A Dual-row Two-Dimensional Time Grating Linear Displacement Sensor

Abstract

The invention discloses a double-row type two-dimensional time grating linear displacement sensor. The double-row type two-dimensional time grating linear displacement sensor comprises a fixed ruler and a movable ruler. The fixed ruler comprises a fixed ruler base body, a first exciting coil, a second exciting coil, a third exciting coil and a fourth exciting coil, wherein the first exciting coil, the second exciting coil, the third exciting coil and the fourth exciting coil are wound through rectangular waves. The movable ruler comprises a movable ruler body, a first induction coil, a second induction coil, a third induction coil and a fourth induction coil, wherein the first induction coil, the second induction coil, the third induction coil and the fourth induction coil are wound in a half-sine winding mode. Exciting currents are introduced into the first induction coil, the second induction coil, the third induction coil and the fourth induction coil. When the movable ruler moves relative to the fixed ruler, the first induction coil and the second induction coil are connected in series and overlapped to output X-direction traveling wave signals, the third induction coil and the fourth induction coil are connected in series and overlapped to output Y-direction traveling wave signals, the X-direction traveling wave signals and the Y-direction traveling wave signals carry out phase comparison with same-frequency reference signals, the phase difference is shown by the number of interpolated high-frequency clock pulses, and linear displacement of the X direction and the Y direction is obtained after conversion. The sensor is simple in structure, high in measuring resolving power, easy to manufacture in batches and low in cost.

Description

technical field

[0001] The invention belongs to the technical field of precision measurement sensors, and in particular relates to a dual-row two-dimensional time grating linear displacement sensor. Background technique

[0002] Linear displacement measurement is the most basic geometric quantity measurement, and it exists in a large number in industrial and scientific practices represented by manufacturing. There are two types of existing sensors for plane two-dimensional displacement measurement. One is to install two linear displacement sensors vertically with a relative difference of 90° on the plane to obtain the plane two-dimensional linear displacement respectively. The other is to use a single two-dimensional displacement sensor. The two-dimensional linear displacement sensor acquires displacements in two dimensions respectively. Installing two linear displacement sensors vertically will bring Abbe error and installation positioning error to the measurement, and som...

Examples

Embodiment Construction

[0017] The present invention will be described in detail below in conjunction with the accompanying drawings.

[0018] Such as Figure 1 to Figure 5 The dual-row two-dimensional time grating linear displacement sensor shown includes a fixed scale 1 and a moving scale 2 parallel to the fixed scale 1 with a gap of 0.2 mm.

[0019] The scale 1 includes a scale matrix 11, a first excitation coil 12 and a second excitation coil 13 arranged in the first wiring layer on the side of the scale matrix 11 facing the moving scale and parallel to each other along the X direction, arranged on the first wiring layer The second wiring layer 16 above the second wiring layer 16, the third excitation coil 14, the fourth excitation coil 15 arranged in the second wiring layer 16 and parallel to each other along the Y direction, and the scale insulation provided on the second wiring layer 16 Layer 17; the first, second excitation coils and the third, fourth excitation coils are insulated from each...

technical field

[0001] The invention belongs to the technical field of precision measurement sensors, and in particular relates to a dual-row two-dimensional time grating linear displacement sensor. Background technique

[0002] Linear displacement measurement is the most basic geometric quantity measurement, and it exists in a large number in industrial and scientific practices represented by manufacturing. There are two types of existing sensors for plane two-dimensional displacement measurement. One is to install two linear displacement sensors vertically with a relative difference of 90° on the plane to obtain the plane two-dimensional linear displacement respectively. The other is to use a single two-dimensional displacement sensor. The two-dimensional linear displacement sensor acquires displacements in two dimensions respectively. Installing two linear displacement sensors vertically will bring Abbe error and installation positioning error to the measurement, and som...

Examples

Embodiment Construction

[0017] The present invention will be described in detail below in conjunction with the accompanying drawings.

[0018] Such as Figure 1 to Figure 5 The dual-row two-dimensional time grating linear displacement sensor shown includes a fixed scale 1 and a moving scale 2 parallel to the fixed scale 1 with a gap of 0.2 mm.

[0019] The scale 1 includes a scale matrix 11, a first excitation coil 12 and a second excitation coil 13 arranged in the first wiring layer on the side of the scale matrix 11 facing the moving scale and parallel to each other along the X direction, arranged on the first wiring layer The second wiring layer 16 above the second wiring layer 16, the third excitation coil 14, the fourth excitation coil 15 arranged in the second wiring layer 16 and parallel to each other along the Y direction, and the scale insulation provided on the second wiring layer 16 Layer 17; the first, second excitation coils and the third, fourth excitation coils are insulated from each...

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