Driving device and thinning machine

Abstract

This invention provides a driving device and a thinning machine. The driving device includes a support member, a main shaft, and a motor. The main shaft is rotatably mounted on the support member. One end of the motor near the motor shaft is mounted on the support member, and a transmission mechanism is provided between the motor shaft and the main shaft. A first cooling channel is provided inside the support member surrounding the main shaft; and / or, a second cooling channel is provided inside the support member surrounding the motor shaft. The driving device of this invention has a first cooling channel and / or a second cooling channel. Coolant enters through the coolant inlet of the driving device and flows out through the coolant outlet, thereby achieving rapid cooling of the driving device and effectively eliminating the heat generated during the grinding process. In addition, the cooling channel of the driving device adopts a closed-loop design to avoid direct contact between the coolant and the workpiece, reducing the risk of workpiece contamination. Thus, the driving device not only improves product quality but also ensures production stability and efficiency.

Description

Technical Field

[0001] This utility model relates to the field of grinding equipment technology, and in particular to a driving device and a thinning machine. Background Technology

[0002] In wafer manufacturing, the wafer thinning machine is one of the key pieces of equipment, and its performance directly determines the quality of the final product. The thinning machine mainly consists of a grinding disc and a drive unit. During operation, the drive unit rotates the grinding disc to grind the wafer. However, during the grinding process, the drive unit generates heat, causing the grinding disc temperature to rise. This temperature increase can cause thermal deformation of the grinding disc, thus affecting the grinding accuracy and product quality. Utility Model Content

[0003] The purpose of this utility model is to provide a driving device and a thinning machine, which aims to solve the problem that the heat generated by the driving device of the existing thinning machine will affect the grinding accuracy and product quality.

[0004] To solve the above-mentioned technical problems, the present invention provides a driving device, comprising:

[0005] Support components;

[0006] A main shaft, which is rotatably mounted on the support member;

[0007] The motor has one end near the motor shaft mounted on the support member, and a transmission mechanism is provided between the motor shaft and the main shaft so that the motor drives the main shaft to rotate through the transmission mechanism;

[0008] The support member has a first cooling channel arranged around the main shaft inside. The two ends of the first cooling channel penetrate the support member to form a first coolant inlet and a first coolant outlet, allowing coolant to enter the first cooling channel from the first coolant inlet and flow out from the first coolant outlet; and / or,

[0009] The support member has a second cooling channel arranged around the motor shaft inside. The two ends of the second cooling channel pass through the support member to form a second coolant inlet and a second coolant outlet, so that the coolant enters the second cooling channel from the second coolant inlet and flows out from the second coolant outlet.

[0010] Preferably, the first cooling channel is arranged to extend back and forth along the axial direction and circumferential direction of the main shaft.

[0011] Preferably, the support member includes:

[0012] A bearing housing is sleeved on the main shaft, and a bearing is sleeved between the bearing housing and the main shaft;

[0013] A bearing cover is sleeved on the main shaft, the bearing cover is located at the end of the bearing seat away from the transmission mechanism, and the bearing cover abuts against the side of the bearing away from the transmission mechanism;

[0014] A cover is fitted onto the main shaft and is located at the end of the bearing housing away from the bearing cover.

[0015] The bearing housing has a coolant tank arranged around the main shaft inside, and the bearing cover and the sealing cover close the coolant tank to form the first cooling channel.

[0016] Preferably, the coolant tank comprises:

[0017] The first groove segment is disposed on the surface of the bearing housing near the bearing cover. The first groove segment extends circumferentially along the main shaft, and multiple first groove segments are provided at intervals along the circumferential direction of the main shaft.

[0018] The second groove is disposed on the surface of the bearing seat near the cover. The second groove extends circumferentially along the main shaft. Multiple second grooves are spaced apart along the circumferential direction of the main shaft. Multiple second grooves and multiple first grooves are arranged alternately in the circumferential direction of the main shaft.

[0019] The third slot segment connects the two ends of the adjacent first and second slot segments that are close to each other.

[0020] Preferably, both the first coolant inlet and the first coolant outlet are located on the cap.

[0021] Preferably, the first coolant inlet and the first coolant outlet are both located on the surface of the cover away from the bearing seat or on the outer peripheral side of the cover.

[0022] Preferably, the first coolant inlet and the first coolant outlet are both located at the same end of the cover on the radial direction of the main shaft, and the first coolant inlet and the first coolant outlet are offset from the motor on the circumferential direction of the main shaft.

[0023] Preferably, the support further includes a motor base, the motor and the bearing housing are disposed on the motor base, and the motor base has a second cooling channel inside.

[0024] Preferably, both the second coolant inlet and the second coolant outlet are located on the end face of the motor mount away from the spindle.

[0025] Preferably, the motor mount includes a first mounting plate and a second mounting plate connected together, the bearing seat is disposed at the end of the first mounting plate away from the second mounting plate, the motor is disposed on the second mounting plate, and the second mounting plate has a second cooling channel disposed inside.

[0026] Preferably, the second cooling channel includes:

[0027] The first channel segment extends along the interval between the main shaft and the motor shaft. Two first channel segments are arranged in parallel and at intervals. The two first channel segments are located on opposite sides of the motor shaft. The ends of the two first channel segments away from the main shaft pass through the motor base to form the second coolant inlet and the second coolant outlet, respectively.

[0028] The second channel segment extends along the interval between the two first channel segments, and the ends of the two first channel segments near the main shaft are connected through the second channel segment.

[0029] To achieve the above objectives, this utility model also provides a thinning machine, comprising:

[0030] A driving device, wherein the driving device is the driving device described above;

[0031] A grinding disc is disposed at the end of the main shaft of the drive device away from the transmission mechanism.

[0032] Compared with the prior art, the present invention has the following beneficial effects:

[0033] The drive device of this utility model is provided with a first cooling channel surrounding the main shaft and / or a second cooling channel surrounding the motor shaft. The coolant enters through the coolant inlet of the drive device and flows out from the coolant outlet, circulating inside the support member, thereby achieving rapid cooling of the drive device and effectively eliminating the heat generated during the grinding process. In addition, the cooling channel of the drive device adopts a closed loop design to avoid direct contact between the coolant and the workpiece, reducing the risk of workpiece contamination. Thus, the drive device not only improves product quality but also ensures the stability and efficiency of production. Attached Figure Description

[0034] One or more embodiments are illustrated by way of example with reference numerals in the accompanying drawings. These illustrations do not constitute a limitation on the embodiments. Elements with the same reference numerals in the drawings are denoted as similar elements. Unless otherwise stated, the figures in the drawings are not to be limited by scale.

[0035] Figure 1 This is a schematic diagram of the structure of the driving device provided in an embodiment of the present utility model;

[0036] Figure 2 for Figure 1 A cross-sectional view of the drive unit;

[0037] Figure 3 for Figure 1 Another cross-sectional view of the drive unit.

[0038] Explanation of reference numerals in the accompanying drawings of this utility model:

[0039] Drive unit 100, main shaft 1, bearing stop surface 11, pulley stop surface 12, motor 2, motor shaft 21, transmission mechanism 3, driving wheel 31, driven wheel 32, synchronous belt 33, bearing seat 4, first cooling channel 41, coolant tank 42, first tank section 421, second tank section 422, third tank section 423, annular boss 43, annular limiting surface 44, bearing 5, bearing cover 6, annular insert 61, cover 7, first coolant inlet 71, first coolant outlet 72, motor seat 8, second cooling channel 81, first channel section 811, second channel section 812, second coolant inlet 82, second coolant outlet 83, first mounting plate 84, second mounting plate 85, locking nut 9.

[0040] The realization of the purpose, functional features and advantages of this utility model will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Detailed Implementation

[0041] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0042] It should be noted that if the embodiments of this utility model involve directional indicators (such as up, down, left, right, front, back, etc.), the directional indicators are only used to explain the relative positional relationship and movement of the components in a certain specific posture (as shown in the figure). If the specific posture changes, the directional indicators will also change accordingly.

[0043] Furthermore, if the embodiments of this utility model involve descriptions such as "first" or "second," these descriptions are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of indicated technical features. Therefore, features defined with "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the technical solutions of the various embodiments can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. If the combination of technical solutions is contradictory or impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed by this utility model.

[0044] This utility model provides a driving device that can be used in automated production equipment such as thinning machines. The following description will use the driving device in a thinning machine as an example. Figures 1 to 3 A preferred embodiment of the driving device provided by this utility model is shown.

[0045] Please see Figures 1 to 3 In this embodiment, the drive device 100 includes a support member, a main shaft 1, and a motor 2. The main shaft 1 is rotatably mounted on the support member. One end of the motor 2 near the motor shaft 21 is mounted on the support member. A transmission mechanism 3 is provided between the motor shaft 21 and the main shaft 1 so that the motor 2 drives the main shaft 1 to rotate through the transmission mechanism 3. A first cooling channel 41 is provided inside the support member surrounding the main shaft 1. The two ends of the first cooling channel 41 pass through the support member to form a first coolant inlet 71 and a first coolant outlet 72, so that coolant enters the first cooling channel 41 from the first coolant inlet 71 and flows out from the first coolant outlet 72. And / or, a second cooling channel 81 is provided inside the support member surrounding the motor shaft 21. The two ends of the second cooling channel 81 pass through the support member to form a second coolant inlet 82 and a second coolant outlet 83, so that coolant enters the second cooling channel 81 from the second coolant inlet 82 and flows out from the second coolant outlet 83.

[0046] Specifically, both the spindle 1 and the motor 2 are mounted on a support member. The support member can be a single component, meaning both the spindle 1 and the motor 2 are mounted on the same component; alternatively, the support member can be an assembly composed of multiple components, meaning the spindle 1 and the motor 2 are mounted on two separate components. Alternatively, please refer to [link to relevant documentation]. Figures 1 to 3 In this embodiment, the support includes a bearing housing 4 and a motor housing 8, with the main shaft 1 and the motor 2 respectively mounted on the bearing housing 4 and the motor housing 8. The motor housing 8 can be fixed to the bearing housing 4 by means of bolts or other methods. The following description uses the support including the bearing housing 4 and the motor housing 8 as an example.

[0047] The spindle 1 is rotatably mounted on the bearing housing 4 along its axial direction. The motor 2 has one end of its motor shaft 21 mounted on the motor housing 8, and one end of the spindle 1 is connected to the motor shaft 21 of the motor 2 via a transmission mechanism 3. The other end of the spindle 1 is connected to a grinding disc (not shown in the figure). Thus, when the motor 2 is powered on, the motor shaft 21 can drive the spindle 1 and the grinding disc on it to rotate together via the transmission mechanism 3. The spindle 1 can be coaxial with the motor shaft 21; it can also be parallel to the motor shaft 21; or it can be at a preset angle to the motor shaft 21, for example, perpendicular to the motor shaft 21. Optionally, please refer to... Figures 1 to 3 In this embodiment, the spindle 1 and the motor shaft 21 are arranged in parallel. The following description uses the parallel arrangement of the spindle 1 and the motor shaft 21 as an example, defining the axis of the spindle 1 as vertical. The end of the spindle 1 connected to the grinding disc is the upper end of the spindle 1, and the end of the spindle 1 connected to the transmission mechanism 3 is the lower end of the spindle 1. The side of the spindle 1 closer to the motor shaft 21 is the right side of the spindle 1, and the side of the spindle 1 farther from the motor shaft 21 is the left side of the spindle 1. Therefore, the motor shaft 21 of the motor 2 can be arranged facing upwards or downwards.

[0048] At least one of the bearing housing 4 and the motor housing 8 has a cooling channel inside. Specifically, only the bearing housing 4 may have a first cooling channel 41 inside, while the motor housing 8 may not have a second cooling channel 81 inside; or only the motor housing 8 may have a second cooling channel 81 inside, while the bearing housing 4 may not have a first cooling channel 41 inside; or both the bearing housing 4 and the motor housing 8 may have a first cooling channel 41 inside and a second cooling channel 81 inside. The following description will use the example of the bearing housing 4 and the motor housing 8 having a first cooling channel 41 and a second cooling channel 81 inside, respectively.

[0049] A first cooling channel 41 is arranged around the periphery of the spindle 1, and a first coolant inlet 71 and a first coolant outlet 72 are provided on the bearing housing 4 or other components constituting the support. The two ends of the first cooling channel 41 in its extension direction are respectively connected to the first coolant inlet 71 and the first coolant outlet 72, thus forming a first cooling circuit. When the first cooling circuit is connected to the coolant supply pipe, the coolant enters the first cooling channel 41 from the first coolant inlet 71, flows along the first cooling channel 41 to the first coolant outlet 72, and finally flows out of the first cooling channel 41 from the first coolant outlet 72. In this way, when the coolant circulates in the first cooling circuit, the bearing housing 4 and the spindle 1 can be cooled quickly.

[0050] The second cooling channel 81 is arranged around the periphery of the motor shaft 21, and the motor base 8 or other components forming the support are provided with a second coolant inlet 82 and a second coolant outlet 83. The two ends of the second cooling channel 81 in the extension direction of the second cooling channel 81 are respectively connected to the second coolant inlet 82 and the second coolant outlet 83, thereby forming a second cooling circuit. When the coolant supply pipe is connected to the second cooling circuit, the coolant enters the second cooling channel 81 from the second coolant inlet 82, flows along the second cooling channel 81 to the second coolant outlet 83, and finally flows out of the second cooling channel 81 from the second coolant outlet 83. In this way, when the coolant circulates in the second cooling circuit, the motor base 8 and the motor shaft 21 can be cooled quickly.

[0051] The first cooling circuit can be connected in parallel with the second cooling circuit, that is, the first coolant inlet 71 is connected to the second coolant inlet 82, and the first coolant outlet 72 is connected to the second coolant outlet 83; the first cooling circuit can also be connected in series with the second cooling circuit, that is, the first coolant inlet 71 is connected to the second coolant outlet 83, or the first coolant outlet 72 is connected to the second coolant inlet 82. Optionally, in this embodiment, the first coolant outlet 72 is connected to the second coolant inlet 82, that is, the first cooling circuit and the second cooling circuit are connected in series, and the coolant flows into the second cooling circuit after flowing through the first cooling circuit. Since the spindle 1 is directly connected to the grinding disc, allowing the coolant to flow into the first cooling circuit first helps to avoid the heat generated by the drive device 100 causing the grinding disc temperature to rise.

[0052] The drive device 100 of this utility model is provided with a first cooling channel 41 surrounding the main shaft 1 and / or a second cooling channel 81 surrounding the motor shaft 21. The coolant enters through the coolant inlet of the drive device 100 and flows out from the coolant outlet, circulating inside the support member, thereby achieving rapid cooling of the drive device 100 and effectively eliminating the heat generated during the grinding process. In addition, the cooling channel of the drive device 100 adopts a closed loop design to avoid direct contact between the coolant and the workpiece, reducing the risk of workpiece contamination. Thus, the drive device 100 not only improves product quality but also ensures the stability and efficiency of production.

[0053] The first cooling channel 41 is arranged around the periphery of the spindle 1. The specific shape and style of the first cooling channel 41 can be set according to the actual situation. Optionally, please refer to Figures 1 to 3 In this embodiment, the first cooling channel 41 is arranged to bend back and forth along the axial direction and circumferential direction of the main shaft 1. This arrangement of the first cooling channel 41 enables more uniform cooling of the bearing housing 4.

[0054] The bearing housing 4 is sleeved on the spindle 1, and a bearing 5 is typically sleeved between the bearing housing 4 and the spindle 1. Optionally, please refer to... Figures 1 to 3 In this embodiment, the support includes a bearing cover 6 and a sealing cover 7. The bearing cover 6 is sleeved on the main shaft 1 and is located at the end of the bearing seat 4 away from the transmission mechanism 3. The bearing cover 6 abuts against the side of the bearing 5 away from the transmission mechanism 3. The sealing cover 7 is sleeved on the main shaft 1 and is located at the end of the bearing seat 4 away from the bearing cover 6. The bearing seat 4 has a coolant groove 42 arranged around the main shaft 1 inside. The bearing cover 6 and the sealing cover 7 close the coolant groove 42 to form a first cooling channel 41.

[0055] Specifically, the bearing cover 6 and the sealing cover 7 are respectively disposed at the upper and lower ends of the bearing housing 4. Both the bearing cover 6 and the sealing cover 7 can be threadedly connected to the bearing housing 4 to form a seal. The bearing 5 is fixed inside the bearing housing 4 by the bearing cover 6 and the bearing housing 4. The coolant groove 42 on the bearing housing 4 is closed by the bearing cover 6 and the sealing cover 7 to form a sealed first cooling circuit. A sealing gasket can be added between the bearing cover 6 and the bearing housing 4; similarly, a sealing gasket can also be added between the sealing cover 7 and the bearing housing 4.

[0056] The specific shape and style of spindle 1 can be set according to the actual situation. Optionally, please refer to [link / reference needed]. Figures 1 to 3 In this embodiment, the upper end of the spindle 1 is provided with a downward-facing bearing stop surface 11, which abuts against the upper side of the bearing 5.

[0057] Specifically, the bearing stop surface 11 is located on the upper side of the inner ring of the bearing 5, and the bearing stop surface 11 abuts against the inner ring of the bearing 5 vertically. This abutting engagement between the bearing stop surface 11 and the bearing 5 allows for the installation and positioning of the bearing 5 on the spindle 1. A locking nut 9 is provided at the lower end of the spindle 1. The locking nut 9 abuts against the lower side of the bearing 5, is located on the lower side of the inner ring of the bearing 5, and abuts against the inner ring of the bearing 5 vertically, thereby enabling the bearing 5 to be installed on the spindle 1.

[0058] The specific shape and style of the bearing housing 4 can be set according to the actual situation. Optionally, please refer to [link / reference needed]. Figures 1 to 3 In this embodiment, an annular boss 43 is provided on the outer peripheral side of the bearing housing 4. The bearing housing 4 is a stepped annular shape, and the annular boss 43 is provided on the outer side of the bearing housing 4. The annular boss 43 may be provided with mounting holes for mounting the drive device 100 on the machine base of the thinning machine.

[0059] Optionally, please refer to Figures 1 to 3In this embodiment, an upward-facing annular limiting surface 44 is provided on the inner peripheral side of the bearing housing 4, and the annular limiting surface 44 abuts against the lower side of the bearing 5. A stepped structure is provided on the inner peripheral side of the bearing housing 4, thereby forming the annular limiting surface 44. The annular limiting surface 44 is a mounting platform for the bearing 5, and the bearing 5 can be installed and positioned in the bearing housing 4 through the annular limiting surface 44.

[0060] The specific shape and style of the bearing cover 6 can be set according to the actual situation. Optionally, please refer to [link / reference needed]. Figures 1 to 3 In this embodiment, an annular insert 61 protrudes from the lower surface of the bearing cover 6. The annular insert 61 is inserted into the upper end of the bearing seat 4 and abuts against the upper side of the bearing 5. The bearing cover 6 is arranged in an inverted T-shape. The bearing cover 6 is usually provided with bolt mounting holes. Through the insertion and engagement between the annular insert 61 and the bearing seat 4, the installation and positioning between the bearing cover 6 and the bearing seat 4 can be achieved.

[0061] A coolant reservoir 42 is provided on the bearing housing 4. The shape of the coolant reservoir 42 is adapted to the shape of the first cooling channel 41. Therefore, the coolant reservoir 42 can also be arranged to extend back and forth along the axial direction and circumferential direction of the main shaft 1. Optionally, please refer to Figures 1 to 3 In this embodiment, the coolant tank 42 includes a first tank segment 421, a second tank segment 422, and a third tank segment 423. The first tank segment 421 is disposed on the surface of the bearing seat 4 near the bearing cover 6, and extends circumferentially along the main shaft 1. Multiple first tank segments 421 are spaced apart along the circumferential direction of the main shaft 1. The second tank segment 422 is disposed on the surface of the bearing seat 4 near the cover 7, and extends circumferentially along the main shaft 1. Multiple second tank segments 422 are spaced apart along the circumferential direction of the main shaft 1. The multiple second tank segments 422 and the multiple first tank segments 421 are arranged alternately in the circumferential direction of the main shaft 1, so that the multiple second tank segments 422 and the multiple first tank segments 421 are staggered in the circumferential direction of the main shaft 1. The two ends of adjacent first tank segments 421 and second tank segments 422 that are close to each other are connected by a third tank segment 423.

[0062] Specifically, the upper surface of the bearing housing 4 is provided with an arc-shaped first groove 421, and the lower surface of the bearing housing 4 is provided with an arc-shaped second groove 422. Multiple first grooves 421 and second grooves 422 are alternately arranged along the circumference of the main shaft 1. A third groove 423 extends vertically through the bearing housing 4. Any first groove 421 and an adjacent second groove 422 are connected at their circumferential ends via a third groove 423, thus interconnecting multiple first grooves 421, multiple second grooves 422, and multiple third grooves 423. This forms a coolant groove 42 that extends vertically and circumferentially along the main shaft 1. The bearing cap 6 closes the openings of multiple first grooves 421, and the cap 7 closes the openings of multiple second grooves 422, thereby forming a closed first cooling channel 41.

[0063] The first coolant inlet 71 can be located on the bearing housing 4, bearing cover 6, or cap 7. Similarly, the first coolant outlet 72 can also be located on the bearing housing 4, bearing cover 6, or cap 7. Optionally, please refer to [link to relevant documentation]. Figures 1 to 3 In this embodiment, both the first coolant inlet 71 and the first coolant outlet 72 are disposed on the cover 7. Disposing both the first coolant inlet 71 and the first coolant outlet 72 on the cover 7 facilitates the installation of pipe fittings at the first coolant inlet 71 and the first coolant outlet 72.

[0064] The first coolant inlet 71 can be located on the upper or lower surface of the outer peripheral side of the cover 7. Similarly, the first coolant outlet 72 can also be located on the upper or lower surface of the outer peripheral side of the cover 7. Optionally, please refer to... Figures 1 to 3 In this embodiment, both the first coolant inlet 71 and the first coolant outlet 72 are located on the surface of the cover 7 away from the bearing seat 4. Both the first coolant inlet 71 and the first coolant outlet 72 are located on the lower surface of the cover 7 and extend vertically through it. The first coolant inlet 71 and the first coolant outlet 72 are respectively connected to the lower ends of the two third tank sections 423, thus facilitating the installation of pipe fittings at the first coolant inlet 71 and the first coolant outlet 72. The cover 7 can be an annular flat cover, with bolt mounting holes and fitting mounting holes (i.e., the first coolant inlet 71 and the first coolant outlet 72).

[0065] The specific locations of the first coolant inlet 71 and the first coolant outlet 72 on the cap 7 can be set according to actual conditions. Optionally, please refer to [the relevant documentation]. Figures 1 to 3 In this embodiment, the first coolant inlet 71 and the first coolant outlet 72 are both located at the same end of the cover 7 in the radial direction of the main shaft 1, and the first coolant inlet 71 and the first coolant outlet 72 are offset from the motor 2 in the circumferential direction of the main shaft 1.

[0066] Specifically, the first coolant inlet 71 and the first coolant outlet 72 can both be located at the left end, front end, rear end, or other positions on the cover 7, so that the connecting pipes at the first coolant inlet 71 and the first coolant outlet 72 are less likely to interfere with the motor 2.

[0067] As described above, the support includes a motor mount 8, on which the motor 2 and bearing housing 4 are mounted. The motor mount 8 has a second cooling channel 81 inside. The specific shape and style of the motor mount 8 can be customized according to actual needs; optionally, please refer to [reference needed]. Figures 1 to 3 In this embodiment, the motor mount 8 includes a first mounting plate 84 and a second mounting plate 85 connected together. The bearing seat 4 is disposed at the end of the first mounting plate 84 away from the second mounting plate 85. The motor 2 is disposed on the second mounting plate 85. The second mounting plate 85 has a second cooling channel 81 inside.

[0068] Specifically, the motor mount 8 can be a frame-type bracket. The surface of the first mounting plate 84 is perpendicular or approximately perpendicular to the front-back direction, and the surface of the second mounting plate 85 is perpendicular or approximately perpendicular to the top-bottom direction. The lower end of the first mounting plate 84 is connected to the rear end of the second mounting plate 85. Both the first mounting plate 84 and the second mounting plate 85 are provided with threaded holes to mount the bearing seat 4 and the motor 2. This type of motor mount 8 has a relatively simple structure. The following will describe the motor mount 8, which includes the first mounting plate 84 and the second mounting plate 85, as an example.

[0069] The second coolant inlet 82 and the second coolant outlet 83 can both be located on the same surface of the second mounting plate 85; alternatively, the second coolant inlet 82 and the second coolant outlet 83 can be located on different surfaces of the second mounting plate 85. Alternatively, please refer to... Figures 1 to 3 In this embodiment, the second coolant inlet 82 and the second coolant outlet 83 are both located on the end face of the motor base 8 away from the main shaft 1.

[0070] Specifically, the second coolant inlet 82 and the second coolant outlet 83 are both located on the right surface of the second mounting plate 85, which facilitates the installation of pipe fittings at the second coolant inlet 82 and the second coolant outlet 83.

[0071] The specific shape and style of the second cooling channel 81 can be set according to the actual situation. For example, the second cooling channel 81 can be arranged in a ring or an n-shape. Optionally, please refer to Figures 1 to 3In this embodiment, the second cooling channel 81 includes a first channel segment 811 and a second channel segment 812. The first channel segment 811 extends along the interval direction between the main shaft 1 and the motor shaft 21. Two first channel segments 811 are arranged in parallel and at intervals. The two first channel segments 811 are located on opposite sides of the motor shaft 21. The ends of the two first channel segments 811 away from the main shaft 1 pass through the motor base 8 to form a second coolant inlet 82 and a second coolant outlet 83, respectively. The second channel segment 812 extends along the interval direction between the two first channel segments 811. The ends of the two first channel segments 811 near the main shaft 1 are connected through the second channel segment 812.

[0072] Specifically, two first channel segments 811 extend in a left-right direction, located at the front and rear sides of the motor shaft 21, respectively. The right ends of the two first channel segments 811 penetrate the right surface of the second mounting plate 85, forming a second coolant inlet 82 and a second coolant outlet 83 on the right surface of the second mounting plate 85, respectively. A second channel segment 812 extends in a front-rear direction, located on the left side of the motor shaft 21. Both ends of the second channel segment 812 connect to the left ends of the two first channel segments 811, thus forming a closed second cooling channel 81. A through hole can be provided inside the second mounting plate 85, and a plug can be provided at the end of the through hole to form two first channel segments 811 and one second channel segment 812, thereby forming a closed second cooling channel 81 inside the second mounting plate 85.

[0073] The lower end of the main shaft 1 is connected to the motor shaft 21 via a transmission mechanism 3. The specific configuration of the transmission mechanism 3 can be set according to actual conditions; for example, the transmission mechanism 3 can be a gear transmission mechanism or a pulley transmission mechanism, etc. Optionally, please refer to... Figures 1 to 3 In this embodiment, the transmission mechanism 3 includes a driving wheel 31, a driven wheel 32, and a synchronous belt 33. The driving wheel 31 is sleeved on the motor shaft 21, the driven wheel 32 is sleeved on the lower end of the main shaft 1, and the synchronous belt 33 is disposed between the driving wheel 31 and the driven wheel 32.

[0074] Transmission mechanism 3 is a pulley transmission mechanism; optionally, please refer to [link / reference]. Figures 1 to 3 In this embodiment, the lower end of the main shaft 1 is provided with a downward-facing pulley stop surface 12, which abuts against the upper side of the driven wheel 32. Thus, through the abutment and cooperation between the pulley stop surface 12 and the driven wheel 32, the driven wheel 32 can be installed and positioned on the main shaft 1.

[0075] The drive unit 100 is provided with cooling channels that are evenly distributed in a circumferential direction, which makes the cooling of the drive unit 100 more uniform. The cooling temperature can be precisely controlled by the coolant. In addition, the cooling channels of the drive unit 100 adopt a closed loop design to avoid direct contact between the coolant and the workpiece (wafer) and eliminate the possibility of workpiece contamination.

[0076] This utility model also provides a thinning machine, which includes a driving device. Since the driving device adopts the technical solution of the above embodiment, it has the beneficial effects brought about by the technical solution of the above embodiment.

[0077] Optionally, in this embodiment, the thinning machine also includes a grinding disc, which is disposed at the end of the main shaft 1 of the drive device 100 away from the transmission mechanism 3.

[0078] Specifically, the grinding disc is positioned at the upper end of the spindle 1. When the motor 2 drives the spindle 1 to rotate along the vertical axis, the spindle 1 can drive the grinding disc to rotate together, thereby grinding the wafer. During the grinding process, the heat generated by the motor 2, as well as the heat generated by the friction and chemical reaction between the wafer and the grinding wheel, causes the temperature of the grinding disc to rise, resulting in thermal deformation of the grinding disc, which in turn affects the grinding accuracy and product quality. The drive device 100 is a drive device 100 with a cooling function. Through the cooling function of the drive device 100, the grinding disc can be cooled quickly and evenly, keeping the grinding disc within a constant temperature range as much as possible. This ensures that the wafer thickness is uniform after grinding and reduces the variation of TTV (Total Thickness Variation). This not only improves product quality but also ensures the stability and efficiency of production.

[0079] The above are merely preferred embodiments of this utility model and do not limit the patent scope of this utility model. Any equivalent structural transformations made based on the inventive concept of this utility model and the contents of this utility model specification and drawings, or direct / indirect applications in other related technical fields, are included within the patent protection scope of this utility model.

Claims

1. A driving device, characterized in that, include: Support components; A main shaft, which is rotatably mounted on the support member; The motor has one end near the motor shaft mounted on the support member, and a transmission mechanism is provided between the motor shaft and the main shaft so that the motor drives the main shaft to rotate through the transmission mechanism; The support member has a first cooling channel arranged around the main shaft inside. The two ends of the first cooling channel pass through the support member to form a first coolant inlet and a first coolant outlet, so that the coolant enters the first cooling channel from the first coolant inlet and flows out from the first coolant outlet. And / or, The support member has a second cooling channel arranged around the motor shaft inside. The two ends of the second cooling channel pass through the support member to form a second coolant inlet and a second coolant outlet, so that the coolant enters the second cooling channel from the second coolant inlet and flows out from the second coolant outlet.

2. The driving device as described in claim 1, characterized in that, The first cooling channel is arranged to bend back and forth along the axial direction and circumferential direction of the main shaft.

3. The driving device as described in claim 1, characterized in that, The support member includes: A bearing housing is sleeved on the main shaft, and a bearing is sleeved between the bearing housing and the main shaft; A bearing cover is sleeved on the main shaft, the bearing cover is located at the end of the bearing seat away from the transmission mechanism, and the bearing cover abuts against the side of the bearing away from the transmission mechanism; A cover is fitted onto the main shaft and is located at the end of the bearing housing away from the bearing cover. The bearing housing has a coolant tank arranged around the main shaft inside, and the bearing cover and the sealing cover close the coolant tank to form the first cooling channel.

4. The driving device as described in claim 3, characterized in that, The coolant tank includes: The first groove segment is disposed on the surface of the bearing housing near the bearing cover. The first groove segment extends circumferentially along the main shaft, and multiple first groove segments are provided at intervals along the circumferential direction of the main shaft. The second groove is disposed on the surface of the bearing seat near the cover. The second groove extends circumferentially along the main shaft. Multiple second grooves are spaced apart along the circumferential direction of the main shaft. Multiple second grooves and multiple first grooves are arranged alternately in the circumferential direction of the main shaft. The third slot segment connects the two ends of the adjacent first and second slot segments that are close to each other.

5. The driving device as described in claim 3, characterized in that, Both the first coolant inlet and the first coolant outlet are located on the cap.

6. The driving device as described in claim 5, characterized in that, The first coolant inlet and the first coolant outlet are both located on the surface of the cover away from the bearing housing or on the outer peripheral side of the cover; and / or, The first coolant inlet and the first coolant outlet are both located at the same end of the cover on the radial direction of the main shaft, and the first coolant inlet and the first coolant outlet are offset from the motor on the circumferential direction of the main shaft.

7. The driving device as described in claim 3, characterized in that, The support also includes a motor mount, on which the motor and the bearing mount are mounted, and the motor mount has a second cooling channel inside.

8. The driving device as claimed in claim 7, characterized in that, The second coolant inlet and the second coolant outlet are both located on the end face of the motor mount away from the spindle; and / or, The motor mount includes a first mounting plate and a second mounting plate connected together. The bearing seat is disposed at the end of the first mounting plate away from the second mounting plate. The motor is disposed on the second mounting plate. The second mounting plate has a second cooling channel inside.

9. The driving device as described in claim 3, characterized in that, The second cooling channel includes: The first channel segment extends along the interval between the main shaft and the motor shaft. Two first channel segments are arranged in parallel and at intervals. The two first channel segments are located on opposite sides of the motor shaft. The ends of the two first channel segments away from the main shaft pass through the motor housing to form the second coolant inlet and the second coolant outlet, respectively. The second channel segment extends along the interval between the two first channel segments, and the ends of the two first channel segments near the main shaft are connected through the second channel segment.

10. A thinning machine, characterized in that, include: The driving device is the driving device as described in any one of claims 1-9; A grinding disc is disposed at the end of the main shaft of the drive device away from the transmission mechanism.

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