Sample analysis system and report generation method

The system automates report generation in sample analysis by matching event patterns with templates, reducing user burden and ensuring only suitable report candidates are produced.

JP2026103198APending Publication Date: 2026-06-24JEOL LTD
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Patent Information

Authority / Receiving Office
JP · JP
Patent Type
Applications
Current Assignee / Owner
JEOL LTD
Filing Date
2024-12-12
Publication Date
2026-06-24

AI Technical Summary

Technical Problem

Existing sample analysis systems do not effectively utilize event patterns in event logs for automatic report generation, leading to increased user burden in creating reports.

Method used

A sample analysis system that manages event patterns and templates, automatically generates report candidates by matching event series with specific templates, and allows users to adopt or delete these candidates based on their instructions.

Benefits of technology

Reduces user burden in report creation by automating the process, ensuring only suitable report candidates are generated and allowing users to control the final report set.

✦ Generated by Eureka AI based on patent content.

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Abstract

To reduce the burden on users when creating reports. [Solution] The event log 38 and multiple event patterns 74 are compared, and a specific event series 80 and a specific event pattern 74 that match each other are determined. The dataset 84 obtained by the execution of the event series 80 is incorporated into the template 76A corresponding to the specific event pattern 74. This creates a report candidate 86. The automatically generated report candidate 86 is deleted according to the user's instructions.
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Description

Technical Field

[0001] The present invention relates to a sample analysis system and a report generation method, and particularly to a technique for automatically generating a report.

Background Art

[0002] Various sample analysis systems are in use. As an example of a sample analysis system, an Auger electron spectrometer can be mentioned. An Auger electron spectrometer is a device that analyzes the surface of a sample using Auger electron spectroscopy (AES). In this device, an electron beam is irradiated onto the sample surface, and Auger electrons emitted from the sample surface are detected by a detector (spectrometer).

[0003] [[ID=,16]]A sample analysis system generally has a function of generating a report representing measurement results. When generating a report, a template (report format) is specified by the user, and one or more data are inserted by the user into the specified template. Examples of data inserted into the report include, for example, SEM (Scanning Electron Microscope) images, Auger electron images (element maps), energy spectra, and the like.

[0004] In a sample analysis system, a plurality of operations for sample analysis are recorded as a plurality of events. Specifically, an event log composed of a plurality of event information corresponding to the plurality of events is generated. Patent Document 1 discloses a technique for displaying an event log on a screen as a timeline. Patent Document 1 does not describe a technique for automatically generating a report. [[ID=,21]]

[0005] [[ID=2,3]] Patent Document 2 discloses an analysis system equipped with a function to automatically select a report layout. More specifically, a series of operations performed by the user during the analysis of measurement data are stored as operation information. This operation information can be said to indicate the procedure for analyzing the measurement data after the measurement data has been acquired. When the user operates the report creation button, a specific layout is automatically selected based on the stored operation information, and a report is created based on that specific layout. Patent Document 2 does not disclose an event log generated by recording a series of operations in the measurement unit, nor does it disclose how to use such an event log. Furthermore, Patent Document 2 does not disclose a technique for allowing the user to decide whether or not to accept the automatically generated report candidates. [Prior art documents] [Patent Documents]

[0006] [Patent Document 1] Japanese Patent Publication No. 2016-75559 [Patent Document 2] Japanese Patent Publication No. 2018-106271 [Overview of the project] [Problems that the invention aims to solve]

[0007] In a sample analysis system, a series of operations of the measurement unit are recorded during the sample analysis process, generating an event log. The event log contains a sequence of events that are related from the perspective of report generation. Such a sequence of events can be called an event pattern. In previous sample analysis systems, event patterns have not been utilized, and in particular, they have not been utilized in the automatic generation of reports.

[0008] The objective of this invention is to reduce the burden on users when creating reports. Alternatively, the objective of this invention is to utilize event patterns contained in event logs when creating reports. Alternatively, the objective of this invention is to provide a new mechanism that presents report candidates to users and allows users to decide whether or not to accept the report candidates. [Means for solving the problem]

[0009] The sample analysis system according to the present invention includes a processor, which manages a plurality of event patterns and a plurality of templates corresponding thereto, generates an event log by recording a plurality of events that occur in chronological order during the sample measurement process, and when a match is determined between a specific event series included in the event log and a specific event pattern among the plurality of event patterns, selects a specific template from the plurality of templates that corresponds to the specific event pattern, incorporates one or more data obtained by the execution of the specific event series into the specific template, thereby generating a report candidate, and adopts or deletes the report candidate according to the user's instructions.

[0010] The present invention relates to a report generation method that is performed in a sample analysis system and is characterized by comprising the steps of: managing a plurality of event patterns and a plurality of templates corresponding thereto; generating an event log by recording a plurality of events that occurred in chronological order during the sample measurement process; when a match is determined between a specific event series included in the event log and a specific event pattern among the plurality of event patterns, selecting a specific template from the plurality of templates that corresponds to the specific event pattern, incorporating one or more data obtained by the execution of the specific event series into the specific template, thereby generating a report candidate; and adopting or deleting the report candidate according to user instructions. [Effects of the Invention]

[0011] According to the present invention, the burden on the user when creating reports can be reduced. Alternatively, according to the present invention, event patterns included in the event log can be utilized when creating reports. Alternatively, according to the present invention, a new mechanism can be provided that presents the user with report candidates and allows the user to decide whether or not to accept the report candidates. [Brief explanation of the drawing]

[0012] [Figure 1] This is a block diagram showing an example configuration of a sample analysis system according to an embodiment. [Figure 2] This figure shows the report candidate generation method according to the embodiment. [Figure 3] This figure shows an example of an event log. [Figure 4] This figure shows an example of a management table. [Figure 5] This figure shows the first example of an event pattern definition. [Figure 6] This figure shows a second example of an event pattern definition. [Figure 7] This figure shows a third example of an event pattern definition. [Figure 8] This figure shows the automated execution of data analysis. [Figure 9] This figure shows an example of a UI image displayed on a display unit. [Figure 10] This is a timing chart illustrating an example of operation. [Figure 11] This flowchart shows the first example of the report candidate generation process. [Figure 12] This is a flowchart showing the second example of the report candidate generation process. [Figure 13] This is a flowchart showing the process for deleting report candidates. [Figure 14] This figure shows a modified version of the management table. [Modes for carrying out the invention]

[0013] Hereinafter, embodiments will be described based on the drawings.

[0014] (1) Outline of Embodiment The sample analysis system according to the embodiment includes a processor. The processor manages a plurality of event patterns and a plurality of templates corresponding thereto, and generates an event log by recording a plurality of events that occur in chronological order during the sample measurement process. On this premise, when a match is determined between a specific event series included in the event log and a specific event pattern among the plurality of event patterns, the processor selects a specific template corresponding to the specific event pattern from among the plurality of templates. The processor incorporates one or more data obtained by executing a specific event series for a specific template, thereby generating a report candidate. The processor adopts or deletes the report candidate according to the user's instruction.

[0015] According to the above configuration, when a specific event pattern is included in the event log, a report candidate is automatically generated based on a specific template corresponding to the specific event pattern. When the automatic generation of report candidates is repeated, in addition to report candidates that need to be suitable as official reports, unnecessary report candidates that lack suitability as official reports are also generated. Therefore, according to the user's instruction, necessary report candidates are adopted as official reports, or according to the user's instruction, unnecessary report candidates are deleted. According to the above configuration, the burden on the user can be significantly reduced compared to the case of manually generating an official report set.

[0016] In the sample measurement process, one or more samples are measured. In addition to primary events that acquire data, secondary events that do not acquire data may also be recorded. Examples of primary events include image acquisition events and spectrum acquisition events. Examples of secondary events include sample processing, neutralization treatment, sample introduction, sample removal, stage movement, etc. A template is a report template. Selecting a template corresponds to selecting a report format or report layout. In the embodiment, if the event series satisfies the event pattern definition, a match between the event series and the event pattern is determined.

[0017] In one embodiment, the processor finds a specific event pattern by searching for multiple event patterns based on a specific event series extracted from the event log (first search method), or by searching the event log based on a specific event pattern selected from multiple event patterns (second search method). When performing the first search method, multiple event series, including the most recent recorded event, may be extracted as a specific event pattern. When performing the second search method, specific event patterns may be sequentially selected from multiple event patterns.

[0018] Typically, one template is associated with one event pattern. Multiple templates may be associated with a single event pattern. In that case, multiple report candidates based on multiple templates may be generated simultaneously. Alternatively, one template may be associated with multiple event patterns.

[0019] In one embodiment, the processor repeatedly executes a report candidate generation flow, thereby generating a report candidate list consisting of multiple report candidates. The report candidate generation flow includes finding matching pairs consisting of a specific event series and a specific event pattern, selecting a specific template, and incorporating one or more data into the specific template. The user may be presented with multiple report candidates simultaneously as a report candidate list, or with multiple report candidates presented sequentially.

[0020] In this embodiment, the user instruction is a user deletion instruction. Based on the user's deletion instruction, the processor deletes one or more report candidates from the list of report candidates. The one or more report candidates that remain after the deletion of one or more report candidates are adopted as one or more official reports. Report candidates that are not deleted, i.e., report candidates to be adopted as official reports, may be specified by the user.

[0021] In one embodiment, if there is unused data acquired during the sample measurement process that was not incorporated into any of the report candidates, the processor generates additional report candidates that include the unused data. The report candidate list includes the additionally generated report candidates. This configuration prevents data loss; that is, it prevents data from being generated that is not reflected in any of the report candidates.

[0022] In this embodiment, the processor repeatedly executes the report candidate generation flow while the sample measurement process is running. With this configuration, report candidates are generated sequentially in parallel with the progress of the sample measurement process, thus accelerating the completion of the official report set. Unnecessary report candidates may be excluded by the user during the execution of the sample measurement process. Preferably, the official report set is completed at or immediately after the end of the sample measurement process.

[0023] In this embodiment, each event pattern in a plurality of event patterns is defined by a plurality of events and their attributes. Examples of attributes include coordinates (position), magnification, etc.

[0024] In this embodiment, the above-mentioned report candidate is the first report candidate. When the above match is determined, the processor applies a specific data analysis corresponding to a specific event pattern to one or more data points obtained by the execution of a specific event series. Subsequently, the processor incorporates the results of the specific data analysis into a specific template, thereby generating a second report candidate.

[0025] The above configuration reduces the user burden when performing specific data analysis. Report candidates that fall under both the first report candidate (a report candidate incorporating one or more data points) and the second report candidate (a report candidate incorporating the results of the data analysis) may be generated.

[0026] In this embodiment, the processor analyzes multiple report samples generated through repeated template and data selection by the user, thereby identifying multiple event patterns and their corresponding templates. This configuration allows for the automatic identification of the correspondence between multiple event patterns and multiple templates.

[0027] The report generation method according to the embodiment is a report generation method performed in a sample analysis system. The report generation method includes a management step, an event log generation step, a template selection step, a data embedding step, and a selection step. In the management step, multiple event patterns and multiple templates corresponding to them are managed. In the event log generation step, multiple events that occur in chronological order during the sample measurement process are recorded. This generates an event log. In the template selection step, if a match is determined between a specific event series included in the event log and a specific event pattern among the multiple event patterns, a specific template corresponding to the specific event pattern is selected from among the multiple templates. In the data embedding step, one or more data obtained by the execution of a specific event series are embedded into a specific template. This generates a report candidate. In the selection step, the report candidate is adopted or deleted according to the user's instructions.

[0028] The report generation method described above can be implemented as a hardware function or a software function. A program for executing the report generation method may be installed on an information processing device via a portable storage medium or a network. The information processing device may be, for example, a computer, a sample analyzer, or a sample analysis system. The information processing device has a storage medium for non-temporarily storing the above program. A program product containing the above program may be provided to the user.

[0029] (2) Details of the embodiment Figure 1 shows an example of the configuration of a sample analysis system according to an embodiment. The sample analysis system is, for example, a system for analyzing the surface of a sample. The sample analysis system according to this embodiment has the function of performing sample analysis using Auger electron spectroscopy. The configuration described below may be applied to other sample analysis systems.

[0030] The sample analysis system according to this embodiment includes a measurement unit 10 and an information processing unit 12. The measurement unit 10 is equipment that irradiates a sample with an electron beam and detects electrons emitted from the sample. Specifically, the measurement unit 10 includes a microscope tube 14 and a housing 16. The microscope tube 14 is supported by the housing 16. Inside the microscope tube 14 are an electron gun, a scanning coil, a lens system including an objective lens, etc.

[0031] The interior of the housing 16 is a sample chamber 17. A sample stage 18 is provided in the sample chamber 17. The sample 20 is held by the sample stage 18. In the illustrated configuration example, the housing 16 is fitted with equipment 24 for irradiating with ions 26, and also with an Auger electron spectrometer (Auger electron detector) 28. The sample is irradiated with ions 26 during etching and during neutralization treatment of the sample. The Auger electron spectrometer 28 is, for example, an electrostatic spectrometer having a hemispherical shape. A secondary electron detector and a backscattered electron detector are provided inside the housing 16, but their illustration is omitted. An X-ray detector may also be fitted to the housing 16.

[0032] The information processing unit 12 is comprised of, for example, a computer. The information processing unit 12 includes a processor 30, memory 32, input device 34, and display device 36. The input device 34 includes a keyboard and a pointing device. The display device 36 is, for example, a liquid crystal display.

[0033] The processor 30 is, for example, a CPU that executes programs. Other processors such as a GPU may also be provided. The memory 32 is, for example, semiconductor memory. An event log 38 and a management table 40 are built on the memory 32. These will be described in detail later. The memory 32 also stores various types of data. These include SEM images 42, spectra 46, elemental maps 47, etc. Furthermore, the memory 32 stores multiple templates 76 and multiple generated reports 49. The memory 32 also stores multiple report candidates, which will be described in detail below.

[0034] The processor 30 generates an SEM image representing a two-dimensional scanning region on the sample surface based on the output signal of a secondary electron detector or the like. The processor also generates an elemental map representing the two-dimensional scanning region on the sample surface based on the output signal of the Auger electron spectrometer 28. Multiple different elemental maps may be generated simultaneously. In point analysis, the processor 30 generates a spectrum from the spectral results corresponding to a specified point within the two-dimensional scanning region. Multiple points may be specified, and multiple spectra corresponding to multiple points may be generated simultaneously or sequentially.

[0035] In Figure 1, the multiple functions performed by the processor 30 (specifically, multiple functions related to report generation) are represented by multiple blocks. The processor 30 functions as a log management unit 48, a table generation unit 50, a report candidate generation unit 52, a data analysis unit 54, and a deletion unit 56.

[0036] The log management unit 48 generates an event log 38 by recording multiple operations or states occurring in chronological order in the measurement unit 10 as multiple events, and manages the generated event log 38. Specifically, the log management unit 48 generates event information each time an event occurs and adds that event information to the event log.

[0037] An event log can also be called a timeline. Event information is information that describes an event. Event information also includes attributes related to the event. Events include primary events that acquire data and secondary events that do not acquire data. Examples of primary events include acquiring SEM images, acquiring elemental maps, acquiring spectra, etc. Attributes related to primary events include magnification, position (observation coordinates or measurement coordinates), etc. Examples of secondary events include loading a sample, removing a sample, moving the sample stage, etching a sample, etc.

[0038] The table generation unit 50 generates a management table 40 and manages the generated management table 40. The management table 40 consists of multiple event patterns and multiple templates corresponding to them, as will be shown later.

[0039] The table generation unit 50 includes a report analysis unit 66. The report analysis unit 66 generates a management table by analyzing multiple reports (multiple report samples) manually created by the user. Specifically, the report analysis unit 66 identifies event patterns and templates selected when generating report samples by analyzing individual report samples or multiple event information corresponding to them. The user may register pairs of event patterns and templates.

[0040] The report candidate generation unit 52 includes a comparison unit 58, a selection unit 60, a first generation unit 62, and a second generation unit 64. The comparison unit 58 also functions as a determination unit. The first generation unit 62 functions as a first data embedding unit, and the second generation unit 64 functions as a second data embedding unit.

[0041] The comparison unit 58 compares multiple event series extracted from the event log 38 with multiple event patterns in the management table 40 and determines whether a particular event series in the event log 38 matches a particular event pattern in the management table 40. In other words, the comparison unit 58 finds matching pairs consisting of a specific event series and a specific event pattern that are in a matching relationship.

[0042] When a match is determined, that is, when a matching pair is found, the selection unit 60 selects a specific template corresponding to a specific event pattern from among multiple templates in the management table 40 and retrieves that specific template 76.

[0043] The first generation unit 62 incorporates one or more data points obtained through the execution of a specific event series into the extracted specific template 76A. This allows the first generation unit 62 to generate a report candidate.

[0044] During the sample measurement process, the report candidate generation unit 52 operates repeatedly. In other words, the report candidate generation flow is repeatedly executed during the sample measurement process. The report candidate generation flow includes finding matching pairs by the comparison unit 58, selecting a specific template by the selection unit 60, and incorporating data by the first generation unit 62.

[0045] The report candidate generation unit 52 includes a second generation unit 64. The second generation unit 64 identifies unused data from the data set acquired during the sample measurement process and additionally generates report candidates that incorporate the unused data. Unused data is data from the data set that was not incorporated into any of the report candidates.

[0046] A report candidate list is formed from one or more report candidates generated by the first generation unit 62 and one or more report candidates generated by the second generation unit 64. The report candidate list is displayed on the display unit 36. The user uses the input unit 34 to input a deletion instruction while specifying the report candidates that are not needed in the report candidate list.

[0047] The deletion unit 56 deletes the report candidate specified by the user in accordance with the user's deletion instruction. This deletion means the removal of the report candidate from the official report set. If necessary, the deletion of report candidates is repeated. The one or more report candidates that ultimately remain are treated as the official report set. That is, each of the remaining report candidates is considered an official report. An adoption instruction may be entered instead of a deletion instruction.

[0048] If necessary, data analysis is associated with individual event patterns. The data analysis unit 54 performs such data analysis. Specifically, the data analysis unit 54 applies a specific data analysis associated with a specific event pattern to one or more data obtained by the execution of a specific event series. In this case, the first generation unit 62 incorporates one or more data, along with the results of the specific data analysis, into a specific template. Alternatively, only the data analysis results may be incorporated into a specific template.

[0049] Figure 2 shows a schematic diagram of the report candidate generation method according to the embodiment. The event log 38 consists of multiple events that occurred in chronological order, and more specifically, consists of multiple event information 70 representing multiple events. Reference numeral 72 indicates the latest event that was last registered at the present time, and more specifically, indicates the latest event information representing the latest event. The management table 40 is a table for managing multiple event patterns 74 and multiple templates 76 corresponding to them. Multiple template IDs may be registered in the management table 40 instead of multiple templates.

[0050] First, in the comparison step S1, the event log 38 and multiple event patterns 74 are compared, and a specific event series 80 and a specific event pattern 74 that match each other are determined. In the example shown in Figure 2, the event series 80 consists of multiple events, including the most recent event. The multiple events are sequentially connected in time. Multiple event series of different sizes may be retrieved sequentially (see reference numerals 80, 80A, and 80B). For example, a search may be performed on multiple event patterns 74 based on the retrieved specific event series. Alternatively, a search may be performed on the event log 38 based on a specific event pattern sequentially selected from among the multiple event patterns 74.

[0051] If a matching pair is found between a specific event series and a specific event pattern, then in selection step S2, a specific template 76 corresponding to the specific event pattern is selected from among multiple templates 76, and the specific template is retrieved. The retrieved specific template is assigned the code 76A.

[0052] In step S3, one or more data points (i.e., a dataset 84) obtained by executing a specific event series 80 are identified from the data set 78 acquired so far. In step S4, the dataset 84 is incorporated into the retrieved template 76A. The incorporated dataset is indicated by the code 84A. The incorporation of dataset 84 generates a report candidate 86. In the illustrated example, multiple data points constituting dataset 84 are inserted into three areas within template 76A. Which data to insert into which area is predetermined.

[0053] During the sample measurement process, the above report candidate generation flow is repeatedly executed. This generates multiple report candidates, which then form a report candidate list.

[0054] A report candidate generation flow may be executed for each record of the most recent event. When comparing event series with event patterns, partial matches may be checked in addition to exact matches. For example, if m events including the most recent event are retrieved from the event log, the m events including the most recent event, m-1 events including the most recent event, m-2 events including the most recent event, and m-3 events including the most recent event may each be compared with multiple event patterns 74.

[0055] Figure 3 shows an example of an event log. The illustrated event log 38 consists of multiple event information entries 88 representing multiple events. Each event information entry 88 includes an event ID 90, time 92, event type 94, event attributes 96, data name 98, data location 100, etc. The event ID 90 is the event identifier. The time 92 is the time the event occurred. Examples of event types 94 include SEM image acquisition, elemental map acquisition, spectrum acquisition, sample preparation, stage movement, etc. Event attributes 96 include coordinates (observation coordinates, measurement coordinates), magnification, etc. The data name 98 is the file name of the data. The data location 100 is, for example, a URL.

[0056] Figure 4 shows an example of a management table. The illustrated management table 40 is a table for managing the correspondence between multiple event patterns and multiple templates. Specifically, the management table 40 consists of multiple event pattern definitions 104 and multiple template IDs 106. Reference numeral 102 indicates a pair of an event pattern and its corresponding template. The event pattern definition includes, for example, information that identifies the configuration of multiple events and a description that defines the interrelationships of multiple event attributes.

[0057] Figure 5 shows a first example of an event pattern definition. The event pattern definition 108 includes a first condition 108A, a second condition 108B, and a third condition 108C that the event series must satisfy. In the illustrated example, the first condition 108A is satisfied when i temporally consecutive SEM images are acquired, where i is, for example, an integer greater than or equal to 2. The second condition 108B is satisfied when all i observation coordinates are identical when the i SEM images are acquired. The third condition 108C is satisfied when the i magnifications are different when the i SEM images are acquired.

[0058] If the event series extracted from the event log satisfies the event pattern definition 108, template 110 is selected. In the illustrated example, i=3, and the three SEM images acquired in the event series are placed in the three regions 112A, 112B, and 112C in template 110. Here, the symbols 114A and 114B indicate the magnification relationship. Text information and other data are also inserted into template 110 as needed.

[0059] Figure 6 shows a second example of an event pattern definition. The event pattern definition 116 includes a first condition 116A, a second condition 116B, a third condition 116C, and a fourth condition 116D that the event series must satisfy. In the illustrated example, the first condition 116A is satisfied when an SEM image is acquired. The second condition is satisfied when j elemental maps are acquired simultaneously following the acquisition of the SEM image, where j is, for example, an integer greater than or equal to 2. The third condition 116C is satisfied when the scanning region during SEM image acquisition and the scanning region during acquisition of j elemental maps are the same. The fourth condition 116D is satisfied when the magnification during SEM image acquisition and the magnification during acquisition of j elemental maps are the same.

[0060] If the event series extracted from the event log satisfies the event pattern definition 116, template 118 is selected. In the illustrated example, j=3. Three elemental maps acquired in the event series are placed in the three regions 120B, 120C, and 120D in template 118. One SEM image acquired in the event series is placed in region 120A in template 118.

[0061] Figure 7 shows a third example of an event pattern definition. The event pattern definition 122 includes a first condition 122A and a second condition 122B that the event series must satisfy. In the illustrated example, the first condition 122A is satisfied when an SEM image is acquired. The second condition 122B is satisfied when spectral measurements are performed on k specified points on the SEM image, where k is, for example, an integer greater than or equal to 1.

[0062] If the event series extracted from the event log satisfies event pattern definition 122, template 124 is selected. In the illustrated example, k=2, and an SEM image is placed for region 126A in template 124. Two spectra are placed for region 126B in template 124. The horizontal axis is the energy axis, and the vertical axis is the intensity axis.

[0063] As shown in Figure 8, in addition to the template 130, a data analysis 132 may also be associated with the event pattern 128. If the event series extracted from the event log matches the event pattern 128, the template 130 corresponding to the event pattern 128 is identified (see reference numeral 136), the data analysis 132 is identified (see reference numeral 138), and the dataset 134 obtained by executing the event series is identified (see reference numeral 140).

[0064] Data analysis 132 is automatically performed on dataset 134, and the data analysis results are incorporated into template 130 (see reference numeral 142). Furthermore, dataset 134 may also be incorporated into template 130 (see reference numeral 144). According to the mechanism shown in Figure 8, the burden on the user can be further reduced when generating the formal report set.

[0065] Figure 9 shows an example of a UI image displayed on the display screen. The UI image 146 has a first display area 148, a second display area 150, and a third display area 152.

[0066] The first display area 148 displays all or part of the event log 154. The event log 154 consists of multiple items 156 arranged along the vertical axis. Each item 156 indicates the content of the event. For example, item 156 has a time 158, a thumbnail image 160, and a file name 162. The thumbnail image 160 is a reduced image representing the image obtained by the execution of the event. A symbol indicating the image type (which can also be called the event type) is displayed along with the thumbnail image 160. Symbol 166 indicates the execution of neutralization processing. The part of the event log 154 that is actually displayed can be changed by operating the scroll bar 180.

[0067] The second display area 150 displays an automatically generated list of report candidates 168. The list of report candidates 168 consists of multiple report candidates 170. Reference numeral 172 indicates a report candidate selected by the user. Such selection may specify a target for deletion. The portion of the report candidate list 168 that is actually displayed can be changed by operating the scroll bar 173. The second display area 150 may also display a series of acquired images.

[0068] In the third display area 152, the report candidate 174 is displayed as an enlarged image. The report candidate 174 corresponds to the report candidate 172 selected by the user in the second display area 150. The report candidate 174 has an SEM image 176 and a spectral image 178. The acquired image may also be displayed enlarged in the third display area 152.

[0069] Figure 10 shows an example of the operation of the sample analysis system shown in Figure 1 as a timing chart. The horizontal axis represents time.

[0070] (A) shows the sample measurement process. (B) shows the period during which the generation of report candidates is repeated. (C) shows the period during which instructions for deleting report candidates are accepted. The generation of report candidates is repeated in parallel with the sample measurement process. Instructions for deleting report candidates are accepted at any time in parallel with these. As a result, the official report set is completed at timing t1. Conventionally, multiple reports were manually generated by the user after the completion of the sample measurement process, but according to the sample analysis system of this embodiment, it is possible to obtain the official report set immediately after the completion of the sample measurement process. However, data analysis may be performed manually after the completion of the sample measurement process, or additional reports may be generated manually.

[0071] Figure 11 shows a first example of the report candidate generation process according to the embodiment. In S12, an event series is extracted from the event log. For example, an event series consisting of m events that include the latest event and are arranged on a time axis is extracted. m is an integer of 2 or more. In S14, a table is searched. That is, an event pattern that matches the extracted event series is searched. If no match is found between the event series and the event pattern, in S12, another event series is extracted from the event log. In this case, the number of events constituting the event series may be changed. The extraction position of the event series may also be changed.

[0072] In S16, if a match is determined between the event series and the event pattern, in S18, a template corresponding to the event pattern related to the match is selected. In S20, the dataset obtained by executing the event series related to the match is incorporated into the selected template. Along with the dataset, or instead, the results of the analysis performed on the dataset may be incorporated into the selected template.

[0073] In S22, a decision is made as to whether or not to continue the process. S24 and S26 are processes that are executed periodically by interrupts or when certain conditions are met. In S24, it is determined whether or not unused data is included in the data set acquired so far. If unused data exists, in S26, a report candidate containing the unused data is generated. As a result of executing the report candidate generation method shown in Figure 11, a report candidate list consisting of multiple report candidates is generated. However, as will be explained later using Figure 13, it is possible to delete report candidates while generating them.

[0074] Figure 12 shows a second example of the report candidate generation process according to the embodiment. In Figure 12, the same reference numerals are used for the same steps as in Figure 11, and their descriptions are omitted.

[0075] In S12A, an event pattern is selected from among several event patterns. In S14A, the event log is searched based on the selected event pattern; that is, an event series matching the event pattern is searched for. In S16, if a match is found, S18 and S20 are performed as in the first example above.

[0076] Figure 13 shows the report deletion process according to the embodiment. In S30, it is determined whether or not a deletion instruction has been received from the user. If a deletion instruction has been received, in S32, the report candidate specified by the user is deleted, that is, it is removed from the report candidate list. In S34, it is determined whether or not to continue this process. If not to continue, in S36, the report candidate list at that point is considered the official report set.

[0077] Figure 14 shows a modified version of the management table. The management table 40A consists of multiple records 102. Each record 102 includes an event pattern definition 104, a template ID, and a usage count 107. For example, if one event series matches multiple event patterns, the multiple usage counts associated with the multiple event patterns may be compared, and the event pattern corresponding to the highest usage count may be selected. Alternatively, when searching for an event pattern, multiple event patterns may be compared with the event series in order of the magnitude of their usage counts. [Explanation of Symbols]

[0078] 10 Measurement unit, 12 Information processing unit, 30 Processor, 32 Memory, 38 Event log, 40 Management table, 48 Log management unit, 50 Table generation unit, 52 Report candidate generation unit, 54 Data analysis unit, 56 Deletion unit, 58 Comparison unit, 60 Selection unit, 62 First generation unit, 64 Second generation unit.

Claims

1. Including the processor, The aforementioned processor, Manage multiple event patterns and their corresponding templates, An event log is generated by recording multiple events that occur in chronological order during the sample measurement process. If a match is determined between a specific event series included in the event log and a specific event pattern among the multiple event patterns, a specific template corresponding to the specific event pattern is selected from the multiple templates. One or more data obtained by executing the specific event series are incorporated into the specific template, thereby generating a report candidate. The report candidates will be adopted or deleted according to the user's instructions. A sample analysis system characterized by the following features.

2. In the sample analysis system according to claim 1, The aforementioned processor, By searching for the multiple event patterns based on the specific event series extracted from the event log, the specific event pattern is found. Alternatively, the specific event series can be found by searching the event log based on the specific event pattern selected from the multiple event patterns. A sample analysis system characterized by the following features.

3. In the sample analysis system according to claim 1, The aforementioned processor repeatedly executes the report candidate generation flow, thereby generating a report candidate list consisting of multiple report candidates. The report candidate generation flow includes finding matching pairs consisting of a specific event series and a specific event pattern, selecting a specific template, and incorporating the one or more data into the specific template. A sample analysis system characterized by the following features.

4. In the sample analysis system according to claim 3, The user's instruction is a deletion instruction from the user, The processor deletes one or more report candidates from the list of report candidates based on the user's deletion instruction. After the deletion of the one or more report candidates mentioned above, the one or more remaining report candidates are adopted as one or more official reports. A sample analysis system characterized by the following features.

5. In the sample analysis system according to claim 3, The processor, if there is unused data acquired during the sample measurement process that was not incorporated into any of the report candidates, additionally generates a report candidate that includes the unused data. The aforementioned list of report candidates includes the additionally generated report candidates. A sample analysis system characterized by the following features.

6. In the sample analysis system according to claim 3, The processor repeatedly executes the report candidate generation flow during the execution of the sample measurement process. A sample analysis system characterized by the following features.

7. In the sample analysis system according to claim 1, Each event pattern in the aforementioned plurality of event patterns is defined by a plurality of events and their attributes. A sample analysis system characterized by the following features.

8. In the sample analysis system according to claim 1, The aforementioned report candidate is the first report candidate, When a match is determined, the processor applies a specific data analysis corresponding to the specific event pattern to one or more data obtained by the execution of the specific event series. The results of the specific data analysis are incorporated into the aforementioned specific template, thereby generating a second report candidate. A sample analysis system characterized by the following features.

9. In the sample analysis system according to claim 2, The processor analyzes multiple report samples generated through repeated template selection and data selection by the user, thereby identifying the multiple event patterns and the multiple templates corresponding to them. A sample analysis system characterized by the following features.

10. A method for generating reports performed in a sample analysis system, The process of managing multiple event patterns and the corresponding templates, A process for generating an event log by recording multiple events that occurred in chronological order during the sample measurement process, If a match is determined between a specific event series included in the event log and a specific event pattern among the multiple event patterns, a specific template corresponding to the specific event pattern is selected from the multiple templates. The process of incorporating one or more data obtained by executing the specific event series into the specific template, thereby generating a report candidate; The process of adopting or deleting the aforementioned report candidates in accordance with the user's instructions, A report generation method characterized by including the following.

11. A program for executing a report generation method in an information processing device, Features for managing multiple event patterns and corresponding templates, This function generates an event log by recording multiple events that occurred in chronological order during the sample measurement process. A function to select a specific template from among the multiple templates that corresponds to the specific event pattern when a match is determined between a specific event series included in the event log and a specific event pattern among the multiple event patterns, A function to incorporate one or more data obtained by executing the specific event series into the specific template, thereby generating a report candidate, A function to adopt or delete the aforementioned report candidates according to the user's instructions, A program characterized by including the following.

Citation Information

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