Abrasive jet flow adaptive dressing method for consolidating abrasive polishing pad

Abstract

The invention discloses an abrasive jet flow adaptive dressing method for consolidating an abrasive polishing pad. The abrasive jet flow adaptive dressing method for consolidating the abrasive polishing pad is characterized that the abrasive jet flow adaptive dressing method for consolidating the abrasive polishing pad comprises the following steps that firstly, the characteristics of different surface states of the polishing pad, such as a sharp state and a passivation state, are obtained by image recognition; the characteristics of different surface states of the polishing pad are obtained by friction signals; secondly, an artificial neural network is established to obtain the mapping relationship between image and friction characteristics and machining efficiency and quality; and thirdly, on-line measurement of the image, friction signal and feature extraction are carried out in the actual processing, then, according to the processing requirement, self-adaptive judgment is carried out on whether the polishing pad needs to be dressed or not and what kind of dressing parameters are used. The abrasive jet flow adaptive dressing method for consolidating the abrasive polishing pad has high dressing efficiency, can be carried out in time, and can obviously improve the polishing quality.

Description

technical field

[0001] The invention relates to a mechanical processing method, especially a finishing polishing technology, in particular to an abrasive jet self-adaptive dressing method for a consolidated abrasive polishing pad. Background technique

[0002] The existing dressing technology has certain defects: (1) The dressing effect of the self-dressing technology is poor, and other tools are still needed for dressing in the later stage; (2) The wear of the polishing pad during the dressing of the diamond dresser is large, resulting in a decrease in its service life. Residual debris is difficult to clean, which can block the pores of the polishing pad; (3) The cleaning effect of water jet trimming is good, but part of the "glazed" layer is difficult to remove, and the trimming effect is limited. In addition, the trimming methods adopted by the existing trimming technology are offline trimming or online continuous trimming. Off-line trimming needs to add special processe...

Examples

Embodiment Construction

[0027] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

[0028] Such as Figure 1-3 shown.

[0029] A method for adaptive dressing of abrasive jets for fixed abrasive polishing pads, the process of which is as follows image 3 As shown, the specific steps are as follows:

[0030] First of all, abrasive jet technology and adaptive parameter setting technology are used as polishing pad dressing methods, such as figure 1 shown;

[0031] Secondly, the characteristics of the surface state of the polishing pad at different stages (including the initial stage, the middle stage, and the end stage) are obtained through image feature recognition; image features include color features, image texture features, shape features, and feature point sizes, etc. The characteristics of the surface state of the throwing pad at different processing stages, such as sharp state, passivation state, etc.;

[0032] Third, obtain t...

technical field

[0001] The invention relates to a mechanical processing method, especially a finishing polishing technology, in particular to an abrasive jet self-adaptive dressing method for a consolidated abrasive polishing pad. Background technique

[0002] The existing dressing technology has certain defects: (1) The dressing effect of the self-dressing technology is poor, and other tools are still needed for dressing in the later stage; (2) The wear of the polishing pad during the dressing of the diamond dresser is large, resulting in a decrease in its service life. Residual debris is difficult to clean, which can block the pores of the polishing pad; (3) The cleaning effect of water jet trimming is good, but part of the "glazed" layer is difficult to remove, and the trimming effect is limited. In addition, the trimming methods adopted by the existing trimming technology are offline trimming or online continuous trimming. Off-line trimming needs to add special processe...

Examples

Embodiment Construction

[0027] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

[0028] Such as Figure 1-3 shown.

[0029] A method for adaptive dressing of abrasive jets for fixed abrasive polishing pads, the process of which is as follows image 3 As shown, the specific steps are as follows:

[0030] First of all, abrasive jet technology and adaptive parameter setting technology are used as polishing pad dressing methods, such as figure 1 shown;

[0031] Secondly, the characteristics of the surface state of the polishing pad at different stages (including the initial stage, the middle stage, and the end stage) are obtained through image feature recognition; image features include color features, image texture features, shape features, and feature point sizes, etc. The characteristics of the surface state of the throwing pad at different processing stages, such as sharp state, passivation state, etc.;

[0032] Third, obtain t...

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