Probe and test pin card

Abstract

The application discloses a probe and a test needle card, wherein the probe comprises a first coupling needle core and a second coupling needle core, and further comprises an adjusting assembly for adjusting the relative position of the first coupling needle core and the second coupling needle core in the axial direction. In the embodiment of the application, the probe adopts a split needle core design, and the distance between the first coupling needle core and the second coupling needle core can be adjusted through the adjusting assembly, so that the orientation adaptation of the core circle and the control plate is realized, and the compatibility of the probe is improved. In the aging test process, the probe contact pads corresponding to the pad positions on the core circle are enabled to perform the aging test through the adjustment of the axial distance between the first coupling needle core and the second coupling needle core, while the axial length of the probe not corresponding to the pad positions on the core circle is shortened to be separated from the core circle, so that the core circles with different chip layouts are compatible, and the manufacturing cost of the test needle card is effectively reduced.

Description

Technical Field

[0001] This application relates to the field of wafer fabrication technology, and in particular to a probe and test pin card. Background Technology

[0002] After all manufacturing processes are completed on a semiconductor wafer, electrical tests are required to screen out chips that meet specifications. For products with high reliability requirements, aging tests are also necessary. These tests use high-temperature and high-pressure environments to accelerate the exposure of potential defects, thereby eliminating dies with drifting parameters or early failures. The probe card, as the core component of the aging test system, uses probes to achieve the electrical connection between the control board in the test machine and the die on the wafer.

[0003] Currently, aging test pin cards generally adopt a fully customized design, requiring exclusive development based on the die layout, pad size, and test parameters of specific products. This single-adaptation mode results in long development cycles and high manufacturing costs for pin cards. Especially when facing multi-variety, small-batch orders, frequent replacement of dedicated pin cards will significantly increase testing costs. At the same time, traditional pin cards lack adjustability and compatibility, making it difficult to adapt to the testing needs of wafers of different sizes or heterogeneous chips, resulting in low efficiency in test resource allocation. Utility Model Content

[0004] This application provides a probe and test pin card that are simple in structure, highly compatible, and can improve testing efficiency.

[0005] To achieve the above objectives, this application provides the following technical solution.

[0006] This application provides a probe for wafer inspection, including a first coupling needle core, a second coupling needle core, and an adjustment component;

[0007] The first coupling needle core and the second coupling needle core are coaxially connected through the adjustment component, and the first coupling needle core, the adjustment component, and the second coupling needle core constitute a conductive element;

[0008] The adjustment assembly includes a first adjustment block and a second adjustment block connected together. The first coupling needle core is disposed on the first adjustment block, and the second coupling needle core is disposed on the second adjustment block. The axial length of the conductive element can be changed by adjusting the first adjustment block and the second adjustment block.

[0009] In some embodiments, one of the first adjusting block and the second adjusting block is provided with a threaded post, and the other is provided with a threaded hole;

[0010] The threaded post is placed inside the threaded hole and is threadedly connected to the threaded hole.

[0011] In some embodiments, the first adjusting block and the second adjusting block are slidably connected, and the relative sliding direction of the first adjusting block and the second adjusting block is specifically the axial direction of the first coupling needle core and the second coupling needle core;

[0012] The adjustment assembly further includes a damping component for limiting the relative sliding between the first adjustment block and the second adjustment block.

[0013] In some embodiments, the first adjusting block is provided with a protruding post, and the second adjusting block is provided with a limiting hole;

[0014] The damping assembly includes multiple damping elements fixedly disposed on the outer circular surface of the protrusion, and the multiple damping elements are arranged in a ring array around the central axis of the protrusion.

[0015] The protrusion is located inside the limiting hole, and the damping element elastically abuts against the inner wall of the limiting hole.

[0016] In some embodiments, the damping element is a spring.

[0017] In some embodiments, there is an included angle between the spring and the outer surface of the protrusion;

[0018] Wherein, the included angle is less than 90 degrees, and the opening of the included angle faces the first adjusting block.

[0019] In some embodiments, the opening of the limiting hole has a stop portion extending into the limiting hole.

[0020] In some embodiments, both the first adjusting block and the second adjusting block are provided with mounting holes;

[0021] Wherein, one end of the first coupling needle core is placed in the mounting hole of the first adjusting block, and the mounting hole is provided with an elastic element connected to the first coupling needle core;

[0022] One end of the second coupling needle core is placed in the mounting hole of the second adjusting block, and the mounting hole is provided with an elastic element connected to the second coupling needle core.

[0023] In some embodiments, the system further includes a first connecting sleeve connected to the first adjusting block and a second connecting sleeve connected to the second adjusting block;

[0024] Wherein, one end of the first coupling needle core is inserted into the first connecting sleeve, and the first connecting sleeve is provided with a spring member connected to the first coupling needle core;

[0025] One end of the second coupling needle core is inserted into the second connecting sleeve, and the second connecting sleeve is provided with a spring element connected to the second coupling needle core.

[0026] This application provides a test pin card, including an insulating substrate and a plurality of probes, wherein the probes are as described in any of the above claims, all of the probes are vertically mounted on the insulating substrate, and the two ends of each probe are respectively located on both sides of the insulating substrate.

[0027] This application has at least the following beneficial effects:

[0028] 1. The probe adopts a split needle core design. The distance between the first coupling needle core and the second coupling needle core can be adjusted by adjusting the component, thereby achieving orientation adaptation to the pads of each single chip on different sized die wafers and the contacts on the control board. This improves the compatibility of the probe and ensures the stability of electrical connections during aging tests. At the same time, by adjusting the length of the probe, decoupling between the die wafer and the control board can be achieved, further improving the flexibility of the probe in the aging test process.

[0029] 2. A sliding damping structure is set between the first adjusting block and the second adjusting block. On the one hand, it can improve the adjustment efficiency of the axial distance between the first coupling needle core and the second coupling needle core. On the other hand, it can maintain the relative position of the first coupling needle core and the second coupling needle core after the adjustment is completed, so as to ensure the reliability of the aging test.

[0030] 3. Multiple probes with adjustable axial length are set on the insulating substrate. During the aging test, the axial distance between the first coupling pin core and the second coupling pin core on the probe is adjusted by the adjustment component, so that the probe corresponding to the pad position on the core circle contacts the pad to perform the aging test, while the probes not corresponding to the pad position on the core circle shorten their axial length to detach from the core circle, thereby being compatible with core circles with different chip layouts and effectively reducing the manufacturing cost of the test pin card. Attached Figure Description

[0031] Figure 1 This is a schematic diagram showing the arrangement of a single chip on a "chip circle";

[0032] Figure 2 This is a schematic diagram showing the arrangement of "source pads and gate pads" on a "single chip";

[0033] Figure 3 This is a schematic diagram showing the arrangement of the "test units" on the "insulating substrate";

[0034] Figure 4 This is a schematic diagram showing the arrangement of the source probe and gate probe on the test unit.

[0035] Figure 5 This is a schematic diagram of the test needle card's operation;

[0036] Figure 6This is a schematic diagram of the "probe" structure;

[0037] Figure 7 This is a schematic diagram of the probe structure according to an embodiment of this application;

[0038] Figure 8 This is an exploded view of the probe structure according to an embodiment of this application;

[0039] Figure 9 This is a cross-sectional view of the "adjustment component" portion of the probe in another embodiment of this application;

[0040] Figure 10 This is a schematic diagram of the "damping element" portion of the probe in another embodiment of this application;

[0041] Figure 11 This is a schematic diagram of the operation of the test pin card in an embodiment of this application.

[0042] Figure Labels

[0043] Core circle-100, single chip-110, source pad-111, gate pad-112, insulating substrate-200, test unit-210, source probe-211, gate probe-212, control board-300, probe-400, sleeve-410, needle core-420, first connecting sleeve-430, first coupling needle core-440, second connecting sleeve-450, second coupling needle core-460, adjustment assembly-470, first adjustment block-471, threaded post-472, second adjustment block-473, threaded hole-474, limiting hole-475, stop part-476, damping element-477, protrusion-478. Detailed Implementation

[0044] The technical solutions of the embodiments of this application will be clearly described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this application. All other embodiments obtained by those skilled in the art based on the embodiments of this application are within the scope of protection of this application.

[0045] The terms "first," "second," etc., used in the specification and claims of this application are used to distinguish similar objects and not to describe a specific order or sequence. It should be understood that such use of data can be interchanged where appropriate so that embodiments of this application can be implemented in orders other than those illustrated or described herein, and the objects distinguished by "first," "second," etc., are generally of the same class and the number of objects is not limited; for example, a first object can be one or more. Furthermore, in the specification and claims, "and / or" indicates at least one of the connected objects, and the character " / " generally indicates that the preceding and following objects are in an "or" relationship.

[0046] The probes and test pin cards provided in this application will be described in detail below with reference to the accompanying drawings, through specific embodiments and application scenarios.

[0047] Example 1

[0048] like Figures 7 to 11 As shown, this application embodiment provides a probe, including a first coupling needle core 440 and a second coupling needle core 460 coaxially connected to the first coupling needle core 440 via an adjustment component 470, wherein the adjustment component 470 is disposed between the first coupling needle core 440 and the second coupling needle core 460.

[0049] The first coupling needle core 440, the adjustment component 470, and the second coupling needle core 460 constitute a conductive element. The adjustment component 470 can adjust the relative distance between the first coupling needle core 440 and the second coupling needle core 460 in the axial direction.

[0050] like Figure 6 As shown, the structure of a conventional probe includes a sleeve 410 and a needle core 420 axially extending through the sleeve 410. A spring element connected to the needle core 420 is provided inside the sleeve 410. Figure 5 As shown, during conventional probe operation, the two ends of the needle core 420 contact the pads on the control board 300 (specifically the PCB board) and the core circle 100, respectively, thereby achieving an electrical connection between the control board 300 and the core circle 100. The spring inside the sleeve 410 is used to achieve elastic contact between the two ends of the needle core 420. Since the total axial length of the needle core 420 is fixed, the length of the needle core 420 needs to be customized for different mating forms of the control board 300 and the core circle 100, so as to ensure the mating effect between the probe and the core circle 100 and the control board 300.

[0051] It should be noted that, as Figure 1 , Figure 2 As shown, the completed core die 100 is provided with multiple single chips 110. Each single chip 110 is provided with a source pad 111 and a gate pad 112. During the aging test, the two ends of the probe are aligned with the pads on the single chip 110 and the contacts on the control board 300, respectively, to achieve electrical contact.

[0052] In this embodiment, the probe described above is used, employing a split-core design. The distance between the first coupling core 440 and the second coupling core 460 can be adjusted by the adjustment component 470, thereby achieving orientation adaptation to the pads on the single chip 110 and the contacts on the control board 300. This improves the probe's compatibility and ensures the stability of electrical connections during aging tests. Furthermore, by adjusting the probe's length, decoupling between the single chip 110 and the control board 300 can be achieved, further enhancing the probe's flexibility in aging tests.

[0053] It is understandable that when the distance between the first coupling pin 440 and the second coupling pin 460 is adjusted by adjusting component 470, such that the distance between the far end of the first coupling pin 440 (the end away from the second coupling pin 460) and the far end of the second coupling pin 460 (the end away from the first coupling pin 440) is less than the distance between the single chip 110 and the control board 300, the pads on the single chip 110 are decoupled from the contacts at the corresponding positions on the control board 300.

[0054] In one implementation, such as Figure 7 , Figure 8 , Figure 11 As shown, it also includes a first connecting sleeve 430 and a second connecting sleeve 450 that are coaxial with the first coupling needle core 440 and the second coupling needle core 460.

[0055] The first coupling needle core 440 is elastically slidably disposed on the first connecting sleeve 430, and the first coupling needle core 440 extends to the side of the first connecting sleeve 430 away from the second coupling needle core 460.

[0056] The second coupling needle core 460 is elastically slidably disposed on the second connecting sleeve 450, and the second coupling needle core 460 extends to the side of the second connecting sleeve 450 away from the first coupling needle core 440.

[0057] The adjusting component 470 is disposed between the first connecting sleeve 430 and the second connecting sleeve 450, and is capable of adjusting the relative distance between the first connecting sleeve 430 and the second connecting sleeve 450 in the axial direction.

[0058] It is understandable that the first connecting sleeve 430 and the second connecting sleeve 450 can respectively achieve elastic contact between the first coupling needle core 440, the second coupling needle core 460 and the corresponding test point, thereby ensuring the reliability of the electrical connection.

[0059] In one embodiment, a first connecting sleeve 430 is sleeved on a first coupling needle core 440 and has a spring member inside that is connected to the first coupling needle core 440; a second connecting sleeve 450 is sleeved on a second coupling needle core 460 and has a spring member inside that is connected to the second coupling needle core 460.

[0060] Example 2

[0061] like Figure 7 , Figure 8 As shown, this application embodiment provides a probe, including a first coupling needle core 440 and a second coupling needle core 460 coaxial with the first coupling needle core 440, and also includes an adjustment component 470 disposed between the first coupling needle core 440 and the second coupling needle core 460. The first coupling needle core 440 and the second coupling needle core 460 can be electrically connected through the adjustment component 470.

[0062] The adjustment assembly 470 includes a first adjustment block 471 and a second adjustment block 473. A threaded connection structure is provided between the first adjustment block 471 and the second adjustment block 473. The rotation axis of the threaded connection structure coincides with the central axis of the first coupling needle core 440 and the second coupling needle core 460.

[0063] The first coupling needle core 440 is disposed on the first adjusting block 471, and the second coupling needle core 460 is disposed on the second adjusting block 473.

[0064] It is understandable that the first adjusting block 471 and the second adjusting block 473 can adjust their relative positions through a threaded connection structure. The position adjustment direction is the axis of the first coupling needle core 440 and the second coupling needle core 460, thereby realizing the adjustment of the axial distance between the first coupling needle core 440 and the second coupling needle core 460, and thus achieving adaptation to different application scenarios.

[0065] In one implementation, such as Figure 7 , Figure 8 As shown, the first adjusting block 471 has a threaded post 472 fixed at one end away from the first coupling needle core 440, and the second adjusting block 473 has a threaded hole 474 with an opening facing away from the second coupling needle core 460.

[0066] Specifically, the threaded connection structure consists of the external thread on the threaded post 472 and the internal thread on the threaded hole 474.

[0067] When the threaded post 472 is screwed into the threaded hole 474, the distance between the first coupling pin 440 and the second coupling pin 460 is reduced. When the threaded post 472 is screwed out of the threaded hole 474, the distance between the first coupling pin 440 and the second coupling pin 460 increases.

[0068] It is understood that the form of the threaded connection structure is not limited to the one mentioned above. For example, the threaded post 472 can be set on the second adjusting block 473 and the threaded hole 474 can be set on the first adjusting block 471, or the first adjusting block 471 can be directly set to be threadedly connected to the insertion hole 474. As long as the position adjustment between the first adjusting block 471 and the second adjusting block 473 can be achieved, it will not be elaborated here.

[0069] In one implementation, such as Figure 7 , Figure 8 As shown, it also includes a first connecting sleeve 430 and a second connecting sleeve 450 that are coaxial with the first coupling needle core 440 and the second coupling needle core 460.

[0070] The first coupling needle core 440 is elastically slidably disposed on the first connecting sleeve 430, and the first coupling needle core 440 extends to the side of the first connecting sleeve 430 away from the second coupling needle core 460.

[0071] The second coupling needle core 460 is elastically slidably disposed on the second connecting sleeve 450, and the second coupling needle core 460 extends to the side of the second connecting sleeve 450 away from the first coupling needle core 440.

[0072] The first connecting sleeve 430 is fixedly disposed at the end of the first adjusting block 471 away from the second adjusting block 473, and the second connecting sleeve 450 is fixedly disposed at the end of the second adjusting block 473 away from the first adjusting block 471.

[0073] It is understood that the elastic contact form of the first coupling pin 440 and the second coupling pin 460 is not limited to the one described above. For example, mounting holes can also be provided on the first adjusting block 471 and the second adjusting block 473, with one end of the first coupling pin 440 placed in the mounting hole of the first adjusting block 471, and an elastic element connected to the first coupling pin 440 provided in the mounting hole of the first adjusting block 471. One end of the second coupling pin 460 can be placed in the mounting hole of the second adjusting block 473, and an elastic element connected to the second coupling pin 460 provided in the mounting hole of the second adjusting block 473. As long as the elastic contact between the first coupling pin 440, the second coupling pin 460 and the pad can be achieved, it will not be elaborated here.

[0074] Example 3

[0075] like Figure 7 , Figure 9 , Figure 10As shown, this application embodiment provides a probe, including a first coupling needle core 440 and a second coupling needle core 460 coaxial with the first coupling needle core 440, and also includes an adjustment component 470 disposed between the first coupling needle core 440 and the second coupling needle core 460.

[0076] The first coupling needle core 440 and the second coupling needle core 460 can be electrically connected through the adjustment component 470. The adjustment component 470 includes a first adjustment block 471 and a second adjustment block 473 slidably connected to the first adjustment block 471. The first coupling needle core 440 is disposed on the first adjustment block 471, and the second coupling needle core 460 is disposed on the second adjustment block 473.

[0077] The first adjusting block 471 has a protrusion 478 fixed at one end away from the first coupling needle core 440. Multiple damping elements 477 are fixed on the outer circular surface of the protrusion 478. The multiple damping elements 477 are arranged in a ring array around the central axis of the protrusion 478. The second adjusting block 473 has a limiting hole 475.

[0078] Among them, the protruding post 478 is located inside the limiting hole 475, the sliding engagement direction of the first adjusting block 471 and the second adjusting block 473 is parallel to the axis of the first coupling needle core 440 and the second coupling needle core 460, and the damping member 477 elastically abuts against the inner wall of the limiting hole 475.

[0079] It is understandable that the sliding engagement of the first adjusting block 471 and the second adjusting block 473 enables the adjustment of the distance between the first coupling needle core 440 and the second coupling needle core 460. At the same time, the damping element 477 elastically abuts against the inner wall of the limiting hole 475, so that there is frictional resistance between the damping element 477 and the inner wall of the limiting hole 475 to overcome the relative movement of the two along the axial direction of the first coupling needle core 440 and the second coupling needle core 460. Under the action of frictional resistance, the relative movement between the first adjusting block 471 and the second adjusting block 473 is restricted. That is, when the first adjusting block 471 and the second adjusting block 473 slide relative to each other, they need to overcome the frictional resistance between the damping element 477 and the inner wall of the limiting hole 475. If the adjusting assembly 470 is only subject to gravity, the first adjusting block 471 and the second adjusting block 473 maintain their relative positions under the action of the frictional resistance between the damping element 477 and the inner wall of the limiting hole 475, thereby maintaining the axial distance between the first coupling needle core 440 and the second coupling needle core 460.

[0080] In this embodiment of the application, a probe as described above is used, and a sliding damping structure is set between the first adjusting block 471 and the second adjusting block 473. On the one hand, it can improve the adjustment efficiency of the axial distance between the first coupling needle core 440 and the second coupling needle core 460. On the other hand, it can maintain the relative position of the first coupling needle core 440 and the second coupling needle core 460 after the adjustment is completed, so as to ensure the reliability of the aging test.

[0081] It is understandable that the damping structure between the first adjusting block 471 and the second adjusting block 473 is not limited to the one mentioned above. For example, the protrusion 478 can be directly set to be interference fit with the limiting hole 475, as long as the relative movement of the first adjusting block 471 and the second adjusting block 473 can be restricted during the aging test. This will not be elaborated here.

[0082] In one implementation, such as Figure 9 , Figure 10 As shown, the damping element 477 is specifically configured as a spring sheet and has an included angle with the outer surface of the protrusion 478.

[0083] The included angle between the damping element 477 and the outer surface of the protrusion 478 is less than 90 degrees, and the opening of the included angle faces the first adjusting block 471.

[0084] Understandably, since the damping member 477 and the outer surface of the protrusion 478 have an angle with the opening facing the first adjusting block 471, when the protrusion 478 is inserted into the limiting hole 475, the damping member 477 can abut against the inner wall of the opening of the limiting hole 475, thereby shrinking and deforming towards the side closer to the central axis of the protrusion 478 to enter the limiting hole 475. After the damping member 477 moves into the limiting hole 475, it can diverge away from the central axis of the protrusion 478 under its own elastic force to abut against the inner wall of the limiting hole 475, thereby providing frictional resistance when the first adjusting block 471 and the second adjusting block 473 slide relative to each other.

[0085] In one implementation, such as Figure 9 As shown, the opening of the limiting hole 475 has a stop portion 476 extending into the limiting hole 475.

[0086] It is understandable that the stop part 476 is used to limit the damping element 477 in the limiting hole 475, thereby ensuring the reliability of the relative sliding stroke of the first adjusting block 471 and the second adjusting block 473.

[0087] In one embodiment, the protrusion 478 is configured to slide in conjunction with the stop portion 476. Specifically, the stop portion 476 is in clearance fit with the outer circular surface of the protrusion 478 in the circumferential direction, thereby achieving the alignment of the protrusion 478 and the limiting hole 476, ensuring uniform force on the inner wall of the damping member 477 and the limiting hole 475, and thus ensuring the damping stability when the first adjusting block 471 and the second adjusting block 473 slide relative to each other.

[0088] Example 4

[0089] like Figures 1 to 11As shown, this application provides a test pin card, including an insulating substrate 200 and a probe 400 mounted on the insulating substrate 200. The probe 400 adopts the probe described in any one of embodiments 1 to 3 above.

[0090] The probes 400 are all vertically mounted on the insulating substrate 200, and the two ends of the probes 400 are located on both sides of the insulating substrate 200.

[0091] It is understandable that, such as Figure 11 As shown, during the aging test, the insulating substrate 200 is located between the core 100 and the control board 300. The adjustment component 470 is installed in the through hole on the insulating substrate 200. The first coupling pin core 440 and the second coupling pin core 460 make electrical contact with the pads on the core 100 and the contacts on the control board 300, respectively.

[0092] The adjustment component 470 can adjust the axial distance between the first coupling needle core 440 and the second coupling needle core 460, thereby achieving the distance adaptation between the core circle 100 and the control plate 300.

[0093] In one embodiment, the insulating substrate 200 is specifically configured as a ceramic substrate.

[0094] In one implementation, such as Figure 11 As shown, multiple probes 400 are mounted on the insulating substrate 200.

[0095] It is understandable that, such as Figure 3 As shown, the conventional test pin card is customized based on the wafer 100, including an insulating substrate 200 and multiple probes 400 disposed on the insulating substrate 200. The probes 400 adopt the conventional probe structure described in Embodiment 1, that is, including a sleeve 410 and a needle core 420 placed inside the sleeve 410 with both ends exposed. The number and arrangement of the probes 400 match the chip layout (chip size, position and arrangement of pads on the chip) of the wafer 100. Based on the single chip 110 arrangement on the wafer 100, multiple test units 210 are correspondingly disposed on the insulating substrate 200. The probes 400 in each test unit 210 pass through the vias on the insulating substrate 200. The probes 400 that mate with the source pads 111 and 112 of the chip 110 are respectively electrically connected to the pads in the chip 110. The probe 400 that mates with the source pads 111 and 112 of the chip 110 is referred to as the source probe 211 and the probe 400 that mates with the gate pads 112 of the chip 110 is referred to as the gate probe 212. During the aging test, the number and position of the test units 210 on the insulating substrate 200 correspond to the number and position of the chip 110 on the die 100. At the same time, the number and position of the source probes 211 and gate probes 212 in the test units 210 correspond to the number and position of the source pads 111 and gate pads 112 in the chip 110, respectively, thereby achieving the matching of the test pin card and the die 100.

[0096] In this embodiment, a test pin card as described above is used, and multiple probes 400 with adjustable axial lengths are provided on the insulating substrate 200. During the aging test, the axial distance between the first coupling pin core 440 and the second coupling pin core 460 on the probe 400 is adjusted by the adjustment component 470, so that the probe 400 corresponding to the pad position on the single chip 110 contacts the pad to perform the aging test, while the axial length of the probe 400 not corresponding to the pad position on the single chip 110 is shortened to detach from the core die 100, thereby being compatible with core dies 100 with different chip layouts and effectively reducing the manufacturing cost of the test pin card.

[0097] It should be noted that, in order to improve the compatibility of the test pin card, the number of probes 400 on the insulating substrate 200 should be as large as possible, and the gap between multiple probes 400 should be as small as possible, so as to ensure that during the aging test of the chip wafer 100 with different chip layouts, each solder joint on the chip wafer 100 has a corresponding probe 400 that can be connected.

[0098] In one embodiment, the first adjusting block 471 is fixedly connected to the insulating substrate 200, and the contact between the second coupling pin core 460 and the pad on the core circle 100 is achieved by adjusting the relative position of the second adjusting block 473 and the first adjusting block 471.

[0099] It should be noted that, in this document, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes that element. Furthermore, it should be noted that the scope of the methods and apparatuses in the embodiments of this application is not limited to performing functions in the order shown or discussed, but may also include performing functions substantially simultaneously or in the reverse order, depending on the functions involved. For example, the described methods may be performed in a different order than described, and various steps may be added, omitted, or combined. Additionally, features described with reference to certain examples may be combined in other examples.

[0100] The embodiments of this application have been described above with reference to the accompanying drawings. However, this application is not limited to the specific embodiments described above. The specific embodiments described above are merely illustrative and not restrictive. Those skilled in the art can make many other forms under the guidance of this application without departing from the spirit and scope of the claims, and all of these forms are within the protection scope of this application.

Claims

1. A probe for wafer inspection, characterized in that, Includes a first coupling needle core, a second coupling needle core, and an adjustment assembly; The first coupling needle core and the second coupling needle core are coaxially connected through the adjustment component, and the first coupling needle core, the adjustment component, and the second coupling needle core constitute a conductive element; The adjustment assembly includes a first adjustment block and a second adjustment block connected together. The first coupling needle core is disposed on the first adjustment block, and the second coupling needle core is disposed on the second adjustment block. The axial length of the conductive element is changed by adjusting the first adjustment block and the second adjustment block.

2. A probe according to claim 1, characterized in that, One of the first adjusting block and the second adjusting block is provided with a threaded post, and the other is provided with a threaded hole; The threaded post is placed inside the threaded hole and is threadedly connected to the threaded hole.

3. A probe according to claim 1, characterized in that, The first adjusting block and the second adjusting block are slidably connected, and the relative sliding direction of the first adjusting block and the second adjusting block is specifically the axial direction of the first coupling needle core and the second coupling needle core; The adjustment assembly further includes a damping component for limiting the relative sliding between the first adjustment block and the second adjustment block.

4. A probe according to claim 3, characterized in that, The first adjusting block is provided with a protruding post, and the second adjusting block is provided with a limiting hole; The damping assembly includes multiple damping elements fixedly disposed on the outer circular surface of the protrusion, and the multiple damping elements are arranged in a ring array around the central axis of the protrusion. The protrusion is located inside the limiting hole, and the damping element elastically abuts against the inner wall of the limiting hole.

5. A probe according to claim 4, characterized in that, The damping element is a spring.

6. A probe according to claim 5, characterized in that, There is an angle between the spring sheet and the outer surface of the protruding post; Wherein, the included angle is less than 90 degrees, and the opening of the included angle faces the first adjusting block.

7. A probe according to any one of claims 4 to 6, characterized in that, The limiting hole has a stop portion extending into the limiting hole at its opening.

8. A probe according to claim 1, characterized in that, Both the first adjusting block and the second adjusting block are provided with mounting holes; Wherein, one end of the first coupling needle core is placed in the mounting hole of the first adjusting block, and the mounting hole is provided with an elastic element connected to the first coupling needle core; One end of the second coupling needle core is placed in the mounting hole of the second adjusting block, and the mounting hole is provided with an elastic element connected to the second coupling needle core.

9. A probe according to claim 1, characterized in that, It also includes a first connecting sleeve connected to the first adjusting block and a second connecting sleeve connected to the second adjusting block; Wherein, one end of the first coupling needle core is inserted into the first connecting sleeve, and the first connecting sleeve is provided with a spring member connected to the first coupling needle core; One end of the second coupling needle core is inserted into the second connecting sleeve, and the second connecting sleeve is provided with a spring element connected to the second coupling needle core.

10. A test pin card, characterized in that, It includes an insulating substrate and a plurality of probes, wherein the probes are as described in any one of claims 1 to 9, all of the probes are vertically mounted on the insulating substrate, and the two ends of each probe are respectively located on both sides of the insulating substrate.

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