An arf antireflection glue mixing kettle for 365 nmi line photoresist antireflection coating

Abstract

The utility model belongs to the technical field of mixing kettle, disclose a kind of ArF antireflection glue mixing kettle for 365nmi line photoresist antireflection coating, including kettle body, kettle cover and temperature control system, further include: three-dimensional asymmetric composite stirring mechanism, three-dimensional asymmetric composite stirring mechanism includes vertically arranged and rotationally installed on kettle body main stirring shaft and by eccentric arm eccentric setting on main stirring shaft sub stirring shaft, main stirring shaft is provided with inclined vane turbine paddle and double helical belt type paddle, sub stirring shaft is equipped with flexible scraper, main stirring shaft is driven by driving part, kettle body's bottom is equipped with discharge pipe, kettle cover's top is equipped with feed pipe. The utility model is by inclined vane turbine paddle radial dispersion, double helical belt type paddle axial circulation and flexible scraper dynamic clear wall composition's three-dimensional asymmetric composite stirring mechanism, realize whole kettle dead angle mixing, ensure that high viscosity antireflection glue component distribution is uniform, directly promote coating optical uniformity and antireflection performance stability.

Description

Technical Field

[0001] This utility model relates to the field of mixing reactor technology, and in particular to an ArF antireflective adhesive mixing reactor for 365nm line photoresist antireflective coating. Background Technology

[0002] In semiconductor photolithography, an anti-reflective coating (BARC) is applied under the photoresist to suppress reflection and improve the accuracy of pattern transfer. The anti-reflective coating used in ArF (193nm) photoresist is usually composed of a variety of high-viscosity, high-solids-content organic polymers, crosslinking agents, catalysts and solvents. These components differ significantly in physical properties (such as density and viscosity), and the mixing process is extremely sensitive to shear force and thermal history.

[0003] Existing mixing reactors mostly use a single stirring paddle (such as anchor type or spiral type) with jacket heating. In actual production of ArF anti-reflective coating materials for 365nm line photoresist, the existing technology has the following problems: 1) Uneven mixing and dead zone problem: High viscosity materials are prone to forming stagnation areas (dead zones) on the reactor wall, reactor bottom and around the stirring shaft, resulting in component separation or excessively high local concentration, which affects the optical uniformity and anti-reflective performance of the coating.

[0004] 2) Difficulty in cleaning and maintenance: The complex internal structure makes it very difficult to clean residual materials, which not only wastes materials, but more seriously, cross-contamination between different batches of products is easy to occur. Therefore, we propose an ArF anti-reflective adhesive mixing vessel for 365nm line photoresist anti-reflective coating. Utility Model Content

[0005] In view of the problems of uneven mixing, dead zones, and difficulties in cleaning and maintenance in the existing mixing tanks, this utility model is proposed.

[0006] To solve the above-mentioned technical problems, this utility model provides the following technical solution: An ArF antireflective coating mixing vessel for 365nm line photoresist antireflective coating includes a vessel body, a vessel lid, and a temperature control system, and further includes: A three-dimensional asymmetric composite stirring mechanism includes a main stirring shaft that is vertically arranged and rotatably mounted on the vessel body, and a secondary stirring shaft that is eccentrically arranged on the main stirring shaft via an eccentric arm. The main stirring shaft is equipped with an inclined blade turbine propeller and a double-line spiral belt propeller, and the secondary stirring shaft is equipped with a flexible scraper. The main stirring shaft is driven by a driving component.

[0007] As a technical solution of the ArF antireflective adhesive mixing vessel for 365nm line photoresist antireflective coating described in this utility model, wherein: a discharge pipe is installed at the bottom of the vessel body and a feed pipe is installed at the top of the vessel lid.

[0008] As a technical solution of the ArF antireflective coating for 365nm line photoresist, the present invention provides a mixing vessel for the mixing of antireflective coatings, wherein: the inclined blade turbine propeller is located at the upper part of the main stirring shaft, and the double-line spiral ribbon propeller is located at the lower part of the main stirring shaft.

[0009] As a technical solution of the ArF antireflective coating for 365nm line photoresist, the flexible scraper is made of flexible polymer material, and the edge of the flexible scraper is in dynamic close contact with the vessel wall.

[0010] As a technical solution of the ArF antireflective adhesive mixing vessel for 365nm line photoresist antireflective coating described in this utility model, the driving component includes a variable frequency motor, which is mounted on the vessel cover and is connected to one end of the main stirring shaft through a reducer.

[0011] As a technical solution of the ArF antireflective adhesive mixing vessel for 365nm line photoresist antireflective coating described in this utility model, the vessel lid is provided with an integrated online viscometer sensor interface and a temperature sensor interface.

[0012] Compared with the prior art, the present invention has at least the following beneficial effects: 1. This utility model achieves full-bottle mixing without dead angles by using a three-dimensional asymmetric composite stirring mechanism consisting of radial dispersion by inclined blade turbine propeller, axial circulation by double-line spiral belt propeller, and dynamic wall cleaning by flexible scraper, ensuring uniform distribution of high-viscosity anti-reflective adhesive components and directly improving the optical uniformity and anti-reflective performance stability of the coating.

[0013] 2. This utility model achieves efficient self-cleaning capability by combining the flexible scraper dynamic wall-adhering design with the low-position discharge structure, reducing residual materials. In addition, with the online sensor interface, the process status can be monitored in real time, avoiding batch-to-batch contamination from the source, ensuring product purity and reducing cleaning and maintenance costs. Attached Figure Description

[0014] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort. Among them: Figure 1 This is a schematic diagram of the main structure of this utility model.

[0015] Figure 2 This is a cross-sectional structural diagram of the present invention.

[0016] Figure 3 For the present utility model Figure 2 Enlarged structural diagram at point A in the middle.

[0017] Figure 4 This is a schematic diagram of the three-dimensional asymmetric composite stirring mechanism of this utility model.

[0018] Explanation of reference numerals in the attached figures: In the diagram: 1. Reactor body; 101. Discharge pipe; 2. Reactor lid; 201. Feed pipe; 202. Online viscometer sensor interface; 203. Temperature sensor interface; 301. Main stirring shaft; 302. Inclined blade turbine propeller; 303. Double-line spiral ribbon propeller; 304. Eccentric arm; 305. Secondary stirring shaft; 306. Flexible scraper; 307. Variable frequency motor. Detailed Implementation

[0019] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings.

[0020] Reference Figures 1-4 This invention provides an ArF antireflective coating mixing vessel for 365nm line photoresist antireflective coating. The vessel includes a vessel body 1, a vessel lid 2, and a temperature control system. The temperature control system is existing technology, with a jacket circulating heat transfer oil, a temperature control accuracy of ±1℃, and a temperature range of 20-80℃. It also includes: A three-dimensional asymmetric composite stirring mechanism includes a main stirring shaft 301 vertically mounted and rotatably installed on the vessel body 1, and a secondary stirring shaft 305 eccentrically mounted on the main stirring shaft 301 via an eccentric arm 304. The main stirring shaft 301 is equipped with an inclined blade turbine propeller 302 and a double-line spiral ribbon propeller 303, while the secondary stirring shaft 305 is equipped with a flexible scraper 306. The main stirring shaft 301 is driven by a drive component. In application, by setting up a three-dimensional asymmetric composite stirring mechanism, the inclined blade turbine propeller 302 provides strong radial flow, efficiently disperses materials, and avoids local concentration unevenness. The double-line spiral ribbon propeller 303 generates axial circulating flow, eliminates stagnation zones at the bottom / top of the vessel, and improves overall mixing uniformity. The eccentric secondary stirring shaft 305, in conjunction with the flexible scraper 306, dynamically scrapes off the deposits on the vessel wall, solving the problem of high-viscosity material residue and reducing dead zones. The three work together to significantly improve the mixing efficiency of high-viscosity antireflective adhesive.

[0021] Reference Figure 1 and Figure 2 The bottom of the vessel body 1 is equipped with a connected discharge pipe 101, which is equipped with a bottom ball valve and has a polished inner wall with Ra≤0.4μm. The top of the vessel cover 2 is equipped with a connected feed pipe 201. In application, the discharge pipe 101 is designed at a low position to reduce residue at the bottom of the vessel and reduce material waste. The feed pipe 201 is designed at the top to avoid interference with the stirring flow field when adding materials and to ensure batch consistency.

[0022] Reference Figure 2 and Figure 4 The inclined blade turbine 302 is located above the main stirring shaft 301. The blade inclination angle of the inclined blade turbine 302 is 45°-60°, and its diameter accounts for 1 / 3 of the diameter of the vessel body 1. It is used for high shear dispersion. The double-line spiral ribbon impeller 303 is located below the main stirring shaft 301. The pitch of the double-line spiral ribbon impeller 303 is matched with the height of the vessel body 1 to ensure that the material circulates from the bottom to the top. In application, the inclined blade turbine 302 is above and the double-line spiral ribbon impeller 303 is below. Under the synergistic effect of layering, the upper part disperses and the bottom part lifts, eliminating the axial concentration gradient.

[0023] Reference Figure 2 and Figure 3 The flexible scraper 306 is made of flexible polymer material (optional polytetrafluoroethylene or silicone rubber), and the edge of the flexible scraper 306 maintains dynamic close contact with the vessel wall of the vessel body 1. The gap between the edge of the flexible scraper 306 and the vessel wall of the vessel body 1 is ≤1mm. In application, the polymer material and dynamic wall-adhering design avoid hard scraping damage to the vessel wall, while tightly removing residues and reducing the risk of cross-contamination.

[0024] Reference Figure 2 and Figure 4The driving component includes a variable frequency motor 307. The power of the variable frequency motor 307 is selected according to the volume, usually 5-20kW, and the speed range is adjustable from 0-200rpm. The variable frequency motor 307 is installed on the lid 2. The variable frequency motor 307 is connected to one end of the main stirring shaft 301 through a reducer. In application, the variable frequency motor 307 drives stepless speed regulation to adapt to the mixing requirements of materials with different viscosities, while optimizing energy consumption and process flexibility.

[0025] Reference Figures 1-4 The lid 2 is equipped with an integrated online viscometer sensor interface 202 and a temperature sensor interface 203. The online viscometer (such as a vibration type) and the PT100 temperature sensor are integrated through the online viscometer sensor interface 202 and the temperature sensor interface 203, and the data is fed back to the external PLC controller. In application, the integrated sensor interface can provide real-time feedback on the material status, accurately control process parameters, and ensure the consistency of the coating optical performance.

[0026] The working principle of this utility model is as follows: Preparation stage: Before starting, use a high-purity solvent (such as PGMEA) to circulate and clean, remove the residue by the flexible scraper 306, and then use the calibrated viscometer and temperature sensor zero point to confirm that the stepless speed regulation function of the variable frequency motor 307 is normal. Feeding and temperature control stage: Add resin, photoacid, solvent, etc. (viscosity is usually 500-2000 cP) through feed pipe 201 in the order of the formula. Then start the jacket heating of the temperature control system to raise the temperature to 30-40℃ (depending on the formula requirements) to reduce solvent evaporation. During the mixing stage: at low speed, the variable frequency motor 307 is set to 50 rpm, and the double-line spiral belt paddle 303 lifts the material at the bottom to prevent sedimentation. At medium speed, it is adjusted to 100 rpm, and the inclined blade turbine paddle 302 enhances dispersion. The eccentric rotation of the secondary shaft drives the flexible scraper 306 to remove the adhering substances on the wall. When changing speed, the speed is dynamically adjusted according to the online viscometer data (such as reducing the speed to prevent overheating when the viscosity increases). Real-time monitoring and discharge stage: When the viscosity fluctuation is <±5% and the temperature is stable, it is determined that the mixture is uniform (usually 1-3 hours). Then, the ball valve on the bottom discharge pipe 101 is opened, and the material is discharged by the axial thrust of the double-line spiral ribbon paddle 303, with a residual amount of <0.5%. Cleaning and maintenance stage: After injecting the cleaning solvent, run at 80-120 rpm for a period of time (e.g., 10 minutes) to thoroughly remove the residue from the wall surface using the flexible scraper 306.

[0027] It should be noted that the above embodiments are only used to illustrate the technical solution of this utility model and are not intended to limit it. Although this utility model has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solution of this utility model without departing from the spirit and scope of the technical solution of this utility model, and all such modifications or substitutions should be covered within the scope of the claims of this utility model.

Claims

1. An ArF antireflective coating mixing vessel for 365nm line photoresist antireflective coating, comprising a vessel body (1), a vessel lid (2), and a temperature control system, characterized in that: Also includes: A three-dimensional asymmetric composite stirring mechanism includes a main stirring shaft (301) vertically arranged and rotatably mounted on the vessel body (1) and a secondary stirring shaft (305) eccentrically arranged on the main stirring shaft (301) via an eccentric arm (304). The main stirring shaft (301) is provided with a slanted blade turbine propeller (302) and a double-line spiral ribbon propeller (303). The secondary stirring shaft (305) is equipped with a flexible scraper (306). The main stirring shaft (301) is driven by a driving component.

2. The ArF antireflective coating mixing vessel for 365nm line photoresist antireflective coating according to claim 1, characterized in that: The bottom of the vessel body (1) is equipped with a connected discharge pipe (101), and the top of the vessel cover (2) is equipped with a connected feed pipe (201).

3. The ArF antireflective coating mixing vessel for 365nm line photoresist antireflective coating according to claim 1, characterized in that: The oblique blade turbine propeller (302) is located at the upper part of the main stirring shaft (301), and the double-line spiral ribbon propeller (303) is located at the lower part of the main stirring shaft (301).

4. The ArF antireflective coating mixing vessel for 365nm line photoresist antireflective coating according to claim 1, characterized in that: The flexible scraper (306) is made of flexible polymer material, and the edge of the flexible scraper (306) is in dynamic close contact with the vessel wall of the vessel body (1).

5. The ArF antireflective coating mixing vessel for 365nm line photoresist antireflective coating according to claim 1, characterized in that: The driving component includes a variable frequency motor (307), which is mounted on the kettle cover (2). The variable frequency motor (307) is connected to one end of the main stirring shaft (301) via a reducer.

6. The ArF antireflective coating mixing vessel for 365nm line photoresist antireflective coating according to any one of claims 1-5, characterized in that: The lid (2) is equipped with an integrated online viscometer sensor interface (202) and a temperature sensor interface (203).

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