A waste evacuation system

Abstract

This utility model discloses a waste discharge system, including a waste liquid collection box, a pipeline structure, a waste liquid collection box, and two sets of clamping components. The waste liquid collection box has a waste liquid outlet, and the waste liquid collection box has a waste liquid inlet. The two ends of the pipeline structure are respectively inserted into the waste liquid outlet and the waste liquid inlet, and are sealed to both. The two sets of clamping components are respectively installed on the waste liquid collection box and the waste liquid collection box, and respectively clamp and fix the two ends of the pipeline structure. This waste discharge system does not require careful attention to positional relationships during installation, making installation convenient and eliminating the problem of improper installation and rework. Furthermore, the clamping components ensure easy replacement; when replacement is needed, the clamps can be removed and the pipeline can be pulled out, simplifying maintenance.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment, and more specifically, to the field of waste discharge systems for coating and developing equipment. Background Technology

[0002] In existing coating and developing machines, a spin coating process is performed within a rotating unit. This process generates waste liquid, which requires a waste discharge system to collect and drain. In existing technology, a pipe is welded to a waste liquid collection box and a waste liquid collection box located below the rotating unit. The waste liquid is collected from the collection box, flows through the pipe into the collection box, and finally exits the equipment. However, in existing technology, installing the waste discharge system requires first fixing the waste liquid collection box and the collection box within the system, and then welding the pipe between them.

[0003] When welding pipes in existing technologies, the following problems are easily encountered:

[0004] 1. Due to insufficient assembly precision of the waste liquid collection box or waste liquid collection box, the distance between the two exceeds the length of the pipe, thus requiring adjustment of the position or finding a longer pipe;

[0005] 2. When welding pipes to waste liquid collection boxes and waste liquid collection boxes, the pipe positions must be fixed first to ensure that both ends of the pipe are welded to the target positions of the waste liquid collection boxes and waste liquid collection boxes during welding. Otherwise, after one end is welded, it will be found that the other end cannot be welded to the target position, resulting in rework.

[0006] 3. The temperature of some waste liquids varies, and the connection is made by welding. When the system temperature changes, the stress at the connection between the pipe and the box cannot be released, which reduces the service life of the waste discharge system.

[0007] 4. Waste liquid condenses on the inner wall of the pipe, making maintenance difficult when using welding. Utility Model Content

[0008] The purpose of this utility model is to provide a waste discharge system to solve the technical problems existing in the background art.

[0009] This utility model provides a waste discharge system, including a waste liquid collection box, a pipeline structure, a waste liquid collection box, and two sets of clamping components;

[0010] The waste liquid collection box is provided with a waste liquid outlet, and the waste liquid collection box is provided with a waste liquid inlet. The two ends of the pipe structure are respectively inserted into the waste liquid outlet and the waste liquid inlet and are sealed to them. The two sets of clamping members are respectively installed on the waste liquid collection box and the waste liquid collection box, and respectively clamp and fix the two ends of the pipe structure.

[0011] In a preferred embodiment, the pipeline structure is inclined, and the height of the pipeline structure gradually decreases from the waste liquid collection box side to the waste liquid collection box side.

[0012] In a preferred embodiment, the pipe structure includes a pipe body and two sleeves located at both ends of the pipe body, wherein the ends of the pipe body are embedded in the sleeves and are fixedly connected to the sleeves.

[0013] In a preferred embodiment, the sleeves at both ends are respectively inserted into the waste liquid outlet and the waste liquid inlet, and the depth of the waste liquid outlet and the waste liquid inlet is greater than that of the sleeves at the corresponding positions.

[0014] In a preferred embodiment, the depth of the waste liquid outlet and the waste liquid inlet is 2-6 mm deeper than the corresponding sleeve.

[0015] In a preferred embodiment, sealing rings are provided between the waste liquid outlet and the sleeve, and between the waste liquid inlet and the sleeve.

[0016] In a preferred embodiment, the clamping member includes a clamp structure.

[0017] In a preferred embodiment, the clamp structure is provided with an installation part, which is fixedly connected to the waste liquid collection box and the waste liquid collection box.

[0018] In a preferred embodiment, the mounting part is fixedly connected to the waste liquid collection box and the waste liquid collection box by bolts.

[0019] The beneficial effects of this utility model's technical solution are:

[0020] The waste discharge system of this solution does not require special attention to the location during installation, making it convenient to install and eliminating the problem of rework due to improper installation location. Furthermore, it is fixed by clamps, and when replacement is needed, the clamps can be removed and the pipe can be pulled out, making replacement and maintenance simple.

[0021] The waste liquid outlet and the waste liquid inlet are deeper than the corresponding sleeve, ensuring that the pipeline can be moved during installation to compensate for installation errors between the two boxes; and that there is space for the sleeve to deform when the sleeve experiences temperature changes, reducing stress within the system. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the overall structure of this utility model.

[0023] Figure 2 This is a cross-sectional view of the present invention.

[0024] Figure 3 This utility model Figure 2 Enlarged view of part A in the middle.

[0025] Figure 4 This is the front view of the present utility model.

[0026] Explanation of reference numerals in the attached drawings: 1 Waste liquid collection box, 11 Waste liquid outlet, 2 Pipeline structure, 21 Pipeline body, 22 Sleeve, 3 Waste liquid collection box, 31 Waste liquid inlet, 4 Clamping part, 41 Mounting part, 5 Sealing ring. Detailed Implementation

[0027] The present invention will now be described in further detail with reference to the accompanying drawings and specific embodiments. The embodiments of the present invention are given for the purpose of illustration and description, and are not intended to be exhaustive or to limit the present invention to the disclosed forms. Many modifications and variations will be apparent to those skilled in the art. The embodiments were chosen and described to better illustrate the principles and practical applications of the present invention, and to enable those skilled in the art to understand the present invention and design various embodiments with various modifications suitable for a particular purpose.

[0028] like Figures 1-3 As shown, this utility model provides a waste discharge system, including a waste liquid collection box 1, a pipeline structure 2, a waste liquid collection box 3, and two sets of clamping members 4. The waste liquid collection box 1 is provided with a waste liquid outlet 11, and the waste liquid collection box 3 is provided with a waste liquid inlet 31. The two ends of the pipeline structure 2 are respectively inserted into the waste liquid outlet 11 and the waste liquid inlet 31 and are sealed to them. The two sets of clamping members 4 are respectively installed on the waste liquid collection box 1 and the waste liquid collection box 3, and respectively clamp and fix the two ends of the pipeline structure 2.

[0029] In the above scheme, the pipeline structure 2 is positioned between the waste liquid collection box 1 and the waste liquid collection box 3. The waste liquid collection box 1 collects the waste liquid generated during the spin coating process and transports it to the waste liquid collection box 3 for unified collection through the pipeline structure 2. During installation, first insert one end of the pipeline structure 2 into the waste liquid outlet 11 and the other end into the waste liquid inlet 31. Then, install the waste liquid collection box 1 and the waste liquid collection box 3 in their corresponding positions on the machine. Finally, fix both ends of the pipeline structure 2 with the clamps 4. This waste discharge system does not require careful attention to the positional relationship during installation, making it convenient and eliminating the problem of improper installation and rework. Furthermore, the clamps 4 allow for easy replacement; when replacement is needed, simply remove the clamps and pull out the pipeline. Replacement and maintenance are simple.

[0030] like Figure 4As shown, during installation, both the waste liquid outlet 11 and the waste liquid inlet are set to an inclined state, and the corresponding installed pipe is in an inclined state. The height of the pipe structure 2 gradually decreases from the waste liquid collection box 1 side to the waste liquid collection box 3 side, so that the waste liquid can flow into the waste liquid collection box 3 better.

[0031] The pipe structure 2 includes a pipe body 21 and two sleeves 22 located at both ends of the pipe body 21. The ends of the pipe body 21 are embedded in the sleeves 22 and are fixedly connected to the sleeves 22. For example, the sleeves 22 are fixed to the pipe body 21 by welding.

[0032] During installation, the sleeves 22 at both ends of the pipe structure 2 are inserted into the waste liquid outlet 11 and the waste liquid inlet 31, respectively. The depth of the waste liquid outlet 11 and the waste liquid inlet 31 is greater than the depth of the sleeves 22 at the corresponding positions, by 2-6 mm. This ensures that the pipe structure 2 can move during installation, which facilitates the compensation of installation errors of the waste liquid collection box 1 and the waste liquid collection box 3, and allows space for the sleeves 22 to deform when the temperature changes, reducing stress within the system.

[0033] The clamping component 4 includes a clamp structure. The clamp structure has an mounting part 41, which is fixedly connected to the waste liquid collection box 1 and the waste liquid collection box 3. The mounting part 41 has screw holes, and bolts are used to fix the mounting part 41 to the waste liquid collection box 1 and the waste liquid collection box 3. After fixing, the central perforation of the clamp structure is aligned with the waste liquid outlet 11 and the waste liquid inlet 31. A sleeve passes through the central perforation and is inserted into the corresponding waste liquid outlet 11 and waste liquid inlet 31.

[0034] A sealing ring 5 is provided between the waste liquid outlet 11 and the sleeve 22, and between the waste liquid inlet 31 and the sleeve 22. The sealing ring 5 seals the gaps between the waste liquid outlet 11 and the waste liquid inlet 31 and the sleeve 22 to prevent waste liquid from overflowing.

[0035] Obviously, the described embodiments are only a part of the embodiments of this utility model, and not all of them. All other embodiments obtained by those skilled in the art and related fields based on the embodiments of this utility model without creative effort should fall within the protection scope of this utility model. Structures, devices, and operating methods not specifically described and explained in this utility model, unless otherwise specified or limited, shall be implemented according to conventional means in the art.

Claims

1. A waste evacuation system characterized by: Includes a waste liquid collection box, a pipeline structure, a waste liquid collection box, and two sets of clamping components; The waste liquid collection box is provided with a waste liquid outlet, and the waste liquid collection box is provided with a waste liquid inlet. The two ends of the pipe structure are respectively inserted into the waste liquid outlet and the waste liquid inlet and are sealed to them. The two sets of clamping members are respectively installed on the waste liquid collection box and the waste liquid collection box, and respectively clamp and fix the two ends of the pipe structure.

2. A waste evacuation system according to claim 1, wherein: The pipeline structure is inclined, and the height of the pipeline structure gradually decreases from the waste liquid collection box side to the waste liquid collection box side.

3. A waste evacuation system according to claim 1, wherein: The pipe structure includes a pipe body and two sleeves located at both ends of the pipe body. The ends of the pipe body are embedded in the sleeves and are fixedly connected to the sleeves.

4. A waste evacuation system according to claim 3, wherein: The sleeves at both ends are respectively inserted into the waste liquid outlet and the waste liquid inlet, and the depth of the waste liquid outlet and the waste liquid inlet is deeper than the sleeves at the corresponding positions.

5. A waste evacuation system according to claim 4, wherein: The depth of the waste liquid outlet and the waste liquid inlet is 2-6 mm deeper than the corresponding sleeve.

6. A waste evacuation system according to claim 3, wherein: A sealing ring is provided between the waste liquid outlet and the sleeve, and between the waste liquid inlet and the sleeve.

7. A waste evacuation system according to claim 1, wherein: The clamping component includes a clamp structure.

8. A waste evacuation system according to claim 7, wherein: The clamp structure is provided with an installation part, which is fixedly connected to the waste liquid collection box and the waste liquid collection box.

9. A waste evacuation system according to claim 8, wherein: The mounting part is fixedly connected to the waste liquid collection box and the waste liquid collection box by bolts.

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