A single-row and double-row grating linear displacement sensor

Abstract

The invention discloses a single-column double-row time grating linear displacement sensor. The sensor comprises a fixed scale and a moving scale. The fixed scale comprises a fixed scale base and an excitation coil, and the excitation coil is wound in a rectangular wave shape along the measuring direction. The moving scale comprises a moving scale base and first and second induction coils, the first and second induction coils are wound in a half-sine winding manner, and the first and second induction coils face each other and are parallel to the excitation coil. A sine excitation current is fed into the excitation coil. The moving scale moves relative to the fixed scale. After the phase of an induction signal output by the second induction coil is shifted 90 degrees, the induction signal output by the second induction coil and an induction signal output by the first induction coil are superposed to form a traveling wave signal, the phase of the traveling wave signal is compared with that of a reference signal at the same frequency, the phase difference is represented with the number of interpolated high-frequency clock pulses, and the linear displacement is obtained after conversion of the phase difference. The sensor has a simple structure, can realize high-resolution linear displacement measurement, and is easy to produce in batches.

Description

technical field

[0001] The invention belongs to the technical field of precision measurement sensors, and in particular relates to a single-row and double-row time grating linear displacement sensor. Background technique

[0002] Linear displacement measurement is the most basic geometric quantity measurement, and it exists in a large number in industrial and scientific practices represented by manufacturing. Precision linear displacement measurement mainly uses linear displacement sensors, such as gratings, magnetic gratings, capacitive gratings, etc. These sensors obtain the displacement by counting the grid lines that are evenly divided in space, and their common feature is the use of high-density, ultra-precision space The grid lines are used to meet the resolution requirements of small displacements. In order to further improve the measurement resolution of the sensor, the original signal output by the sensor can only be subdivided by complex electronic subdivision tec...

Examples

Embodiment Construction

[0018] The present invention will be described in detail below in conjunction with the accompanying drawings.

[0019] like Figure 1 to Figure 5 The shown single-row double-row time grating linear displacement sensor includes a fixed scale 1 and a moving scale 2 parallel to the fixed scale 1 with a gap of 0.2 mm.

[0020] The fixed length 1 comprises a fixed length substrate 11, an excitation coil 12 arranged in the wiring layer facing the moving scale on one side of the fixed length substrate 11 and a fixed length insulating layer 13 arranged on the wiring layer, and the projection energy of the fixed length substrate 11 is The excitation coil 12 is completely covered, and the fixed-length substrate 11 is a non-magnetic substrate with a thickness equal to 2 mm, which is made of ceramic materials; the excitation coil 12 is wound in a rectangular wave along the measurement direction, and the amplitude of the rectangular wave is L, period is W, and the duty cycle is 0.5.

[0...

technical field

[0001] The invention belongs to the technical field of precision measurement sensors, and in particular relates to a single-row and double-row time grating linear displacement sensor. Background technique

[0002] Linear displacement measurement is the most basic geometric quantity measurement, and it exists in a large number in industrial and scientific practices represented by manufacturing. Precision linear displacement measurement mainly uses linear displacement sensors, such as gratings, magnetic gratings, capacitive gratings, etc. These sensors obtain the displacement by counting the grid lines that are evenly divided in space, and their common feature is the use of high-density, ultra-precision space The grid lines are used to meet the resolution requirements of small displacements. In order to further improve the measurement resolution of the sensor, the original signal output by the sensor can only be subdivided by complex electronic subdivision tec...

Examples

Embodiment Construction

[0018] The present invention will be described in detail below in conjunction with the accompanying drawings.

[0019] like Figure 1 to Figure 5 The shown single-row double-row time grating linear displacement sensor includes a fixed scale 1 and a moving scale 2 parallel to the fixed scale 1 with a gap of 0.2 mm.

[0020] The fixed length 1 comprises a fixed length substrate 11, an excitation coil 12 arranged in the wiring layer facing the moving scale on one side of the fixed length substrate 11 and a fixed length insulating layer 13 arranged on the wiring layer, and the projection energy of the fixed length substrate 11 is The excitation coil 12 is completely covered, and the fixed-length substrate 11 is a non-magnetic substrate with a thickness equal to 2 mm, which is made of ceramic materials; the excitation coil 12 is wound in a rectangular wave along the measurement direction, and the amplitude of the rectangular wave is L, period is W, and the duty cycle is 0.5.

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