Surface spark discharge strong pre-ionization pulse gas laser based on corona

Abstract

The invention relates to the technical field of lasers, and discloses a corona-based creeping spark discharge strong pre-ionization pulse gas laser which comprises a main frame chamber, a pre-ionization device is fixedly mounted at the top of an inner cavity of the main frame chamber, a cathode electrode is arranged at the top of the inner cavity of the main frame chamber, and a connecting copper sheet is fixedly mounted on the lateral upper portion of the inner wall of the main frame chamber. A flow guide plate is fixedly installed on the connecting copper sheet, and an anode electrode is fixedly installed at the top end of the flow guide plate. A corona-based creeping spark discharge strong pre-ionization pulse gas laser is characterized in that a pre-ionization area can be formed on a pre-ionization device and structures on the pre-ionization device, electrons in the pre-ionization area move in an accelerated manner under the action of electric field force, and in the movement process, the electrons in the pre-ionization area are separated from the pre-ionization device. And the electrons and other gas particles are subjected to inelastic collision and ionization or excitation, so that high-concentration and uniform initial electrons are generated, a micro-discharge channel is formed, and continuous seed electrons are provided for a core discharge region of the micro-discharge channel.

Description

TECHNICAL FIELD

[0001] The application relates to the technical field of lasers, in particular to a strong pre-ionization pulsed gas laser based on surface spark discharge corona. BACKGROUND

[0002] The excimer laser is a high-power pulsed laser with inert gas and halogen gas mixture as working medium, and is widely used in the fields of semiconductor lithography, medical surgery and material processing due to its short wavelength, small thermal damage and high processing resolution. The excimer laser output energy depends on the pre-ionization degree of the gas medium, that is, the initial electron concentration and distribution state in the discharge starting stage. The corona pre-ionization is one of the main technologies, and the basic principle is to set an auxiliary pre-ionization electrode on the side or below the main discharge electrode and apply a high-voltage pulse to form a strong electric field at the electrode tip or edge, thereby causing local corona discharge to produce ultraviolet radiation. However, the traditional corona pre-ionization device is only a transient and single event in the pre-ionization process, which causes the seed electrons generated by initial pre-ionization to rapidly decay due to attachment, recombination and diffusion effects in the long pulse width discharge process, resulting in insufficient pre-ionization in the second half of the discharge and causing arc discharge phenomenon, which makes the discharge unstable or even terminated, seriously limiting the effective extraction of laser energy. Moreover, due to the structural defects of the traditional corona pre-ionization device, the pre-ionization intensity is small, the initial electron concentration is low, and it is difficult to produce uniform glow discharge, which seriously affects the laser gain effect and output stability of the excimer laser.

[0003] Therefore, there is an urgent need for a pre-ionization device for an excimer laser to solve the above-mentioned defects of the existing corona pre-ionization device in actual use. SUMMARY

[0004] The application provides a strong pre-ionization pulsed gas laser based on surface spark discharge corona, which can produce a high concentration of pre-ionization electrons and form a uniform initial electron cloud, providing a continuous source of seed electrons for the core discharge area, ensuring the stability of long pulse width glow discharge. It solves the problem that the traditional corona pre-ionization device is only a transient and single event in the pre-ionization process, which causes the seed electrons generated by initial pre-ionization to rapidly decay due to attachment, recombination and diffusion effects in the long pulse width discharge process, resulting in insufficient pre-ionization in the second half of the discharge and causing arc discharge phenomenon, which makes the discharge unstable or even terminated, seriously limiting the effective extraction of laser energy. Moreover, the pre-ionization intensity is small, the initial electron concentration is low, and it is difficult to produce uniform glow discharge.

[0005] To achieve the above object, the application adopts the following technical scheme: a surface spark discharge strong pre-ionization pulse gas laser based on corona, comprising a main frame chamber, the inside of the main frame chamber is a left-right through hollow structure for installing various electrical elements, the top end of the main frame chamber is fixedly installed with a high-voltage pulse excitation source, and a group of outer end covers for sealing the inner cavity are fixedly installed at the left and right ends of the main frame chamber respectively, a group of pre-ionization devices in the shape of long cylinders are fixedly installed on the left and right sides of the top of the inner cavity of the main frame chamber respectively, and a pre-ionization area is formed between the two groups of pre-ionization devices, under the action of electric field force, the electrons in the pre-ionization area accelerate, in the process of movement, the electrons and other gas particles have inelastic collision and ionization or excitation, thereby generating initial electrons with high concentration and uniformity and forming micro-discharge channels, a cathode electrode electrically connected with the high-voltage pulse excitation source is arranged on the top of the inner cavity of the main frame chamber above the vertical line between the two groups of pre-ionization devices, thereby the high-voltage pulse excitation source can provide high-voltage pulse energy for the cathode electrode, a connecting copper sheet is fixedly installed on the upper side of the inner wall of the main frame chamber, and a flow guide plate is fixedly installed on the connecting copper sheet, thereby under the action of the connecting copper sheet and the flow guide plate, the renewal and heat dissipation of the gas working medium between the two groups of pre-ionization devices are accelerated, the waste gas generated therein is accelerated to enter the circulation, thereby the energy therein is kept stable, and an anode electrode grounded is fixedly installed at the top of the flow guide plate below the vertical line between the two groups of pre-ionization devices, through the cathode electrode and the anode electrode, a potential difference can be generated between the two groups of pre-ionization devices and discharge phenomenon occurs, in cooperation with the high-concentration seed electrons between the two groups of pre-ionization devices, stable glow discharge phenomenon is generated to excite laser.

[0006] Further, the pre-ionization device comprises a ground metal rod fixedly installed on two groups of outer end covers respectively at two ends, and the ground metal rod is grounded at two sides, a ground copper ring is sleeved on the middle part of the outer surface of the ground metal rod, a threaded hole is formed in the inner part of the ground copper ring, and the ground copper ring is fixedly connected with the ground metal rod through a jackscrew, so that it can be grounded together with the ground metal rod, a group of alumina ceramic tubes with a wall thickness of 1-3 mm are sleeved on the outer surface of the ground metal rod and located at two sides of the ground copper ring, a plurality of groups of pre-ionization units arranged in a linear array are sleeved on the outer surface of the alumina ceramic tube, and the pre-ionization units on the two groups of alumina ceramic tubes are symmetrically arranged, the pre-ionization unit is composed of a ceramic positioning ring and a discharge copper ring, and the ceramic positioning ring serves as an insulating medium for the front and rear discharge copper rings, and the side end face of each discharge copper ring is in turn in contact with and in conductive communication with a high-voltage connector sleeved on one side of the outer surface of the alumina ceramic tube, the high-voltage connector is in communication with an external high-voltage line, so that the discharge copper ring can ionize the gas working medium around the cathode electrode and form uniformly distributed high-concentration initial electrons during the connection process, and the other side end face of each discharge copper ring is in turn in contact with and connected with the ground copper ring, wherein, the arrangement of the ceramic positioning ring can separate the front and rear discharge copper rings from each other while adjusting the spacing between each discharge copper ring to achieve the best spark discharge state, and at the same time, it ensures that no large current discharge occurs between the ground metal rod and the discharge copper ring and between the front and rear discharge copper rings.

[0007] Further, one side of the outer surface of the discharge copper ring and towards the cathode electrode is provided with a rectangular sharp end, so that when the ground copper ring is connected to high voltage, the alumina ceramic tube serves as an insulating medium between the ground metal rod and the discharge copper ring, and the ceramic positioning ring serves as an insulating medium between the front and rear discharge copper rings, a strong electric field is generated between the discharge copper ring and the ground metal rod, and the rectangular sharp end of the rear discharge copper ring and the end face of the front discharge copper ring generate an along-face spark discharge phenomenon and are transmitted level by level, further ensuring that uniformly distributed high-concentration initial electrons can be generated, and at the same time, it ensures that the ground metal rod and the discharge copper ring will not be punctured and conducted.

[0008] Further, a connector sleeve fixedly installed in the inner part of the outer end cover is sleeved on the outer surface of the high-voltage connector, a threaded hole is formed in the high-voltage connector, and the high-voltage connector is fixed on the alumina ceramic tube through a jackscrew, so as to ensure the conductive connection between the discharge copper ring and the high-voltage connector while preventing the occurrence of electric leakage or short circuit.

[0009] Further, the connecting end surface between the main frame chamber and the high-voltage pulse excitation source is provided with a ceramic fixing plate, and a plurality of sealing ring grooves are formed in the ceramic fixing plate to assemble the sealing ring, thereby effectively preventing the leakage of the gas working medium in the inner cavity of the main frame chamber during the operation of the laser, and the ceramic fixing plate also has an insulating effect, preventing the inner cavity of the alumina ceramic tube from discharging or creeping along the surface.

[0010] Further, a constant-flow fan is fixedly installed on the right side of the bottom of the inner cavity of the main frame chamber, and the constant-flow fan and the flow guide plate can effectively accelerate the circulation of the gas working medium in the inner cavity of the main frame chamber, further accelerating the renewal of the gas working medium between the two groups of pre-ionization devices, and a dust removal device is fixedly installed on the left side of the bottom of the inner cavity of the main frame chamber, thereby removing the dust and metal particles generated in the inner cavity of the main frame chamber during the operation of the laser, effectively reducing the damage to the mirror of the laser, and greatly prolonging the service life of the laser.

[0011] Further, the dust removal device is provided with a plurality of electrostatic dust removal pipes, the electrostatic dust removal pipe includes a connecting frame, a rotating frame is movably sleeved in the connecting frame, an electrode sleeve with one end connected to the negative pole of the external high-voltage line is movably sleeved in the rotating frame, thereby generating a high-voltage electrostatic field in the rotating frame through the electrode sleeve, so that the dust and metal particles entering the electrostatic dust removal pipe are negatively charged and tend to the positively charged connecting frame, thereby effectively removing the dust and metal particles generated in the inner cavity of the main frame chamber during the operation of the laser.

[0012] Further, the connecting frame includes two groups of limiting shaft sleeves, and a dust collecting plate connected to the positive pole of the external high-voltage line is fixedly installed between the two groups of limiting shaft sleeves, thereby adsorbing and gathering the negatively charged dust and metal particles on the inner wall of the positively charged dust collecting plate, the outer side of the dust collecting plate is provided with a connecting plate block fixedly connected to the dust removal device, the rotating frame includes rotating sleeves movably sleeved in the two groups of limiting shaft sleeves, one end of the rotating sleeve is provided with a linkage gear connected to the output shaft of the constant-flow fan through a toothed belt transmission, thereby rotating the rotating sleeve during the operation of the constant-flow fan, and a plurality of groups of partition plates arranged in a ring array are fixedly installed on the outer surface of the rotating sleeve, and the partition plates are in sliding frictional contact with the inner wall of the dust collecting plate during rotation, thereby scraping off the dust and metal particles gathered on the inner wall of the dust collecting plate under the action of the partition plates.

[0013] Further, a plurality of first chip removal grooves are arranged on one side of the outer surface of the rotating sleeve, and the first chip removal grooves are arranged between the adjacent two groups of partition plates and staggered with the partition plates; two chip removal grooves are arranged on the outer surface of the electrode sleeve and towards the dust collecting plate; during the rotation of the rotating sleeve, the first chip removal grooves and the second chip removal grooves are in staggered communication; a plurality of through holes are arranged on one side of the end of the rotating sleeve in a ring array; a communication pipeline is fixedly installed on one side of the end of the right limiting shaft sleeve and close to the dust collecting plate, and one end of the communication pipeline is in communication with the air outlet of the constant-flow fan; during the operation of the laser, the adjacent two groups of partition plates and the dust collecting plate form a cavity, and the communication pipeline blows air into the cavity, and the dust and metal particles scraped off by the partition plates are removed through the second chip removal grooves and the first chip removal grooves, so that the dust and metal particles cannot accumulate in the interior of the electrostatic dust removal pipe, the dust removal device can effectively maintain the cleaning effect and efficiency of the dust and metal particles, the damage to the mirror of the laser is further reduced, and the service life of the laser is effectively prolonged.

[0014] The application has the following advantages: 1. The strong pre-ionization pulse gas laser based on surface spark discharge of corona provided by the application can form a pre-ionization region between the two groups of pre-ionization devices, and the electrons in the pre-ionization region accelerate under the action of electric field force; during the movement, the electrons and other gas particles have inelastic collision and ionization or excitation, thereby generating initial electrons with high concentration and uniformity and forming micro-discharge channels to provide seed electrons for the core discharge area, thereby effectively ensuring the stability of long-pulse-width glow discharge in the laser.

[0015] 2. The strong pre-ionization pulse gas laser based on surface spark discharge of corona provided by the application can remove the dust and metal particles generated during the operation of the laser by electrostatic dust removal, and blow air into the cavity formed by the adjacent two groups of partition plates and the dust collecting plate through the communication pipeline, and remove the dust and metal particles scraped off by the partition plates through the second chip removal grooves and the first chip removal grooves, so that the dust and metal particles cannot accumulate in the interior of the electrostatic dust removal pipe, thereby effectively maintaining the cleaning effect and efficiency of the dust and metal particles by the dust removal device, reducing the damage to the mirror of the laser, and effectively prolonging the service life of the laser. BRIEF DESCRIPTION OF DRAWINGS

[0016] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort: Figure 1 This is a schematic diagram of the excimer laser of the present invention; Figure 2 This is a front view of the excimer laser of the present invention; Figure 3 For the present invention Figure 2 Sectional view at point AA; Figure 4 This is a schematic diagram of the pre-ionization device of the present invention; Figure 5 For the present invention Figure 4 Left side view; Figure 6 For the present invention Figure 4 Sectional view at point BB; Figure 7 This is a schematic diagram of the dust removal device of the present invention; Figure 8 This is a schematic diagram of the connecting frame of the present invention; Figure 9 This is a schematic diagram of the rotating frame of the present invention; Figure 10 This invention is a schematic diagram of the structure of an electrode sleeve.

[0017] In the diagram: 1-Main frame chamber, 2-High voltage pulse excitation source, 3-Outer end cover, 4-Pre-ionization device, 5-Cathode electrode, 6-Anode electrode, 7-Connecting copper sheet, 8-Guide plate, 9-Constant flow fan, 10-Dust removal device, 11-Grounding metal rod, 12-Alumina ceramic tube, 13-Joint sleeve, 14-Ceramic positioning ring, 15-Discharge copper ring, 16-Grounding copper ring, 17-High voltage connector, 18-Connecting frame, 19-Rotating frame, 20-Electrode sleeve, 21-Limiting bushing, 22-Dust collection plate, 23-Connecting plate, 24-Connecting pipeline, 25-Linkage gear, 26-Rotating sleeve, 27-Separator plate, 28-Through hole, 29-First chip removal groove, 30-Second chip removal groove. Detailed Implementation

[0018] Clearly, the described embodiments are merely a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts are within the protection scope of the present application.

[0019] As shown in Figure 1 , a corona-based surface spark discharge strong pre-ionization pulse gas laser includes a main frame chamber 1, the inside of the main frame chamber 1 is a hollow structure penetrating left and right for installing various electrical elements, the top end of the main frame chamber 1 is fixedly installed with a high-voltage pulse excitation source 2, and a group of outer end covers 3 for sealing the inner cavity are fixedly installed at the left and right ends of the main frame chamber 1, respectively, as shown in Figure 2 、 Figure 3 , a group of pre-ionization devices 4 in the shape of long cylinders are fixedly installed at the left and right sides of the top of the inner cavity of the main frame chamber 1, and a pre-ionization area is formed between the two groups of pre-ionization devices 4, under the action of electric field force, the electrons in the pre-ionization area accelerate, and in the process of movement, the electrons and other gas particles have inelastic collision and ionization or excitation, thereby generating high-concentration and uniform initial electrons and forming a micro-discharge channel, the top of the inner cavity of the main frame chamber 1 and above the vertical line between the two groups of pre-ionization devices 4 is provided with a cathode electrode 5 electrically connected with the high-voltage pulse excitation source 2, thereby the high-voltage pulse excitation source 2 can provide high-voltage pulse energy to the cathode electrode 5, a connecting copper sheet 7 is fixedly installed on the upper side of the inner wall of the main frame chamber 1, and a flow guide plate 8 is fixedly installed on the connecting copper sheet 7, thereby under the action of the connecting copper sheet 7 and the flow guide plate 8, the renewal and heat dissipation of the gas working medium between the two groups of pre-ionization devices 4 are accelerated, and the waste gas generated therein is accelerated to enter the circulation, thereby the energy therein is kept stable, the top end of the flow guide plate 8 and below the vertical line between the two groups of pre-ionization devices 4 is fixedly installed with a grounded anode electrode 6, through the cathode electrode 5 and the anode electrode 6, a potential difference can be generated between the two groups of pre-ionization devices 4 and discharge phenomenon occurs, and in cooperation with the high-concentration seed electrons between the two groups of pre-ionization devices 4, stable glow discharge phenomenon is generated to excite laser.

[0020] As shown in Figure 1 、 Figure 3 and Figures 4-6As shown, in this technical solution, the pre-ionization device 4 includes a grounding metal rod 11 with both ends fixedly mounted on two sets of outer end caps 3, and the grounding metal rod 11 is grounded on both sides. A grounding copper ring 16 is sleeved on the middle of the outer surface of the grounding metal rod 11, and the grounding copper ring 16 has a threaded hole inside and is fixedly connected to the grounding metal rod 11 through a set screw, so that it can be grounded together with the grounding metal rod 11. A set of alumina ceramic tubes 12 with a wall thickness of 1-3mm are sleeved on the outer surface of the grounding metal rod 11 and on both sides of the grounding copper ring 16. Several sets of pre-ionization units arranged in a linear array are sleeved on the outer surface of the alumina ceramic tubes 12, and the pre-ionization units on the two sets of alumina ceramic tubes 12 are symmetrically arranged. The pre-ionization unit is composed of a ceramic positioning ring 14 and a discharge copper ring 15, and the ceramic positioning ring 14 serves as a... The insulating medium of the front and rear discharge copper rings 15, and one side end face of each discharge copper ring 15 sequentially contacts and forms a conductive connection with the high voltage connector 17 sleeved on one side of the outer surface of the alumina ceramic tube 12. The high voltage connector 17 is connected to the external high voltage line. Thus, during the connection process, the gas working medium around the cathode electrode 5 can be ionized by the discharge copper rings 15 and a uniformly distributed high concentration of initial electrons can be formed. The other side end face of each discharge copper ring 15 sequentially contacts and connects with the grounding copper ring 16. The ceramic positioning ring 14 not only separates the front and rear discharge copper rings 15 from each other, but also adjusts the spacing between each discharge copper ring 15 to achieve the best spark discharge state. At the same time, it ensures that a large current discharge and arcing cannot be formed between the grounding metal rod 11 and the discharge copper rings 15, or between the front and rear discharge copper rings 15.

[0021] like Figures 3-5 As shown, in this technical solution, the outer surface of the discharge copper ring 15 and the side facing the cathode electrode 5 are provided with a rectangular tip. When the grounding copper ring 16 is connected to high voltage, the alumina ceramic tube 12 serves as the insulating medium between the grounding metal rod 11 and the discharge copper ring 15, while the ceramic positioning ring 14 serves as the insulating medium between the front and rear discharge copper rings 15. A strong electric field is generated between the discharge copper ring 15 and the grounding metal rod 11. Then, the rectangular tip of the rear discharge copper ring 15 and the end face of the front discharge copper ring 15 will produce a surface spark discharge phenomenon, which is transmitted level by level, further ensuring that it can generate a uniformly distributed high concentration of initial electrons. At the same time, it ensures that the grounding metal rod 11 and the discharge copper ring 15 will not be broken down and connected.

[0022] like Figure 1 , Figure 4 as well as Figure 5As shown, in the technical solution, the outer surface of the high-voltage connector 17 is sleeved with a connector sleeve 13 fixedly installed inside the outer end cover 3, and the high-voltage connector 17 is provided with a threaded hole and is fixed to the alumina ceramic tube 12 through a jackscrew, thereby ensuring the electrically conductive connection of the discharge copper ring 15 and the high-voltage connector 17 while preventing the occurrence of leakage or short circuit.

[0023] In the technical solution, a ceramic fixing plate is arranged between the connecting end face between the main frame chamber 1 and the high-voltage pulse excitation source 2, and a plurality of sealing ring grooves are formed in the ceramic fixing plate to assemble the sealing ring, thereby effectively preventing the leakage of the gas working medium in the inner cavity of the main frame chamber 1 during the operation of the laser, and the ceramic fixing plate also has an insulating effect, preventing the inner cavity of the alumina ceramic tube 12 from discharging or creeping along the surface.

[0024] As shown in Figure 3 In the technical solution, a constant-flow fan 9 is fixedly installed on the right side of the bottom of the inner cavity of the main frame chamber 1, and the constant-flow fan 9 cooperates with the flow guide plate 8 to effectively accelerate the circulation of the gas working medium in the inner cavity of the main frame chamber 1, further accelerating the renewal of the gas working medium between the two groups of pre-ionization devices 4, and a dust removal device 10 is fixedly installed on the left side of the bottom of the inner cavity of the main frame chamber 1, thereby removing the dust and metal particles generated in the inner cavity of the main frame chamber 1 during the operation of the laser, effectively reducing the damage to the mirrors of the laser, and greatly prolonging the service life of the laser.

[0025] As shown in Figure 3 , Figure 7 In the technical solution, the dust removal device 10 is provided with a plurality of electrostatic dust removal pipes, the electrostatic dust removal pipe includes a connecting frame 18, a rotating frame 19 is movably sleeved inside the connecting frame 18, an electrode sleeve 20 connected to the negative pole of the external high-voltage line at the end is movably sleeved inside the rotating frame 19, thereby generating a high-voltage electrostatic field on the rotating frame 19 through the electrode sleeve 20, so that the dust and metal particles entering the electrostatic field are charged negatively and tend to the positively charged connecting frame 18, thereby effectively removing the dust and metal particles generated in the inner cavity of the main frame chamber 1 during the operation of the laser.

[0026] As shown in Figures 7-9As shown, in the technical solution, the connecting frame 18 includes two groups of limiting shaft sleeves 21, and a dust collecting plate 22 connected with the positive electrode of the external high-voltage line is fixedly installed between the two groups of limiting shaft sleeves 21, so that the dust and metal particles with negative charges are adsorbed and gathered on the inner wall of the dust collecting plate 22 with positive charges, the outer side end surface of the dust collecting plate 22 is provided with a connecting plate 23 fixedly connected with the dust removal device 10, the rotating frame 19 includes rotating sleeves 26 movably sleeved in the two groups of limiting shaft sleeves 21, one end of the rotating sleeve 26 is provided with a linkage gear 25 and is connected with the output shaft of the constant-flow fan 9 through a gear belt transmission, so that the rotating sleeve 26 is driven to rotate in the process of triggering the constant-flow fan 9, and a plurality of groups of separation plates 27 arranged in a ring array are fixedly installed on the outer surface of the rotating sleeve 26, and the separation plates 27 are in sliding frictional contact with the inner wall of the dust collecting plate 22 during rotation, so that the dust and metal particles gathered and adsorbed on the inner wall of the dust collecting plate 22 can be scraped off under the action of the separation plates 27.

[0027] As shown in Figure 3 , Figures 7-10 As shown, in the technical solution, a plurality of groups of first chip removal grooves 29 are formed on one side of the outer surface of the rotating sleeve 26, and the first chip removal grooves 29 are arranged alternately between the adjacent two groups of separation plates 27, and second chip removal grooves 30 are formed on the outer surface of the electrode sleeve 20 and on the side facing the dust collecting plate 22, and the first chip removal grooves 29 and the second chip removal grooves 30 are alternately communicated with each other during the rotation of the rotating sleeve 26, and a plurality of groups of through holes 28 arranged in a ring array are formed on one side of the end portion of the rotating sleeve 26, and a communication pipeline 24 with one end communicated with the air outlet end of the constant-flow fan 9 is fixedly installed on one side of the end portion of the right limiting shaft sleeve 21 close to the dust collecting plate 22, and during the operation of the laser, air can be blown into the cavity formed by the adjacent two groups of separation plates 27 and the dust collecting plate 22 through the communication pipeline 24, and the dust and metal particles scraped off by the separation plates 27 can be cleaned out through the second chip removal grooves 30 and the first chip removal grooves 29, so that the dust and metal particles cannot be gathered in the interior of the electrostatic dust removal pipe, and the dust removal effect and efficiency of the dust removal device 10 on the dust and metal particles can be effectively maintained, the damage to the laser mirror is further reduced, and the working life of the laser is effectively prolonged.

[0028] The above description of disclosed embodiments enables a person skilled in the art to implement or use the present application. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the present application. Therefore, the present application will not be limited to these embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A corona-based surface spark discharge high-intensity pre-ionization pulsed gas laser, comprising a main frame chamber (1), wherein a high-voltage pulse excitation source (2) is fixedly installed at the top of the main frame chamber (1), and a set of outer end caps (3) are fixedly installed at the left and right ends of the main frame chamber (1), characterized in that: A set of pre-ionization devices (4) are fixedly installed on the left and right sides of the top of the main frame chamber (1), and a pre-ionization area is formed between the two sets of pre-ionization devices (4). A cathode electrode (5) electrically connected to the high-voltage pulse excitation source (2) is provided at the top of the main frame chamber (1) and above the vertical line of the two sets of pre-ionization devices (4). A connecting copper sheet (7) is fixedly installed on the upper side of the inner wall of the main frame chamber (1), and a guide plate (8) is fixedly installed on the connecting copper sheet (7). A grounded anode electrode (6) is fixedly installed at the top of the guide plate (8) and below the vertical line of the two sets of pre-ionization devices (4).

2. The corona-based surface spark discharge high-intensity pre-ionization pulsed gas laser according to claim 1, characterized in that, The pre-ionization device (4) includes a grounding metal rod (11) with both ends fixedly mounted on two sets of outer end caps (3), and both sides of the grounding metal rod (11) are grounded. A grounding copper ring (16) is sleeved in the middle of the outer surface of the grounding metal rod (11). A set of alumina ceramic tubes (12) are sleeved on the outer surface of the grounding metal rod (11) and on both sides of the grounding copper ring (16). Several sets of pre-ionization units are sleeved on the outer surface of the alumina ceramic tubes (12), and the two sets of alumina ceramic tubes (12) are... The pre-ionization units on the ceramic tube (12) are arranged symmetrically. The pre-ionization unit consists of a ceramic positioning ring (14) and a discharge copper ring (15). The ceramic positioning ring (14) serves as the insulating medium for the front and rear discharge copper rings (15). One side of each discharge copper ring (15) contacts and forms a conductive connection with the high-voltage connector (17) sleeved on one side of the outer surface of the alumina ceramic tube (12). The other side of each discharge copper ring (15) contacts and connects to the grounding copper ring (16).

3. The corona-based surface spark discharge strong pre-ionization pulsed gas laser according to claim 2, characterized in that, The outer surface of the discharge copper ring (15) and the side facing the cathode electrode (5) are provided with a rectangular tip.

4. The corona-based surface spark discharge strong pre-ionization pulsed gas laser according to claim 3, characterized in that, The high-pressure connector (17) is fitted with a connector sleeve (13) that is fixedly installed inside the outer end cover (3) on its outer surface. The high-pressure connector (17) has a threaded hole and is fixed to the alumina ceramic tube (12) by a set screw.

5. The corona-based surface spark discharge strong pre-ionization pulsed gas laser according to claim 4, characterized in that, A ceramic fixing plate is provided between the connection end face of the main frame chamber (1) and the high voltage pulse excitation source (2), and multiple sealing ring grooves are opened on the ceramic fixing plate to assemble the sealing rings.

6. The corona-based surface spark discharge high-intensity pre-ionization pulsed gas laser according to claim 1, characterized in that, A constant flow fan (9) is fixedly installed on the right side of the bottom of the main frame chamber (1), and a dust removal device (10) is fixedly installed on the left side of the bottom of the main frame chamber (1).

7. The corona-based surface spark discharge strong pre-ionization pulsed gas laser according to claim 6, characterized in that, The dust removal device (10) is equipped with an electrostatic dust removal tube inside. The electrostatic dust removal tube includes a connecting frame (18), and a rotating frame (19) is movably sleeved inside the connecting frame (18). An electrode sleeve (20) is movably sleeved inside the rotating frame (19).

8. The corona-based surface spark discharge strong pre-ionization pulsed gas laser according to claim 7, characterized in that, The connecting frame (18) includes two sets of limiting bushings (21), and a dust collection plate (22) is fixedly installed between the two sets of limiting bushings (21). The outer end face of the dust collection plate (22) is provided with a connecting plate (23) and is fixedly connected to the dust removal device (10). The rotating frame (19) includes a rotating sleeve (26) whose ends are respectively movably sleeved in the two sets of limiting bushings (21). One end of the rotating sleeve (26) is provided with a linkage gear (25) and is connected to the output shaft of the constant flow fan (9) through a toothed belt drive. Several sets of partition plates (27) are fixedly installed on the outer surface of the rotating sleeve (26) and slide and rub against the inner wall of the dust collection plate (22) when the partition plate (27) rotates.

9. The corona-based surface spark discharge strong pre-ionization pulsed gas laser according to claim 8, characterized in that, A number of first chip removal grooves (29) are provided on one side of the outer surface of the rotating sleeve (26), and the first chip removal grooves (29) are arranged alternately between two adjacent sets of partition plates (27). On the outer surface of the electrode sleeve (20) and on the side facing the dust collection plate (22), a second chip removal groove (30) is provided. During the rotation of the rotating sleeve (26), the first chip removal groove (29) and the second chip removal groove (30) are interconnected. At the same time, a number of through holes (28) are provided on one side of the end of the rotating sleeve (26). A connecting pipe (24) with one end connected to the air outlet of the constant flow fan (9) is fixedly installed on the end of the right limit bushing (21) and the side close to the dust collection plate (22).

Images