Jig

Abstract

A tool for mounting and dismounting a lower bushing of an epitaxial device, comprising: a main frame, a plurality of telescopic members and a plurality of linkage members; the main frame has a first support part and a second support part oppositely arranged along a first direction, and has a limiting space between the first support part and the second support part for limiting the lower bushing; the plurality of telescopic members are arranged at intervals around the second support part along the first direction, and each telescopic member can be telescoped along a different second direction, the first direction being perpendicular to the second direction; one end of each linkage member is connected with one telescopic member, and the other end is slidingly connected with the main frame; the first support part is provided with a connecting part for connecting with an external lifting device. The present application can avoid the lower bushing from shaking during the mounting process, ensure that the lower bushing in the limiting space always maintains a stable posture during the mounting process, reduce the risk of jam caused by horizontal deviation from the root, improve the mounting stability, and reduce the probability of the lower bushing being broken.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, and more specifically to a fixture. Background Technology

[0002] In atmospheric pressure epitaxial growth equipment in the semiconductor industry, the cavity typically includes a low liner, and its installation is a crucial step in the equipment assembly and maintenance process.

[0003] Currently, the installation of lower bushings in the industry is mostly done manually. This means that the operator manually places the lower bushing into the corresponding position in the equipment cavity (usually connected to the flange), and relies on experience to control the installation angle and force to complete the assembly.

[0004] However, due to the deep installation location of the lower bushing, it is difficult to accurately ensure its horizontal position during manual installation, and uneven force is prone to occur, causing the lower bushing to easily get stuck with the internal structure of the cavity during insertion. This sticking not only hinders the installation process, but may also cause the quartz material of the lower bushing to break due to forced operation or impact, leading to equipment downtime, parts replacement, and other problems, resulting in significant time and economic losses. Utility Model Content

[0005] The utility model description section introduces a series of simplified concepts, which will be further explained in detail in the detailed description section. This utility model description section is not intended to limit the key features and essential technical features of the claimed technical solution, nor is it intended to determine the scope of protection of the claimed technical solution.

[0006] To address the existing problems, this utility model provides a fixture for loading and unloading the lower bushing of an extension device. The fixture includes a main frame, multiple telescopic components, and multiple linkage components.

[0007] The main frame has a first support portion and a second support portion arranged opposite to each other along a first direction, and there is a limiting space between the first support portion and the second support portion for limiting the lower bushing.

[0008] Multiple retractable members are spaced apart on the second support portion around the first direction, and each retractable member can extend and retract along a different second direction, wherein the first direction is perpendicular to the second direction;

[0009] One end of each linkage component is connected to one of the telescopic components, and the other end is slidably connected to the main frame.

[0010] The first support portion is provided with a connecting portion for connection with an external lifting device. The fixture is configured such that, when it moves along the first direction under the drive of the external lifting device, the telescopic member is slidably driven by the linkage to retract along its second direction, so that the second support portion passes through the lower bushing; and / or, after the second support portion passes through the lower bushing, the telescopic member is slidably driven by the linkage to extend along its second direction, so that the telescopic member carries the lower bushing and confines the lower bushing within the confining space; and / or, after the lower bushing is confined within the confining space, it can be driven by the external lifting device to move the lower bushing to the installation position of the extension equipment.

[0011] In some embodiments of this application, the first support portion is provided with a plurality of grooves spaced apart around the first direction, each groove extending along a different second direction, and each groove penetrating the first support portion;

[0012] Each of the linkage components is slidably disposed within a groove at the end furthest from the retractable component.

[0013] In some embodiments of this application, each of the linkage components includes a guide linkage part and a transmission linkage part connected together, wherein the guide linkage part extends along the first direction and the transmission linkage part extends along the second direction;

[0014] The end of the guide linkage part away from the transmission linkage part is slidably disposed in the groove, and the end of the transmission linkage part away from the guide linkage part is connected to the telescopic member.

[0015] In some embodiments of this application, each of the linkage components further includes a limiting component, which is disposed at the end of the guide linkage portion away from the transmission linkage portion, and a portion of the limiting component overlaps the first support portion outside the groove.

[0016] In some embodiments of this application, there is a gap between the transmission linkage part and the second support part.

[0017] In some embodiments of this application, each of the retractable members includes a carrier and an elastic member, the elastic member being disposed between the carrier and the second support portion, and the end of the linkage member near the second support portion being connected to the carrier.

[0018] In some embodiments of this application, the lower chamber of the extensional device has a conical inner wall, and the carrier has an arcuate outer wall that matches the conical inner wall.

[0019] In some embodiments of this application, the dimension of the first support portion in the second direction is greater than the dimension of the inner cavity of the lower bushing in the same direction; and when the telescopic member is in an extended state, the dimension of the end of the fixture with the second support portion in the second direction is greater than the dimension of the inner cavity of the lower bushing in the same direction.

[0020] In some embodiments of this application, the first support portion includes a plurality of first arms extending along different second directions, one end of the plurality of first arms being connected, and the other ends of two adjacent first arms being spaced apart.

[0021] The second support includes a plurality of second arms extending along different second directions, one end of the plurality of second arms being connected, and the other ends of two adjacent second arms being spaced apart.

[0022] In some embodiments of this application, the main frame further includes a third support portion extending along the first direction, the first support portion and the second support portion being connected through the third support portion, and a portion of the first support portion and a portion of the second support portion extending to the outer side of the outer peripheral surface of the third support portion; and / or, the connecting portion is located on the side of the first support portion away from the second support portion.

[0023] The fixture of this application can stably confine the lower bushing within a restricted space, effectively solving the problem of concentrated or uneven force during manual installation and preventing shaking of the lower bushing during installation. At the same time, by using an external lifting device to drive the fixture to move and move the lower bushing within the restricted space to the installation position of the extended equipment, it replaces manual operation and avoids horizontal imbalance caused by tactile deviation. It ensures that the lower bushing within the restricted space maintains a stable posture throughout the installation process, fundamentally reducing the risk of jamming caused by horizontal deviation, improving installation stability, and significantly reducing the probability of breakage of the lower bushing due to forced operation or impact during jamming. This reduces equipment downtime and parts replacement problems caused by lower bushing damage, shortens the installation and maintenance cycle, and reduces time loss and economic costs. Attached Figure Description

[0024] The following drawings, which are incorporated herein by reference as part of this invention, are provided for understanding the invention. The drawings illustrate embodiments of the invention and their descriptions, serving to explain the principles of the invention.

[0025] In the attached image:

[0026] Figure 1 A schematic diagram of the fixture according to a specific embodiment of the present invention is shown.

[0027] Figure 2A schematic diagram of the fixture according to a specific embodiment of the present invention is shown.

[0028] Figure 3 It shows Figure 2 A schematic diagram of the structure of region A in the middle.

[0029] Figure 4 It shows Figure 2 A schematic diagram of the structure of region B in the middle.

[0030] Figure 5 It shows Figure 2 A schematic diagram of the structure of region C in the middle.

[0031] Figure 6 A schematic diagram of the structure of the lower bushing of the epitaxial device is shown.

[0032] Figure 7 A schematic diagram shows the fixture connected to an external lifting device via a connecting part.

[0033] Figure 8 A schematic diagram shows the second support portion of the fixture passing through the lower bushing.

[0034] Figure 9 A schematic diagram showing the lower bushing confined within the restricted space of the fixture is shown.

[0035] Figure 10 A schematic diagram is shown showing the movement of the fixture and the restricted lower bushing to the installation position of the extension equipment.

[0036] Figure 11 A schematic diagram is shown showing the contact between the fixture's carrier and the lower chamber of the extension device.

[0037] Figure 12 A schematic diagram showing the removal of the fixture is shown. Detailed Implementation

[0038] In the following description, numerous specific details are set forth in order to provide a more thorough understanding of the present invention. However, it will be apparent to those skilled in the art that the present invention can be practiced without one or more of these details. In other instances, certain technical features well-known in the art have not been described in order to avoid confusion with the present invention.

[0039] It should be understood that this invention can be embodied in various forms and should not be construed as being limited to the embodiments set forth herein. Rather, providing these embodiments will make the disclosure thorough and complete, and will fully convey the scope of this invention to those skilled in the art. In the drawings, for clarity, the dimensions of layers and regions, as well as their relative dimensions, may be exaggerated. The same reference numerals denote the same elements throughout.

[0040] It should be understood that when an element or layer is referred to as "on," "adjacent to," "connected to," or "coupled to" other elements or layers, it may be directly on, adjacent to, connected to, or coupled to other elements or layers, or there may be intervening elements or layers. Conversely, when an element is referred to as "directly on," "directly adjacent to," "directly connected to," or "directly coupled to" other elements or layers, there are no intervening elements or layers. It should be understood that although the terms first, second, third, etc., may be used to describe various elements, components, areas, layers, and / or portions, these elements, components, areas, layers, and / or portions should not be limited by these terms. These terms are only used to distinguish one element, component, area, layer, or portion from another element, component, area, layer, or portion. Therefore, without departing from the teachings of this utility model, the first element, component, area, layer, or portion discussed below may be referred to as a second element, component, area, layer, or portion.

[0041] Spatial relation terms such as “below,” “under,” “below,” “under,” “above,” “above,” etc., are used herein for convenience of description to describe the relationship between one element or feature shown in the figure and other elements or features. It should be understood that, in addition to the orientation shown in the figure, spatial relation terms are intended to also include different orientations of the device in use and operation. For example, if the device in the figure is flipped, then the element or feature described as “below” or “under” the other element or feature will be oriented “above” the other element or feature. Therefore, the exemplary terms “below” and “under” can include both upper and lower orientations. The device may be otherwise oriented (rotated 90 degrees or otherwise) and the spatial descriptive terms used herein will be interpreted accordingly.

[0042] The terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the scope of the invention. When used herein, the singular forms “a,” “an,” and “the” are also intended to include the plural forms unless the context clearly indicates otherwise. It should also be understood that the terms “comprising” and / or “including,” when used in this specification, identify the presence of the stated features, integers, steps, operations, elements, and / or components, but do not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and / or groups. When used herein, the term “and / or” includes any and all combinations of the associated listed items.

[0043] To fully understand this application, detailed steps and structures will be presented in the following description to illustrate the technical solutions proposed in this application. Preferred embodiments of this application are described in detail below; however, in addition to these detailed descriptions, this application may have other implementation methods.

[0044] The following is for reference. Figures 1-12 This application describes a jig 100 according to one embodiment. The jig 100 is used for loading and unloading the lower bushing 300 of an extension device. The jig 100 includes a main frame, a plurality of telescopic members 120, and a plurality of linkage members 130.

[0045] The main frame has a first support portion and a second support portion arranged opposite to each other along a first direction, and there is a limiting space between the first support portion and the second support portion for limiting the lower bushing 300;

[0046] Multiple telescopic members 120 are spaced apart on the second support part around the first direction, and each telescopic member 120 can extend and retract along different second directions, with the first direction being perpendicular to the second direction;

[0047] One end of each linkage 130 is connected to a telescopic component 120, and the other end is slidably connected to the main frame.

[0048] The first support portion is provided with a connecting portion 114 for connecting with the external lifting device 200. The fixture 100 is configured such that when it moves along the first direction under the drive of the external lifting device 200, the telescopic member 120 is slidably driven by the linkage member 130 to retract along its second direction, so that the second support portion passes through the lower bushing 300; and / or, after the second support portion passes through the lower bushing 300, the telescopic member 120 is slidably driven by the linkage member 130 to extend along its second direction, so that the telescopic member 120 carries the lower bushing 300 and restricts the lower bushing 300 within the restricted space; and / or, after the lower bushing 300 is restricted within the restricted space, it can be driven by the external lifting device 200 to move the lower bushing 300 within the restricted space to the installation position 410 of the extension equipment.

[0049] Specifically, such as Figures 7-10 As shown, the specific installation process of the lower bushing 300 can be as follows:

[0050] First, such as Figure 7 As shown, in the initial state of the fixture 100, the first support part of the fixture 100 is connected to the external lifting device 200 through the connecting part 114; at this time, the linkage 130 can drive the telescopic part 120 to retract in the second direction, so that the size of the second support part of the fixture 100 is adapted to the internal cavity of the lower bushing 300.

[0051] Next, as Figure 8 As shown, the external lifting device 200 drives the fixture 100 to move along the first direction (such as vertical descent), and simultaneously drives the second support part of the fixture 100 to move closer to the lower bushing 300; during this process, the linkage 130 and the main frame maintain relative sliding, so that the telescopic part 120 maintains the retracted state, ensuring that the second support part smoothly passes through the internal cavity of the lower bushing 300.

[0052] Subsequently, as Figure 9 As shown, after the second support part completely passes through the lower bushing 300, the telescopic part 120 is driven to extend in the second direction through the relative sliding of the linkage 130 and the main frame. After extension, the telescopic part 120 contacts the bottom of the lower bushing 300 and forms a load-bearing structure. At the same time, in conjunction with the limiting space between the first support part and the second support part, the lower bushing 300 is stably limited within the limiting space to prevent it from shifting during subsequent movement.

[0053] Finally, as Figure 10 As shown, after the lower bushing 300 is confined within the restricted space, the external lifting device 200 continues to move the fixture 100 and the confined lower bushing 300 to the installation position 410 of the extension equipment, thus completing the precise placement of the lower bushing 300.

[0054] By using the above-mentioned jig 100, at least the following technical effects can be achieved:

[0055] On the one hand, after the second support passes through the lower bushing 300, multiple telescopic members 120 extend along the second direction, which can form a uniform circumferential bearing force on the lower bushing 300. Combined with the constraint effect of the confined space, the lower bushing 300 can be stably confined within the confined space, effectively solving the problem of concentrated or uneven force during manual installation, and preventing the lower bushing 300 from shaking during installation.

[0056] On the other hand, after the lower bushing 300 is confined within the restricted space, the external lifting device 200 drives the fixture 100 to move and move the lower bushing 300 within the restricted space to the installation position 410 of the extension equipment. This replaces manual operation and avoids the horizontal imbalance caused by the deviation of the feel during manual installation. It ensures that the lower bushing 300 within the restricted space maintains a stable posture during the installation process, thereby reducing the risk of jamming caused by horizontal deviation from the source, improving installation stability, and significantly reducing the probability of breakage of the quartz lower bushing 300 due to forced operation or impact when jammed. This reduces equipment downtime and parts replacement problems caused by damage to the lower bushing 300, shortens the installation and maintenance cycle, and reduces time loss and economic costs.

[0057] In summary, by replacing manual operation with fixture 100, the stability and accuracy of the lower bushing 300 installation are improved, and the overall efficiency of epitaxial equipment assembly and maintenance is enhanced.

[0058] It should be noted that the specific disassembly process of the lower bushing 300 can be the reverse of the installation process described above, and will not be elaborated further. During the disassembly process, the lower bushing 300 can also be prevented from shaking, reducing the risk of jamming caused by horizontal offset, improving the stability of the lower bushing 300, and improving the overall efficiency of epitaxial equipment assembly and maintenance.

[0059] In some embodiments, the dimension of the first support portion in the second direction is greater than the dimension of the internal cavity of the lower bushing 300 in the same direction; and when the telescopic member 120 is in the extended state, the dimension of the end of the fixture 100 with the second support portion in the second direction is greater than the dimension of the internal cavity of the lower bushing 300 in the same direction.

[0060] The aforementioned dimensional settings ensure that when the telescopic member 120 extends and supports the lower bushing 300, the ends of the first support and the extended second support can respectively form limits from both ends of the lower bushing 300, thus cooperating with the restricted space to form a bidirectional constraint on the lower bushing 300. This constraint structure improves the stability of the lower bushing 300 within the restricted space, effectively preventing it from swaying during movement with the fixture 100, ensuring that the lower bushing 300 is always in the preset bearing position, reducing the risk of installation deviation due to positional offset, and thereby ensuring the accuracy and reliability of the installation process.

[0061] In some embodiments, such as Figure 1 As shown, the first support portion includes multiple first arms 1111 extending along different second directions, with one end of each first arm 1111 connected and the other ends of adjacent first arms 1111 spaced apart. The second support portion includes multiple second arms 1121 extending along different second directions, with one end of each second arm 1121 connected and the other ends of adjacent second arms 1121 spaced apart. The multiple first arms 1111 can be evenly distributed at equal central angles or unevenly distributed; similarly, the distribution of the second arms 1121 can be chosen to be uniformly distributed at equal central angles or unevenly distributed according to actual needs.

[0062] Multiple first arms 1111 extend along different second directions, respectively, to restrict one end of the lower bushing 300 located in the restricted space; multiple second arms 1121 extend along different second directions, respectively, to restrict the other end of the lower bushing 300 located in the restricted space. Furthermore, the distribution of multiple arms allows for a more uniform restraining force on the lower bushing 300, preventing excessive localized stress that could damage the lower bushing 300, and further enhancing the reliability of the fixture 100.

[0063] It should be noted that the structure of the first support and the second support is not limited to the above-mentioned support arm form. It can also be a complete planar structure or other structures that can achieve the function of restricting the lower bushing 300. As long as it can meet the restriction requirements of the fixture 100 on the lower bushing 300, it is within the protection scope of this application.

[0064] In some embodiments, such as Figure 1As shown, the main frame also includes a third support portion 113, which extends along a first direction. The first support portion and the second support portion are connected through the third support portion 113, and a portion of the first support portion and a portion of the second support portion extend to the outer side of the outer peripheral surface of the third support portion.

[0065] Connecting the first and second supports via the third support 113 further enhances the overall rigidity and structural stability of the main frame, ensuring the stability of their relative positions. Simultaneously, the design of extending parts of the first and second supports to the outer periphery of the third support provides ample space for mounting other functional components (such as the connecting part 114, the linkage 130, and the telescopic part 120) on the first and second supports, facilitating the optimization of the overall structural layout of the fixture for compactness and rationality. Furthermore, this extended structure allows the forces acting on the first and second supports to be more evenly transmitted and dispersed through the third support, reducing localized stress concentration and lowering the risk of structural damage.

[0066] In some embodiments, such as Figure 1 and Figure 4 As shown, the connecting part 114 is located on the side of the first support part away from the second support part.

[0067] This positioning avoids structural interference between the connecting part 114 and other components on the jig 100 facing the second support, ensuring that each component can operate independently and smoothly during operation. Simultaneously, positioning the connecting part 114 on the side of the first support away from the second support facilitates connection between the external lifting device 200 and the connecting part 114, providing convenience for the installation, movement, and overall operation of the jig 100, and helping to improve the flexibility and operational efficiency of the jig 100.

[0068] Among them, such as Figure 4 As shown, the connecting part 114 may include a pin hole 1141, or it may adopt other structural forms that can realize the connection function (such as hooks, slots, etc.). For example, when the connecting part 114 includes a pin hole 1141, a detachable connection can be achieved by the pin passing through the pin hole 1141 and the corresponding connection structure of the external lifting device 200. This connection method is simple to operate and reliable, and facilitates the quick assembly and separation of the fixture 100 and the external lifting device 200.

[0069] In some embodiments, such as Figure 1 and Figure 3As shown, the first support portion is provided with a plurality of grooves 115 spaced apart around the first direction, each groove 115 extending along a different second direction, and each groove 115 penetrating the first support portion; the end of each linkage member 130 away from the telescopic member 120 is slidably disposed in a groove 115.

[0070] The groove 115, which penetrates the first support portion, provides unobstructed space for the sliding of the linkage 130 within the groove 115, ensuring smooth movement of the linkage 130 and preventing jamming due to space constraints. Through this structure, when the linkage 130 slides along the groove 115, the groove 115 provides precise guidance for the sliding of the linkage 130, thereby driving the retractable member 120 to retract stably along the corresponding second direction. Furthermore, multiple retractable members 120 can coordinate their movements along their respective second directions.

[0071] It should be noted that the sliding fit between the linkage 130 and the first support is not limited to the above-mentioned groove 115 structure. Other equivalent sliding guide structures (such as slide rail and slider fit, guide groove and guide post fit, etc.) can also be used, as long as the linkage 130 can slide along the second direction and drive the telescopic member 120 to move synchronously. Such modifications all fall within the protection scope of this application.

[0072] For example, such as Figure 3 As shown, a groove 115 is provided on the first support arm 1111, and each first support arm 1111 is provided with a groove 115, and each groove 115 passes through the first support arm 1111 to which it is located.

[0073] In some embodiments, such as Figure 1 As shown, each linkage 130 includes a guide linkage part 131 and a transmission linkage part 132 connected together. The guide linkage part 131 extends along a first direction, and the transmission linkage part 132 extends along a second direction. The end of the guide linkage part 131 away from the transmission linkage part 132 is slidably disposed in the groove 115, and the end of the transmission linkage part 132 away from the guide linkage part 131 is connected to the telescopic member 120.

[0074] By configuring the linkage 130 as a structure in which a guide linkage 131 extending in the first direction is connected to a transmission linkage 132 extending in the second direction, the sliding of the guide linkage 131 in the groove 115 can provide stable guidance for the movement of the entire linkage 130. At the same time, the transmission linkage 132 can accurately transmit the sliding action of the guide linkage 131 to the telescopic member 120, thereby driving the telescopic member 120 to extend and retract smoothly in the second direction, ensuring the accuracy and reliability of the telescopic member 120's action.

[0075] It should be noted that the structure of the linkage 130 is not limited to the above-mentioned form consisting of the guide linkage 131 and the transmission linkage 132. Other structures that can guide along the first direction and drive the telescopic member 120 to extend and retract along the second direction can also be adopted. As long as the functional requirements of the linkage 130 are met, they are all within the protection scope of this application.

[0076] In some embodiments, such as Figure 3 As shown, each linkage 130 also includes a limiting member 133, which is disposed at the end of the guide linkage 131 away from the transmission linkage 132, and part of the limiting member 133 overlaps the first support portion outside the groove 115.

[0077] The structure of the limiting member 133 overlapping the first support portion outside the groove 115 effectively restricts the sliding of the linkage member 130, preventing the linkage member 130 from disengaging from the groove 115 and ensuring the stability of the sliding connection between the linkage member 130 and the first support portion. At the same time, this limiting method does not affect the normal sliding of the linkage member 130 within the groove 115, achieving both reliable constraint on the linkage member 130 and ensuring its operational flexibility, thus contributing to improved overall fixture reliability.

[0078] In some embodiments, such as Figure 5 As shown, there is a gap between the transmission linkage part 132 and the second support part.

[0079] The clearance provides ample space for the movement of the transmission linkage 132, preventing interference between the transmission linkage 132 and the second support during the extension and retraction of the telescopic component 120. This ensures smooth movement of the transmission linkage 132 along the second direction, thereby guaranteeing the continuity and stability of the extension and retraction of the telescopic component 120. Simultaneously, the clearance can accommodate assembly errors and minor deformations of components due to temperature changes, reducing the risk of transmission jamming caused by dimensional deviations and improving the adaptability and operational reliability of the overall fixture 100 structure.

[0080] It should be noted that the sliding of the linkage 130 relative to the main frame along the second direction can be achieved by manual drive or mechanical drive, and there is no limitation on this. For example, the end of the guide linkage 131 located in the groove 115 can be moved along the second direction by manual drive, and the action can be accurately transmitted to the telescopic member 120 through the transmission linkage 132; alternatively, the end of the guide linkage 131 located in the groove 115 can be moved along the second direction by mechanical device such as a linear motor, and the action can be accurately transmitted to the telescopic member 120 through the transmission linkage 132.

[0081] In some embodiments, such as Figure 1 and Figure 5As shown, the telescopic member 120 includes a support member 121 and an elastic member 122. The elastic member 122 is disposed between the support member 121 and the second support portion. The end of the linkage member 130 near the second support portion is connected to the support member 121.

[0082] When the linkage 130 drives the telescopic component 120 to move, the elastic component 122 provides buffering and resetting power to the bearing component 121 through its own deformation characteristics. For example, during the retraction of the telescopic component 120, the elastic component 122 deforms under the pressure of the bearing component 121 and stores elastic potential energy, reducing the hard impact on the bushing caused by the external lifting device 200 driving the lower bearing component 121 to move downward along the internal cavity of the lower bushing 300; during the extension, the elastic component 122 releases potential energy to assist the bearing component 121 in resetting, ensuring stable contact between the bearing component 121 and the lower bushing 300. This structure not only reduces the hard impact of the bearing component 121 on the lower bushing 300 through the buffering effect of the elastic component 122, but also improves the response speed and reliability of the telescopic component 120's movement by utilizing its resetting ability, further ensuring the stability of the lower bushing 300 during installation.

[0083] It should be noted that the structure of the telescopic member 120 is not limited to the above-mentioned form consisting of the bearing member 121 and the elastic member 122. Other structures that can realize the telescopic function along the second direction can also be adopted. Among them, the elastic member 122 can be a component with elastic deformation capability such as a spring, elastic rubber block or disc spring. As long as it can meet the telescopic and buffering requirements of the telescopic member 120, it is within the protection scope of this technical solution.

[0084] In some embodiments, such as Figure 11 As shown, the lower chamber 420 of the extension device has a conical inner wall, and the support member 121 has an arc-shaped outer wall that matches the conical inner wall.

[0085] After the fixture 100 carries the lower bushing 300 to the installation station 410, it is then installed in the lower chamber 420 of the epitaxial device. The arc-shaped outer wall of the carrier 121 and the conical inner wall of the lower chamber 420 of the epitaxial device can form a close fit. With the guiding characteristics of the conical structure, the lower bushing 300 can automatically calibrate its position during the contact with the lower chamber 420, ensuring that the lower bushing 300 is accurately aligned with the lower chamber 420. At the same time, the conical mating surface can disperse the bearing stress through surface contact, avoiding damage to the lower bushing 300 or the lower chamber 420 caused by excessive local stress, thus improving the stability and reliability of the installation process.

[0086] like Figure 11 and Figure 12As shown, when the lower bushing 300 is precisely aligned with the lower chamber 420 and the carrier 121 is in contact with the conical surface of the lower chamber 420, the conical inner wall of the lower chamber 420 generates a reaction force on the carrier 121, driving the telescopic component 120 to retract in the second direction; with the help of a manual or mechanical device, the linkage 130 is driven to slide in the second direction to drive the telescopic component 120 to retract further, and then the external lifting device 200 drives the fixture 100 to rise, so that the fixture 100 can be removed, leaving the lower bushing 300 in the installation position 410 and the lower chamber 420.

[0087] It should be noted that the specific structure of installation station 410 is not limited to the form of including flanges, and there are no restrictions on this.

[0088] In some embodiments, the surface of the carrier 121 facing the lower bushing 300 is a plane, which is used to support the lower bushing 300.

[0089] This plane can form surface contact with the lower bushing 300, ensuring that the load-bearing force on the lower bushing 300 is evenly distributed in the contact area. This prevents deformation or damage to the lower bushing 300 due to localized stress concentration, thus guaranteeing the structural integrity of the lower bushing 300. Simultaneously, the planar contact method enhances the relative stability between the load-bearing component 121 and the lower bushing 300, reducing the risk of displacement or swaying of the lower bushing 300 during load-bearing. This ensures that the lower bushing 300 maintains a fixed posture during transfer and installation, further improving the load-bearing reliability of the fixture 100 on the lower bushing 300.

[0090] In some embodiments, the fixture 100 may be made entirely or partially of PP material, or may be made of any other suitable material, without limitation.

[0091] In summary, the fixture according to the embodiments of this application can stably confine the lower bushing within the restricted space, effectively solving the problem of concentrated or uneven force during manual installation and preventing shaking of the lower bushing during installation. At the same time, by using an external lifting device to drive the fixture to move and move the lower bushing within the restricted space to the installation position of the extended equipment, replacing manual operation, it can avoid the horizontal imbalance caused by tactile deviation, ensuring that the lower bushing within the restricted space maintains a stable posture throughout the installation process, fundamentally reducing the risk of jamming caused by horizontal deviation, improving installation stability, and significantly reducing the probability of breakage of the lower bushing due to forced operation or impact during jamming. This reduces equipment downtime and parts replacement problems caused by damage to the lower bushing, shortens the installation and maintenance cycle, and reduces time loss and economic costs.

[0092] Although exemplary embodiments have been described herein with reference to the accompanying drawings, it should be understood that the above exemplary embodiments are merely illustrative and are not intended to limit the scope of this application. Various changes and modifications can be made therein by those skilled in the art without departing from the scope and spirit of this application. All such changes and modifications are intended to be included within the scope of this application as claimed in the appended claims.

[0093] Similarly, it should be understood that, in order to simplify this application and aid in understanding one or more aspects of the application, various features of this application may sometimes be grouped together in a single embodiment, figure, or description thereof in the description of exemplary embodiments of this application. However, this approach should not be construed as reflecting an intention that the claimed application requires more features than are expressly recited in each claim. Rather, as reflected in the corresponding claims, the point of application is that the corresponding technical problem can be solved with fewer features than all of a single disclosed embodiment. Therefore, the claims following the detailed description are hereby expressly incorporated into that detailed description, wherein each claim itself is a separate embodiment of this application.

[0094] Furthermore, those skilled in the art will understand that although some embodiments described herein include certain features but not others included in other embodiments, combinations of features from different embodiments are intended to be within the scope of this application and form different embodiments. For example, in the claims, any one of the claimed embodiments can be used in any combination.

[0095] It should be noted that the above embodiments are illustrative of this application and not limiting of it, and that those skilled in the art can devise alternative embodiments without departing from the scope of the appended claims. In the claims, any reference signs placed between parentheses should not be construed as limiting the claims. The use of the words first, second, and third, etc., does not indicate any order. These words can be interpreted as names.

Claims

1. A jig, characterized in that, The fixture for loading and unloading the lower bushing of the extension equipment includes a main frame, multiple telescopic components, and multiple linkage components. The main frame has a first support portion and a second support portion arranged opposite to each other along a first direction, and there is a limiting space between the first support portion and the second support portion for limiting the lower bushing. Multiple retractable members are spaced apart on the second support portion around the first direction, and each retractable member can extend and retract along a different second direction, wherein the first direction is perpendicular to the second direction; One end of each linkage component is connected to one of the telescopic components, and the other end is slidably connected to the main frame. The first support portion is provided with a connecting portion for connection with an external lifting device. The fixture is configured such that, when it moves along the first direction under the drive of the external lifting device, the telescopic member is slidably driven by the linkage to retract along its second direction, so that the second support portion passes through the lower bushing; and / or, after the second support portion passes through the lower bushing, the telescopic member is slidably driven by the linkage to extend along its second direction, so that the telescopic member carries the lower bushing and confines the lower bushing within the confining space; and / or, after the lower bushing is confined within the confining space, it can be driven by the external lifting device to move the lower bushing to the installation position of the extension equipment.

2. The fixture according to claim 1, characterized in that, The first support portion is provided with a plurality of grooves spaced apart around the first direction, each groove extending along a different second direction, and each groove penetrating the first support portion; Each of the linkage components is slidably disposed within a groove at the end furthest from the retractable component.

3. The fixture according to claim 2, characterized in that, Each of the linkage components includes a connected guide linkage part and a transmission linkage part, wherein the guide linkage part extends along the first direction and the transmission linkage part extends along the second direction; The end of the guide linkage part away from the transmission linkage part is slidably disposed in the groove, and the end of the transmission linkage part away from the guide linkage part is connected to the telescopic member.

4. The fixture according to claim 3, characterized in that, Each of the linkage components also includes a limiting component, which is disposed at the end of the guide linkage part away from the transmission linkage part, and part of the limiting component overlaps the first support part outside the groove.

5. The fixture according to claim 3, characterized in that, There is a gap between the transmission linkage part and the second support part.

6. The fixture according to claim 1, characterized in that, Each of the retractable components includes a carrier and an elastic component, the elastic component being disposed between the carrier and the second support portion, and the end of the linkage component near the second support portion being connected to the carrier.

7. The fixture according to claim 6, characterized in that, The lower chamber of the extension device has a conical inner wall, and the support member has an arc-shaped outer wall that matches the conical inner wall.

8. The fixture according to claim 1, characterized in that, The dimension of the first support portion in the second direction is greater than the dimension of the inner cavity of the lower bushing in the same direction; and when the telescopic member is in the extended state, the dimension of the end of the fixture with the second support portion in the second direction is greater than the dimension of the inner cavity of the lower bushing in the same direction.

9. The fixture according to claim 1, characterized in that, The first support includes a plurality of first arms extending along different second directions, one end of the plurality of first arms being connected, and the other ends of two adjacent first arms being spaced apart. The second support includes a plurality of second arms extending along different second directions, one end of the plurality of second arms being connected, and the other ends of two adjacent second arms being spaced apart.

10. The fixture according to claim 1, characterized in that, The main frame further includes a third support portion extending along the first direction, the first support portion and the second support portion being connected through the third support portion, and a portion of the first support portion and a portion of the second support portion extending to the outer side of the outer peripheral surface of the third support portion; and / or, the connecting portion is located on the side of the first support portion away from the second support portion.

Images