Processing device and processing method

Abstract

To provide a processing device capable of efficiently controlling the floatation amount or movement of a processing magnet used as a tool and capable of performing various processes.SOLUTION: A processing device 2 is a device for processing a material to be processed using a processing magnet 10 rotating and / or oscillating, and comprises: a drive part 12 having a superconductor 30 housed and immobilized in a container 20 and magnetic flux generation means 41 which is means disposed at one side of the superconductor 30 to control movement of the processing magnet 10; and the processing magnet 10 moving to the processing position of the material to be processed in such a state as being held in air at the other side of the superconductor 30 to process the material at the processing position.SELECTED DRAWING: Figure 3

Description

[Technical field]

[0001] The present invention relates to a processing apparatus and a processing method that utilize a superconductor. [Background technology]

[0002] Conventional machining techniques include cutting, grinding, lapping, polishing, etc. A common feature of all these machining methods for machine tools used to perform removal machining is that a rod-shaped or disk-shaped tool is pressed against the outside of the workpiece to proceed with machining from the surface, which makes hollow machining physically difficult.

[0003] On the other hand, electrochemical processing, particle beam processing, laser processing, etc. are being put to practical use as special processing. Although these processing methods can process a wide variety of materials, it is difficult to process hollow parts.

[0004] Regarding hollow machining technology, superconductivity-assisted machining is known. In Patent Document 1, the present inventors have disclosed a machining device for machining a workpiece held by a holding means by pressing a rotating or vibrating tool against the workpiece, which includes a cooled superconductor housed and fixed in an insulated container installed on a rotating table or a vibrating table, a magnet functioning as the tool is arranged adjacent to the superconductor, and during machining operation, the magnet is levitated at a certain height from the superconductor by utilizing the pinning effect of the superconductor, while the magnet is driven to follow the rotating or vibrating superconductor, and at least one of the workpiece and the superconductor is movable in at least one of a horizontal plane direction parallel to the surface of the superconductor and a vertical direction perpendicular to the horizontal plane, and the feed of at least one of the workpiece and the superconductor is controlled to machine the workpiece. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Patent No. 6536953 Summary of the Invention [Problem to be solved by the invention]

[0006] In the device of Patent Document 1, in order to move the magnet that functions as a tool, it is necessary to move the entire heat-insulating container in which the superconductor is housed and fixed, and further improvements were required to vibrate and move it at higher speeds.In addition, the need for a rotating table and a vibration table made it difficult to reduce the size.

[0007] In addition, in superconductivity-assisted machining, machining is performed using a tool that is levitated in the air using superconductivity, so machining (especially hollow machining) can be limited by the levitation amount of the tool, such as making it difficult to machine hollow parts that are thicker than the levitation amount. In addition, while miniaturization of tools is required for micromachining, there was a problem in that it was difficult to obtain a sufficient levitation amount when using micro magnets as tools. By controlling the vertical movement such as the levitation amount, machining with a higher degree of freedom is possible.

[0008] Under such circumstances, an object of the present invention is to provide a processing device and a processing method that can efficiently control the levitation amount and movement of a processing magnet used as a tool, thereby enabling a wider variety of processing to be performed. [Means for solving the problem]

[0009] As a result of intensive research aimed at solving the above problems, the present inventors found that the following invention meets the above object, and thus completed the present invention.

[0010] That is, the present invention relates to the following inventions. <1> A processing device that processes a workpiece using a rotating and / or vibrating processing magnet, comprising: a drive unit having a superconductor contained and fixed in a container and a magnetic flux generating means arranged on one side of the superconductor; and a processing magnet that is held in the air on the other side of the superconductor and moves to a processing position for the workpiece and processes the workpiece at the processing position, wherein the magnetic flux generating means is a means for controlling the movement of the processing magnet. <2> the magnetic flux generating means has a driving magnet arranged to face the processed magnet with the superconductor interposed therebetween, the processed magnet and the driving magnet are arranged so that the magnetic properties of the opposing surfaces are different, and the processed magnet is moved in conjunction with the movement of the driving magnet; <1> The processing apparatus according to claim 1 . <3> The magnetic flux generating means includes a drive magnet control means for causing the drive magnet to vibrate and / or rotate. <2> The processing apparatus according to claim 1 . <4> The drive magnet control means comprises a coil and / or an electromagnet. <3> The processing apparatus according to claim 1 . <5> The magnetic flux generating means has an electromagnet, and the processing magnet is moved by using a magnetic field gradient of the electromagnet. <1> The processing apparatus according to claim 1 . <6> The processed magnet has two or more magnetic poles on the same surface. <1> from <5> 13. The processing apparatus according to claim 12 . <7> The size of the processed magnet is smaller than that of the driving magnet. <2> from <4> 13. The processing apparatus according to claim 12 . <8> The drive unit is disposed on a rotating platform that is driven to rotate. <1> from <7> 13. The processing apparatus according to claim 12 . <9> The processing of the workpiece is cutting, grinding, or surface polishing. <1> from <8> 13. The processing apparatus according to claim 12 . <10> The superconductor is a bulk superconductor including yttrium barium copper oxide (YBCO). <1> from <9> 13. The processing apparatus according to claim 12 . <11> a second driving unit having a second superconductor accommodated and fixed in a container on the other side of the superconductor of the driving unit, the driving unit and the second driving unit are arranged such that the superconductors face each other with a gap therebetween, and the processing magnet moves to a processing position of the workpiece while being held in the space between the driving unit and the second driving unit, and processes the workpiece. <1> from <10> 13. The processing apparatus according to claim 12 . <12> the second driving unit has a magnetic flux generating means on a side facing the processing magnet across the second superconductor; <11> The processing apparatus according to claim 1 .

[0011] <13> A processing method for processing a workpiece using a processing device comprising a driving unit having a superconductor contained and fixed in a container, and a processing magnet, wherein the magnetic flux generating means is a means for controlling the movement of the processing magnet, the processing method comprising the steps of: pouring a coolant into the container to cool the superconductor, and trapping the processing magnet in the air on the other side of the superconductor; moving the processing magnet while it is trapped in the air on the other side of the superconductor to a processing position for the workpiece; and processing the workpiece with the rotating and / or vibrating processing magnet. <14> the magnetic flux generating means has a driving magnet arranged to face the processing magnet with the superconductor interposed therebetween, the processing magnet and the driving magnet are arranged so that the magnetic properties of the opposing surfaces are different, and the processing magnet is moved in conjunction with the movement of the driving magnet to process the workpiece; <13> The method according to <15> the magnetic flux generating means has an electromagnet, and the processing magnet is moved by using a magnetic field gradient of the electromagnet to process the workpiece; <13> The method according to Effect of the Invention

[0012] According to the present invention, the levitation amount and movement of the machining magnet used as a tool can be efficiently controlled, enabling a wider variety of machining to be performed. [Brief description of the drawings]

[0013] [Figure 1] FIG. 1 is a schematic perspective view of a processing apparatus according to the present invention. [Diagram 2] 2 is a schematic diagram of a vertical section (XZ plane) of a processing magnet and a driving unit periphery in the processing apparatus of FIG. 1. [Diagram 3] FIG. 4 is a schematic diagram for explaining another embodiment of the processing apparatus of the present invention. [Figure 4] 4 is a schematic diagram showing an example of a magnetic flux generating means in the processing apparatus of Fig. 3, where (a) is a schematic diagram of a vertical cross section (XZ plane) around a processing magnet and a driving unit, and (b) is a schematic diagram of a cross section taken along line AA. [Diagram 5] 4 is a schematic diagram showing an example of a magnetic flux generating means in the processing apparatus of Fig. 3, where (a) is a schematic diagram of a vertical cross section (XZ plane) around a processing magnet and a driving unit, and (b) is a schematic diagram of a cross section taken along line BB. [Figure 6] 4 is a schematic diagram showing an example of a magnetic flux generating means in the processing apparatus of Fig. 3, where (a) is a schematic diagram of a vertical cross section (XZ plane) around a processing magnet and a driving unit, and (b) is a schematic diagram of a cross section taken along line CC. [Figure 7] FIG. 4 is a schematic diagram for explaining another embodiment of the processing apparatus of the present invention. [Figure 8] FIG. 4 is a schematic diagram for explaining another embodiment of the processing apparatus of the present invention. [Figure 9] FIG. 1 is a flow chart showing an example of a processing method of the present invention. [Figure 10] FIG. 4 is a schematic diagram for explaining control of the processed magnet by the magnetic flux generating means. [Figure 11] FIG. 4 is a schematic diagram for explaining control of the processed magnet by the magnetic flux generating means. [Figure 12] 1 is a photograph of a stainless steel plate polished using the processing device of the present invention. [Figure 13] (a) is a confocal laser microscope photograph of the SUS plate before polishing, and (b) is a confocal laser microscope photograph of the SUS plate after polishing. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0014] The following describes the embodiment of the present invention in detail, but the description of the constituent elements described below is one example (representative example) of the embodiment of the present invention, and the present invention is not limited to the following content unless the gist of the present invention is changed. In this specification, when the expression "~" is used, it is used as an expression including the numerical value or physical property value before and after it. In addition, in the following description, the same elements may be given the same reference numerals and detailed description may be omitted.

[0015] <Processing equipment> The present invention relates to a processing apparatus (hereinafter sometimes referred to as "the processing apparatus of the present invention") that processes a workpiece using a rotating and / or vibrating processing magnet, and that comprises a drive unit having a superconductor fixed in a container and a magnetic flux generating means arranged on one side of the superconductor, and a processing magnet that is held in the air on the other side of the superconductor and moves to a processing position for the workpiece and processes the workpiece at the processing position, wherein the magnetic flux generating means is a means for controlling the movement of the processing magnet.

[0016] The processing device of the present invention is configured such that a magnetic flux generating means is provided in a drive unit that drives the processing magnet, and the magnetic flux generating means can control the levitation amount and movement of the processing magnet. For example, when the distance between the superconductor and the magnetic flux generating means is increased, the distance by which the processing magnet is levitated above (levitation amount) or the distance by which it is suspended below (suspension amount) increases. In this state, the processing magnet is moved to the processing position, and the magnetic flux generating means is brought closer to the superconductor at the processing position, so that the processing magnet can also be brought closer to the superconductor.

[0017] <Processing method> The present invention also relates to a processing method for processing a workpiece using a processing device equipped with a superconductor contained and fixed in a container, a driving unit having a magnetic flux generating means arranged on one side of the superconductor, and a processing magnet, which can be performed by the processing device of the present invention. The processing method of the present invention includes the steps of: pouring a coolant into the container to cool the superconductor, capturing the processing magnet in the air on the other side of the superconductor, moving the processing magnet to a processing position for the workpiece while it is captured in the air on the other side of the superconductor, and processing the workpiece with the rotating and / or vibrating processing magnet.

[0018] The processing apparatus of the present invention and the processing method of the present invention using the same can variably control the processing magnet that functions as a tool suspended in the air, and thus overcome the constraints on the processing shape due to interference of the tool, and hollow and selective processing is possible. Therefore, it is effective in the technical field of hollow processing. Furthermore, the processing apparatus and processing method of the present invention can realize fine hollow processing and processing of fine parts. In conventional superconducting assisted processing, a doughnut-shaped magnet with one side and four poles of about 50 mm in diameter was usually used. In the processing apparatus of the present invention, by using a two-pole magnet, it is possible to select a smaller magnet in size and process even fine parts. In the processing apparatus of the present invention, since the magnetic flux generating means is expected to increase the amount of levitation, a micro magnet can also be selected as the processing magnet. As a result, hollow processing can be realized even for thin workpieces that were difficult to process in the past, such as cutting from an ingot, airplane wings, and the tips of bullet trains.

[0019] The processing apparatus and processing method of the present invention can also perform cutting, grinding, lapping, polishing, and other processes in which a processing magnet is pressed from the outside to proceed from the surface of the workpiece.

[0020] Furthermore, if the rectangular parallelepiped-shaped machining magnet is vibrated, it becomes possible to machine corners and edges. Since corners and edges cannot be machined by rotational motion alone, it is necessary to vibrate the machining magnet. In the machining device and machining method of the present invention, the movement of the machining magnet can be controlled by the magnetic flux generating means without moving the entire drive unit. In particular, the machining magnet can be moved in conjunction with the movement of the drive magnet. This allows the machining magnet to be vibrated more efficiently, and in particular, the machining magnet can be efficiently vibrated in the vertical direction to machine corners and edges.

[0021] By using the vibration of this processing magnet for processing, it is possible to diversify the shapes of processed parts after assembly, such as 3D printers. For example, various processing forms are possible, such as additional processing after assembly, final finishing of 3D models, and processing of hollow objects. It is also possible to apply it to processing robots to remove material from necessary parts.

[0022] In addition, by placing the drive unit on a rotating table that is driven to rotate, the processed magnet can be rotated slowly while being processed by vibration, which is expected to improve uniformity.

[0023] The processing apparatus of the present invention may also be configured without a rotating means. In this case, a turntable and a motor for rotating the turntable are not required, and the apparatus can be configured with fewer components, making it easier to make the apparatus smaller.

[0024] (workpiece) The present invention can be applied to all materials other than ferromagnetic materials as the workpiece. For example, stainless steel (except for ferromagnetic materials), aluminum, copper, brass, resins, etc. can be used. In addition to cutting, surface polishing is also possible using an abrasive. Among them, a workpiece having a hollow is a suitable target for processing. As described above, when processing the hollow (inner surface) of a workpiece having a hollow, the processing magnet needs to have a levitation or suspension amount greater than the thickness of the workpiece in order to move the processing magnet to the processing position inside the hollow. The processing device of the present invention can control the levitation or suspension amount of the processing magnet by the magnetic flux generating means. By controlling the levitation or suspension amount of the processing magnet to be large, even a workpiece having a hollow formed of a thick member can be processed.

[0025] (Embodiment 1) 1 and 2 is a processing device that processes a workpiece by a processing magnet 10 that rotates or vibrates relative to the workpiece. The processing device 1 includes the processing magnet 10 that functions as a tool, and a drive unit 120.

[0026] [Processed magnet 10] The processing magnet 10 is pressed against a workpiece in a rotating or vibrating state, and functions as a tool for cutting, grinding, or surface polishing the workpiece. The processing magnet 10 moves to a processing position for the workpiece while floating above the superconductor 30 (while being held in the air on the side facing the magnetic flux generating means 40 across the superconductor 30).

[0027] The levitation amount L of the processed magnet 10 (the distance in the Z direction from the surface of the superconductor 30 to the processed magnet 10) can be controlled by the balance between the force (holding force) that holds the processed magnet 10 in the air due to the superconducting phenomenon and the attractive force acting between the processed magnet 10 and the magnetic flux generating means 40.

[0028] The processed magnet 10 is preferably a neodymium magnet, a samarium-cobalt magnet, an anisotropic ferrite magnet, etc. The processed magnet 10 may also be one in which abrasive grains for processing are fixed to the surface of the magnet, one in which a metal plate having a tool shape is attached to the surface of the magnet, or one in which the surface of the magnet is processed into a blade shape.

[0029] The shape of the processed magnet 10 is not particularly limited, and may be a doughnut shape, a disk shape, a rectangular parallelepiped shape, a cylindrical shape, or the like. In addition, two, four, or more magnetic poles of S poles and N poles may be arranged on the same surface. It is possible to arrange a plurality of magnets on the same surface and utilize the mutual force of the plurality of magnets. In addition, a doughnut-shaped or disk-shaped multi-pole magnet in which N poles and S poles are magnetized alternately in the circumferential direction may be used. In addition, it may be a single-sided magnetized magnet in which only one side is magnetized, or a double-sided magnetized magnet in which both sides are magnetized.

[0030] The size of the processing magnet 10 can be appropriately selected depending on the shape of the workpiece. The size of the processing magnet 10 may be smaller than that of the driving magnet 42. On the other hand, if the processing magnet 10 is too large, it tends to be difficult to obtain a sufficient levitation amount L. Therefore, for example, the size of the processing magnet 10 (the maximum length of the processing magnet 10 in the XY plane) can be 1.1 times or less than the size of the driving magnet 42. Furthermore, in the processing device 1 of the present invention, a processing magnet smaller than the conventional one can be used. For example, a micro magnet having a size of 3.5 mm to 25 mm or 5 mm to 10 mm can be used as the processing magnet 10.

[0031] [Drive unit 120] The driving unit 120 includes a container 20 that contains the superconductor 30 and a driving magnet 42 and an electromagnet 43, which are magnetic flux generating means. The driving unit 120 controls the levitation amount and movement of the processed magnet 10 by the superconductor 30 and the driving magnet 42. The driving unit 120 (container 20) is disposed on a rotating table 52 of the rotating means, and the driving unit 120 (container 20) also rotates by rotating the rotating table 52 by a motor (not shown). As a result, the processed magnet 10 also rotates in conjunction with the rotation of the superconductor 30 and the driving magnet 42. The rotating table 52 is disposed on a Z stage 60, which is a vertical moving means that can move in a vertical direction (Z direction) perpendicular to the surface of the superconductor 30, and the Z stage 60 is provided on a support table 71 that includes wheels 70 that can move in horizontal plane directions (X direction, Y direction) parallel to the surface of the superconductor 30. Therefore, the driving unit 120 and the processing magnet 10 which is moved in conjunction with the driving unit 120 can also move in the vertical and horizontal directions. The rotating table 52 and the Z stage 60 will be described in the processing device 2.

[0032] [Container 20] The container 20 is a cylindrical heat-insulating container having a cylindrical internal space 22. The container 20 has an inner layer 23 made of a cold-resistant material (such as aluminum) and an outer layer 24 made of a heat-insulating material that covers the outside of the inner layer 23. The heat-insulating material may be any material capable of maintaining the superconductor 30 in a cooled state, and may be, for example, polystyrene foam. The superconductor 30 is fixed from below by a holding plate 26 so as to be in contact with the upper surface 25 (lid) of the container 20. The driving magnet 42 is disposed on an electromagnet 43 disposed on the bottom surface 28 side of the container 20. During processing, the internal space 22 of the container 20 is filled with a coolant, and the superconductor 30 contained inside the container 20 is cooled to a temperature at which superconductivity is expressed, and the cooled state is maintained. The coolant may be any material capable of cooling the superconductor 30 to a temperature at which superconductivity is expressed. For example, liquid nitrogen, cold gas, etc. may be used.

[0033] The method of fixing the superconductor 30 is not particularly limited, and the superconductor 30 may be directly fixed below a member forming the upper surface 25 (lid) of the internal space 22 of the container 20. When fixing the superconductor 30, it is preferable to fix the superconductor 30 so that it is in contact with the upper surface 25 of the container 20. By fixing the superconductor 30 so that it is in contact with the upper surface 25 of the container 20, the distance in the Z direction from the surface of the container 20 in which the superconductor 30 is accommodated to the processing magnet 10 when the processing magnet 10 is floated can be increased, and a thicker workpiece can be processed.

[0034] Furthermore, although the container 20 is a cylindrical heat-insulating container, the shape is not limited thereto and may be any shape. The driving unit 120 may have a structure in which the space in which the superconductor 30 is accommodated is a space (heat-retaining space) that can maintain the cooling temperature, and therefore the space in which the driving magnet 42 and the electromagnet 43 are arranged does not have to be surrounded by a heat-insulating material. For example, a container in which only the space in which the superconductor 30 is accommodated is covered with a heat-insulating material, or a configuration in which the driving magnet 42 and the electromagnet 43 are arranged below the heat-insulating container in which the superconductor 30 is accommodated and fixed (a configuration in which the superconductor 30, the driving magnet 42, and the electromagnet 43 are accommodated in separate members) may be used.

[0035] [Superconductor 30] The superconductor 30 is a type II superconductor. There are two types of superconductors, type I superconductors and type II superconductors, which differ in their response to magnetic fields. Type II superconductors are characterized by the pinning effect that occurs when magnetic flux enters the superconductor. The pinning effect is a phenomenon in which magnetic flux is captured by normal conductive parts such as distortion and impurities inside the type II superconductor, and does not move as if pinned. To utilize the pinning effect, methods such as irradiating a bulk superconductor with heavy particle beams or introducing impurities to intentionally create defects and trapping magnetic flux in these defects, and a method of opening countless triangular lattice-shaped holes (anti-dots) in a superconducting thin film by lithography and etching have been known so far.

[0036] A suitable superconductor 30 is a superconducting bulk containing yttrium barium copper oxide (YBCO). A superconducting bulk containing YBCO can be produced by mixing and baking raw materials of yttrium-based superconductor YBa2Cu3O7, and may be made of YBCO or may be impregnated with resin or the like. A superconducting bulk containing YBCO is preferable because it can be made superconducting with inexpensive liquid nitrogen. Note that superconductors made of alloys or compounds, copper oxide high-temperature superconductors, and second-type superconductors such as niobium (Nb) and vanadium (V) may also be used. Also, the superconductor 30 may be a plurality of superconducting bulks arranged side by side.

[0037] [Magnetic flux generating means 40] The magnetic flux generating means 40 is a means arranged below the superconductor 30 and has a function of generating a magnetic flux that affects the levitation of the processing magnet 10. The magnetic flux generating means 40 has an electromagnet 43 and a driving magnet 42 arranged on the electromagnet 43. The electromagnet 43 is a means for changing the displacement between the driving magnet 42 and the superconductor 30, and the electromagnet 43 can change the distance between the superconductor 30 and the driving magnet 42. By changing the displacement between the driving magnet 42 and the superconductor 30, the displacement of the processing magnet 10 can be changed, and the processing magnet can be moved (for example, moved in the vertical direction).

[0038] The driving magnet 42 is disposed opposite the processed magnet 10 with the superconductor 30 interposed therebetween, and the driving magnet 42 and the processed magnet 10 are disposed so that the magnetic poles of the opposing surfaces are different. By disposing in this manner, an attractive force acts between the processed magnet 10. The driving magnet 42 is preferably a neodymium magnet, a samarium-cobalt magnet, an anisotropic ferrite magnet, or the like, as with the processed magnet 10. In addition, the surfaces of the driving magnet 42 and the processed magnet 10 facing each other may be surfaces consisting of one magnetic pole, an N pole or an S pole, or may be surfaces having two or more magnetic poles. When the opposing surfaces of the driving magnet 42 and the processed magnet 10 have two or more magnetic poles, the driving magnet 42 and the processed magnet 10 are disposed so that the magnetic poles of the opposing areas are different. The driving magnet 42 may have a different shape from the processed magnet 10, as long as it is disposed so that the magnetic poles of the surface of the driving magnet 42 facing the processed magnet 10 are different from the magnetic poles of the surface of the processed magnet 10 facing the driving magnet 42. For example, when a magnet with eight poles on both sides is used as the processed magnet 10, the drive magnet 42 may be a magnet with eight poles on both sides, or a magnet with four poles on one side.

[0039] (Embodiment 2) The processing device 2 shown in Fig. 3 is another embodiment of the processing device of the present invention. The processing device 2 includes a processing magnet 10 that functions as a tool, a drive unit 12, a rotation means 50 that rotates and drives the drive unit 12, a vertical movement means 60 that can move the drive unit 12 in the Z direction, and a planar movement means 72 that can move the drive unit 12 in the X direction and / or Y direction. The processing magnet can be the same as that of the processing device 1.

[0040] [Drive unit 12] The driving unit 12 includes a container 20 that houses a superconductor 30 and a magnetic flux generating means 41. The driving unit 12 is similar to the driving unit 120 of the processing apparatus 1, except for the magnetic flux generating means. In the driving unit 12, the superconductor 30 is directly fixed below a member that forms an upper surface 25 of the container 20.

[0041] [Magnetic flux generating means 41] The magnetic flux generating means 41 is a means having a function of generating a magnetic flux that affects the levitation of the processing magnet 10, which is disposed below the superconductor 30. The magnetic flux generating means 41 may include a driving magnet 42 that is disposed opposite the processing magnet 10 with the superconductor 30 in between, and a driving magnet control means 44 that causes the driving magnet 42 to perform a vibration motion and / or a rotation motion. At this time, the driving magnet 42 and the processing magnet 10 are disposed so that the magnetic poles of the opposing surfaces are different. With this configuration, an attractive force acts between the driving magnet 42 and the processing magnet 10, and the processing magnet 10 moves in conjunction with the movement of the driving magnet 42, so that the workpiece can be processed. The driving magnet 42 is the same as that of the processing device 1.

[0042] Specifically, the drive magnet control means 44 may include a coil and / or an electromagnet. The wire material of the coil constituting the coil or electromagnet is not particularly limited, and may be a metal material, or a coil formed of a superconducting material may be used. The magnitude, frequency, and direction of the current flowing through the coil or electromagnet are controlled by the actuator drive control unit 48 to vibrate or rotate the drive magnet 42 up and down (Z direction), left and right (X direction), front and back (Y direction), etc., so that a movement linked to the movement of the drive magnet 42 can be imparted to the processed magnet 10.

[0043] The arrangement of the coils and electromagnets can be adjusted as appropriate depending on the shape of the drive magnet 42, the arrangement of the magnetic poles, and the like. The number of coils and electromagnets may be one or more, or a coil and an electromagnet may be used in combination. For example, the drive magnet control means 44 may include a coil and / or an electromagnet arranged outside the drive magnet 42. In this case, the coils and electromagnets may be arranged outside or below each magnetic pole. Also, the coils and / or electromagnets may be arranged to face the superconductor 30 across the drive magnet 42, or the coils may be arranged so that the drive magnet 42 is located radially inside the coils.

[0044] The magnetic flux generating means 41 may adopt a system that does not use the driving magnet 42, may simply have an electromagnet, and may move the processing magnet 10 using the magnetic field gradient of the electromagnet. In this case, the actuator drive control unit 48 controls the magnitude and frequency of the current flowing through the electromagnet to change the magnetic flux that affects the levitation of the processing magnet 10, thereby controlling the movement of the processing magnet 10.

[0045] Here, the magnetic flux generating means 41 will be described in detail with reference to Figs. 4 to 6, but the arrangement of the coils and electromagnets is not limited to this.

[0046] 4, the driving magnet 421 is a doughnut-shaped magnet with 8 poles on both sides having 4 magnetic poles on one side, and includes 4 coils (coils 441, 442, 443, 444) with their axes in the Z direction as a driving magnet control means. The driving magnet 421 has a guide 46 in the central space, but is not fixed, and the driving magnet 421 can move up and down and left and right. Each coil is disposed outside each magnetic pole of the driving magnet 421. The processed magnet 101 is the same magnet as the driving magnet 421, and is disposed so that the S pole of the driving magnet 421 faces the N pole of the processed magnet 101, and the N pole of the driving magnet 421 faces the S pole of the processed magnet 101.

[0047] 5, the driving magnet 422 is a doughnut-shaped two-pole magnet having one N pole and one S pole, and includes one coil 445 having an axis in the Z direction as the driving magnet control means. The driving magnet 422 is disposed radially inside the coil 445 with a gap therebetween. The driving magnet 422 is provided with a guide 46 in the central space, but is not fixed, and the driving magnet 422 can move up and down and left and right. The processed magnet 102 is the same as the driving magnet 422 except that it is smaller than the driving magnet 422, and is disposed so that the S pole of the processed magnet 101 and the N pole of the driving magnet 422 face each other.

[0048] 6, the magnetic flux generating means 412 includes a driving magnet 423 which is a doughnut-shaped two-pole magnet having one N pole and one S pole, and one coil 446 having an axis in the Z direction as a driving magnet control means. A guide 46 is provided in the central space of the driving magnet 423, but the guide 46 is not fixed, and the driving magnet 423 can move up and down and left and right. The coil 446 is disposed in a position facing the superconductor 30 with the driving magnet 423 in between.

[0049] [Rotation means 50] 3 includes a turntable 52 for rotating the container 20, a motor 54 for rotating the turntable 52, and a sensor 56 for measuring the number of rotations of the container 20. The container 20 is disposed on the turntable 52, and the container 20 also rotates when the motor 54 is driven by a rotation control unit 58 to rotate the turntable 52. As a result, the processing magnet 10 also rotates in conjunction with the rotation of the superconductor 30 and the magnetic flux generating means 41.

[0050] [Vertical transportation means 60] 3 includes a Z stage 62, a motor 64, and a sensor 66 for measuring the moving distance in the Z direction (vertical direction). A vertical movement control unit 68 drives the motor 64 to move the container 20 and the rotating means 50 in the Z direction. As a result, the processing magnet 10 also moves in the Z direction in conjunction with the superconductor 30 and the magnetic flux generating means 41.

[0051] [Plane transportation means 72] 3 includes an XY stage 73, a motor 74, and a sensor 76 for measuring the moving distance in a planar direction. The motor 74 is driven by a planar movement control unit 78 to move the container 20, the rotating means 50, and the vertical moving means 60 in the X direction and / or the Y direction. As a result, the processing magnet 10 also moves in conjunction with the superconductor 30 and the magnetic flux generating means 41.

[0052] Furthermore, the rotating means and the means capable of moving the workpiece in the horizontal plane directions (X direction, Y direction) or the vertical direction (Z direction) may be provided on the workpiece side rather than on the drive unit side of the processing device of the present invention. A moving means that can be provided on the workpiece side independently of the drive unit is realized by combining a frame with an XY stage and a Z stage. The workpiece may be moved to the processing position and processed by controlling the feed with the XY stage and the Z stage relative to the processing magnet.

[0053] (Embodiment 3) The processing device 3 shown in FIG. 7 has a processing magnet 10, a driving unit 122, and a second driving unit 14 arranged above the superconductor 30 of the driving unit 122 with a gap therebetween. The driving unit 122 has the superconductor 30 fixed below a member forming the upper surface (surface above the Z axis) of the container 20, and a magnetic flux generating means 400 arranged below the container 20 (below the Z axis). The magnetic flux generating means 400 can be configured as the magnetic flux generating means 40 (see FIG. 2) of the above-mentioned embodiment 1 or the magnetic flux generating means 41 (see FIG. 3) of the above-mentioned embodiment 2. The second driving unit 14 has a superconductor 32 fixed in the container 21. The container 21 is a cylindrical heat-insulating container having a cylindrical hollow like the container 20, and is filled with a coolant during processing to cool the superconductor 32. The superconductor 32 is preferably fixed so as to contact the bottom surface 27 (surface that becomes the Z axis lower side when placed) of the container 21. The superconductor 32 may be a second type superconductor like the superconductor 30, and may be the same as or different from the superconductor 30. The superconductor 30 of the driving unit 120 and the superconductor 32 of the second driving unit 14 are disposed so as to face each other with the processed magnet 10 interposed therebetween. The processed magnet 10 is disposed between the driving unit 122 and the second driving unit 14. When using this processing device 3 to process the inner surface of the workpiece 90, the processing magnet 10, while held between the drive unit 122 and the second drive unit 14, advances inside the hollow 91 of the workpiece 90, moves to the processing position, and processes the workpiece 90.

[0054] It is also possible to use a configuration in which the driving unit 122 is arranged above with its top and bottom facing inverted, and the second driving unit 14 is arranged below with its top and bottom facing upside down.

[0055] (Embodiment 4) The processing device 4 shown in FIG. 8 has a processing magnet 10, a driving unit 122, and a second driving unit 140 arranged above the superconductor 30 of the driving unit 122 with a gap therebetween. The superconductor 30 of the driving unit 122 and the superconductor 30 of the driving unit 140 are arranged to face each other with the processing magnet 10 in between. The second driving unit 140 is the driving unit 122 with the top and bottom reversed. That is, the processing device 4 is an apparatus in which the driving unit 122 is arranged to be mirror symmetric with the processing magnet 10 in between. The driving unit 122 and the second driving unit 140 may have the same magnetic flux generating means 400 or may have different magnetic flux generating means 400. By providing the second driving unit 140 with the magnetic flux generating means 400, the processing magnet 10 can be driven from above and below even when processing the hollow 91 of the workpiece 90, and the processing magnet 10 can be moved in a complex manner, and the pressing force of the processing magnet 10 against the workpiece 90 can be made stronger.

[0056] (Processing method) Next, the processing method of the present invention will be described by taking as an example a processing method using the processing device 2. Fig. 9 is a flow chart showing an example of the processing method of the present invention.

[0057] [S1: Capture the processed magnet 10 in mid-air] First, the processed magnet 10 is levitated above the superconductor 30 and captured in the space above. Specifically, while the processed magnet 10 is held at a predetermined height away from the superconductor 30 (container 20) using a holder, a coolant such as liquid nitrogen is filled into the container 20 to cool the superconductor 30. Thereafter, the holder is removed from the processed magnet 10 and the processed magnet 10 is levitated at a position away from the superconductor 30.

[0058] [S2: Rotation of the drive unit 12 (container 20)] Next, the superconductor 30 and the magnetic flux generating means 41 are rotated. First, the rotation speeds of the superconductor 30 and the magnetic flux generating means 41 are input to the input unit 82. Based on the input data, the main control unit 80 sends a signal to the rotation control unit 58, which then rotates the motor 54 of the rotating means 50. The rotation speed of the motor 54 is measured by the sensor 56, and the rotation control unit 58 passes a current through the motor 54 so that the motor 54 rotates at a constant speed. As a result, the turntable 52 and the container 20 containing the superconductor 30 and the magnetic flux generating means 41 rotate at a constant speed that has been input. The processed magnet 10 also starts to rotate according to the rotation speeds of the superconductor 30 and the magnetic flux generating means 41.

[0059] [S3: Move to processing position] Next, in order to perform processing at a desired position of the workpiece, the levitated processing magnet 10 is moved to the processing position of the workpiece. First, information on the internal space of the workpiece having a hollow space is inputted at the input unit 82. This information corresponds to the path along which the processing magnet 10 moves. Note that the information on the internal space of the workpiece may be information from another network service, not information inputted from the input unit 82. Based on the inputted path information, the main control unit 80 outputs a signal based on the path information inputted to the planar movement control unit 78 and the vertical movement control unit 68. Based on the signal, the planar movement control unit 78 and the vertical movement control unit 68 drive the motor 74 and the motor 64 to move the container 20 in which the superconductor 30 and the magnetic flux generating means 41 are accommodated, and the processing magnet 10 can be automatically moved to a desired position inside the workpiece.

[0060] [S4: Processing] When the processing magnet 10 moves to a predetermined position, the levitated processing magnet 10 is pressed against the workpiece while rotating or vibrating to process it. First, when the processing magnet 10 moves to a predetermined position based on visual estimation or the like, information is input to the input unit 82 to vibrate the driving magnet 42, and the main control unit 80 outputs a signal to the actuator drive control unit 48 based on the input data, and the actuator drive control unit 48 determines the magnitude and cycle of the current to be supplied to the driving magnet control means 44 (coil or electromagnet) based on the signal, and passes a current to the driving magnet control means 44. By passing a current through the driving magnet control means 44, the driving magnet 42 vibrates, and the processing magnet 10 vibrates accordingly, cutting and processing a predetermined portion of the inner wall of the workpiece.

[0061] Here, the control of the processing magnet 10 by the magnetic flux generating means 410 will be described with reference to Figs. 10 and 11. As shown in Fig. 10, the actuator drive control unit 48 applies current to each coil so that the coils 441 and 443 become N poles and the coils 442 and 444 become S poles, and the entire driving magnet 42 is displaced in a direction approaching the superconductor 30. In conjunction with this displacement of the driving magnet 42, the processing magnet 10 is displaced toward the superconductor 30. Furthermore, as shown in Fig. 11, the actuator drive control unit 48 applies current to each coil so that the coils 441 and 443 become S poles and the coils 442 and 444 become N poles, and the entire driving magnet 42 can be displaced in a direction away from the superconductor 30. At this time, in conjunction with the displacement of the driving magnet 42, the processing magnet 10 is displaced to the opposite side to the superconductor 30.

[0062] Also, by passing a current through each coil so that the coils 441 and 444 become N poles and the coils 442 and 443 become S poles, or so that the coils 441 and 444 become S poles and the coils 442 and 443 become N poles, the driving magnet 42 comes partially closer to the superconductor 30, and it is also possible to tilt the driving magnet 42. By tilting the driving magnet 42, the processing magnet 10 is tilted so that the processing magnet 10 and the driving magnet 42 are mirror symmetric with the superconductor 30 in between.

[0063] [S5: End of processing] After machining for a predetermined time, or when the completion of cutting is confirmed by visual estimation or machining sound, a machining stop signal is input from the input unit 82. When the main control unit 80 receives the stop signal input from the input unit 82, it transmits a stop signal to the actuator drive control unit 48 and stops the supply of current to the drive magnet control means 44 (coil and electromagnet) so that the machining magnet 10 stops in a state where it is levitated above the workpiece. Note that even in this state, the superconductor 30 is rotated by the motor 54, so that the machining magnet 10 continues to rotate.

[0064] [S6: Removal of processed magnet 10] Next, information on the end of processing is inputted at the input unit 82, and based on the inputted information, the main control unit 80 outputs signals to the planar movement control unit 78 and the vertical movement control unit 68, and based on the inputted path information, drives the motors 74 and 64 to move the container 20 containing the superconductor 30 and the magnetic flux generating means 41, and automatically moves the processing magnet 10 outside the workpiece. Furthermore, the main control unit 80 outputs a signal to the rotation control unit 58 to stop the rotation of the processing magnet 10.

[0065] As described above, the main control unit 80 controls each control unit such as the actuator drive control unit 48, the rotation control unit 58, the vertical movement control unit 68, and the planar movement control unit 78 based on information input to the input unit 82. A keyboard is used as the input unit 82, but a liquid crystal panel or the like may also be used. The input unit 82 can input the coordinates inside the workpiece and the number of rotations of the superconductor 30, etc. The input data such as the movement path of the processing magnet 10, the number of rotations of the superconductor 30, and the rotation status of the various motors of the rotation means 50, the vertical movement means 60, and the horizontal movement means 72 are displayed on the display unit 84. The state of the coolant and other information useful for processing can also be displayed on the display unit 84. A liquid crystal panel or the like is preferably used as the display unit 84.

[0066] In addition, it is preferable to manage the temperature of the internal space 22 of the container 20 during processing. During processing, the cooling control unit 86 monitors the temperature and amount of the coolant, and if any of the values ​​indicates an abnormal value, the cooling control unit 86 sends a signal to the main control unit 80. In addition, if any of the values ​​indicates an abnormal value, the main control unit 80 causes the display unit 84 to display that a malfunction has occurred in the cooling mechanism, or sends a signal to the actuator drive control unit 48 or the rotation control unit 58 to stop operation or to suppress operation.

[0067] 9, the rotating table 52 is rotated in S2, and then the processed magnet 10 is moved to the processing position, but the rotating table 52 may be rotated after the processed magnet 10 is moved to the processing position. In addition, the rotation of the rotating table 52 is stopped after the processed magnet 10 is removed in S6, but the rotation of the rotating table 52 may be stopped before the processed magnet 10 is removed. In addition, since it is not essential to rotate the rotating table 52 in the processing method of the present invention, after the processed magnet 10 is captured in the air in S1, the magnet 10 may be moved to the processing position in S3 without performing S2.

[0068] The vertical movement means and the planar movement means are not limited to those that can be automatically controlled, such as the vertical movement means 60 and the planar movement means 72, and may be manually moved in the vertical direction or in the horizontal direction. In this case, the drive unit is manually moved to move the machining magnet to the machining position. After machining, the machining magnet is manually removed from the workpiece.

[0069] In the above description of the processing method, the processing magnet 10 is vibrated to perform processing, but the processing magnet 10 may be rotated to perform processing. Processing can be performed by changing the movement of the processing magnet 10 at each processing position (for example, between corners and non-corner parts), or the levitation amount (up and down movement) of the processing magnet 10 during movement can be controlled by the magnetic flux generating means 41, and processing can be performed by the rotational movement of the processing magnet 10 linked to the rotation of the turntable 52. In addition, processing can be performed with the processing device 2 turned upside down and the processing magnet 10 suspended below the drive unit 12 (on the Z-axis side).

[0070] FIG. 12 is a photograph of a SUS plate polished using the processing device of the present invention, FIG. 13(a) is a laser microscope photograph (measurement device: Keyence confocal laser microscope) of the polished part of the SUS plate before polishing, and FIG. 13(b) is a laser microscope photograph (measurement device: Keyence confocal laser microscope) of the polished part of the SUS plate after polishing. The SUS plate was polished as follows. First, a liquid nitrogen container was placed in a polystyrene foam heat-insulating container, and a spacer (electromagnet) was placed in the liquid nitrogen container. A driving magnet was placed on the spacer, and a superconducting bulk (YBCO) was fixed on the driving magnet. A donut-shaped neodymium magnet (diameter 48 mm) was used as the driving magnet. The superconducting bulk was a rectangular parallelepiped with a size of 15 mm square and a thickness of about 10 mm, and was used by arranging two in the X direction and two in the Y direction. Next, liquid nitrogen was poured into the liquid nitrogen container while the processing magnet was held in the air. The processed magnet was a circular neodymium magnet (diameter 48 mm) with sandpaper attached to its surface. After the processed magnet was trapped in the air, the spacer was adjusted and the sandpaper side of the processed magnet was pressed against the surface of a stainless steel plate, which was then rotated to polish the plate. [Industrial Applicability]

[0071] The processing device and processing method of the present invention can be used for production processing, processing of semiconductor components, etc. In particular, in the production processing field, it can be applied in a wide range of fields such as post-treatment of three-dimensional additive manufacturing and hollow processing after assembly. [Explanation of symbols]

[0072] 1, 2, 3, 4 Processing equipment 10, 101, 102, 103 Processed magnet 12, 120, 122 Drive unit 14, 140 Second drive unit 20, 21 container 22 Interior Space 23 Inner Layer 24 Outer layer 25 Top 26 Holding plate 27, 28 Bottom 30, 32 Superconductors 40, 41, 400, 410, 411, 412 Magnetic flux generating means 42, 421, 422, 423 Drive magnet 43 Electromagnet 44 Drive magnet control means 46 Guide 48 Actuator drive control unit 50 Rotation Means 54, 64, 74 motors 56, 66, 76 Sensors 58 Rotation control section 60 Vertical transportation means 62 Z Stage 68 Vertical movement control section 70 wheels 71 Support stand 72 Planar transportation means 73 XY Stage 78 Planar movement control section 80 Main control unit 82 Input section 84 Display section 86 Cooling control unit 90 Workpiece 91 Hollow 441, 442, 443, 444, 445, 446 Coils

Claims

1. A processing device that processes a workpiece by a rotating and / or vibrating processing magnet, a driving unit having a superconductor fixedly accommodated in a container and a magnetic flux generating means disposed on one side of the superconductor; a processing magnet that is held in the air on the other side of the superconductor and moves to a processing position for the workpiece, and processes the workpiece at the processing position; The magnetic flux generating means is a means for controlling the movement of the processed magnet, A processing device in which the magnetic flux generating means can move the processing magnet in a direction toward the superconductor and / or in a direction away from the superconductor, thereby changing the distance between the superconductor and the processing magnet.

2. A processing device that processes a workpiece by using a rotating and / or vibrating processing magnet, a driving unit having a superconductor fixedly accommodated in a container and a magnetic flux generating means disposed on one side of the superconductor; a second driving section disposed on the other side of the superconductor of the driving section and having a second superconductor housed and fixed in a container; a processed magnet; The magnetic flux generating means is a means for controlling the movement of the processed magnet, the driving unit and the second driving unit are arranged such that their superconductors face each other with a gap therebetween, The processing device moves the processing magnet to a processing position for the workpiece while being held in the space between the drive unit and the second drive unit, and processes the workpiece.

3. 3. The processing apparatus according to claim 2, wherein the second driving section has a second magnetic flux generating means on a side facing the processing magnet with the second superconductor interposed therebetween.

4. the magnetic flux generating means has a driving magnet disposed opposite to the processed magnet with the superconductor interposed therebetween, The processed magnet and the driving magnet are arranged so that the magnetic properties of the opposing surfaces are different from each other, 4. The processing device according to claim 1, wherein the processing magnet is moved in conjunction with the movement of the drive magnet.

5. 5. The processing apparatus according to claim 4, wherein the magnetic flux generating means includes a drive magnet control means for causing the drive magnet to vibrate and / or rotate.

6. 6. The processing apparatus according to claim 5, wherein the drive magnet control means comprises a coil and / or an electromagnet.

7. the magnetic flux generating means includes an electromagnet; The processing apparatus according to claim 1 , wherein the processing magnet is moved using a magnetic field gradient of the electromagnet.

8. The processing device according to claim 1 , wherein the processing magnet has two or more magnetic poles on the same surface.

9. 7. The processing apparatus according to claim 4, wherein the processing magnet is smaller in size than the drive magnet.

10. The processing device according to claim 1 , wherein the drive unit is disposed on a rotation table that is driven to rotate.

11. The processing apparatus according to claim 1 , wherein the processing of the workpiece is cutting, grinding or surface polishing.

12. The processing apparatus according to claim 1 , wherein the superconductor is a bulk superconductor containing yttrium barium copper oxide (YBCO).

13. A processing method for processing a workpiece using a processing device including a driving unit having a superconductor contained and fixed in a container and a magnetic flux generating means disposed on one side of the superconductor, and a processing magnet, the magnetic flux generating means being a means for controlling the movement of the processing magnet, introducing a coolant into the vessel to cool the superconductor and trapping the processed magnet in air on the other side of the superconductor; a step of moving the processing magnet to a processing position of the workpiece while the processing magnet is captured in the air on the other side of the superconductor; and machining the workpiece by the rotating and / or vibrating machining magnet, A processing method, wherein the step of processing the workpiece includes moving the processing magnet in a direction toward the superconductor and / or away from the superconductor by the magnetic flux generating means, thereby changing the distance between the superconductor and the processing magnet.

14. the magnetic flux generating means has a driving magnet disposed opposite to the processed magnet with the superconductor interposed therebetween, The processed magnet and the driving magnet are arranged so that the magnetic properties of the opposing surfaces are different, The method of claim 13 , wherein the processing magnet is moved in conjunction with the movement of the drive magnet to process the workpiece.

15. the magnetic flux generating means includes an electromagnet; The method of claim 13 , further comprising: moving the processing magnet to process the workpiece using a magnetic field gradient of the electromagnet.

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