A radio frequency matching network and a radio frequency power supply system

Abstract

The application discloses a radio frequency matching network, when acquiring radio frequency alternating current output by an L / C network, fully considering the influence of ambient temperature on signal acquisition, a constant temperature sampling module will first adjust the ambient temperature where the constant temperature sampling module is located to a preset temperature range, then radio frequency alternating current output by the L / C network is collected, so that a first processor can adjust the impedance of the L / C network according to the radio frequency alternating current through a driving circuit, and network matching of the L / C network and a load is realized. It can be seen that the constant temperature sampling module realizes constant temperature acquisition, so that the stability of a static working point of the constant temperature sampling module is ensured, the sampling signal cannot be distorted, the sampling precision of the sampling signal and the subsequent impedance matching precision are improved, and the working efficiency of a radio frequency power supply system is improved. The application further discloses a radio frequency power supply system, which has the same advantages as the radio frequency matching network.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of radio frequency power supply, in particular to a radio frequency matching network and a radio frequency power supply system. BACKGROUND

[0002] The load of the radio frequency power supply in the radio frequency power supply system can be plasma. Considering that the impedance of the plasma changes over time, in order to realize impedance matching and improve the working efficiency of the radio frequency power supply system, the existing radio frequency power supply system includes a radio frequency matching network arranged between the radio frequency power supply and the load, so as to realize the matching of the sum of the impedances of the L / C matching network and the load and the impedance of the radio frequency power supply by adjusting the impedance of the L / C matching network in the radio frequency matching network. In the process of adjusting the impedance of the L / C matching network, the output power outputted to the load after impedance matching by the radio frequency matching network is usually sampled. The existing sampling circuit is affected by the ambient temperature, and when the ambient temperature changes, the static operating point of the sampling circuit also changes, thereby causing distortion of the sampling signal, reducing the impedance matching accuracy, and reducing the working efficiency of the radio frequency power supply system. SUMMARY

[0003] The purpose of the present application is to provide a radio frequency matching network and a radio frequency power supply system, which improves the sampling accuracy of the sampling signal and the subsequent impedance matching accuracy, and improves the working efficiency of the radio frequency power supply system.

[0004] To solve the above technical problems, the present application provides a radio frequency matching network, comprising:

[0005] An L / C network with an input end connected to a radio frequency power supply and an output end connected to a load;

[0006] A drive circuit connected to a control end of the L / C network;

[0007] A constant-temperature sampling module connected to the output end of the L / C network, for adjusting the ambient temperature of itself within a preset temperature range and collecting radio frequency alternating current at the output end of the L / C network;

[0008] A first processor connected to the constant-temperature sampling module and the drive circuit, for adjusting the impedance of the L / C network by the drive circuit according to the radio frequency alternating current, so as to realize network matching of the L / C network and the load.

[0009] Preferably, the constant-temperature sampling module comprises:

[0010] A voltage sampling module for collecting radio frequency alternating voltage at the output end of the L / C network;

[0011] a current sampling module configured to collect radio frequency alternating current at an output end of the L / C network;

[0012] a temperature sensor configured to collect ambient temperature in which the temperature sensor is located;

[0013] a heating module and a refrigeration module;

[0014] a second processor connected with the voltage sampling module, the current sampling module, the temperature sensor, the heating module and the refrigeration module, respectively, and configured to keep the ambient temperature within a preset temperature range by controlling the heating module and the refrigeration module and output the radio frequency alternating voltage and the radio frequency alternating current.

[0015] Preferably, the constant-temperature sampling module further comprises:

[0016] an ARC arc detection module configured to collect radio frequency alternating voltage sampling rate and radio frequency alternating current sampling rate at the output end of the L / C network;

[0017] The second processor is connected with the ARC arc detection module and is further configured to output the radio frequency alternating voltage sampling rate and the radio frequency alternating current sampling rate, so that the first processor performs impedance adjustment on the L / C network with the constraint condition that the voltage sampling rate is not higher than a voltage sampling rate threshold and the current sampling rate is not higher than a current sampling rate threshold.

[0018] Preferably, the heating module comprises:

[0019] a first switch with a control end connected with the second processor;

[0020] a heating device and a first power supply, and the heating device, the first power supply and the first switch constitute a series loop.

[0021] Preferably, the refrigeration module comprises:

[0022] a second switch with a control end connected with the second processor;

[0023] a refrigeration device and a second power supply, and the refrigeration device, the second power supply and the second switch constitute a series loop.

[0024] Preferably, the voltage sampling module comprises:

[0025] a voltage sensor configured to collect radio frequency alternating voltage;

[0026] The current sampling module comprises:

[0027] a current sensor configured to collect radio frequency alternating current;

[0028] The ARC arc detection module comprises:

[0029] The ARC sensor is used for collecting the radio frequency alternating voltage sampling rate and the radio frequency alternating current sampling rate.

[0030] The voltage sampling module, the current sampling module and the ARC sensor further comprise:

[0031] A low-pass filter connected with the respective sensor, used for filtering high-frequency components in the respective sampling signal;

[0032] An attenuator connected with the low-pass filter, used for attenuating the filtered sampling signal to the input signal processing range of the single-to-dual module;

[0033] A single-to-dual module connected with the attenuator, used for converting the attenuated sampling signal from a single-ended signal to a differential-mode signal;

[0034] An ADC connected with the single-to-dual module and the second processor respectively, used for converting the differential-mode signal from an analog quantity to a digital quantity.

[0035] Preferably, the driving circuit comprises:

[0036] A stepping motor;

[0037] An angular displacement sensor connected with the stepping motor;

[0038] A motor driving circuit connected with the stepping motor and the angular displacement sensor respectively, used for performing closed-loop control on the stepping motor according to the control signal of the first processor.

[0039] Preferably, the first processor is a DSP, and the second processor is an FPGA.

[0040] To solve the above technical problems, the application further provides a radio frequency power supply system, comprising a radio frequency power supply, and further comprising the radio frequency matching network.

[0041] The application provides a radio frequency matching network, when radio frequency alternating current output by an L / C network is acquired, the influence of ambient temperature on signal acquisition is fully considered, a constant-temperature sampling module adjusts the ambient temperature to a preset temperature range first, and then acquires the radio frequency alternating current at the output end of the L / C network, so that a first processor adjusts the impedance of the L / C network through a driving circuit according to the radio frequency alternating current, and network matching of the L / C network and a load is realized. It can be seen that the constant-temperature sampling module realizes constant-temperature acquisition, thereby ensuring the stability of the static working point, preventing the distortion of the sampling signal, improving the sampling precision of the sampling signal and the subsequent impedance matching precision, and improving the working efficiency of the radio frequency power supply system.

[0042] The application also provides a radio frequency power supply system, which has the same advantages as the radio frequency matching network. BRIEF DESCRIPTION OF DRAWINGS

[0043] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the prior art and the embodiments will be briefly introduced as follows. Obviously, the drawings described below are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor on the basis of these drawings.

[0044] Figure 1 A structural schematic diagram of a radio frequency matching network provided by the present application is shown in the figure.

[0045] Figure 2 A structural schematic diagram of a constant-temperature sampling circuit provided by the present application is shown in the figure. DETAILED DESCRIPTION

[0046] The core of the present application is to provide a radio frequency matching network and a radio frequency power supply system, which improves the sampling precision of the sampling signal and the subsequent impedance matching precision, and improves the working efficiency of the radio frequency power supply system.

[0047] In order to make the purpose, technical solutions and advantages of the embodiments of the present application more clear, the technical solutions in the embodiments of the present application will be described clearly and completely in combination with the drawings of the embodiments of the present application. Obviously, the described embodiments are only some embodiments of the present application, but not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor are within the protection scope of the present application.

[0048] Please refer to Figure 1 , Figure 1 A structural schematic diagram of a radio frequency matching network provided by the present application is shown in the figure. The radio frequency matching network comprises:

[0049] An L / C network 1 connected with a radio frequency power supply at an input end and connected with a load at an output end;

[0050] A driving circuit 2 connected with a control end of the L / C network 1;

[0051] A constant-temperature sampling module 3 connected with the output end of the L / C network 1, used for adjusting the environment temperature in which the constant-temperature sampling module 3 is located in a preset temperature range and collecting the radio frequency alternating current at the output end of the L / C network 1;

[0052] A first processor 4 connected with the constant-temperature sampling module 3 and the driving circuit 2 respectively, used for adjusting the impedance of the L / C network 1 through the driving circuit 2 according to the radio frequency alternating current, so as to realize the network matching of the L / C network 1 and the load.

[0053] Specifically, when the impedance of the load changes, the radio frequency alternating current of the input end of the load also changes, and in order to realize the following of the impedance of the load, the radio frequency alternating current of the output end of the L / C network 1 needs to be collected.

[0054] Unlike the sampling precision of the sampling module in the prior art which is easily affected by the environment, the constant-temperature sampling module 3 in the present application keeps the temperature of the environment in which it is located within a preset temperature range before collecting the radio frequency alternating current, thereby ensuring the collection precision of the radio frequency alternating current. Specifically, when the ambient temperature rises, the constant-temperature sampling module 3 will cool the ambient temperature to adjust the ambient temperature to within the preset temperature range, and when the ambient temperature decreases, the constant-temperature sampling module 3 will heat the ambient temperature to adjust the ambient temperature to within the preset temperature range.

[0055] The present application does not particularly limit the preset temperature range here, which can be determined by the temperature range of the sampling device in the constant-temperature sampling module 3, and the present application does not particularly limit it here.

[0056] When the radio frequency alternating current is obtained, the first processor 4 generates a corresponding control signal according to the radio frequency alternating current to control the impedance of the L / C network 1 through the driving circuit 2. Specifically, the impedance of the L / C network 1 can be changed by changing the inductance and / or capacitance value in the L / C network 1 through the driving circuit 2, thereby realizing that the sum of the impedance of the L / C network 1 and the impedance of the load (which can be 50Ω, for example) matches the impedance of the radio frequency power supply.

[0057] In summary, the radio frequency matching network provided by the present application, when obtaining the radio frequency alternating current output by the L / C network 1, fully considers the influence of the ambient temperature on signal collection, and the constant-temperature sampling module 3 first adjusts the ambient temperature in which it is located to within a preset temperature range, and then collects the radio frequency alternating current at the output end of the L / C network 1, so that the first processor 4 subsequently adjusts the impedance of the L / C network 1 through the driving circuit 2 according to the radio frequency alternating current, realizing network matching of the L / C network 1 and the load. It can be seen that since the constant-temperature sampling module 3 realizes constant-temperature collection, the stability of the static operating point is ensured, the sampling signal does not distort, the sampling precision of the sampling signal and the subsequent impedance matching precision are improved, and the working efficiency of the radio frequency power supply system is improved.

[0058] On the basis of the above embodiment:

[0059] As a preferred embodiment, the constant-temperature sampling module 3 comprises:

[0060] The voltage sampling module 31 is configured to collect the radio frequency alternating voltage at the output end of the L / C network 1.

[0061] a current sampling module 32 for collecting the radio frequency alternating current at the output end of the L / C network 1;

[0062] a temperature sensor 33 for collecting the ambient temperature in which the second processor 36 is located;

[0063] a heating module 34 and a refrigeration module 35;

[0064] The second processor 36 is connected with the voltage sampling module 31, the current sampling module, the temperature sensor 33, the heating module 34 and the refrigeration module 35 respectively, and is used for maintaining the ambient temperature in a preset temperature range and outputting the radio frequency alternating voltage and the radio frequency alternating current by controlling the heating module 34 and the refrigeration module 35.

[0065] Specifically, please refer to Figure 2 , Figure 2 The application provides a constant-temperature sampling circuit.

[0066] The constant-temperature sampling module 3 comprises a voltage sampling module 31, a current sampling module 32, a temperature sensor 33, a heating module 34, a refrigeration module 35 and a second processor 36. The voltage sampling module 31 is used for collecting the radio frequency alternating voltage. The current sampling module 32 is used for collecting the radio frequency alternating current. The temperature sensor 33 is used for collecting the ambient temperature in which the second processor 36 is located. After receiving the ambient temperature collected by the temperature sensor 33, the second processor 36 judges whether the ambient temperature is in a preset temperature range. If the ambient temperature is less than the lower limit threshold of the preset temperature range, it indicates that the ambient temperature is low at this time, and the second processor 36 controls the heating module 34 to heat so as to increase the temperature to the preset temperature range. If the ambient temperature is greater than the upper limit threshold of the preset temperature range, it indicates that the ambient temperature is high at this time, and the second processor 36 controls the refrigeration module 35 to refrigerate so as to decrease the temperature to the preset temperature range. In this way, the ambient temperature can be maintained in the preset temperature range, thereby reducing the influence of the ambient temperature on the voltage sampling module 31 and the current sampling module 32, improving the collection accuracy of the radio frequency alternating current, improving the output power accuracy of the radio frequency power supply, and reducing the adjustment time of the output power of the radio frequency power supply. When the ambient temperature is maintained in the preset temperature range, the second processor 36 outputs the radio frequency alternating voltage and the radio frequency alternating current to the first processor 4.

[0067] The temperature sensor 33 herein can be a thermocouple sensor or a thermal resistance sensor or other types of temperature sensors 33, which are not particularly limited in the application.

[0068] As a preferred embodiment, the constant-temperature sampling module 3 further comprises:

[0069] An ARC arc detection module 37 is configured to collect the radio frequency alternating voltage sampling rate and the radio frequency alternating current sampling rate of the output end of the L / C network 1.

[0070] The second processor 36 is connected with the ARC arc detection module 37 and is further configured to output the radio frequency alternating voltage sampling rate and the radio frequency alternating current sampling rate, so that the first processor 4 adjusts the impedance of the L / C network 1 under the constraint condition that the voltage sampling rate is not higher than the voltage sampling rate threshold and the current sampling rate is not higher than the current sampling rate threshold.

[0071] Specifically, when the impedance of the load changes sharply, an arc is generated between the load and the output end of the L / C network 1. In order to reduce the arc, in the embodiment, the constant-temperature sampling module 3 further comprises the ARC arc detection module 37 configured to collect the radio frequency alternating voltage sampling rate and the radio frequency alternating current sampling rate of the output end of the L / C network 1. The radio frequency alternating voltage sampling rate and the radio frequency alternating current sampling rate can represent the size of the arc. Specifically, the larger the arc, the larger the radio frequency alternating voltage sampling rate and the radio frequency alternating current sampling rate. The second processor 36 outputs the radio frequency alternating voltage sampling rate and the radio frequency alternating current sampling rate detected by the ARC arc detection module 37 to the first processor 4. The first processor 4 adjusts the impedance of the L / C network 1 under the constraint condition that the voltage sampling rate is not higher than the voltage sampling rate threshold and the current sampling rate is not higher than the current sampling rate threshold, thereby reducing or even eliminating the arc and improving the safety and reliability of the radio frequency matching network.

[0072] As a preferred embodiment, the heating module 34 comprises:

[0073] The control end of the first switch K1 is connected with the second processor 36.

[0074] The heating device 341 and the first power supply E1 form a series circuit together with the first switch K1.

[0075] When the second processor 36 determines that the ambient temperature is lower than the lower threshold of the preset temperature range, the second processor 36 controls the heating module 34 to heat. Specifically, the second processor 36 controls the first switch K1 to be closed, so that the heating device 341 is powered on to generate heat and thereby increase the ambient temperature of the constant-temperature sampling module 3. When the ambient temperature is determined to be within the preset temperature range, the first switch K1 is controlled to be opened to stop heating. The heating device 341 can be but is not limited to a resistance wire, and the first switch K1 can be but is not limited to a MOS tube. The heating module 34 provided in the embodiment is simple in structure and low in cost and can increase the ambient temperature.

[0076] As a preferred embodiment, the refrigeration module 35 comprises:

[0077] A second switch K2 connected with the second processor 36;

[0078] A refrigeration device 351 and a second power supply E2, the refrigeration device 351, the second power supply E2 and the second switch K2 form a series circuit.

[0079] When the second processor 36 determines that the ambient temperature is higher than the upper threshold of the preset temperature range, it means that the ambient temperature is high at this time, and the second processor 36 controls the refrigeration module 35 to refrigerate. Specifically, the second processor 36 controls the second switch K2 to be closed, and at this time the refrigeration device 351 is powered on to refrigerate, thereby reducing the ambient temperature of the constant-temperature sampling module 3. When it is determined that the ambient temperature is reduced to the preset temperature range, the second switch K2 is controlled to be opened and the refrigeration is stopped. The refrigeration device 351 herein can be but is not limited to a fan, and the second switch K2 can be but is not limited to a MOS tube. The refrigeration module 35 provided in the embodiment is simple in structure and low in cost on the basis of realizing the temperature reduction of the ambient temperature.

[0080] As a preferred embodiment, the voltage sampling module 31 comprises:

[0081] A voltage sensor for collecting the radio frequency alternating voltage;

[0082] The current sampling module 32 comprises:

[0083] A current sensor for collecting the radio frequency alternating current;

[0084] The ARC arc detection module 37 comprises:

[0085] An ARC sensor for collecting the radio frequency alternating voltage sampling rate and the radio frequency alternating current sampling rate;

[0086] The voltage sampling module 31, the current sampling module 32 and the ARC sensor each further comprise:

[0087] A low-pass filter connected with the respective corresponding sensor, for filtering out the high-frequency components in the respective sampling signal;

[0088] An attenuator connected with the low-pass filter, for attenuating the filtered sampling signal to the input signal processing range of the single-to-dual module;

[0089] A single-to-dual module connected with the attenuator, for converting the attenuated sampling signal from a single-ended signal to a differential-mode signal;

[0090] An ADC connected with the single-to-dual module and the second processor 36 respectively, for converting the differential-mode signal from an analog quantity to a digital quantity.

[0091] To further improve the signal accuracy acquired by the voltage sampling module 31, the current sampling module 32, and the ARC arc detection module 37, in this application, the voltage sampling module 31 includes a voltage sensor, a low-pass filter, an attenuator, a single-to-dual module, and an ADC; the current sampling module 32 includes a current sensor, a low-pass filter, an attenuator, a single-to-dual module, and an ADC; and the ARC arc detection module 37 includes an ARC sensor, a low-pass filter, an attenuator, a single-to-dual module, and an ADC.

[0092] Specifically, each sensor is used to acquire its corresponding signal. A low-pass filter is used to remove high-frequency signals (specifically, high-frequency components with frequencies exceeding half the sampling frequency) from the sampled signal (RF AC voltage or RF AC current or RF AC voltage sampling rate or RF AC current sampling rate). An attenuator is used to attenuate the filtered sampled signal to the input signal processing range of the single-to-dual converter. The single-to-dual converter converts the attenuated sampled signal from a single-ended signal to a differential signal, so that the ADC can convert the sampled signal from an analog quantity to a digital quantity. Therefore, this application performs low-pass filtering on the acquired sampled signal and uses a digital acquisition method, further improving the acquisition accuracy of the sampled signal.

[0093] In one preferred embodiment, the driving circuit 2 includes:

[0094] Stepper motor;

[0095] An angular displacement sensor connected to a stepper motor;

[0096] The motor drive circuit 2, which is connected to the stepper motor and the angular displacement sensor respectively, is used to perform closed-loop control of the stepper motor according to the control signal of the first processor 4.

[0097] Specifically, in practical applications, the stepper motor can adjust the impedance of the L / C network 1 by controlling the inter-plate distance of the capacitors in the L / C network 1. In order to improve the impedance control accuracy of the L / C network 1, in this application, the drive circuit 2 includes not only the stepper motor and the motor drive circuit 2, but also an angular displacement sensor to detect the angular displacement of the stepper motor. The motor drive circuit 2 can then realize closed-loop control of the stepper motor based on the angular displacement, thereby ensuring that the stepper motor does not lose steps under high-speed working conditions and improving the impedance control accuracy of the L / C network 1.

[0098] In one preferred embodiment, the first processor 4 is a DSP and the second processor 36 is an FPGA.

[0099] The first processor 4 herein can be, but is not limited to, a DSP (Digital Signal Processing) processor, which has stronger circuit processing capability and faster speed compared with a CPU, and can realize closed-loop fast adjustment of the radio frequency matching network. The second processor 36 herein can be, but is not limited to, an FPGA (Field Programmable Gate Array), which has the advantages of fast processing speed and programmability.

[0100] The application further provides a radio frequency power supply system, comprising a radio frequency power supply, and further comprising the radio frequency matching network as described above.

[0101] For the radio frequency power supply system provided by the application, refer to the above-mentioned embodiments, and the application will not be described here again.

[0102] It should be noted that, in the present specification, the relationship terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply that there is any such actual relationship or order between the entities or operations. Moreover, the terms "include", "contain" or any other variants thereof are intended to cover non-exclusive inclusion, so that the process, method, article or equipment including a series of elements not only includes those elements, but also includes other elements not explicitly listed or inherent to such process, method, article or equipment. Without more limitations, the element defined by the statement "including a" does not exclude the presence of other identical elements in the process, method, article or equipment including the element.

[0103] The above description of the disclosed embodiments enables a person skilled in the art to implement or use the application. Various modifications to the embodiments will be apparent to those skilled in the art, and the general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the application. Therefore, the application will not be limited to the embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A radio frequency matching network, characterized by, The application relates to a constant-temperature sampling module for a radio frequency (RF) power supply, which comprises the following parts: an L / C network connected with an input end of the radio frequency power supply and an output end of a load; a driving circuit connected with a control end of the L / C network; a constant-temperature sampling module connected with the output end of the L / C network, which is used for adjusting an ambient temperature of the constant-temperature sampling module to a preset temperature range and collecting RF alternating current at the output end of the L / C network; a first processor connected with the constant-temperature sampling module and the driving circuit respectively, which is used for adjusting the impedance of the L / C network through the driving circuit according to the RF alternating current, so as to realize network matching of the L / C network and the load; the constant-temperature sampling module comprises the following parts: a voltage sampling module used for collecting RF alternating voltage at the output end of the L / C network; a current sampling module used for collecting RF alternating current at the output end of the L / C network; a temperature sensor used for collecting the ambient temperature; a heating module and a refrigeration module; a second processor connected with the voltage sampling module, the current sampling module, the temperature sensor, the heating module and the refrigeration module respectively, which is used for keeping the ambient temperature in the preset temperature range through the heating module and the refrigeration module and outputting the RF alternating voltage and the RF alternating current; the constant-temperature sampling module further comprises an ARC arc detection module used for collecting the RF alternating voltage sampling rate and the RF alternating current sampling rate at the output end of the L / C network; the second processor is connected with the ARC arc detection module and is further used for outputting the RF alternating voltage sampling rate and the RF alternating current sampling rate, so that the first processor adjusts the impedance of the L / C network under the constraint condition that the voltage sampling rate is not higher than a voltage sampling rate threshold value and the current sampling rate is not higher than a current sampling rate threshold value; the ARC arc detection module comprises an ARC sensor used for collecting the RF alternating voltage sampling rate and the RF alternating current sampling rate; a low-pass filter connected with the ARC sensor, which is used for filtering high-frequency components in the sampling signal; an attenuator connected with the low-pass filter, which is used for attenuating the filtered sampling signal to the input signal processing range of a single-to-dual module; a single-to-dual module connected with the attenuator, which is used for converting the attenuated sampling signal from a single-ended signal into a differential-mode signal; an ADC connected with the single-to-dual module and the second processor respectively, which is used for converting the differential-mode signal from an analog quantity into a digital quantity. The heating module comprises a first switch connected with the second processor; a heating device and a first power supply, and the heating device, the first power supply and the first switch form a series circuit. The refrigeration module comprises a second switch connected with the second processor; a refrigeration device and a second power supply, and the refrigeration device, the second power supply and the second switch form a series circuit. ​ ​ ​ 2. The radio frequency matching network of claim 1, wherein, ​ 3. The radio frequency matching network of claim 1, wherein, ​ 4. The radio frequency matching network of claim 1, wherein, The voltage sampling module comprises a voltage sensor for collecting radio frequency alternating voltage; the current sampling module comprises a current sensor for collecting radio frequency alternating current; the voltage sampling module and the current sampling module each further comprise a low-pass filter connected with the respective sensor, for filtering out high-frequency components in the respective sampling signal; an attenuator connected with the low-pass filter, for attenuating the filtered sampling signal to within the input signal processing range of the single-to-dual module; a single-to-dual module connected with the attenuator, for converting the attenuated sampling signal from single-ended signal to differential mode signal; an ADC connected with the single-to-dual module and the second processor respectively, for converting the differential mode signal from analog quantity to digital quantity.

5. The radio frequency matching network of any one of claims 1 to 4, wherein, The driving circuit comprises a stepper motor; an angular displacement sensor connected with the stepper motor; a motor driving circuit connected with the stepper motor and the angular displacement sensor respectively, for performing closed-loop control on the stepper motor according to the control signal of the first processor.

6. The radio frequency matching network of claim 1, wherein, The first processor is a DSP, and the second processor is an FPGA.

7. A radio frequency power supply system comprising a radio frequency power supply, characterized in that Further comprising the radio frequency matching network according to any one of claims 1 to 6.

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