Self-controllable closed evaporation chamber structure

Abstract

The utility model discloses a kind of self-control closed evaporation chamber structure, and the closed cavity inside box type closed shell is provided with silk disc holder in parallel positioning;Box type closed shell includes detachable front side panel;The position of each silk disc holder is provided with a plurality of threading through orifice on the top panel of box type closed shell, target material sealing guide assembly is positioned in threading through orifice, detachable sealing cover is further provided on threading through orifice;Left side panel or right side panel of box type closed shell is equipped with the air vent and the inflation port communicated with closed cavity, the sealing stop plate that is sealed with air vent is equipped on air vent, inflation port is connected with inert gas supply source by control valve and pipeline.This self-control closed evaporation chamber structure can realize the anti-oxidation protection of target material silk disc, and then improve the surface quality of evaporation film material.

Description

Technical Field

[0001] This utility model relates to a vapor deposition chamber structure, specifically a self-controllable and sealed vapor deposition chamber structure suitable for physical vapor deposition (PVD) vacuum coating machines, belonging to the field of vacuum coating technology. Background Technology

[0002] Vacuum coating machines are devices that utilize vacuum coating technology to perform coating under high vacuum conditions. Their wide range of applications and technological advantages make them a vital force in promoting the development of materials science and surface engineering. Vacuum coating technology is mainly divided into two categories: physical vapor deposition (PVD) and chemical vapor deposition (CVD). PVD technology includes vacuum evaporation, sputtering, and ion plating, while CVD involves methods of forming thin films on substrate surfaces through chemical reactions. Both PVD coating and evaporation targets are required, most often using filamentous targets such as copper or aluminum wires. These filamentous targets are placed on a wire tray in the evaporation chamber via a wire spool and fed into the evaporation boat by a wire feeding mechanism for the evaporation coating operation.

[0003] After the coating operation is completed, the evaporation chamber needs to be opened to replace the coating material and related consumables, or to carry out maintenance work. At this time, the wire spool is exposed to the air. Since the wire target still has a certain residual temperature from the evaporation operation, the entire roll of wire target on the wire spool is prone to surface oxidation. This can lead to splashing during evaporation when the evaporation coating operation is carried out again due to the presence of oxidized impurities on the surface of the wire target, thus affecting the surface quality of the evaporated coating material. Summary of the Invention

[0004] To address the problems existing in the prior art, this utility model provides a self-controllable sealed vapor deposition chamber structure that can achieve anti-oxidation protection for the target wire disc, thereby improving the surface quality of the vapor-deposited film.

[0005] To achieve the above objectives, the self-controllable and sealed vapor deposition chamber structure includes a box-shaped sealed shell, inside which a sealed cavity is formed, and multiple wire spools are arranged side by side within the sealed cavity.

[0006] The box-shaped sealed housing includes a detachable front panel, and the front panel is sealed and fixedly connected by a sealing element.

[0007] The top panel of the box-shaped sealed shell is provided with a wire threading port corresponding to the position of each wire spool. A target material sealing guide component including a sealing guide hole is positioned in the wire threading port, and multiple target material sealing guide components are respectively corresponding to the positions of each wire spool. The wire threading port is also provided with a detachable sealing cover plate, and the sealing cover plate is provided with a target material sealing guide component positioning through hole that seals with the target material sealing guide component. When the sealing cover plate is sealed and fixed on the wire threading port by a sealing element, the target material sealing guide component is sealed and snapped into the target material sealing guide component positioning through hole.

[0008] The left or right panel of the box-shaped sealed shell is provided with a vent and an inflation port that communicate with the sealed cavity. The vent is provided with a sealing plate that seals with the vent, and the sealing plate is installed on the box-shaped sealed shell through a sealing plate opening and closing control mechanism. The inflation port is connected to an inert gas supply source through a control valve and pipeline.

[0009] As a further improvement of this utility model, the box-shaped sealed shell has an overall rectangular parallelepiped structure.

[0010] As a further improvement of this utility model, the target material sealing guide assembly is positioned and installed on the box-shaped sealed shell by a support frame.

[0011] As a further improvement of this utility model, the sealing guide hole of the target material sealing guide assembly is provided with an annular seal, and the inner diameter of the annular seal is interference-fitted with the outer diameter of the filamentous target material.

[0012] Compared with existing technologies, this self-controllable sealed vapor deposition chamber structure, due to its inclusion of a target sealing and guiding assembly with sealing guide holes, a sealing cover plate and front panel that can be sealed, fixedly installed, and detached, a sealing plug plate that can seal with the vent, and an air inlet with a control valve, can ensure the airtightness of the sealed chamber. At the start of the vapor deposition operation, the vent can be opened by controlling the opening and closing mechanism of the plug plate, and a vacuum pump can be connected to the vent to evacuate the sealed chamber. After the vapor deposition operation is completed, the evaporation chamber needs to be opened for replacement deposition. When replacing the coating material and related consumables, or when performing maintenance work, first control the valve of the gas inlet to open it, allowing inert gas to enter the sealed chamber under negative pressure. This isolates the target material from the outside air and prevents surface oxidation. Then disconnect the gas inlet from the vacuum pump and control the blocking plate opening and closing mechanism to seal the gas inlet. After the target material cools down, open the sealing cover or front panel to replace the coating material and related consumables, or perform maintenance work. This method can protect the target material spool from oxidation, thereby improving the surface quality of the vapor-deposited coating material. Attached Figure Description

[0013] Figure 1This is a schematic diagram of the overall three-dimensional structure of this utility model;

[0014] Figure 2 yes Figure 1 A magnified view of a portion of the image.

[0015] In the diagram: 1. Front panel, 2. Sealing cover, 3. Target material sealing guide assembly, 4. Vent, 5. Inflation port. Detailed Implementation

[0016] The present invention will be further described below with reference to the accompanying drawings.

[0017] like Figure 1 As shown, the self-controllable sealed vapor deposition chamber structure is designed to facilitate the side-by-side arrangement of wire spool holders for installing target wire spools. It has a box-shaped sealed shell with an overall rectangular structure. The sealed shell forms a sealed cavity inside, and multiple wire spool holders for installing target wire spools are positioned side-by-side inside the sealed cavity.

[0018] The box-type sealed housing includes a detachable front panel 1, and the front panel 1 is sealed and fixedly connected by a sealing element. The target wire spool can be installed on the wire spool holder by removing the front panel 1.

[0019] like Figure 2 As shown, the top panel of the box-shaped sealed housing has wire-passing openings corresponding to the positions of each wire spool holder. A target material sealing guide assembly 3, including a sealing guide hole, is positioned within each wire-passing opening. Multiple target material sealing guide assemblies 3 correspond one-to-one with the positions of each wire spool holder. The sealing guide assembly 3 can be positioned and installed on the box-shaped sealed housing via a support frame. The filamentous target material from the target spool can pass through the sealing guide hole of the target material sealing guide assembly 3 and extend to the outside of the box-shaped sealed housing. Annular sealing components such as sealing rings or sealing rings can be provided within the sealing guide hole. Furthermore, the inner diameter of the annular sealing component is interference-fitted with the outer diameter of the filamentous target. The wire threading port is also provided with a detachable sealing cover plate 2, and the sealing cover plate 2 is provided with a target sealing guide component positioning through hole that seals with the target sealing guide component 3. When the sealing cover plate 2 is sealed and fixedly installed on the wire threading port by the sealing component, the target sealing guide component 3 can be sealed and snapped into the target sealing guide component positioning through hole, and it does not affect the filamentous target from extending to the outside of the box-shaped sealed shell through the sealing guide hole of the target sealing guide component 3.

[0020] like Figure 1As shown, the left or right panel of the box-type sealed shell is provided with a vent 4 and an inflation port 5 that communicate with the sealed cavity. The vent 4 is provided with a sealing plate that seals with the vent 4, and the sealing plate is installed on the box-type sealed shell through a sealing plate opening and closing control mechanism. The sealing plate opening and closing control mechanism can be an opening and closing structure driven by a motor and linkage mechanism as shown in the figure, or an opening and closing structure controlled by a telescopic cylinder, or other opening and closing control structures. By controlling the action of the sealing plate opening and closing control mechanism, the sealing plate can be in a state of sealing and blocking the vent 4, or the sealing plate can be in a state of opening the vent 4. The inflation port 5 is connected to an inert gas supply source through a control valve and pipeline. The inert gas can be nitrogen or argon, etc.

[0021] This self-controllable sealed vapor deposition chamber structure allows for the opening of the vent 4 at the start of the vapor deposition operation by controlling the opening and closing mechanism of the sealing plate. A vacuum pump is then connected to the vent 4 to evacuate the sealed chamber. After the vapor deposition operation, if the evaporation chamber needs to be opened for replacement of the coating material and related consumables, or for maintenance, the control valve of the inflation port 5 is first opened to allow inert gas to enter the sealed chamber under negative pressure, isolating the target material from external air and preventing surface oxidation. Then, the connection between the vent 4 and the vacuum pump is disconnected, and the sealing plate opening and closing mechanism is activated to seal the vent 4. After the target material cools, the sealing cover 2 or the front panel 1 can be opened to replace the coating material and related consumables, or for maintenance.

Claims

1. A self-controllable and airtight vapor deposition chamber structure, comprising a box-shaped airtight shell, an airtight cavity formed inside the box-shaped airtight shell, and multiple wire spool holders arranged side by side within the airtight cavity; characterized in that, The box-shaped sealed housing includes a detachable front panel (1), and the front panel (1) is sealed and fixedly connected by a sealing element; The top panel of the box-shaped sealed shell is provided with multiple wire threading ports corresponding to the positions of each wire spool frame. A target material sealing guide component (3) including a sealing guide hole is positioned in the wire threading port, and the multiple target material sealing guide components (3) correspond one-to-one with the positions of each wire spool frame. The wire threading port is also provided with a detachable sealing cover plate (2), and the sealing cover plate (2) is provided with a target material sealing guide component positioning through hole that seals with the target material sealing guide component (3). When the sealing cover plate (2) is sealed and fixedly installed on the wire threading port by a sealing element, the target material sealing guide component (3) is sealed and snapped into the target material sealing guide component positioning through hole. The left or right panel of the box-type sealed housing is provided with a vent (4) and an inflation port (5) communicating with the sealed cavity. The vent (4) is provided with a sealing plug that seals with the vent (4), and the sealing plug is installed on the box-type sealed housing through a plug opening and closing control mechanism. The inflation port (5) is connected to an inert gas supply source through a control valve and pipeline.

2. The self-controllably closable evaporation chamber structure according to claim 1, characterized in that The box-shaped sealed shell has an overall rectangular structure.

3. The self-controllably closable evaporation chamber structure according to claim 1, characterized in that The target material sealing guide assembly (3) is positioned and installed on the box-type sealed housing by a support frame.

4. The self-controllably closable evaporation chamber structure according to claim 1, characterized in that The target material sealing guide assembly (3) is provided with an annular seal in the sealing guide hole, and the inner diameter of the annular seal is interference-fitted with the outer diameter of the filamentous target material.

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