Chip surface visual detection device capable of performing multi-angle detection

Abstract

The chip surface visual inspection device comprises a base, a mounting plate is fixed on the outer wall of the top of the base, and a transverse rotary clamping assembly and a longitudinal rotary clamping assembly are respectively mounted on the outer wall of one side of the mounting plate. A detection part for detecting the chip main body is mounted on the outer wall of the top of the base and comprises a visual detection camera and a vertical plate, and the vertical plate is fixed to the outer wall of the top of the base. According to the utility model, through cooperative work of the transverse rotary clamping assembly and the longitudinal rotary clamping assembly, all-directional visual detection of each surface of a chip main body is realized, and the longitudinal rotary clamping assembly can clamp the upper and lower surfaces of the chip and drive the chip to rotate, so that the visual detection camera detects the side surface of the chip; the transverse rotation clamping assembly can clamp the side face of the chip and drive the chip to rotate so as to complete detection of the upper face and the lower face of the chip, and the multi-angle and multi-direction detection mode is adopted.

Description

Technical Field

[0001] This utility model relates to the field of chip surface visual inspection technology, and in particular to a chip surface visual inspection device capable of multi-angle inspection. Background Technology

[0002] In the semiconductor manufacturing and electronic component production process, the surface quality inspection of chips is a key link to ensure product reliability and performance. Traditional chip inspection methods mainly rely on manual visual inspection or automated optical inspection from a single angle, which has problems such as low efficiency, high missed detection rate and poor consistency. With the increase in chip integration and the advancement of packaging technology, the size of chips is getting smaller and smaller and the surface structure is more complex. Traditional inspection methods can no longer meet the inspection requirements of high precision and full surface coverage.

[0003] In recent years, machine vision technology has been widely used in the field of industrial inspection. By combining high-resolution cameras with image processing algorithms, non-contact and high-precision defect identification can be achieved. However, existing vision inspection systems are usually only optimized for a fixed viewpoint of the chip and lack flexible clamping and rotation mechanisms, making it difficult to achieve no dead angle inspection of the entire surface of the chip (including the top and bottom end faces and the four sides), which reduces inspection efficiency.

[0004] Therefore, there is an urgent need for a visual inspection device that integrates multi-degree-of-freedom clamping and rotation functions, which can ensure inspection without blind spots, improve inspection efficiency, and complete all-round inspection in conjunction with a high-precision camera. Utility Model Content

[0005] The purpose of this invention is to address the shortcomings of existing technologies by proposing a multi-angle visual inspection device for chip surfaces.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] A chip surface visual inspection device capable of multi-angle inspection includes a base, a mounting plate fixed to the top outer wall of the base, and a horizontal rotation clamping assembly and a vertical rotation clamping assembly respectively mounted on one side outer wall of the mounting plate. A detection part for inspecting the chip body is installed on the top outer wall of the base. The detection part includes a visual inspection camera and a standing plate. The standing plate is fixed to the top outer wall of the base, and the visual inspection camera is fixed to one side inner wall of the standing plate.

[0008] As a further embodiment of this utility model: the transverse rotation clamping assembly includes an electric telescopic rod 2 and a connecting plate 4. The connecting plate 4 is fixed to the outer wall of one side of the mounting plate, and the electric telescopic rod 2 is fixed to the outer wall of one side of the connecting plate 4. A pressure sensor 1 is fixed to the output end of the electric telescopic rod 2, and a clamping plate 1 is movably connected to the outer wall of one side of the pressure sensor 1.

[0009] As a further embodiment of this utility model: the transverse rotation clamping assembly further includes a connecting plate three and an electric telescopic rod four. The connecting plate three is fixed to the outer wall of one side of the mounting plate, and the electric telescopic rod four is fixed to the outer wall of one side of the connecting plate three.

[0010] As a further embodiment of this utility model: the four output ends of the electric telescopic rod are fixed with a bracket 1 by pins, and a rotary motor 1 is fixed on the inner wall of one side of the bracket 1, and the output end of the rotary motor 1 is fixed with a clamping plate 2 by a coupling.

[0011] As a further embodiment of this utility model: the longitudinal rotation clamping assembly includes a connecting plate and an electric telescopic rod. The connecting plate is fixed to the outer wall of one side of the mounting plate, and the electric telescopic rod is fixed to the top outer wall of the connecting plate. A pressure sensor is fixed to the output end of the electric telescopic rod, and a clamping plate is movably connected to the bottom of the pressure sensor.

[0012] As a further embodiment of this utility model: the longitudinal rotation clamping assembly further includes an electric telescopic rod three and a connecting plate two, the connecting plate two being fixed to the outer wall of one side of the mounting plate, and the electric telescopic rod three being fixed to the bottom outer wall of the connecting plate two.

[0013] As a further embodiment of this utility model: the output end of the electric telescopic rod is fixed to the bracket two by a pin, and the top inner wall of the bracket two is fixed to the rotary motor two, and the output end of the rotary motor two is connected to the clamping plate four by a coupling.

[0014] As a further improvement of this utility model, a control panel is fixed to one side of the outer wall of the upright plate.

[0015] Compared with the prior art, this utility model provides a chip surface visual inspection device that can perform multi-angle inspection, and has the following beneficial effects:

[0016] 1. By working in concert with the horizontal and vertical rotating clamping components, omnidirectional visual inspection of all sides of the chip is achieved. The vertical rotating clamping component can clamp the top and bottom sides of the chip and drive them to rotate, allowing the visual inspection camera to inspect the sides of the chip. The horizontal rotating clamping component can clamp the sides of the chip and drive them to rotate, thus completing the inspection of the top and bottom sides of the chip. This multi-angle and multi-directional inspection method ensures that defects and flaws in all areas of the chip surface can be accurately captured, effectively avoiding missed detections and greatly improving the comprehensiveness and accuracy of product inspection.

[0017] 2. During the clamping process, the pressure sensor 1 of the horizontal rotation clamping assembly and the pressure sensor 2 of the vertical rotation clamping assembly can monitor the clamping force data in real time and transmit the data to the control panel. When the clamping pressure exceeds the preset safety value, the control panel will automatically trigger the horizontal rotation clamping assembly and the vertical rotation clamping assembly to stop moving, preventing the chip body from being damaged due to excessive clamping pressure. This real-time pressure monitoring and safety protection mechanism effectively reduces the risk of chip scrapping due to mechanical damage during the testing process, reduces production costs, and improves production efficiency.

[0018] The parts of the device not covered herein are the same as or can be implemented using existing technologies. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the overall structure of a chip surface visual inspection device capable of multi-angle inspection proposed in this utility model.

[0020] Figure 2 This is a side view structural diagram of a chip surface visual inspection device capable of multi-angle inspection proposed in this utility model;

[0021] Figure 3 This is a schematic diagram of the transverse rotation clamping assembly structure of a chip surface visual inspection device capable of multi-angle inspection proposed in this utility model.

[0022] Figure 4 This is a schematic diagram of the longitudinal rotation clamping component structure of a chip surface visual inspection device capable of multi-angle inspection proposed in this utility model.

[0023] In the diagram: 1. Base; 2. Mounting plate; 3. Connecting plate 1; 4. Electric telescopic rod 1; 5. Electric telescopic rod 2; 6. Vision inspection camera; 7. Control panel; 8. Vertical plate; 9. Electric telescopic rod 3; 10. Connecting plate 2; 11. Clamping plate 1; 12. Chip body; 13. Clamping plate 2; 14. Pressure sensor 1; 15. Connecting plate 3; 16. Rotary motor 1; 17. Bracket 1; 18. Connecting plate 4; 19. Pressure sensor 2; 20. Clamping plate 3; 21. Rotary motor 2; 22. Bracket 2; 23. Clamping plate 4; 24. Electric telescopic rod 4. Detailed Implementation

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0025] In the description of this utility model, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0026] A multi-angle visual inspection device for chip surfaces, to ensure inspection efficiency, such as... Figures 1 to 4 As shown, the device includes a base 1, with a mounting plate 2 fixed to the top outer wall of the base 1 by bolts. A transverse rotation clamping assembly and a longitudinal rotation clamping assembly are respectively installed on one side outer wall of the mounting plate 2. A detection unit for detecting the chip body 12 is installed on the top outer wall of the base 1. The detection unit includes a visual inspection camera 6 and a vertical plate 8. The vertical plate 8 is fixed to the top outer wall of the base 1 by bolts, and the visual inspection camera 6 is fixed to the inner wall of one side of the vertical plate 8.

[0027] When it is necessary to inspect the chip body 12, the chip body 12 is first clamped and fixed on its upper and lower sides using the longitudinal rotation clamping assembly. Then, the clamped chip body 12 is driven to rotate using the longitudinal rotation clamping assembly. During the rotation of the chip body 12, the side of the chip body 12 is visually inspected using the vision inspection camera 6.

[0028] When it is necessary to inspect the top and bottom surfaces of the chip body 12, the longitudinal rotation clamping assembly releases the clamping and fixing of the chip body 12, and the transverse rotation clamping assembly clamps and fixing two sides of the chip body 12 before driving the chip body 12 to rotate. During the rotation of the chip body 12, the vision inspection camera 6 can perform visual inspection on the top and bottom surfaces of the chip body 12, thereby ensuring that each surface of the chip body 12 can be visually inspected by the vision inspection camera 6.

[0029] The working principle of the visual inspection camera 6 is to use an industrial camera to acquire images of the target object, convert the light signal into a digital electrical signal through an image sensor, and then transmit it to a computer via an image acquisition card. The computer uses image processing algorithms such as filtering and noise reduction, edge detection, and morphological operations to preprocess the image to highlight key features. Then, based on preset detection rules such as size thresholds, shape templates, color ranges, etc., or machine learning / deep learning models trained on a large number of labeled samples, it automatically extracts and learns the target features. It extracts, analyzes, and compares the features of the target object in the image, such as size, shape, position, defects, and color. Finally, it compares the analysis results with the standard requirements to determine whether the target object is qualified and outputs the inspection conclusion. Visual inspection is an existing technology and will not be described in more detail here.

[0030] The transverse rotation clamping assembly includes an electric telescopic rod 25 and a connecting plate 4 18. The connecting plate 4 18 is fixed to the outer wall of one side of the mounting plate 2 by bolts, and the electric telescopic rod 25 is fixed to the outer wall of one side of the connecting plate 4 18 by bolts. The output end of the electric telescopic rod 25 is fixed with a pressure sensor 14 by screws, and a clamping plate 11 is rotatably connected to the outer wall of one side of the pressure sensor 14. The transverse rotation clamping assembly also includes a connecting plate 3 15 and an electric telescopic rod 4 24. The connecting plate 3 15 is fixed to the outer wall of one side of the mounting plate 2 by bolts, and the electric telescopic rod 4 24 is fixed to the outer wall of one side of the connecting plate 3 15 by bolts. The output end of the electric telescopic rod 4 24 is fixed with a bracket 17 by pins, and a rotary motor 16 is fixed to the inner wall of one side of the bracket 17 by bolts. The output end of the rotary motor 16 is fixed with a clamping plate 2 13 by a coupling.

[0031] When it is necessary to clamp and fix the side of the chip body 12, the electric telescopic rod 25 is used to drive the clamping plate 11 and the pressure sensor 14 to move laterally a certain distance. Then, the output end of the electric telescopic rod 25 stops moving, and one side of the chip body 12 is pressed against the clamping plate 11. The electric telescopic rod 424 is used to drive the clamping plate 23 to move laterally and gradually fit the other side of the chip body 12. When the clamping plate 23 and the clamping plate 11 are clamping the side of the chip body 12, the pressure sensor 14 is used to monitor the clamping pressure. When the pressure sensor 14 detects that the pressure value reaches the set value, the output end of the electric telescopic rod 424 stops moving, thereby ensuring that the chip body 12 is clamped while avoiding excessive clamping pressure that could damage the chip body 12. The rotary motor 16 can drive the clamped chip body 12 to rotate, so that the visual inspection camera 6 can perform visual inspection on the chip body 12.

[0032] The longitudinal rotation clamping assembly includes a connecting plate 3 and an electric telescopic rod 4. The connecting plate 3 is fixed to the outer wall of one side of the mounting plate 2 by bolts, and the electric telescopic rod 4 is fixed to the top outer wall of the connecting plate 3 by bolts. A pressure sensor 19 is fixed to the output end of the electric telescopic rod 4 by screws, and a clamping plate 20 is rotatably connected to the bottom of the pressure sensor 19. The longitudinal rotation clamping assembly also includes an electric telescopic rod 9 and a connecting plate 10. The connecting plate 10 is fixed to the outer wall of one side of the mounting plate 2 by bolts, and the electric telescopic rod 9 is fixed to the bottom outer wall of the connecting plate 10 by bolts. A bracket 22 is fixed to the output end of the electric telescopic rod 9 by pins, and a rotary motor 21 is fixed to the top inner wall of the bracket 22 by bolts. A clamping plate 23 is connected to the output end of the rotary motor 21 by a coupling.

[0033] When it is necessary to clamp and fix the upper and lower sides of the chip body 12, the electric telescopic rod 39 first drives the clamping plate 423 to move upward a certain distance, and then the chip body 12 is placed on the clamping plate 423. The electric telescopic rod 14 drives the clamping plate 320 to move downward so that the clamping plate 320 cooperates with the clamping plate 423 to clamp and fix the upper and lower sides of the chip body 12. The pressure sensor 219 monitors the clamping force to ensure the safety of the chip body 12. The rotary motor 21 can drive the clamped chip body 12 to rotate, so that the vision inspection camera 6 can perform visual inspection on the chip body 12.

[0034] The control panel 7 is fixed to one outer wall of the upright plate 8 by bolts.

[0035] The control panel 7 can drive the horizontal and vertical rotating clamping components, and simultaneously control the first rotating motor 16 and the second rotating motor 21 to achieve multi-angle rotation detection of the chip body 12. The first pressure sensor 14 and the second pressure sensor 19 transmit the clamping force data to the control panel in real time. When the pressure exceeds the preset safety value, the horizontal and vertical rotating clamping components are automatically triggered to stop. At the same time, the control panel 7 can control the vision inspection camera 6 to perform visual inspection on the chip body 12, and display the pass / fail judgment result of the chip body 12 through the interface of the control panel 7.

[0036] Working principle: When it is necessary to inspect the chip body 12, the chip body 12 is first clamped and fixed on its upper and lower sides using the longitudinal rotation clamping assembly. Then, the longitudinal rotation clamping assembly drives the clamped chip body 12 to rotate. During the rotation of the chip body 12, the visual inspection camera 6 performs visual inspection on the side of the chip body 12.

[0037] When it is necessary to inspect the top and bottom surfaces of the chip body 12, the longitudinal rotation clamping assembly releases its clamping and fixing of the chip body 12. The transverse rotation clamping assembly then clamps and fixes two sides of the chip body 12 before driving the chip body 12 to rotate. During the rotation of the chip body 12, the visual inspection camera 6 can perform visual inspection on the top and bottom surfaces of the chip body 12, thereby ensuring that each surface of the chip body 12 can be visually inspected by the visual inspection camera 6. The visual inspection camera 6 also acquires images of the top and bottom surfaces of the chip body 12. The light signal is converted into a digital electrical signal by the image sensor and then transmitted to the computer via the image acquisition card. The computer preprocesses the image using image processing algorithms and extracts, analyzes, and compares the features of the top and bottom surfaces of the chip body 12 in the image based on preset detection rules or machine learning and deep learning models. Finally, the analysis results are compared with the standard requirements to determine whether the top and bottom surfaces of the chip body 12 are qualified and output the inspection conclusion. The control panel 7, which is fixed to one side of the outer wall of the upright plate 8 by bolts, can control and monitor the entire inspection process.

[0038] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A multi-angle detectable chip surface visual detection device, comprising a base (1), characterized in that, The bottom (1) top outer wall is fixed with mounting plate (2), and the mounting plate (2) one side outer wall is respectively provided with transverse rotary clamping assembly and longitudinal rotary clamping assembly, and the bottom (1) top outer wall is provided with detection part for detecting chip main body (12), and the detection part includes visual detection camera (6) and stand plate (8), the stand plate (8) is fixed to the top outer wall of the base (1), and the visual detection camera (6) is fixed to the inner wall of the stand plate (8) one side.

2. The chip surface visual inspection device capable of multi-angle detection according to claim 1, wherein, The transverse rotary clamping assembly includes electric telescopic rod two (5) and connecting plate four (18), the connecting plate four (18) is fixed to the outer wall of the mounting plate (2) one side, and the electric telescopic rod two (5) is fixed to the outer wall of the connecting plate four (18) one side, and the electric telescopic rod two (5) output end is fixed with pressure sensor one (14), and the pressure sensor one (14) one side outer wall is movably connected with clamping plate one (11). 3.The multi-angle chip surface vision inspection device according to claim 2, wherein, The transverse rotary clamping assembly further includes connecting plate three (15) and electric telescopic rod four (24), the connecting plate three (15) is fixed to the outer wall of the mounting plate (2) one side, and the electric telescopic rod four (24) is fixed to the outer wall of the connecting plate three (15) one side.

4. The chip surface vision inspection device capable of multi-angle detection according to claim 3, characterized in that, The electric telescopic rod four (24) output end is fixed with bracket one (17) through pin, and the bracket one (17) one side inner wall is fixed with rotary motor one (16), and the rotary motor one (16) output end is fixed with clamping plate two (13) through shaft coupling.

5. The multi-angle chip surface vision inspection device according to claim 1, wherein, The longitudinal rotary clamping assembly includes connecting plate one (3) and electric telescopic rod one (4), the connecting plate one (3) is fixed to the outer wall of the mounting plate (2) one side, and the electric telescopic rod one (4) is fixed to the outer wall of the connecting plate one (3) top, the electric telescopic rod one (4) output end is fixed with pressure sensor two (19), and the pressure sensor two (19) bottom is movably connected with clamping plate three (20).

6. The multi-angle chip surface vision inspection device according to claim 5, wherein, The longitudinal rotary clamping assembly further includes electric telescopic rod three (9) and connecting plate two (10), the connecting plate two (10) is fixed to the outer wall of the mounting plate (2) one side, and the electric telescopic rod three (9) is fixed to the outer wall of the connecting plate two (10) bottom.

7. The multi-angle chip surface vision inspection device according to claim 6, wherein, The electric telescopic rod three (9) output end is fixed with bracket two (22) through pin, and the bracket two (22) top inner wall is fixed with rotary motor two (21), and the rotary motor two (21) output end is connected with clamping plate four (23) through shaft coupling. 8.The multi-angle chip surface vision inspection device according to claim 1, wherein, The stand plate (8) one side outer wall is fixed with control panel (7).

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