Substrate transport device, substrate transport method, and computer storage medium
The substrate transfer device addresses accuracy issues by adjusting delivery positions based on temperature changes, ensuring precise substrate placement and consistent processing results.
JP2026101483APending Publication Date: 2026-06-22TOKYO ELECTRON LTD
Patent Information
- Authority / Receiving Office
- JP · JP
- Patent Type
- Applications
- Current Assignee / Owner
- TOKYO ELECTRON LTD
- Filing Date
- 2024-12-10
- Publication Date
- 2026-06-22
AI Technical Summary
Technical Problem
Existing substrate transfer systems face challenges in accurately transferring substrates to target positions due to changes in processing temperatures, leading to potential eccentricity and uneven processing results.
Method used
A substrate transfer device with a control unit that adjusts the delivery position based on a correction amount and direction determined by elapsed time since the processing temperature change, using a correction amount acquisition unit, correction direction determination unit, and transfer position adjustment unit to ensure precise substrate placement.
Benefits of technology
Enables high-accuracy substrate transfer to target positions, maintaining consistent processing quality despite temperature changes.
✦ Generated by Eureka AI based on patent content.
Smart Images
Figure 2026101483000001_ABST
Abstract
The circuit board is transported to the target position with high precision. [Solution] A substrate transport device for transporting substrates, provided in a housing shared with a heat treatment unit for heat-treating the substrates, and transporting the substrates to a rotational treatment unit that holds and rotates the substrates for processing, comprising a transport arm for supporting and moving the substrates, and a control unit for controlling the operation of the transport arm, wherein when the processing temperature setting of the heat treatment unit is changed, the control unit acquires a correction amount for the transfer position, which is the position of the transport arm at the time of transfer of the substrates to the rotational treatment unit, determines the correction direction of the transfer position according to the elapsed time since the change in the setting, and adjusts the transfer position based on the acquired correction amount and the determined correction direction.
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Citation Information
Patent Citations
JP2013230036A