A self-positioning fan-shaped anode CNC integrated machining tooling

Abstract

This utility model discloses a self-positioning fan-shaped anode CNC integrated machining fixture, including an operating table, a first positioning component, and a second positioning component. The operating table has a central hole. The first and second positioning components have fan-shaped ring bases with central angles of 120° and 90° respectively, integrally formed with the operating table. Each positioning component has concentrically distributed fan-shaped ring support surfaces, symmetrically distributed positioning through holes, and limiting posts. The positioning through holes are concentric with the central hole, and the limiting posts maintain a preset center distance from the central hole. This utility model reduces assembly errors, uses stainless steel material and high-precision surface treatment to ensure stability, utilizes alloy steel limiting posts to enhance load-bearing capacity, and combines the central hole, positioning through holes, and limiting posts to form a three-level positioning reference system. This enables multi-size anodes to be clamped in one operation for integrated milling, drilling, and other processes, resulting in high assembly accuracy, effectively shortening clamping time, and improving processing efficiency and product yield.

Description

Technical Field

[0001] This utility model relates to the field of machining technology, and in particular to a self-positioning fan-shaped anode CNC integrated machining tooling. Background Technology

[0002] Wafer-Level Packaging (WLP) integrates high-density interconnects and 3D stacking technology at the wafer level, breaking through the physical limits of traditional processes. It shortens signal paths and reduces power consumption, becoming a key manufacturing technology supporting the development of integrated circuits towards higher precision and density. In WLP, the electroplating process precisely deposits metal ions from the anode onto the wafer surface of the cathode, a core process for achieving electrical connectivity, high reliability, and heat dissipation in packaging technology. The processing precision of the anode sheet is crucial to the quality of the wafer surface plating, including thickness and uniformity. Compared to rectangular anodes, fan-shaped / circular anodes for integrated circuits better match the wafer contour, reducing ineffective plating areas and minimizing the waste of precious metals, thereby improving material utilization. Furthermore, compared to circular anodes, fan-shaped anodes allow for more uniform current distribution on the anode surface during electroplating through regionally refined electric field control, reducing the "edge effect" caused by electric field concentration at the wafer edges, avoiding excessively thick or thin plating layers, and adapting to large-size wafers (such as 12-inch wafers) and high-density interconnects, meeting the sub-micron precision requirements of advanced packaging.

[0003] Traditional anodizing typically employs a three-jaw chuck fixture system, using multiple sets of fixtures to meet the processing requirements of different steps. Specifically, operators must repeatedly disassemble and assemble separate fixtures with threaded positioning holes according to different anodizing needs such as milling, drilling, and groove machining, and perform tool setting again after each change of fixture. This clamping method has the following problems: First, frequent fixture changes cause mechanical damage such as scratches and indentations on the contact surface between the anode surface and the fixture, leading to a decrease in product yield. Second, repeated positioning across multiple steps results in large cumulative errors, severely affecting the accuracy of critical dimensions such as hole concentricity, leading to secondary finishing and significantly reducing production efficiency. Third, the limited functionality of the fixtures makes it difficult to meet the complex requirements of anodizing processes. Furthermore, when handling high-precision anodizing, existing technologies also face problems such as cutting chatter due to insufficient rigidity of the clamping system and loss of form and position tolerance control caused by multiple references, which have become key bottlenecks restricting the improvement of efficiency and quality in anodizing for integrated circuits. Utility Model Content

[0004] To address the series of problems in the prior art, this utility model provides a self-positioning sector-shaped anode CNC integrated machining fixture, which has the following structure:

[0005] The main body of the tooling includes an operating table, a first positioning component and a second positioning component in the shape of a fan-ring boss; the operating table has a central hole at its center, and the first and second positioning components are integrally formed with the operating table and are concentrically distributed on the upper surface of the operating table with the center of the central hole as the reference; the first and second positioning components have the same height; the central angle of the fan-ring of the first positioning component and the central angle of the fan-ring of the second positioning component are both equal to 360° / N, where N is an integer, and the central angle of the fan-ring of the first positioning component is larger than that of the second positioning component; the first positioning component... Both the first and second positioning components have two symmetrically distributed positioning through holes on their fan-ring support surfaces, each equidistant from the center of the central hole. These positioning through holes are aligned with the mounting holes on the anode to be processed. The first and second positioning components also have two symmetrically distributed limiting posts of equal height and equidistant from the center of the central hole on their fan-ring support surfaces. These limiting posts are clearance-fitted with the countersunk holes on the anode to be processed, and the height of the limiting posts is less than the thickness of the anode product at the corresponding position. The distance between the center of the limiting post and the center of the central hole is greater than the distance between the center of the positioning through hole and the center of the central hole on the same positioning component.

[0006] Furthermore, the central angle of the fan ring of the first positioning member is 120°, and the central angle of the fan ring of the second positioning member is 90°.

[0007] Furthermore, the angle between the two limiting posts of the first positioning member and the center of the central hole is 90°.

[0008] Furthermore, the angle between the two limiting posts of the second positioning member and the center of the central hole is 60°.

[0009] Furthermore, it also includes a third positioning component in the shape of a fan-ring boss integrally formed with the upper surface of the operating table. The central angle of the fan-ring of the third positioning component is 90° or 120°. The third positioning component is concentrically distributed with the first and second positioning components with the center hole as the reference. There are two symmetrically distributed positioning through holes on the fan-ring surface of the third positioning component, which are equidistant from the center hole. The positioning through holes are aligned and fitted with the anode mounting holes to be processed on the third positioning component. There are also two symmetrically distributed limiting posts on the fan-ring surface of the third positioning component, which are equidistant from the center hole. The limiting posts are clearance fitted with the countersunk holes of the anode to be processed on the third positioning component, and the height of the limiting posts is less than the thickness of the anode product at the corresponding position.

[0010] Furthermore, the limiting post is internally machined with M8 socket head cap screw threads, and the limiting post is made of 12.9 grade alloy steel with a tensile strength ≥1220MPa.

[0011] Furthermore, the operating table and positioning components are both made of stainless steel, with a surface roughness ≤1.0μm and a flatness accuracy ≤0.001mm.

[0012] Furthermore, the operating table is square or circular, and its thickness is 30-70mm. The operating table is fixed to the lathe by high-strength bolts.

[0013] Furthermore, the side length or diameter of the operating table is 500mm, and the diameter of the central hole is 30mm.

[0014] The beneficial effects of this utility model are as follows: the positioning component and the operating table are integrally formed, reducing assembly errors compared to traditional separate tooling processing; the different size design of multiple loading stations is applicable to the processing of various specifications of fan-shaped anodes; positioning is achieved using the anode's own mounting holes, reducing additional limiting mechanisms and simplifying the disassembly and assembly process; a preset three-level positioning reference system achieves complete constraint of the workpiece's six degrees of freedom, and the preset positioning center can improve clamping and positioning accuracy, eliminate repeated positioning between processes, and simplify the changeover process; the fan-ring station matches the anode shape, which is beneficial for CNC integrated machining. This device can realize one-time clamping for multi-process integrated machining of anodes, eliminating the need for repeated tool setting operations, thus improving processing efficiency and accuracy. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the tooling structure of Embodiment 1 of this utility model;

[0016] Figure 2 This is a schematic diagram of the tooling structure of Embodiment 2 of this utility model;

[0017] Reference numerals: 1. Operating table; 11. Center hole; 2. First positioning element; 21. First arc; 22. Second arc; 23. Positioning through hole; 24. Limiting post of the first positioning element; 3. Second positioning element; 31. Limiting post of the second positioning element; 4. Third positioning element; 41. Limiting post of the third positioning element. Detailed Implementation

[0018] To make the technical problems solved by this utility model, the technical solutions adopted, and the technical effects achieved clearer, the technical solutions of the embodiments of this utility model will be further described in detail below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0019] Example 1

[0020] This utility model discloses a self-positioning CNC integrated machining fixture for a sector-shaped anode. The main body consists of an operating table 1, a first positioning component 2 (sector-ring protrusion), and a second positioning component 3. The operating table 1 is a square base made of stainless steel, with a side length of 500mm and a thickness of 30mm. A 30mm diameter central hole 11 is machined in the center of the operating table 1. The first positioning component 2 and the second positioning component 3 are concentrically distributed on the upper surface of the operating table 1, with the center of the central hole 11 as the reference. The central hole 11 serves as the primary positioning reference, achieving precise alignment through coaxial positioning with the anode center, with a coaxiality error not exceeding 0.02mm. The first positioning component 2 and the second positioning component 3 each have sector-ring bases with central angles of 120° and 90°, respectively, and are integrally formed with the operating table 1. Both positioning components are made of stainless steel, with a surface roughness of less than or equal to 1.0μm and a flatness accuracy of less than or equal to 0.001mm, for high-precision contact with the anode contact surface. Each positioning component 2 has a fan-shaped ring support surface composed of a first arc 21 and a second arc 22, which are concentrically distributed with the central hole 11 as the center, forming a positioning area with adjustable width. The thickness of the fan-shaped ring boss of the two positioning components (based on the operating table) is 10mm, and the radius of the outer ring of the fan-shaped ring is 150mm.

[0021] In the structural design of the positioning components, the first positioning component 2 is symmetrically provided with two positioning through holes 23, each with an angle of 30° to the center of the central hole. The center of each hole is 80mm away from the center of the central hole 11. The positioning through holes 23 have the same diameter as the anode mounting holes and their centers coincide, allowing for fastening by bolts passing through from the back of the operating table and matching the anode mounting holes. Simultaneously, two limiting posts 24, each with an angle of 90° to the center of the central hole, are symmetrically distributed around the central hole 11 at a distance of 110mm to accommodate anode countersunk holes of different sector radii. The limiting posts 24 are made of 12.9 grade alloy steel, internally machined with M8 socket head cap screw threads, and have a tensile strength ≥1220MPa, capable of withstanding axial loads of 5kN or more. The height of the limiting posts is 6mm, 15mm, or 20mm, allowing for radial positioning with the anode countersunk holes while being smaller than the anode thickness to avoid interference with machining tools. The two limiting posts 31 of the second positioning component 3 form an angle of 60° with the line connecting them to the center of the central hole 11, and are symmetrically distributed around the central hole 11 at a distance of 110mm, which can accommodate anode countersunk holes with different sector radii. The second positioning component 3 is also symmetrically provided with two positioning through holes forming an angle of 30° with the line connecting them to the center of the central hole. These positioning through holes are aligned and fitted with the mounting holes on the anode at the corresponding positions on the second positioning component 3.

[0022] Each positioning component in the above structure forms a three-level interlocking constraint through coaxial positioning of the central hole 11, radial limiting of the limiting post, and axial fastening of the positioning through hole. This constraint is used to limit the six degrees of freedom of the sector anode and prevent the sector anode workpiece from undergoing micro-displacement or vibration during processing. Specifically: Level 1 positioning is achieved by coaxial positioning through the central hole 11, which limits X / Y translation and rotation around the Z-axis (2 translations + 1 rotational degree of freedom); Level 2 positioning is achieved by two symmetrically distributed limiting posts, which limit radial displacement and residual rotation around the Z-axis (1 rotational degree of freedom); Level 3 positioning is achieved by two symmetrically distributed positioning through holes, which are axially fastened with bolts, to limit Z-translation and rotation around the X / Y axes (1 translation + 2 rotational degrees of freedom).

[0023] When using this device, firstly, select either the first positioning component 1 or the second positioning component 2 according to the fan-shaped central angle specification of the anode. Taking the first positioning component 1 as an example, place the fan-shaped anode product to be processed on the first positioning component 2 with the center hole 11 as the reference point, ensuring that the center of the fan-shaped anode coincides with the center of the center hole. Then, insert the limiting post 24 into the aligned anode countersunk hole, and complete the radial pre-positioning by utilizing the clearance fit between the limiting post and the anode countersunk hole and the threaded connection. Next, pass the bolt from the back of the operating table through the positioning through hole 23 and the anode mounting hole, and tighten the nut to achieve vertical fixation, thereby making the back of the anode surface to be processed fit tightly against the first positioning component 2. After clamping, the CNC machine tool can directly perform planar milling, drilling, and fillet machining based on the reference coordinates of the center hole 11 without repeated tool setting.

[0024] In this embodiment, when machining fan-ring phosphor bronze anodes, the bottom rounding milling of the anode (with the center hole 11 as the center), the milling and grinding of the anode countersunk hole (with the limit post 24 as the boundary reference), and the finishing of the anode mounting hole (with the positioning through hole 23 as the reference) can be completed in a single clamping. The entire process requires no workpiece disassembly, increasing machining efficiency by more than 30%. It eliminates the need for cumbersome disassembly devices, avoids frequent tooling changes requiring tool setting operations, and reduces reliance on operator skills. When machining a certain copper-phosphorus anode, this device can reduce the machining time of each anode by 50%, and increase the anode appearance qualification rate to over 99%.

[0025] Example 2

[0026] This utility model discloses a self-positioning CNC integrated machining fixture for fan-shaped anodes, mainly composed of an operating table 1, a first positioning component 2, a second positioning component 3, and a third positioning component 4. The operating table 1 is a square base made of stainless steel, with a side length of 500mm and a thickness of 50mm. The operating table 1 is fastened to the lathe track by high-strength bolts. The center of the operating table has a 30mm diameter central hole 11, which serves as a primary positioning reference. Precise alignment is achieved by coaxial positioning with the center of the anode, with a coaxiality error not exceeding 0.02mm. The first positioning component 2, the second positioning component 3, and the third positioning component 4 have fan-shaped ring bases with central angles of 120°, 90°, and 120°, respectively, integrally formed with the operating table 1. The three positioning components are distributed in a ring shape with the central hole 11 as the center reference. The surface roughness of each component is less than or equal to 1.0μm, and the flatness accuracy is less than or equal to 0.001mm, for high-precision contact with the anode contact surface. Each positioning component's fan-shaped annular support surface is composed of a first arc 21 and a second arc 22, both of which are concentrically distributed with the central hole 11 as the center.

[0027] In this embodiment, the structural design of the first positioning component 2 and the second positioning component 3 is the same as in embodiment 1. The third positioning component 4 is provided with a limiting post 41 with an included angle of 90° to the line connecting the center hole. The two limiting posts are symmetrically distributed around the center hole 11 at a distance of 110mm. All limiting posts are made of 12.9 grade alloy steel, with M8 socket head cap screw threads machined inside, and have a tensile strength ≥1220MPa, capable of withstanding axial loads of 5kN or more. The height of the limiting posts of all positioning components is between 6 and 20mm, which can both cooperate with the countersunk hole of the anode to achieve radial positioning and be smaller than the thickness of the anode product to avoid interference with the machining tool. The third positioning component 4 is also provided with two positioning through holes with an angle of 30° to the line connecting to the center hole. The center of the hole is 80mm away from the center of the center hole 11. The bolts pass through the back of the operating table and match the mounting hole of the anode to achieve fastening. Through the coaxial positioning of the center hole 11, the radial limiting of the limiting column, and the axial fastening of the positioning through holes, a three-level interlocking constraint is formed, which completely restricts the six degrees of freedom of the anode.

[0028] The specific working principle and usage of this embodiment are the same as in Embodiment 1, and will not be repeated here.

[0029] In this embodiment, based on embodiment 1, the third positioning component 4 serves as an optional third station fixture, which can further improve the mass production efficiency of 120° sector anodes.

[0030] Example 3

[0031] This utility model discloses a self-positioning CNC integrated machining fixture for fan-shaped anodes, mainly composed of an operating table 1, a first positioning component 2, a second positioning component 3, and a third positioning component 4. The operating table 1 is a circular base made of stainless steel with a radius of 500mm and a thickness of 70mm. The operating table 1 is fastened to the lathe track by high-strength bolts. The center of the operating table has a central hole 11 with a diameter of 30mm, which serves as a primary positioning reference. Precise alignment is achieved by coaxial positioning with the center of the anode, with a coaxiality error not exceeding 0.02mm. The first positioning component 2, the second positioning component 3, and the third positioning component 4 have fan-shaped ring bases with central angles of 120°, 90°, and 90°, respectively, integrally formed with the operating table 1. The three positioning components are distributed in a ring shape with the central hole 11 as the center reference. The surface roughness of each component is less than or equal to 1.0μm, and the flatness accuracy is less than or equal to 0.001mm, for high-precision contact with the anode contact surface. Each positioning component's fan-shaped annular support surface is composed of a first arc 21 and a second arc 22, both of which are concentrically distributed with the central hole 11 as the center.

[0032] In this embodiment, the structural design of the first positioning component 2 and the second positioning component 3 is the same as in embodiment 1. The third positioning component 4 is provided with a limiting post 41 with an included angle of 60° to the line connecting the center hole. The two limiting posts are symmetrically distributed around the center hole 11 at a distance of 110mm. All limiting posts are made of 12.9 grade alloy steel, with M8 socket head cap screw threads machined inside, and have a tensile strength ≥1220MPa, capable of withstanding axial loads of 5kN or more. The height of the limiting posts of all positioning components is between 6 and 20mm, which can both cooperate with the countersunk hole of the anode to achieve radial positioning and be smaller than the thickness of the anode product to avoid interference with the machining tool. The third positioning component 4 is also provided with two positioning through holes with an angle of 30° to the line connecting to the center hole. The center of the hole is 80mm away from the center of the center hole 11. The bolts pass through the back of the operating table and match the mounting hole of the anode to achieve fastening. Through the coaxial positioning of the center hole 11, the radial limiting of the limiting column, and the axial fastening of the positioning through holes, a three-level interlocking constraint is formed, which completely restricts the six degrees of freedom of the anode.

[0033] The working positioning principle and usage of this embodiment are the same as those of Embodiment 1, and will not be repeated here.

[0034] In this embodiment, based on embodiment 1, the third positioning component 4 serves as an optional third station fixture, which can further improve the mass production efficiency of 90° sector anodes.

[0035] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments, or substitute or modify some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A self-positioning sector-shaped anode CNC integrated machining fixture, characterized in that, Includes an operating table, a first positioning component and a second positioning component in the shape of a fan-ring boss; The operating table has a central hole at its center. The first positioning member and the second positioning member are integrally formed with the operating table and are concentrically distributed on the upper surface of the operating table with the center of the central hole as the reference. The first positioning element and the second positioning element have the same height; The central angle of the fan ring of the first positioning component and the central angle of the fan ring of the second positioning component are both equal to 360° / N, where N is an integer, and the central angle of the fan ring of the first positioning component is greater than the central angle of the fan ring of the second positioning component. The first and second positioning components each have two symmetrically distributed positioning through holes on their fan-ring support surfaces, which are equidistant from the center of the central hole. These positioning through holes are aligned and fitted with the mounting holes on the anode to be processed. The first and second positioning components also have two symmetrically distributed limiting posts on their fan-ring support surfaces, which are equidistant from the center of the central hole and of equal height. The limiting posts are clearance-fitted with the countersunk holes on the anode to be processed, and the height of the limiting posts is less than the thickness of the anode product at the corresponding position. The distance between the center of the limiting post and the center of the central hole is greater than the distance between the center of the positioning through hole and the center of the central hole on the same positioning component.

2. The self-positioning sector-shaped anode CNC integrated machining fixture according to claim 1, characterized in that, The central angle of the fan ring of the first positioning member is 120°, and the central angle of the fan ring of the second positioning member is 90°.

3. The self-positioning sector-shaped anode CNC integrated machining fixture according to claim 2, characterized in that, The angle between the two limiting posts of the first positioning member and the center of the central hole is 90°.

4. The self-positioning sector-shaped anode CNC integrated machining fixture according to claim 2, characterized in that, The angle between the two limiting posts of the second positioning member and the center of the central hole is 60°.

5. The self-positioning sector-shaped anode CNC integrated machining fixture according to claim 2, characterized in that, It also includes a third positioning component in the shape of a fan-ring boss integrally formed with the upper surface of the operating table. The central angle of the fan-ring of the third positioning component is 90° or 120°. The third positioning component is concentrically distributed with the first and second positioning components with the center hole as the reference. There are two symmetrically distributed positioning through holes on the fan-ring surface of the third positioning component, which are equidistant from the center hole. The positioning through holes are aligned and fitted with the anode mounting holes to be processed on the third positioning component. There are also two symmetrically distributed limiting posts on the fan-ring surface of the third positioning component, which are equidistant from the center hole. The limiting posts are clearance fitted with the countersunk holes of the anode to be processed on the third positioning component, and the height of the limiting posts is less than the thickness of the anode product at the corresponding position.

6. The self-positioning sector-shaped anode CNC integrated machining fixture according to any one of claims 1 to 5, characterized in that, The limiting post is internally machined with M8 socket head cap screw thread, and the limiting post is made of 12.9 grade alloy steel with a tensile strength ≥1220MPa.

7. The self-positioning sector-shaped anode CNC integrated machining fixture according to any one of claims 1 to 5, characterized in that, The operating table and positioning components are made of stainless steel with a surface roughness of ≤1.0μm and a flatness accuracy of ≤0.001mm.

8. The self-positioning sector-shaped anode CNC integrated machining fixture according to claim 7, characterized in that, The operating table is square or circular, and its thickness is 30-70mm. The operating table is fixed to the lathe by high-strength bolts.

9. The self-positioning sector-shaped anode CNC integrated machining fixture according to claim 7, characterized in that, The side length or diameter of the operating table is 500mm, and the diameter of the central hole is 30mm.

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