Tetraalkylammonium hydroxide recovery device

Abstract

The utility model discloses a kind of tetraalkyl ammonium hydroxide recovery devices, it is related to tetraalkyl ammonium hydroxide recovery technical field, and wherein, tetraalkyl ammonium hydroxide recovery device includes adsorption unit and desorption unit, adsorption unit includes adsorption device, adsorption cavity of adsorption device is filled with adsorbent, liquid inlet line is used to introduce waste water and / or regenerating medium, liquid outlet line is used to discharge reclaimed water and / or tetraalkyl ammonium hydroxide solution, desorption unit includes desorption reagent line and / or desorption device;By adsorbent directly absorbing tetraalkyl ammonium hydroxide in waste water, the complexity of processing is reduced, the consumption of reagent is reduced, can be realized by desorption reagent or desorption device tetraalkyl ammonium hydroxide desorption, and the regeneration of adsorbent is realized, and after desorption, pure tetraalkyl ammonium hydroxide can be used for developing again by adjusting concentration and discharging reclaimed water, while realizing waste water purification, resource recovery and cost control.

Description

Technical Field

[0001] This utility model relates to the field of tetraalkylammonium hydroxide recovery technology, and in particular to a tetraalkylammonium hydroxide recovery device. Background Technology

[0002] Tetraalkylammonium hydroxide is an indispensable key chemical in the semiconductor and electronics industry. Its application spans multiple stages such as chip manufacturing, packaging, and testing. In particular, it is a core developer in the photolithography process, and its role is irreplaceable.

[0003] However, this process generates tetraalkylammonium hydroxide wastewater due to water washing. This wastewater also includes trace amounts of tetraalkylammonium hydroxide obtained after diluting the developer with a large amount of water, or wastewater containing trace amounts of tetraalkylammonium hydroxide after dilution and membrane filtration. Tetraalkylammonium hydroxide has a stable molecular structure, and conventional biological treatment methods (such as activated sludge processes) are extremely inefficient. Existing processes require a multi-step combined treatment process of "neutralization—oxidation—adsorption—membrane separation." For example, although the neutralization reaction can adjust the pH, the generated substances, such as TMA-Cl (tetramethylammonium salt), are still toxic and difficult to biodegrade, requiring further oxidation or adsorption treatment. This results in high reagent consumption, high energy consumption, and long cycles. Furthermore, traditional processes only aim to achieve wastewater discharge standards, failing to achieve efficient recovery of tetraalkylammonium hydroxide, leading to the waste of expensive chemicals. Utility Model Content

[0004] The main purpose of this invention is to propose a tetraalkylammonium hydroxide recovery device, which aims to make the recovery of tetraalkylammonium hydroxide more economical and environmentally friendly.

[0005] To achieve the above objectives, the tetraalkylammonium hydroxide recovery device proposed in this utility model includes:

[0006] Adsorption unit and desorption unit;

[0007] The adsorption unit includes an adsorption device, which has an adsorption chamber filled with an adsorbent.

[0008] The adsorption chamber is connected to an inlet pipe and an outlet pipe. The inlet pipe is used to introduce wastewater and / or regeneration medium, and the outlet pipe is used to discharge greywater and / or tetraalkylammonium hydroxide solution.

[0009] The desorption unit is located on the periphery of the adsorption chamber, and the desorption unit includes a desorption reagent pipeline and / or a desorption device for the regeneration of tetraalkylammonium hydroxide;

[0010] The reagent pipeline is used to introduce reagents into the adsorption chamber for desorption.

[0011] The desorption device establishes a physical field in the adsorption chamber to perform desorption.

[0012] In one embodiment, the desorption device is disposed on the periphery of the adsorption cavity, and the desorption device is a microwave device, an electric field device, an ultrasonic device, or a heating device.

[0013] In one embodiment, the electric field device includes a positive electrode plate and a negative electrode plate, which are respectively disposed on opposite sides of the adsorption cavity to establish an electric field within the adsorption cavity.

[0014] In one embodiment, the liquid inlet pipeline includes a first liquid inlet pipe, a second liquid inlet pipe, and a first three-way valve. The first three-way valve includes two inlet ends and one outlet end. The two inlet ends of the first three-way valve are respectively connected to the first liquid inlet pipe and the second liquid inlet pipe, and the outlet end of the first three-way valve is connected to the adsorption chamber.

[0015] The first inlet pipe is used to introduce wastewater, and the second inlet pipe is used to introduce regeneration medium.

[0016] In one embodiment, the liquid outlet pipeline includes a first liquid outlet pipe and a second liquid outlet pipe, as well as a second three-way valve. The second three-way valve includes two outlet ends and one inlet end. The two outlet ends of the second three-way valve are respectively connected to the first liquid outlet pipe and the second liquid outlet pipe, and the inlet end of the second three-way valve is connected to the adsorption chamber.

[0017] The first outlet pipe is used to discharge the recycled water, and the second outlet pipe is used to discharge the enriched liquid.

[0018] In one embodiment, the adsorption cavity is provided with multiple sets of ion exchange membranes arranged in the direction of the electric field, and the adsorption cavity is divided into multiple alternating and cyclically arranged first chambers and second chambers by the multiple sets of ion exchange membranes in the direction of the electric field.

[0019] In this configuration, the anion exchange membrane and cation exchange membrane of one set of ion exchange membranes together form the first chamber, and the anion exchange membrane and cation exchange membrane of two adjacent sets of ion exchange membranes together form the second chamber, and the first chamber is filled with the adsorbent.

[0020] In one embodiment, the liquid inlet pipeline includes a first liquid inlet pipe and a second liquid inlet pipe, both of which are directly connected to the adsorption chamber. The first liquid inlet pipe is used to introduce wastewater, and the second liquid inlet pipe is used to introduce water or tetraalkylammonium hydroxide solution.

[0021] The liquid outlet pipeline includes a first liquid outlet pipe and a second liquid outlet pipe, both of which are directly connected to the adsorption chamber. The first liquid outlet pipe is used to discharge greywater, and the second liquid outlet pipe is used to discharge tetraalkylammonium hydroxide solution.

[0022] The first inlet pipe and the first outlet pipe are both connected to the first chamber, and the second inlet pipe and the second outlet pipe are both connected to the second chamber.

[0023] In one embodiment, the other end of the second outlet pipe relative to the second chamber is connected to a storage tank, which is used to collect the liquid discharged from the second chamber. The storage tank is connected to the second inlet pipe, and the liquid is pumped back into the adsorption chamber for circulation.

[0024] In one embodiment, the adsorbent is a natural adsorbent or an artificial adsorbent.

[0025] In one embodiment, the outlet pipeline is equipped with a concentration detection device for detecting the concentration of tetraalkylammonium hydroxide;

[0026] The liquid inlet pipeline is equipped with a flow rate detection device to detect the liquid flow rate.

[0027] The technical solution of this utility model directly absorbs tetraalkylammonium hydroxide in wastewater through the adsorbent filled in the adsorption chamber, reducing the complexity of the treatment and the consumption of reagents. After adsorption is completed, the tetraalkylammonium hydroxide can be desorbed by the desorption reagent or the desorption device, and the adsorbent can be regenerated. The pure tetraalkylammonium hydroxide obtained after desorption can be reused for development by adjusting the concentration. Through recycling, the raw material cost is reduced, and the discharged water is treated wastewater that meets the reuse standard. At the same time, wastewater purification, resource recovery and cost control are achieved. Attached Figure Description

[0028] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the structures shown in these drawings without creative effort.

[0029] Figure 1 A schematic diagram of an embodiment of the tetraalkylammonium hydroxide recovery device provided by this utility model;

[0030] Figure 2 A schematic diagram of another embodiment of the tetraalkylammonium hydroxide recovery device provided by this utility model;

[0031] Figure 3 A schematic diagram of another embodiment of the tetraalkylammonium hydroxide recovery device provided by this utility model;

[0032] Figure 4 This is a schematic diagram of another embodiment of the tetraalkylammonium hydroxide recovery device provided by this utility model.

[0033] Explanation of icon numbers:

[0034] 100. Tetraalkylammonium hydroxide recovery device; 1. Adsorption device; 11. Adsorption chamber; 12. Liquid inlet pipe; 121. First liquid inlet pipe; 122. Second liquid inlet pipe; 13. Liquid outlet pipe; 131. First liquid outlet pipe; 132. Second liquid outlet pipe; 14. Ion exchange membrane; 141. First chamber; 143. Anion exchange membrane; 144. Cation exchange membrane; 142. Second chamber; 2. Desorption device; 21. Positive electrode plate; 22. Negative electrode plate; 23. Microwave device.

[0035] The realization of the purpose, functional features and advantages of this utility model will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Detailed Implementation

[0036] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present utility model.

[0037] It should be noted that if the embodiments of this utility model involve directional indicators (such as up, down, left, right, front, back, etc.), the directional indicators are only used to explain the relative positional relationship and movement of the components in a specific posture. If the specific posture changes, the directional indicators will also change accordingly.

[0038] Furthermore, if the embodiments of this utility model involve descriptions such as "first" or "second," these descriptions are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined with "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the use of "and / or" or "and / or" throughout the text includes three parallel solutions. For example, "A and / or B" includes solution A, solution B, or a solution where both A and B are satisfied simultaneously. Furthermore, the technical solutions of the various embodiments can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. When the combination of technical solutions is contradictory or impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed by this utility model.

[0039] Tetraalkylammonium hydroxide is an indispensable key chemical in the semiconductor and electronics industry. Its application spans multiple stages such as chip manufacturing, packaging, and testing. In particular, it is a core developer in the photolithography process, and its role is irreplaceable.

[0040] However, this process generates tetraalkylammonium hydroxide wastewater due to water washing. This wastewater also includes trace amounts of tetraalkylammonium hydroxide obtained after diluting the developer with a large amount of water, or wastewater containing trace amounts of tetraalkylammonium hydroxide after dilution and membrane filtration. Tetraalkylammonium hydroxide has a stable molecular structure, and conventional biological treatment methods (such as activated sludge processes) are extremely inefficient. Existing processes require a multi-step combined treatment process of "neutralization—oxidation—adsorption—membrane separation." For example, although the neutralization reaction can adjust the pH, the generated substances, such as TMA-Cl (tetramethylammonium salt), are still toxic and difficult to biodegrade, requiring further oxidation or adsorption treatment. This results in high reagent consumption, high energy consumption, and long cycles. Furthermore, traditional processes only aim to achieve wastewater discharge standards, failing to achieve efficient recovery of tetraalkylammonium hydroxide, leading to the waste of expensive chemicals.

[0041] This utility model proposes a tetraalkylammonium hydroxide recovery device 100.

[0042] Please see Figures 1 to 4 In one embodiment of this utility model, the tetraalkylammonium hydroxide recovery device 100 includes:

[0043] Adsorption unit and desorption unit;

[0044] The adsorption unit includes an adsorption device 1, which has an adsorption chamber 11 filled with an adsorbent.

[0045] The adsorption chamber 11 is connected to an inlet pipe 12 and an outlet pipe 13. The inlet pipe 12 is used to introduce wastewater and / or regeneration medium, and the outlet pipe 13 is used to discharge greywater and / or tetraalkylammonium hydroxide solution.

[0046] The desorption unit is located around the adsorption chamber 11. The desorption unit includes a desorption reagent pipeline and / or a desorption device 2 for the regeneration of tetraalkylammonium hydroxide.

[0047] The reagent pipeline is used to introduce reagent into the adsorption chamber 11 for desorption;

[0048] The desorption device 2 establishes a physical field in the adsorption chamber 11 to perform desorption.

[0049] It should be noted that the adsorbent can be a natural adsorbent or a synthetic adsorbent, such as natural adsorbents like activated carbon, chitosan, and calcite, or synthetic adsorbents like COFs (covalent organic frameworks), MOFs (metal-organic frameworks), and graphene.

[0050] The adsorbent is preferably an ion exchange resin.

[0051] It should be noted that the desorption agents include common acids or common bases, such as hydrochloric acid and sulfuric acid, and common bases such as sodium hydroxide and potassium hydroxide.

[0052] In some embodiments, desorption is performed using a reagent regeneration method, wherein the desorption reagent enters the adsorption chamber 11 through the desorption reagent pipeline, the desorption reagent pipeline is connected to the adsorption chamber 11, and the desorption reagent is pumped into the adsorption chamber 11.

[0053] The technical solution of this utility model uses the adsorbent filled in the adsorption chamber 11 to directly absorb tetraalkylammonium hydroxide in wastewater, reducing the complexity of treatment and reducing the consumption of reagents. After adsorption is completed, the tetraalkylammonium hydroxide can be desorbed by the desorption reagent or the desorption device 2, and the adsorbent can be regenerated. The pure tetraalkylammonium hydroxide obtained after desorption can be reused for development by adjusting the concentration. Through recycling, the raw material cost is reduced, and the discharged water is treated wastewater that meets the reuse standard. At the same time, wastewater purification, resource recovery and cost control are achieved.

[0054] Optionally, the desorption device 2 is disposed around the adsorption cavity 11, and the desorption device 2 is a microwave device 23, an electric field device, an ultrasonic device, or a heating device.

[0055] It should be noted that, taking an electric field device as an example, such as Figure 3 As shown, in one embodiment, the direction of the electric field formed by the arrangement of the electric field device is perpendicular to the direction of liquid inflow and outflow; in another embodiment, the direction of the electric field formed by the arrangement of the electric field device is parallel to the direction of liquid inflow and outflow.

[0056] It should be noted that, in addition to using acid / alkali reagents, desorption can also be achieved through physical fields such as electric fields, ultrasound, microwaves, and temperature changes to achieve regeneration.

[0057] It is understood that by applying a physical field (such as microwave thermal effect, high-frequency electric field polarization, cavitation effect, or temperature-controlled desorption) from the periphery of the adsorption cavity 11 through a microwave device 23, an electric field device, an ultrasonic device, or a heating device, the bonding bond between the adsorbent and tetraalkylammonium hydroxide can be directionally broken without the introduction of liquid regeneration agents, thereby increasing the desorption rate.

[0058] Optionally, the desorption device 2 can be any one of the microwave device 23, the electric field device, the ultrasonic device, or the heating device, all of which can achieve desorption and regeneration, wherein the electric field device is preferred.

[0059] Specifically, the electric field device includes a positive electrode plate 21 and a negative electrode plate 22, which are respectively disposed on opposite sides of the adsorption cavity 11 to establish an electric field in the adsorption cavity 11.

[0060] like Figure 3 As shown, it should be noted that by placing the positive electrode plate 21 and the negative electrode plate 22 on opposite sides of the adsorption chamber 11, an electric field is established within the adsorption chamber 11. After the electric field is established, the water on the surface of the adsorbent will dissociate into hydroxide ions and hydrogen ions due to polarization and other reasons. The hydrogen ions can desorb the TMA ions (tetramethylammonium ions) in the adsorbent, thereby regenerating the adsorbent. Under the action of the electric field, the desorbed TMA ions migrate towards the negative electrode plate 22 and into the second chamber 142. Meanwhile, the hydroxide ions generated by the hydrolysis of the first chamber 141, which is adjacent to the second chamber 142, migrate towards the anode plate 21 and into the second chamber 142. The two combine in the second chamber 142 to obtain tetraalkylammonium hydroxide.

[0061] Optionally, the liquid inlet pipe 12 includes a first liquid inlet pipe 121, a second liquid inlet pipe 122, and a first three-way valve. The first three-way valve includes two inlet ends and one outlet end. The two inlet ends of the first three-way valve are respectively connected to the first liquid inlet pipe 121 and the second liquid inlet pipe 122, and the outlet end of the first three-way valve is connected to the adsorption chamber 11.

[0062] The first inlet pipe 121 is used to introduce wastewater, and the second inlet pipe 122 is used to introduce regeneration medium.

[0063] It should be noted that since different liquids need to be injected during adsorption and desorption, the dual-inlet design of the first liquid inlet pipe 121 and the second liquid inlet pipe, which is integrated by the first three-way valve and the electromagnetic drive valve core, can achieve rapid switching between adsorption and regeneration processes.

[0064] like Figure 1 As shown, in one embodiment, the second inlet pipe 122 is used to introduce hot water at a temperature of 40° to 80°. During adsorption, the first inlet pipe 121 is connected to the outlet end, and wastewater enters the adsorption chamber 11 through the first inlet pipe 121. At this time, the wastewater is discharged from the outlet pipe 13.

[0065] After adsorption is complete, switch the first three-way valve to connect the second liquid inlet pipe 122 to the outlet end, and hot water enters the adsorption chamber 11 for desorption and regeneration. At this time, tetraalkylammonium hydroxide solution is discharged from the liquid outlet pipe 13.

[0066] In other embodiments, the second inlet pipe 122 is used to introduce water. During adsorption, the first inlet pipe 121 is connected to the outlet end, and wastewater enters the adsorption chamber 11 through the first inlet pipe 121. At this time, the wastewater is discharged from the outlet pipe 13.

[0067] After adsorption is complete, switch the first three-way valve to connect the second inlet pipe 122 to the outlet end, and water enters the adsorption chamber 11. Start the desorption device 2 for desorption and regeneration, and at this time, tetraalkylammonium hydroxide solution is discharged from the outlet pipe.

[0068] Furthermore, the first three-way valve is equipped with a flow rate detection device to detect the liquid flow rate, and the adsorption chamber 11 is equipped with a concentration detection device to detect the concentration of tetraalkylammonium hydroxide. During desorption, by detecting the concentration, when the concentration reaches a preset value, the first three-way valve is switched to re-discharge wastewater for adsorption.

[0069] Optionally, the liquid outlet pipeline 13 includes a first liquid outlet pipe 131 and a second liquid outlet pipe 132, as well as a second three-way valve. The second three-way valve includes two outlet ends and one inlet end. The two outlet ends of the second three-way valve are respectively connected to the first liquid outlet pipe 131 and the second liquid outlet pipe 132, and the inlet end of the second three-way valve is connected to the adsorption chamber 11.

[0070] The first outlet pipe 131 is used to discharge the water, and the second outlet pipe 132 is used to discharge the enriched liquid.

[0071] It should be noted that, since the discharged liquids are different during adsorption and desorption, the dual-outlet design of the first liquid outlet pipe 131 and the second liquid outlet pipe, which is integrated by the second three-way valve and combined with the electromagnetic drive valve core, can achieve rapid switching between adsorption and regeneration processes.

[0072] During the adsorption stage, the adsorption chamber 11 discharges water, while during the desorption stage, the adsorption chamber 11 discharges a high-concentration tetraalkylammonium hydroxide enrichment solution.

[0073] It should be noted that, through the switching function of the second three-way valve, the qualified treated water is directly discharged through the first outlet pipe 131 during the adsorption stage, while the regenerated liquid enriched with tetraalkylammonium hydroxide is directionally discharged through the second outlet pipe 132 during the desorption stage, thereby achieving physical isolation between the treated water and the enriched liquid, avoiding the cross-contamination problem caused by the traditional single-pipe alternating discharge, improving the purity of the regenerated liquid, and facilitating the reuse of the enriched liquid in the photolithography and development process.

[0074] In one embodiment, the second inlet pipe 122 is used to introduce hot water at a temperature of 40° to 80°. During adsorption, the first inlet pipe 121 is connected to the outlet end, and wastewater enters the adsorption chamber 11 through the first inlet pipe 121. At this time, the wastewater is discharged through the first outlet pipe 131.

[0075] After adsorption is complete, switch the first three-way valve to connect the second inlet pipe 122 to the outlet end, and hot water enters the adsorption chamber 11 for desorption and regeneration. At this time, switch the second three-way valve to discharge the tetraalkylammonium hydroxide solution from the second outlet pipe 132.

[0076] In other embodiments, the second inlet pipe 122 is used to introduce water. During adsorption, the first inlet pipe 121 is connected to the outlet end, and wastewater enters the adsorption chamber 11 through the first inlet pipe 121. At this time, the wastewater is discharged from the first outlet pipe 131.

[0077] After adsorption is complete, switch the first three-way valve to connect the second inlet pipe 122 to the outlet end, and water enters the adsorption chamber 11. Start the desorption device 2 for desorption and regeneration. At this time, switch the second three-way valve to discharge the tetraalkylammonium hydroxide solution from the second outlet pipe 132.

[0078] like Figure 2 As shown, in one embodiment, the desorption device 2 employs the microwave device 23. During adsorption, the first inlet pipe 121 is connected to the adsorption chamber 11 to introduce wastewater, the second inlet pipe 122 is closed, and the first outlet pipe 131 is connected to discharge treated water. During desorption, the microwave device 23 is activated. The second inlet pipe 122 is connected to the adsorption chamber 11 to introduce water, and the second inlet pipe 122 is also connected to discharge tetraalkylammonium hydroxide solution. The first inlet pipe 121 is closed.

[0079] Optionally, the adsorption chamber 11 is provided with multiple sets of ion exchange membranes 14 in the direction of electric field, and the adsorption chamber 11 is divided into multiple alternating and cyclically arranged first chambers 141 and second chambers 142 by the multiple sets of ion exchange membranes 14 in the direction of electric field.

[0080] In this configuration, the anion exchange membrane 143 and the cation exchange membrane 144 of one set of ion exchange membranes 14 surround to form the first chamber 141, and the anion exchange membrane 143 and the cation exchange membrane 144 of two adjacent sets of ion exchange membranes 14 surround to form the second chamber 142, and the first chamber 141 is filled with the adsorbent.

[0081] like Figure 4 As shown, it should be noted that, passing through the ion exchange membrane 14 between the positive and negative electrodes, it can be understood that the desorbed TMA ions migrate towards the negative electrode plate 22 and into the second chamber 142 under the influence of the electric field, while the hydroxide ions generated by hydrolysis in the first chamber 141 migrate towards the positive electrode plate 21 and into the second chamber 142 under the influence of the electric field, where they combine to form tetraalkylammonium hydroxide. The first chamber 141 has an anion exchange membrane 143 near the positive electrode and a cation exchange membrane 144 near the negative electrode, while the second chamber 142 has a cation exchange membrane 144 near the positive electrode and an anion exchange membrane 143 near the negative electrode.

[0082] like Figure 4 As shown, taking two sets of ion exchange membranes 14 as an example, the adsorption chamber 11 includes two first chambers 141 and one second chamber 142. The second chamber 142 is located between the two sets of ion exchange membranes 14. Similarly, if there are three sets of ion exchange membranes 14, the adsorption chamber 11 will be divided into three first chambers 141 and two second chambers 142. This embodiment does not impose a specific limitation on the number of sets of ion exchange membranes 14.

[0083] Optionally, the adsorbent is filled in the first chamber 141, and the second chamber 142 may or may not be filled with adsorbent. This embodiment does not impose specific restrictions on this.

[0084] It should be noted that the anion exchange membrane 143, which is closest to the positive electrode of the electric field, forms a first electrode chamber with the side wall of the adsorption cavity 11, and the cation exchange membrane 144, which is closest to the negative electrode of the electric field, forms a second electrode chamber with the side wall of the adsorption cavity 11.

[0085] Optionally, the liquid inlet pipe 12 includes a first liquid inlet pipe 121 and a second liquid inlet pipe 122, both of which are directly connected to the adsorption chamber 11. The first liquid inlet pipe 121 is used to introduce wastewater, and the second liquid inlet pipe 122 is used to introduce water or tetraalkylammonium hydroxide solution.

[0086] The liquid outlet pipe 13 includes a first liquid outlet pipe 131 and a second liquid outlet pipe 132, both of which are directly connected to the adsorption chamber 11. The first liquid outlet pipe 131 is used to discharge water, and the second liquid outlet pipe 132 is used to discharge tetraalkylammonium hydroxide solution.

[0087] The first inlet pipe 121 and the first outlet pipe 131 are both connected to the first chamber 141, and the second inlet pipe 122 and the second outlet pipe 132 are both connected to the second chamber 142.

[0088] In some embodiments, the second inlet pipe 122 connects the first electrode chamber and the second electrode chamber, and the discharged liquid is used as the electrode liquid.

[0089] It should be noted that by directly connecting the first liquid inlet pipe 121 and the second liquid inlet pipe 122 to the adsorption chamber 11, and combining the electric field with the ion exchange membrane 14, adsorption and desorption can be carried out simultaneously. Due to polarization and other reasons, the water on the surface of the adsorbent will dissociate into hydroxide ions and hydrogen ions. Hydrogen ions can desorb TMA ions in the adsorbent, thereby regenerating the adsorbent. The desorbed TMA ions migrate towards the negative electrode plate 22 to the second chamber 142 under the action of the electric field. The hydroxide ions generated by hydrolysis migrate towards the positive electrode plate 21 to the second chamber 142 under the action of the electric field. The two combine in the second chamber to obtain tetraalkylammonium hydroxide. By simultaneously adsorbing and desorbing, the amount of adsorbent required can be effectively reduced.

[0090] like Figure 4 As shown, it can be understood that the first inlet pipe 121 and the first outlet pipe 131 are both connected to the first chamber 141. After the waste liquid is adsorbed by the adsorbent in the first chamber 141, it is discharged as qualified greywater through the first outlet pipe 131.

[0091] The second inlet pipe 122 and the second outlet pipe 132 are both connected to the second chamber 142. Water is introduced through the second inlet pipe 122. TMA ions combine with hydroxide ions generated by the negative electrode hydrolysis to obtain tetraalkylammonium hydroxide, and the tetraalkylammonium hydroxide solution is directly discharged through the second outlet pipe 132.

[0092] Optionally, the other end of the second outlet pipe 132 relative to the second chamber 142 is connected to a liquid storage tank, which is used to collect the liquid discharged from the second chamber 142. The liquid storage tank is connected to the second inlet pipe 122, and the liquid storage tank is pumped to re-drain the liquid into the adsorption chamber 11 for circulation.

[0093] It is understood that the tetraalkylammonium hydroxide solution can be recirculated into the second chamber 142 through the storage tank. When the concentration rises to the target concentration, water is added while a portion of the solution is removed to keep the concentration change within a limited range.

[0094] Optionally, the first chamber 141 is filled with the adsorbent, which is a cation / anion exchange resin.

[0095] Optionally, the liquid outlet pipeline 13 is equipped with a concentration detection device for detecting the concentration of tetraalkylammonium hydroxide;

[0096] The liquid inlet pipe 12 is equipped with a flow rate detection device to detect the liquid flow rate.

[0097] It should be noted that the concentration of tetraalkylammonium hydroxide is detected by a concentration detection device. When the concentration rises to the target concentration, water can be added while a portion of the tetraalkylammonium hydroxide solution is removed to keep the concentration variation in the second chamber 142 limited.

[0098] The flow rate of the introduced wastewater is detected by the flow rate detection device. By adjusting the wastewater flow rate to match the adsorbent content, the adsorption effect is ensured.

[0099] The above description is merely an exemplary embodiment of the present utility model and does not limit the patent scope of the present utility model. Any equivalent structural transformations made based on the technical concept of the present utility model and the contents of the present utility model specification and drawings, or direct / indirect applications in other related technical fields, are included within the patent protection scope of the present utility model.

Claims

1. A tetraalkylammonium hydroxide recovery device, characterized in that, include: Adsorption unit and desorption unit; The adsorption unit includes an adsorption device, which has an adsorption chamber filled with an adsorbent. The adsorption chamber is connected to an inlet pipe and an outlet pipe. The inlet pipe is used to introduce wastewater and / or regeneration medium, and the outlet pipe is used to discharge greywater and / or tetraalkylammonium hydroxide solution. The desorption unit is located on the periphery of the adsorption chamber, and the desorption unit includes a desorption reagent pipeline and / or a desorption device for the regeneration of tetraalkylammonium hydroxide; The reagent pipeline is used to introduce reagents into the adsorption chamber for desorption. The desorption device establishes a physical field in the adsorption chamber to perform desorption.

2. The tetraalkylammonium hydroxide recovery device as described in claim 1, characterized in that, The desorption device is located on the periphery of the adsorption cavity, and the desorption device can be a microwave device, an electric field device, an ultrasonic device, or a heating device.

3. The tetraalkylammonium hydroxide recovery device as described in claim 2, characterized in that, The electric field device includes a positive electrode plate and a negative electrode plate, which are respectively disposed on opposite sides of the adsorption cavity to establish an electric field within the adsorption cavity.

4. The tetraalkylammonium hydroxide recovery device according to any one of claims 1 to 3, characterized in that, The liquid inlet pipeline includes a first liquid inlet pipe, a second liquid inlet pipe, and a first three-way valve. The first three-way valve includes two inlet ends and one outlet end. The two inlet ends of the first three-way valve are respectively connected to the first liquid inlet pipe and the second liquid inlet pipe, and the outlet end of the first three-way valve is connected to the adsorption chamber. The first inlet pipe is used to introduce wastewater, and the second inlet pipe is used to introduce regeneration medium.

5. The tetraalkylammonium hydroxide recovery device as described in claim 4, characterized in that, The liquid outlet pipeline includes a first liquid outlet pipe and a second liquid outlet pipe, as well as a second three-way valve. The second three-way valve includes two outlet ends and one inlet end. The two outlet ends of the second three-way valve are respectively connected to the first liquid outlet pipe and the second liquid outlet pipe, and the inlet end of the second three-way valve is connected to the adsorption chamber. The first outlet pipe is used to discharge the recycled water, and the second outlet pipe is used to discharge the enriched liquid.

6. The tetraalkylammonium hydroxide recovery device as described in claim 3, characterized in that, The adsorption chamber is provided with multiple sets of ion exchange membranes arranged in the direction of the electric field. The adsorption chamber is divided into multiple alternating and cyclically arranged first and second chambers by the multiple sets of ion exchange membranes in the direction of the electric field. In this configuration, the anion exchange membrane and cation exchange membrane of one set of ion exchange membranes together form the first chamber, and the anion exchange membrane and cation exchange membrane of two adjacent sets of ion exchange membranes together form the second chamber, and the first chamber is filled with the adsorbent.

7. The tetraalkylammonium hydroxide recovery device as described in claim 6, characterized in that, The liquid inlet pipeline includes a first liquid inlet pipe and a second liquid inlet pipe, both of which are directly connected to the adsorption chamber. The first liquid inlet pipe is used to introduce wastewater, and the second liquid inlet pipe is used to introduce water or tetraalkylammonium hydroxide solution. The liquid outlet pipeline includes a first liquid outlet pipe and a second liquid outlet pipe, both of which are directly connected to the adsorption chamber. The first liquid outlet pipe is used to discharge greywater, and the second liquid outlet pipe is used to discharge tetraalkylammonium hydroxide solution. The first inlet pipe and the first outlet pipe are both connected to the first chamber, and the second inlet pipe and the second outlet pipe are both connected to the second chamber.

8. The tetraalkylammonium hydroxide recovery device as described in claim 7, characterized in that, The other end of the second outlet pipe relative to the second chamber is connected to a liquid storage tank, which is used to collect the liquid discharged from the second chamber. The liquid storage tank is connected to the second inlet pipe, and the liquid storage tank is used to pump the liquid back into the adsorption chamber for circulation.

9. The tetraalkylammonium hydroxide recovery device as described in claim 3, characterized in that, The adsorbent is a natural adsorbent or an artificial adsorbent.

10. The tetraalkylammonium hydroxide recovery device as described in claim 9, characterized in that, The outlet pipeline is equipped with a concentration detection device to detect the concentration of tetraalkylammonium hydroxide; The liquid inlet pipeline is equipped with a flow rate detection device to detect the liquid flow rate.

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