The invention discloses a high-precision pressure
transmitter based on SOI (
Silicon On Insulator)
silicon piezoresistive sensing, which comprises a
silicon piezoresistive
pressure sensor and a micro sensing
signal detection and transmission
software and hardware
system, and is characterized in that the micro sensing
signal detection and transmission
software and hardware
system comprises a detection circuit, an external AD (Analog to Digital) conversion circuit, an
operational amplifier circuit and a filter circuit; the micro sensing
signal detection and transmission
software and hardware
system collects current signals generated when the SOI
silicon piezoresistive
pressure sensitive chip encounters pressure, and detection, amplification, filtering and AD conversion of response signals of the
pressure sensitive chip are completed by using a precise detection circuit, an efficient filtering
algorithm and detection software. The system has the following advantages: low
power consumption: by optimizing the
circuit design and selecting low-power-consumption components, the overall
power consumption of the system is reduced; high sensitivity: through a precise amplification circuit and high-precision A / D conversion, precise detection of microvolt-level signals is realized; anti-interference:
noise and external interference are effectively suppressed by comprehensively applying hardware filtering and software filtering technologies, and long-term stability: the
measurement precision is kept at + / -0.05% F.S. / year under long-term operation of the system.