Preparation device and method of ITO target material slurry

Abstract

An ITO target slurry preparation apparatus and method are provided. The ITO target slurry preparation apparatus includes: a tank; a porous zirconia plate with a pore size smaller than the diameter of the zirconium sand used for grinding; a water inlet; a drain outlet; a feed inlet; a discharge outlet located below the zirconia plate; a zirconium sand inlet; a circulation pipeline connecting the discharge outlet and the water inlet; a circulation pump installed on the circulation pipeline; an inner shaft; multiple inner shaft agitators; an outer shaft; multiple outer shaft agitators, alternately distributed with the multiple inner shaft agitators, each outer shaft agitator forming a flat cavity connected vertically in a plane formed by the horizontal and vertical directions, each flat cavity surrounding the outer shaft forming a volume that non-interferes with the volume formed by the corresponding inner shaft agitator rotating around the inner shaft, each outer shaft agitator being made of silicon steel sheet; multiple enameled copper coils wound around the corresponding outer shaft agitators for connection to an external power source; and a detachable screen located at the drain outlet, with mesh sizes smaller than the diameter of the zirconium sand.

Description

Technical Field

[0001] This disclosure relates to the field of ITO target manufacturing technology, and more specifically to an ITO target slurry preparation apparatus and preparation method. Background Technology

[0002] In the manufacturing process of ITO (Indium Tin Oxide) sputtering targets, a crucial step is the dispersion, emulsification, and grinding of indium oxide and tin oxide powders with pure water to form an indium tin oxide slurry. This slurry is subsequently used to prepare indium tin oxide particles. During the preparation of the indium tin oxide slurry, dispersion, emulsification, and grinding are performed using dispersion tanks, emulsification equipment, and grinding tanks, respectively, with material transfer occurring between these tanks via pipelines. This multi-transfer method results in significant equipment investment, a large footprint, time-consuming material transfers, and a long production cycle. Furthermore, the cleaning process for all equipment involved in these multiple transfers is complex and consumes a large amount of water. In addition, the multiple transfer processes easily introduce environmental foreign matter (such as dust) and metallic impurities (such as iron filings from equipment wear), posing a high risk of impurity introduction. Tiny iron particles are difficult to remove, affecting the purity and performance of the ITO sputtering target. Summary of the Invention

[0003] In view of the problems existing in the background art, one object of this disclosure is to provide an ITO target slurry preparation apparatus and preparation method, which can simplify the process flow.

[0004] Another objective of this disclosure is to provide an ITO target slurry preparation apparatus and method that can reduce equipment and space requirements.

[0005] Another objective of this disclosure is to provide an ITO target slurry preparation apparatus and method that can reduce the risk of impurity introduction.

[0006] Another objective of this disclosure is to provide an ITO target slurry preparation apparatus and method that can reduce production cycle time.

[0007] Another object of this disclosure is to provide an ITO target slurry preparation apparatus and method that can reduce the water consumption for cleaning.

[0008] The present disclosure also aims to provide an ITO target slurry preparation apparatus and method that can improve production efficiency.

[0009] One objective of this disclosure is to provide an ITO target slurry preparation apparatus and method, which can help improve the purity and performance of ITO targets.

[0010] Therefore, an ITO target slurry preparation device includes: a tank; a porous zirconia plate disposed near the bottom of the tank, the pore diameter of the porous zirconia plate being smaller than the diameter of the zirconium sand used for grinding; a water inlet disposed at the top of the tank for adding at least pure water; a drain outlet disposed in the tank, near and above the zirconia plate; a feed inlet disposed at the top of the tank for adding indium oxide and tin oxide powder; a discharge outlet disposed below the zirconia plate and at the bottom of the tank; a zirconium sand inlet disposed at the top of the tank for adding zirconium sand used for grinding; a circulation pipeline connecting the discharge outlet and the water inlet; a circulation pump disposed on the circulation pipeline; an inner shaft capable of rotation, mounted on the tank and extending downward from the top of the tank; and multiple inner shaft stirring paddles mounted on the inner shaft and spaced apart from top to bottom, adjacent inner shaft stirring paddles... The vertical projection of the agitator blades forms a non-zero angle; the outer shaft, capable of rotation, is mounted on the tank body, extends downwards from the top of the tank body, and is fitted and spaced apart from the inner shaft; multiple outer shaft agitators are alternately distributed with multiple inner shaft agitators in the vertical projection, each outer shaft agitator blade forming a flat cavity connected to each other in the vertical direction within the plane formed by the horizontal and vertical directions, and the volume formed by each flat cavity around the outer shaft non-interferingly accommodates the volume formed by the corresponding inner shaft agitator blade rotating around the inner shaft, each outer shaft agitator blade being made of silicon steel sheet; multiple enameled copper coils are wound around the corresponding outer shaft agitator blades, with both ends protruding from the tank body through the gap between the outer and inner shafts for connection to an external power source; a detachable screen is set at the drain outlet, the mesh size of the detachable screen being smaller than the diameter of the zirconium sand used for grinding.

[0011] A method for preparing ITO target slurry is provided, which employs the aforementioned ITO target slurry preparation apparatus. The apparatus includes a water inlet, a feed inlet, an inner shaft and multiple inner shaft agitators, and an outer shaft and multiple outer shaft agitators. The method involves pre-adding pure water into the tank through the water inlet, and then adding indium oxide powder and tin oxide powder in batches into the tank through the feed inlet. The inner and outer shafts rotate in opposite directions at low speeds to drive the multiple inner and outer shaft agitators to disperse the indium oxide powder and tin oxide powder into the pure water, thus completing the dispersion process and obtaining dispersed material. The inner shaft and multiple inner shaft agitators... The mixing paddle, outer shaft, and multiple outer shaft agitators are configured such that after the dispersion process is completed, the inner shaft accelerates and rotates while the outer shafts rotate synchronously in the opposite direction. This causes the multiple inner and outer shaft agitators to generate shear force, achieving emulsification of the dispersed material and obtaining an emulsified material. The zircon sand inlet, outlet, circulation pipeline, circulation pump, water inlet, inner shaft, multiple inner shaft agitators, outer shaft, multiple outer shaft agitators, and porous zirconia plates are configured such that after emulsification, zircon sand is added into the tank through the zircon sand inlet. Both the inner and outer shafts then accelerate, and the circulation pump is activated. The zircon sand in the tank agitates the emulsified material. The emulsified material is ground, and the ground emulsified material circulates in and out of the tank through the discharge port, circulation pipeline, circulation pump, and water inlet to complete the grinding of the emulsified material and obtain ground material. The pore size of the porous zirconia plate prevents zircon sand from leaking downwards through the pores of the porous zirconia plate. The discharge port, circulation pipeline, circulation pump, water inlet, multiple enameled copper coils, inner shaft and multiple inner shaft agitators, and outer shaft and multiple outer shaft agitators are configured such that after the emulsified material is ground, the discharge port, circulation pipeline, circulation pump, and water inlet form a circulation system for the grinding of the emulsified material in and out of the tank. Stop, both the inner and outer shafts slow down to a speed lower than that of the inner shaft in the dispersion process, the external power supply is started, multiple enameled copper coils are energized to form a magnetic field, multiple outer shaft agitators are magnetized and adsorb free iron and elemental iron in the grinding material to complete the iron impurity adsorption process and obtain iron impurity removed material; the discharge port, multiple enameled copper coils, inner shaft and multiple inner shaft agitators are configured with the outer shaft and multiple outer shaft agitators to: after the iron impurity adsorption process is completed, keep the multiple enameled copper coils energized and the inner and outer shafts rotating, open the discharge port, and discharge the iron impurity removed material from the tank;The tank is equipped with a water inlet, a drain outlet, a discharge outlet, multiple enameled copper coils, an inner shaft, and multiple inner shaft agitators, as well as an outer shaft and multiple outer shaft agitators. The configuration is as follows: After the material adsorbed by iron impurities is discharged from the tank, the discharge outlet is closed, and pure water is continuously added through the water inlet. The multiple enameled copper coils are de-energized, and the multiple outer shaft agitators are demagnetized and no longer magnetically adsorb iron impurities. The inner and outer shafts rotate at a higher speed, but lower than the speed used in the emulsification process, so that the iron impurities no longer magnetically adsorbed on the multiple outer shaft agitators are washed off by the pure water. The iron impurities mixed in with the pure water are discharged through the drain outlet and discharge outlet. After cleaning, the addition of pure water is stopped, and the drain outlet and discharge outlet are opened to discharge the wastewater generated during cleaning. The inner and outer shafts stop rotating. The zirconium sand left from the grinding process is trapped in the tank through a detachable screen and a porous zirconia plate until a major cleaning of the tank is required. In this case, the detachable screen is removed, and the zirconium sand is discharged through the drain outlet.

[0012] The beneficial effects of this disclosure are as follows.

[0013] In the ITO target slurry preparation apparatus and method according to this disclosure, a single integrated ITO target slurry preparation apparatus is constituted, consisting of a tank, a porous zirconia plate, a water inlet, a water outlet, a material inlet, a material outlet, a zircon sand inlet, a circulation pipeline, a circulation pump, an inner shaft, multiple inner shaft stirring paddles, an outer shaft, multiple outer shaft stirring paddles, multiple enameled copper coils, and a detachable screen. This apparatus disperses, emulsifies, grinds, adsorbs iron impurities, and cleans the indium tin oxide powder and tin oxide powder with pure water to form an indium tin oxide slurry. In this ITO target slurry preparation apparatus, the dispersion, emulsification, grinding, iron impurity adsorption, and cleaning of the indium tin oxide slurry preparation process can be carried out in situ within the same tank. This breaks through the traditional model of separating dispersion, emulsification, and grinding equipment, integrating multiple processes into the same tank. It completely eliminates the material transfer process between different process equipment and pipelines, greatly simplifies the process flow, reduces equipment and space occupation, reduces the risk of impurity introduction, shortens the production cycle, and reduces the water consumption for cleaning, significantly improving production efficiency, thereby contributing to improving the purity and performance of the ITO target material.

[0014] In the ITO target slurry preparation apparatus and method according to this disclosure, the arrangement of multiple outer shaft stirring paddles made of silicon steel sheets and multiple enameled copper coils for connection to an external power source enables the outer shaft stirring paddles to be magnetized to adsorb free iron and elemental iron (collectively referred to as iron impurities) during the grinding process, thereby removing iron impurities from the material and ensuring the purity of the ITO target slurry from the source, meeting the high quality requirements of high-end application scenarios. Similarly, the arrangement of multiple outer shaft stirring paddles made of silicon steel sheets and multiple enameled copper coils for connection to an external power source enables the outer shaft stirring paddles to be demagnetized (multiple enameled copper coils are de-energized) and no longer adsorb iron impurities. In the subsequent cleaning process, pure water is used to wash the iron impurities that are no longer magnetically adsorbed off the multiple outer shaft stirring paddles. The iron impurities mixed in with the pure water after washing can be discharged through the drain outlet and the discharge port.

[0015] In the ITO target slurry preparation apparatus and method according to the present disclosure, the multiple outer shaft stirring paddles not only have the function of removing iron impurities from the material, but also have the function of stirring together with the multiple inner shaft stirring paddles. Under the dual stirring, whether in the dispersion, emulsification or grinding stage, the slurry mixing uniformity can be enhanced, the grinding effect of zirconium sand can be fully utilized, and the process treatment effect can be significantly improved.

[0016] In the ITO target slurry preparation apparatus and method according to this disclosure, the porous zirconia plate and detachable screen allow the zirconium sand used for grinding to remain in the tank after the initial addition for subsequent batches of indium tin oxide slurry preparation. The detachable screen is removed when the tank requires extensive cleaning (e.g., cleaning the tank's inner wall, porous zirconia plate, inner shaft, multiple inner shaft agitators, outer shaft, multiple outer shaft agitators, multiple enameled copper coils, etc.), and the zirconium sand is discharged through the drain (i.e., discharged along with the wastewater generated during cleaning). This eliminates the need for a single zirconium sand addition, saving time and simplifying the process. Furthermore, the zirconium sand used in the initial batch enhances agitation during the dispersion and emulsification processes in subsequent batches of indium tin oxide slurry preparation.

[0017] In the ITO target slurry preparation apparatus and method according to this disclosure, both the porous zirconia plate and the zirconium sand involve zirconium. Both zirconia and zirconium sand are wear-resistant, corrosion-resistant, and can avoid contamination by metal ions (such as iron). They are also shape-stable and can function stably for a long time. Furthermore, zirconium impurities are permitted in small amounts in ITO target slurries. Attached Figure Description

[0018] Figure 1 This is a plan view of the ITO target slurry preparation apparatus according to the present disclosure.

[0019] Figure 2 yes Figure 1A top view of the tank, inner shaft, inner shaft agitator, outer shaft, and outer shaft agitator of the ITO target slurry preparation device.

[0020] The reference numerals in the attached figures are explained as follows: 100 ITO target slurry preparation device 21 inner shaft stirring paddle D1 Vertical direction 22 outer shaft D2 Horizontal Direction 23 Outer Shaft Agitator 11 Tank body S-shaped cavity 12-hole zirconia plate, 24-enameled copper coil 121-hole 25-zirconia coating 13 Water inlet 26 First bevel gear 14 Drain outlet 27 Second bevel gear 15 Feed port 28 Third bevel gear 16 discharge ports, 29 motors 17 Zirconium sand inlet, 30 pure water pipeline 18 circulation pipelines 31 drainage pipelines 181 First pipeline 32a First solenoid valve 182 Second pipeline 32b Second solenoid valve 183 Third Pipeline 32c Third Solenoid Valve 19 Circulating Pump 32d Fourth Solenoid Valve 20 inner shaft 32e fifth solenoid valve N Removable Screen Detailed Implementation

[0021] The accompanying drawings illustrate embodiments of this disclosure, and it will be understood that the disclosed embodiments are merely examples of this disclosure, which can be implemented in various forms. Therefore, the specific details disclosed herein should not be construed as limiting, but are intended only as the basis for the claims and as an illustrative basis to teach those skilled in the art how to implement this disclosure in various ways.

[0022] In this disclosure, unless otherwise stated, the terms “first,” “second,” “third,” “fourth,” “fifth,” etc., are used for illustrative and component identification purposes only and should not be construed as indicating relative importance or interrelationship.

[0023] [ITO Target Material Slurry Preparation Apparatus] Reference Figure 1 and Figure 2The ITO target slurry preparation apparatus 100 according to this disclosure includes: a tank 11; a porous zirconia plate 12 disposed near the bottom of the tank 11, wherein the aperture of the holes 121 of the porous zirconia plate 12 is smaller than the diameter of the zirconium sand used for grinding; a water inlet 13 disposed at the top of the tank 11 for adding at least pure water; a drain outlet 14 disposed at the tank 11, near and above the zirconia plate 12; a feed inlet 15 disposed at the top of the tank 11 for adding indium oxide and tin oxide powder; and a discharge outlet 16 disposed at... Below the zirconia plate 12 and at the bottom of the tank 11; a zircon sand inlet 17, located at the top of the tank 11, for adding zircon sand for grinding; a circulation pipeline 18 connecting the discharge port 16 and the water inlet 13; a circulation pump 19, located on the circulation pipeline 18; an inner shaft 20, capable of rotation, mounted on the tank 11 and extending downward from the top of the tank 11; multiple inner shaft agitators 21, mounted on the inner shaft 20 and spaced apart from top to bottom, with adjacent inner shaft agitators 21 positioned vertically in the direction D1. The shadow forms a non-zero included angle; the outer shaft 22 is rotatable, and is installed on the tank 11, extending downward from the top of the tank 11, sleeved and spaced from the inner shaft 20; multiple outer shaft agitators 23 are alternately distributed with multiple inner shaft agitators 21 on the projection of the vertical direction D1, and each outer shaft agitator 23 forms a flat cavity S connected to each other along the vertical direction D1 in the plane formed by the horizontal direction D2 and the vertical direction D1, and the volume formed by each flat cavity S around the outer shaft 22 is non-interfering (i.e., each outer shaft agitator 21 is connected to each other along the vertical direction D1). (The rotation of 23 is not interfered with the rotation of the corresponding inner shaft agitator 21) The volume formed by the inner shaft agitator 21 rotating around the inner shaft 20 is contained. Each outer shaft agitator 23 is made of silicon steel sheet. Multiple enameled copper coils 24 are wound around the corresponding outer shaft agitator 23 and both ends pass through the tank 11 from the gap between the outer shaft 22 and the inner shaft 20 for connection to an external power source (not shown). A detachable screen N is provided at the drain outlet 14. The mesh size of the detachable screen N is smaller than the diameter of the zircon sand used for grinding.

[0024] In the ITO target slurry preparation apparatus 100 according to this disclosure, a tank 11, a porous zirconia plate 12, a water inlet 13, a water outlet 14, a feed inlet 15, a discharge outlet 16, a zircon sand inlet 17, a circulation pipeline 18, a circulation pump 19, an inner shaft 20, multiple inner shaft agitators 21, an outer shaft 22, multiple outer shaft agitators 23, multiple enameled copper coils 24, and a detachable screen N constitute an integrated single ITO target slurry preparation apparatus 100 that disperses, emulsifies, and grinds indium oxide powder and tin oxide powder with pure water to form an indium tin oxide slurry. The ITO target slurry preparation device 100 can perform dispersion, emulsification, grinding, iron impurity adsorption and cleaning of indium tin oxide slurry in situ within the same tank 11. It breaks through the traditional mode of separating dispersion, emulsification and grinding equipment, and integrates multiple processes into the same tank 11. It completely eliminates the material transfer process between different process equipment and pipelines, greatly simplifies the process flow, reduces equipment and space occupation, reduces the risk of impurity introduction, shortens the production cycle and reduces the water consumption for cleaning, and significantly improves production efficiency, thereby helping to improve the purity and performance of ITO target materials.

[0025] In the ITO target slurry preparation apparatus 100 according to this disclosure, the arrangement of multiple outer shaft stirring paddles 23 made of silicon steel sheets and multiple enameled copper coils 24 for connection to an external power source enables the outer shaft stirring paddles 23 to be magnetized to adsorb free iron and elemental iron (collectively referred to as iron impurities) during the grinding process, thereby removing iron impurities from the material and ensuring the purity of the ITO target slurry from the source, meeting the high quality requirements of high-end application scenarios. Similarly, the arrangement of multiple outer shaft stirring paddles 23 made of silicon steel sheets and multiple enameled copper coils 24 for connection to an external power source enables the outer shaft stirring paddles 23 to be demagnetized (the multiple enameled copper coils 24 are de-energized) and no longer adsorb iron impurities. In the subsequent cleaning process, pure water is used to wash the iron impurities that are no longer magnetically adsorbed from the multiple outer shaft stirring paddles 23. The iron impurities mixed in the pure water after washing can be discharged through the drain outlet 14 and the discharge outlet 16.

[0026] In the ITO target slurry preparation apparatus 100 according to the present disclosure, the multiple outer shaft stirring paddles 23 not only have the function of removing iron impurities from the material, but also have the function of stirring together with the multiple inner shaft stirring paddles 21. Under the dual stirring, whether in the dispersion, emulsification or grinding stage, the slurry mixing uniformity can be enhanced, the grinding effect of zirconium sand can be fully utilized, and the process treatment effect can be significantly improved.

[0027] In the ITO target slurry preparation apparatus 100 according to this disclosure, the porous zirconia plate 12 and the removable screen N allow the zirconium sand to remain in the tank 11 after the initial addition of grinding zirconium sand for subsequent batches of indium tin oxide slurry preparation. The removable screen N is then removed when the tank 11 requires extensive cleaning (e.g., cleaning the inner wall of the tank 11, the porous zirconia plate 12, the inner shaft 20, multiple inner shaft agitators 21, the outer shaft 22, multiple outer shaft agitators 23, multiple enameled copper coils 24, etc.). The zirconium sand is then discharged through the drain port 14 (i.e., discharged along with the wastewater generated during cleaning), thus requiring only a single addition of zirconium sand, saving time and simplifying the process. Furthermore, the zirconium sand used in the initial batches enhances agitation during the dispersion and emulsification processes in subsequent batches of indium tin oxide slurry preparation.

[0028] In the ITO target slurry preparation apparatus 100 according to this disclosure, both the porous zirconia plate 12 and the zirconium sand involve zirconium. Both zirconia and zirconium sand are wear-resistant, corrosion-resistant, and can avoid contamination by metal ions (such as iron). They are also shape-stable and can function stably for a long time. Furthermore, zirconium impurities are permitted in small amounts in ITO target slurries.

[0029] Similarly, for example, the inner wall surface of the tank 11 is made of zirconium oxide. For example, zirconium oxide can be applied to the substrate (e.g., stainless steel) of the tank 11 using a plasma spraying process. In one example, the thickness of the zirconium oxide on the inner wall surface of the tank 11 is 2-3 mm.

[0030] In one example, the pore size of the holes 121 in the porous zirconia plate 12 is 0.8 times the diameter of the zircon sand particles.

[0031] like Figure 2 As shown, in one example, the angle formed by the projections of adjacent inner shaft impellers 21 onto the vertical direction D1 is 45 degrees. For example, as... Figure 2 As shown, each inner shaft agitator 21 is a horizontal, straight-line impeller. Figure 1 In the example, the inner shaft agitator 21 has four layers, one per layer, for a total of four inner shaft agitators 21. Of course, the number of layers of the inner shaft agitator 21 can be less than four or more than four. Similarly, for example, the surface of the inner shaft 20 is coated with zirconium oxide; the surface of each inner shaft agitator 21 is also coated with zirconium oxide. The zirconium oxide can be applied by thermal spraying, sintering, and then machining to the designed dimensions. For example, the thickness of the zirconium oxide coating on the surfaces of the inner shaft 20 and each inner shaft agitator 21 is 2 mm. In one example, the material of the inner shaft 20 and each inner shaft agitator 21 is stainless steel.

[0032] In one example, each outer shaft impeller 23 is formed by stacking multiple silicon steel sheets. For example, the thickness of each silicon steel sheet is 0.3-0.5 mm, and the magnetic permeability of each silicon steel sheet is ≥150005 H / m and the coercivity is ≤5 A / m.

[0033] Similarly, each outer shaft impeller 23, along with the enameled copper coil 24 wound around it, is entirely encapsulated by a zirconia cladding 25. For example, the thickness of the zirconia cladding 25 for each outer shaft impeller 23 is 2 mm.

[0034] like Figure 2 As shown, in one example, multiple outer shaft impellers 23 and multiple inner shaft impellers 21 are equally spaced and alternately distributed on the projection in the vertical direction D1. This equally spaced alternation of the outer shaft impellers 23 and the inner shaft impellers 21 enhances the shearing effect when they rotate in opposite directions. Figure 2 In this case, there are four outer shaft agitators 23, but it is not limited to this; there may be fewer or more than four outer shaft agitators 23.

[0035] like Figure 2 As shown, in one example, the ITO target slurry preparation apparatus 100 further includes a first bevel gear 26, a second bevel gear 27, a third bevel gear 28, and a motor 29. The first bevel gear 26 is mounted on the top of the outer shaft 22, and its axis is vertical. The second bevel gear 27 is mounted on the top of the inner shaft 20, located above and spaced apart from the first bevel gear 26, and its axis is vertical. The third bevel gear 28 is connected to the motor 29, its axis is horizontal, and it meshes between the first bevel gear 26 and the second bevel gear 27. The motor 29 drives the third bevel gear 28 to rotate, causing it to mesh with the first bevel gear 26 and the second bevel gear 27, and causing the first bevel gear 26 and the second bevel gear 27 to rotate synchronously and at the same speed in opposite directions in the horizontal plane around the vertical axis. The counter-rotation of the first bevel gear 26 and the second bevel gear 27 causes multiple outer shaft stirring paddles 23 and multiple inner shaft stirring paddles 21 to rotate in opposite directions, enhancing the shearing effect and thus enhancing the dispersion, emulsification, and grinding effects. Of course, the drive mechanism that enables multiple outer shaft impellers 23 and multiple inner shaft impellers 21 to rotate in opposite directions, synchronously, and at the same speed can adopt any other mechanical structure.

[0036] like Figure 1As shown, in one example, the ITO target slurry preparation apparatus 100 further includes a pure water pipeline 30 and a drain pipeline 31. The circulation pipeline 18 includes a first pipeline 181, a second pipeline 182, and a third pipeline 183 connected in sequence; one end of the first pipeline 181 is connected to the discharge port 16, and the other end of the first pipeline 181 forms a tee with one end of the drain pipeline 31 and one end of the second pipeline 182; one end of the third pipeline 183 is connected to the water inlet 13, and the other end of the third pipeline 183 forms a tee with the other end of the pure water pipeline 30 and the other end of the second pipeline 182; the pure water pipeline 30 is equipped with a third solenoid valve 32c; the drain pipeline 31 is equipped with a fourth solenoid valve 32d; the second pipeline 182 is equipped with a first solenoid valve 32a; and the third pipeline 183 is equipped with a second solenoid valve 32b. Similarly, the drain port 14 is equipped with a fifth solenoid valve 32e.

[0037] [ITO Target Material Slurry Preparation Method] The ITO target slurry preparation method disclosed herein employs the aforementioned ITO target slurry preparation apparatus 100.

[0038] The structure, operation, and effects of the ITO target slurry preparation device 100 are described above and will not be repeated here.

[0039] In one example, the water inlet 13, the feed inlet 15, the inner shaft 20 and multiple inner shaft agitators 21, and the outer shaft 22 and multiple outer shaft agitators 23 are configured (i.e., for the dispersion process): after pre-adding pure water into the tank 11 through the water inlet 13, and adding indium oxide powder and tin oxide powder in batches into the tank 11 through the feed inlet 15, the inner shaft 20 and the outer shaft 22 rotate synchronously in opposite directions at low speeds to drive the multiple inner shaft agitators 21 and the multiple outer shaft agitators 23 respectively to disperse the indium oxide powder and tin oxide powder into the pure water to complete the dispersion process and obtain dispersed material. Correspondingly, the first solenoid valve 32a, the fourth solenoid valve 32d, and the fifth solenoid valve 32e are closed, and the second solenoid valve 32b and the third solenoid valve 32c are open.

[0040] In one example, the inner shaft 20 and multiple inner shaft agitators 21 are configured with the outer shaft 22 and multiple outer shaft agitators 23 (i.e., for the emulsification process): after the dispersion process is completed, the inner shaft 20 accelerates its rotation while the outer shaft 22 rotates synchronously in the opposite direction, so that the multiple inner shaft agitators 21 and multiple outer shaft agitators 23 generate shear force, thereby emulsifying the dispersed material and obtaining an emulsified material. During the emulsification process, for example, the first solenoid valve 32a, the second solenoid valve 32b, the third solenoid valve 32c, the fourth solenoid valve 32d, and the fifth solenoid valve 32e are all closed.

[0041] In one example, the zircon sand inlet 17, discharge outlet 16, circulation pipeline 18, circulation pump 19, water inlet 13, inner shaft 20 and multiple inner shaft agitators 21, outer shaft 22 and multiple outer shaft agitators 23, and porous zirconia plate 12 are configured (i.e., for the grinding process): after emulsification, zircon sand is added into the tank 11 through the zircon sand inlet 17, the inner shaft 20 and outer shaft 22 are both accelerated, the circulation pump 19 is turned on, and the zircon sand in the tank 11 grinds the emulsified material. The ground emulsified material forms a circulation in and out of the tank 11 through the discharge outlet 16, circulation pipeline 18, circulation pump 19, and water inlet 13 to complete the grinding of the emulsified material and obtain ground material. The aperture of the holes 121 of the porous zirconia plate 12 prevents zircon sand from leaking downward through the holes 121 of the porous zirconia plate 12. Correspondingly, in the grinding process, the first solenoid valve 32a and the second solenoid valve 32b are open, while the fourth solenoid valve 32d, the fifth solenoid valve 32e and the third solenoid valve 32c are closed.

[0042] In one example, the discharge port 16, circulation pipeline 18, circulation pump 19, water inlet 13, multiple enameled copper coils 24, inner shaft 20, and multiple inner shaft agitators 21 are configured with the outer shaft 22 and multiple outer shaft agitators 23 (i.e., for the iron impurity removal process): After the grinding of the emulsified material is completed, the circulation of the emulsified material entering and leaving the tank 11 via the discharge port 16, circulation pipeline 18, circulation pump 19, and water inlet 13 stops. The inner shaft 20 and outer shaft 22 are both reduced to a speed lower than that of the inner shaft 20 in the dispersion process. The external power supply is activated, and the multiple enameled copper coils 24 are energized to form a magnetic field. The multiple outer shaft agitators 23 are magnetized and adsorb free iron and elemental iron in the ground material to complete the iron impurity adsorption process and obtain iron impurity removed material. Correspondingly, in the iron impurity removal process, the first solenoid valve 32a, the second solenoid valve 32b, the third solenoid valve 32c, the fourth solenoid valve 32d, and the fifth solenoid valve 32e are all closed.

[0043] In one example, the discharge port 16, multiple enameled copper coils 24, inner shaft 20, and multiple inner shaft agitators 21 are configured with outer shaft 22 and multiple outer shaft agitators 23 (i.e., the slurry discharge process): After the iron impurity adsorption process is completed, the multiple enameled copper coils 24 are kept energized and the inner shaft 20 and outer shaft 22 are rotated, the discharge port 16 is opened, and the material from which the iron impurities have been adsorbed is discharged from the tank 11. The residual iron impurity content of the material from which the iron impurities have been adsorbed is ≤1ppm. Further, the material from which the iron impurities have been adsorbed is discharged via the discharge port 16 and the first pipeline 181, the circulation pump 19, and the drain pipeline 31 to a slurry collection container (not shown) for use in subsequent processes (e.g., for the preparation of indium tin oxide particles). Correspondingly, in the slurry discharge process, the first solenoid valve 32a, the second solenoid valve 32b, the third solenoid valve 32c, and the fifth solenoid valve 32e are closed, and the fourth solenoid valve 32d is open.

[0044] The water inlet 13, drain outlet 14, discharge outlet 16, multiple enameled copper coils 24, inner shaft 20, and multiple inner shaft agitators 21 are configured with outer shaft 22 and multiple outer shaft agitators 23 (i.e., the cleaning process): After the material adsorbed by iron impurities is discharged from tank 11, the discharge outlet 16 is closed, pure water is continuously added through the water inlet 13, the multiple enameled copper coils 24 are de-energized, the multiple outer shaft agitators 23 are demagnetized and no longer magnetically adsorb iron impurities, the inner shaft 20 and outer shaft 22 rotate at a higher speed but lower than the speed of the emulsification process, so that the iron impurities no longer magnetically adsorbed on the multiple outer shaft agitators 23 can be washed off the multiple outer shaft agitators 23 using pure water. Iron impurities mixed in with the pure water are discharged through drain outlet 14 and discharge outlet 16. After cleaning, the addition of pure water is stopped, and drain outlet 14 and discharge outlet 16 are opened to discharge the wastewater generated during cleaning. The inner shaft 20 and outer shaft 22 stop rotating. The zircon sand left from the grinding process is trapped in the tank 11 through the detachable screen N and the porous zirconia plate 12 until the tank 11 needs a major cleaning (e.g., cleaning the inner wall of the tank 11, the porous zirconia plate 12, the inner shaft 20, multiple inner shaft agitators 21, the outer shaft 22, multiple outer shaft agitators 23, multiple enameled copper coils 24, etc.). At this time, the detachable screen N is removed, and the zircon sand is discharged through drain outlet 14. For example, the discharged wastewater can be recycled after secondary treatment by a magnetic filtration device (not shown) to reduce water consumption. Correspondingly, in the cleaning process, the second solenoid valve 32b, the third solenoid valve 32c, the fourth solenoid valve 32d, and the fifth solenoid valve 32e are opened, and the first solenoid valve 32a is closed.

[0045] In one example, in the dispersion process, the inner shaft 20 rotates at 100 rpm; in the emulsification process, the inner shaft 20 and outer shaft 22 rotate at 500 rpm; in the grinding process, the inner shaft 20 and outer shaft 22 rotate at 700 rpm; in the iron impurity removal process, the inner shaft 20 and outer shaft 22 rotate at 50 rpm, and each enameled copper coil 24 is energized to generate a magnetic field with a magnetic induction intensity of ≥10,000 Gauss; in the cleaning process, the inner shaft 20 and outer shaft 22 rotate at 100-200 rpm.

[0046] Several exemplary embodiments have been described in detail above, but this document is not intended to limit itself to the explicitly disclosed combinations. Therefore, unless otherwise stated, the various features disclosed herein can be combined to form several other combinations, which are not shown for simplicity.

Claims

1. An ITO target slurry preparation apparatus, characterized in that, include: Tank body (11): A porous zirconia plate (12) is set near the bottom of the tank (11), and the diameter of the holes (121) of the porous zirconia plate (12) is set to be smaller than the diameter of the zircon sand used for grinding. A water inlet (13) is located at the top of the tank (11) and is used at least for adding pure water; Drainage outlet (14) is located on the tank body (11), near and above the zirconia plate (12); The feeding port (15) is located at the top of the tank (11) for adding indium oxide and tin oxide powder; The discharge port (16) is located below the zirconia plate (12) and at the bottom of the tank (11); A zircon sand inlet (17) is located at the top of the tank (11) and is used to add zircon sand for grinding. A circulation pipeline (18) connects the discharge port (16) and the water inlet (13); A circulation pump (19) is installed on the circulation pipeline (18); The inner shaft (20) is rotatable and is mounted on the tank (11) and extends downward from the top of the tank (11); Multiple inner shaft stirring paddles (21) are installed on the inner shaft (20) and spaced apart from top to bottom from the inner shaft (20). The projections of adjacent inner shaft stirring paddles (21) in the vertical direction (D1) form a non-zero included angle. The outer shaft (22) is rotatable and is mounted on the tank (11), extends downward from the top of the tank (11), and is sleeved and spaced from the inner shaft (20). Multiple outer shaft stirring blades (23) are alternately distributed with multiple inner shaft stirring blades (21) on the projection of the vertical direction (D1). Each outer shaft stirring blade (23) forms a flat cavity (S) connected to each other in the vertical direction (D1) in the plane formed by the horizontal direction (D2) and the vertical direction (D1). Each flat cavity (S) forms a volume around the outer shaft (22) and contains the volume formed by the corresponding inner shaft stirring blade (21) rotating around the inner shaft (20) without interference. Each outer shaft stirring blade (23) is a silicon steel sheet. Multiple enameled copper coils (24) are wound around the corresponding outer shaft agitator (23) and both ends pass through the tank (11) through the gap between the outer shaft (22) and the inner shaft (20) for connection to an external power source; A detachable screen (N) is provided at the drain outlet (14), and the mesh size of the detachable screen (N) is smaller than the diameter of the zircon sand used for grinding.

2. The ITO target slurry preparation apparatus according to claim 1, characterized in that, The inner wall of the tank (11) is made of zirconium oxide.

3. The ITO target slurry preparation apparatus according to claim 1, characterized in that, The angle formed by the projections of adjacent inner shaft agitators (21) in the vertical direction (D1) is 45 degrees.

4. The ITO target slurry preparation apparatus according to claim 1, characterized in that, The surface of the inner shaft (20) is coated with zirconium oxide; The surfaces of each inner shaft agitator (21) are coated with zirconium oxide.

5. The ITO target slurry preparation apparatus according to claim 1, characterized in that, Each inner shaft stirring paddle (21) is a horizontal paddle in a straight line.

6. The ITO target slurry preparation apparatus according to claim 1, characterized in that, Each outer shaft stirring blade (23) is formed by stacking multiple silicon steel sheets. The thickness of each silicon steel sheet is 0.3-0.5 mm, and the magnetic permeability of each silicon steel sheet is ≥150005 H / m and the coercivity is ≤5 A / m.

7. The ITO target slurry preparation apparatus according to claim 1, characterized in that, Each outer shaft agitator (23) together with the enameled copper coil (24) wound around it is completely encapsulated by a zirconia cladding body (25).

8. The ITO target slurry preparation apparatus (100) according to claim 1, characterized in that, On the projection in the vertical direction (D1), multiple outer shaft impellers (23) and multiple inner shaft impellers (21) are distributed alternately at equal intervals.

9. The ITO target slurry preparation apparatus (100) according to claim 1, characterized in that, The ITO target slurry preparation device (100) also includes a pure water pipeline (30) and a discharge pipeline (31). The circulation pipeline (18) includes a first pipeline (181), a second pipeline (182) and a third pipeline (183) connected in sequence. One end of the first pipeline (181) is connected to the discharge port (16), and the other end of the first pipeline (181) forms a tee with the discharge pipeline (31) and one end of the second pipeline (182). One end of the third pipeline (183) is connected to the water inlet (13), and the other end of the third pipeline (183) forms a tee with the pure water pipeline (30) and the other end of the second pipeline (182). The pure water pipeline (30) is equipped with a third solenoid valve (32c), the drain pipeline (31) is equipped with a fourth solenoid valve (32d), the second pipeline (182) is equipped with a first solenoid valve (32a), and the third pipeline (183) is equipped with a second solenoid valve (32b). The drain outlet (14) is equipped with a fifth solenoid valve (32e).

10. A method for preparing ITO target slurry, comprising using the ITO target slurry preparation apparatus (100) according to any one of claims 1-9. in, The water inlet (13), the feed inlet (15), the inner shaft (20) and multiple inner shaft agitators (21), and the outer shaft (22) and multiple outer shaft agitators (23) are configured such that: after pre-adding pure water into the tank (11) through the water inlet (13), and adding indium oxide powder and tin oxide powder into the tank (11) in batches through the feed inlet (15), the inner shaft (20) and the outer shaft (22) rotate in opposite directions at low speed to drive multiple inner shaft agitators (21) and multiple outer shaft agitators (23) to disperse the indium oxide powder and tin oxide powder into the pure water to complete the dispersion process and obtain dispersed materials; The inner shaft (20) and multiple inner shaft agitators (21) are configured with the outer shaft (22) and multiple outer shaft agitators (23) so that after the dispersion process is completed, the inner shaft (20) rotates at a higher speed and the outer shaft (22) rotates synchronously in the opposite direction, so that the multiple inner shaft agitators (21) and multiple outer shaft agitators (23) form a shear force to achieve the emulsification of the dispersed material and obtain the emulsified material. The zircon sand inlet (17), discharge outlet (16), circulation pipeline (18), circulation pump (19), water inlet (13), inner shaft (20) and multiple inner shaft agitators (21) and outer shaft (22) and multiple outer shaft agitators (23), and porous zirconium oxide plate (12) are configured such that: after emulsification, zircon sand is added into the tank (11) through the zircon sand inlet (17), and both the inner shaft (20) and outer shaft (22) are accelerated, and the circulation pump... (19) Open, the zircon sand in the tank (11) grinds the emulsion material. The ground emulsion material forms a circulation in and out of the tank (11) through the discharge port (16), circulation pipeline (18), circulation pump (19), and water inlet (13) to complete the grinding of the emulsion material and obtain the ground material. The aperture of the holes (121) of the porous zirconium oxide plate (12) prevents the zircon sand from leaking down through the holes (121) of the porous zirconium oxide plate (12). The discharge port (16), circulation pipeline (18), circulation pump (19), water inlet (13), multiple enameled copper coils (24), inner shaft (20) and multiple inner shaft agitators (21) are configured with outer shaft (22) and multiple outer shaft agitators (23) as follows: After the grinding of the emulsified material is completed, the circulation of the emulsified material entering and leaving the tank (11) through the discharge port (16), circulation pipeline (18), circulation pump (19), and water inlet (13) stops. The inner shaft (20) and outer shaft (22) are both reduced to a speed lower than that of the inner shaft (20) in the dispersion process. The external power supply is started, and multiple enameled copper coils (24) are energized to form a magnetic field. Multiple outer shaft agitators (23) are magnetized and adsorb free iron and elemental iron in the ground material to complete the iron impurity adsorption process and obtain iron impurity removed material. The discharge port (16), multiple enameled copper coils (24), inner shaft (20) and multiple inner shaft agitators (21) are configured with outer shaft (22) and multiple outer shaft agitators (23) to: after the iron impurity adsorption process is completed, keep the multiple enameled copper coils (24) energized and the inner shaft (20) and outer shaft (22) rotating, open the discharge port (16), and discharge the material with removed iron impurities from the tank (11); The water inlet (13), drain outlet (14), discharge outlet (16), multiple enameled copper coils (24), inner shaft (20) and multiple inner shaft agitators (21) are configured with the outer shaft (22) and multiple outer shaft agitators (23) as follows: After the material adsorbed by iron impurities is discharged from the tank (11), the discharge outlet (16) is closed, pure water is continuously added through the water inlet (13), the multiple enameled copper coils (24) are de-energized, the multiple outer shaft agitators (23) are demagnetized and no longer magnetically adsorb iron impurities, the inner shaft (20) and outer shaft (22) are accelerated but the speed is lower than the speed of the emulsification process, so as to use pure water to remove the iron impurities from the multiple outer shaft agitators (24). Iron impurities that are no longer magnetically attracted on the surface of the tank are washed off by multiple outer shaft agitators (23). The iron impurities mixed in the pure water are discharged through the drain (14) and discharge port (16). After the cleaning is completed, the addition of pure water is stopped, and the drain (14) and discharge port (16) are opened to discharge the wastewater formed during the cleaning. The inner shaft (20) and outer shaft (22) stop rotating. The zircon sand left in the grinding process is trapped in the tank (11) through the detachable screen (N) and the porous zirconium oxide plate (12). The detachable screen (N) is removed when the tank (11) needs a major cleaning, and the zircon sand is discharged through the drain (14).

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