MEMS-based ultra-wideband micro-vibration monitoring system and signal processing method thereof

Abstract

The application relates to the technical field of micro-electro-mechanical systems, in particular to a MEMS-based ultra-wideband micro-vibration monitoring system and a signal processing method thereof, which comprises the following steps: a MEMS ultra-wideband sensing array module collects the ultra-wideband micro-vibration time domain signals, environmental temperature and humidity and installation attitude data of a measured equipment; an ultra-wideband micro-vibration digital twin construction module constructs an equipment multi-physical field digital twin and outputs multi-physical field simulation data; an ultra-wideband feature fusion intelligent diagnosis core adopts a CNN-Transformer model enhanced by a multi-scale attention mechanism to generate a hierarchical maintenance strategy; a micro-vibration field three-dimensional visualization interaction module constructs an interactive three-dimensional micro-vibration field virtual scene and presents diagnosis results and maintenance strategies; and an edge-cloud collaborative adaptive regulation and control module performs collaborative regulation and control of edge real-time processing and cloud iterative optimization. Therefore, the problems of limited collection range, insufficient processing efficiency and precision and the like in the prior art are solved.

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