Table apparatus

Abstract

To provide a table device which can be made compact.SOLUTION: The table device includes a base portion, a first / second linear motion mechanism, a first / second support portion, a table portion rotatably supported with respect to the second support portion, a third / fourth / fifth linear motion mechanism, a first / second / third drive unit, and a first slide-side arc-shaped surface, A second swing mechanism and a third slide-side arc-shaped surface that include a second slide-side arc-shaped surface attached to the fourth slider, a second guide-side arc-shaped surface along the second slide-side arc-shaped surface, and a second guide portion attached to the second moving portion, and guide a swing motion of the table portion, a second swing mechanism and a third slide-side arc-shaped surface that include a second slide-side arc-shaped surface attached to the fourth slider, a second guide-side arc-shaped surface along the second slide-side arc-shaped surface, and a second guide portion attached to the second moving portion, and guide a swing motion of the table portion, and a third rocking mechanism having a third sliding part attached to the fifth slider and a third guide side circular arc surface along the third sliding side circular arc surface, including a third guide part attached to the third moving part, and guiding the rocking motion of the table part.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present disclosure relates to a table device. [Background technology]

[0002] An alignment stage that includes a required number of support units with three degrees of freedom, X, Y, and θ, has been disclosed (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2010-274429 Summary of the Invention [Problem to be solved by the invention]

[0004] In table-type devices, the table may be moved horizontally, i.e., in the X direction and the Y direction perpendicular to the X direction. There are also cases where the table needs to be rotated on the XY plane. Recently, there has been a demand for such table-type devices to be more compact.

[0005] Therefore, one of the objects is to provide a table device that can be made compact. [Means for solving the problem]

[0006] A table device according to the present disclosure includes a base portion having a base surface, a first linear motion mechanism including a first rail attached to the base surface and extending in a first direction, and a first slider attached to the first rail and movable along the first rail, a first opposing surface facing the base surface and attached to the first slider, and a first support surface disposed at an interval from the first opposing surface in a direction perpendicular to the base surface, and movable in the first direction together with the first slider, and a second rail attached to the first support surface and extending in a second direction intersecting the first direction. a second linear motion mechanism including a second slider attached to the rail and movable along the second rail; a second opposing surface facing the first support surface and attached to the second slider; a second support section including the second support surface disposed at an interval from the second opposing surface in a direction perpendicular to the base surface and movable in a second direction together with the second slider; a third opposing surface facing the second support surface; a mounting surface disposed at an interval from the third opposing surface in a direction perpendicular to the base surface; a first table side surface intersecting with each of the third opposing surface and the mounting surface; a third table side surface that intersects with each of the third opposing surface and the placement surface and intersects with the first table side surface or is spaced apart from the first table side surface, the table portion being rotatably supported on the second support portion; a third rail attached to the first table side surface and extending in a third direction that intersects with each of the first direction and the second direction, and a third linear motion mechanism including a third slider attached to the third rail and movable along the third rail; and a third slider attached to the second table side surface that intersects with the first direction and the second direction. a fourth linear motion mechanism including a fourth rail extending in a fourth direction intersecting the second direction and the third direction, and a fourth slider attached to the fourth rail and movable along the fourth rail; a fifth linear motion mechanism including a fifth rail attached to a side surface of the third table, extending in the third direction or the fourth direction, and a fifth slider attached to the fifth rail and movable along the fifth rail; a first drive unit including a first moving unit movable in a first direction, causing the first moving unit to linearly reciprocate in the first direction; and a second moving unit movable in the first direction or the second direction;a second drive unit that causes the second moving unit to linearly reciprocate in a first direction or a second direction; a third drive unit that includes a third moving unit that is movable in the first direction or the second direction and causes the third moving unit to linearly reciprocate in the first direction or the second direction; a first swing mechanism that includes a first sliding unit having an arc-shaped first sliding-side arc surface and attached to the third slider, and a first guide unit having an arc-shaped first guide-side arc surface that follows the first sliding-side arc surface and attached to the first moving unit, and that guides the swinging motion of the table unit; a second swing mechanism that guides the swinging motion of the table section, including a second sliding part that has a moving side arcuate surface and is attached to the fourth slider, and a second guide part that has an arc-shaped second guide side arcuate surface that follows the second sliding side arcuate surface and is attached to the second moving part, and a third swing mechanism that guides the swinging motion of the table section, including a third sliding part that has an arc-shaped third sliding side arcuate surface and is attached to the fifth slider, and a third guide part that has an arc-shaped third guide side arcuate surface that follows the third sliding side arcuate surface and is attached to the third moving part. [Effects of the Invention]

[0007] According to the table device, the device can be made compact. [Brief explanation of the drawings]

[0008] [Figure 1] FIG. 1 is a schematic perspective view showing a table device according to the first embodiment of the present disclosure. [Figure 2] FIG. 2 is a schematic plan view of the table device shown in FIG. [Figure 3] FIG. 3 is a schematic front view of the table device shown in FIG. [Figure 4] FIG. 4 is a schematic rear view of the table device shown in FIG. [Figure 5] 5 is a schematic right side view of the table device shown in FIG. [Figure 6] 6 is a schematic left side view of the table device shown in FIG. [Figure 7] FIG. 7 is a schematic cross-sectional view of the table device shown in FIG. [Figure 8]FIG. 8 is a schematic cross-sectional view of the table device shown in FIG. [Figure 9] FIG. 9 is an enlarged view of a region including a first swing mechanism provided in the table device according to the first embodiment. [Figure 10] FIG. 10 is a schematic perspective view showing a part of the first swing mechanism and the first moving part. [Figure 11] FIG. 11 is a schematic perspective view showing a part of the first swing mechanism and the first moving part. [Figure 12] FIG. 12 is a schematic cross-sectional view showing a part of the first swing mechanism. [Figure 13] FIG. 13 is a schematic plan view of the table device when the table portion is moved in the X direction, which is the first direction. [Figure 14] FIG. 14 is a schematic plan view of the table device when the table portion is moved in the Y direction, which is the second direction. [Figure 15] FIG. 15 is a schematic plan view of the table device when the table portion is rotated. [Figure 16] FIG. 16 is an enlarged view of region XVI shown in FIG. [Figure 17] FIG. 17 is a schematic plan view showing a table device according to the second embodiment of the present disclosure. DETAILED DESCRIPTION OF THE INVENTION

[0009] [Outline of the embodiment] The table device of the present disclosure includes a base portion having a base surface, a first linear motion mechanism including a first rail attached to the base surface and extending in a first direction, and a first slider attached to the first rail and movable along the first rail, a first opposing surface facing the base surface and attached to the first slider, and a first support surface disposed at an interval from the first opposing surface in a direction perpendicular to the base surface, and movable in the first direction together with the first slider, and a second rail attached to the first support surface and extending in a second direction intersecting the first direction. a second linear motion mechanism including a second slider attached to the second rail and movable along the second rail; a second opposing surface facing the first support surface and attached to the second slider; a second support portion including the second support surface disposed at an interval from the second opposing surface in a direction perpendicular to the base surface and movable in a second direction together with the second slider; a third opposing surface facing the second support surface; a placement surface disposed at an interval from the third opposing surface in a direction perpendicular to the base surface; a first table side surface intersecting with each of the third opposing surface and the placement surface; a table portion rotatably supported on the second support portion, the table portion including a second table side surface intersecting each of the first and second opposing surfaces, and a third table side surface intersecting each of the third opposing surface and the placement surface and intersecting the first table side surface or spaced apart from the first table side surface; a third linear motion mechanism including a third rail attached to the first table side surface and extending in a third direction intersecting each of the first and second directions, and a third slider attached to the third rail and movable along the third rail; and a third linear motion mechanism attached to the second table side surface and extending in the first and second directions. a fourth linear motion mechanism including a fourth rail extending in a fourth direction intersecting the second direction and the third direction, and a fourth slider attached to the fourth rail and movable along the fourth rail; a fifth linear motion mechanism including a fifth rail attached to a side surface of the third table, extending in the third direction or the fourth direction, and a fifth slider attached to the fifth rail and movable along the fifth rail; a first drive unit including a first moving unit movable in a first direction, causing the first moving unit to linearly reciprocate in the first direction; and a second moving unit movable in the first direction or the second direction;a second drive unit that causes the second moving unit to linearly reciprocate in a first direction or a second direction; a third drive unit that includes a third moving unit that is movable in the first direction or the second direction and causes the third moving unit to linearly reciprocate in the first direction or the second direction; a first swing mechanism that includes a first sliding unit having an arc-shaped first sliding-side arc surface and attached to the third slider, and a first guide unit having an arc-shaped first guide-side arc surface that follows the first sliding-side arc surface and attached to the first moving unit, and that guides the swinging motion of the table unit; a second swing mechanism that guides the swinging motion of the table section, including a second sliding part that has a moving side arcuate surface and is attached to the fourth slider, and a second guide part that has an arc-shaped second guide side arcuate surface that follows the second sliding side arcuate surface and is attached to the second moving part, and a third swing mechanism that guides the swinging motion of the table section, including a third sliding part that has an arc-shaped third sliding side arcuate surface and is attached to the fifth slider, and a third guide part that has an arc-shaped third guide side arcuate surface that follows the third sliding side arcuate surface and is attached to the third moving part.

[0010] According to the table device of the present disclosure, through control of the linear reciprocating motion of the first moving unit by the first drive unit, control of the linear reciprocating motion of the second moving unit by the second drive unit, and control of the linear reciprocating motion of the third moving unit by the third drive unit, the table unit can be moved to any position in the first direction and the second direction on a plane defined by the first direction and the second direction by utilizing guidance by the third linear motion mechanism, guidance by the fourth linear motion mechanism, and guidance by the fifth linear motion mechanism in addition to guidance by the first linear motion mechanism. In this case, the movement of the table unit in the first direction is guided by the first linear motion mechanism, and the movement of the table unit in the second direction is guided by the second linear motion mechanism, so that the table unit can be moved smoothly in the horizontal direction. Furthermore, because the table unit is rotatably supported relative to the second support unit, the table unit can be rotated in a plane defined by the first and second directions using the first swing mechanism, the second swing mechanism, and the third swing mechanism through the control of the linear reciprocating motion of the first moving unit by the first drive unit, the control of the linear reciprocating motion of the second moving unit by the second drive unit, and the control of the linear reciprocating motion of the third moving unit by the third drive unit. Here, the first slider included in the first linear motion mechanism is attached to the first opposing surface of the first support unit, and the second rail included in the second linear motion mechanism is attached to the first support surface of the first support unit. Therefore, the mechanisms for moving the table unit in the first and second directions and the mechanism for rotating the table unit can be made smaller in size in the direction perpendicular to the base surface. Therefore, this table device can achieve a more compact device configuration.

[0011] In the table device, the third opposing surface may be provided with a recessed hole recessed in a direction perpendicular to the base surface. A portion of the second support portion may be disposed within the recessed hole. This allows the size to be further reduced in the direction perpendicular to the base surface. Therefore, the device configuration can be further made compact.

[0012] In the table device, the second direction may be a direction perpendicular to the first direction, thereby enabling the table section to move more efficiently in the first direction and the second direction on the plane.

[0013] In the table device, the fourth direction may be a direction perpendicular to the third direction, thereby making it possible to more efficiently move the table portion in the first direction and the second direction on the plane.

[0014] In the table device, the first linear motion mechanism may include a plurality of first rails and a plurality of first sliders. By doing so, the table section can be moved more stably in the first direction by using the plurality of first rails and the plurality of first sliders.

[0015] In the above table device, the second linear motion mechanism may include a plurality of second rails and a plurality of second sliders. By doing so, the movement of the table section in the second direction can be more stably performed by using the plurality of second rails and the plurality of second sliders.

[0016] In the table device, at least one of the first drive unit, the second drive unit, and the third drive unit may include a ball screw having a screw shaft and a nut, and a motor for rotating the screw shaft. This makes it easier to more precisely control the linear reciprocating motion of at least one of the first moving unit, the second moving unit, and the third moving unit. This makes it easier to precisely position the table unit.

[0017] In the table device, the second table side may be perpendicular to the first table side. The third table side may be perpendicular to or parallel to the first table side. By doing so, the first table side is perpendicular to the second table side, and the third table side is perpendicular to or parallel to the first table side, allowing the table section to move in the first direction, move in the second direction, and rotate more efficiently on the plane.

[0018] In the above-described table device, at least one of the first rocking mechanism, the second rocking mechanism, and the third rocking mechanism may include a first raceway surface provided on the table portion side, a second raceway surface provided facing the first raceway surface at a distance from the first raceway surface, and a plurality of rolling elements rolling on the first and second raceway surfaces. This allows at least one of the first rocking mechanism, the second rocking mechanism, and the third rocking mechanism to appropriately support the load during rocking motion by the plurality of rolling elements rolling on the first and second raceway surfaces, thereby enabling smoother rocking motion. This allows the table portion to rotate more smoothly.

[0019] In the table device, the rolling elements may be rollers. A plurality of rollers may be arranged alternately in the circumferential direction so that their rolling axes are perpendicular to each other. This allows for a so-called cross roller bearing configuration to be adopted, making it possible to appropriately support loads applied in various directions. This allows for even smoother rotation of the table portion.

[0020] In the table device, the direction in which the second drive unit moves the second moving unit and the direction in which the third drive unit moves the third moving unit may each be a first direction. By doing so, the movement of each moving unit can be made the first direction, and for example, the direction in which wiring of a motor provided in each driving unit extends can be aligned with the first direction, making it easier to save space in the second direction.

[0021] In the table device, the direction in which the second drive unit moves the second moving unit may be the second direction. The direction in which the third drive unit moves the third moving unit may be the first direction. By doing so, for example, the directions in which the wiring of the motors provided in each drive unit extends can be distributed between the first direction and the second direction, making it easier to achieve a configuration that better meets user requirements.

[0022] The table device may further include a cross roller bearing fitted into the recessed hole. The table portion may be rotatably supported on the second support portion by the cross roller bearing. In this way, the cross roller bearing fitted into the recessed hole can be used to more smoothly rotate the table portion. This makes it easier to more precisely control the rotational position of the table portion.

[0023] [Specific example of embodiment] Next, an example of a specific embodiment of the table device of the present disclosure will be described with reference to the drawings. In the following drawings, the same or corresponding parts are designated by the same reference numerals, and description thereof will not be repeated.

[0024] (Embodiment 1) First, a first embodiment of the present disclosure will be described. Fig. 1 is a schematic perspective view showing a table device according to the first embodiment of the present disclosure. In Fig. 1, arrow X indicates the direction from the front to the back of the table device, arrow Y indicates the direction from the right side to the left side of the table device, and arrow Z indicates the direction from the bottom surface of the table device upward. The direction indicated by arrow Z is the height direction of the table device. The same applies to the following drawings.

[0025] FIG. 2 is a schematic plan view of the table device shown in FIG. 1. Note that cables, which will be described later, are shown only in FIG. 2 and are omitted in other figures. FIG. 2 is a view seen from the direction indicated by arrow II in FIG. 1. FIG. 3 is a schematic front view of the table device shown in FIG. 1. FIG. 3 is a view seen from the direction indicated by arrow III in FIG. 1. FIG. 4 is a schematic rear view of the table device shown in FIG. 1. FIG. 4 is a view seen from the direction indicated by arrow IV in FIG. 1. FIG. 5 is a schematic right side view of the table device shown in FIG. 1. FIG. 5 is a view seen from the direction indicated by arrow V in FIG. 1. FIG. 6 is a schematic left side view of the table device shown in FIG. 1. FIG. 6 is a view seen from the direction indicated by arrow VI in FIG. 1. FIGS. 7 and 8 are each a schematic cross-sectional view of the table device shown in FIG. 1. FIG. 7 is a schematic cross-sectional view of the table device shown in FIG. 2 taken along the cross section indicated by VII-VII. FIG. 8 is a schematic cross-sectional view of the table device shown in FIG. 2 taken along the cross section indicated by VIII-VIII.

[0026] 1 to 8, table device 10a in embodiment 1 of the present disclosure moves table portion 14, which will be described later, in a first direction, that is, an X direction, and a second direction, that is, a Y direction, and also rotates table portion 14 about rotation center axis 20 shown in Fig. 2 to determine its position. Note that rotation center axis 20 is illustrated in Fig. 2 etc. for ease of understanding.

[0027] The table device 10a includes a base portion 11, a first support portion 12, a second support portion 13, and a table portion 14. The base portion 11 is plate-shaped. In this embodiment, the base portion 11 is rectangular in shape, with its length in the X direction longer than its length in the Y direction, when viewed in the thickness direction (Z direction), which is the height direction of the table device 10a. The base portion 11 includes a base surface 15a located on one side in the thickness direction. The base surface 15a is a surface on which a first linear motion mechanism (described later) and the like are placed. The base surface 15a is flat and parallel to the XY plane. A through-hole 15b penetrating the base portion 11 in the Z direction, which is the thickness direction of the base portion 11, is provided at the center of the base portion 11 in the XY plane.

[0028] The first support portion 12 is flat. When viewed in the Z direction, the first support portion 12 has an octagonal shape with the four corners of a square cut off. The first support portion 12 includes a first opposing surface 16 that faces the base surface 15a, and a first support surface 17 that is disposed at a distance from the first opposing surface 16 in the Z direction, which is a direction perpendicular to the base surface 15a. The first support portion 12 is disposed between the base portion 11 and the table portion 14 at a distance from each other in the Z direction. In other words, the first support portion 12 is disposed between the base portion 11 and the table portion 14 in the Z direction.

[0029] The second support portion 13 is disk-shaped. The second support portion 13 includes a second opposing surface 18 that faces the first support surface 17, and a second support surface 19 that is spaced apart from the second opposing surface 18 in the Z direction. A portion of the second support portion 13 is disposed in a circular recessed hole 23 (described below) that is provided in the table portion 14. The second support portion 13 is disposed between the base portion 11 and the table portion 14 in the Z direction. The first support portion 12 described above is disposed between the base portion 11 and the second support portion 13 at a distance in the Z direction.

[0030] The table portion 14 is flat and square when viewed in the Z direction. It includes a third opposing surface 21 that faces the second support surface 19, and a placement surface 22 that is spaced apart from the third opposing surface 21 in the Z direction. An object can be placed on the placement surface 22 or an object can be attached to the placement surface 22. That is, the placement surface 22 functions as a table surface of the table device 10a on which an object is placed. The third opposing surface 21 is provided with the aforementioned recessed hole 23 that is recessed in the Z direction. A portion of the second support portion 13 is disposed within the recessed hole 23.

[0031] The table unit 10a includes a cross roller bearing 25. The cross roller bearing 25 includes an outer ring 26, a pair of inner rings 27a, 27b separated in the Z direction, and rollers 28 as rolling elements arranged in a raceway formed between the outer ring 26 and the inner rings 27a, 27b. The rollers 28 are arranged alternately in the circumferential direction so that their rolling axes are perpendicular to each other. The cross roller bearing 25 is fitted into the recessed hole 23. A portion of the second support unit 13 is fitted into the recessed hole 23 together with the cross roller bearing 25 included in the table unit 10a. In this embodiment, the cross roller bearing 25 is fitted between the outer peripheral surface 30a of the second support unit 13 in an area located on the table unit 14 side in the Z direction and the inner peripheral surface 30b of the recessed hole 23. The table unit 14 is rotatably supported by the second support unit 13 via the cross roller bearing 25 arranged in the recessed hole 23.

[0032] Table portion 14 includes a first table side surface 29a intersecting with third opposing surface 21 and mounting surface 22, a second table side surface 29b intersecting with third opposing surface 21, mounting surface 22, and first table side surface 29a, a third table side surface 29c intersecting with third opposing surface 21 and mounting surface 22 and also intersecting with first table side surface 29a, and a fourth table side surface 29d intersecting with third opposing surface 21 and mounting surface 22, intersecting with third opposing surface 21 and mounting surface 22, and spaced apart from first table side surface 29a. First table side surface 29a, second table side surface 29b, third table side surface 29c, and fourth table side surface 29d each extend in a direction perpendicular to base surface 15a. First table side surface 29a is adjacent to second table side surface 29b and third table side surface 29c. The fourth table side surface 29d is disposed adjacent to the second table side surface 29b and the third table side surface 29c. The first table side surface 29a and the fourth table side surface 29d are disposed parallel to each other. The second table side surface 29b and the third table side surface 29c are disposed parallel to each other. The first table side surface 29a, the second table side surface 29b, the third table side surface 29c, and the fourth table side surface 29d are each flat and form the side surfaces of the table portion 14. The external shape of the table portion 14 when viewed from the thickness direction (Z direction) is square.

[0033] The table device 10a includes a first linear motion mechanism 31, a second linear motion mechanism 32, a third linear motion mechanism 33, a fourth linear motion mechanism 34, a fifth linear motion mechanism 35, a sixth linear motion mechanism 36, a seventh linear motion mechanism 37, and an eighth linear motion mechanism 38. The table device 10a also includes a first drive unit 61, a second drive unit 62, and a third drive unit 63. The table device 10a also includes a first swing mechanism 81, a second swing mechanism 82, and a third swing mechanism 83.

[0034] The first linear motion mechanism 31 is attached to the base portion 11. The first linear motion mechanism 31 includes first rails 41a, 41b extending in the X direction, which is a first direction, and first sliders 51a, 51b attached to the first rails 41a, 41b, respectively, and movable along the first rails 41a, 41b. The first rails 41a, 41b are each arranged such that their longitudinal direction is the X direction. In this embodiment, the first linear motion mechanism 31 includes a plurality of first rails 41a, 41b, specifically, a pair (two) of first rails 41a, 41b. The first rails 41a, 41b are each attached to the base surface 15a. The first rails 41a, 41b are fixed to the base surface 15a by bolts (not shown). The pair of first rails 41a, 41b are arranged parallel to each other with a gap in the Y direction. On both side surfaces in the Y direction of each of the first rails 41a and 41b, rail raceway surfaces on which rolling elements, in this embodiment balls, roll are provided.

[0035] The first slider 51a attached to the first rail 41a is movable in the X direction. The first slider 51a can smoothly perform linear reciprocating motion in the X direction due to a plurality of balls arranged between the first slider 51a and the rail track surface of the first rail 41a. The first slider 51b attached to the first rail 41b is also movable in the X direction, similar to the first slider 51a. The first slider 51b can smoothly perform linear reciprocating motion in the X direction due to a plurality of balls arranged between the first slider 51b and the rail track surface of the first rail 41b.

[0036] The first support 12 is attached to the first sliders 51a and 51b. Specifically, the first support 12 is attached so that a first opposing surface 16 of the first support 12, which faces the base surface 15a, is placed on the first sliders 51a and 51b. The first support 12 is fixed to the first sliders 51a and 51b with bolts (not shown). Because the first support 12 is attached to the first sliders 51a and 51b, the first support 12 is guided by the first linear motion mechanism 31 when moving in the X direction. That is, the first support 12 can move in the X direction, which is the first direction, together with the first sliders 51a and 51b.

[0037] The second linear motion mechanism 32 is attached to the first support portion 12. The second linear motion mechanism 32 includes second rails 42a, 42b extending in the Y direction, which is a second direction, and second sliders 52a, 52b attached to the second rails 42a, 42b, respectively, and movable along the second rails 42a, 42b. The second rails 42a, 42b are each arranged such that their longitudinal direction is the Y direction. In this embodiment, the second linear motion mechanism 32 includes a plurality of second rails 42a, 42b, specifically a pair (two) of second rails 42a, 42b. The second rails 42a, 42b are each attached to the first support surface 17. The second rails 42a, 42b are each fixed to the first support surface 17 by bolts (not shown). The pair of second rails 42a, 42b are arranged parallel to each other and spaced apart in the X direction. The second rails 42a and 42b are perpendicular to the first rails 41a and 41b, respectively. Rail track surfaces on which rolling elements, in this embodiment balls, roll are provided on both side surfaces of each of the second rails 42a and 42b in the X direction.

[0038] The second slider 52a attached to the second rail 42a is movable in the Y direction. The second slider 52a is able to smoothly perform linear reciprocating motion in the Y direction due to a plurality of balls arranged between the second slider 52a and the rail track surface of the second rail 42a. The second slider 52b attached to the second rail 42b is also able to move in the Y direction, similar to the second slider 52a. The second slider 52b is able to smoothly perform linear reciprocating motion in the Y direction due to a plurality of balls arranged between the second slider 52b and the rail track surface of the second rail 42b.

[0039] The second support portion 13 is attached to the second sliders 52a and 52b. Specifically, the second support portion 13 is attached so that a second opposing surface 18 of the second support portion 13, which faces the first support surface 17 of the first support portion 12, is placed on the second sliders 52a and 52b. The second support portion 13 is fixed to the second sliders 52a and 52b with bolts (not shown). Because the second support portion 13 is attached to the second sliders 52a and 52b, the second support portion 13 is guided by the second linear motion mechanism 32 when it moves in the X direction. That is, the second support portion 13 can move in the Y direction, which is the second direction, together with the second sliders 52a and 52b.

[0040] As described above, the table unit 14 is rotatably supported by the second support unit 13. The table unit 14 is attached so that the first table side surface 29a, the second table side surface 29b, the third table side surface 29c, and the fourth table side surface 29d are inclined at 45 degrees relative to the X and Y directions, respectively. The table unit 14 is attached so that a portion of the second support unit 13 is disposed within the recessed hole 23. Both the second support unit 13 and the table unit 14 are attached to the first support unit 12, which is movable in the X direction, and therefore can move in the X direction together with the first support unit 12. The table unit 14 is attached to the second support unit 13, which is movable in the Y direction, and therefore can move in the Y direction together with the second support unit 13. In other words, the table unit 14 can move in both the X and Y directions. The table unit 14 is guided by the first linear motion mechanism 31 when moving in the X direction, and by the second linear motion mechanism 32 when moving in the Y direction.

[0041] The third linear motion mechanism 33 is attached to the first table side surface 29a. The third linear motion mechanism 33 includes a third rail 43a extending in a third direction intersecting the first direction (X direction) and the second direction (Y direction), and a third slider 53a attached to the third rail 43a and movable along the third rail 43a. In this embodiment, the third direction is inclined at 45 degrees with respect to both the X direction and the Y direction. The third rail 43a is disposed so that its longitudinal direction is inclined at 45 degrees with respect to both the X direction and the Y direction. In this embodiment, the third rail 43a is fixed to the first table side surface 29a by bolts (not shown). Rail track surfaces on which rolling elements, in this embodiment, balls, roll are provided on both side surfaces of the third rail 43a.

[0042] The fourth linear motion mechanism 34 is attached to the second table side surface 29b. The fourth linear motion mechanism 34 includes a fourth rail 44a extending in a fourth direction intersecting the first direction (X direction), the second direction (Y direction), and the third direction, and a fourth slider 54a attached to the fourth rail 44a and movable along the fourth rail 44a. In this embodiment, the fourth direction is inclined at 45 degrees with respect to both the X direction and the Y direction and perpendicular to the third direction. The fourth rail 44a is disposed so that its longitudinal direction is inclined at 45 degrees with respect to both the X direction and the Y direction. In this embodiment, the fourth rail 44a is fixed to the second table side surface 29b by bolts (not shown). Rail track surfaces on which rolling elements, in this embodiment, balls, roll are provided on both side surfaces of the fourth rail 44a.

[0043] The fifth linear motion mechanism 35 is attached to the third table side surface 29c. The fifth linear motion mechanism 35 includes a fifth rail 45a extending in the fourth direction and a fifth slider 55a attached to the fifth rail 45a and movable along the fifth rail 45a. The fifth rail 45a is disposed so that its longitudinal direction is inclined at 45 degrees with respect to both the X and Y directions. In this embodiment, the fifth rail 45a is fixed to the third table side surface 29c by bolts (not shown). Both sides of the fifth rail 45a are provided with rail track surfaces on which rolling elements, in this embodiment, balls, roll. Nothing is attached to the fourth table side surface 29d.

[0044] The first drive unit 61, the second drive unit 62, and the third drive unit 63 are each attached to the base unit 11. Specifically, the first drive unit 61 and the second drive unit 62 are arranged at an interval in the Y direction, which is the second direction. Furthermore, the first drive unit 61 and the third drive unit 63 are arranged at an interval in the X direction, which is the first direction.

[0045] The first drive unit 61 includes a first moving unit 64 that is movable in the X direction, which is a first direction. The first moving unit 64 is block-shaped and includes a first mounting surface 71a that faces the first table side surface 29a. The first mounting surface 71a is inclined at 45 degrees with respect to both the X direction and the Y direction. In this embodiment, the first mounting surface 71a is parallel to the first table side surface 29a. A strip-shaped first protrusion 72a that protrudes toward the first table side surface 29a is provided on the first mounting surface 71a. The first protrusion 72a is provided in the center of the first mounting surface 71a in the Z direction.

[0046] The first drive unit 61 includes a ball screw 73a having a screw shaft 74a and a nut 75a, and a motor 76a that rotates the screw shaft 74a. The nut 75a is attached to the screw shaft 74a. The first moving unit 64 is attached to the nut 75a. The screw shaft 74a can be rotated by supplying power to the motor 76a to rotate the rotation shaft of the motor 76a. The motor 76a can also rotate in reverse. That is, the motor 76a can rotate the screw shaft 74a in a forward or reverse direction. A cable 77a connected to the first drive unit 61 and extending from the motor 76a extends in the direction of arrow X (see particularly FIG. 2).

[0047] The sixth linear motion mechanism 36 is attached to the base portion 11. The sixth linear motion mechanism 36 includes a sixth rail 46a extending in the X direction, which is a first direction, and a sixth slider 56a attached to the sixth rail 46a and movable along the sixth rail 46a. The sixth rail 46a is disposed so that its longitudinal direction coincides with the X direction. The sixth rail 46a is attached to the base surface 15a. The sixth rail 46a is fixed to the base surface 15a by bolts (not shown). Rail track surfaces on which rolling elements, in this embodiment, balls, roll are provided on both side surfaces of the sixth rail 46a in the Y direction.

[0048] The sixth slider 56a attached to the sixth rail 46a is movable in the X direction. The sixth slider 56a can smoothly perform linear reciprocating motion in the X direction by means of a plurality of balls disposed between the sixth slider 56a and the rail track surface of the sixth rail 46a. When the first moving part 64 performs linear reciprocating motion in the X direction, it is appropriately guided by the sixth linear motion mechanism 36.

[0049] In this embodiment, the second drive unit 62 includes a second moving unit 65 that is movable in the X direction, which is the first direction. The second moving unit 65 is block-shaped and includes a second mounting surface 71b that faces the second table side surface 29b. The second mounting surface 71b is inclined at 45 degrees with respect to both the X direction and the Y direction. The second mounting surface 71b is also perpendicular to the first mounting surface 71a. In this embodiment, the second mounting surface 71b and the second table side surface 29b are parallel. The second mounting surface 71b is provided with a strip-shaped second protrusion that protrudes toward the second table side surface 29b. The second protrusion is provided in the center of the second mounting surface 71b in the Z direction.

[0050] The second drive unit 62 includes a ball screw 73b having a screw shaft 74b and a nut 75b, and a motor 76b that rotates the screw shaft 74b. The nut 75b is attached to the screw shaft 74b. The second moving unit 65 is attached to the nut 75b. The screw shaft 74b can be rotated by supplying power to the motor 76b to rotate the rotation shaft of the motor 76b. The motor 76b can also rotate in reverse. That is, the motor 76b can rotate the screw shaft 74b in a forward or reverse direction. A cable 77b connected to the second drive unit 62 and extending from the motor 76b extends in the direction of arrow X (see particularly FIG. 2).

[0051] The seventh linear motion mechanism 37 is attached to the base portion 11. The seventh linear motion mechanism 37 includes a seventh rail 47a extending in the X direction, which is a first direction, and a seventh slider 57a attached to the seventh rail 47a and movable along the seventh rail 47a. The seventh rail 47a is arranged so that its longitudinal direction is the X direction. The seventh rail 47a is attached to the base surface 15a. The seventh rail 47a is arranged at an interval in the X direction from the sixth rail 46a. The seventh rail 47a is fixed to the base surface 15a by bolts (not shown). Rail track surfaces on which rolling elements, in this embodiment, balls, roll are provided on both side surfaces of the seventh rail 47a in the Y direction.

[0052] The seventh slider 57a attached to the seventh rail 47a is movable in the X direction. The seventh slider 57a can smoothly perform linear reciprocating motion in the X direction by means of multiple balls arranged between the seventh slider 57a and the rail track surface of the seventh rail 47a. When the second moving part 65 performs linear reciprocating motion in the X direction, it is appropriately guided by the seventh linear motion mechanism 37.

[0053] In this embodiment, the third drive unit 63 includes a third moving unit 66 that is movable in the X direction, which is the first direction. The third moving unit 66 is block-shaped and includes a third mounting surface 71c that faces the third table side surface 29c. The third mounting surface 71c is inclined at 45 degrees with respect to both the X direction and the Y direction. The third mounting surface 71c is parallel to the first mounting surface 71a and perpendicular to the second mounting surface 71b. In this embodiment, the third mounting surface 71c and the third table side surface 29c are parallel. The third mounting surface 71c is provided with a strip-shaped third protrusion that protrudes toward the third table side surface 29c. The third protrusion is provided at the center of the third mounting surface 71c in the Z direction.

[0054] The third drive unit 63 includes a ball screw 73c having a screw shaft 74c and a nut 75c, and a motor 76c that rotates the screw shaft 74c. The nut 75c is attached to the screw shaft 74c. The third moving unit 66 is attached to the nut 75c. The screw shaft 74c can be rotated by supplying power to the motor 76c to rotate the rotation shaft of the motor 76c. The motor 76c can also be rotated in reverse. That is, the motor 76c can rotate the screw shaft 74c in a forward or reverse direction. A cable 77c connected to the third drive unit 63 and extending from the motor 76c extends in the direction of arrow X (see particularly FIG. 2).

[0055] The eighth linear motion mechanism 38 is attached to the base portion 11. The eighth linear motion mechanism 38 includes an eighth rail 48a extending in the X direction, which is a first direction, and an eighth slider 58a attached to the eighth rail 48a and movable along the eighth rail 48a. The eighth rail 48a is arranged so that its longitudinal direction is the X direction. The eighth rail 48a is attached to the base surface 15a. The eighth rail 48a is arranged next to the sixth rail 46a at an interval in the Y direction. The eighth rail 48a is fixed to the base surface 15a by bolts (not shown). Rail track surfaces on which rolling elements, in this embodiment, balls, roll are provided on both side surfaces of the eighth rail 48a in the Y direction.

[0056] The eighth slider 58a attached to the eighth rail 48a is movable in the X direction. The eighth slider 58a can smoothly perform linear reciprocating motion in the X direction by means of multiple balls disposed between the eighth slider 58a and the rail track surface of the eighth rail 48a. When the third moving unit 66 performs linear reciprocating motion in the X direction, it is appropriately guided by the eighth linear motion mechanism 38.

[0057] Next, the configuration of the first rocking mechanism 81 will be described. Note that the configurations of the second rocking mechanism 82 and the third rocking mechanism 83 are similar to that of the first rocking mechanism 81, and therefore their description will be omitted. FIG. 9 is an enlarged view of a region including the first rocking mechanism 81 provided in the table device 10a in embodiment 1. FIG. 9 is a view seen from the direction indicated by arrow IX in FIG. 1. FIGS. 10 and 11 are schematic perspective views showing a portion of the first rocking mechanism and a first moving unit, respectively. FIGS. 10 and 11 are illustrated from different angles. FIG. 12 is a schematic cross-sectional view showing a portion of the first rocking mechanism 81. Specifically, FIG. 12 is a cross-sectional view taken along a plane including a first bearing ring 87b and a second bearing ring 91a, which will be described later.

[0058] 9, 10, 11, and 12, the first rocking mechanism 81 is a mechanism that guides curvilinear motion. In this embodiment, the first rocking mechanism 81 guides the rocking motion of the table 14. The first rocking mechanism 81 includes a first sliding portion 84a and a first guide portion 85a. The first sliding portion 84a is provided on the table 14 side. The first sliding portion 84a includes a first block portion 86a attached to the third slider 53a and first raceways 87a and 87b attached to the first block portion 86a. In this embodiment, the first sliding portion 84a includes a plurality of first raceways 87a and 87b, specifically, a pair (two) of first raceways 87a and 87b. Each of the first raceways 87a and 87b is formed from an arc-shaped member. The first block portion 86a includes a pair of flanges 88a, 88b whose regions located at both ends in the Z direction protrude toward the first moving portion 64. The pair of first bearing rings 87a, 87b are attached to the first block portion 86a along the pair of flanges 88a, 88b with bolts (not shown). The first bearing rings 87a, 87b have arc-shaped first sliding-side arc surfaces 89a, 89b, respectively.

[0059] The first guide portion 85a includes second bearing rings 91a and 91b. In this embodiment, the first guide portion 85a includes a plurality of second bearing rings 91a and 91b, specifically a pair (two) of second bearing rings 91a and 91b. Each of the second bearing rings 91a and 91b is configured from an arc-shaped member. The second bearing rings 91a and 91b are attached to the first moving portion 64. Specifically, the second bearing rings 91a and 91b are attached to the first mounting surface 71a of the first moving portion 64 with bolts (not shown) so that the first protrusion 72a is sandwiched between the pair of second bearing rings 91a and 91b in the Z direction. In other words, the first guide portion 85a is attached to the first moving portion 64 side. The second bearing rings 91a and 91b each have arc-shaped first guide-side arc surfaces 92a and 92b.

[0060] The first bearing rings 87a and 87b of the first sliding portion 84a have first raceway surfaces 93a and 93b, respectively (see FIG. 12 in particular). That is, the first raceway surfaces 93a and 93b are provided on the table portion 14 side. The second bearing rings 91a and 91b of the first guide portion 85a have second raceway surfaces 94a and 94b provided at a distance from the first raceway surfaces 93a and 93b, respectively. The second raceway surfaces 94a and 94b face the first raceway surfaces 93a and 93b, respectively. The first swing mechanism 81 includes rollers 95a as multiple rolling elements. Each roller 95a includes a pair of end faces 96a and 96b and a rolling surface 97a. The rollers 95a are arranged alternately in the circumferential direction so that their rolling axes 98a are perpendicular to each other.

[0061] Next, the operation of the table device 10a configured as described above will be described. The table device 10a moves the table portion 14 in the first direction, the X direction, and the second direction, the Y direction, and rotates the table portion 14 to perform positioning. When the motor 76a is rotated, the ball screw 73a moves the first moving portion 64 attached to the nut 75a in the direction indicated by the arrow X or the opposite direction. When the motor 76b is rotated, the ball screw 73b moves the second moving portion 65 attached to the nut 75b in the direction indicated by the arrow X or the opposite direction. When the motor 76c is rotated, the ball screw 73c moves the third moving portion 66 attached to the nut 75c in the direction indicated by the arrow X or the opposite direction. In conjunction with the movements of the first moving unit 64, the second moving unit 65, and the third moving unit 66, the movement of the table unit 14 in the XY plane is guided by the first linear motion mechanism 31, the second linear motion mechanism 32, the third linear motion mechanism 33, the fourth linear motion mechanism 34, and the fifth linear motion mechanism 35. Furthermore, the rotation (oscillation) of the table unit 14 in the XY plane is guided by the third linear motion mechanism 33, the fourth linear motion mechanism 34, the fifth linear motion mechanism, the first oscillating mechanism 81, the second oscillating mechanism 82, and the third oscillating mechanism 83. In this way, the table unit 14 can move and rotate in the XY plane.

[0062] Next, specific operations for moving the table unit 14 will be described. FIG. 13 is a schematic plan view of the table unit 14 of the table device 10a when it is moved in the X direction, which is the first direction. Referring also to FIG. 13, when it is desired to move the table unit 14 of the table device 10a from the position shown in FIG. 2 in the X direction, the motor 76a is rotated, for example, in the forward direction to rotate the screw shaft 74a in the forward direction. This causes the first moving unit 64 to move in the direction indicated by the arrow X. Furthermore, the motor 76b is rotated, for example, in the reverse direction to rotate the screw shaft 74b in the reverse direction. This causes the second moving unit 65 to move in the direction indicated by the arrow X. Furthermore, the motor 76c is rotated, for example, in the forward direction to rotate the screw shaft 74c in the forward direction. This causes the third moving unit 66 to move in the direction indicated by the arrow X. In this way, movement of the table unit 14 in the direction indicated by the arrow X can be achieved in the first direction (X direction). When it is desired to move the table portion 14 in the direction opposite to the direction indicated by the arrow X, this can be realized by reversing the rotation directions of the motors 76a, 76b, and 76c.

[0063] FIG. 14 is a schematic plan view of the table device 10a when the table unit 14 is moved in the Y direction, which is the second direction. Also referring to FIG. 14, when it is desired to move the table unit 14 in the table device 10a from the position shown in FIG. 2 in the Y direction, the motor 76a is rotated, for example, in the forward direction to rotate the screw shaft 74a in the forward direction. This causes the first moving unit 64 to move in the direction indicated by the arrow X. Furthermore, the motor 76b is rotated, for example, in the forward direction to rotate the screw shaft 74b in the forward direction. This causes the second moving unit 65 to move in the direction opposite to the direction indicated by the arrow X. Furthermore, the motor 76c is rotated, for example, in the reverse direction to rotate the screw shaft 74c in the reverse direction. This causes the third moving unit 66 to move in the direction opposite to the direction indicated by the arrow X. In this way, movement of the table unit 14 in the direction indicated by the arrow Y in the second direction (Y direction) can be achieved. When it is desired to move the table portion 14 in the direction opposite to the direction indicated by the arrow Y, this can be realized by reversing the rotation directions of the motors 76a, 76b, and 76c.

[0064] FIG. 15 is a schematic plan view of the table device 10a when the table unit 14 is rotated. FIG. 16 is an enlarged view of region XVI shown in FIG. 15. In FIG. 15, a dashed line indicates a line connecting one of the diagonals of the table unit 14 before rotation, and a dashed two-dot line indicates a line connecting one of the diagonals of the table unit 14 after rotation. Referring to FIGS. 15 and 16 together, when rotating the table unit 14 of the table device 10a from the state shown in FIG. 2, the motor 76a is stopped. This fixes the first moving unit 64 in the same position. Furthermore, the motor 76b is rotated, for example, in a forward direction to rotate the screw shaft 74b in the forward direction. This moves the second moving unit 65 in the direction opposite to the direction indicated by arrow X. Furthermore, the motor 76c is rotated, for example, in a forward direction to rotate the screw shaft 74c in the forward direction. This moves the third moving unit 66 in the direction indicated by arrow X. In this case, because the first moving unit 64 is fixed, the table unit rotates by an angle θ using the first swing mechanism 81, the second swing mechanism 82, and the third swing mechanism 83. In this manner, the table unit 14 can be rotated (swung). Rotation (swing) of the table unit 14 can be achieved by reversing the rotation directions of the motors 76b and 76c. The above describes an example of the movement states of the first moving unit 64, the second moving unit 65, and the third moving unit 66 when rotating the table unit 14. Depending on the conditions, all of the moving units, i.e., the first moving unit 64, the second moving unit 65, and the third moving unit 66, may be moved to rotate the table unit 14. Alternatively, the table unit 14 may be rotated while the second moving unit 65 or the third moving unit 66, other than the first moving unit 64, is fixed.

[0065] According to the table device 10a, through control of the linear reciprocating motion of the first moving unit 64 by the first driving unit 61, control of the linear reciprocating motion of the second moving unit 65 by the second driving unit 62, and control of the linear reciprocating motion of the third moving unit 66 by the third driving unit 63, the table unit 14 can be moved to any position in the first direction and the second direction on a plane defined by the first direction and the second direction, using guidance by the first linear motion mechanism 31 and the second linear motion mechanism 32, as well as guidance by the third linear motion mechanism 33, the fourth linear motion mechanism 34, and the fifth linear motion mechanism 35. In this case, the movement of the table unit 14 in the first direction is guided by the first linear motion mechanism 31, and the movement of the table unit 14 in the second direction is guided by the second linear motion mechanism 32, so that the table unit 14 can be moved smoothly in the horizontal direction. Furthermore, since the table unit 14 is rotatably supported by the second support unit 13, the table unit 14 can be rotated in a plane defined by the first direction and the second direction using guidance by the first swing mechanism 81, the second swing mechanism 82, and the third swing mechanism 83 through control of the linear reciprocating motion of the first moving unit 64 by the first drive unit 61, control of the linear reciprocating motion of the second moving unit 65 by the second drive unit 62, and control of the linear reciprocating motion of the third moving unit 66 by the third drive unit 63. Here, the first sliders 51a and 51b included in the first linear motion mechanism 31 are attached to the first opposing surface of the first support unit 12, and the second rails 42a and 42b included in the second linear motion mechanism 32 are attached to the first support surface 17 of the first support unit 12. Therefore, the mechanisms for moving the table unit 14 in the first direction and the second direction and the mechanism for rotating the table unit 14 can be made small in size in the direction perpendicular to the base surface 15a. Therefore, with such a table device 10a, the device configuration can be made compact.

[0066] In this embodiment, the third opposing surface 21 is provided with a recessed hole 23 recessed in a direction perpendicular to the base surface 15a. A portion of the second support portion 13 is disposed within the recessed hole 23. This allows the size to be further reduced in the direction perpendicular to the base surface 15a. This allows the device configuration to be further made compact.

[0067] In this embodiment, the second direction is a direction perpendicular to the first direction, so that the table 14 can be moved more efficiently in the first direction and the second direction on the plane.

[0068] In this embodiment, the fourth direction is a direction perpendicular to the third direction, so that the table portion 14 can be moved more efficiently in the first direction and the second direction on the plane.

[0069] In the present embodiment, the first linear motion mechanism 31 includes a plurality of first rails 41 a, 41 b and a plurality of first sliders 51 a, 51 b. Therefore, by utilizing the plurality of first rails 41 a, 41 b and the plurality of first sliders 51 a, 51 b, the movement of the table portion in the first direction can be more stably performed.

[0070] In the present embodiment, the second linear motion mechanism 32 includes a plurality of second rails 42 a, 42 b and a plurality of second sliders 52 a, 52 b. Therefore, by utilizing the plurality of second rails 42 a, 42 b and the plurality of second sliders 52 a, 52 b, the movement of the table portion 14 in the second direction can be more stably performed.

[0071] In this embodiment, the first drive unit 61, the second drive unit 62, and the third drive unit 63 each include ball screws 73a, 73b, and 73c having screw shafts 74a, 74b, and 74c and nuts 75a, 75b, and 75c, respectively, and motors 76a, 76b, and 76c that rotate the screw shafts 74a, 74b, and 74c. This makes it easier to more precisely control the linear reciprocating motion of the first movement unit 64, the second movement unit 65, and the third movement unit 66. This makes it easier to precisely position the table unit 14.

[0072] In this embodiment, second table side surface 29b is perpendicular to first table side surface 29a. Third table side surface 29c is perpendicular to first table side surface 29a. Therefore, with first table side surface 29a perpendicular to second table side surface 29b and third table side surface 29c perpendicular to first table side surface 29a, movement in the first direction, movement in the second direction, and rotation of table portion 14 on the above plane can be more efficiently performed.

[0073] In this embodiment, the first oscillating mechanism 81, the second oscillating mechanism 82, and the third oscillating mechanism 83 each include first raceway surfaces 93a, 93b provided on the table 14 side, second raceway surfaces 94a, 94b provided facing the first raceway surfaces 93a, 93b at a distance from the first raceway surfaces 93a, 93b, and rollers 95a as rolling elements that roll on the first raceway surfaces 93a, 93b and the second raceway surfaces 94a, 94b. Therefore, in the first oscillating mechanism 81, the second oscillating mechanism 82, and the third oscillating mechanism 83, the rollers 95a rolling on the first raceway surfaces 93a, 93b and the second raceway surfaces 94a, 94b can appropriately bear the load during the oscillating motion, allowing for smoother oscillating motion. This allows for smoother rotation of the table 14.

[0074] In this embodiment, the rolling elements are rollers 95a. The rollers 95a are arranged alternately in the circumferential direction so that their rolling axes intersect at right angles. This allows for a so-called cross roller bearing configuration, which can appropriately support loads applied in various directions. This allows the table portion 14 to rotate even more smoothly.

[0075] In the present embodiment, the direction in which the second drive unit 62 moves the second moving unit 65 and the direction in which the third drive unit 63 moves the third moving unit 66 are both first directions. Therefore, the movement of each moving unit can be set to the first direction, and for example, the extending directions of the wiring of the motors 76a, 76b, and 76c provided in each drive unit can be aligned with the first direction, making it easier to save space in the second direction.

[0076] In this embodiment, the table device 10a includes a cross roller bearing 25 fitted into the recessed hole 23. The table portion 14 is rotatably supported on the second support portion 13 by the cross roller bearing 25. Therefore, the cross roller bearing 25 fitted into the recessed hole 23 can be used to more smoothly perform the rotational movement of the table portion 14. This makes it easier to control the rotational position of the table portion 14 more precisely.

[0077] (Embodiment 2) Another embodiment, embodiment 2, will now be described. Fig. 17 is a schematic plan view showing a table device 10b according to embodiment 2 of the present disclosure. Table device 10b according to embodiment 2 basically has the same configuration as in embodiment 1, and achieves the same effects. However, compared to table device 10a shown in embodiment 1, table device 10b according to embodiment 2 differs from embodiment 1 in the mounting positions of the third drive unit, third oscillation mechanism, fifth linear motion mechanism, and eighth linear motion mechanism, etc.

[0078] 17, table device 10b in embodiment 2 includes base portion 11, first support portion 12, second support portion 13, table portion 14, first linear motion mechanism 31, second linear motion mechanism 32, third linear motion mechanism 33, fourth linear motion mechanism 34, fifth linear motion mechanism 35d, sixth linear motion mechanism 36, seventh linear motion mechanism 37, eighth linear motion mechanism 38d, first drive portion 61, second drive portion 62, third drive portion 63d, first swing mechanism 81, second swing mechanism 82, and third swing mechanism 83d. Since the configuration of base portion 11 and the like is similar to that of the base portion and the like included in table device 10a in embodiment 1, description of these components will be omitted and differences will be mainly described.

[0079] In this embodiment, the third table side surface 29e is parallel to the first table side surface 29a. The third table side surface 29e is spaced apart from the first table side surface 29a. The fourth table side surface 29f is perpendicular to the first table side surface 29a and the third table side surface 29e and is spaced apart from the second table side surface 29b. Nothing is attached to the fourth table side surface 29f. The fifth linear motion mechanism 35d includes a fifth rail 45d extending in the third direction and a fifth slider 55d attached to the fifth rail 45d and movable along the fifth rail 45d. In this embodiment, the third drive unit 63d includes a ball screw 73d having a screw shaft 74d and a nut 75d, and a motor 76d that rotates the screw shaft 74d. The third drive unit 63d also includes a third moving unit 66d that is movable in the second direction, i.e., the Y direction. The third moving portion 66d is block-shaped and includes a third attachment surface 71d that faces the third table side surface 29e.

[0080] The eighth linear motion mechanism 38d includes an eighth rail extending in the Y direction, which is the second direction, and an eighth slider attached to the eighth rail and movable along the eighth rail. The eighth rail is arranged so that its longitudinal direction is the Y direction. The eighth slider attached to the eighth rail is movable in the Y direction. The eighth slider can smoothly perform linear reciprocating motion in the X direction by means of multiple balls arranged between the eighth slider and the rail track surface of the eighth rail. The third moving unit 66d is appropriately guided by the eighth linear motion mechanism 38d during its linear reciprocating motion in the Y direction.

[0081] In this embodiment, the sixth rail and the seventh rail are arranged to extend in the first direction, and the eighth rail is arranged to extend in the second direction. By doing so, for example, the extension directions of the motor wiring provided in each drive unit can be distributed between the first direction and the second direction, making it easier to create a configuration that better meets user needs.

[0082] (Other embodiments) In the above embodiment, the first direction and the second direction do not have to be orthogonal. That is, the second direction may form an acute or obtuse angle with respect to the first direction. Furthermore, the third direction and the fourth direction do not have to be orthogonal. That is, the fourth direction may form an acute or obtuse angle with respect to the third direction.

[0083] In the above embodiment, the pair of first rails and the pair of second rails may be spaced apart from each other when viewed in a direction perpendicular to the base surface. This configuration also allows the load on the first linear motion mechanism and the second linear motion mechanism, which are applied in a direction perpendicular to the base surface, to be appropriately distributed and borne. Therefore, the movement of the table in the first direction and the second direction can be controlled more stably.

[0084] In the above embodiment, at least one of the first drive unit and the second drive unit may include a ball screw having a screw shaft and a motor for rotating the screw shaft. This makes it easier to more precisely control the linear reciprocating motion of at least one of the first moving unit and the second moving unit. This makes it easier to precisely position the table unit.

[0085] Furthermore, in the above embodiment, the table portion is rotatably supported on the second support portion via a cross roller bearing, but this is not limiting, and the table portion may be rotatably supported by a combination of a thrust bearing and a radial bearing, or the table portion may be rotatably supported by a sliding bearing, i.e., by sliding between the inner surface of the recessed hole and the outer surface of the second support portion.

[0086] In the above embodiment, the table device may further include a fourth drive unit and a fourth moving unit, a linear motion mechanism attached to the fourth table side, and a fourth rocking mechanism. That is, the four sides of the table may be provided with similar drive units, moving units, linear motion mechanisms, and rocking mechanisms. This allows the table to be moved horizontally and rotated more reliably.

[0087] The present invention is intended to cover a wide range of applications, including those related to the present invention, including those related to the present invention. [Explanation of symbols]

[0088] 10a, 10b table device, 11 base portion, 12 first support portion, 13 second support portion, 14 table portion, 15a base surface, 15b through hole, 16 first opposing surface, 17 first support surface, 18 second opposing surface, 19 second support surface, 20 rotation center axis, 21 third opposing surface, 22 mounting surface, 23 recessed hole, 25 cross roller bearing, 26 outer ring, 27a, 27b inner ring, 28, 95a roller, 29a first table side surface, 29b second table side surface, 29c, 29e third table side surface, 29d, 29f fourth table side surface, 30a outer peripheral surface, 30b inner peripheral surface, 31 first linear motion mechanism, 32 second linear motion mechanism, 33 third linear motion mechanism, 34, 34d fourth linear motion mechanism, 35, 35d fifth linear motion mechanism, 36 Sixth linear motion mechanism, 37 Seventh linear motion mechanism, 38 Eighth linear motion mechanism, 41a, 41b First rail, 42a, 42b Second rail, 43a Third rail, 44a Fourth rail, 45a, 45d Fifth rail, 46a Sixth rail, 47a Seventh rail, 48a Eighth rail, 51a, 51b First slider, 52a, 52b Second slider, 53a Third slider, 54a Fourth slider, 55a, 55d Fifth slider, 56a Sixth slider, 57a Seventh slider, 58a Eighth slider, 61 First drive unit, 62 Second drive unit, 63, 63d Third drive unit, 64 First moving unit, 65 Second moving unit, 66, 66d Third moving unit, 71a First mounting surface, 71b Second mounting surface, 71c Third mounting surface, 72a First protrusion, 73a, 73b, 73c, 73d Ball screw, 74a, 74b, 74c, 74d Screw shaft, 75a, 75b, 75c, 75d Nut, 76a, 76b, 76c, 76d Motor, 77a, 77b, 77c Cable, 81 First oscillation mechanism, 82 Second oscillation mechanism, 83, 83d Third oscillation mechanism, 84a First sliding portion, 85a First guide portion, 86a First block portion, 87a, 87b First raceway ring, 88a, 88b Flange portion, 89a, 89b First sliding side arcuate surface, 91a, 91b Second raceway ring, 92a, 92b First guide side arcuate surface, 93a, 93b First raceway surface, 94a, 94b 2nd raceway surface, 96a, 96b end surface, 97a rolling surface, 98a rolling axis.

Claims

1. a base portion having a base surface; a first linear motion mechanism including a first rail attached to the base surface and extending in a first direction, and a first slider attached to the first rail and movable along the first rail; a first support portion including: a first opposing surface that faces the base surface and is attached to the first slider; and a first support surface that is disposed at an interval from the first opposing surface in a direction perpendicular to the base surface, the first support portion being movable in the first direction together with the first slider; a second linear motion mechanism including a second rail attached to the first support surface and extending in a second direction intersecting the first direction, and a second slider attached to the second rail and movable along the second rail; a second support portion including: a second opposing surface that faces the first support surface and is attached to the second slider; and a second support surface that is disposed at an interval from the second opposing surface in a direction perpendicular to the base surface, the second support portion being movable in the second direction together with the second slider; a table portion rotatably supported on the second support portion, the table portion including: a third opposing surface opposing the second support surface; a placement surface disposed at a distance from the third opposing surface in a direction perpendicular to the base surface; a first table side surface intersecting with each of the third opposing surface and the placement surface; a second table side surface intersecting with each of the third opposing surface, the placement surface and the first table side surface; and a third table side surface intersecting with each of the third opposing surface and the placement surface and intersecting with the first table side surface or disposed at a distance from the first table side surface; a third linear motion mechanism including a third rail attached to a side surface of the first table and extending in a third direction intersecting both the first direction and the second direction, and a third slider attached to the third rail and movable along the third rail; a fourth linear motion mechanism including: a fourth rail attached to a side surface of the second table and extending in a fourth direction intersecting the first direction, the second direction, and the third direction; and a fourth slider attached to the fourth rail and movable along the fourth rail; a fifth linear motion mechanism including a fifth rail attached to a side surface of the third table and extending in the third direction or the fourth direction, and a fifth slider attached to the fifth rail and movable along the fifth rail; a first driving unit including a first moving unit movable in the first direction and configured to linearly reciprocate the first moving unit in the first direction; a second driving unit including a second moving unit movable in the first direction or the second direction, and configured to linearly reciprocate the second moving unit in the first direction or the second direction; a third drive unit including a third moving unit movable in the first direction or the second direction, and configured to linearly reciprocate the third moving unit in the first direction or the second direction; a first swing mechanism including a first sliding part having an arc-shaped first sliding-side arcuate surface and attached to the third slider, and a first guide part having an arc-shaped first guide-side arcuate surface that follows the first sliding-side arcuate surface and attached to the first moving part, and guiding the swing motion of the table part; a second swing mechanism that includes a second sliding portion having an arc-shaped second sliding-side arcuate surface and attached to the fourth slider, and a second guide portion having an arc-shaped second guide-side arcuate surface that follows the second sliding-side arcuate surface and attached to the second moving portion, and that guides the swing motion of the table portion; a third sliding part having an arc-shaped third sliding side arc surface and attached to the fifth slider, and a third guide part having an arc-shaped third guide side arc surface that follows the third sliding side arc surface and attached to the third moving part, and a third swinging mechanism that guides the swinging motion of the table part.

2. a recessed hole recessed in a direction perpendicular to the base surface is provided in the third opposing surface, The table apparatus according to claim 1 , wherein a portion of the second support portion is disposed within the recess.

3. 3. The table device according to claim 1, wherein the second direction is a direction perpendicular to the first direction.

4. 3. The table device according to claim 1, wherein the fourth direction is a direction perpendicular to the third direction.

5. 3. The table device according to claim 1, wherein the first linear motion mechanism includes a plurality of the first rails and the first sliders.

6. The table device according to claim 1 or 2, wherein the second linear motion mechanism includes a plurality of the second rails and the second sliders.

7. At least one of the first driving unit, the second driving unit, and the third driving unit, a ball screw having a screw shaft and a nut; The table device according to claim 1 or 2, further comprising: a motor that rotates the screw shaft.

8. the second table side is perpendicular to the first table side; 3. The table apparatus according to claim 1, wherein the third table side surface is perpendicular to or parallel to the first table side surface.

9. At least one of the first rocking mechanism, the second rocking mechanism, and the third rocking mechanism is a first raceway surface provided on the table portion side; a second raceway surface provided opposite the first raceway surface with a gap therebetween; 3. The table device according to claim 1, further comprising: a plurality of rolling elements that roll on the first raceway surface and the second raceway surface.

10. the rolling elements are rollers, The table device according to claim 9 , wherein the plurality of rollers are arranged alternately in the circumferential direction so that their rolling axes are perpendicular to each other.

11. 3. The table device according to claim 1, wherein the direction in which the second drive section moves the second moving section and the direction in which the third drive section moves the third moving section are both the first direction.

12. a direction in which the second driving unit moves the second moving unit is the second direction; 3. The table device according to claim 1, wherein the direction in which the third drive unit moves the third moving unit is the first direction.

13. Further provided is a cross roller bearing fitted in the recessed hole, 3. The table device according to claim 2, wherein the table portion is rotatably supported by the second support portion by the cross roller bearing.

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