Hard material grinding TTV automatic adjusting mechanism and hard material grinding machine polishing disc

Abstract

The utility model provides a kind of hard material grinding TTV automatic adjusting mechanism and hard material grinding machine polishing disc, comprising: servo motor, servo motor has first output end and second output end;Mounting seat, fixed in the head of servo motor;First screw rod, install in the first output end of the servo motor and pass through the mounting seat;Supporting seat, screw connection in the end of first screw rod;Detection component, including mounting bracket, second screw rod and limit slide block, the mounting bracket is fixed in the tail of the servo motor, the second screw rod is installed in the second output end of the servo motor, and with the limit switch of limit slide block screw connection on the mounting bracket, the mounting bracket is equipped with the limit switch that can contain the limit slide block trigger.The utility model hard material grinding TTV automatic adjusting mechanism, compact structure, small, easy to install, high adjustment accuracy, good use effect, and high safety.

Description

Technical Field

[0001] This utility model relates to a wafer processing equipment, and more particularly to an automatic adjustment mechanism for TTV in hard material grinding and a polishing disc for a hard material grinding machine. Background Technology

[0002] In recent years, with the continuous advancement of semiconductor technology, silicon wafer manufacturing processes have become increasingly sophisticated. During silicon wafer polishing, TTV (Total Thickness Variance) is a critical process control indicator, directly affecting the wafer's processing quality and yield. Traditional polishing processes control TTV by manually fine-tuning the position and angle of the polishing pad. This method is not only time-consuming and labor-intensive but also highly susceptible to operator subjectivity, thus impacting product stability. Utility Model Content

[0003] The technical problem to be solved by this utility model is to provide an automatic adjustment mechanism for grinding TTV of hard materials that is compact in structure, small in size, highly accurate in adjustment, effective in use, and highly safe.

[0004] This utility model provides an automatic TTV adjustment mechanism for grinding hard materials, comprising:

[0005] Servo motor 2, wherein the head and tail of the servo motor 2 have a first output terminal and a second output terminal, respectively;

[0006] Mounting base 1 is fixed to the head of the servo motor 2. The mounting base 1 has a shaft hole coaxial with the servo motor and a mounting hole I for connecting to the grinding machine.

[0007] The first lead screw 3 is installed at the first output end of the servo motor 2 and passes through the mounting base 1;

[0008] The support base 9 is threaded to the end of the first lead screw 3, and the support base 9 is provided with mounting hole II 920;

[0009] The detection component includes a mounting bracket 4, a second lead screw 5, and a limit slider 6. The mounting bracket 4 is fixed to the tail of the servo motor 2. The second lead screw 5 is installed at the second output end of the servo motor and is threadedly connected to the limit slider 6, which is slidably fitted on the mounting bracket 4. The mounting bracket 4 is provided with a limit switch that can be triggered by the limit slider 6. There are at least two limit switches and they are set at the two extreme positions of the limit slider.

[0010] This application enables high-precision control of the lead screw by setting a servo motor 2, thereby achieving precise adjustment of the support base 9 and allowing it to move precisely in the axial direction. This effectively controls the TTV value during the silicon wafer grinding process, improving processing accuracy and yield. At the same time, the setting of a detection component can limit the stroke of the support base, preventing overtravel, ensuring safe and reliable equipment operation, reducing human error, and improving the stability and efficiency of the overall process.

[0011] Furthermore, the first lead screw 3 includes a first rod body 32 and a second rod body 31 coaxially arranged and connected to each other. The first rod body 32 is rotatably mounted on the mounting base 1 and connected to the first output end of the servo motor 2. The side wall of the second rod body 31 is provided with external threads and forms a lead screw body that is threadedly connected to the support base 9. Since the axial movement stroke of the support base is small, a segmented structure is adopted, which can control the effective length of the threaded section. On the one hand, it can reduce the cost of the lead screw, and on the other hand, it can improve its overall structural strength, extend its service life, and facilitate the assembly of the first lead screw.

[0012] Furthermore, the side wall of the first rod 32 is provided with a first stepped surface facing the servo motor 2, and the mounting base 1 is provided with a second stepped surface. The second stepped surface contacts the first stepped surface and provides axial support, forming a support structure that can transfer the pressure on the support base to the mounting base, avoid directly transmitting the axial pressure to the servo motor, protect the servo motor from damage, extend its service life, and ensure the stability and reliability of the overall mechanism.

[0013] Furthermore, the first lead screw 3 is connected to the first output end of the servo motor 2 via a flexible coupling 33. Through the above structure, a flexible connection between the servo motor and the lead screw can be achieved, effectively buffering vibration and impact. In particular, it can reduce or avoid the transmission of impact or vibration from the support to the servo motor, further improving the operational stability of the equipment and extending the service life of each component.

[0014] Furthermore, the mounting base 1 includes a base body I 11 and a base body II 13 arranged in parallel and connected to each other. The base body I 11 and the base body II 13 are spaced apart to form an installation area. The side wall of the installation area is provided with an installation window, and the flexible coupling 33 is disposed in the installation area. Through the above structure, it is convenient to assemble and connect the first lead screw and the servo motor, while ensuring the flexibility and convenience of the installation process, reducing assembly errors, and further improving the installation accuracy and operational stability of the overall mechanism.

[0015] Furthermore, the side wall of the mounting bracket 4 is provided with a mounting surface 4a, and the limit switch is mounted on the mounting surface 4a; this facilitates the assembly of the limit switch and improves assembly accuracy.

[0016] Furthermore, the limit switch is a through-beam inductive switch, which has strong anti-interference ability, high sensitivity, fast response and long service life.

[0017] Furthermore, the head of the limiting slider 6 is provided with a contact rod 61 that can trigger the limiting switch, the tail of the limiting slider 6 is provided with a positioning mark 62, and the side wall of the mounting bracket 4 is provided with a scale mark 41; the precise position of the limiting slider can be seen visually, which is convenient for the operator to quickly adjust and calibrate, improve work efficiency, and reduce the risk of misoperation.

[0018] Furthermore, the pitch of the second lead screw 5 is greater than that of the first lead screw 3. With the above settings, a longer axial movement distance can be achieved with the same number of rotations, increasing the range of motion of the limit slider, improving detection accuracy, and further enhancing adjustment accuracy.

[0019] Meanwhile, this application also provides a polishing disc for a hard material grinding machine, which includes a fixed support and two movable supports arranged in a triangular pattern. The polishing disc is supported by one fixed support and two movable supports, and the aforementioned hard material grinding TTV automatic adjustment mechanism is provided on the movable supports. With the above-mentioned structural configuration, the polishing disc can be adjusted at any angle to adapt to different grinding needs, improve grinding uniformity and efficiency, and ensure the surface quality of silicon wafers. Moreover, it has low manufacturing cost, low control difficulty, and good performance.

[0020] This application, by incorporating a servo motor, enables high-precision control of the lead screw, thereby achieving precise adjustment of the support base 9 and allowing it to move accurately in the axial direction. This effectively controls the TTV value during silicon wafer grinding, improving processing accuracy and yield. Simultaneously, the inclusion of a detection component limits the stroke of the support base, preventing overtravel and ensuring safe and reliable equipment operation. This reduces human error and enhances the overall process stability and efficiency. This utility model's automatic TTV adjustment mechanism for hard material grinding is compact, small in size, easy to install, highly accurate, effective, and safe. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the automatic TTV adjustment mechanism for grinding hard materials according to this utility model;

[0022] Figure 2 This is a cross-sectional view of the automatic TTV adjustment mechanism for grinding hard materials according to this utility model;

[0023] Figure 3 This is a partially enlarged view of the automatic TTV adjustment mechanism for grinding hard materials according to this utility model;

[0024] Figure 4 This is a schematic diagram of the limit switch installation for the automatic adjustment mechanism of TTV for grinding hard materials according to this utility model. Detailed Implementation

[0025] The embodiments of this utility model will now be described in detail with reference to the accompanying drawings.

[0026] See Figures 1-4 This utility model provides an automatic adjustment mechanism for TTV grinding of hard materials, used to adjust the tilt of the polishing disc on the hard material grinding machine. It includes a servo motor 2, a mounting base 1, a first lead screw 3, a support base 9, and a detection component.

[0027] The head of the servo motor 2 has a first output end (output shaft), and the tail of the servo motor 2 has a second output end (output shaft). The first output end and the second output end are coaxial and have the same rotation speed. The first output end is used for adjustment, and the second output end is used for detection feedback.

[0028] Mounting base 1 serves as the mounting carrier and is fixed to the head of servo motor 2. Mounting base 1 has a shaft hole and mounting hole I. The shaft hole is coaxial with servo motor 2 and is used to install the first lead screw 3. Mounting hole I is used to connect to the grinding machine. That is, the servo motor is connected to the grinding machine through the mounting base.

[0029] The first lead screw 3 is installed on the first output end of the servo motor 2, coaxial with the first output end, and passes through the mounting base 1. Specifically, the first lead screw 3 includes a first rod body 32 and a second rod body 31 that are coaxially arranged and connected to each other. The first rod body 32 is rotatably installed on the mounting base 1 through a bearing. The first rod body 32 is connected to the first output end of the servo motor 2 as a power input end. The side wall of the second rod body 31 is provided with external threads to form the lead screw body, which is threadedly connected to the support base 9. Since the axial movement stroke of the support base is small, a segmented structure is adopted, which can control the effective length of the threaded segment. On the one hand, it can reduce the cost of the lead screw, and on the other hand, it can improve its overall structural strength, extend its service life, and facilitate the assembly of the first lead screw.

[0030] A first stepped surface is provided on the side wall of the first rod 32, facing the servo motor 2. Simultaneously, a second stepped surface is provided on the mounting base 1, contacting the first stepped surface to achieve axial support. In this embodiment, the second stepped surface is disposed on the bearing of the mounting base 1, forming a support structure that transfers the pressure on the support base to the mounting base, preventing direct transmission of axial pressure to the servo motor, protecting the servo motor from damage, extending its service life, and ensuring the stability and reliability of the overall mechanism.

[0031] In this application, the first lead screw 3 (first rod body 32) is connected to the first output end of the servo motor 2 through the flexible coupling 33; the use of the flexible coupling can realize the flexible connection between the servo motor and the lead screw, effectively buffering vibration and impact, especially effectively reducing or avoiding the transmission of impact or vibration on the support to the servo motor, further improving the running stability of the equipment and extending the service life of each component.

[0032] For ease of assembly, in this application, the mounting base 1 includes a base body I 11 and a base body II 13 arranged in parallel and rigidly connected by a connecting rod 12. The base body I 11 is circular, and multiple mounting holes I are evenly distributed circumferentially on the mounting base 1 to form a flange structure. The base body II is provided with mounting holes III for the fixed connection of the servo motor. There is a gap between the base body I 11 and the base body II 13 to form an installation area. The side wall of the installation area is provided with an installation window (opening) to facilitate the insertion and assembly of the flexible connecting shaft. For ease of operation, there are multiple installation windows, preferably two arranged opposite each other. The flexible coupling 33 is arranged in the installation area. Through the above structure, it is convenient to assemble and connect the first lead screw and the servo motor, while ensuring the flexibility and convenience of the installation process, reducing assembly errors, and further improving the installation accuracy and operational stability of the overall mechanism.

[0033] The support base 9 is threaded to the end of the first lead screw 3. The support base 9 is provided with mounting holes II 920 for connecting with the polishing disc. By rotating the first lead screw, the support base 9 can move axially, thereby adjusting the tilt of the polishing disc. Specifically, a pad is provided between the support base 9 and the polishing disc, and the support base 9 is connected to the pad. The support base 9 includes a cylindrical support base body 92. There are multiple mounting holes II 920 and they are provided on the top surface of the support base body 92. A central hole is provided on the support base body, and a sleeve nut 92 is provided in the central hole. A threaded hole is provided through the sleeve nut, which can be threaded to the first lead screw. The lower edge of the nut sleeve extends radially outward to form a reinforcing structure. The reinforcing structure is fitted and fixed to the lower end face of the support base body 91.

[0034] The detection assembly includes a mounting bracket 4, a second lead screw 5, and a limit slider 6. The mounting bracket 4 is fixed to the tail of the servo motor 2. The second lead screw 5 is mounted on the second output end of the servo motor and is coaxial with the second output end. The end of the second lead screw is rotatably mounted on the mounting bracket 4 via a bearing. The limit slider 6 is slidably fitted inside the mounting bracket 4, and its sliding direction is parallel to the axis of the second lead screw. The second lead screw is threadedly connected to the limit slider 6. The rotation of the third lead screw can drive the limit slider 6 to move axially within the mounting bracket 4. A limit switch is provided on the mounting bracket 4, which can be triggered by the limit slider 6. There are at least two limit switches, which are set at the two extreme positions of the limit slider to achieve stroke protection and prevent overtravel.

[0035] In this application, the mounting bracket 4 is cylindrical, and a slide rail 40 is provided on the mounting bracket 4. The length direction of the slide rail is parallel to the axis of the servo motor, and both sides of the slide rail penetrate the mounting bracket. One side is used to install a limit switch. Specifically, the side wall of the mounting bracket 4 is provided with a mounting surface 4a, and the limit switch is installed on the mounting surface 4a. Specifically, a first limit switch 71 is provided at the upper end of the mounting surface 4a (the end closer to the servo motor), and a second limit switch 72 is provided at the lower end of the mounting surface (the end away from the servo motor). This mounting surface facilitates the assembly of the limit switch and improves the assembly accuracy. In this embodiment, the limit switch is a through-beam inductive switch, which has strong anti-interference ability, high sensitivity, fast response and long service life.

[0036] A contact rod 61 is provided at the head of the limiting slider 6, which can trigger the contact rod 61 of the limit switch. In order to intuitively understand the precise position of the limiting slider, in this application, the tail of the limiting slider is flush with the side wall of the mounting bracket. A positioning mark 62 is provided at the tail of the limiting slider 6. The positioning mark is a marking line. At the same time, a scale mark 41 is provided on the side wall of the mounting bracket 4. The scale mark is located on both sides of the slide groove and corresponds to the positioning mark, which facilitates quick and accurate acquisition of the scale. The whole is convenient for operators to monitor and adjust in real time, realizing dual detection protection. In addition, a camera facing the positioning mark and the scale mark can be equipped to realize remote visual monitoring, ensure accurate operation, and improve the overall polishing efficiency and quality. It can avoid misjudgment caused by sensor failure and ensure the stability and reliability of the polishing process.

[0037] Since the tilt adjustment angle range of the polishing disc is small, in order to improve the detection accuracy, in this application, the pitch (lead) of the second lead screw is greater than that of the first lead screw. That is, when rotating one revolution, the movement distance of the limit indicator block is greater than the movement distance of the support body. This amplifies the movement stroke of the limit indicator block, so that even the slight positional changes of the support body can be accurately captured, further improving the sensitivity and accuracy of the polishing disc tilt adjustment. Preferably, the pitch of the second lead screw is several times (such as 1.2, 1.5, 2, 2.5, 3, etc.) of the pitch of the first lead screw, which facilitates the rapid calculation of data.

[0038] A hard material polishing machine includes a polishing disc with an adjustable tilt angle, which can adjust the tilt degree to compensate for the deformation (warping / bending) of the wafer itself, optimize pressure distribution, and improve the overall planarization effect. During the manufacturing process, wafers may experience micron-level warping or localized bending due to thermal stress, uneven thin film deposition, or residual stress from previous processes. If the polishing disc is completely horizontal, uneven contact pressure between the wafer and the polishing pad will result from deformation. This application uses an adjustable polishing disc structure to dynamically adjust the tilt angle of the polishing disc (typically within the range of ±0.1° to ±1°), making the surface of the polishing pad conform to the curved contour of the wafer, thus uniformizing the pressure distribution and avoiding localized under-polishing or over-polishing caused by deformation. Simultaneously, it optimizes the polishing pressure distribution; the slight tilt of the polishing disc can change the direction of shear force, coordinating with the zoned pressure of the polishing head to improve the spatial consistency of the material removal rate (MRR) on the wafer surface and reduce the total thickness deviation (TTV) by more than 50%.

[0039] The polishing disc is mounted on the base via a fixed support and two movable supports arranged in an equilateral triangular pattern. The movable supports can extend and retract, thereby adjusting the tilt of the polishing disc. The movable supports can also push the support base up and down, enabling fine-tuning of the polishing disc's tilt and ensuring balanced force distribution across all areas of the wafer. Through the coordinated operation of the two movable supports, the polishing disc can be adjusted to any tilt angle.

[0040] This application, by incorporating a servo motor, enables high-precision control of the lead screw, thereby achieving precise adjustment of the support base 9 and allowing it to move accurately in the axial direction. This effectively controls the TTV value during silicon wafer grinding, improving processing accuracy and yield. Simultaneously, the inclusion of a detection component limits the stroke of the support base, preventing overtravel and ensuring safe and reliable equipment operation. This reduces human error and enhances the overall process stability and efficiency. This utility model's automatic TTV adjustment mechanism for hard material grinding is compact, small in size, easy to install, highly accurate, effective, and safe.

[0041] The above description is only a preferred embodiment of the present utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of the present utility model, and these improvements and modifications should also be considered within the protection scope of the present utility model.

Claims

1. An automatic adjustment mechanism for grinding TTV of hard materials, characterized in that, include: A servo motor, wherein the head and tail of the servo motor have a first output terminal and a second output terminal, respectively; Mounting base, fixed to the head of the servo motor, the mounting base has a shaft hole coaxial with the servo motor and mounting hole I for connecting to the grinding machine; The first lead screw is installed at the first output end of the servo motor and passes through the mounting base; A support base is threadedly connected to the end of the first lead screw, and the support base is provided with mounting hole II; The detection component includes a mounting bracket, a second lead screw, and a limit slider. The mounting bracket is fixed to the tail of the servo motor. The second lead screw is installed at the second output end of the servo motor and is threadedly connected to the limit slider that slides on the mounting bracket. The mounting bracket is provided with a limit switch that can be triggered by the limit slider. There are at least two limit switches and they are set at the two extreme positions of the limit slider.

2. The automatic TTV adjustment mechanism for grinding hard materials as described in claim 1, characterized in that: The first lead screw includes a first rod body and a second rod body that are coaxially arranged and connected to each other. The first rod body is rotatably mounted on the mounting base and connected to the first output end of the servo motor. The side wall of the second rod body is provided with external threads and forms a lead screw body that is threadedly connected to the support base.

3. The automatic TTV adjustment mechanism for grinding hard materials as described in claim 2, characterized in that: The first rod body has a first stepped surface facing the servo motor on its side wall, and the mounting base has a second stepped surface. The second stepped surface contacts the first stepped surface and provides axial support.

4. The automatic TTV adjustment mechanism for grinding hard materials as described in claim 1, characterized in that: The first lead screw is connected to the first output end of the servo motor via a flexible coupling.

5. The automatic TTV adjustment mechanism for grinding hard materials as described in claim 4, characterized in that: The mounting base includes a base body I and a base body II arranged in parallel and connected to each other. There is a gap between the base body I and the base body II to form a mounting area. The side wall of the mounting area is provided with a mounting window, and the flexible coupling is disposed in the mounting area.

6. The automatic TTV adjustment mechanism for grinding hard materials as described in claim 1, characterized in that: The mounting bracket has a mounting surface on its side wall, and the limit switch is mounted on the mounting surface.

7. The automatic TTV adjustment mechanism for grinding hard materials as described in claim 1, characterized in that: The limit switch is a through-beam inductive switch.

8. The automatic TTV adjustment mechanism for grinding hard materials as described in claim 1, characterized in that: The head of the limiting slider is provided with a contact rod that can trigger the limiting switch, the tail of the limiting slider is provided with a positioning mark, and the side wall of the mounting bracket is provided with scale markings.

9. The automatic TTV adjustment mechanism for grinding hard materials as described in claim 1, characterized in that: The pitch of the second lead screw is greater than the pitch of the first lead screw.

10. A polishing disc for a hard material grinding machine, characterized in that: It includes a fixed support and two movable supports arranged in a triangular pattern, wherein the movable supports are provided with an automatic TTV adjustment mechanism for grinding hard materials as described in any one of claims 1-9.

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