Method for manufacturing liquid ejection head and liquid ejection head

By using a photosensitive resin composition of alicyclic epoxy resin and cationic photopolymerization initiator (A), health risks and resin decomposition issues in liquid jetting heads are resolved, achieving high pattern accuracy and high adhesion of the jetting nozzle, thus improving printing quality.

CN122143492APending Publication Date: 2026-06-05CANON KK
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
CANON KK
Filing Date
2025-11-26
Publication Date
2026-06-05

AI Technical Summary

Technical Problem

Existing liquid spray heads pose health and environmental risks when using cationic polymerization initiators containing SbF6-, and resin decomposition during high-temperature processing leads to film loss, making it difficult to achieve high pattern accuracy and high adhesion.

Method used

A photosensitive resin composition comprising an alicyclic epoxy resin or a glycidyl epoxy resin and a cationic photopolymerization initiator (A) is used. The cationic photopolymerization initiator (A) has a specific molar absorption coefficient and is used to form the nozzle forming component, thereby avoiding the generation of HF and improving pattern accuracy and adhesion.

Benefits of technology

This technology enables the formation of nozzles in liquid jetting heads that combine high pattern accuracy and high adhesion, reducing film loss caused by resin decomposition reactions and improving printing accuracy.

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Abstract

A manufacturing method of a liquid ejecting head, in which a ejection port forming member that forms an ejection port for ejecting a liquid and a flow path of the liquid that communicates with the ejection port are formed on a substrate, the manufacturing method includes: forming a mold for the flow path of the liquid on the substrate; applying a photosensitive resin composition for forming the ejection port forming member on the substrate on which the mold has been formed so as to form a cationically polymerizable resin layer; and performing exposure and development on the cationically polymerizable resin layer so as to form the ejection port forming member, wherein the photosensitive resin composition includes at least one epoxy resin selected from an alicyclic epoxy resin and a glycidyl epoxy resin and a cationic photopolymerization initiator having a specific structure and a molar absorption coefficient.
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Citation Information

Patent Citations

  • Production of ink jet recording head

    JP1994286149A