System for testing the material properties of film-type gas sensors.

Abstract

This invention represents a system for testing the material properties of film-type gas sensors. It consists of two parts: the gas sensor testing system in the probe head station, which has a designed mechanism. A small probe assembly with a positioning adjuster that allows for fine adjustment of the probe position to a minimum level. 1 milliliter with freedom of positioning and movement in 3 axes in the base assembly. Floating heaters are made of nickel-chromium coils in such a way that the coils are stretched between two posts. It features a thermocouple temperature sensor housed in a ceramic tube to measure the temperature from the back of the plate. Sensor mounting base;

Claims

1. A system for testing the properties of film-type gas sensors, consisting of part 1: a probe assembly station (10) with a suspended heating unit (7) consisting of a nickel-chromium heating coil (28) suspended between two poles (29) (30) containing a thermocouple temperature sensor (27) in a ceramic tube (26) for measuring the temperature from the back of the base plate (8). The station is mounted on a probe base plate (6) on a stand (5). Part 2: the probe assembly (10) and the positioning unit. The small (11) probe consists of a pointed probe head, the positioning arm (11) of which can be adjusted along the longitudinal groove of the positioning arm (33) which is mounted on the base of the positioner (35) which has a surface tilted 10-20 degrees to the horizontal. Both parts are housed inside chamber (1), which has the gas inlet of pipe (2) connected to the gas distribution cone (3) and exits the system at the outlet pipe (4) with signal conversion through coupling device (14) to processing device (17) via control cable (18).2.

3. A system for testing the material properties of film gas sensors according to one of the claims 1 or 2 in which the micro-positioner (11) station has 6-10 pairs arranged symmetrically on the probe base (5)(6).

4. A system for testing the material properties of film gas sensors according to one of the claims 1-3 in which the micro-positioner (11) can move freely in 3 axes: tilt 10-20 degrees relative to the vertical with the probe head and slide in and out with the probe arm, slide axis perpendicular to the first axis, and rotation axis around the vertical axis.

5. A system for testing the material properties of film gas sensors according to one of the claims 1-3 in which the station of the probe assembly (10) and the micro-positioner (11) can adjust the position of the probes to a fineness of no more than 1 ml.