Gate valve with speed controller using CDA

By introducing a CDA unit into the gate valve to independently control the airflow, the problems of impact and particles caused by the lack of independent control of the sealing plate movement speed are solved, thus achieving safe and reliable operation of the gate valve and protecting the relay terminals.

CN122107180APending Publication Date: 2026-05-29ASM IP HLDG BV
0 Cites 0 Cited by

Patent Information

Application Number
CN202511746212.9
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Priority Date
2024-11-29
Filing Date
2025-11-26
Publication Date
2026-05-29

AI Technical Summary

Technical Problem

Existing gate valves using CDA cannot independently control the movement speed of the sealing plate in the vertical and horizontal directions, resulting in increased impact when the sealing plate contacts the chamber, leading to damage to the sealing plate and particle generation. At the same time, the relay terminals are prone to melting, posing a safety risk.

Method used

A gate valve with speed control capability was designed. The air flow is independently controlled by a CDA unit, which includes a piston, a separator, and a needle valve. The piston controls the air flow in the first and second air channels respectively, thereby achieving independent control of the vertical and horizontal movement speed of the sealing plate, reducing particle generation, and protecting the relay terminals from melting.

Benefits of technology

It achieves precise control over the opening/closing speed of the gate valve, reduces the impact on the sealing plate and the generation of particles, improves safety, and protects the relay terminals from melting.

✦ Generated by Eureka AI based on patent content.
Patent Text Reader

Abstract

A gate valve with opening / closing speed control capability is presented. In order to control the opening / closing speed, the present disclosure proposes a housing; an air cylinder configured to move the first shaft vertically upward to a first position, the first shaft being connected to the air cylinder; a cam unit including a cam attached to the first shaft at one end; a second shaft connected to an opposite end of the cam and configured to move to a specific height with the cam; a first bellows disposed around the second shaft; a sealing plate disposed at one end of the second shaft and configured to close a passage to / from the chamber; a sealing ring disposed around the sealing plate and configured to seal the passage when the sealing plate closes the passage; and a CDA unit configured to control an opening / closing speed of the gate valve.
Need to check novelty before this filing date? Find Prior Art