Vacuum gluing jig and vacuum gluing device

Abstract

The utility model provides a kind of vacuum gluing jig and vacuum gluing device, the vacuum gluing jig includes base, support, counterweight and glue brush, the upper surface of base has sample placement area;Support is erected on the upper surface of base, and exposes sample placement area;The top end of counterweight is rotatably connected with the top end of support, and the bottom end of counterweight is connected with glue brush;When base is in horizontal state, counterweight and glue brush are suspended and set in the upper of base, to keep the sample placed in sample placement area with preset distance;When base is in inclined state, counterweight can drive glue brush and contact with the sample of the area to be glued, to glue the area to be glued.The utility model can avoid the problem that glue cannot fill hole due to gas in sample hole structure, so as to cause hole bottom residual bubble and further affect sample imaging quality.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing and manufacturing technology, and in particular to a vacuum coating fixture and a vacuum coating device. Background Technology

[0002] In semiconductor manufacturing, transmission electron microscopy (TEM) sample preparation is a crucial step for high-resolution imaging and analysis of the material's microstructure. The quality of TEM sample preparation directly affects the clarity of the images and the accuracy of subsequent analyses. Emulsion coating is a vital step in TEM sample preparation, especially when sample slicing is required. The purpose of emulsion coating is to fix the sample in the appropriate position and ensure that the sample maintains its structural integrity during slicing, avoiding deformation or damage caused by mechanical stress.

[0003] Currently, the adhesive coating process is typically performed under normal atmospheric pressure, i.e., in a non-vacuum environment. The specific steps include: First, observing the sample using an optical microscope (OM) to determine the areas where adhesive needs to be applied. These areas are usually regions that will require detailed observation via TEM imaging later. After determining the locations, a toothpick is used to apply (e.g., epoxy AB adhesive) to the areas of the sample where adhesive needs to be applied. After application, an air gun is used to smooth the adhesive, ensuring a uniform coating on the surface of the sample where adhesive needs to be applied. Finally, the sample is placed on a heated platform to allow the adhesive to cure at an appropriate temperature.

[0004] While this coating process is generally satisfactory, it can encounter problems in certain situations, particularly when the sample surface contains pores or microstructures. Specifically, if the sample surface has pores, the adhesive may enter these pores during coating. Because the coating process is performed under normal atmospheric pressure, the gas inside the pores cannot be completely expelled, preventing the adhesive from fully filling the pores. This results in air bubbles forming at the bottom of the pores, creating defects in subsequent TEM imaging. When performing TEM section analysis, these air bubbles will appear in the imaging results, affecting the observation and potentially leading to misinterpretations of the sample structure.

[0005] The presence of air bubbles not only affects the quality of TEM imaging but can also cause localized stress concentration during sample slicing, increasing the risk of sample damage. Furthermore, air bubbles can affect the curing of the adhesive, leading to uneven adhesion between the adhesive layer and the sample, further impacting sample stability. Therefore, effectively avoiding air bubble formation is one of the key issues that needs to be addressed in the TEM sample preparation and coating process.

[0006] It should be noted that the information disclosed in the background section of this utility model is intended only to enhance the understanding of the general background of this utility model, and should not be regarded as an admission or in any way implying that the information constitutes prior art known to those skilled in the art. Utility Model Content

[0007] The purpose of this invention is to provide a vacuum coating fixture and a vacuum coating device, which can avoid the problem that the adhesive cannot fill the holes due to gas in the sample's pore structure, resulting in residual air bubbles at the bottom of the holes and thus affecting the sample's imaging quality.

[0008] To achieve the above objectives, this utility model provides a vacuum coating fixture, including a base, a support, a counterweight, and a glue brush. The upper surface of the base has a sample placement area; the support is mounted on the upper surface of the base and exposes the sample placement area; the top end of the counterweight is rotatably connected to the top end of the support, and the bottom end of the counterweight is connected to the glue brush; when the base is in a horizontal state, the counterweight and the glue brush are suspended above the base to maintain a preset distance from the sample placed in the sample placement area, and the surface of the sample has holes; when the base is in an inclined state, the counterweight can drive the glue brush to contact the area of ​​the sample to be coated, so as to coat the area with glue.

[0009] Optionally, the support includes two vertical rods arranged opposite each other and a horizontal rod erected between the two vertical rods. The bottom end of the vertical rod is fixedly connected to the base, and the two ends of the horizontal rod are respectively fixedly connected to the top ends of the two vertical rods. The top end of the counterweight is rotatably connected to the horizontal rod.

[0010] Optionally, the counterweight includes a connecting rod and a counterweight block, the top end of the connecting rod is rotatably connected to the top end of the bracket, the bottom end of the connecting rod is connected to the counterweight block, and the counterweight block is suspended above the base.

[0011] Optionally, the counterweight may further include a rotating shaft fixedly connected to the top end of the connecting rod, the rotating shaft being rotatably connected to the top end of the bracket.

[0012] Optionally, the adhesive brush is detachably connected to the side of the counterweight.

[0013] Optionally, the glue brush is set at an angle to the counterweight, and is tilted relative to the counterweight toward the area to be glued.

[0014] Optionally, the angle between the adhesive brush and the counterweight is 30° to 60°.

[0015] To achieve the above objectives, the present invention also provides a vacuum coating apparatus, which includes a vacuum machine and a vacuum coating fixture as described in any of the above embodiments. The vacuum machine includes a vacuum chamber, a material carrier disposed in the vacuum chamber, and a drive module for driving the material carrier to tilt relative to the vacuum chamber. The material carrier is configured to support the vacuum coating fixture.

[0016] Optionally, the vacuum machine further includes a vacuum pump connected to the vacuum chamber, the vacuum pump being used to draw gas from the vacuum chamber to maintain the vacuum level within the vacuum chamber.

[0017] Optionally, the drive module includes a motor, a gear, and a rack. The motor is coaxially connected to the gear, the rack meshes with the gear, the loading platform is connected to the rack, and a base is provided in the vacuum chamber. The loading platform is hinged to the base.

[0018] Compared with the prior art, the vacuum coating fixture and vacuum coating device provided by this utility model have the following advantages: This utility model provides a vacuum coating fixture comprising a base, a support, a counterweight, and a glue brush. The upper surface of the base has a sample placement area; the support is mounted on the upper surface of the base, exposing the sample placement area; the top end of the counterweight is rotatably connected to the top end of the support, and the bottom end of the counterweight is connected to the glue brush. When the base is horizontal, the counterweight and the glue brush are suspended above the base, maintaining a preset distance from the sample placed in the sample placement area; when the base is tilted, the counterweight can drive the glue brush to contact the area of ​​the sample to be coated, thereby coating the area with glue. Therefore, when a sample needs to be coated, the sample can first be placed in the sample placement area on the base, and then the vacuum coating fixture containing the sample can be horizontally placed in a vacuum environment. Since the counterweight and the glue brush are suspended above the base and maintain a certain distance from the sample when the base is horizontal, it can be ensured that the gas in the sample pores can be effectively removed under the action of the internal and external pressure difference in a vacuum environment. After the gas in the sample pores is effectively removed, the base is tilted. When the base is tilted, the counterweight drives the adhesive brush to contact the area of ​​the sample to be coated (the area requiring adhesive), thus applying adhesive to that area. Since the gas in the sample pores has been effectively removed before coating, the adhesive can fill the pores in the area to be coated, significantly reducing the time required for sample re-copying due to coating failure and improving sample imaging quality. Furthermore, by incorporating a counterweight rotatably connected to the support, this invention ensures that when the base is tilted, the counterweight, under the influence of gravity, drives the adhesive brush to contact the area of ​​the sample to be coated with constant pressure, ensuring uniform application of adhesive. In summary, the vacuum coating fixture provided by this invention has the unexpected technical effect of ensuring that the adhesive fills the sample pores, avoiding residual air bubbles at the bottom of the pores, and effectively improving coating quality.

[0019] Since the vacuum coating device provided by this utility model includes the vacuum coating fixture provided by this utility model, the vacuum coating device provided by this utility model has at least all the beneficial effects of the vacuum coating fixture provided by this utility model. For details, please refer to the relevant descriptions of the beneficial effects of the vacuum coating fixture provided by this utility model above, which will not be repeated here. Attached Figure Description

[0020] Figure 1 A three-dimensional structural diagram of the vacuum coating fixture provided in one embodiment of the present invention when it is in a horizontal state. Figure 2A side view of the vacuum coating fixture provided in one embodiment of the present invention when it is in a horizontal state. Figure 3 A front view of the vacuum coating fixture provided in one embodiment of the present invention when it is in a horizontal state; Figure 4 A top view of the vacuum coating fixture provided in one embodiment of the present invention when it is in a horizontal position; Figure 5 A three-dimensional structural diagram of the vacuum coating fixture provided in one embodiment of the present invention when it is in an inclined state; Figure 6 This is a schematic diagram illustrating the effect of applying adhesive under non-vacuum conditions in the existing technology. Figure 7 This is a schematic diagram illustrating the effect of applying adhesive under vacuum conditions using the vacuum adhesive application fixture provided by this utility model. Figure 8 This is a schematic diagram of the overall structure of a vacuum coating device provided in one embodiment of the present invention.

[0021] The reference numerals in the attached drawings are explained as follows: Sample-10; Hole-11; Glue-20; Bubble-30; Vacuum gluing fixture-100; Base-110; Bracket-120; Vertical rod-121; Horizontal rod-122; Counterweight-130; Connecting rod-131; Counterweight block-132; Rotating shaft-133; Glue brush-140; Vacuum machine-200; Vacuum chamber-210; Material platform-220; Drive module-230; Motor-231; Gear-232; Rack-233; Vacuum pump-240; Base-250. Detailed Implementation

[0022] The vacuum coating fixture and vacuum coating device proposed in this utility model will be further described in detail below with reference to the accompanying drawings and specific embodiments. The advantages and features of this utility model will become clearer from the following description. It should be noted that the drawings are in a very simplified form and use non-precise proportions, only for the purpose of conveniently and clearly illustrating the embodiments of this utility model. Please refer to the drawings to make the objectives, features, and advantages of this utility model more apparent and understandable. It should be understood that the structures, proportions, sizes, etc., depicted in the accompanying drawings are only for the purpose of assisting those skilled in the art in understanding and reading the content disclosed in the specification, and are not intended to limit the implementation conditions of this utility model. Any modifications to the structure, changes in proportions, or adjustments to the size, provided that the effects and purposes achieved by this utility model are the same or similar, should still fall within the scope of the technical content disclosed in this utility model. Specific design features of this utility model disclosed herein, including, for example, specific dimensions, orientations, positions, and shapes, will be determined in part by the specific application and usage environment. Furthermore, in the embodiments described below, the same reference numerals are sometimes used across different figures to denote the same parts or parts having the same function, omitting repeated descriptions. In this specification, similar reference numerals and letters are used to denote similar items; therefore, once an item is defined in one figure, it need not be further discussed in subsequent figures. Additionally, if the methods described herein comprise a series of steps, and the order of these steps presented herein is not necessarily the only possible order in which these steps can be performed, some described steps may be omitted and / or other steps not described herein may be added to the method.

[0023] It should be noted that, in this document, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations, nor should they be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element. The singular forms “a,” “one,” and “the” include plural objects. The term “or” is generally used to mean “and / or.” The term “several” is generally used to mean “at least one.” The term “at least two” is generally used to mean “two or more.” The term “multiple” is generally used to mean “at least two.”

[0024] In the description of this utility model, it should be understood that the terms "center," "longitudinal," "transverse," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "axial," "radial," and "circumferential," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description. They do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. In the description of this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances. Furthermore, in this utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Moreover, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0025] The core idea of ​​this utility model is to provide a vacuum coating fixture and a vacuum coating device, which can avoid the problem that the adhesive cannot fill the holes due to gas in the sample hole structure, resulting in residual air bubbles at the bottom of the holes and thus affecting the sample imaging quality.

[0026] To achieve the above-mentioned goals, this utility model provides a vacuum coating fixture, please refer to... Figures 1 to 5 ,in, Figure 1 A three-dimensional structural diagram of the vacuum coating fixture provided in one embodiment of the present invention when it is in a horizontal state. Figure 2 A side view of the vacuum coating fixture provided in one embodiment of the present invention when it is in a horizontal state. Figure 3 A front view of the vacuum coating fixture provided in one embodiment of the present invention when it is in a horizontal state; Figure 4 A top view of the vacuum coating fixture provided in one embodiment of the present invention when it is in a horizontal position; Figure 5This is a three-dimensional structural diagram of the vacuum coating fixture provided in one embodiment of the present invention when it is in an inclined state. Figures 1 to 5 As shown, the vacuum coating fixture 100 provided by this utility model includes a base 110, a support 120, a counterweight 130, and a glue brush 140. The upper surface of the base 110 has a sample placement area (not shown in the figure); the support 120 is mounted on the upper surface of the base 110 and exposes the sample placement area; the top end of the counterweight 130 is rotatably connected to the top end of the support 120, and the bottom end of the counterweight 130 is connected to the glue brush 140; when the base 110 is in a horizontal state, the counterweight 130 and the glue brush 140 are suspended above the base 110 to maintain a preset distance from the sample 10 placed in the sample placement area. The surface of the sample 10 has holes 11 (see Figure 140). Figure 6 When the base 110 is tilted, the counterweight 130 can drive the glue brush 140 to contact the area of ​​the sample 10 to be glued, so as to apply glue to the area to be glued.

[0027] Therefore, when it is necessary to apply adhesive to a sample 10, the sample 10 can be placed in the sample placement area on the base 110 first, and then the vacuum adhesive application fixture 100 with the sample 10 placed on it can be placed horizontally in a vacuum environment. Since the base 110 is in a horizontal state, the counterweight 130 and the adhesive brush 140 are suspended above the base 110 and maintain a certain distance from the sample 10. This ensures that the gas in the holes 11 of the sample 10 can be effectively removed under the action of the internal and external pressure difference in a vacuum environment. After the gas in the holes 11 of sample 10 is effectively removed, the base 110 is tilted. When the base 110 is tilted, the counterweight 130 can drive the glue brush 140 to contact the area of ​​sample 10 to be coated (the area that needs to be coated), thus allowing the glue to be applied to the area of ​​sample 10. Since the gas in the holes 11 of sample 10 has been effectively removed before coating, it can be ensured that the glue 20 can fill the holes 11 in the area to be coated. This not only greatly saves the time of re-copying due to coating failure, but also improves the imaging quality of sample 10. In addition, by setting the counterweight 130 rotatably connected to the bracket 120, this utility model can ensure that when the base 110 is tilted, the counterweight 130 can drive the glue brush 140 to contact the area of ​​sample 10 to be coated with constant pressure under the action of gravity, thus ensuring that the glue 20 can be evenly applied to the area of ​​sample 10 to be coated. In summary, the vacuum coating fixture 100 provided by this utility model has the unexpected technical effect of ensuring that the adhesive 20 can fill the holes 11 of the sample 10 and avoiding the presence of air bubbles 30 at the bottom of the holes 11, thereby effectively improving the coating quality.

[0028] For details, please refer to Figure 6 and Figure 7 ,in, Figure 6 This is a schematic diagram illustrating the effect of applying adhesive under non-vacuum conditions in the existing technology. Figure 7 This diagram illustrates the effect of applying adhesive under vacuum conditions using the vacuum adhesive application fixture provided by this invention. (Comparison is also provided.) Figure 6 and Figure 7 It is easy to see that by using the vacuum coating fixture 100 provided by this utility model, it can be ensured that the glue 20 can fill the holes 11 in the area to be coated, so that no air bubbles 30 remain in the holes 11 of the sample 10 after coating.

[0029] It should be noted that, in order to further improve the adhesive application effect, the area of ​​sample 10 to be coated (the area to be coated) needs to be placed directly below the adhesive brush 140 and the surface of sample 10 needs to be kept clean and flat. This ensures that the adhesive brush 140 can smoothly apply the adhesive 20 to the area of ​​sample 10 to be coated, avoiding uneven coating due to positional misalignment or surface roughness. It should also be noted that, as those skilled in the art will understand, this invention does not limit the type of adhesive 20 picked up by the adhesive brush 140; the adhesive 20 picked up by the adhesive brush 140 can be, but is not limited to, epoxy resin adhesive. Furthermore, it should be noted that although... Figure 1 , Figure 4 and Figure 5 The description uses a circular cross-section of the base 110 as an example. However, as those skilled in the art will understand, this does not constitute a limitation on the present invention. In other embodiments, the cross-section of the base 110 can be other shapes besides a circle, such as polygons or ellipses. It should also be noted that, as those skilled in the art will understand, the present invention does not limit the specific value of the preset distance. The preset distance can be obtained through experimental calibration. The setting of the preset distance needs to ensure that, during the tilting process of the base 110, the adhesive brush 140 can stably contact the area of ​​the sample 10 to be coated with adhesive, while avoiding waste of adhesive 20 or damage to the sample 10. Furthermore, the tilt angle of the base 110 can also be obtained through experimental calibration. The setting of the tilt angle of the base 110 also needs to ensure that, during the tilting process of the base 110, the adhesive brush 140 can stably contact the area of ​​the sample 10 to be coated with adhesive, while avoiding waste of adhesive 20 or damage to the sample 10.

[0030] Please continue to refer to this. Figure 1 , Figure 2 and Figure 5 ,like Figure 1 , Figure 2 and Figure 5As shown, in some exemplary embodiments, the support 120 includes two opposing vertical rods 121 and a horizontal rod 122 positioned between the two vertical rods 121. The bottom ends of the vertical rods 121 are fixedly connected to the base 110, and the two ends of the horizontal rod 122 are respectively fixedly connected to the top ends of the two vertical rods 121. The top end of the counterweight 130 is rotatably connected to the horizontal rod 122. Therefore, by configuring the support 120 with a structure including two opposing vertical rods 121 and a horizontal rod 122, not only can the sample placement area on the base 110 be easily exposed for easy placement of the sample 10, but the overall structure of the support 120 can also be simplified, helping to reduce the weight of the entire vacuum coating fixture 100. Furthermore, by rotatably connecting the top end of the counterweight 130 to the horizontal rod 122, it is easier to suspend the counterweight 130 above the base 110 via the horizontal rod 122.

[0031] Please continue to refer to this. Figure 1 , Figure 2 and Figure 5 ,like Figure 1 , Figure 2 and Figure 5 As shown, in some exemplary embodiments, the two vertical rods 121 are arranged opposite each other along the diametrical direction of the base 110. Therefore, by arranging the two vertical rods 121 opposite each other along the diametrical direction of the base 110, it helps to ensure the stability of the vacuum coating fixture 100 during tilting or movement, reducing the risk of operational errors or equipment damage due to structural instability. Simultaneously, arranging the two vertical rods 121 opposite each other along the diametrical direction of the base 110 also allows for a more spacious sample placement area, making it easier for operators to easily place the sample 10 on the base 110 and easily remove it after coating.

[0032] Please continue to refer to this. Figure 1 , Figure 2 and Figure 5 ,like Figure 1 , Figure 2 and Figure 5As shown, in some exemplary embodiments, the top of the counterweight 130 is rotatably connected to the middle portion of the horizontal rod 122. Thus, by rotatably connecting the top of the counterweight 130 to the middle portion of the horizontal rod 122, the middle portion of the horizontal rod 122 can be used as a fulcrum, allowing the weight of the counterweight 130 to form a symmetrical torque distribution through this fulcrum. This counteracts the asymmetrical force caused by the tilt of the base 110, preventing excessive force on one side and effectively improving the overall stability of the vacuum coating fixture 100 provided by this invention during use. Furthermore, this arrangement also ensures that when the base 110 is tilted, the counterweight 130 can rotate freely around the fulcrum, quickly adjusting its position to ensure that the adhesive brush 140 always contacts the area of ​​the sample 10 to be coated with constant pressure, thereby ensuring that the adhesive 20 is evenly applied to the area of ​​the sample 10 to be coated.

[0033] Please continue to refer to this. Figure 1 , Figure 2 and Figure 5 ,like Figure 1 , Figure 2 and Figure 5 As shown, in some exemplary embodiments, the counterweight 130 includes a connecting rod 131 and a counterweight 132. The top end of the connecting rod 131 is rotatably connected to the top end of the support 120, and the bottom end of the connecting rod 131 is connected to the counterweight 132. The counterweight 132 is suspended above the base 110. This arrangement allows for precise adjustment of the contact pressure of the adhesive brush 140 on the sample 10 by leveraging the rotatable connection between the connecting rod 131 and the top end of the support 120, combined with the weight of the counterweight 132. When the base 110 tilts, the counterweight 132 automatically adjusts its position due to gravity, balancing the torque difference caused by the tilt and ensuring constant pressure from the adhesive brush 140. Furthermore, utilizing the inertia of the suspended counterweight 132 reduces vibration when the adhesive 20 contacts the sample 10, improving the uniformity of the adhesive application.

[0034] In some exemplary embodiments, the counterweight 132 is detachably connected to the connecting rod 131. Therefore, by making the counterweight 132 and the connecting rod 131 detachably connected, it is easy to precisely adjust the contact pressure of the adhesive brush 140 on the sample 10 by replacing the counterweight 132 with different weights, to adapt to different adhesive viscosities and coating thicknesses. It should be noted that this invention does not limit the specific connection method for achieving the detachable connection between the counterweight 132 and the connecting rod 131. For example, the detachable connection between the counterweight 132 and the connecting rod 131 can be achieved through a threaded connection. Specifically, a first external thread can be provided at the bottom end of the connecting rod 131, and a first threaded hole matching the first external thread can be provided at the top end of the counterweight 132.

[0035] Please continue to refer to this. Figure 1 , Figure 2 and Figure 5 ,like Figure 1 , Figure 2 and Figure 5 As shown, in some exemplary embodiments, the counterweight 130 further includes a rotating shaft 133 fixedly connected to the top end of the connecting rod 131, and the rotating shaft 133 is rotatably connected to the top end of the support 120. Thus, by fixing the top end of the connecting rod 131 to the rotating shaft 133 and rotatably connecting the rotating shaft 133 to the top end of the support 120, not only is it easier to achieve the rotatable connection between the counterweight 130 and the support 120, but the rotating shaft 133 can also be used as a concentrated force point to withstand multi-directional torques (e.g., lateral forces when the base 110 is tilted), extending the service life of the vacuum coating fixture 100 provided by this invention. Furthermore, by setting the rotating shaft 133, the counterweight 130 can rotate only around a single axis, avoiding the problem of uncontrolled angle of the adhesive brush 140 caused by multi-degree-of-freedom oscillation, ensuring that the adhesive brush 140 can contact the area to be coated on the sample 10 with constant pressure, and guaranteeing the uniformity of the coating.

[0036] It should be noted that, as those skilled in the art will understand, in order to reduce the friction and wear between the rotating shaft 133 and the bracket 120, a bearing or bushing can be integrated between the rotating shaft 133 and the bracket 120 to convert sliding friction into rolling friction, significantly reducing rotational resistance, so that the counterweight 130 swings more sensitively.

[0037] Please continue to refer to this. Figure 1 , Figure 2 and Figure 5 ,like Figure 1 , Figure 2 and Figure 5 As shown, in some exemplary embodiments, the adhesive brush 140 is detachably connected to the side of the counterweight 132. Therefore, by connecting the adhesive brush 140 to the side of the counterweight 132, the axial overlap between the adhesive brush 140 and the counterweight 132 can be reduced, helping to lower the overall height of the vacuum adhesive application fixture 100 provided by this invention. This makes it easier to place the vacuum adhesive application fixture 100, along with the sample 10, in a space-constrained vacuum environment. Furthermore, by making the adhesive brush 140 and the counterweight 132 detachably connected, the adhesive brush 140 can be easily removed for cleaning or replacement.

[0038] It should be noted that this utility model does not limit the specific connection method for achieving the detachable connection between the adhesive brush 140 and the counterweight 132. For example, the detachable connection between the adhesive brush 140 and the counterweight 132 can be achieved through a threaded connection. Specifically, a second external thread can be provided at the end of the adhesive brush 140 that connects to the counterweight 132, and a second threaded hole matching the second external thread can be provided on the side of the counterweight 132. Besides the threaded connection, the detachable connection between the adhesive brush 140 and the counterweight 132 can also be achieved through snap-fit ​​or magnetic connection methods.

[0039] Please continue to refer to this. Figure 3 ,like Figure 3 As shown, in some exemplary embodiments, the adhesive brush 140 is positioned at an angle to the counterweight 130, tilted relative to the counterweight 130 toward the area to be coated with adhesive. Therefore, by setting the adhesive brush 140 at an angle to the counterweight 130, the adhesive brush 140 can be tilted relative to the counterweight 130 toward the area to be coated on the sample 10. This allows the adhesive brush 140 to better adhere to the area to be coated on the sample 10 when the base 110 is tilted, ensuring that the adhesive 20 is evenly applied to the area. Furthermore, when the counterweight 130, under gravity, moves the adhesive brush 140 to contact the area to be coated, the tilted adhesive brush 140 applies more stable pressure and angle to the area, helping to reduce coating defects caused by uneven pressure.

[0040] In some exemplary embodiments, the angle between the adhesive brush 140 and the counterweight 130 is 30° to 60°. Therefore, by setting the angle between the adhesive brush 140 and the counterweight 130 to 30° to 60°, it can be ensured that when the base 110 is tilted, the adhesive brush 140 can make relatively smooth contact with the area of ​​the sample 10 to be coated under the action of the counterweight 130, thereby helping the adhesive 20 to be evenly distributed on the surface of the sample 10 and effectively reducing air bubbles 30 and uneven coating.

[0041] In some exemplary embodiments, the sample placement area is provided with a double-sided adhesive layer. Therefore, by providing a double-sided adhesive layer in the sample placement area, it is easier to fix the sample 10, and it is also easier to remove the sample 10 after the adhesive 20 has been applied. It should be noted that, as those skilled in the art will understand, in addition to using a double-sided adhesive layer to fix the sample 10, it can also be fixed by vacuum adsorption or other fixation methods.

[0042] To achieve the above-mentioned goals, this utility model also provides a vacuum coating device, please refer to... Figure 8 This is a schematic diagram of the overall structure of the vacuum coating device provided in one embodiment of the present invention. Figure 8 As shown, the vacuum coating apparatus provided by this utility model includes a vacuum machine 200 and the vacuum coating fixture 100 described above. The vacuum machine 200 includes a vacuum chamber 210, a loading platform 220 disposed within the vacuum chamber 210, and a drive module 230 for driving the loading platform 220 to tilt relative to the vacuum chamber 210. The loading platform 220 is configured to support the vacuum coating fixture 100. Therefore, when a sample 10 needs to be coated, the sample 10 can first be placed in the sample placement area on the base 110, and then the vacuum coating fixture 100 containing the sample 10 can be horizontally placed in the vacuum chamber 200. Since the base 110 is horizontal, the counterweight 130 and the adhesive brush 140 are suspended above the base 110 and maintain a certain distance from the sample 10. This ensures that the gas in the holes 11 of the sample 10 can be effectively removed by vacuuming within the vacuum chamber 210. After the gas in the holes 11 of the sample 10 is effectively removed, the drive module 230 drives the loading stage 220 to tilt relative to the vacuum chamber 210, which in turn drives the base 110 to tilt. When the base 110 tilts, the counterweight 130 drives the glue brush 140 to contact the area of ​​the sample 10 to be coated (the area that needs to be coated), thus applying glue to the area of ​​the sample 10. Since the gas in the holes 11 of the sample 10 has been effectively removed before coating, the glue 20 can be ensured to fill the holes 11 in the area to be coated, preventing air bubbles 30 from remaining at the bottom of the holes 11. This not only greatly saves the time of re-copying the sample due to coating failure, but also improves the imaging quality of the sample 10. In addition, since the flow resistance of the glue 20 is reduced in a vacuum state, the vacuum coating device provided by this utility model can ensure that the glue 20 can fully fill the holes 11 in the area to be coated by coating in a vacuum environment, further improving the coating effect.

[0043] Please continue to refer to this. Figure 8 ,like Figure 8 As shown, the vacuum machine 200 also includes a vacuum pump 240 connected to the vacuum chamber 210. The vacuum pump 240 is used to pump gas from the vacuum chamber 210 to maintain the vacuum level in the vacuum chamber 210.

[0044] It should be noted that, as those skilled in the art will understand, the base 110 and the loading platform 220 can be fixedly connected by double-sided adhesive, vacuum adsorption, or other fixing methods. It should also be noted that, as those skilled in the art will understand, this utility model does not limit the specific structure of the drive module 230. The drive module 230 can be any component known to those skilled in the art capable of driving the loading platform 220 to tilt relative to the vacuum chamber 210, for example, such as... Figure 8 As shown, the drive module 230 may include a motor 231, a gear 232, and a rack 233. The output shaft of the motor 231 is coaxially connected to the gear 232, and the rack 233 meshes with the gear 232. The loading platform 220 is connected to the rack 233, and a base 250 is provided inside the vacuum chamber 210. The loading platform 220 is hinged to the base 250. Thus, the motor 231 can drive the gear 232 to rotate coaxially, and the rotating gear 232 can drive the rack 233 to move up and down, thereby pushing the loading platform 220 to tilt around its hinge point with the base 250.

[0045] In summary, compared with the prior art, the vacuum coating fixture 100 and vacuum coating device provided by this utility model have the following beneficial effects: The vacuum coating fixture 100 provided by this utility model includes a base 110, a support 120, a counterweight 130, and a glue brush 140. The upper surface of the base 110 has a sample placement area. The support 120 is mounted on the upper surface of the base 110 and exposes the sample placement area. The top end of the counterweight 130 is rotatably connected to the top end of the support 120, and the bottom end of the counterweight 130 is connected to the glue brush 140. When the base 110 is in a horizontal state, the counterweight 130 and the glue brush 140 are suspended above the base 110 to maintain a preset distance from the sample 10 placed in the sample placement area. When the base 110 is in an inclined state, the counterweight 130 can drive the glue brush 140 to contact the area of ​​the sample 10 to be coated, so as to coat the area with glue. Therefore, when it is necessary to apply adhesive to a sample 10, the sample 10 can be placed in the sample placement area on the base 110 first, and then the vacuum adhesive application fixture 100 with the sample 10 placed on it can be placed horizontally in a vacuum environment. Since the base 110 is in a horizontal state, the counterweight 130 and the adhesive brush 140 are suspended above the base 110 and maintain a certain distance from the sample 10. This ensures that the gas in the holes 11 of the sample 10 can be effectively removed under the action of the internal and external pressure difference in a vacuum environment. After the gas in the holes 11 of sample 10 is effectively removed, the base 110 is tilted. When the base 110 is tilted, the counterweight 130 can drive the adhesive brush 140 to contact the area of ​​sample 10 to be coated (the area that needs to be coated), thus allowing the adhesive to be applied to the area of ​​sample 10. Since the gas in the holes 11 of sample 10 has been effectively removed before coating, it can be ensured that the adhesive 20 can fill the holes 11 in the area to be coated, preventing air bubbles 30 from remaining at the bottom of the holes 11. This not only greatly saves the time required to re-sample due to coating failure, but also improves the imaging quality of sample 10. In summary, this utility model provides an unexpected technical effect that ensures the adhesive 20 can fill the holes 11 of sample 10, avoids air bubbles 30 at the bottom of the holes 11, and effectively improves the coating quality.

[0046] It should be noted that in the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this utility model. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in a suitable manner in any one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0047] It should also be noted that the above description is only a description of the preferred embodiment of this utility model and is not intended to limit the scope of this utility model in any way. Any changes or modifications made by those skilled in the art based on the above disclosure are within the protection scope of this utility model. Obviously, those skilled in the art can make various modifications and variations to the utility model without departing from the spirit and scope of this utility model. Therefore, if these modifications and variations fall within the scope of this utility model and its equivalents, this utility model also intends to include these modifications and variations.

Claims

1. A vacuum adhesive coating fixture, characterized in that, It includes a base, a bracket, a counterweight, and a glue brush, wherein the upper surface of the base has a sample placement area; The support is mounted on the upper surface of the base and exposes the sample placement area; The top end of the counterweight is rotatably connected to the top end of the bracket, and the bottom end of the counterweight is connected to the rubber brush. When the base is in a horizontal state, the counterweight and the glue brush are suspended above the base to maintain a preset distance from the sample placed in the sample placement area, and the surface of the sample has holes. When the base is tilted, the counterweight can drive the glue brush to contact the area of ​​the sample to be glued, so as to apply glue to the area to be glued.

2. The vacuum coating fixture according to claim 1, characterized in that, The support includes two vertical rods arranged opposite each other and a horizontal rod erected between the two vertical rods. The bottom end of the vertical rod is fixedly connected to the base, and the two ends of the horizontal rod are respectively fixedly connected to the top ends of the two vertical rods. The top end of the counterweight is rotatably connected to the horizontal rod.

3. The vacuum coating fixture according to claim 1, characterized in that, The counterweight includes a connecting rod and a counterweight block. The top end of the connecting rod is rotatably connected to the top end of the bracket, and the bottom end of the connecting rod is connected to the counterweight block. The counterweight block is suspended above the base.

4. The vacuum coating fixture according to claim 3, characterized in that, The counterweight also includes a rotating shaft fixedly connected to the top end of the connecting rod, and the rotating shaft is rotatably connected to the top end of the bracket.

5. The vacuum coating fixture according to claim 3, characterized in that, The adhesive brush is detachably connected to the side of the counterweight.

6. The vacuum coating fixture according to claim 1, characterized in that, The glue brush is set at an angle to the counterweight, and is tilted relative to the counterweight toward the area to be glued.

7. The vacuum coating fixture according to claim 6, characterized in that, The angle between the adhesive brush and the counterweight is 30° to 60°.

8. A vacuum coating apparatus, characterized in that, The invention includes a vacuum machine and a vacuum coating fixture according to any one of claims 1 to 7. The vacuum machine includes a vacuum chamber, a loading platform disposed in the vacuum chamber, and a drive module for driving the loading platform to tilt relative to the vacuum chamber. The loading platform is configured to carry the vacuum coating fixture.

9. The vacuum coating apparatus according to claim 8, characterized in that, The vacuum machine also includes a vacuum pump connected to the vacuum chamber, which is used to draw gas from the vacuum chamber to maintain the vacuum level in the vacuum chamber.

10. The vacuum coating apparatus according to claim 8, characterized in that, The drive module includes a motor, a gear, and a rack. The output shaft of the motor is coaxially connected to the gear, the rack meshes with the gear, the loading platform is connected to the rack, and a base is provided in the vacuum chamber. The loading platform is hinged to the base.

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