A high durability pneumatic diaphragm valve ptfe diaphragm

Abstract

The utility model relates to the technical field of semiconductor manufacturing equipment, specifically discloses a kind of high durability pneumatic diaphragm valve ptfe diaphragm, including valve body, diaphragm and sealing valve cover;The top of the valve body is equipped with mounting groove;The diaphragm is arranged in mounting groove, the diaphragm is made of PTFE material, and on its axial section, the deformation end of the diaphragm has inverted V-shaped structure consisting of convex double circular arc;The lower part of the sealing valve cover is pressed into mounting groove, the bottom of the sealing valve cover is equipped with cavity, the cavity is opposite with the deformation end of diaphragm, and provides movement space for the bidirectional deformation of the deformation end;The diaphragm avoids fatigue rupture by bidirectional deformation structure, double static sealing and self-adapting dynamic sealing prevent leakage, and the optimized thickness and cavity design guarantee response speed and deformation smoothness, can improve the durability and reliability of pneumatic diaphragm valve in semiconductor wet process, applicable to ultrapure, strong corrosive chemical conveying scene.

Claims

1. A high-durability pneumatic diaphragm valve PTFE diaphragm, characterized in that, It includes a valve body (1), a diaphragm (2), and a sealing valve cover (3); The valve body (1) has a mounting groove (4) on its top; The diaphragm (2) is disposed in the mounting groove (4). The diaphragm (2) is made of PTFE material, and on its axial cross section, the deformed end of the diaphragm (2) has an inverted V-shaped structure composed of protruding double arcs. The lower part of the sealing valve cover (3) is pressed into the mounting groove (4) and the edge of the diaphragm (2) is pressed and fixed. The part of the sealing valve cover (3) located in the mounting groove (4) is provided with an annular groove (5). An O-ring (6) is provided in the annular groove (5). The O-ring (6) is interference-fitted with the inner wall of the mounting groove (4). The bottom of the sealing valve cover (3) is provided with a cavity (7), which is opposite to the deformable end of the diaphragm (2) and provides a movement space for the bidirectional deformation of the deformable end.

2. The high-durability pneumatic diaphragm valve PTFE diaphragm according to claim 1, characterized in that: The thickness of the deformed end of the diaphragm (2) in the axial section is 0.1 mm to 0.5 mm.

3. The high-durability pneumatic diaphragm valve PTFE diaphragm according to claim 2, characterized in that: The thickness of the deformed end of the diaphragm (2) in the axial section is 0.35 mm.

4. The high-durability pneumatic diaphragm valve PTFE diaphragm according to claim 1, characterized in that: The edge of the diaphragm (2) is provided with an upwardly protruding sealing lip, which is pressed between the bottom surface of the mounting groove (4) of the valve body (1) and the sealing valve cover (3).

5. The high-durability pneumatic diaphragm valve PTFE diaphragm according to claim 1, characterized in that: The O-ring (6) is made of fluororubber or perfluoroether rubber.

6. The high-durability pneumatic diaphragm valve PTFE diaphragm according to claim 1, characterized in that: On the axial cross section of the diaphragm (2), a sealing arc surface is provided at its bottom end. When the valve is closed, the sealing arc surface first forms a line contact with the valve seat, and then changes to a surface contact as the pressure increases.

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