A deterministic ultra-precision chemical mechanical polishing method and apparatus for shaft parts
By employing a deterministic ultra-precision chemical mechanical polishing method, combined with white light interferometer measurement and a one-dimensional convolution algorithm, sub-nanometer roughness polishing of large-sized shaft parts has been achieved. This solves the problems of low efficiency and insufficient precision in existing technologies, and improves the automation level and accuracy of polishing.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- NAT UNIV OF DEFENSE TECH
- Filing Date
- 2024-12-31
- Publication Date
- 2026-06-30
AI Technical Summary
Existing technologies struggle to achieve ultra-precision polishing of large-sized shaft parts with sub-nanometer roughness across the entire surface. Furthermore, traditional methods suffer from low efficiency, insufficient precision, and low levels of automation, leading to high uncertainty in polishing results.
A deterministic ultra-precision chemical mechanical polishing method is adopted. The roughness of the outer ring surface of shaft parts is measured by white light interferometer. After fitting the data, the residence time distribution is calculated. Chemical mechanical polishing is performed using a polishing machine tool. The process is cyclically adjusted until the sub-nanometer roughness requirement is achieved.
It has achieved highly efficient automated machining of sub-nanometer roughness across the entire surface of large-sized shaft parts, improving polishing accuracy and efficiency, and ensuring the certainty and shape preservation of polishing results.
Smart Images
Figure CN122299513A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of ultra-precision machining technology for mechanical parts, specifically to a deterministic ultra-precision chemical mechanical polishing method and apparatus for shaft-type parts. Background Technology
[0002] Shaft-type parts are widely used in cutting-edge fields such as deep space exploration and ultra-precision manufacturing. Taking the mandrel used in the manufacture of X-ray grazing-incidence mirrors as an example, grazing-incidence mirrors are key components for X-ray space observation, pulsar navigation, and extreme ultraviolet lithography. Due to their high machining precision and complex manufacturing process, only a few countries possess the capability to manufacture them. Electroforming replication precisely replicates the surface morphology of a high-precision mandrel mold, then demolds it to form a complete internal reflecting surface. It features reusability, the ability to mass-produce mirrors, and high manufacturing efficiency, thus becoming the primary manufacturing method for grazing-incidence mirrors. Despite the numerous advantages of electroforming replication, its manufacturing process is technically challenging and has a long process chain. The manufacturing methods are mastered by only a few companies and research institutions, and the key technical issues involved in the manufacturing process are core technologies, one of which is the manufacture of high-precision mandrel molds.
[0003] Several large X-ray satellites launched and planned by NASA and ESA employ electroforming replication processes to mass-produce high-precision focusing mirrors, such as NICER and eROSITA. Dr. Dervis Vernani of Italy conducted research on ultra-precision turning technology for the nickel-phosphorus alloy mandrel of the eROSITA telescope X-ray mirror on the Röntgen Gamma Optical Spectrometer (SRG) satellite, a collaboration between Russia and Germany launched in 2019. He achieved surface roughness of PV 54.38–103.2 nm, RMS 6.613–18.33 nm, and Ra 5.257–15.34 nm for a 300 mm long mandrel. Specific technical details and process parameters have not been publicly disclosed. Domestic research in this field started relatively late, and there is currently no mature manufacturing process for grazing incidence mirrors. Public information shows that Harbin Institute of Technology conducted research on the optimization of tool motion trajectory for ultra-precision turning of Wolter-I type nickel-phosphorus alloy mandrels. They used a direct circular arc cutting tool center motion trajectory method to perform single-point diamond turning of a Φ153.43 mm × 153.75 mm nickel-phosphorus alloy mandrel mold, achieving a surface shape error PV of 0.71 μm and a surface roughness Rq of 11.88 nm, but not reaching sub-nanometer roughness machining accuracy. Tongji University's Wang Zhanshan team conducted research on the processing and manufacturing of Wolter-I mandrels, achieving high precision. They successively performed single-point diamond turning and polishing, achieving a surface roughness of RMS 0.2 nm for the mandrel, reaching ultra-precision polishing accuracy. However, their research object is very small, with a mandrel diameter of only a few to tens of millimeters, and the processing complexity is relatively low. This meets the requirements for use with Wolter-I microscopes but cannot meet the needs of X-ray space telescopes. The replica spindles used in X-ray space telescopes are typically between one hundred and several hundred millimeters in size and several hundred millimeters in length. Domestically, ultra-precision polishing with sub-nanometer accuracy has not yet been achieved for spindles of this size.
[0004] Current mandrel polishing methods include manual grinding, traditional mechanical polishing, and chemical mechanical polishing. Manual grinding is inefficient, heavily reliant on the operator's experience, resulting in inconsistent polishing results and making it unsuitable for mass production. Traditional mechanical polishing suffers from low precision, generally failing to achieve sub-nanometer ultra-precision polishing, and is prone to scratching softer materials, further reducing surface roughness. While existing chemical mechanical polishing methods achieve ultra-precision polishing, they are typically used on flat surfaces and are limited to small sizes. They cannot achieve full-body ultra-precision polishing of large mandrels, and the polishing equipment and processes are still immature.
[0005] In summary, traditional polishing methods often rely on existing ultra-precision lathes or precision polishing machines for polishing, and there are few designs for dedicated ultra-precision polishing machines for shaft parts; there is little demand for mechanical parts with sub-nanometer surface roughness in traditional manufacturing, but with the development of fields such as space exploration and microscopic observation, the demand for mechanical parts with sub-nanometer surface roughness is constantly increasing; deterministic machining technology is rarely used in the ultra-precision polishing of shaft parts. The current disadvantages of ultra-precision polishing of shaft parts are: (1) Traditional processing methods include manual grinding, which is inefficient and heavily reliant on the experience of operators, making it unsuitable for mass production. (2) The existing ultra-precision chemical mechanical polishing process cannot meet the actual needs of use. The existing process can only achieve sub-nanometer surface roughness in a small area, and cannot achieve sub-nanometer surface roughness across the entire surface. (3) The existing polishing methods have a low level of automation and cannot correctly control the polishing pressure and time according to the surface roughness of the mandrel, resulting in high uncertainty in the polishing results. (4) Existing ultra-precision polishing methods generally perform equivalent polishing without difference on the surface to be processed, which can easily lead to an increase in the surface shape error of the surface to be processed, affecting the next step of the workpiece. Summary of the Invention
[0006] The technical problem to be solved by the present invention is to provide a deterministic ultra-precision chemical mechanical polishing method and apparatus for shaft parts, which aims to achieve high-efficiency automated machining of shaft parts with sub-nanometer roughness across the entire surface, thereby realizing high-efficiency and high-precision machining of shaft parts.
[0007] To solve the above-mentioned technical problems, the technical solution adopted by the present invention is as follows: A deterministic ultra-precision chemical mechanical polishing method for shaft-type parts includes the following steps: S1. Obtain the measurement data obtained by uniformly sampling the outer ring surface of the shaft part using a white light interferometer. Fit the measurement data to obtain the roughness data of the outer ring surface of the shaft part as the roughness error data before polishing. S2, Select time-controlled polishing parameters based on the roughness error data before polishing; Calculate the residence time distribution based on the roughness error data before polishing, and use a polishing machine to perform chemical mechanical polishing on the outer ring surface of the shaft part; S3, acquire measurement data obtained by uniformly sampling the outer ring surface of the shaft part using a white light interferometer, and fit the measurement data to obtain the roughness data of the outer ring surface of the shaft part as the roughness data after polishing. S4: Determine whether the surface roughness data of the shaft part after polishing meets the requirements. If it still does not meet the requirements, use the surface roughness data after polishing as the new surface roughness error data before polishing, and jump to step S2 to continue polishing. Otherwise, determine that polishing is complete, end and exit.
[0008] Optionally, the step of obtaining measurement data by uniformly sampling the outer ring surface of the shaft-like part using a white light interferometer includes: uniformly dividing the outer ring surface of the shaft-like part into multiple rings, uniformly dividing each ring into measurement points, supporting and fixing the shaft-like part on the workpiece stage of the white light interferometer using a measurement bracket, rotating the shaft-like part so that the tangent plane of the measurement point on the outer ring surface of the shaft-like part is perpendicular to the lens axis of the white light interferometer to complete the measurement of each measurement point, thereby obtaining the measurement data of each measurement point.
[0009] Optionally, the step of fitting the measurement data to obtain the roughness data of the outer ring surface of the shaft part includes: filtering the measurement data of each measured point, and fitting the filtered measurement data of the measured points to obtain the roughness data of the outer ring surface of the shaft part.
[0010] Optionally, in step S2, when selecting time-controlled polishing parameters based on the roughness error data before polishing, it includes determining whether the roughness error data before polishing is greater than a preset threshold. If it is, the first set of time-controlled polishing parameters with higher removal efficiency is selected from the two preset sets of time-controlled polishing parameters; otherwise, the second set of time-controlled polishing parameters with lower removal efficiency is selected from the two preset sets of time-controlled polishing parameters.
[0011] Optionally, step S2, which calculates the dwell time distribution based on the roughness error data before polishing, includes: first, polishing a sample of the same size as the shaft part using the selected time-controlled polishing parameters and obtaining the removal function; then, using a preset dwell time calculation algorithm, performing a one-dimensional convolution operation based on the input removal function and the roughness error data of the outer ring surface of the shaft part before polishing to solve for the dwell time distribution at each position on the outer ring surface of the shaft part.
[0012] Optionally, before performing chemical mechanical polishing on the outer ring surface of the shaft part using a polishing machine in step S2, the process further includes determining the target pH value of the chemical mechanical polishing solution by consulting a preset metal composition-pH value table based on the metal composition of the shaft part, preparing the chemical mechanical polishing solution, adjusting the pH value of the chemical mechanical polishing solution to the target pH value, and pouring it into a polishing solution drop bottle. The chemical mechanical polishing solution is composed of silicon dioxide, hydrogen peroxide, and deionized water.
[0013] Optionally, in step S2, when performing chemical mechanical polishing on the outer ring surface of the shaft part using a polishing machine tool, the shaft part is fixed on the spindle of the polishing machine tool, and the axis of the shaft part coincides with the axis of the spindle of the polishing machine tool, and the polishing head of the polishing machine tool is installed on one side of the shaft part.
[0014] Furthermore, the present invention also provides a deterministic ultra-precision chemical mechanical polishing apparatus for shaft-type parts, comprising a polishing machine tool and a computer device for controlling the polishing machine tool, the computer device including a microprocessor and a memory interconnected thereto, the microprocessor being programmed or configured to execute a deterministic ultra-precision chemical mechanical polishing method for the shaft-type parts.
[0015] Furthermore, the present invention also provides a computer-readable storage medium storing a computer program or instructions that are programmed or configured to execute a deterministic ultra-precision chemical mechanical polishing method for the shaft-type parts by a processor.
[0016] In addition, the present invention also provides a computer program product, including a computer program or instructions, which are programmed or configured to execute a deterministic ultra-precision chemical mechanical polishing method for the shaft-type parts via a processor.
[0017] Compared with the prior art, the present invention has the following main advantages: 1. Based on the concept of deterministic machining and the chemical mechanical polishing method, this invention utilizes the convergence law of roughness of shaft parts and the roughness distribution of the entire shape of shaft parts during trial polishing to calculate and determine the polishing dwell time at different positions on shaft parts, thereby achieving deterministic ultra-precision polishing of the entire shape of shaft parts. This allows the roughness of the entire shape of the polished mandrel to converge to the sub-nanometer level, thus enabling deterministic ultra-precision polishing of the entire shape of shaft parts, allowing all machined surfaces to achieve sub-nanometer roughness.
[0018] 2. Before polishing the outer ring surface of shaft-type mechanical parts, this invention uses a white light interferometer to uniformly sample and measure the roughness of the outer ring surface of the shaft-type mechanical parts, and performs filtering and fitting to obtain the overall roughness data of the outer ring surface. A one-dimensional convolution algorithm is used to solve the dwell time, and deterministic polishing is carried out, which improves the polishing efficiency and the determinism of the process.
[0019] 3. This invention combines deterministic machining technology with chemical mechanical polishing process, resulting in higher machining accuracy. Deterministic polishing has the characteristics of longer machining time for areas with greater roughness and shorter machining time for areas with smaller roughness error, with less impact on the surface shape of the machined surface, and has the effect of conformal polishing. Attached Figure Description
[0020] Figure 1 This is a schematic diagram of the basic process of the method in an embodiment of the present invention.
[0021] Figure 2 This is a schematic diagram showing the distribution of the measured points in an embodiment of the present invention.
[0022] Figure 3 This is a schematic diagram of the detection structure for shaft-type parts in an embodiment of the present invention.
[0023] Figure 4 This is a schematic diagram of the machining structure of shaft-type parts in an embodiment of the present invention.
[0024] Figure 5 These are the roughness data after polishing in the embodiments of the present invention. Detailed Implementation
[0025] The following will use an X-ray grazing incidence mirror replica mandrel as an example of shaft parts to further describe the deterministic ultra-precision chemical mechanical polishing method and apparatus for shaft parts of the present invention. However, this does not limit the scope of protection of the present invention. The deterministic ultra-precision chemical mechanical polishing method and apparatus for shaft parts of the present invention can be applied to various types of shaft parts.
[0026] like Figure 1 As shown, the deterministic ultra-precision chemical mechanical polishing method for shaft-type parts in this embodiment includes the following steps: S1. Obtain the measurement data obtained by uniformly sampling the outer ring surface of the shaft part using a white light interferometer. Fit the measurement data to obtain the roughness data of the outer ring surface of the shaft part as the roughness error data before polishing. S2, Select time-controlled polishing parameters based on the roughness error data before polishing; Calculate the residence time distribution based on the roughness error data before polishing, and use a polishing machine to perform chemical mechanical polishing on the outer ring surface of the shaft part; S3, acquire measurement data obtained by uniformly sampling the outer ring surface of the shaft part using a white light interferometer, and fit the measurement data to obtain the roughness data of the outer ring surface of the shaft part as the roughness data after polishing. S4: Determine whether the surface roughness data of the shaft part after polishing meets the requirements. If it still does not meet the requirements, use the surface roughness data after polishing as the new surface roughness error data before polishing, and jump to step S2 to continue polishing. Otherwise, determine that polishing is complete, end and exit.
[0027] In this embodiment, the white light interferometer is a Zygo New View 700 white light interferometer, which can meet the measurement requirements of ultra-precision surface sub-nanometer roughness. The magnification of the lens is 20x, and the measurement field of view is 0.47 mm × 0.35 mm.
[0028] Since the outer annular surface of shaft parts is generally machined by turning or grinding, its roughness distribution is generally continuous. Therefore, the data obtained in steps S1 and S3 of this embodiment is measurement data obtained by uniformly sampling the outer annular surface of the shaft part using a white light interferometer. The sampling density can be adjusted according to machining needs. In steps S1 and S3 of this embodiment, obtaining the measurement data obtained by uniformly sampling the outer annular surface of the shaft part using a white light interferometer includes: uniformly dividing the outer annular surface of the shaft part into multiple annular zones, and uniformly dividing each annular zone into measurement points. The number of annular zones and the number of measurement points uniformly divided in each annular zone can be selected according to actual needs. As an optional implementation method, such as... Figure 2 As shown, in this embodiment, the outer ring surface of the shaft-type part is evenly divided into 5 rings, corresponding to... Figure 2 The test area consists of rings 1 to 5; each ring is evenly divided into 5 test points, resulting in a total of 25 test points. Figure 2 Points 1 to 25 in the diagram. Figure 3 As shown, shaft-type parts (such as...) Figure 3 (as shown in a) Use a measuring bracket (such as Figure 3 (As shown in b) The support is fixed on the white light interferometer (e.g., Figure 3 The workpiece stage (as shown in c) Figure 3 As shown in d), the shaft-like parts are rotated so that the tangent plane of the measured point on the outer ring surface of the shaft-like parts is perpendicular to the lens axis of the white light interferometer to complete the measurement of each measured point, thereby obtaining the measurement data of each measured point.
[0029] In this embodiment, both the measuring bracket and the white light interferometer are equipped with adjustable displacement stages (either an XY-axis displacement stage or an XYZ three-axis displacement stage). The displacement stages of the measuring bracket and the white light interferometer are adjusted so that the tangent plane of the measured point is perpendicular to the lens axis. The shaft-type mechanical parts are repeatedly rotated by a certain angle or translated by a certain distance to achieve uniform sampling and measurement of the roughness of the workpiece's outer ring surface, obtaining discrete point roughness data for the workpiece's outer ring surface.
[0030] In steps S1 and S3 of this embodiment, fitting the measurement data to obtain the roughness data of the outer ring surface of the shaft part includes: filtering the measurement data of each measured point, and fitting the filtered measurement data of the measured points to obtain the roughness data of the outer ring surface of the shaft part. Filtering can reduce noise interference and improve the fitting accuracy of the roughness data of the outer ring surface of the shaft part. The filtering method can adopt various existing filtering algorithms as needed.
[0031] The discrete point roughness data of the outer ring surface of the workpiece are filtered and fitted to obtain the overall surface roughness data of the outer ring surface. In step S2 of this embodiment, when selecting the time-controlled polishing parameters based on the roughness error data before polishing, it includes determining whether the roughness error data before polishing is greater than a preset threshold. If it is, the first set of time-controlled polishing parameters with higher removal efficiency is selected from the two preset sets of time-controlled polishing parameters; otherwise, the second set of time-controlled polishing parameters with lower removal efficiency is selected from the two preset sets of time-controlled polishing parameters. This enables adaptive polishing of shaft parts based on removal efficiency, thereby improving polishing accuracy. Based on this, multiple sets of time-controlled polishing parameters sorted by removal efficiency can be designed, and a mapping relationship can be established between the roughness error data before polishing and the time-controlled polishing parameter sets. This ensures that the removal efficiency of the roughness error data before polishing and the time-controlled polishing parameter sets are positively correlated, thereby achieving more precise adaptive polishing of shaft parts based on removal efficiency and improving polishing accuracy.
[0032] In step S2 of this embodiment, the calculation of the dwell time distribution based on the roughness error data before polishing includes: First, polishing a sample of the same size as the shaft part using the selected time-controlled polishing parameters and obtaining the removal function; then, using a preset dwell time calculation algorithm, performing a one-dimensional convolution operation based on the input removal function and the roughness error data of the outer ring surface of the shaft part before polishing to solve for the dwell time distribution at each position on the outer ring surface of the shaft part.
[0033] In step S2 of this embodiment, before performing chemical mechanical polishing on the outer ring surface of the shaft part using a polishing machine, the target pH value of the chemical mechanical polishing solution is determined by consulting a preset metal composition-pH value table based on the metal composition of the shaft part. The chemical mechanical polishing solution is then prepared, its pH value is adjusted to the target pH value, and it is poured into a polishing solution dropper bottle. The chemical mechanical polishing solution is composed of silicon dioxide, hydrogen peroxide, and deionized water. By adjusting the pH value of the chemical mechanical polishing solution according to the metal composition, the efficiency of chemical mechanical polishing can be effectively improved.
[0034] In step S2, when performing chemical mechanical polishing on the outer ring surface of a shaft-like part using a polishing machine, the shaft-like part is fixed on the deterministic polishing machine, the machining code is input into the deterministic polishing machine, and the polishing process is executed. For example... Figure 4 As shown, in step S2 of this embodiment, when the outer ring surface of the shaft-type part is chemically and mechanically polished using a polishing machine, the shaft-type part (such as...) Figure 4 (as shown in a) is fixed on the spindle of the polishing machine tool (e.g., Figure 4 As shown in e), the axis of the shaft-type part coincides with the axis of the spindle of the polishing machine tool, and the polishing head of the polishing machine tool (such as...) Figure 4As shown in f, it is installed on one side of the shaft-like part. During installation, first fix the position of the polishing head of the polishing machine, insert the spindle tip into the center hole at the upper end of the shaft-like part, and place the shaft-like part and the spindle of the polishing machine coaxially. Then, drive the tailstock tip of the deterministic polishing machine to insert into the center hole at the lower end of the workpiece, thereby clamping the shaft-like part on the polishing machine. Use a dial and a fork to connect the spindle and the shaft-like part so that the shaft-like part can rotate synchronously with the spindle.
[0035] After machining, the roughness error data after polishing can be measured using the same method as before polishing: for example... Figure 3 As shown, the workpiece is placed on the measuring platform of a white light interferometer, supported by a measuring bracket. The measuring bracket and the displacement stage of the white light interferometer are adjusted so that the tangent plane of the measured point is perpendicular to the lens axis. The shaft-type mechanical parts are repeatedly rotated by a certain angle or translated by a certain distance to achieve uniform sampling and measurement of the roughness of the workpiece's outer ring surface, obtaining discrete point roughness data. This discrete point roughness data is then filtered and fitted to obtain the overall surface roughness data of the workpiece's outer ring surface. If the roughness at all positions on the workpiece's outer ring surface is less than or equal to the target accuracy, then the roughness error accuracy meets the standard.
[0036] In this embodiment, step S4, determining whether the surface roughness data of the shaft part after polishing meets the requirements, includes: if the surface roughness data of the shaft part after polishing is less than or equal to a preset threshold, then the surface roughness data is determined to meet the requirements; otherwise, the surface roughness data is determined not to meet the requirements. In this embodiment, in a certain round of step S4, determining the surface roughness data after polishing is as follows... Figure 5 As shown, the roughness data Ra after polishing is 0.257, while the preset threshold value for the roughness data after polishing is 0.5 nm. Therefore, it is determined that the roughness data after polishing meets the requirements, the processing is completed and the process is exited.
[0037] In summary, the deterministic ultra-precision chemical mechanical polishing method for shaft parts in this embodiment uses a white light interferometer to uniformly sample and measure the roughness of the outer ring surface of the shaft part before polishing it. The roughness data is then filtered and fitted to obtain comprehensive surface roughness data. A one-dimensional convolution algorithm is used to solve for the dwell time, and deterministic polishing is then performed, improving polishing efficiency and processing determinism. This deterministic ultra-precision chemical mechanical polishing method for shaft parts combines deterministic machining technology with chemical mechanical polishing processes, resulting in higher processing accuracy, up to Ra 0.257 nm. Deterministic polishing has the advantages of longer processing time for areas with greater roughness and shorter processing time for areas with smaller roughness errors, with less impact on the surface shape of the machined surface, achieving a conformal polishing effect.
[0038] Furthermore, this embodiment also provides a deterministic ultra-precision chemical mechanical polishing apparatus for shaft-type parts, including a polishing machine tool and a computer device for controlling the polishing machine tool. The computer device includes a microprocessor and a memory interconnected thereto, and the microprocessor is programmed or configured to execute a deterministic ultra-precision chemical mechanical polishing method for shaft-type parts.
[0039] In addition, this embodiment also provides a computer-readable storage medium storing a computer program or instructions that are programmed or configured to execute a deterministic ultra-precision chemical mechanical polishing method for shaft-type parts by a processor.
[0040] In addition, this embodiment also provides a computer program product, including a computer program or instructions, which are programmed or configured to execute a deterministic ultra-precision chemical mechanical polishing method for shaft-type parts by a processor.
[0041] The above description is merely a preferred embodiment of the present invention. The scope of protection of the present invention is not limited to the above embodiments. All technical solutions falling within the scope of the present invention's concept are within the scope of protection of the present invention. It should be noted that for those skilled in the art, any improvements and modifications made without departing from the principles of the present invention should also be considered within the scope of protection of the present invention.
Claims
1. A deterministic ultra-precision chemical mechanical polishing method for shaft-type parts, characterized in that, Includes the following steps: S1. Obtain the measurement data obtained by uniformly sampling the outer ring surface of the shaft part using a white light interferometer. Fit the measurement data to obtain the roughness data of the outer ring surface of the shaft part as the roughness error data before polishing. S2, Select time-controlled polishing parameters based on the roughness error data before polishing; Calculate the residence time distribution based on the roughness error data before polishing, and use a polishing machine to perform chemical mechanical polishing on the outer ring surface of the shaft part; S3, acquire measurement data obtained by uniformly sampling the outer ring surface of the shaft part using a white light interferometer, and fit the measurement data to obtain the roughness data of the outer ring surface of the shaft part as the roughness data after polishing. S4: Determine whether the surface roughness data of the shaft part after polishing meets the requirements. If it still does not meet the requirements, use the surface roughness data after polishing as the new surface roughness error data before polishing, and jump to step S2 to continue polishing. Otherwise, determine that polishing is complete, end and exit.
2. The deterministic ultra-precision chemical mechanical polishing method for shaft-type parts according to claim 1, characterized in that, The method of obtaining measurement data by uniformly sampling the outer ring surface of a shaft-like part using a white light interferometer includes: uniformly dividing the outer ring surface of the shaft-like part into multiple rings, uniformly dividing each ring into measurement points, supporting and fixing the shaft-like part on the workpiece stage of the white light interferometer using a measurement bracket, rotating the shaft-like part so that the tangent plane of the measurement point on the outer ring surface of the shaft-like part is perpendicular to the lens axis of the white light interferometer to complete the measurement of each measurement point, thereby obtaining the measurement data of each measurement point.
3. The deterministic ultra-precision chemical mechanical polishing method for shaft-type parts according to claim 2, characterized in that, The step of fitting the measurement data to obtain the roughness data of the outer ring surface of the shaft part includes: filtering the measurement data of each measured point, and fitting the filtered measurement data of the measured points to obtain the roughness data of the outer ring surface of the shaft part.
4. The deterministic ultra-precision chemical mechanical polishing method for shaft-type parts according to claim 1, characterized in that, In step S2, when selecting time-controlled polishing parameters based on the roughness error data before polishing, it includes determining whether the roughness error data before polishing is greater than a preset threshold. If it is, the first set of time-controlled polishing parameters with higher removal efficiency is selected from the two preset sets of time-controlled polishing parameters; otherwise, the second set of time-controlled polishing parameters with lower removal efficiency is selected from the two preset sets of time-controlled polishing parameters.
5. The deterministic ultra-precision chemical mechanical polishing method for shaft-type parts according to claim 1, characterized in that, Step S2, which calculates the dwell time distribution based on the roughness error data before polishing, includes: First, polishing a sample of the same size as the shaft part using the selected time-controlled polishing parameters and obtaining the removal function; then, using a preset dwell time calculation algorithm, performing a one-dimensional convolution operation based on the input removal function and the roughness error data of the outer ring surface of the shaft part before polishing to solve for the dwell time distribution at each position on the outer ring surface of the shaft part.
6. The deterministic ultra-precision chemical mechanical polishing method for shaft-type parts according to claim 1, characterized in that, Before performing chemical mechanical polishing on the outer ring surface of the shaft part using a polishing machine in step S2, the target pH value of the chemical mechanical polishing solution is determined by consulting a preset metal composition-pH value table based on the metal composition of the shaft part. The chemical mechanical polishing solution is then prepared, its pH value is adjusted to the target pH value, and it is poured into a polishing solution drop bottle. The chemical mechanical polishing solution is composed of silicon dioxide, hydrogen peroxide, and deionized water.
7. The deterministic ultra-precision chemical mechanical polishing method for shaft-type parts according to claim 1, characterized in that, In step S2, when the outer ring surface of the shaft part is chemically and mechanically polished using a polishing machine tool, the shaft part is fixed on the spindle of the polishing machine tool, and the axis of the shaft part coincides with the axis of the spindle of the polishing machine tool. The polishing head of the polishing machine tool is installed on one side of the shaft part.
8. A deterministic ultra-precision chemical mechanical polishing device for shaft-type parts, characterized in that, The invention includes a polishing machine tool and a computer device for controlling the polishing machine tool, the computer device including a microprocessor and a memory interconnected thereto, the microprocessor being programmed or configured to perform a deterministic ultra-precision chemical mechanical polishing method for shaft-type parts according to any one of claims 1 to 7.
9. A computer-readable storage medium storing a computer program or instructions, characterized in that, The computer program or instructions are programmed or configured to execute, via a processor, the deterministic ultra-precision chemical mechanical polishing method for shaft-type parts as described in any one of claims 1 to 7.
10. A computer program product, comprising a computer program or instructions, characterized in that, The computer program or instructions are programmed or configured to execute, via a processor, the deterministic ultra-precision chemical mechanical polishing method for shaft-type parts as described in any one of claims 1 to 7.