Electromagnetic device, alignment device, and article manufacturing method

Abstract

To provide an advantageous technique for improving a degree of freedom in a shape of a magnetic path.SOLUTION: An electromagnetic device includes: a first member having a first end surface; a second member having a second end surface facing the first end surface with a gap therebetween; and a coil wound around the first member or the second member. The first member and the second member are composed of a laminated body of a plurality of electromagnetic steel plates, and a magnetic circuit composed of the first member, the second member, and the gap includes a changing unit in which a lamination direction in the laminated body changes at right angles.SELECTED DRAWING: Figure 8

Description

Technical Field

[0001] The present invention relates to an electromagnetic device, an alignment device, and an article manufacturing method.

Background Art

[0002] An electromagnetic device such as an electromagnetic actuator may include a first member having a first end face, a second member having a second end face facing the first end face with a gap therebetween, and a coil wound around the first member or the second member. A magnetic circuit may be formed by the first member, the second member, and the gap. In the magnetic circuit, the first member and the second member may be formed of a laminate of a plurality of electromagnetic steel sheets in order to suppress heat generation due to eddy currents or reduce magnetic resistance. However, when the shape of the magnetic circuit becomes complicated, simply adopting a laminate of electromagnetic steel sheets may be insufficient.

[0003] Although Patent Document 1 does not disclose a structure in which the first end face of the first member and the second end face of the second member face each other with a gap therebetween, Patent Document 1 describes reduction of eddy currents. Specifically, Patent Document 1 describes a ferromagnetic member including a laminated cylindrical portion made of a ferromagnetic material disposed at the core portion of a core and a laminated ring portion made of a ferromagnetic material disposed at the axial center portion of the laminated cylindrical portion. The laminated cylindrical portion is formed by laminating thin plates obtained by cutting a cylinder in the axial direction. The laminated ring portion is formed by laminating ring-shaped thin plates.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] An object of the present invention is to provide a technology advantageous for improving the degree of freedom in the shape of a magnetic circuit. [Means for solving the problem]

[0006] One aspect of the present invention relates to an electromagnetic device, the electromagnetic device comprising a first member having a first end face, a second member having a second end face facing the first end face via an air gap, and a coil wound around the first member or the second member. Here, the first member and the second member are composed of a laminate of a plurality of electromagnetic steel sheets, and the magnetic circuit composed of the first member, the second member and the air gap includes a transition section in which the lamination direction in the laminate changes at a right angle. [Effects of the Invention]

[0007] According to the present invention, an advantageous technique is provided for improving the degree of freedom in the shape of magnetic circuits. [Brief explanation of the drawing]

[0008] [Figure 1] A diagram illustrating the configuration of an exposure apparatus according to one embodiment. [Figure 2] A diagram illustrating the configuration of a wafer stage apparatus according to one embodiment. [Figure 3] A diagram illustrating the configuration of a wafer stage apparatus according to one embodiment. [Figure 4] A diagram illustrating the configuration of a micro-movement stage device according to one embodiment. [Figure 5] A diagram illustrating the configuration of a micro-coarse stage device according to one embodiment. [Figure 6] A diagram illustrating the configuration of a coarse-motion linear motor according to one embodiment. [Figure 7] A diagram illustrating a shot layout. [Figure 8] A diagram illustrating the configuration of a micro-electromagnet according to the first embodiment. [Figure 9] A diagram illustrating an exemplary configuration of a modified micro-electromagnet of the first embodiment. [Figure 10] A diagram illustrating the configuration of a micro-electromagnet according to the second embodiment. [Figure 11]A diagram exemplarily showing the configuration of the fine movement electromagnet of the second embodiment. [Figure 12] A diagram exemplarily showing the configuration of a modified example of the fine movement electromagnet of the second embodiment. [Figure 13] A diagram exemplarily showing the configuration of the fine movement electromagnet of the third embodiment. [Figure 14] A diagram exemplarily showing the configuration of a modified example of the fine movement electromagnet of the third embodiment. [Figure 15] A diagram exemplarily showing the configuration of the support member of the movable iron core in a modified example of the fine movement electromagnet of the third embodiment. [Figure 16] A diagram exemplarily showing the configuration of the control system of the wafer stage device in one embodiment. [Figure 17] A diagram exemplarily showing the position profile and the acceleration profile. [Figure 18] A diagram for explaining the assembly method or manufacturing method of a modified example of the fine movement electromagnet of the second embodiment. [Figure 19] A diagram for explaining the assembly method or manufacturing method of a modified example of the fine movement electromagnet of the second embodiment. [Figure 20] A diagram for explaining the assembly method or manufacturing method of a modified example of the fine movement electromagnet of the second embodiment. [Figure 21] A diagram for explaining the assembly method or manufacturing method of a modified example of the fine movement electromagnet of the second embodiment. [Figure 22] A diagram for explaining the assembly method or manufacturing method of a modified example of the fine movement electromagnet of the second embodiment. [Figure 23] A diagram exemplarily explaining the wound iron core. [Figure 24] A diagram exemplarily explaining the manufacturing method of the wound iron core. [Figure 25] A diagram exemplarily showing the configuration of the fine movement electromagnet of the fourth embodiment. [Figure 26] A diagram exemplarily showing the configuration of a fine movement electromagnet advantageous for reducing the moment acting on the fine movement stage when accelerating the fine movement stage. [Figure 27] A diagram exemplarily showing the configuration of a fine movement electromagnet advantageous for reducing the moment acting on the fine movement stage when accelerating the fine movement stage. [Figure 28] A diagram exemplarily showing the moment acting on the fine movement stage when accelerating the fine movement stage. [Figure 29] A diagram for explaining eddy currents generated in an iron core having a complex three-dimensional shape.

Embodiments for Carrying Out the Invention

[0009] Hereinafter, embodiments will be described in detail with reference to the accompanying drawings. Note that the following embodiments do not limit the invention according to the claims, and not all combinations of the features described in the embodiments are essential for the invention. Two or more of the features described in the embodiments may be arbitrarily combined. Also, the same or similar configurations are given the same reference numerals, and duplicate explanations are omitted.

[0010] In the following description, directions are described according to the XYZ coordinate system. The XY plane defined by the X-axis and the Y-axis is typically a horizontal plane, and the Z-axis is typically parallel to the vertical direction. The XY direction is a direction parallel to the XY plane. The X-axis direction is a direction parallel to the X-axis, the Y-axis direction is a direction parallel to the Y-axis, and the Z-axis direction is a direction parallel to the Z-axis.

[0011] Figure 1 illustrates the configuration of an exposure apparatus according to one embodiment. This exposure apparatus may be understood as an example of an alignment apparatus that relatively aligns a first object (e.g., a substrate) and a second object (e.g., a master plate), or an example of a transfer apparatus that transfers the pattern of a master plate (reticle) onto a substrate (wafer). A stage plate 692 may be placed on the floor 691 via a mount, and a wafer stage apparatus 500 may be placed on the stage plate 692. A lens barrel plate 696 may also be placed on the floor 691 via a mount 698. The lens barrel plate 696 may support the projection optical system 687 and the reticle plate 694. A reticle stage apparatus 695 may be placed on the reticle plate 694. An illumination optical system 699 may be placed above the reticle plate 694. The illumination optical system 699 projects the image of the reticle placed on the reticle stage of the reticle stage apparatus 695 onto the wafer placed on the wafer stage of the wafer stage apparatus 500, thereby transferring the reticle pattern onto the wafer. The exposure apparatus may be configured as a scanning exposure apparatus.

[0012] The wafer stage apparatus 500 can be understood as a first positioning mechanism for positioning a substrate as a first object, and the reticle stage apparatus 695 can be understood as a second positioning mechanism for positioning a reticle as a second object. At least one of the first positioning mechanism and the second positioning mechanism may include an electromagnetic device as described below.

[0013] The above-described exposure apparatus or transfer apparatus may be used in a method for manufacturing articles such as semiconductor devices. The method for manufacturing articles may include a transfer step of transferring a pattern from a master plate onto a substrate using the above-described exposure apparatus or transfer apparatus, and a step of obtaining an article by processing the substrate that has undergone the transfer step. The processing of the substrate may include, for example, etching, film deposition, dicing, etc.

[0014] Figure 2 illustrates the overall configuration of the wafer stage apparatus 500. An XY slider 104 may be slidably positioned on the stage base 105 in the XY direction. The XY slider 104 may be subjected to force in the X-axis direction by the X slider 102 and force in the Y-axis direction by the Y slider 103. A fine-adjustment stage apparatus 101 may be mounted on the XY slider 104. Coarse-adjustment linear motors 106 may be provided on both sides of the X slider 102 and the Y slider 103 to drive them in the X-axis and Y-axis directions, respectively.

[0015] Figure 3 illustrates a state in which the micro-movement stage (micro-movement top plate) 101-1 of the micro-movement stage device 101 is conveniently moved upward in the wafer stage device 500. The micro-movement base 101-2 may be fixed on the XY slider 104. Four micro-movement ZLMs 101-6 for precise Z-tilt positioning may be provided on the micro-movement base 101-2. In addition, two micro-movement XLMs 101-4 for precise positioning around the X and Z axes, and two micro-movement YLMs 101-5 for precise positioning around the Y and Z axes may be provided on the micro-movement base 101-2. A micro-movement electromagnet 101-3 may be provided in the center of the micro-movement base 101-2, which functions to transmit the acceleration forces in the X and Y directions applied to the XY slider 104 to the micro-movement base 101-2.

[0016] Figure 4 shows the configuration of the fine-movement stage device 101, particularly detailed configuration examples of the fine-movement YLM 101-5 and the fine-movement ZLM 101-6. Note that in Figure 4, a part of the yoke is removed. The fine-movement YLM 101-5 may be composed of a linear motor. The fine-movement YLM 101-5 may include a fine-movement YLM coil base 101-52, a fine-movement YLM coil 101-51, a fine-movement YLM magnet 101-53, a fine-movement YLM yoke 101-54, and a fine-movement LM spacer 101-70. The fine-movement YLM coil base 101-52 may be fixed on the fine-movement base 101-2, and the fine-movement YLM coil 101-51 may be fixed on the coil base 101-52. The fine-adjustment YLM coil 101-51 may be an oval coil having a straight section extending vertically, and four fine-adjustment YLM magnets 101-53 may be arranged with air gaps between them so as to face this straight section. Two YLM yokes 101-54 may be arranged to pass magnetic flux between these magnets. The magnetization direction of the magnets may be in the X-axis direction, adjacent magnets in the Y-axis direction may have opposite polarity, and magnets aligned in the X-axis direction may have the same polarity. A fine-adjustment LM spacer 101-70 may be used to hold the positions of a pair of magnets and yokes against the attractive force acting on them. The magnets, yokes, and spacers may be fixed to a fine-adjustment base 101-2. By passing current through the YLM coil 101-51, a force proportional to the current can be generated in the direction perpendicular to the straight section, i.e., in the Y-axis direction. In addition, by passing currents in opposite directions through two fine-adjustment YLMs 101-51, a moment about the Z-axis can be generated.

[0017] The fine-motion ZLM101-6 may be composed of a linear motor. The fine-motion ZLM101-6 may include a fine-motion ZLM coil base 101-62, a fine-motion ZLM coil 101-61, a fine-motion ZLM magnet 101-63, a fine-motion ZLM yoke 101-64, and a fine-motion LM spacer 101-70. The fine-motion ZLM coil base 101-62 may be fixed on the fine-motion base 101-2, and the fine-motion ZLM coil 101-61 may be fixed on the fine-motion ZLM coil base 101-62. The fine-motion ZLM coil 101-61 may be an oval coil having a horizontally extending straight section, and four fine-motion ZLM magnets 101-63 may be arranged with air gaps between them facing this straight section. Two ZLM yokes 101-64 may be arranged to pass magnetic flux between these magnets. The magnetization direction of the magnets may be along the X-axis, adjacent magnets along the Z-axis may have opposite polarity, and magnets aligned along the X-axis may have the same polarity. The fine-adjustment LM spacers 101-70 can be used to hold the positions of a pair of magnets and yokes against the attractive force acting on them. The magnets, yokes, and spacers can be fixed to the fine-adjustment top plate 101. By passing current through the ZLM coil 101-61, a force proportional to the current can be generated in the direction perpendicular to the straight section, i.e., along the Z-axis. Furthermore, by combining the directions of the currents flowing through the four fine-adjustment ZLMs 101-6, moments around the X-axis and moments around the Y-axis can be generated.

[0018] The XLM101-4 micro-movement control has the same configuration as the YLM101-5 micro-movement control, but rotated 90 degrees. This allows it to generate force in the X-axis direction and moment around the Z-axis.

[0019] Furthermore, four pin units 101-39 may be provided, which can function as temporary storage areas when retrieving a wafer from the micro-movement stage 101 and when placing a wafer on the micro-movement stage 101-1. While it is desirable to have three or more pin units 101-39 for stable temporary wafer placement, a minimum of one is sufficient for transfer. Each pin unit 101-39 has a lifting mechanism for raising and lowering the pin on which the wafer is temporarily placed or placed. Each pin unit 101-39 may have a function to drive the pins to a first state where the upper end of the pin protrudes from the upper surface of the micro-movement stage 101-1, and to drive the pins to a second state where the upper end of the pin is retracted below the upper surface of the micro-movement stage 101-1. In the operation of placing a wafer on the micro-movement stage 101-1, the pin unit 101-39 receives the wafer from a transport mechanism (not shown) in the first state, and then, in the process of transitioning to the second state, passes the wafer on the pins to the micro-movement stage 101-1. In the operation of passing the wafer placed on the micro-movement stage 101-1 to a transport mechanism (not shown), the pin unit 101-39 transitions the pins from the second state to the first state. In this process, the pin unit 101-39 receives the wafer placed on the micro-movement stage 101-1 with its pins and passes it to the transport mechanism (not shown) in the first state.

[0020] The fine-movement stage device 101 does not necessarily have to include the pin unit 101-39. In this case, the fine-movement stage 101-1 can be driven to an upward position by the fine-movement ZLM 101-6, thereby enabling the transfer of wafers to and from a transport mechanism (not shown).

[0021] Figure 5 illustrates the detailed configuration of the coarse-motion stage device, particularly the X slider 102, Y slider 103, and XY slider 104. The XY slider 104 may include a lower XY slider component 104-3, a middle XY slider component 104-2, and an upper XY slider component 104-1. The lower XY slider component 104-3 is slidably supported on the stage base 105 in the XY direction, the middle XY slider component 104-2 is placed on it, and the upper XY slider component 104-1 is placed on it.

[0022] The X-slider 102 may include an X-beam 102-1, two X-foots 102-2, and two X-yaw guides 102-3. The two X-yaw guides 102-3 may be fixed to two sides of the stage base 105. The two X-foots 102-2 may be connected by the X-beam 102-1. One X-foot 102-2 may be supported to slide freely in the X-axis direction, facing the side of one X-yaw guide 102-3 and the top surface of the stage base 105 with a gap between them. The other X-foot 102-2 may be supported to slide freely in the X-axis direction, facing the side of the other X-yaw guide 102-3 and the top surface of the stage base 105 with a gap between them. This allows the X-beam 102-1 and the two X-foots 102-2 to be positioned to slide freely in the X-axis direction. Furthermore, both sides of the X-beam 102-1 are slidably facing the inner surface of the XY slider component 104-2 via a small gap, thereby constraining the XY slider 104 to slide freely in the XY direction.

[0023] The Y-slider 103 may include a Y-beam 103-1, Y-foot 103-2, and Y-yaw guide 103-3. Two Y-yaw guides 103-3 may be fixed to two sides of the stage base 105, and two Y-foots 103-2 may be connected by the Y-beam 103-1. One Y-foot 103-2 may be supported to slide freely in the Y-axis direction, facing the side of one Y-yaw guide 103-3 and the top surface of the stage base 105 with a gap between them. The other Y-foot 103-2 may be supported to slide freely in the Y-axis direction, facing the side of the other Y-yaw guide 103-3 and the top surface of the stage base 105 with a gap between them. This allows the Y-beam 103-1 and the two Y-foots 103-2 to be slidably positioned in the X-axis direction. Furthermore, both sides of the Y-beam 103-1 are slidably facing the inner surface of the XY slider upper component 104-1 via a small gap, thereby constraining the XY slider 104 to slide freely in the XY direction.

[0024] Figure 6 illustrates a detailed configuration of the coarse-acting linear motor 106. The coarse-acting linear motor 106 may include a plurality of linear motor coils 106-1, a coil support plate 106-2, a support column 106-3, a coil base 106-4, two linear motor magnets 106-5, a yoke 106-6, two spacers 106-7, and an arm 106-8.

[0025] The multiple linear motor coils 106-1 may be two-phase coil units in which the phases of adjacent linear motor coils 106-1 differ by 90 degrees from each other. The multiple linear motor coils 106-1 may be fixed to a coil support plate 106-2 and fixed to a coil base 106-4 via a support column 106-3. The coil base 106-4 may be fixed to a stage plate 692, or it may be slidably supported by the stage plate 692 in the direction of the coil alignment. In the configuration in which the coil base 106-4 is slidably supported, the reaction of acceleration can be absorbed. The two linear motor magnets 106-5 may each be a four-pole magnet unit, and they may be arranged to sandwich the linear motor coil 106-1 from above and below with an air gap between them.

[0026] A yoke 106-6 may be positioned behind each linear motor magnet 106-5. A spacer 106-7 may be used to maintain a gap between two linear motor magnets 106-5 to counteract attractive forces. The structure consisting of the linear motor magnets 106-5, yoke 106-6, and spacer 106-7 may be fixed to an X-foot 102-2 or a Y-foot 103-2 via an arm 106-8. This structure can provide thrust in the X-axis direction and Y-axis direction to an integrated structure of an X-beam and two X-foots, or a integrated structure of a Y-beam and two Y-foots. In this configuration, force can be continuously generated by passing a position-dependent sinusoidal current through the coil of the two-phase coil facing the magnet.

[0027] Figure 7 illustrates a shot layout diagram, which is an arrangement of multiple shot regions on a wafer 700. Shot regions 701 with sizes Sx and Sy in the X-axis direction and Y-axis direction, respectively, may be arranged on the wafer 700. Multiple shot regions 701 are scanned and exposed, for example, along a step-scan trajectory. During scan exposure, the micro-movement stage 101-1 can be driven to scan in the Y-axis direction in synchronization with the reticle stage by a scanning amount equal to 1 / projection magnification of the reticle stage's scanning amount. After scan exposure is completed, the micro-movement stage 101-1 can make a U-turn in the Y-axis direction while stepping in the X-axis direction to scan and expose the next shot region. By using an electromagnet to accelerate the micro-movement stage 101-1 and a linear motor for position control, high-precision position control and low heat generation can be achieved simultaneously.

[0028] When accelerating the micro-movement stage 101-1, a moment may act on it. If the micro-movement ZLM 101-6 is operated to counteract this moment, the heat generated from the ZLM 101-6 may increase. This heat generation can cause deformation of the micro-movement stage 101-1, and this deformation can lead to a decrease in overlay accuracy.

[0029] To suppress the heat generated from the micro-movement ZLM101-6, it is effective to reduce the moment acting on the micro-movement stage 101-1 when accelerating it. To reduce the moment acting on the micro-movement stage 101-1 when accelerating it, it is effective to reduce the distance between the micro-movement XLM101-4, micro-movement YLM101-5, and micro-movement ZLM101-6 and the center of gravity of the micro-movement stage 101-1. To achieve this, it is advantageous to reduce the height of the micro-movement electromagnet 101-3 on the micro-movement base 101-2.

[0030] Figures 26 and 27 illustrate an exemplary configuration of the micro-movement electromagnet 101-3 that is advantageous for reducing the moment acting on the micro-movement stage 101-1 when accelerating the micro-movement stage 101-1. The micro-movement electromagnet 101-3 may include an E-core 101-300, an E-core support member 101-30 supporting the E-core 101-300, an E-core coil 101-36, an I-core 101-38, and an I-core support member 101-31 supporting the I-core 101-38.

[0031] In the examples of Figures 26 and 27, four support members 101-30 are fixed on the micro-movement base 101-2, and an E-core 101-300 is placed on each of them, and an E-core coil 101-36 may be wound around each E-core 101-300. The E-core 101-300 and the I-core 101-38 face each other with a small gap in between. The I-core 101-38 may be fixed to the micro-movement stage 101-1. The E-core 101-300 has a crank shape in cross-section, which allows the E-core coil 101-36 to be positioned vertically downward compared to the configurations in Figures 4 and 28. This reduces the height of the micro-movement electromagnet 101-3 on the micro-movement base 101-2.

[0032] In the configurations shown in Figures 26 and 27, the moment M acting on the micro-movement stage 101-1 when accelerating the stage 101-1 of mass m with acceleration a is M = m·a·(hg+hu+he). On the other hand, in the configurations shown in Figures 4 and 28, the moment M acting on the micro-movement stage 101-1 when accelerating the stage 101-1 of mass m with acceleration a is M = m·a·(hg+hu+he+hc). Therefore, in the configurations shown in Figures 26 and 27, the moment M acting on the micro-movement stage 101-1 when accelerating the stage 101-1 of mass m with acceleration a is reduced by m·a·hc compared to the configurations shown in Figures 4 and 28. As a result, the heat generated by the micro-movement ZLM101-6 by operating the micro-movement ZLM101-6 to cancel out the moment can be reduced. This is advantageous in suppressing deformation of the micro-movement stage 101-1 and further suppressing a decrease in overlay accuracy. hg is the distance in the Z-axis direction between the center of gravity G of the structure consisting of the micro-movement stage 101-1 and components that move with the micro-movement stage 101-1 (movable core MC and support member 101-31, etc.) and the lower surface of the micro-movement stage 101-1 (the surface on the micro-movement base 101-2 side). hu is the distance in the Z-axis direction between the lower surface of the micro-movement stage 101-1 and the upper end of the micro-movement electromagnet 101-3 (the end on the micro-movement stage 101-1 side). he is the distance in the Z-axis direction between the upper end of the fixed core SC and the point of application of the micro-movement electromagnet 101-3. hc is the distance in the Z-axis direction between the upper end of the coil 101-36 (the end on the micro-movement stage 101-1 side) and the upper end of the fixed core SC.

[0033] Figure 29 shows an example configuration of the E-core 101-300. In the example in Figure 29, the E-core 101-300 is composed of a laminate of multiple electromagnetic steel sheets, with the lamination method in the Z-axis direction. Each electromagnetic steel sheet is covered with an insulating film. In Figure 29, the direction of magnetic flux in the magnetic circuit is indicated by black arrows, and the magnetic flux flows through a three-dimensional path. Magnetic flux flowing in the Z-axis direction is indicated by thick black arrows. Since the direction of the thick black arrows is parallel to the normal direction of the electromagnetic steel sheets, eddy currents generated by changes in current flow along the surface of the electromagnetic steel sheets with nothing to suppress them. Therefore, large eddy currents can be generated, as shown by the thick white arrows. This can cause the E-core 101-300 to heat up, and this heat is transferred to the micro-movement stage 101-1, which can deform the micro-movement stage 101-1 and reduce the overlay accuracy. Furthermore, the magnetic flux in the Z-axis direction, indicated by the thick black arrow, is parallel to the normal direction of the electromagnetic steel sheet. This can result in high magnetic resistance, a decrease in magnetic flux value, and a reduction in attractive force, which can be detrimental.

[0034] The following describes a preferred configuration example of the micro-movement electromagnet 101-3. While the following description applies an example of the electromagnetic device of the present invention to the micro-movement electromagnet 101-3, the electromagnetic device of the present invention is also applicable to other forms of electromagnetic devices, particularly electromagnetic devices in which the direction of magnetic flux flow in a magnetic circuit can change in three dimensions.

[0035] Figure 8 illustrates the configuration of a micro-movement electromagnet 101-3 of the first embodiment. The micro-movement electromagnet 101-3 may include a fixed core (first member) SC, a support member 101-30 supporting the fixed core SC, a movable core (second member) MC, a support member 101-31 supporting the movable core MC, and a coil 101-36. The fixed core (first member) SC may include a first element 101-32, a second element 101-33, a third element 101-34, and a fourth element 101-35. The movable core (second member) MC may include element 101-38, but may also include one or more other elements in addition to element 101-38. The fixed core (first member) SC has a first end face E1, and the movable core (second member) MC may have a second end face E2 facing the first end face E1 with a gap between them. In this example, the first end face E1 is provided on the second element 101-33, the third element 101-34, and the fourth element 101-35, respectively, and the second end face E2 is provided on element 101-38.

[0036] The fixed core (first member) SC may be composed of a laminate of multiple electrical steel sheets. Each of the multiple electrical steel sheets may be coated with an insulating film. In other words, each of the first elements 101-32, second elements 101-33, third elements 101-34, and fourth elements 101-35 constituting the fixed core (first member) SC may be composed of a laminate of multiple electrical steel sheets. The movable core (second member) MC may be composed of a laminate of multiple electrical steel sheets. In other words, element 101-38, which is at least one element constituting the movable core (second member) MC, may be composed of a laminate of multiple electrical steel sheets. Each of the multiple electrical steel sheets may be coated with an insulating film.

[0037] A magnetic circuit comprising a fixed core (first member) SC, a movable core (second member) MC, and a gap (space between the first end face E1 and the second end face E2) may include at least one transition section CP in which the lamination direction in a laminate of multiple electromagnetic steel sheets changes at a right angle. The transition section CP may include a contact portion between a first portion (e.g., first element 101-32) whose lamination direction is a first direction (e.g., the Z-axis direction) and a second portion (e.g., third element 101-34) whose lamination direction is a second direction perpendicular to the first direction (e.g., the X-axis direction). The transition section CP may include a portion that brings the first portion (e.g., first element 101-32) whose lamination direction is a first direction and the second portion (e.g., third element 101-34) whose lamination direction is a second direction perpendicular to the first direction face each other via a solid member. The solid member may be, for example, an insulating film coating each of the multiple electromagnetic steel sheets.

[0038] In the example shown in Figure 8, the change section CP is provided on the fixed core (first member) SC. Also in the example shown in Figure 8, the change section CP includes a portion where the fixed core (first member) SC and the movable core (second member) MC face each other with a gap in between. The latter configuration may be understood as a configuration in which the first part of the first and second parts constituting the change section CP is provided on the fixed core (first member) SC and the second part is provided on the movable core (second member) MC. The change section CP may be provided additionally on the movable core (second member) MC, or it may be provided only on the movable core (second member) MC.

[0039] Each of the fixed core (first member) SC and the movable core (second member) MC may consist of at least one stacked core. Alternatively, at least one of the fixed core (first member) SC and the movable core (second member) MC may consist of multiple stacked cores. Such multiple stacked cores may be arranged in close proximity to each other and fixed by a fixed member. The stacked core may be constructed by laminating electromagnetic steel sheets of the same shape.

[0040] The first element 101-32, the second element 101-33, the third element 101-34, and the fourth element 101a-35 may be composed of a stacked core. The first element 101-32, the second element 101-33, the third element 101-34, and the fourth element 101-35 may be integrated using adhesive or by fastening with clamp components. In this example, at least one variable section CP is provided on the fixed core (first member) SC, and the coil 101-36 is wound around the fixed core (first member) SC. The coil 101-36 may be wound around a portion of the fixed core (first member) SC different from the portion where the variable section CP is located. By passing an electric current through the coil 101-36, an attractive force is generated between the first end face E1 and the second end face E2. In the example shown in Figure 8, the first element 101-32 has an E-shape, and the coil 101-36 is wound around the central teeth of the first element 101-32.

[0041] The variable section CP is provided so that the magnetic flux passing through the magnetic circuit, which is composed of a fixed core (first member) SC, a movable core (second member) MC, and an air gap, does not flow through the multiple electromagnetic steel sheets constituting the fixed core (first member) SC and the movable core (second member) MC in the direction of their stacking. Alternatively, the variable section CP may be provided so that the magnetic flux passing through the fixed core (first member) SC and the movable core (second member) MC flows along the plane direction of each electromagnetic steel sheet. Alternatively, the variable section CP may be provided so that the magnetic resistance of the magnetic circuit composed of the fixed core (first member) SC, the movable core (second member) MC, and an air gap is smaller than when the variable section CP is not present. Alternatively, the variable section CP may be provided so that the eddy currents generated in the magnetic circuit composed of the fixed core (first member) SC, the movable core (second member) MC, and an air gap are smaller than when the variable section CP is not present.

[0042] Constructing a magnetic circuit with an iron core that includes a variable section CP is advantageous in improving the degree of freedom in the shape of the magnetic circuit. Furthermore, constructing an iron core with multiple elements, such as a fixed iron core (first member) SC and a movable iron core (second member) MC, facilitates the manufacture of iron cores with complex shapes and can also simplify the work required for coil installation and replacement. In particular, a configuration in which multiple elements are fastened together with clamp members is advantageous in facilitating coil replacement.

[0043] Figure 9 illustrates an exemplary configuration of a modified micro-movement electromagnet 101-3 of the first embodiment. Parts not mentioned as modifications may follow the configuration of the first embodiment shown in Figure 8. The micro-movement electromagnet 101-3 may include a fixed core (first member) SC, a support member 101b-30 supporting the fixed core SC, a movable core (second member) MC, a support member (not shown) supporting the movable core MC, and a coil 101-36. The fixed core (first member) SC may include a first element 101b-32, a second element 101b-33, a third element 101b-34, and a fourth element 101b-35. The movable core (second member) MC may include element 101-38, but may also include one or more other elements besides element 101-38. Similar to the example in Figure 8, the fixed core (first member) SC has a first end face, and the movable core (second member) MC may have a second end face that faces the first end face with a gap between them. In this example, the first end face is provided on the second element 101b-33, the third element 101b-34, and the fourth element 101b-35, respectively, and the second end face is provided on element 101-38. In the modified example in Figure 9, the second element 101b-33, the third element 101b-34, and the fourth element 101b-35 have a crank shape, and the first element 101b-32 has a rectangular parallelepiped shape.

[0044] The exposure apparatus and micro-movement electromagnet 101-3 of the second embodiment will be described below. Matters not mentioned as being in the second embodiment may follow those of the first embodiment. Figures 10 and 11 illustrate the configuration of the micro-movement electromagnet 101-3 in the wafer stage apparatus 500 of the exposure apparatus of the second embodiment. Figure 11 also illustrates the configuration of the micro-movement electromagnet 101-3 with the micro-movement base 101-2 removed.

[0045] In the second embodiment, four openings 201a-21 are provided in the micro-movement base 101-2, and a portion of each micro-movement electromagnet 101a-3 may be placed in the corresponding opening 201a-21. A portion of each of the four micro-movement electromagnets 101a-3 may be placed below the micro-movement base 101-2. Each micro-movement electromagnet 101a-3 may be supported by the micro-movement base 101-2 via a support member 201a-30. Such a configuration is advantageous for reducing the height of the micro-movement electromagnets 101a-3 on the micro-movement base 101-2 and for reducing the dimensions of the micro-movement electromagnets 101a-3 in the XY direction.

[0046] The micro-movement electromagnet 101-3 may include a fixed core (first member) SC, a support member 201a-30 supporting the fixed core SC, a movable core (second member) MC, a support member 101-31 supporting the movable core MC, and a coil 201a-36. The fixed core (first member) SC may include a first element 201a-32, a second element 201a-33, a third element 201a-34, and a fourth element 201a-35. The movable core (second member) MC may include element 101-38, but may also include one or more other elements in addition to element 101-38. The fixed core (first member) SC has a first end face E1, and the movable core (second member) MC may have a second end face E2 facing the first end face E1 with a gap between them. In this example, the first end face E1 is provided on the second element 201a-33, the third element 201a-34, and the fourth element 201a-35, respectively, and the second end face E2 is provided on element 101-38.

[0047] The fixed core (first member) SC may be composed of a laminate of multiple electrical steel sheets. Each of the multiple electrical steel sheets may be coated with an insulating film. In other words, each of the first element 201a-32, second element 201a-33, third element 201a-34, and fourth element 201a-35 constituting the fixed core (first member) SC may be composed of a laminate of multiple electrical steel sheets. The movable core (second member) MC may be composed of a laminate of multiple electrical steel sheets. In other words, at least one element 101-38 constituting the movable core (second member) MC may be composed of a laminate of multiple electrical steel sheets. Each of the multiple electrical steel sheets may be coated with an insulating film.

[0048] A magnetic circuit composed of a fixed core (first member) SC, a movable core (second member) MC, and a gap (space between the first end face E1 and the second end face E2) may include at least one transition section CP in which the lamination direction in a laminate of multiple electromagnetic steel sheets changes at a right angle. The transition section CP may include a contact portion between a first portion (e.g., first element 201a-32) whose lamination direction is a first direction (e.g., the Y-axis direction) and a second portion (e.g., third element 201a-34) whose lamination direction is a second direction perpendicular to the first direction (e.g., the X-axis direction). The transition section CP may include a portion that brings the first portion (e.g., first element 201a-32) whose lamination direction is a first direction and the second portion (e.g., third element 201a-34) whose lamination direction is a second direction perpendicular to the first direction face each other via a solid member. The solid member may be, for example, an insulating film covering each of the multiple electromagnetic steel sheets.

[0049] In the examples of Figures 10 and 11, the change section CP is provided on the fixed core (first member) SC. Also in the examples of Figures 10 and 11, the change section CP includes a portion where the fixed core (first member) SC and the movable core (second member) MC face each other with a gap in between. The latter configuration may be understood as a configuration in which the first part of the first and second parts constituting the change section CP is provided on the fixed core (first member) SC and the second part is provided on the movable core (second member) MC. The change section CP may be provided additionally to the movable core (second member) MC, or it may be provided only on the movable core (second member) MC. In the examples of Figures 10 and 11, the second element 201a-33, the third element 201a-34, and the fourth element 201a-3 have an L-shape, and the first element 201a-32 has a rectangular parallelepiped shape.

[0050] Figure 12 illustrates an exemplary configuration of a modified micro-movement electromagnet 101-3 of the second embodiment. Parts not mentioned as modifications may follow the configuration of the second embodiment shown in Figures 10 and 11. The micro-movement electromagnet 101-3 may include a fixed core (first member) SC, a support member 201a-30 supporting the fixed core SC, a movable core (second member) MC, a support member 101-31 supporting the movable core MC, and a coil 201a-36. The fixed core (first member) SC may include a first element 201b-32, a second element 201b-33, a third element 201b-34, and a fourth element 201b-35. The movable core (second member) MC may include element 101-38, but may also include one or more other elements besides element 101-38. The fixed core (first member) SC has a first end face E1, and the movable core (second member) MC may have a second end face E2 that faces the first end face E1 with a gap between them. In this example, the first end face E1 is provided on the second element 201b-33, the third element 201b-34, and the fourth element 201b-35, respectively, and the second end face E2 is provided on element 101-38. In the modified example in Figure 12, the first element 201b-32 has an E-shape, and the coil 201a-36 is wound around the central teeth of the first element 201a-32. Also in the modified example in Figure 12, the second element 201b-33, the third element 201b-34, and the fourth element 201b-35 have a rectangular parallelepiped shape.

[0051] The assembly or manufacturing method of the modified micro-electromagnet 101-3 of Figure 12 will be described below with reference to Figures 18 to 22. Figure 18 shows the micro-electromagnet 101-3 of Figure 12 in a disassembled state. The first element 201a-32 and the support member 201a-30 can be joined by adhesive, clamps, fittings, etc. Also, the coil 201a-36 and the coil base 201a-42 can be joined by adhesive, etc. Furthermore, the second element 201b-33, the third element 201b-34 and the fourth element 201b-35 can be joined via the tip component spacer 201a-40 by adhesive, clamps, fittings, etc.

[0052] As illustrated in Figure 19, the first element 201a-32 is inserted into the opening 201a-21 of the micro-adjustment base 101-2, and the combination of the first element 201a-32 and the support member 201a-30 can be positioned on the micro-adjustment base 101-2. The support member 201a-30 can then be fixed to the micro-adjustment base 101-2. The support member 201a-30 can be fixed to the micro-adjustment base 101-2 by means of, for example, screw fastening, adhesive, clamping, fitting, etc.

[0053] Next, as illustrated in Figure 20, the assembly of coil 201a-36 and coil base 201a-42 can be positioned on the fine-adjustment base 101-2, and the coil base 201a-42 can be fixed to the fine-adjustment base 101-2. The coil base 201a-42 can be fixed to the fine-adjustment base 101-2 by means of, for example, screw fastening, adhesive, clamping, fitting, etc.

[0054] Next, as illustrated in Figure 21, the tip component base 201a-41 can be fixed to the fine adjustment base 101-2 by, for example, screw fastening, adhesive, clamping, fitting, etc.

[0055] Next, as illustrated in Figure 22, the second element 201b-33, the third element 201b-34, the fourth element 201b-35, and the combined body of the second element 201b-33, the third element 201b-34, and the fourth element 201b-35 can be fixed to the end component base 201a-41. This can be done by fixing the end component spacer 201a-40 to the end component base 201a-41 by screw fastening, adhesive, clamping, fitting, etc.

[0056] The replacement of coil 201a-36 can be performed by following the reverse procedure described above to return to the state shown in Figure 19, fixing the new coil 201a-36 to the fine adjustment base 101-2 as illustrated in Figure 20, and then following the procedure illustrated in Figures 21 and 22.

[0057] When forming a fixed iron core SC by joining multiple elements, there is a concern that minute relative displacement may occur between the two elements along the interface at the boundary between two elements (for example, the boundary between the second element 201a-33 and the first element 201a-32), potentially generating particles. To address this, a coating to prevent particle generation may be applied to the interface, a collection pan may be provided near the interface, or a collection magnet may be provided near the interface. Furthermore, when fixing the tip component spacer 201a-40 to the tip component base 201a-41, a thin spacer may be inserted between the two to maintain a non-contact state between the first element 201a-32 and the second element 201a-33, the third element 201a-34, and the fourth element 201a-35.

[0058] The exposure apparatus and micro-movement electromagnet 101-3 of the third embodiment will be described below. Matters not mentioned as belonging to the third embodiment may follow those of the first or second embodiment. Figure 13 illustrates the configuration of the micro-movement electromagnet 101-3 of the third embodiment. The micro-movement electromagnet 101-3 may include a fixed core (first member) SC, a support member 301a-30 supporting the fixed core SC, a movable core (second member) MC, a support member 301a-31 supporting the movable core MC, and a coil 301a-36. The fixed core (first member) SC may include a first element 301a-32, a second element 301a-37, a third element 301a-33, a fourth element 301a-34, and a fifth element 301a-35. The movable core (second member) MC may include elements 301a-38, but may also include one or more other elements in addition to elements 301a-38. The fixed core (first member) SC has a first end face E1, and the movable core (second member) MC may have a second end face E2 facing the first end face E1 through a gap. In this example, the first end face E1 is provided on the third element 301a-33, the fourth element 301a-34, and the fifth element 301a-35, and the second end face E2 is provided on element 301a-38.

[0059] The fixed core (first member) SC may be composed of a laminate of multiple electromagnetic steel sheets. Each of these electromagnetic steel sheets may be covered with an insulating film. In other words, the third element 301a-33 and the fourth element 301a-34, and the fifth element 301a-35, which constitute part of the fixed core (first member) SC, may be composed of a laminated core made of multiple electromagnetic steel sheets. Furthermore, the first element 301a-32 and the second element 301a-37, which constitute other parts of the fixed core (first member) SC, may be composed of a wound core that can be formed by winding electromagnetic steel sheets. When used as a component of the fixed core (first member) SC, the wound core has a form of structure in which multiple electromagnetic steel sheets are laminated. The movable core (second member) MC may be composed of a laminated core made of multiple electromagnetic steel sheets. In other respects, element 301a-38, which is at least one element constituting the movable core (second member) MC, may be composed of a laminate of multiple electrical steel sheets. Each of these multiple electrical steel sheets may be covered with an insulating film.

[0060] The magnetic circuit, composed of a fixed core (first member) SC, a movable core (second member) MC, and a gap (space between the first end face E1 and the second end face E2), may include transition sections CP and CP' where the lamination direction in a laminate of multiple electromagnetic steel sheets changes at a right angle. The transition section CP may include a contact portion between a first portion (e.g., fifth element 301a-38) where the lamination direction is a first direction (e.g., the Z-axis direction) and a second portion (e.g., second element 301a-37) where the lamination direction is a second direction perpendicular to the first direction (e.g., the X-axis direction). The transition section CP may include a portion that brings the first portion (e.g., fifth element 301a-38) where the lamination direction is a first direction and the second portion (e.g., second element 301a-37) where the lamination direction is a second direction perpendicular to the first direction face each other via a solid member. The solid member may be, for example, an insulating film covering each of the multiple electromagnetic steel sheets. The transition section CP' includes a portion in which the lamination direction gradually changes from a first direction (e.g., the X-axis direction) to a second direction perpendicular to the first direction (e.g., the Z-axis direction). The transition section CP', which includes the portion in which the lamination direction gradually changes, may be part of the wound core. The fixed core (first member) SC includes a first portion P1 in which the lamination direction is the first direction (e.g., the X-axis direction) and a second portion P2 in which the lamination direction is the second direction (e.g., the Z-axis direction), with the lamination direction gradually changing between the first portion P1 and the second portion P2. The transition section CP' is the portion between the first portion P1 and the second portion P2.

[0061] In the example shown in Figure 13, the change sections CP and CP' are provided on the fixed core (first member) SC. At least one of the change sections CP and CP' may be additionally provided on the movable core (second member) MC, or it may be provided only on the movable core (second member) MC. One of the fixed core (first member) SC and the movable core (second member) MC is composed of at least one laminated core, the other of the fixed core (first member) SC and the movable core (second member) MC is composed of a wound core, and the change section may be composed of a wound core.

[0062] The first element 301a-32, the second element 301a-37, the third element 301a-33, and the fourth element 301a-34 and the fifth element 301a-35 may be integrated using adhesive or by fastening with clamp components. In this example, the variable parts CP and CP' are provided on the fixed core (first member) SC, and the coil 301a-36 is wound around the fixed core (first member) SC. The coil 301a-36 may be wound around a portion of the fixed core (first member) SC different from the portion where the variable parts CP and CP' are located. By passing an electric current through the coil 301a-36, an attractive force is generated between the first end face E1 and the second end face E2. In the example shown in Figure 13, the first element 301a-32 and the second element 301a-37 have a U-shape, and the coil 301a-36 is wound around one tooth of the first element 301a-32 and one tooth of the second element 301a-37 that are integrated.

[0063] The variable sections CP and CP' are provided so that the magnetic flux passing through the magnetic circuit, which is composed of a fixed core (first member) SC, a movable core (second member) MC, and an air gap, does not flow through the multiple electromagnetic steel sheets constituting the fixed core SC and the movable core MC in the direction of their stacking. Alternatively, the variable sections CP and CP' may be provided so that the magnetic flux passing through the fixed core SC and the movable core MC flows along the plane direction of each electromagnetic steel sheet. Alternatively, the variable sections CP and CP' may be provided so that the magnetic resistance of the magnetic circuit, which is composed of a fixed core (first member) SC, a movable core (second member) MC, and an air gap, is smaller than when the variable sections CP and CP' are not provided. Alternatively, the variable sections CP and CP' may be provided so that the eddy currents generated in the magnetic circuit, which is composed of a fixed core (first member) SC, a movable core (second member) MC, and an air gap, are smaller than when the variable sections CP and CP' are not provided.

[0064] In the example shown in Figure 13, the stacking direction (Z-axis direction) of the third element 301a-33, the fourth element 301a-34, and the fifth element 301a-35, which have the first end face E1, is the same as the stacking direction (Z-axis direction) of the element 301a-38, which has the second end face E2. This can contribute to reducing magnetic resistance near the air gap and increasing magnetic flux.

[0065] Instead of the configuration example in Figure 13, the stacking direction of the third element 301a-33, the fourth element 301a-34, and the fifth element 301a-35 may be in the X-axis direction. Such a configuration may contribute to reducing the magnetic resistance and increasing the magnetic flux near the boundary between the third element 301a-33, the fourth element 301a-34, and the fifth element 301a-35 and the first element 301a-32 and the second element 301a-37.

[0066] Figure 14 illustrates an exemplary configuration of a modified micro-movement electromagnet 101-3 of the third embodiment. Parts not mentioned as modifications may follow the configuration of the third embodiment shown in Figure 13. The micro-movement electromagnet 101-3 may include a fixed core (first member) SC, support members 301b-30 supporting the fixed core SC, a movable core (second member) MC, support members 301b-31 supporting the movable core MC, and a coil 301b-36. The fixed core (first member) SC may include a first element 301b-32 and a second element 301b-33. The movable core (second member) MC may include a third element 301b-37 and a fourth element 301b-38. The fixed core (first member) SC has a first end face E1, and the movable core (second member) MC may have a second end face E2 that faces the first end face E1 across a gap. In this example, the first end face E1 is provided on the first element 301b-32 and the second element 301b-33, and the second end face E2 is provided on the third element 301b-37 and the fourth element 301b-38.

[0067] The fixed core (first member) SC may be composed of a laminate of multiple electromagnetic steel sheets. Each of these electromagnetic steel sheets may be coated with an insulating film. In other words, the first elements 301b-32 and 2 elements 301b-33, which constitute part of the fixed core (first member) SC, may be composed of a laminate of multiple electromagnetic steel sheets. When used as a component of the fixed core (first member) SC, the wound core also has a structure in which multiple electromagnetic steel sheets are laminated. The movable core (second member) MC may be composed of a laminate of multiple electromagnetic steel sheets. In other words, the third elements 301b-37 and 4th elements 301b-38, which constitute the movable core (second member) MC, may be composed of a laminate of multiple electromagnetic steel sheets. Each of these electromagnetic steel sheets may be coated with an insulating film.

[0068] The magnetic circuit, composed of a fixed core (first member) SC, a movable core (second member) MC, and a gap (space between the first end face E1 and the second end face E2), may include transition sections CP' and CP'' in which the lamination direction of the laminated electromagnetic steel sheets changes at a right angle. In this example, the transition section CP' is provided in the fixed core (first member) SC, and the transition section CP'' is provided in the movable core (second member) MC.

[0069] The transition section CP' includes a portion in which the lamination direction gradually changes from a first direction (e.g., the X-axis direction) to a second direction perpendicular to the first direction (e.g., the Z-axis direction). The transition section CP', which includes the portion in which the lamination direction gradually changes, may be part of the wound core. The fixed core (first member) SC includes a first portion P1 in which the lamination direction is the first direction (e.g., the X-axis direction) and a second portion P2 in which the lamination direction is the second direction (e.g., the Z-axis direction), with the lamination direction gradually changing between the first portion P1 and the second portion P2. The transition section CP' is the portion between the first portion P1 and the second portion P2.

[0070] The movable core (second member) MC includes a third portion P3 whose stacking direction is a first direction (e.g., the X-axis direction) and a fourth portion P4 whose stacking direction is a second direction (e.g., the Y-axis direction), with the stacking direction gradually changing between the third portion P3 and the fourth portion P4. The change portion CP is the portion between the third portion P3 and the fourth portion P4.

[0071] By passing an electric current through coil 301b-36, an attractive force is generated between the first end face E1 and the second end face E2. In the example in Figure 14, the first element 301b-32 and the second element 301b-33 have a U-shape, and coil 301b-36 is wound around a portion where one tooth of the first element 301a-32 and one tooth of the second element 301a-37 are integrated.

[0072] The variable sections CP' and CP'' are provided so that the magnetic flux passing through the magnetic circuit, which is composed of a fixed core (first member) SC, a movable core (second member) MC, and an air gap, does not flow through the multiple electromagnetic steel sheets constituting the fixed core SC and the movable core MC in the direction of their stacking. Alternatively, the variable sections CP' and CP'' may be provided so that the magnetic flux passing through the fixed core SC and the movable core MC flows along the plane direction of each electromagnetic steel sheet. Alternatively, the variable sections CP' and CP'' may be provided so that the magnetic resistance of the magnetic circuit, which is composed of a fixed core (first member) SC, a movable core (second member) MC, and an air gap, is smaller than when the variable sections CP' and CP'' are not provided. Alternatively, the variable sections CP' and CP'' may be provided so that the eddy currents generated in the magnetic circuit, which is composed of a fixed core (first member) SC, a movable core (second member) MC, and an air gap, are smaller than when the variable sections CP' and CP'' are not provided.

[0073] In the example shown in Figure 14, the stacking direction (X-axis direction) of the first element 301b-32 and the second element 301b-33 at the first end face E1 is the same as the stacking direction (X-axis direction) of the third element 301b-37 and the fourth element 301b-38 at the second end face E2. This can contribute to reducing magnetic resistance near the air gap and increasing magnetic flux. Also, in the example shown in Figure 14, the stacking direction does not change abruptly in the magnetic circuit composed of the fixed core (first member) SC, the movable core (second member) MC, and the air gap, which is advantageous for reducing magnetic resistance and increasing magnetic flux.

[0074] Figure 15 illustrates the structure of support members 301b-31 that support the movable core MC. The support members 301b-31 may have a star wheel shape to support the movable core MC, which may be composed of a wound core.

[0075] Here, we will explain the wound core with reference to Figure 23. Figure 23(a) shows an example of a wound core. Figure 23(b) shows a wound core obtained by cutting the wound core exemplified in Figure 23(a) with a wire cutter or the like; such a wound core is also called a cut core. A wound core can be manufactured by winding hoop material around a core (not shown). As exemplified in Figure 24, hoop material can be manufactured with a slitter exemplified in Figure 24. The original coil roll is fed in the direction of sheet feeding, and the hoop material is obtained by cutting it to the desired width with a slitter that includes circular blades installed along the way. This width is determined by the spacing of the circular blades of the slitter.

[0076] As illustrated in Figure 23(a), a wound core is a laminate of multiple electrical steel sheets, and a single wound core has multiple lamination directions. In other words, a wound core can be used as a component constituting the aforementioned change section. The lamination direction is the direction that penetrates the point of interest in the wound core perpendicular to the electrical steel sheets. The width direction is the direction determined by the slitter and is also the axial direction. The axial direction is the direction parallel to any point on the widest surface of each electrical steel sheet.

[0077] In one aspect, the electromagnetic device of the present invention may comprise a plurality of core members composed of stacked cores or wound cores, and a coil for generating magnetic flux in the core members. Here, the stacking direction of one stacked core and the width direction of one wound core may be perpendicular, or the stacking directions of one stacked core and another stacked core may be perpendicular, or the width directions of one wound core and another wound core may be perpendicular.

[0078] The control system of the wafer stage apparatus 500 will be described below. Figure 16 shows an illustrative configuration of the control system of the wafer stage apparatus 500. The moving target provisioning unit 5101 provides a moving target. The position profile generator 5102 generates a position profile showing the relationship between time and the position of the micro-movement stage 101-1 at that time, based on the moving target provided by the moving target provisioning unit 5101. The position profile generator 5102 also generates a target position according to the generated position profile. The acceleration profile generator 5103 generates an acceleration profile showing the relationship between time and the acceleration of the micro-movement stage 101-1 at that time, based on the moving target provided by the moving target provisioning unit 5101. The acceleration profile generator 5103 also generates a target acceleration according to the generated acceleration profile. Figure 17 illustrates the position profile generated by the position profile generator 5102 and the acceleration profile generated by the acceleration profile generator 5103.

[0079] The micro-position sensor 5156 measures the position of the micro-position stage 101-1. The micro-position control system 5121 generates a manipulated variable using PID calculation or the like, according to the deviation between the target position given by the position profile generated by the position profile generator 5102 and the current position given by the micro-position sensor 5156. The current amplifier 5122 supplies current to the micro-XLM 101-4 and micro-YLM 101-5 according to the manipulated variable generated by the micro-position control system 5121. This allows the micro-position stage 101-1 to be feedback controlled.

[0080] The coarse position sensor 5135 measures the position of the fine position base 101-2. The coarse position control system 5133 generates a manipulated variable using PID calculations or the like, according to the deviation between the target position given by the position profile generated by the position profile generator 5102 and the current position given by the coarse position sensor 5135. The current amplifier 5131 supplies a current to the coarse linear motor 106 corresponding to the manipulated variable generated by the coarse position control system 5133 and the target acceleration given by the acceleration profile generator 5103. This allows the fine position base 101-2 to be controlled by feedback and feedforward.

[0081] The target acceleration generated by the acceleration profile generator 5103 is also supplied to the electromagnet current control system 5515, which controls the micro-movement electromagnets 101-3 according to the target acceleration. When the micro-movement stage 101-1 (micro-movement stage device 101) is accelerating, force is mainly applied to the micro-movement stage 101-1 by the micro-movement electromagnets 101-3. The micro-movement XLM 101-4 and micro-movement YLM 101-5 can be controlled to generate thrust to reduce slight positional deviations between the target position and the measured current position. This can reduce the heat generated by the micro-movement XLM 101-4 and micro-movement YLM 101-5.

[0082] The coarse-motion position control system 5133 moves the position of the fine-motion base 101-2 according to the position profile generated by the position profile generator 5102. The fine-motion electromagnet 101-3 is advantageous because it generates a large attractive force with very little heat generation. However, the air gap between the first end face E1 and the second end face E2 of the fine-motion electromagnet 101-3 must be maintained. In other words, in order for the fine-motion electromagnet 101-3 to continuously apply the desired force to the fine-motion stage 101-1, it is necessary to move the stator (fixed iron core and coil) of the fine-motion electromagnet 101-3 in accordance with the movement of the fine-motion stage 101-1 to maintain the air gap. Furthermore, the heat generated by the fine-motion ZLM can be reduced by reducing the height of the fine-motion electromagnet 101-3 on the fine-motion base 101-2. As a result, high-precision position control of the fine-motion stage 101-1, reduced heat generation, and reduced overlay error can be achieved.

[0083] This is achieved by the coarse motion position control system 5133. The coarse motion position, that is, the position of the fine motion base 101-2, is measured by a coarse motion position sensor 5135, which is represented by an encoder, and the coarse motion linear motor 106 is driven by the coarse motion position control system 5133 based on the deviation between this position and the target position. As a result, both the position of the fine motion stage 101-1 (movable element of the fine motion electromagnet 101-3) and the position of the fine motion base 101-2 (stator of the fine motion electromagnet 101-3) are controlled based on the output of the position profile generator 5102, and the air gap is maintained. The fine motion position sensor 5156 that measures the position of the fine motion stage 101-1 may be replaced by a sensor that measures the relative position between the fine motion stage 101-1 and the fine motion base 101-2.

[0084] The electromagnetic device of the fourth embodiment will be described below. Matters not mentioned in the fourth embodiment may follow those mentioned in the first to third embodiments, to the extent that they do not contradict each other. The fourth embodiment provides an example in which the electromagnetic device of the present invention is applied to a magnetic bearing. Figure 25 shows an exemplary configuration of the electromagnetic bearing of the fourth embodiment.

[0085] The electromagnetic bearing 401 may be positioned to support the rotating shaft 403. In the example in Figure 25, a micro-movement electromagnet having a similar configuration to the micro-movement electromagnet 101-3 in Figure 14 is used, but other micro-movement electromagnets 101-3 may be used. The support members 301a-31 are fixed to the rotating shaft 403, and a fixed core SC may be positioned such that its first end face E1 faces the second end face E2 of the movable core MC supported by the support members 301a-31. The fixed core SC may be fixed to a housing (not shown). An action part 404 is provided at the end of the rotating shaft 403, and a drive object (e.g., the rotating blades of a pump such as a turbomolecular pump) may be attached to the action part 404.

[0086] The position of the rotating shaft 403 in the XY direction is detected by a sensor (not shown), and the current supplied to the coils wound around each fixed core can be controlled based on the result. The position of the rotating shaft 403 in the Z-axis direction in the XY direction can be controlled using sensors and actuators (not shown).

[0087] The disclosures herein include the following electromagnetic devices, alignment devices, and methods for manufacturing articles. (Item 1) An electromagnetic device comprising a first member having a first end face, a second member having a second end face facing the first end face with a gap between them, and a coil wound around the first member or the second member, The first member and the second member are composed of a laminate of multiple electromagnetic steel sheets. The magnetic circuit composed of the first member, the second member and the gap includes a transition section in which the stacking direction in the laminate changes at a right angle. An electromagnetic device characterized by the following features. (Item 2) The modified portion includes a contact portion between a first portion whose stacking direction is a first direction and a second portion whose stacking direction is a second direction perpendicular to the first direction. The electromagnetic device described in item 1, characterized by the features described herein. (Item 3) The modified portion includes a portion in which a first portion whose stacking direction is a first direction and a second portion whose stacking direction is a second direction perpendicular to the first direction are brought into contact with each other via a solid member. The electromagnetic device described in item 1, characterized by the features described herein. (Item 4) The aforementioned modification portion is provided on at least one of the first member and the second member. An electromagnetic device as described in any one of items 1 to 3, characterized by the features described herein. (Item 5) The modified portion includes a portion in which a first portion whose stacking direction is a first direction and a second portion whose stacking direction is a second direction perpendicular to the first direction face each other across the gap. The electromagnetic device described in item 1, characterized by the features described herein. (Item 6) The first portion is provided on the first member, and the second portion is provided on the second member. The electromagnetic device described in item 5, characterized by the features described herein. (Item 7) Each of the first and second members is composed of at least one stacked iron core. An electromagnetic device as described in any one of items 1 to 6, characterized by the features described herein. (Item 8) At least one of the first member and the second member is composed of a plurality of stacked iron cores. An electromagnetic device according to any one of items 1 to 6, characterized by the features described herein. (Item 9) The aforementioned multiple stacked iron cores are arranged in close proximity to each other and fixed by fixing members. The electromagnetic device described in item 8, characterized by the features described above. (Item 10) The aforementioned change portion includes a portion in which the stacking direction gradually changes from a first direction to a second direction perpendicular to the first direction. The electromagnetic device described in item 1, characterized by the features described herein. (Item 11) The aforementioned change section is composed of a wound iron core. The electromagnetic device described in item 10, characterized by the features described herein. (Item 12) One of the first member and the second member includes at least one stacked iron core, The other of the first and second members includes a wound iron core. The aforementioned change section is composed of the wound iron core. An electromagnetic device according to any one of items 1 to 11, characterized by the features described herein. (Item 13) Each of the first and second members is composed of a wound iron core. The axial direction of the wound core constituting the first member and the axial direction of the wound core constituting the second member are perpendicular to each other, The change portion is composed of the winding core that constitutes the first member and the winding core that constitutes the second member, An electromagnetic device according to any one of items 1 to 11, characterized by the features described herein. (Item 14) The aforementioned modification section is provided on the first member, and the coil is wound around the first member. An electromagnetic device according to any one of items 1 to 13, characterized by the features described herein. (Item 15) The coil is wound around a portion of the first member that is different from the portion where the modified portion is located. The electromagnetic device described in item 14, characterized by the features described herein. (Item 16) It is configured as an electromagnetic actuator. An electromagnetic device according to any one of items 1 to 15, characterized by the features described herein. (Item 17) It is configured as a magnetic bearing. An electromagnetic device according to any one of items 1 to 15, characterized by the features described herein. (Item 18) An alignment device for aligning a first object and a second object relative to each other, A first positioning mechanism for positioning the first object, The system comprises a second positioning mechanism for positioning the second object, At least one of the first positioning mechanism and the second positioning mechanism includes an electromagnetic device as described in any one of items 1 to 16. A positioning device characterized by the following features. (Item 19) The alignment device according to item 18, characterized in that it is configured as a transfer device for transferring the pattern of the original plate onto a substrate. (Item 20) A transfer process in which the pattern of the master plate is transferred to the substrate using the alignment device described in item 19, A step of obtaining an article from the substrate that has undergone the transfer step, A method for manufacturing articles, characterized by including the following:

[0088] The invention is not limited to the embodiments described above, and various modifications and changes are possible within the scope of the gist of the invention. [Explanation of Symbols]

[0089] E1: First end face, E2: Second end face, SC: Fixed core (first member), MC: Movable core (second member), 101-36: Coil, CP: Change section

Claims

1. An electromagnetic device comprising: a first member having a first end surface; a second member having a second end surface facing the first end surface with a gap therebetween; and a coil wound around the first member or the second member, the first member and the second member are formed of a laminate of a plurality of electromagnetic steel sheets, a lamination direction of the plurality of electromagnetic steel sheets in a first portion of the first member and a lamination direction of the plurality of electromagnetic steel sheets in a second portion of the second member are perpendicular to each other, and the first portion and the second portion face each other via the gap.

1. An electromagnetic device comprising:

2. Further comprising a third member composed of a laminate of a plurality of electromagnetic steel sheets, a lamination direction of the plurality of electromagnetic steel sheets in the third portion of the first member and a lamination direction of the plurality of electromagnetic steel sheets in the fourth portion of the third member are perpendicular to each other, The third portion and the fourth portion are in contact with each other.

2. The electromagnetic device of claim 1.

3. Further comprising a third member composed of a laminate of a plurality of electromagnetic steel sheets, a lamination direction of the plurality of electromagnetic steel sheets in the third portion of the first member and a lamination direction of the plurality of electromagnetic steel sheets in the fourth portion of the third member are perpendicular to each other, The third portion and the fourth portion face each other via a solid member.

2. The electromagnetic device of claim 1.

4. At least one of the first member and the second member includes a change portion in which the stacking direction in the laminate changes at a right angle.

2. The electromagnetic device of claim 1.

5. Each of the first member and the second member is composed of at least one stacked core.

2. The electromagnetic device of claim 1.

6. At least one of the first member and the second member is composed of a plurality of stacked cores.

2. The electromagnetic device of claim 1.

7. The plurality of stacked cores are arranged close to each other and fixed by a fixing member.

7. An electromagnetic device according to claim 6.

8. one of the first member and the second member includes at least one stacked core; the other of the first member and the second member includes a wound core, The change portion is constituted by the wound core.

5. An electromagnetic device as claimed in claim 4.

9. configured as an electromagnetic actuator, 9. An electromagnetic device according to any one of the preceding claims.

10. configured as a magnetic bearing, 9. An electromagnetic device according to any one of the preceding claims.

11. An alignment device for relatively aligning a first object and a second object, comprising: a first positioning mechanism for positioning the first object; a second positioning mechanism for positioning the second object, At least one of the first positioning mechanism and the second positioning mechanism comprises an electromagnetic device according to any one of claims 1 to 10. An alignment device comprising:

12. 12. The alignment apparatus according to claim 11, which is configured as a transfer apparatus that transfers a pattern of an original onto a substrate.

13. a transfer step of transferring a pattern of an original onto a substrate by the alignment apparatus according to claim 12; obtaining an article from the substrate that has undergone the transfer process; A method for manufacturing an article, comprising:

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