Horizontal CVD furnace material automatic loading and unloading vehicle and control method thereof

Abstract

The application discloses a horizontal CVD furnace material automatic loading and unloading vehicle and a control method thereof, and belongs to the field of semiconductor and new material preparation. The application solves the problems of the existing membrane nephropathy diagnosis system, such as dependence on subjective evaluation, low efficiency and lack of objective quantitative indexes. In order to solve the technical problem, the technical scheme is that the loading vehicle comprises a vehicle body frame, a moving and positioning module, a lifting and height adjusting module, a visual perception module and a distance measuring module. The moving and positioning module is used for driving the loading and unloading vehicle to move along a preset path and accurately position a target station. The lifting and height adjusting module is used for carrying and vertically moving the material to be loaded and unloaded. The visual perception module comprises a wide-angle visual unit for global navigation and a depth visual unit for local accurate positioning. The distance measuring module comprises a plurality of distance measuring devices arranged on the vehicle body frame and the lifting and height adjusting module. A central control module is electrically connected with the moving and positioning module, the lifting and height adjusting module, the visual perception module and the distance measuring module. The application is applied to a CVD furnace.

Description

Technical Field

[0001] This invention relates to the field of semiconductor and new material preparation technology, specifically to an automatic loading and unloading vehicle for materials in a horizontal CVD furnace and its control method. Background Technology

[0002] Chemical vapor deposition (CVD) technology is a core fabrication process in semiconductor chips, photovoltaic cells, and optoelectronic materials. Among these processes, horizontal CVD furnaces hold a crucial position in large-scale industrial production due to their mature technology, large chamber volume, high workpiece throughput, and excellent film uniformity. As downstream industries continue to demand higher performance, lower costs, and greater capacity, horizontal CVD processes are evolving towards precision control, high equipment utilization, and lower operating costs. Achieving full automation and intelligence throughout the production process, and reducing human intervention, is key to improving product yield, ensuring production consistency, and reducing overall costs. The efficient, non-destructive, and clean transfer of materials (such as graphite disks or silicon carbide etching disks supporting workpieces; the graphite disk example is used below) between the storage rack and the horizontal CVD furnace chamber is a core element in building this automated production line.

[0003] Currently, in horizontal CVD production scenarios, material loading and unloading mainly rely on manual operation and semi-automatic robotic arm operation, both of which have significant limitations: 1. Manual Operation: Operators use forklifts or simple trolleys to move graphite discs weighing tens to hundreds of kilograms from the storage rack to the furnace opening, and then push them into the high-temperature furnace chamber with mechanical assistance. The disadvantages are: ① Inefficiency: At least three operators are required to work together, and personnel must enter the furnace chamber to observe, resulting in high labor and time costs; ② Quality and Contamination Risks: Manual operation easily leads to damage to the graphite discs, and in cleanrooms of Class 1000 or higher, dust, dander, and other particulate contaminants carried by personnel can easily fall onto the workpiece surface, causing film defects and affecting product yield; ③ Poor Consistency: Manual loading cannot guarantee accurate positioning each time, and process fluctuations directly affect the uniformity and repeatability of film formation.

[0004] 2. Semi-automatic robotic arm operation: Some production lines use fixed-base multi-section robotic arms to handle materials. Although this reduces manpower input, there are still shortcomings: ① Economic and space constraints: Industrial robots are expensive, and their working range is limited by the arm span. Covering multiple furnace cavities and buffer areas requires multiple robotic arms or complex track systems, resulting in large initial investments and stringent requirements for factory layout; ② High integration difficulty: The end effector of the robotic arm needs to be customized for specific materials and furnace openings, making system integration difficult.

[0005] In summary, existing technologies cannot meet the demands of horizontal CVD production for high precision, high cleanliness, high flexibility, high reliability, and easy integration in material handling. The industry urgently needs a new automated material handling solution. This invention is therefore proposed to overcome the shortcomings of existing technologies. Summary of the Invention

[0006] In order to solve the technical problems of existing membranous nephropathy diagnostic systems that rely on subjective assessment, are inefficient, and lack objective quantitative indicators, this invention proposes an automatic loading and unloading method for materials in a horizontal CVD furnace and its control method.

[0007] To solve the above-mentioned technical problems, the technical solution adopted by the present invention is: an automatic material loading and unloading vehicle for a horizontal CVD furnace, comprising: Vehicle body frame; The mobile positioning module is used to drive the loading and unloading vehicle to move along a preset path and accurately locate the target workstation; The lifting and height adjustment module is installed on the vehicle frame and is used to carry and vertically move the materials to be loaded and unloaded. The visual perception module includes a wide-angle vision unit for global navigation and a depth vision unit for local precise positioning. The wide-angle vision unit is mounted on the vehicle frame, and the depth vision unit is mounted on the lifting and height adjustment module. The ranging module includes multiple ranging devices installed on the vehicle frame and the lifting and height adjustment module, which are used to measure the distance between the loading and unloading vehicle and obstacles in real time, so as to realize the obstacle avoidance function of the loading and unloading vehicle. The central control module is electrically connected to the motion positioning module, the lifting and leveling module, the visual perception module, and the ranging module. The central control module is configured as follows: It receives and processes image data collected by the visual perception module and distance data collected by the ranging module, and plans the movement path of the motion positioning module based on the preset path, image data and distance data; The motion positioning module and the lifting and height adjustment module work together based on preset paths, image data, and distance data.

[0008] Furthermore, the mobile positioning module includes a drive unit and a steering unit. The drive unit includes a first servo motor, which drives the wheel set rotatably connected to the bottom of the vehicle frame to rotate, thereby driving the vehicle frame to move.

[0009] Furthermore, the preset path is the path between the storage rack storing materials to be loaded and unloaded and the target CVD furnace, and ground road signs are set on the preset path.

[0010] Furthermore, the lifting and height adjustment module includes a loading and unloading mechanism and a transmission mechanism. The loading and unloading mechanism is fixedly connected to the vehicle frame and is used to support the materials to be loaded and unloaded. The transmission mechanism includes a transmission component driven by a second servo motor and a guide part arranged on the vehicle frame. The second servo motor drives the transmission component to drive the loading and unloading mechanism to move along the guide part.

[0011] Furthermore, the wide-angle vision unit includes multiple industrial cameras, which are respectively fixedly mounted on the loading and unloading mechanism of the lifting and height adjustment module and around the vehicle frame.

[0012] Furthermore, the depth vision unit includes multiple depth cameras, which are fixedly mounted on the loading and unloading mechanism of the height adjustment module to acquire image data of the three-dimensional space inside the CVD furnace cavity.

[0013] Furthermore, multiple ranging devices are fixedly installed around the vehicle frame to construct a 360-degree protection system for the vehicle frame.

[0014] Furthermore, the central control module adopts a distributed hierarchical control architecture, including: The upper-level main controller is configured as follows: Receive material loading and unloading task instructions, and call the preset path according to the material loading and unloading task instructions; It processes image data collected by the visual perception module and distance data collected by the ranging module, and plans the movement path of the motion positioning module based on the preset path, image data and distance data, and outputs operation commands to control the motion positioning module and the lifting and height adjustment module. The lower-level controller is configured as follows: The distance data collected by the ranging module is received and monitored in real time. When the distance data collected by any ranging device in the ranging module is lower than the safety threshold, the motion positioning module is directly triggered to decelerate or stop moving, taking precedence over the operation command transmitted by the upper main controller. It receives operation commands from the upper-level main controller to control the movement and positioning module and the lifting and leveling module.

[0015] Furthermore, the loading and unloading mechanism is one of the following: a fork-type lifting mechanism, a clamping mechanism, or a lifting mechanism.

[0016] A method for controlling the automatic loading and unloading of materials in a horizontal CVD furnace as described above includes the following steps: Step S1: Receive material loading and unloading task instructions, and call the preset path according to the material loading and unloading task instructions; Step S2: Control the loading and unloading vehicle to move along a preset path, and monitor the distance between the loading and unloading vehicle and obstacles in real time based on the wide-angle vision unit of the vision perception module to achieve dynamic obstacle avoidance; Step S3: When the loading and unloading vehicle approaches the target workstation, control the movement positioning module and the lifting and height adjustment module to perform a three-dimensional scan of the target workstation; and calculate the spatial position deviation between the material-carrying part on the lifting and height adjustment module and the target workstation based on the three-dimensional scan results. Step S4: Based on the spatial positional deviation between the material-carrying part on the lifting and height adjustment module and the target workstation, control the lifting and height adjustment module and / or the moving positioning module to perform multi-axis linkage compensation motion until the positioning accuracy requirement is met. Step S5: Perform the loading and unloading operations for materials.

[0017] The advantages of this invention over the prior art are as follows: 1. High-precision positioning: Through the cooperation of the lifting and height adjustment module, the mobile positioning module and the vision perception module, the lifting and height adjustment module can achieve millimeter-level precise positioning of the part of the material to be loaded and unloaded between the target work station and the lifting and height adjustment module, ensuring that the material is transferred smoothly and without collision.

[0018] 2. High cleanliness: The various modules of this invention work together, and the fully automated operation isolates human intervention, fundamentally eliminating particulate pollution introduced by human intervention.

[0019] 3. High intelligence and flexibility: Modular programming supports rapid adaptation to different material specifications and can be integrated with upper-level manufacturing execution systems to achieve automatic task scheduling based on production plans.

[0020] 4. High security: The visual perception module, ranging module and central control module work together to build a real-time monitoring and multi-layered safety protection system, which has dynamic obstacle avoidance, collision warning and millisecond-level emergency stop linkage functions.

[0021] 5. High cost-effectiveness and easy integration: The autonomous mobile platform mode of one vehicle serving multiple furnaces significantly reduces equipment costs and space occupation compared to the solution of configuring a fixed robotic arm for each furnace, and has low requirements for the transformation of existing plant layout. Attached Figure Description

[0022] The present invention will be further described below with reference to the accompanying drawings: Figure 1 This is a schematic diagram of the loading and unloading vehicle of the present invention; Figure 2 This is a left view of the loading and unloading vehicle of the present invention; Figure 3 This is a rear view of the loading and unloading vehicle of the present invention; Figure 4 This is a front view of the loading and unloading vehicle of the present invention; Figure 5 This is a schematic diagram of the structure of the material and the lifting and height adjustment module of the present invention working together. Figure 1 ; Figure 6 This is a schematic diagram of the structure of the material and the lifting and height adjustment module of the present invention working together. Figure 2 Figure 7 This is a flowchart of the method of the present invention; Figure 8This is a flowchart illustrating the loading and unloading process of the loading and unloading vehicle of the present invention. Figure 9 This is a schematic diagram illustrating the walking motion control principle of the present invention; Figure 10 This is a schematic diagram illustrating the lifting motion control principle of the present invention; In the diagram: 1 is the vehicle frame, 2 is the wheel, 3 is the chain, 4 is the loading and unloading mechanism, 5 is the industrial camera, 6 is the depth camera, 7 is the ultrasonic sensor, 8 is the pressure sensor, 9 is the material tray, 10 is the docking limiter, 11 is the support column, 12 is the docking hole, and 13 is the material. Detailed Implementation

[0023] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicate relative orientations or positional relationships and are used only for the convenience of describing the invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the invention. Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined with "first," "second," etc., may explicitly or implicitly include one or more of that feature. In the description of this invention, unless otherwise stated, "a plurality of" means two or more.

[0024] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art will understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0025] like Figures 1 to 10 As shown, the present invention provides an automatic material loading and unloading vehicle for a horizontal CVD furnace, comprising: The vehicle frame 1 is made of Q345B high-strength steel with a yield strength ≥345MPa, ensuring minimal deformation under load to meet the requirements of high rigidity and strength.

[0026] The mobile positioning module is used to drive the loading and unloading vehicle to move along a preset path and accurately locate the target workstation.

[0027] Preferably, the mobile positioning module includes a driving unit and a steering unit. The driving unit includes a first servo motor, which is used to drive the rotation of the wheel set rotatably connected to the bottom of the vehicle body frame 1 to achieve driving the vehicle body frame 1 to move. The rated power of the first servo motor is 2 kW, and the rated torque is 6.4 Nm. The output shaft of the first servo motor synchronously drives the transmission system to transmit power to multiple wheels 2 of the wheel set at the same time, ensuring that the loading and unloading vehicle has stable and synchronous driving force.

[0028] The steering unit includes a high-precision servo motor, which is used to drive the wheel set to steer to achieve differential steering.

[0029] The wheel set includes four wheels 2 arranged in an array. The servo motor is used to drive the rear wheels to steer. The direction in which the vehicle body frame 1 travels forward is the front, and the direction opposite to the traveling direction of the vehicle body frame 1 is the rear.

[0030] Preferably, the preset path is the path between the storage rack storing the to-be-loaded and unloaded material 13 and the target CVD furnace, and ground road sign markings are provided on the preset path.

[0031] The lifting and height-adjusting module is installed on the vehicle body frame 1 and is used to carry and vertically move the to-be-loaded and unloaded material 13.

[0032] Preferably, the lifting and height-adjusting module includes a loading and unloading mechanism 4 and a transmission mechanism. The loading and unloading mechanism 4 is fixedly connected to the vehicle body frame 1 and is used to support the to-be-loaded and unloaded material 13. The loading and unloading mechanism 4 and the vehicle body frame 1 are arranged perpendicular to each other. The loading and unloading mechanism 4 cooperates with the target working station to load or unload the material 13 on the loading and unloading mechanism 4 to the designated position of the target working station.

[0033] Specifically, the material 13 is placed in the tray 9. The bottom of the tray 9 is fixedly connected with a docking limiter 10 and a support column 11. Both the docking limiter 10 and the support column 11 correspond to the limiters on the target working station. A docking hole 12 is also opened on the tray 9, and the docking hole 12 corresponds to the limiter on the target working station.

[0034] A pressure sensor 8 is also installed on the loading and unloading mechanism 4, which is used to detect and feedback the loading and unloading signal of the material 13 on the loading and unloading mechanism 4.

[0035] The loading and unloading mechanism 4 is one of a fork-tooth type lifting mechanism, a clamping and holding type mechanism or a jacking type mechanism. When the loading and unloading mechanism 4 is a fork-tooth type lifting mechanism, the loading and unloading mechanism 4 is integrally in a "U" shape.

[0036] To achieve light weight, corrosion resistance and the overall balance of the loading and unloading vehicle, the non-core load-bearing components on the loading and unloading mechanism 4 (such as the fixing components for fixing the following industrial cameras 5, ranging devices, depth cameras 6, etc.) are made of aluminum alloy material, which reduces the weight of the moving components, reduces the driving load while ensuring sufficient structural strength, and extends the service life in the industrial environment.

[0037] The transmission mechanism includes a transmission component 3 driven by a second servo motor and a guide portion arranged on the vehicle frame 1. The second servo motor drives the transmission component 3 to move the loading and unloading mechanism 4 along the guide portion. The guide portion is a groove formed on the vehicle frame 1 or a groove fixedly connected to the vehicle frame 1.

[0038] In one embodiment, the transmission component 3 is a synchronous belt or chain.

[0039] Material 13 is a graphite disk or a silicon carbide etching disk.

[0040] The visual perception module includes a wide-angle vision unit for global navigation and a depth vision unit for local precise positioning. The wide-angle vision unit is installed on both the vehicle frame 1 and the lifting and height adjustment module, and the depth vision unit is installed on the lifting and height adjustment module. Preferredly, the wide-angle vision unit includes multiple industrial cameras 5, which are respectively fixedly mounted on the loading and unloading mechanism 4 of the lifting and height adjustment module and around the vehicle frame 1. Furthermore, the industrial cameras 5 mounted on the loading and unloading mechanism 4 are specifically installed at the end of the loading and unloading mechanism 4 furthest from the vehicle frame 1. The multiple industrial cameras 5 are used to acquire image data along a preset path to identify preset ground landmarks and target CVD furnaces. The multiple industrial cameras 5 cooperate with the subsequent central control module to achieve initial positioning and navigation.

[0041] Prior to this, the depth vision unit includes multiple depth cameras 6, which are fixedly mounted on the loading and unloading mechanism 4 of the height adjustment module. These cameras are used to collect image data of the three-dimensional space of the target workstation. Specifically, they are used to support the material 13 at the target workstation, providing image data support for the subsequent generation of point cloud data by the central control module to locate the spatial position of the support. This ensures that there is no collision during the transfer of material 13 in the CVD furnace cavity (or the storage rack storing the material to be loaded and unloaded), and achieves secondary precise positioning.

[0042] In this embodiment, the industrial camera 5 is a CMOS camera: MU196MR-ON, with a resolution of 19.6MP pixels; The Depth Camera 6 uses the Orbbec Pictor Depth Camera 6, which supports 1280x1024 depth images.

[0043] The ranging module includes multiple ranging devices installed on the vehicle frame 1 and the lifting and height adjustment module, which are used to measure the distance between the loading and unloading vehicle and the obstacle in real time, so as to realize the obstacle avoidance function of the loading and unloading vehicle. Prior to this, multiple ranging devices are fixedly installed around the vehicle frame 1 to form a 360-degree protection system for the vehicle frame 1. Specifically, the multiple ranging devices are respectively installed on the left and right side walls of the vehicle frame 1, the rear side wall of the vehicle frame 1, the front end of the vehicle frame 1, and the loading and unloading mechanism 4.

[0044] Preferably, the ranging device uses an ultrasonic sensor 7.

[0045] In this embodiment, the ultrasonic sensor 7 is of the FD07-3 series, with a detection distance of 3~300cm, an error of less than 0.5cm, and a communication method of RS485.

[0046] Seven ranging devices are installed. Two ranging devices are mounted on the front end of the vehicle frame 1 to monitor the distance between the vehicle frame 1 and obstacles in front of it. One ranging device is mounted on the rear side wall of the vehicle frame 1 to monitor the distance between the vehicle frame 1 and obstacles behind it in the direction of travel. Two ranging devices are mounted on the left and right side walls of the vehicle frame 1 to monitor the distance between obstacles on both sides of the vehicle frame 1 and the vehicle frame 1. Two ranging devices are mounted on the left and right ends of the front end of the loading and unloading mechanism 4 to monitor the distance between obstacles in front of the vehicle frame 1 and the vehicle frame 1. The ranging devices mounted on both sides of the vehicle frame 1 and the ranging devices mounted on the front end of the loading and unloading mechanism 4 work together with the visual perception module to assist the loading and unloading vehicle in avoiding obstacles when performing steering operations.

[0047] The central control module is electrically connected to the motion positioning module, the lifting and leveling module, the visual perception module, and the ranging module. The central control module is configured as follows: It receives and processes image data collected by the visual perception module and distance data collected by the ranging module, and plans the movement path and movement operation of the motion positioning module based on the preset path, image data and distance data; The motion positioning module and the lifting and height adjustment module work together based on preset paths, image data, and distance data.

[0048] Prior to this, the central control module adopts a distributed hierarchical control architecture, including: The upper-level main controller, using a high-performance computing platform (such as a Raspberry Pi), is configured as follows: Receive the loading and unloading task instruction for material 13, and call the preset path according to the loading and unloading task instruction for material 13; It processes image data collected by the visual perception module and distance data collected by the ranging module, and plans the movement path of the motion positioning module based on the preset path, image data and distance data, and outputs operation commands to control the motion positioning module and the lifting and height adjustment module.

[0049] The lower-level controller, using a PLC controller, is configured as follows: The distance data collected by the ranging module is received and monitored in real time. When the distance data collected by any ranging device in the ranging module is lower than the safety threshold, the motion positioning module is directly triggered to decelerate or stop moving, taking precedence over the operation command transmitted by the upper main controller. It receives operation commands from the upper main controller to control the movement of the first servo motor, the second servo motor, and the servo motor. The upper-level master controller and the lower-level slave controllers interact with each other via a communication bus.

[0050] The output controls the operation commands of the motion positioning module, specifically: The upper-level main controller determines the distance deviation between the current position of the loading and unloading vehicle and the target CVD furnace based on the image data uploaded by the industrial camera 5. It calculates the required travel speed, angle, and turning radius, and transmits the corresponding speed and displacement commands to the lower-level slave controller. The lower-level slave controller controls the first servo motor to linearly drive the wheel set forward or backward. The corresponding turning angle command is transmitted to the lower-level slave controller, which controls the servo motor to drive the rear wheel to deflect, thereby achieving differential steering.

[0051] When the distance deviation between the current position of the loading and unloading vehicle and the target workstation is less than the first preset distance threshold, the upper main controller outputs a deceleration speed command and transmits it to the lower slave controller. The lower slave controller controls the first servo motor to drive the wheel set to decelerate and rotate. When the distance deviation between the current position of the loading and unloading vehicle and the preset docking position corresponding to the target workstation is less than the second preset distance threshold, the upper main controller outputs a zero speed command and transmits it to the lower slave controller. The lower slave controller controls the first servo motor to drive the wheel set to stop rotating.

[0052] The first servo motor and the servo motor work together to realize various motion modes such as straight driving and circular turning of the loading and unloading vehicle, so that the loading and unloading vehicle can smoothly run to the target station (including the target CVD furnace and the storage rack for storing materials to be loaded and unloaded 13).

[0053] The output controls the operation commands for the lifting and height adjustment module, specifically: The upper-level main controller generates high-precision point cloud data based on the image data transmitted from the depth camera 6. Using a preset point cloud processing algorithm, it calculates in real-time the deviation values ​​in the X, Y, and Z directions between the end of the lifting and unloading module loading / unloading mechanism 4 and the target workstation in three-dimensional space. It then outputs horizontal and vertical adjustment commands to the lower-level slave controller. The lower-level slave controller transmits the vertical adjustment command to the second servo motor controlling the transmission mechanism. The second servo motor drives the transmission component 3, which in turn moves the loading / unloading mechanism 4 along the guide section, achieving fine-tuning in the Z-direction (vertical direction). The lower-level slave controller also transmits the horizontal adjustment command to the first servo motor and servo motor, driving the wheel set of the mobile positioning module to rotate, enabling the loading / unloading vehicle to move forward / backward or left / right, achieving millimeter-level precise alignment in all directions.

[0054] For ease of description, speed commands, displacement commands, steering angle commands, horizontal adjustment commands, and vertical adjustment commands are collectively referred to as operation action commands.

[0055] The present invention provides a method for controlling the automatic loading and unloading of materials in a horizontal CVD furnace as described above, comprising the following steps: Step S1: Receive the loading and unloading task instruction for material 13, and call the preset path according to the loading and unloading task instruction for material 13; Step S2: Control the loading and unloading vehicle to move along a preset path, and monitor the distance between the loading and unloading vehicle and obstacles in real time based on the wide-angle vision unit of the vision perception module to achieve dynamic obstacle avoidance; Step S3: When the loading and unloading vehicle approaches the target workstation, control the movement positioning module and the lifting and height adjustment module to perform a three-dimensional scan of the target workstation; and calculate the spatial position deviation between the material 13 units carried on the lifting and height adjustment module and the target workstation based on the three-dimensional scan results. Step S4: Based on the spatial position deviation between the material 13 on the lifting and height adjustment module and the target workstation, control the lifting and height adjustment module and / or the moving positioning module to perform multi-axis linkage compensation motion until the positioning accuracy requirement is met. Step S5: Perform loading and unloading operations for material 13.

[0056] Regarding the specific structure of this invention, it should be noted that the connection relationships between the various component modules used in this invention are definite and achievable. Except as specifically described in the embodiments, their specific connection relationships can bring about corresponding technical effects and solve the technical problems proposed by this invention without relying on the execution of corresponding software programs. The models of the components, modules, and specific components appearing in this invention, the connection methods between them, and the conventional usage methods and expected technical effects brought about by the above technical features, unless specifically described, are all publicly disclosed content in patents, journal articles, technical manuals, technical dictionaries, and textbooks that can be obtained by those skilled in the art before the application date, or belong to conventional technology, common knowledge, and other existing technologies in this field. There is no need to elaborate, which makes the technical solution provided in this case clear, complete, and achievable, and can reproduce or obtain corresponding physical products based on this technical means.

[0057] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. An automatic material loading and unloading vehicle for a horizontal CVD furnace, characterized in that: include: Vehicle body frame (1); The mobile positioning module is used to drive the loading and unloading vehicle to move along a preset path and accurately locate the target workstation; The lifting and height adjustment module is installed on the vehicle frame (1) and is used to carry and vertically move the materials (13) to be loaded and unloaded. The visual perception module includes a wide-angle vision unit for global navigation and a depth vision unit for local precise positioning. The wide-angle vision unit is set on the vehicle frame (1), and the depth vision unit is set on the lifting and height adjustment module. The distance measuring module includes multiple distance measuring devices installed on the vehicle frame (1) and the lifting and height adjustment module, which are used to measure the distance between the loading and unloading vehicle and the obstacle in real time, so as to realize the obstacle avoidance function of the loading and unloading vehicle. The central control module is electrically connected to the motion positioning module, the lifting and leveling module, the visual perception module, and the ranging module. The central control module is configured as follows: It receives and processes image data collected by the visual perception module and distance data collected by the ranging module, and plans the movement path of the motion positioning module based on the preset path, image data and distance data; The motion positioning module and the lifting and height adjustment module work together based on preset paths, image data, and distance data.

2. The automatic material loading and unloading vehicle for a horizontal CVD furnace according to claim 1, characterized in that: The mobile positioning module includes a drive unit and a steering unit. The drive unit includes a first servo motor, which drives the wheel set connected to the bottom of the vehicle frame (1) to rotate, so as to drive the vehicle frame (1) to move.

3. The automatic material loading and unloading vehicle for a horizontal CVD furnace according to claim 1, characterized in that: The preset path is the path between the storage rack storing materials to be loaded and unloaded (13) and the target CVD furnace, and ground road signs are set on the preset path.

4. The automatic material loading and unloading vehicle for a horizontal CVD furnace according to claim 2, characterized in that: The lifting and height adjustment module includes a loading and unloading mechanism (4) and a transmission mechanism. The loading and unloading mechanism (4) is fixedly connected to the vehicle frame (1) and is used to support the material (13) to be loaded and unloaded. The transmission mechanism includes a transmission component (3) driven by a second servo motor and a guide part arranged on the vehicle frame (1). The second servo motor drives the transmission component (3) to drive the loading and unloading mechanism (4) to move along the guide part.

5. The automatic material loading and unloading vehicle for a horizontal CVD furnace according to claim 4, characterized in that: The wide-angle vision unit includes multiple industrial cameras (5), which are fixedly installed on the loading and unloading mechanism (4) of the lifting and height adjustment module and around the vehicle frame (1).

6. The automatic material loading and unloading vehicle for a horizontal CVD furnace according to claim 1, characterized in that: The depth vision unit includes multiple depth cameras (6), which are fixedly installed on the loading and unloading mechanism (4) of the height adjustment module and are used to collect image data of the three-dimensional space inside the CVD furnace cavity.

7. The automatic material loading and unloading vehicle for a horizontal CVD furnace according to claim 1, characterized in that: Multiple ranging devices are fixedly installed around the vehicle frame (1) to construct a 360-degree protection system for the vehicle frame (1).

8. The automatic material loading and unloading vehicle for a horizontal CVD furnace according to claim 1, characterized in that: The central control module adopts a distributed hierarchical control architecture, including: The upper-level main controller is configured as follows: Receive material (13) loading and unloading task instructions, and call the preset path according to the material (13) loading and unloading task instructions; It processes image data collected by the visual perception module and distance data collected by the ranging module, and plans the movement path of the motion positioning module based on the preset path, image data and distance data, and outputs operation commands to control the motion positioning module and the lifting and height adjustment module. The lower-level controller is configured as follows: The distance data collected by the ranging module is received and monitored in real time. When the distance data collected by any ranging device in the ranging module is lower than the safety threshold, the motion positioning module is directly triggered to decelerate or stop moving, taking precedence over the operation command transmitted by the upper main controller. It receives operation commands from the upper-level main controller to control the movement and positioning module and the lifting and leveling module.

9. The automatic material loading and unloading vehicle for a horizontal CVD furnace according to claim 4, characterized in that: The loading and unloading mechanism (4) is one of the following: a fork-tooth lifting mechanism, a clamping mechanism, or a lifting mechanism.

10. A method for controlling the automatic loading and unloading of materials in a horizontal CVD furnace as described in any one of claims 1-9, characterized in that: Includes the following steps: Step S1: Receive the loading and unloading task instruction for material (13) and call the preset path according to the loading and unloading task instruction for material (13); Step S2: Control the loading and unloading vehicle to move along a preset path, and monitor the distance between the loading and unloading vehicle and obstacles in real time based on the wide-angle vision unit of the vision perception module to achieve dynamic obstacle avoidance; Step S3: When the loading and unloading vehicle approaches the target workstation, control the movement positioning module and the lifting and height adjustment module to perform a three-dimensional scan of the target workstation; and calculate the spatial position deviation between the material (13) on the lifting and height adjustment module and the target workstation based on the three-dimensional scan results. Step S4: Based on the spatial position deviation between the material (13) on the lifting and height adjustment module and the target workstation, control the lifting and height adjustment module and / or the moving positioning module to perform multi-axis linkage compensation motion until the positioning accuracy requirement is met. Step S5: Perform loading and unloading operations on materials (13).

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