Industrial device with sensors

Abstract

An industrial device with a sensor is provided that can collect an appropriate amount of wear powder (conductor material) required for failure prediction in the sensor. The industrial device according to an embodiment of the present application includes: a lubricant accumulation part including a region where lubricant circulates; and a sensor having a pair of electrodes disposed in the region where the lubricant circulates and detecting a change in resistance between the pair of electrodes.

Description

Technical Field

[0001] The present invention relates to an industrial device equipped with a sensor, such as a device including a gear device like a speed reducer. Background Art

[0002] Industrial devices such as speed reducers are housed in a housing storing lubricating oil in order to suppress damage to mechanical components such as gears. When mechanical components wear during the operation of such a mechanical device, wear powder is mixed into the lubricating oil. Such wear powder is a conductive substance such as iron powder.

[0003] If the wear of mechanical components progresses and enters the wear failure period of the failure rate curve (bathtub curve), the amount of wear powder mixed into the lubricating oil increases. Therefore, it is possible to reliably perform preventive maintenance of mechanical components by using a sensor that detects the amount of wear powder in the lubricating oil.

[0004] As such a sensor, for example, a sensor for detecting the amount of metal powder in oil is disclosed in Patent Document 1. The sensor described in Patent Document 1 includes: a sensor head having a permanent magnet; a cup-shaped electrode provided on the top surface of the sensor head; and a plurality of rod-shaped conductors arranged on the outer peripheral surface of the sensor head. It is disclosed that if wear powder accumulates between the opposing end surfaces of the rod-shaped conductor and the cup-shaped electrode (detection region) where a magnetic field is applied by the permanent magnet and causes the conductors to short-circuit, the contamination condition of the oil can be detected by using the change in the output of the sensor.

[0005] Prior Art Documents

[0006] Patent Documents

[0007] Patent Document 1: Japanese Unexamined Patent Application Publication No. 2005-331324 Summary of the Invention

[0008] Problems to be Solved by the Invention

[0009] Industrial devices exist in various sizes from small to large. Since the sizes of mechanical components within the device also vary, the amount of wear powder (conductive substance) generated during operation also varies depending on the mechanical device. In particular, in small industrial devices, the amount of conductive substance generated is small, so it is sometimes difficult to accumulate the amount of conductive substance required for appropriate failure prediction in the sensor. Therefore, there is a need to collect the amount of conductive substance required for failure prediction of mechanical components, etc. in the sensor.

[0010] One object of the present invention is to provide an industrial device capable of accumulating the amount of wear powder (conductive substance) required for appropriate failure prediction in a sensor.

[0011] Solutions for Solving the Problems

[0012] An industrial device according to an embodiment of the present invention includes: a lubricant storage part that includes a region where lubricant circulates; and a sensor that has a pair of electrodes disposed in the region where the lubricant circulates and detects a change in resistance between the pair of electrodes.

[0013] An industrial device according to an embodiment of the present invention may also include a speed reducer.

[0014] An industrial device according to an embodiment of the present invention may also include a hollow cylindrical member and a central gear disposed near the sensor and rotating about the central axis of the cylindrical member.

[0015] In the industrial device according to an embodiment of the present invention, the sensor may also be disposed in a region facing the central gear.

[0016] An industrial device according to an embodiment of the present invention may also be configured such that a bracket is provided in the lubricant storage part and the sensor is fixed to the bracket.

[0017] An industrial device according to an embodiment of the present invention may also be one that includes a drive source, at least a part of which is housed in a housing, one end of the lubricant storage part is defined by an end face of the housing, a drive shaft of the drive source penetrates the end face of the housing, and the sensor is fixed to the end face of the housing.

[0018] In the industrial device according to an embodiment of the present invention, it may also be configured such that the drive source is a motor.

[0019] An industrial device according to an embodiment of the present invention may also include a rotatable bracket to which the sensor is fixed.

[0020] The bracket of the industrial device according to an embodiment of the present invention may also be connected to a first member.

[0021] In the industrial device according to an embodiment of the present invention, the first member may also be a robot arm.

[0022] An industrial device according to an embodiment of the present invention may also include a crank member fixed at a position facing the sensor. Further, in the industrial device according to an embodiment of the present invention, the sensor may also be fixed at a position facing the crank member in the axial direction of the crank member.

[0023] An industrial device according to an embodiment of the present invention includes: a lubricant storage part for storing lubricant; and a sensor that has a pair of electrodes disposed vertically below the lubricant storage part, accumulates a conductive substance between the pair of electrodes, and detects a change in resistance between the pair of electrodes.

[0024] An industrial device according to an embodiment of the present invention may also include other sensors having a pair of electrodes disposed vertically above the lubricant accumulation portion, which detect a change in resistance between the pair of electrodes by aggregating a conductive substance between the pair of electrodes.

[0025] Effects of the Invention

[0026] According to the present invention, there is provided an industrial device capable of collecting an appropriate amount of wear powder (conductive substance) required for failure prediction in a sensor. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 is a cross-sectional view of an industrial device according to a first embodiment of the present invention.

[0028] Figure 2 is provided with Figure 1 a top view and a cross-sectional view of a sensor of an industrial device.

[0029] Figure 3 is a diagram showing the structure of a sensor according to a second embodiment of the present invention.

[0030] Figure 4 is a diagram showing the structure of a sensor according to a third embodiment of the present invention.

[0031] Figure 5 is a diagram showing the structure of a sensor according to a fourth embodiment of the present invention.

[0032] Figure 6 is a diagram showing the structure of a sensor according to a fifth embodiment of the present invention.

[0033] Figure 7 is a diagram showing the structure of a sensor according to a sixth embodiment of the present invention.

[0034] Explanation of Reference Signs

[0035] 1. Industrial device; 2. Reducer; 3. Flange portion; 4. Drive source; 5. Sensor; 6. Central electrode; 7. Magnet; 8. Box-shaped electrode; 9. Thread member; 10. Resin material; 11. Spring member; 12. Housing; 13. Output shaft; 14. Input shaft; 15. Output shaft; 16. Support member; 17. Cylindrical member; 18. Central gear; 19. Bracket; 20. Housing; 21. Drive shaft; 22. End face; 23. Bracket; 24. First member; 25. Crank member; 41. Signal line; 42. Signal line; 43. Circuit board. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0036] Hereinafter, embodiments of the present invention will be described with reference to the drawings. Hereinafter, as an industrial device according to an embodiment of the present invention, various devices can be envisioned, but for ease of explanation, a speed reducer will be used as an example for description.

[0037] Figure 1 FIG. 4 is a cross-sectional view showing an example of an industrial device 1 according to the first embodiment of the present invention. As Figure 1 shown, the industrial device 1 is, for example, a movable part such as a robot arm, and includes a speed reducer 2, a flange 3 provided on the input side, a drive source (such as a servo motor, etc.) 4, and an output-side device A1.

[0038] The speed reducer 2 includes a housing 12 mounted on the flange 3, an input shaft 14 connected to the output shaft 13 of the drive source 4, and an output shaft 15 connected to the output-side device A1. The input shaft 14 and the output shaft 15 are supported so as to be rotatable about an axis AX with respect to the housing 12. The output of the drive source 4 is input to the speed reducer 2 via the input shaft 14, and after being reduced by the speed reducer 2, it is transmitted to the output-side device A1 via the output shaft 15. Thus, the output-side device A1 and the flange 3 can rotate relative to each other.

[0039] The flange 3 is a cylindrical member having a hollow portion, and houses at least a part of the speed reducer 2. In addition, the drive source 4 is mounted on the flange 3. The opening at one end of the flange 3 in the direction along the axis AX is blocked by the speed reducer 2, and the opening at the other end is blocked by the drive source 4. Thus, a sealed hollow portion (i.e., a lubricant accumulation portion) S is formed in the flange 3. A lubricant such as lubricating oil is housed in the lubricant accumulation portion S, and the flange 3 also functions as an oil bath.

[0040] For example, a gear mechanism is housed in the housing 12 of the speed reducer 2. The space inside the housing 12 is continuous with the lubricant accumulation portion S inside the flange 3. When the speed reducer 2 operates, with the rotation of the gear mechanism inside the housing 12, a circulation (also called convection) of the lubricant is generated between the space inside the housing 12 and the space inside the flange 3. Under the action of this lubricant circulation, conductor substances such as wear powder generated inside the speed reducer 2 circulate and are discharged to the lubricant accumulation portion S inside the flange 3. In addition, in the lubricant accumulation portion S, in addition to the hollow portion of the flange 3, the space inside the speed reducer 2 can also be included.

[0041] A sensor 5 for detecting conductor substances contained in the lubricant is installed in the lubricant accumulation portion S. The sensor 5 uses a magnet to gather the conductor substances contained in the lubricant between a pair of electrodes, and detects the conductor substances in the lubricant based on the change in the resistance between the pair of electrodes. The sensor 5 is, for example, provided in Figure 1 the lubricant circulation region A shown in FIG.

[0042] Next, refer toFigure 2 , an example of the sensor 5 is described. Additionally, various forms are conceivable for the shape, structure, and dimensions of the sensor 5, and it is not intended to be limited to the form shown in the drawings. Figure 2 This is a diagram showing the structure of the sensor 5 provided in an industrial device according to an embodiment of the present invention. In this diagram, a top view of the sensor 5 and a cross-sectional view taken along line A-A of the top view are shown.

[0043] As Figure 2 shown, the sensor 5 includes a center electrode (first electrode) 6, a magnet 7, a box-shaped electrode (second electrode) 8, a threaded member 9, and a resin material 10. As shown in the figure, the center electrode (first electrode) 6 and the magnet 7 are fixed to the box-shaped electrode (second electrode) 8 by the threaded member 9. Additionally, Figure 1 the signal line 41 shown is connected to the box-shaped electrode 8, and the signal line 42 is connected to the center electrode 6.

[0044] The box-shaped electrode 8 is, for example, a member made of a magnetic material having conductivity such as iron, ferrite, or silicon steel. The box-shaped electrode 8 is configured to be substantially cylindrical, and the opening at one end side in the axial direction ( Figure 2 the lower side in the cross-sectional view) is blocked by a bottom 8a, and is configured as a cylindrical box having an opening on the upper surface. Additionally, the shape of the box-shaped electrode 8 can also be an electrode such as a rectangular parallelepiped shape with only the upper surface open or a multi-sided tube shape with the lower surface blocked.

[0045] A resin material 10, which is a non-magnetic body (insulator), is disposed inside the box-shaped electrode 8. In this way, the center electrode (first electrode) 6 and the magnet 7 are formed such that at least a part thereof is buried in the central region of the resin material. The box-shaped electrode 8 is disposed so as to surround the magnet 7 and the resin material 10. The shapes of the magnet 7 and the center electrode 6 are not limited to a cylindrical shape, and can also be other shapes such as a rectangular parallelepiped shape or a multi-sided prism shape.

[0046] As Figure 2 shown in the cross-sectional view, the outer shape of the center electrode 6 is smaller than the inner circumference of the box-shaped electrode 8. Thus, a gap portion GA is formed over the entire circumference of the center electrode 6 (i.e., in a manner surrounding the center electrode) between the center electrode 6 and the box-shaped electrode 8. In other words, the center electrode 6 and the box-shaped electrode 8 are disposed so as to face each other with the gap portion GA above the resin material 10 interposed therebetween. The gap portion GA is formed above the resin material 10.

[0047] Output lines are connected to the center electrode 6 and the box-shaped electrode 8 respectively ( Figure 1The signal lines 41 and 42). Additionally, as shown in the figure, a magnet 7 can be installed, for example, below the central electrode 6, or not. Further, when the magnet 7 is installed, the magnet 7 can be composed of a magnet or an electromagnet. However, it can also be configured such that the magnet is coated with a non-magnetic material such as copper, and the signal line 41 or the signal line 42 is connected to the coating layer. Further, when the magnet 7 is an electromagnet, the central electrode 6 can also be configured to serve as the electrode of the electromagnet.

[0048] The output end of the output line is connected to a sensor drive circuit (not shown). The sensor drive circuit monitors the resistance value of the sensor 5 and predicts the failure of mechanical components based on the change in the resistance value caused by the accumulation of the conductive material between the electrodes. If a certain amount of conductive material accumulates in the gap GA, the resistance between the energized central electrode 6 and the box-shaped electrode 8 decreases, and the output level of the output line changes. The sensor drive circuit can predict the failure of mechanical components by detecting this decrease in resistance. Additionally, the decrease in resistance also includes the on-off signal based on non-energization and energization, and it can also be detected in both the non-energized and energized states (hereinafter referred to as "digital detection").

[0049] The sensor drive circuit is connected to a host control device such as a manipulator by wire or wirelessly. Figure 1 The circuit board 43 of can always send the output of the output line (the output of the sensor 5) to the host control device, or it can also send it to the host control device intermittently (at predetermined time intervals) to save power.

[0050] The host control device can be configured to, when detecting a change in the output level of the output line received from the circuit board 43, issue a warning urging maintenance of the reduction gear 2 using a predetermined notification component (display device, sound output device).

[0051] The magnet 7 is magnetized to form a magnetic flux path φA (not shown) in a predetermined direction. In particular, a strong magnetic flux flows in the gap GA around the central electrode 6. Under the action of the magnetic force of the magnet 7, the conductive material of the mechanical component (for example, the conductive material of the mechanical component mixed in the lubricating oil) is adsorbed in the gap GA.

[0052] Here, if the wear of mechanical components progresses and enters the wear failure period of the failure rate curve (bathtub curve), the amount of conductor material generated increases, but this amount varies greatly depending on the size of the industrial device. Generally, the larger the device, the more conductor material is generated because it has larger or more mechanical components. On the other hand, in a small device or the like, the amount of conductor material generated is small, so it is sometimes difficult to accumulate at the sensor 5 the amount of conductor material required for appropriate failure prediction. Therefore, it is desirable to be able to collect at the sensor 5 the amount of conductor material required for failure prediction of mechanical components and the like.

[0053] As described above, in the industrial device 1, the sensor 5 is provided in the region A where the lubricant circulates. Thus, the conductor material contained in the lubricant easily passes near the sensor 5, so the conductor material is easily attracted to the sensor 5. Therefore, it is possible to accumulate at the sensor 5 the amount of wear powder (conductor material) required for appropriate failure prediction.

[0054] Next, with reference to Figure 3 , the industrial device 101 of the second embodiment of the present invention will be described. The industrial device 101 includes a flange 3, and at least a part of the speed reducer 2 is housed in the flange 3. The flange 3 is a housing member for housing the speed reducer 2, and a drive source 4 (e.g., a motor) is mounted on the flange 3. The flange 3 is a substantially cylindrical member having a hollow portion (lubricant accumulation portion S). A lubricant (e.g., lubricating oil) is housed in the lubricant accumulation portion S.

[0055] Similar to Figure 1 the industrial device 1 shown, the industrial device 101 is configured to include: a lubricant accumulation portion S for accumulating lubricant; and a sensor 5 having a pair of electrodes (i.e., a first electrode 6 and a second electrode 8), a voltage is applied between the pair of electrodes, and the conductor material is accumulated between the electrodes, and the change in the resistance between the pair of electrodes is detected.

[0056] The industrial device 101 includes a hollow cylindrical member 17 and a central gear 18 that rotates around the central axis of the cylindrical member 17. The sensor 5 is disposed near the central gear 18.

[0057] In this way, the sensor 5 is disposed near the central gear 18, so that the lubricant circulates as the central gear 18 rotates, and thus the amount of conductor material that can be collected can be increased. Therefore, it is possible to accumulate at the sensor 5 the amount of wear powder (conductor material) required for appropriate failure prediction.

[0058] In addition, in the industrial device 101, the sensor 5 is provided in a region opposite to the central gear 18. Thereby, the lubricating material can be circulated in the direction of the sensor as the central gear 18 rotates, so that the amount of the conductive substance can be collected more. Thus, the wear powder (conductive substance) in an amount required for appropriate failure prediction can be made to gather at the sensor 5.

[0059] In addition, the industrial device 101 is provided with a bracket 19 in the lubricating material accumulation part S, and the sensor 5 is configured to be fixed to the bracket 19. Thereby, the sensor can be arranged at a position opposite to the central gear 18, so that the amount of the conductive substance can be collected more. Thus, the wear powder (conductive substance) in an amount required for appropriate failure prediction can be made to gather at the sensor 5. Here, the bracket 19 can be installed at an appropriate position inside the industrial device 1 by using threaded members or the like, but the installation method can be appropriately selected.

[0060] Next, refer to Figure 4 , and describe the industrial device 201 of the third embodiment of the present invention. The industrial device 201 includes a flange 3, and at least a part of the speed reducer 2 is accommodated in the flange 3. The flange 3 is a housing member for housing the speed reducer 2, and a drive source 4 (such as a motor) is installed on the flange 3. The flange 3 is a substantially cylindrical member having a hollow part (lubricating material accumulation part S). A lubricating material (such as lubricating oil) is accommodated in the lubricating material accumulation part S.

[0061] The industrial device 201 includes: a lubricating material accumulation part S for accumulating a lubricating material; and a sensor 5 having a pair of electrodes (that is, a first electrode 6 and a second electrode 8), applying a voltage between the pair of electrodes to cause a conductive substance to gather between the pair of electrodes, and detecting a change in the resistance between the pair of electrodes.

[0062] The industrial device 201 includes a drive source 4 partially accommodated in the housing 20. The drive source 4 is a motor, for example. One end of the lubricating material accumulation part S is defined by the end face 22 of the housing 20. The drive shaft 21 of the drive source 4 penetrates the end face 22 of the housing 20, and the sensor 5 is fixed to the end face 22 of the housing 20. Thereby, the lubricating material is circulated in the direction of the sensor 5 as the drive shaft 21 of the drive source 4 rotates, and the amount of the conductive substance can be collected more. Thus, the wear powder (conductive substance) in an amount required for appropriate failure prediction can be made to gather at the sensor 5. In addition, compared with the case where the sensor 5 is provided on the flange 3, the forming of the flange 3 is simpler, and it is easier to gather the connection lines of the drive source 4 and the sensor 5.

[0063] Next, refer to Figure 5, an industrial device 301 according to a fourth embodiment of the present invention is described. The industrial device 301 includes a flange 3, in which at least a part of a speed reducer 2 is received. The flange 3 is a receiving member for receiving the speed reducer 2 having a bracket 23, and a drive source 4 (such as a motor) is mounted on the flange 3. The flange 3 is a substantially cylindrical member having a hollow portion. A lubricating material (such as lubricating oil) is filled in the space S.

[0064] The industrial device 301 includes: a lubricating material accumulation portion S for accumulating a lubricating material; and a sensor 5 having a pair of electrodes (i.e., a first electrode 6 and a second electrode 8), applying a voltage between the pair of electrodes to cause a conductive substance to accumulate between the pair of electrodes, and detecting a change in resistance between the pair of electrodes.

[0065] An industrial device 1 according to an embodiment of the present invention is configured to include a rotatable bracket 23, and the sensor 5 is fixed to the bracket 23. Thus, the sensor 5 rotates together with the bracket 23, and thus more lubricating material comes into contact with the sensor 5 as the sensor 5 moves. Therefore, an amount of wear powder (conductive substance) required for appropriate failure prediction can be accumulated on the sensor 5.

[0066] Next, with reference to Figure 6 , an industrial device 401 according to a fifth embodiment of the present invention is described. The industrial device 401 includes a flange 3, in which at least a part of a speed reducer 2 having a bracket 23 is received. On the output side of the speed reducer 2, the bracket 23 is connected to a first member (such as a robot arm) 24. The flange 3 is a receiving member for receiving the speed reducer 2, and a drive source 4 (such as a motor) is mounted on the flange 3. The flange 3 is a substantially cylindrical member having a hollow portion (lubricating material accumulation portion S). A lubricating material (such as lubricating oil) is received in the lubricating material accumulation portion S.

[0067] The industrial device 401 includes: a lubricating material accumulation portion S for accumulating a lubricating material; and a sensor 5 having a pair of electrodes (a first electrode 6 and a second electrode 8), applying a voltage between the pair of electrodes to cause a conductive substance to accumulate between the pair of electrodes, and detecting a change in resistance between the pair of electrodes.

[0068] The industrial device 401 includes a bracket 23 connected to the first member 24. The first member 24 is, for example, a robot arm. The speed reducer 2 and the members mounted on the speed reducer 2 can rotate relative to the flange 3, and the sensor 5 is fixed to the first member 24. Thus, the sensor 5 rotates together with the first member 24, and thus more lubricating material comes into contact with the sensor 5 as the sensor 5 moves. Therefore, an amount of wear powder (conductive substance) required for appropriate failure prediction can be accumulated on the sensor 5.

[0069] The industrial device 401 includes a crank member (crank mechanism) 25, and a sensor 5 is fixed at a position opposite to the crank member 25. The sensor 5 is fixed at a position opposite to the crank member 25 in the axial direction of the crank member 25. Thus, near the crank member 25, due to the movement of the sensor 5, the sensor 5 comes into contact with more lubricating material, and thus can collect a larger amount of conductive substance. Therefore, the amount of wear powder (conductive substance) required for appropriate fault prediction can be aggregated onto the sensor 5.

[0070] Next, with reference to Figure 7 , the industrial device 501 according to the sixth embodiment of the present invention will be described. The industrial device 501 includes a flange 3, and at least a part of a speed reducer 2 is housed in the flange 3. The flange 3 is a housing member for housing the speed reducer 2, and a drive source 4 (such as a motor) is mounted on the flange 3. The flange 3 is a substantially cylindrical member having a hollow portion (lubricating material accumulation portion S). A lubricating material (such as lubricating oil) is housed in the lubricating material accumulation portion S.

[0071] The industrial device 501 is configured to include: a lubricating material accumulation portion S for accumulating a lubricating material; and a sensor 5 having a pair of electrodes (i.e., a first electrode 6 and a second electrode 8), applying a voltage between the pair of electrodes to aggregate a conductive substance between the pair of electrodes, and detecting a change in the resistance between the pair of electrodes.

[0072] In the industrial device 501, the sensor 5 is disposed vertically below the lubricating material accumulation portion S. The industrial device 501 is provided, for example, in a state where the drive shaft of the drive source 4 is orthogonal to the vertical direction. In the sensor 5 disposed on the lower side of the oil bath, since the agitation of the lubricating material is less, it is easy to aggregate the precipitated conductive substance, and it can be used for fault prediction of the industrial device 501. Therefore, it is easy to attract the precipitated conductive substance, and thus the amount of wear powder (conductive substance) required for appropriate fault prediction can be aggregated onto the sensor 5.

[0073] The industrial device 501 includes other sensors 5. The other sensors 5 have a pair of electrodes, and a conductive substance is aggregated between the pair of electrodes to detect a change in the resistance between the pair of electrodes. The sensors 5 are arranged vertically above the lubricant accumulation part S. In the sensors 5 arranged on the upper side of the oil bath, when the agitation of the lubricant is less, the conductive substance generated along with the failure of the speed reducer will precipitate. In this case, it is difficult for the conductive substance to adhere to the sensors 5 arranged on the upper side of the oil bath, and it is configured to react after a certain period of time after the speed reducer fails (more conductive substance is released after the failure). Therefore, the sensors 5 on the lower vertical side, which are easy to collect the precipitated conductive substance, are used for fault prediction, and the sensors 5 on the upper vertical side are used to detect the release of a large amount of conductive substance due to the failure for fault detection, so that a sensor form with a lower possibility of false alarms can be provided. In addition, by further increasing the number of sensors 5, a sensor group that can perform detection more reliably and accurately can also be set.

[0074] The above is the description of the exemplary embodiments of the present invention. The embodiments of the present invention are not limited to the content described above, and various modifications can be made within the scope of the technical idea of the present invention. For example, the content obtained by appropriately combining the embodiments illustratively disclosed in the specification or the obvious embodiments is also included in the embodiments of the present application.

Claims

1. An industrial device equipped with a sensor, characterized in that: The industrial device includes: A lubricant accumulation part, which includes a region where lubricant circulates; A hollow cylindrical member; and A central gear, which is arranged near the sensor, is sleeved on the cylindrical member and rotates around the central axis of the cylindrical member, The sensor has a magnet and a pair of electrodes arranged in the region where the lubricant circulates, and detects a change in the resistance between the pair of electrodes, The sensor is radially opposed to the central gear, A bracket is provided in the lubricant accumulation part, The sensor is fixed to the bracket.

2. The industrial device equipped with a sensor according to claim 1, wherein: The industrial device includes a speed reducer.

3. The industrial device equipped with a sensor according to claim 1, wherein: The industrial device is equipped with a drive source, at least a part of which is housed in a housing, One end of the lubricant accumulation part is delimited by the end face of the housing, The drive shaft of the drive source penetrates the end face of the housing, The sensor is fixed to the end face of the housing.

4. The industrial device equipped with a sensor according to claim 3, wherein: The drive source is a motor.

5. The industrial device equipped with a sensor according to claim 1, wherein: The industrial device is equipped with a rotatable bracket to which the sensor is fixed.

6. The industrial device equipped with a sensor according to claim 5, wherein: The bracket is connected to a first member.

7. The industrial device equipped with a sensor according to claim 6, wherein: The first member is a robot arm.

8. The industrial device equipped with a sensor according to claim 6 or 7, wherein: The industrial device includes a crank member fixed at a position opposite to the sensor.

9. The industrial device equipped with a sensor according to claim 8, wherein: The sensor is fixed at a position opposite to the crank member in the axial direction of the crank member.

Images