A bubble removal device

Abstract

The application provides a bubble removing device, which comprises a shell, the shell has a first chamber, the first chamber is large at the top and small at the bottom, and the first chamber can contain a solution, the first chamber is provided with a first rotating part, the first rotating part is used for driving the solution to rotate in the first chamber, the shell is provided with a liquid inlet hole, a liquid outlet hole and an exhaust hole which are communicated with the first chamber, the liquid inlet hole is used for flowing the solution into the first chamber, the exhaust hole is used for exhausting the bubbles in the solution, and the liquid outlet hole is used for enabling the solution after exhaust to flow out from the liquid outlet hole, so as to improve the stability of the solution flow, avoid the device from giving an alarm, and ensure the stability of the etching rate and the removal effect of the particulate matter.

Description

Technical Field

[0001] This application relates to the field of semiconductor manufacturing technology, and in particular to a bubble removal device for removing bubbles from wet etching liquid. Background Technology

[0002] In semiconductor wet etching processes, air bubbles exist in the solution (i.e., a large amount of liquid chemicals and pure water). These air bubbles affect the stability of the solution flow rate, thereby affecting the etching rate and the removal effect of particles. They can also cause the etching equipment to issue an alarm. Summary of the Invention

[0003] The purpose of this application is to provide a bubble removal device that can improve the stability of solution flow rate, avoid equipment alarms, and ensure stable etching rate and effective removal of particulate matter.

[0004] To address the above technical problems, this application provides a bubble removal device, including a housing. The housing has a first chamber, which is wider at the top and narrower at the bottom, and is capable of containing a solution. A first rotating component is disposed in the first chamber, which drives the solution to rotate within the first chamber. The housing is provided with an inlet, an outlet, and an exhaust port communicating with the first chamber. The inlet allows the solution to flow into the first chamber, the exhaust port allows bubbles in the solution to be expelled, and the outlet allows the vented solution to exit through the outlet.

[0005] Optionally, the inlet and outlet are connected to the first chamber from the top, and the outlet is located at the bottom of the first chamber, so that the solution can flow into the first chamber from the inlet. After the solution is rotated by the first rotating component, the bubbles in the solution float to the vicinity of the outlet and are discharged through the outlet. The solution after being vented can flow out from the outlet.

[0006] Optionally, the housing further includes a second chamber located above the first chamber. The first and second chambers are separated by a partition and connected by a flow hole penetrating the partition. The liquid inlet is connected to the second chamber, and the vent is located at the top of the first chamber and is connected to the first chamber.

[0007] Furthermore, the second chamber is cylindrical, while the first chamber is conical or frustum-shaped;

[0008] When the first chamber is conical, its bottom surface is adjacent to the second chamber; when the first chamber is frustum-shaped, its top surface is adjacent to the second chamber, and the diameter of the top surface of the first chamber is larger than the diameter of the bottom surface of the first chamber.

[0009] The axes of the first chamber and the second chamber are both parallel to the direction of gravity, and the axes of the first chamber and the second chamber are on the same straight line.

[0010] Furthermore, the liquid inlet is tubular, and the wall of the liquid inlet is tangential to the side wall of the second chamber.

[0011] Furthermore, the flow hole and the liquid inlet hole are spaced apart along the circumferential direction of the second chamber.

[0012] Optionally, the first rotating component matches the shape of the first chamber.

[0013] Optionally, the first rotating component includes a first central column and at least three first fan blades, all of which are evenly distributed around the first central column.

[0014] Furthermore, it also includes a second rotating component, the shape of which matches the shape of the second chamber.

[0015] Furthermore, the partition plate is provided with a shaft hole, and the second rotating component and the first rotating component are rigidly connected through the shaft hole.

[0016] Optionally, it may also include a drive source electrically connected to the first rotating component from the outside of the first rotating component and providing rotational power to the first rotating component.

[0017] Optionally, the material of the housing may be selected as a corrosion-resistant and rust-resistant material. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the buffer tank.

[0019] Figure 2 This is a cross-sectional structural diagram of the shell provided in Embodiment 1 of this application.

[0020] Figure 3 for Figure 2 A schematic diagram of the cross-sectional structure along the dotted line.

[0021] Figure 4 This is a three-dimensional structural diagram of the main defoaming component provided in Embodiment 1 of this application.

[0022] Figure 5This is a three-dimensional structural diagram of the defoaming component provided in Embodiment 1 of this application.

[0023] Figure 6 A schematic diagram of liquid flow in the bubble removal device provided in Embodiment 1 of this application.

[0024] Figure 7 This is a cross-sectional structural diagram of the shell provided in Embodiment 2 of this application.

[0025] Explanation of reference numerals in the attached figures:

[0026] Figure 1 In the middle: 1-Inlet port; 2-Vent port; 3-Outlet port;

[0027] Figures 2-7 In the middle: 100, 100' - shell; 110 - first chamber; 111 - vent; 112 - liquid outlet; 120 - second chamber; 121 - liquid inlet; 130 - partition; 131 - flow hole; 132 - shaft hole; 200 - first rotating component; 210 - first central column; 220 - first fan blade; 300 - second rotating component; 310 - second central column; 320 - second fan blade. Detailed Implementation

[0028] The following is a further detailed description of a bubble removal device according to the present invention. The invention will now be described in more detail with reference to the accompanying drawings, which illustrate preferred embodiments of the invention. It should be understood that those skilled in the art can modify the invention described herein while still achieving its advantageous effects. Therefore, the following description should be understood as being of general knowledge to those skilled in the art and is not intended to limit the invention.

[0029] For clarity, not all features of the actual embodiments are described. In the following description, well-known functions and structures are not detailed in detail, as they would obscure the invention with unnecessary detail. It should be understood that in the development of any actual embodiment, numerous implementation details must be made to achieve the developer's specific objectives, such as changes from one embodiment to another according to limitations related to the system or business. Furthermore, it should be understood that such development work may be complex and time-consuming, but is merely routine work for those skilled in the art.

[0030] To make the objectives and features of the present invention more apparent and understandable, the specific embodiments of the present invention will be further described below with reference to the accompanying drawings. It should be noted that the drawings are all in a very simplified form and use non-precise ratios, and are only used to conveniently and clearly assist in illustrating the objectives of the embodiments of the present invention.

[0031] like Figure 1As shown, current wet etching equipment includes a buffer tank to remove air bubbles from the solution. The buffer tank has an inlet 1, an vent 2, and an outlet 3. Liquid enters the buffer tank through the inlet 1. After settling, under the influence of gravity, air bubbles float and accumulate at the vent 2 at the top of the buffer tank. These bubbles are then discharged through the vent 2, and the discharged liquid flows out through the outlet 3. In this structure, the air bubbles are naturally expelled by buoyancy, resulting in a low overall bubble removal rate. This affects the stability of the solution flow rate, thus impacting the etching rate and particulate matter removal efficiency, and also causing equipment alarms and other problems.

[0032] To address the above technical problems, this application provides a bubble removal device comprising a housing, the housing having a first chamber that is wider at the top and narrower at the bottom, and capable of containing a solution. A first rotating component is disposed in the first chamber, the first rotating component being used to drive the solution to rotate within the first chamber. The housing is provided with an inlet hole, an outlet hole, and an exhaust hole communicating with the first chamber. The inlet hole is used to allow the solution to flow into the first chamber, the exhaust hole is used to expel bubbles from the solution, and the outlet hole is used to allow the vented solution to exit from the outlet hole.

[0033] The bubble removal device of this application embodiment discharges bubbles from the solution under the action of the first rotating component. There is no gas source in the first chamber, so no additional bubbles are generated when the first rotating component rotates. At the same time, the upper-large and lower-small shape of the first chamber reduces the volume of the chamber and reduces the driving force of the solution flow in the first chamber, resulting in a larger pressure at the liquid outlet, which is conducive to the discharge of bubbles, improves the stability of the solution flow rate, avoids the device from issuing an alarm, and at the same time ensures the stability of the etching rate and the removal effect of particulate matter.

[0034] Example 1

[0035] like Figure 2 As shown, the bubble removal device includes a housing 100, the shape of which includes, but is not limited to, a cube. The material of the housing 100 is selected to be a corrosion-resistant and rust-resistant material, such as PFA (fusible polytetrafluoroethylene, Polyfluoroalkoxy Resin).

[0036] The housing 100 has chambers, including a first chamber 110 and a second chamber 120. The second chamber 120 is located above the first chamber 110 and is cylindrical, while the first chamber 110 is conical or frustum-shaped. When the first chamber 110 is conical, its bottom surface is adjacent to the second chamber 120; when the first chamber 110 is frustum-shaped, its upper bottom surface is adjacent to the second chamber 120, and the diameter of the upper bottom surface of the first chamber 110 is larger than the diameter of its lower bottom surface. Preferably, the axes of the first chamber 110 and the second chamber 120 are both parallel to the direction of gravity. In this embodiment, the axes of the first chamber 110 and the second chamber 120 are on the same straight line to facilitate the installation of coaxially rotating components in the first chamber 110 and the second chamber 120. The exhaust port is located at the top of the first chamber and communicates with the first chamber.

[0037] The first chamber 110 and the second chamber 120 are separated into two independent chambers by a partition 130. The partition 130 is provided with a shaft hole 132, which is located on the shaft of the second chamber 120. The partition 130 can be installed independently between the first chamber 110 and the second chamber 120, or it can be integrally formed with the housing 100.

[0038] The first chamber 110 has a smaller volume than the second chamber 120, and the height of the first chamber 110 is greater than the height of the second chamber 120, so as to facilitate the rotation of the rotating component.

[0039] like Figures 4-5 As shown, a rotating component is provided in the chamber. Specifically, the rotating component includes a first rotating component 200 and a second rotating component 300. The first rotating component 200 is disposed in the first chamber 110, and the second rotating component 300 is disposed in the second chamber 120. The first rotating component 200 and the second rotating component 300 are rigidly connected through the shaft hole 132, and the second rotating component 300 drives the first rotating component 200 to rotate coaxially. Specifically, when the solution enters the second chamber 120 from the inlet hole 121, it can provide rotational power to the second rotating component 300. Thus, without external force, the second rotating component 300 drives the first rotating component 200 to rotate coaxially (coaxial clockwise or cylindrical counterclockwise), and drives the solution in the first chamber 110 and the second chamber 120 to rotate and expel air bubbles, thereby avoiding the need to provide a power source (e.g., a motor to drive the rotating component).

[0040] The overall shape of the first rotating component 200 may not match the shape of the first chamber 110, or the overall shape of the first rotating component 200 may match the shape of the first chamber 110. Preferably, as... Figure 4 As shown, the overall shape of the first rotating component 200 matches the shape of the first chamber 110. For example, the outer contour of the first rotating component 200 matches the accommodating space of the first chamber 110, such as being conical or frustum-shaped. That is, the first rotating component is matched and disposed in the first chamber, and a gap is provided between it and the inner wall of the first chamber 110. Preferably, the gap between the first rotating component 200 and the inner wall of the first chamber 110 is as small as possible so that the solution in the first chamber 110 can rotate synchronously under the action of the first rotating component 200.

[0041] The first rotating component 200 includes a first central column 210 and first blades 220, with the first blades 220 wound around the first central column 210. In this embodiment, the number of first blades 220 is at least three, and all the first blades 220 are preferably evenly distributed on the first central column 210, i.e., the included angle between each pair of first blades 220 is the same, so that the first rotating component 200 provides a uniform rotational thrust to the solution between adjacent first blades 220. The shape of the first blade 220 is a right trapezoid, and the right-angled side is fixed to the first central column 210.

[0042] The overall shape of the second rotating component 300 may not match the shape of the second chamber 120, or the overall shape of the second rotating component 300 may match the shape of the second chamber 120. Preferably, as Figure 5 As shown, the overall shape of the second rotating component 300 matches the shape of the second chamber 120. For example, the outer contour of the second rotating component 300 matches the accommodating space of the second chamber 120, for example, it is cylindrical. That is to say, the second rotating component is matched and disposed in the second chamber, and a gap is provided between it and the inner wall of the second chamber 120. Preferably, the gap between the second rotating component 300 and the inner wall of the second chamber 120 is as small as possible so that the solution can provide the second rotating component 300 with the maximum rotatable power when it enters the second chamber 120 from the inlet hole 121.

[0043] The second rotating component 300 includes a second central column 310 and a second fan blade 320. The second fan blade 320 is wound around the second central column 310. The first central column 210 is coaxially connected to the second central shaft through a shaft hole 132.

[0044] In this embodiment, the number of second fan blades 320 is at least three, and all the second fan blades 320 are preferably evenly distributed on the second central column 310, that is, the included angle between each pair of second fan blades 320 is the same, so that the second rotating component 300 provides a uniform rotational thrust to the solution between adjacent second fan blades 320. The second fan blades 320 are rectangular in shape, and one side of the rectangle is fixed to the second central column 310.

[0045] like Figure 3 As shown, please also refer to Figure 2 The partition 130 is provided with a flow hole 131, which connects the first chamber 110 and the second chamber 120. The flow hole 131 can be a conventional shape such as a round hole, trapezoidal hole, or square hole, or it can be an arc-shaped or fan-shaped hole in which the bottom of the trapezoidal hole overlaps with the side wall of the second chamber 120. The flow hole 131 and the liquid inlet hole 121 are spaced apart along the circumference of the second chamber 120.

[0046] Since the inlet hole 121 and the flow hole 131 are spaced apart along the circumferential direction of the second chamber 120, there is a gap of at least two second fan blades 320 between the inlet hole 121 and the flow hole 131. That is, all the second fan blades 320 form at least three fan shapes. There is a gap of at least one fan shape between the inlet hole 121 and the flow hole 131. The flow hole 131 is located close to the inner wall of the second chamber 120, that is, as far away from the shaft hole 132 as possible. The maximum size of the flow hole 131 is the same as the size of the fan shape it belongs to. At this time, the shape of the flow hole 131 corresponds to a fan shape.

[0047] The housing 100 is provided with an inlet hole 121, an outlet hole 112, and an exhaust hole 111. The inlet hole 121 and the exhaust hole are connected to the first chamber 110 from the top. The outlet hole 112 is located at the bottom of the first chamber 110, so that the solution can flow into the first chamber 110 from the inlet hole 121. After the solution is rotated by the first rotating component 200, the bubbles in the solution float to the vicinity of the exhaust hole 111 and are discharged through the exhaust hole 111. The solution after being vented can flow out from the outlet hole 112.

[0048] The inlet hole 121 is connected to the second chamber 120. The inlet hole 121 is tubular, and the wall of the inlet hole 121 is tangential to the side wall of the second chamber 120, so that when the solution enters the second chamber 120, it enters the inlet hole 121 along the side wall of the inlet hole 121.

[0049] Both the liquid outlet 112 and the vent 111 penetrate the housing 100 and connect to the first chamber 110. The vent 111 is located near the partition 130, and the liquid outlet 112 is located away from the partition 130. Preferably, the liquid outlet 112 is located at the bottom of the first chamber 110 so that the solution pressure at the liquid outlet 112 is maximized and the bubbles are minimized.

[0050] like Figure 6 As shown, when the bubble removal device is working, the solution flows into the second chamber 120 through the inlet hole 121. At this time, since the solution enters in a direction tangential to the side wall of the second chamber 120, the solution provides rotational power to each of the second blades 320 passing through the inlet hole 121, allowing them to rotate clockwise or counterclockwise. Simultaneously, the second blades 320 drive the first central column 210 to rotate through the second central column 310, thereby driving the first blades 220 to rotate. After entering the second chamber 120, the solution enters the first chamber 110 through the flow hole 131. The solution in the first chamber 110 rotates and flows under the action of the first rotating component 200. During the rotational flow, the solution in the first chamber 110 generates centrifugal force. Under the action of centrifugal force, the bubbles in the solution are squeezed out and separated from the solution. The separated bubbles gather near the partition 130 under the action of buoyancy and are discharged through the exhaust hole 111. The solution with the bubbles removed flows out through the outlet hole 112.

[0051] Example 2

[0052] Compared with Example 1, the difference is that, as Figure 7 As shown, the chamber in the housing 100' of this embodiment only includes the first chamber 110. At this time, the rotating component only includes the first rotating component 200. The first rotating component 200 is electrically connected to the drive source from the outside of the first chamber 110 through the first central column 210, and rotates clockwise or counterclockwise under the action of the drive source.

[0053] The inlet 121 of the bubble removal device is connected to the first chamber 110 from the top. An exhaust port 111 is provided at the top of the first chamber 110, and an outlet port 112 is provided at the bottom of the first chamber 110.

[0054] When the bubble removal device is working, the solution flows into the first chamber 110 through the inlet hole 121. At the same time, the drive source drives the first rotating component 200 to rotate. The solution in the first chamber 110 rotates and flows under the action of the first rotating component 200. During the rotation and flow, the solution in the first chamber 110 generates centrifugal force. Under the action of centrifugal force, the bubbles in the solution are squeezed out and separated from the solution. The separated bubbles gather near the top of the first chamber 110 under the action of buoyancy and are discharged through the vent hole 111. The solution with the bubbles removed flows out through the outlet hole 112.

[0055] In summary, this application provides a bubble removal device comprising a housing having a first chamber, the first chamber being wider at the top and narrower at the bottom, and capable of containing a solution. A first rotating component is disposed within the first chamber, the first rotating component driving the solution to rotate within the first chamber. The housing is provided with an inlet, an outlet, and an exhaust port communicating with the first chamber. The inlet allows the solution to flow into the first chamber, the exhaust port discharges bubbles from the solution, and the outlet allows the vented solution to exit through the outlet. This application removes bubbles from the solution under the action of the first rotating component; the first chamber is a closed space, eliminating the gas source within it, thus preventing additional bubbles from being generated when the first rotating component rotates. Simultaneously, the wider-than-narrow shape of the first chamber reduces its volume, decreasing the driving force for solution flow within the first chamber, resulting in higher pressure at the outlet, which facilitates bubble discharge and improves the stability of the solution flow rate. This enhances the stability of the solution flow rate, preventing alarms and ensuring stable etching rates and effective particulate removal.

[0056] Furthermore, it should be noted that, unless otherwise specified or indicated, the terms "first" and "second" in the specification are used only to distinguish the various components, elements, steps, etc. in the specification, and are not used to indicate the logical or sequential relationships between the various components, elements, steps, etc.

[0057] It is understood that although the present invention has been disclosed above with reference to preferred embodiments, these embodiments are not intended to limit the present invention. For any person skilled in the art, many possible variations and modifications can be made to the technical solutions of the present invention based on the disclosed technical content, or equivalent embodiments can be modified accordingly, without departing from the scope of the present invention. Therefore, any simple modifications, equivalent changes, and modifications made to the above embodiments based on the technical essence of the present invention without departing from the content of the present invention shall still fall within the protection scope of the present invention.

Claims

1. A bubble removal device, characterized in that, The device includes a housing with a first chamber that is wider at the top and narrower at the bottom, and is capable of holding a solution. A first rotating component is disposed in the first chamber to drive the solution to rotate within the first chamber. The housing is provided with an inlet, an outlet, and an outlet communicating with the first chamber. The inlet is used to allow the solution to flow into the first chamber, the outlet is used to expel air bubbles from the solution, and the outlet is used to allow the vented solution to exit through the outlet.

2. The bubble removal device as described in claim 1, characterized in that, The inlet and outlet are connected to the first chamber from the top, and the outlet is located at the bottom of the first chamber, so that the solution can flow into the first chamber from the inlet. After the solution is rotated by the first rotating component, the bubbles in the solution float to the vicinity of the outlet and are discharged through the outlet. The solution after being vented can flow out from the outlet.

3. The bubble removal device as described in claim 1, characterized in that, The housing further includes a second chamber located above the first chamber. The first and second chambers are separated by a partition and connected by a flow hole penetrating the partition. The liquid inlet is connected to the second chamber, and the vent is located at the top of the first chamber and is connected to the first chamber.

4. The bubble removal device as described in claim 3, characterized in that, The second chamber is cylindrical, and the first chamber is conical or frustum-shaped. When the first chamber is conical, its bottom surface is adjacent to the second chamber; when the first chamber is frustum-shaped, its top surface is adjacent to the second chamber, and the diameter of the top surface of the first chamber is larger than the diameter of the bottom surface of the first chamber. The axes of the first chamber and the second chamber are both parallel to the direction of gravity, and the axes of the first chamber and the second chamber are on the same straight line.

5. The bubble removal device as described in claim 4, characterized in that, The liquid inlet is tubular, and the wall of the liquid inlet is tangential to the side wall of the second chamber.

6. The bubble removal device as described in claim 3, characterized in that, The flow holes and the liquid inlet holes are spaced apart along the circumferential direction of the second chamber.

7. The bubble removal device as described in claim 1, characterized in that, The first rotating component matches the shape of the first chamber.

8. The bubble removal device as described in claim 1, characterized in that, The first rotating component includes a first central column and at least three first fan blades, all of which are evenly distributed around the first central column.

9. The bubble removal device as described in claim 3, characterized in that, It also includes a second rotating component, the shape of which matches the shape of the second chamber.

10. The bubble removal device as described in claim 9, characterized in that, The partition plate is provided with a shaft hole, and the second rotating component and the first rotating component are rigidly connected through the shaft hole.

11. The bubble removal device as described in claim 1, characterized in that, It also includes a drive source, which is electrically connected to the first rotating component from the outside of the first rotating component and provides rotational power to the first rotating component.

12. The bubble removal device as described in claim 1, characterized in that, The shell is made of corrosion-resistant and rust-resistant material.

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