Interval supporting movable type semiconductor detection support

By designing a spaced-support movable semiconductor detection bracket, the problem of adaptability of the aperture quartz window structure of MOCVD equipment was solved, realizing the movable fixation of the probe seat and improving measurement accuracy, adapting to different substrate sizes and tray variations.

CN224329891UActive Publication Date: 2026-06-05SANZHI TECHNOLOGY (NANJING) CO LTD
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Patent Information

Application Number
CN202521390106.7
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-07-03
Publication Date
2026-06-05
Estimated Expiration
2035-07-03

AI Technical Summary

Technical Problem

The existing quartz window structure of MOCVD equipment cannot adapt to changes in substrate and tray sizes, resulting in fixed test positions, which affects measurement accuracy. Furthermore, the detector head and probe holder of the monitoring equipment are severely affected by chamber temperature fluctuations.

Method used

A spaced-support movable semiconductor detection bracket was designed. By forming an uninterrupted continuous interval at the top of the monitoring window through the support frame and support components, the probe seat can be moved and fixed, avoiding the heat-affected detector head and probe seat, and adapting to substrates and trays of different sizes.

Benefits of technology

It enables convenient installation and fixation of the probe holder in any position, improves measurement accuracy, reduces the impact of thermal deformation on measurement, and adapts to various substrate and tray sizes.

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Abstract

The utility model discloses an interval supporting movable type semiconductor detection support, and relates to the technical field of semiconductor detection. According to the detection support, a supporting frame body is supported on the top of a monitoring window at intervals through supporting pieces and used for movably supporting a probe base; the supporting frame body comprises a frame, a first center strip and a second center strip are arranged in the frame in a spaced mode, and the first center strip and the frame are arranged in a spaced mode. The bearing block is fixedly connected with the supporting piece; the supporting piece is fixedly connected to the chamber top cover; the probe seat comprises a cylinder connector and a connecting block; and the connecting block protrudes out of the side wall of the cylinder body connecting body, is provided with a through hole and is used for continuously fixing the probe seat at different positions. A detector head, a probe seat and the like of the monitoring equipment are prevented from being influenced by different deposition temperature fluctuations of the cavity; the probe seat can be installed and positioned at any position, the test position can be positioned at any position, and various sizes of substrates and tray changes are compatible.
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