High-reliability silicon wafer transmission device

Abstract

The utility model discloses a high-reliability silicon wafer transmission device. The high-reliability silicon wafer transmission device comprises a first conveyor belt and two second conveyor belts which are arranged in parallel, flat conveying belts are mounted on the first conveying belt and the second conveying belt; gradually-changed arc-shaped supports are arranged in the two second conveying belts and are used for supporting the top surfaces of the two second conveying belts from the bottoms, so that the top surfaces of the second conveying belts are gradually transited to be horizontal along the arc shapes. According to the conveying device, the silicon wafers are gradually turned to be in the horizontal state from the vertical state in the conveying process, the problem that the silicon wafers slip in the steering process is solved through the belt type conveying belt, the conveying reliability of the silicon wafers is effectively improved, and unnecessary losses caused by damage of the silicon wafers due to too fast steering are avoided.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of silicon wafer transmission, especially to a high-reliability silicon wafer transmission device. BACKGROUND

[0002] In the production process of silicon wafers, the silicon wafers need to be separated and loaded into baskets after being peeled off. In the loading process, the transmission device lifts the silicon wafers placed vertically in the material frame one by one and turns them to be horizontal, and then conveys them into the material basket. When the transmission device conveys the silicon wafers, the silicon wafers are first lifted to the highest point in the vertical direction, and then the vertical silicon wafers are directly blown to be horizontal by the blowing device, and then conveyed to the material basket in the horizontal direction and loaded. Since the silicon wafers are very thin and fragile, the fast turning speed may cause damage to the silicon wafers, and the reliability of the silicon wafer transmission needs to be improved. SUMMARY

[0003] In view of the above defects or deficiencies in the prior art, it is desirable to provide a high-reliability silicon wafer transmission device, which gradually turns the silicon wafers from a vertical state to a horizontal state during transmission, and uses a belt conveyor to avoid the problem of slipping during turning of the silicon wafers, effectively improving the reliability of the silicon wafer transmission and avoiding unnecessary losses caused by damage to the silicon wafers due to too fast turning.

[0004] The utility model provides a kind of high-reliability silicon wafer transmission device, including first conveyor belt and two parallel second conveyor belts;Flat conveying belt is installed on the first conveyor belt and second conveyor belt;The first conveyor belt is inclinedly arranged upwards along its transmission direction, and its transmission end stretches between the transmission starting end of the second conveyor belt;

[0005] Two second conveyor belts are provided with gradually changing arc-shaped supports, which support the top surface of the second conveyor belt from the bottom, causing the top surface of the second conveyor belt to gradually transition to horizontal along the arc;The top surface of the gradually changing arc-shaped support is composed of an arc-shaped support surface near the transmission starting end of the second conveyor belt and a horizontal support surface near the transmission end of the second conveyor belt.

[0006] Further, the transmission starting end of the first conveyor belt is provided with a transmission wheel, and the two sides of the transmission wheel are respectively provided with first supports, the transmission wheel is rotatably connected to the first supports by bearings, and one side of the transmission wheel is provided with a power device for driving its rotation.

[0007] Further, the two sides of the transmission wheel and the first conveyor belt are respectively provided with first baffles;The two sides of the second conveyor belt are respectively provided with second baffles, and the second baffles and the first baffles of the same side are connected end to end.

[0008] Compared with the prior art, the utility model has the following advantages:

[0009] (1) The transmission device is provided with the first conveying belt, the second conveying belt and the gradually changing arc-shaped support, in the process of silicon wafer transmission, the silicon wafer is first guided to tilt upwardly through the first conveying belt after being lifted vertically, then is guided to gradually turn to horizontal along the arc through the second conveying belt and is output, so that the silicon wafer is gradually turned from the vertical state to the horizontal state, unnecessary loss caused by damage of the silicon wafer due to too fast turning is avoided.

[0010] (2) The gradually changing arc-shaped support supports the two second conveying belts through the arc-shaped support surface and the horizontal support surface, avoids the problem that the silicon wafer which is broken accidentally falls down and is stuck between the two second conveying belts and affects the continuous transmission of the subsequent silicon wafer, the broken silicon wafer can also be transmitted along the second conveying belt under the support of the gradually changing arc-shaped support, the reliability of the silicon wafer transmission is improved. The gradually changing arc-shaped support has simple structure, and is convenient for assembling, replacing and maintaining.

[0011] (3) In order to reduce the abrasion of the silicon wafer, the conventional silicon wafer transmission device adopts the conveying belt composed of the circular cross-section belt to transmit. But in the process of turning of the silicon wafer, the silicon wafer is prone to slip, therefore, the application adopts the conveying belt composed of the flat conveying belt, increases the friction force under the condition of avoiding damage of the silicon wafer, improves the stability in the process of turning of the silicon wafer, and the turning process does not need to blow air to increase the friction force, so that the structure is simplified.

[0012] It should be understood that the content described in the utility model content part is not intended to limit the key or important features of the embodiments of the utility model, nor is it intended to limit the scope of the utility model. Other features of the utility model will become apparent through the following description. BRIEF DESCRIPTION OF DRAWINGS

[0013] Other features, objects and advantages of the utility model will become more apparent through reading the detailed description of the non-limiting embodiments made by referring to the following drawings:

[0014] Fig. 1 It is a structural schematic view of the high-reliability silicon wafer transmission device;

[0015] Fig. 2 It is a connection schematic view of the first conveying belt, the second conveying belt and the transmission wheel;

[0016] Fig. 3 It is a structural schematic view of the gradually changing arc-shaped support.

[0017] Marked number in the figure: 1, first conveying belt;2, second conveying belt;3, gradually changing arc-shaped support;4, transmission wheel;

[0018] 31, arc-shaped support surface;32, horizontal support surface;

[0019] 41 first support; 42 power device; 43 first baffle. DETAILED DESCRIPTION

[0020] The utility model will be described in further detail below in connection with the drawings and embodiments. It can be understood that the specific embodiments described herein are only used to explain the related utility model, and not to limit the utility model. In addition, it should be noted that only the parts related to the utility model are shown in the drawings for ease of description.

[0021] It should be noted that the embodiments in the utility model and the features in the embodiments can be combined with each other without conflict. The utility model will be described in detail below with reference to the drawings and in connection with the embodiments.

[0022] Please refer to Figs. 1-3 The embodiment of the utility model provides a kind of high reliability silicon wafer transmission device, including first conveyor belt 1 and two parallelly arranged second conveyor belt 2;Flat conveying belt is installed on first conveyor belt 1 and second conveyor belt 2;First conveyor belt 1 is inclinedly arranged upwards along its transmission direction, and its transmission end is stretched to between the transmission starting end of two second conveyor belt 2;

[0023] Two second conveyor belt 2 are provided with gradually changing arc-shaped support 3, for supporting the top surface of two second conveyor belt 2 from bottom, so that the top surface of second conveyor belt 2 gradually transitions to horizontal along arc;The top surface of gradually changing arc-shaped support 3 is composed of arc-shaped support surface 31 close to the transmission starting end of two second conveyor belt 2 and horizontal support surface 32 close to the transmission end of two second conveyor belt 2.

[0024] In this embodiment, in the process of silicon wafer transmission, it is first guided to tilt transmission upwards after being vertically lifted, then guided to gradually turn to horizontal along arc and output by second conveyor belt 2, so that silicon wafer gradually turns from vertical state to horizontal state, unnecessary loss caused by damage of silicon wafer due to too fast turning is avoided.

[0025] Gradually changing arc-shaped support 3 supports two second conveyor belt 2 through arc-shaped support surface 31 and horizontal support surface 32, avoids the problem that broken silicon wafer falls down and is stuck between two second conveyor belt 2, affecting the continuous transmission of subsequent silicon wafer, and improves the reliability of silicon wafer transmission. And gradually changing arc-shaped support structure is simple, and assembly and replacement are quick and convenient, easy to maintain.

[0026] The application adopts flat transmission belt to form conveying belt, increases friction force under the condition of avoiding damaging silicon wafer, improves the stability in the process of silicon wafer turning;And silicon wafer turning process does not need to blow air to increase friction force, simplifies the structure.

[0027] In a preferred embodiment, as shown in Fig. 1 and Fig. 2 shown, the first conveying belt 1 is provided with a transmission wheel 4 at the transmission starting end, the transmission wheel 4 is rotatably connected with the first support 41 at both sides of the transmission wheel 4 through bearings, and the transmission wheel 4 is provided with a power device 42 at one side to drive the rotation of the transmission wheel 4.

[0028] In the embodiment, a plurality of lifting wheels are arranged on the lower side of the front side of the transmission wheel 4 in the vertical plane, the silicon wafer is lifted and conveyed to the rear of the transmission wheel 4 after being attached to the lifting wheels, the transmission wheel 4 drives the silicon wafer to continue moving upward along the wheel surface of the transmission wheel 4, and then the silicon wafer enters the first conveying belt 1, and the transmission stability is good.

[0029] The length of the first conveying belt 1 is less than the length of the silicon wafer, one end of the silicon wafer enters the second conveying belt 2, and the other end is still on the transmission wheel 4, the first conveying belt 1 only plays a guiding role, and a single conveying belt structure can meet the requirements.

[0030] In a preferred embodiment, as shown in Fig. 1 and Fig. 2 shown, the transmission wheel 4 and the two sides of the first conveying belt 1 are respectively provided with first baffles 43; the two sides of the second conveying belt 2 are respectively provided with second baffles (not shown in the figure), the second baffles on the same side are connected in a head-to-tail manner with the first baffles 43; during the transmission of the silicon wafer, the second baffles and the first baffles 43 form limiting protection on both sides of the silicon wafer, and the safety of the transmission of the silicon wafer is ensured.

[0031] In the description of the present specification, the terms "connection", "installation", "fixation" and the like should be understood in a broad sense, for example, "connection" can be fixed connection, can also be detachable connection, or integrally connected; can be directly connected, or indirectly connected through an intermediate medium. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0032] In the description of the present specification, the terms "one embodiment", "some embodiments" and the like mean that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In the present specification, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0033] The above is only a preferred embodiment of the present application and is not intended to limit the present application. For those skilled in the art, the present application can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present application shall be included in the protection scope of the present application.

Claims

1. A high-reliability silicon wafer transport device, characterized by, It comprises a first conveyor belt (1) and two second conveyor belts (2) arranged in parallel; the first conveyor belt (1) and the second conveyor belts (2) are both provided with flat conveying belts; the first conveyor belt (1) is arranged upwardly along its conveying direction, and its conveying end extends to between the conveying starting ends of the two second conveyor belts (2); The two second conveyor belts (2) are provided with gradually-changing arc-shaped supports (3) for supporting the top surfaces of the two second conveyor belts (2) from the bottom, so that the top surfaces of the second conveyor belts (2) gradually change to horizontal along the arc; the top surfaces of the gradually-changing arc-shaped supports (3) are composed of arc-shaped supporting surfaces (31) close to the conveying starting ends of the two second conveyor belts (2) and horizontal supporting surfaces (32) close to the conveying ends of the two second conveyor belts (2).

2. The high-reliability silicon wafer transfer device of claim 1, wherein, The conveying starting end of the first conveyor belt (1) is provided with a conveying wheel (4), the two sides of the conveying wheel (4) are respectively provided with first supports (41), the conveying wheel (4) is rotatably connected with the first supports (41) through bearings, and one side of the conveying wheel (4) is provided with a power device (42) for driving the rotation of the conveying wheel (4).

3. The high-reliability silicon wafer transfer device of claim 2, wherein, The conveying wheel (4) and the two sides of the first conveyor belt (1) are respectively provided with first baffles (43); the two sides of the second conveyor belts (2) are respectively provided with second baffles, and the second baffles on the same side are connected with the first baffles (43) in a head-to-tail manner.

Images