High power generator and method for supplying high power pulses

The high power generator system, utilizing a network of low power generators and a control unit to manage their activation, addresses the challenge of delivering high voltage and high current pulses efficiently to capacitive loads in plasma processes, achieving efficient and reliable power delivery.

JP2025508907AActive Publication Date: 2025-04-10TRUMPF HUETTINGER SP ZOO
9 Cites 2 Cited by

Patent Information

Application Number
JP2024550821
Authority / Receiving Office
JP · JP
Patent Type
Applications
Current Assignee / Owner
Priority Date
2022-02-28
Filing Date
2023-02-28
Publication Date
2025-04-10
Estimated Expiration
2043-02-28

AI Technical Summary

Technical Problem

Existing high power generators struggle to deliver high voltage and high current pulsed power efficiently to capacitive loads in plasma processes, particularly due to the limitations of individual semiconductor switches and the challenge of achieving high-frequency operation.

Method used

A high power generator system comprising multiple low power generators connected in a coupling, with a control unit that selectively activates and deactivates the low power generators to achieve the desired output, allowing for the delivery of high voltage and high current pulses with fast rise and fall times.

Benefits of technology

This solution enables efficient delivery of high power pulses with sharp voltage transitions, reducing power loss and improving the reliability and efficiency of the high power generator system for plasma processing applications.

✦ Generated by Eureka AI based on patent content.
Patent Text Reader

Abstract

A high power (HP) generator (10) and a method for delivering pulsed high power at high voltage and / or current values ​​to a capacitive load, in particular a plasma process, comprising: - several low power (LP) generators (14, 16, 18), each LP generator (14, 16, 18) includes an energy storage component (C1, L1), and in use, the energy storage component (C1, L1) is charged to a predetermined value associated with the energy storage component; each LP generator (14, 16, 18) when in use provides at its output an LP generator value corresponding to the value of an energy storage component (C1, C2, Cn, L1, L2, Ln) incorporated in the respective LP generator (14, 16, 18); Several low power (LP) generators (14, 16, 18); - a coupling (20), the LP generators (14, 16, 18) being electrically connected such that a coupling value at an output of the coupling (20) can be obtained which corresponds to an output value of the HP generator (10) and which is higher than the LP generator value at the output of one of the LP generators (14, 16, 18) during use, at least in some states of the HP generator (10); - a control unit (22) configured to select the contribution of the LP generators (14, 16, 18) to the output value of the HP generator (10) during the power delivery of the HP generator (10) in order to produce a rise and / or a decay of a pulse at the output of the coupling (20); Including, At least one, preferably several and most preferably all LP generators (14, 16, 18) comprise an LP generator value limiting circuit (151), e.g. a voltage limiting circuit or a current limiting circuit.
Need to check novelty before this filing date? Find Prior Art