the above structural design, the acoustic coupling member 41 forms a high-efficiency acoustic energy conduction interface, realizing high-fidelity energy transmission under non-invasive conditions. The flexible material can absorb the unevenness caused by small assembly tolerances, ensuring consistent transmission of acoustic energy between transducers. Compared with traditional liquid coupling agents, this solid material does not have the problem of drying out or flow decay, greatly improving long-term measurement stability.

[0038] In some embodiments of the present application, the acoustic wave absorber 42 is arranged on the outer wall of the gas pipeline 1 between the two ultrasonic transducers 3, for absorbing the structural waves propagating along the pipe wall. Preferably, the acoustic wave absorber 42 is a second arc-shaped gasket, the curvature of the inner surface of which is also matched with the curvature of the outer wall of the gas pipeline 1. The arc length of the second arc-shaped gasket is greater than or equal to that of the first arc-shaped gasket, so as to ensure covering a sufficient pipe wall area and achieving sufficient absorption of the structural waves. The acoustic wave absorber 42 is coated or attached to the corresponding positions of the outer wall of the pipeline and the clamp body 2 between the two ultrasonic transducers, and is made of a material with a high damping coefficient, such as butyl rubber or neoprene, for attenuating the "parasitic" ultrasonic waves, i.e. the structural waves, propagating along the pipe wall, so as to prevent them from directly interfering with the receiving ultrasonic transducers, thereby improving the signal-to-noise ratio. The acoustic wave absorber 42 has a slightly lower density and a higher internal loss coefficient, so as to enhance the ability of dissipating the mechanical wave energy. The acoustic wave absorber 42 effectively suppresses the pipe wall vibration and clamp coupling vibration caused by acoustic wave transmission, and reduces the interference of environmental noise and reflected waves on signal acquisition. By controlling the thickness and position of the acoustic wave absorber 42, the signal-to-noise ratio can be further optimized. The addition of the acoustic wave absorber 42 significantly improves the sound field isolation of the outer clamp structure. In a conventional outer clamp ultrasonic measurement, the pipe wall vibration often leads to multipath interference and baseline drift. Through the design of the acoustic wave absorber 42, an effective structural wave damping zone is formed, which provides a basis for high-precision sound velocity and flow rate measurement. It should be noted that the number of the first arc-shaped gasket and the second arc-shaped gasket is not limited, and the specific number of the second arc-shaped gasket is related to the length of the gas pipeline 1.

[0039] In some embodiments of the present application, the clamp body 2 includes a first clamping part 21, a second clamping part 22 and a fastener. The first clamping part 21 and the second clamping part 22 are connected by a hinge to form an openable and closable structure, and when they are closed, they enclose a clamping space for accommodating the gas pipeline 1. The fastener includes a fastening pin 24 and a knob 26, and the clamping force is adjusted by threaded cooperation. The clamp body 2 can be made of high-strength aluminum alloy material and processed by CNC precision machining, and the inside is formed with transducer mounting holes and wire through holes to realize the fixation of the transducer assembly and the signal lead-out. Specifically, one side of the first clamping part 21 and the second clamping part 22 is hinged by a link shaft pin 25, the other side of the first clamping part 21 is provided with a fastening shaft pin 23, the fastening shaft pin 23 is vertically fixedly connected with the fastening pin 24, the second clamping part 22 is provided with a avoiding space for avoiding the fastening pin 24, and the knob 26 is in threaded cooperation with the fastening pin 24, and the clamping force of the gas pipeline 1 and the flexible ultrasonic transmission assembly 4 can be adjusted by rotating the knob 26.

[0040] Preferably, the mounting hole inside the clamp body 2 has a specific angular arrangement to ensure that the sound wave emission direction of the ultrasonic transducer conforms to the predetermined geometric angle relationship. By adjusting the locking force of the knob 26, the clamp can be tightly fitted with the gas pipeline 1, thereby stabilizing the acoustic coupling path. The installation process does not require cutting or drilling of the pipeline, and can be quickly assembled under pressure or in service, meeting the requirements of continuous gas supply of the semiconductor production line. The above scheme design takes into account the installation precision and operational convenience, and the adjustable fastening mechanism ensures the repeatability of assembly and avoids the sound path deviation caused by uneven clamping stress. The use of high-rigidity metal materials effectively isolates external vibration and ensures the long-term stability of the transducer angle, thereby improving the measurement consistency.

[0041] In some other embodiments of the present application, the outer wall of the gas pipeline 1 can be pre-fabricated with a first mounting groove and a second mounting groove for fixing the acoustic coupling member 41 and the acoustic wave absorbing member 42, respectively. The acoustic coupling member 41 is partially embedded in the first mounting groove, and the acoustic wave absorbing member 42 is partially embedded in the second mounting groove, leaving a mounting gap between the two grooves for adapting to the compression and lateral expansion of the flexible material, and also avoiding sound field crosstalk. By embedding the mounting method, displacement of the flexible material due to temperature or stress changes can be prevented, improving long-term sealing and stability.

[0042] In another embodiment, the sound wave coupling body 33 can adopt a stepped or multi-layer composite structure to further control the sound wave refraction angle and frequency response, so that the device can adapt to different gas types and pipe diameter sizes. For example, for different gases in semiconductor processes, the sound speed and density differ greatly, and by adjusting the sound wave incidence angle and the thickness of the composite layer, the sound path matching and measurement sensitivity can be optimized.

[0043] In some other embodiments of the present application, the clamp body 2 can be provided with a micro-convex positioning structure on the inner surface to ensure the assembly precision and repeatability of the acoustic gasket. To improve the overall environmental adaptability, a heat insulation layer or a shielding layer can be added outside the clamp to resist high-temperature or electromagnetic interference environments. The transducer assembly can be connected with the signal processing module through a flexible cable for convenient post-installation maintenance.

[0044] In summary, the non-invasive ultrasonic gas concentration and flow synchronous measurement device of the present application realizes the unity of efficient sound energy transmission and pipe wall noise suppression through the cooperative design of the clamp body 2, the transducer assembly and the flexible acoustic transmission assembly. By designing a non-zero angle sound path and an impedance matching coupling path, the problem that the external clamping liquid flow meter technology cannot be directly used for gas due to the low gas acoustic impedance and serious signal attenuation is overcome, and high-precision gas parameter measurement is realized without damaging the pipeline. The device has compact structure, easy installation and stable signal, and is particularly suitable for gas delivery and reaction monitoring in semiconductor manufacturing processes, and has significant industrial application value and application potential.

[0045] In the present application, unless otherwise explicitly specified and limited, the terms "connection", "fixing" and the like should be understood in a broad sense, for example, "fixing" can be fixed connection, or detachable connection, or integral; can be mechanical connection, or electrical connection; can be directly connected, or indirectly connected through an intermediate medium, can be the internal communication of two elements or the interaction relationship of two elements, unless otherwise explicitly limited. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0046] In addition, if the present application embodiments involve "first", "second" and the like, the "first", "second" and the like are only for the purpose of description, and cannot be understood as indicating or implying the relative importance of the indicated technical features or implicitly indicating the number of the indicated technical features. Therefore, the features limited by "first", "second" can explicitly or implicitly include at least one of the features. In addition, the technical solutions of each embodiment can be combined with each other, but it must be based on the realization of ordinary skilled in the art, when the combination of technical solutions appears contradictory or unachievable, it should be considered that the combination of technical solutions does not exist, nor within the protection scope of the present application.

[0047] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited to this, any change or replacement within the technical scope disclosed by the present application should be covered within the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. A non-invasive ultrasonic gas concentration and flow rate synchronous measurement device, characterized in that, include: Gas pipeline (1); The clamp body (2) clamps and covers the gas pipeline (1), and the clamp body (2) has an installation space. The transducer assembly includes a pair of ultrasonic transducers (3) disposed in the installation space, the ultrasonic transducers (3) including a sound wave generating surface, the sound wave generating surface having a non-zero angle with the extension direction of the gas pipe (1); The flexible ultrasonic transmission component (4) is located between the clamp body (2) and the outer wall of the gas pipe (1) and is attached to the outer wall of the gas pipe (1). It includes an acoustic coupling element (41) and an acoustic absorbing element (42). The acoustic coupling element (41) is located between the sound wave generating surface and the outer wall of the gas pipe (1). The acoustic absorbing element (42) is disposed on the outer wall of the gas pipe (1) and is located between the two ultrasonic transducers (3). The acoustic impedance of the acoustic coupling element (41) is between the acoustic impedance of the piezoelectric material of the ultrasonic transducer (3) and the acoustic impedance of the gas pipe (1). The acoustic coupling element (41) is used to construct a sound wave transmission path from the ultrasonic transducer (3) to the gas pipe (1) in the first direction. The acoustic absorbing element (42) is used to attenuate the structural wave propagating along the outer wall of the gas pipe (1) in the second direction.

2. The non-invasive ultrasonic gas concentration and flow rate synchronous measurement device according to claim 1, characterized in that, The gas pipeline (1) has a first mounting groove on its outer wall, and the acoustic coupling component (41) is partially embedded and fixed in the first mounting groove.

3. The non-invasive ultrasonic gas concentration and flow rate synchronous measurement device according to claim 2, characterized in that, The gas pipeline (1) has a second mounting groove on its outer wall. The acoustic absorbing component (42) is partially embedded and fixed in the second mounting groove. There is an installation gap between the first mounting groove and the second mounting groove.

4. The non-invasive ultrasonic gas concentration and flow rate synchronous measurement device according to claim 1, characterized in that, Projected along a direction perpendicular to the sound wave generating surface, the contour of the acoustic coupling element (41) on the outer wall of the gas pipe (1) completely encloses the projected contour of the sound wave generating surface.

5. The non-invasive ultrasonic gas concentration and flow rate synchronous measurement device according to claim 1, characterized in that, The acoustic coupling element (41) is a flexible composite material layer, which includes a polymer matrix and a high-density filler dispersed in the polymer matrix. The high-density filler includes at least one of tungsten powder, silicon dioxide, or boron nitride powder.

6. The non-invasive ultrasonic gas concentration and flow rate synchronous measurement device according to claim 5, characterized in that, The flexible composite material layer comprises: The polymer matrix is ​​high-temperature vulcanized silicone rubber, with a volume percentage of 40% to 45%. The high-density filler is micron-sized tungsten powder, with a volume percentage of 45% to 50%. And modified fillers.

7. The non-invasive ultrasonic gas concentration and flow rate synchronous measurement device according to claim 6, characterized in that, The modified filler includes: The first modified filler is hexagonal boron nitride powder, with a volume percentage of 5% to 8%; The second modified filler is fumed silica, with a volume percentage of 2% to 4%.

8. A non-invasive ultrasonic gas concentration and flow rate synchronous measurement device according to claim 7, characterized in that, The acoustic coupling element (41) is a first arc-shaped gasket, the curvature of the inner surface of the first arc-shaped gasket being adapted to the curvature of the outer wall of the gas pipe (1).

9. A non-invasive ultrasonic gas concentration and flow rate synchronous measurement device according to claim 8, characterized in that, The acoustic absorbing element (42) is a second arc-shaped gasket. The curvature of the inner surface of the second arc-shaped gasket is adapted to the curvature of the outer wall of the gas pipe (1), and the arc length of the second arc-shaped gasket is greater than or equal to the arc length of the first arc-shaped gasket.

10. A non-invasive ultrasonic gas concentration and flow rate synchronous measurement device according to claim 1, characterized in that, The ultrasonic transducer (3) includes a housing (31), a piezoelectric ceramic sheet (32) disposed in the housing (31), and an acoustic coupler (33); the acoustic coupler (33) is disposed between the piezoelectric ceramic sheet (32) and the gas pipe (1) and is used to turn the propagation direction of the sound wave perpendicular to the emitting surface of the piezoelectric ceramic sheet (32) by a predetermined angle so that it points to the gas pipe (1).

11. A non-invasive ultrasonic gas concentration and flow rate synchronous measurement device according to claim 10, characterized in that, The acoustic coupler (33) is a block structure with a sloping surface, and the acoustic coupler (33) is composed of a flexible composite material layer as described in any one of claims 5-7.

12. The non-invasive ultrasonic gas concentration and flow rate synchronous measurement device according to claim 1, characterized in that, The clamp body (2) includes a first clamping part (21), a second clamping part (22) and a fastener. The first clamping part (21) and the second clamping part (22) are hinged to form a clamping space for accommodating the gas pipe (1). The fastener is connected between the first clamping part (21) and the second clamping part (22).

13. A non-invasive ultrasonic gas concentration and flow rate synchronous measurement device according to claim 12, characterized in that, The fastener includes a fastening pin (24) and a knob (26) that is threaded into the fastening pin (24).

14. The non-invasive ultrasonic gas concentration and flow rate synchronous measurement device according to claim 1, characterized in that, The sound wave generating surface includes a sound wave emitting surface and a sound wave receiving surface. Both the sound wave emitting surface and the sound wave receiving surface face the inner wall of the gas pipe (1). The non-zero angle between the sound wave emitting surface and / or the sound wave receiving surface and the inner wall of the gas pipe (1) can be changed to adjust the number of times the ultrasonic wave is reflected in the gas pipe (1).

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