Micro electrolytic machining electrode and machining method thereof, and micro electrolytic machining device

Abstract

The present invention belongs to the field of micro-electrolytic machining technology, and in particular, relates to a micro-electrolytic machining electrode and a machining method thereof, and a micro-electrolytic machining device. The micro-electrolytic machining electrode includes a plurality of electrode sheets, which are stacked in sequence to form an electrode sheet assembly. A plurality of electrode sheets in the electrode sheet assembly are provided with a two-dimensional microstructure for machining a workpiece at one end, and each two-dimensional microstructure is arranged one by one and surrounded to form a three-dimensional chamber that matches the shape of a three-dimensional microstructure on the workpiece; a flow groove is provided on the surface of one or more electrode sheets in the electrode sheet assembly, and the first end of the flow groove extends out of the corresponding electrode sheet, and the second end of the flow groove is connected to the three-dimensional chamber. The micro-electrolytic machining electrode promotes the timely renewal of the electrolyte in the machining area and the rapid discharge of the electrolytic product, ensures a good machining environment, avoids the appearance of a "dead water zone" when machining a complex microstructure surface, and can meet the machining and use requirements of a large-depth three-dimensional microstructure.

Description

Technical Field

[0001] The present invention belongs to the technical field of micro electrolytic machining, and in particular relates to a micro electrolytic machining electrode and a machining method thereof, and a micro electrolytic machining device. Background Art

[0002] Micro electrochemical machining is a machining method based on electrochemical reaction to dissolve the anode workpiece to machine three-dimensional microstructures. It has no loss of tool electrode, can avoid defects such as molten layer, heat-affected zone and residual stress after machining, EDM and laser machining, and can process conductive materials of any strength and hardness. Figure 1 As shown, for the three-dimensional microstructure 31 on the micro-electrolytic machining workpiece 30, the micro-column electrode 40 is currently mainly used for layer-by-layer scanning electrolytic machining. Due to the small cross-sectional size of the micro-column electrode 40, its anti-interference ability is poor, and the machining efficiency is low. In particular, when the machining depth is large, it is difficult to update the electrolyte in the machining area and the electrolytic product is not easy to discharge, making it difficult to achieve the machining of the deep three-dimensional microstructure 31. Therefore, how to prepare a reasonable tool electrode to achieve efficient and stable micro-electrolytic machining of the deep three-dimensional microstructure 31 is still an urgent problem to be solved. Summary of the invention

[0003] The purpose of the present invention is to provide a micro-electrolytic machining electrode and a machining method and a micro-electrolytic machining device, aiming to solve the technical problem that the micro-electrolytic machining electrode in the prior art cannot achieve efficient and stable machining of deep three-dimensional microstructures.

[0004] To achieve the above-mentioned purpose, the technical solution adopted by the present invention is: a micro-electrolytic machining electrode, including a plurality of electrode sheets, which are stacked in sequence to form an electrode sheet assembly, wherein the electrode sheets in the electrode sheet assembly have a plurality of electrode sheets each having a two-dimensional microstructure on one end for processing a workpiece, and each of the two-dimensional microstructures is arranged one by one and surrounds a three-dimensional cavity that matches the shape of the three-dimensional microstructure on the workpiece; a flow groove is provided on the surface of one or more of the electrode sheets in the electrode sheet assembly, wherein the first end of the flow groove extends out of the corresponding electrode sheet, and the second end of the flow groove is connected to the three-dimensional cavity.

[0005] Optionally, the flow channel is linear and extends away from the three-dimensional chamber.

[0006] Optionally, when the circulation grooves are provided on a plurality of the electrode sheets, the circulation grooves are arranged opposite to each other and are jointly arranged to form a flow channel for the circulation of electrolyte.

[0007] Optionally, the two opposite side walls of the micro-electrolytic machining electrode parallel to the stacking direction of each electrode sheet are provided with connection layers, and the two opposite side walls of each electrode sheet are respectively connected to two of the connection layers.

[0008] Optionally, a low-melting-point metal film layer is plated on two opposite surfaces of each electrode sheet, and the connecting layer is made by utilizing the instantaneous high temperature generated by dry spark discharge to melt the low-melting-point metal film layer at the corresponding edge of each electrode sheet and then allowing it to remain on the side wall surface of the micro-electrolytic machining electrode.

[0009] Optionally, the electrode sheet is a copper foil sheet plated with a low melting point metal or a stainless steel foil sheet plated with a low melting point metal.

[0010] Optionally, the low melting point metal film layer is a tin film layer or a tin-bismuth alloy film layer.

[0011] The above one or more technical solutions in the micro-electrolytic machining electrode provided by the present invention have at least one of the following technical effects: when working, first, the end of the electrode sheet assembly facing away from the three-dimensional chamber is clamped on the fixture in the micro-electrolytic machining device, and the end of the electrode sheet assembly with the three-dimensional chamber is exposed outside the fixture and faces the machining area on the workpiece. Then, the electrode sheet assembly is connected to the negative pole of the pulse power supply, and the workpiece is connected to the positive pole of the pulse power supply. At the same time, the electrolyte is supplied to the machining cavity through the flow groove on the laminated electrode sheet, so that the electrolyte is directly and quickly supplied to the machining area of ​​the workpiece. Finally, the electrode sheet assembly is continuously fed to the workpiece at a suitable speed, thereby realizing micro-electrolytic machining of the three-dimensional microstructure on the workpiece. During this process, fresh electrolyte continuously enters the processing area on the workpiece from the flow groove on the electrode sheet, causing the electrolyte in the processing area to continuously overflow. At the same time, the overflowing electrolyte carries away the electrolysis products, thereby promoting the timely renewal of the electrolyte in the workpiece processing area and the rapid discharge of the electrolysis products, ensuring a good processing environment, avoiding the appearance of "dead water areas" when processing complex microstructures, and thus improving the stability, efficiency and quality of the processing process, thereby meeting the processing and use requirements of large-depth three-dimensional microstructures.

[0012] In another technical solution of the present invention: a micro-electrolytic machining device includes the above-mentioned micro-electrolytic machining electrode.

[0013] Specifically, the micro-electrolytic machining device of the embodiment of the present invention adopts the above-mentioned micro-electrolytic machining electrode. Therefore, during the process of processing a workpiece by the micro-electrolytic machining device, fresh electrolyte continuously enters the processing area on the workpiece from the flow groove on the electrode sheet, which promotes the timely renewal of the electrolyte in the workpiece processing area and the rapid discharge of the electrolysis products, ensures a good processing environment, avoids the occurrence of "dead water areas" when processing the surface of complex microstructures, and thus improves the stability, processing efficiency and quality of the processing process, thereby meeting the processing and use requirements of large-depth three-dimensional microstructures.

[0014] In another technical solution of the present invention: a processing method for processing the above-mentioned micro-electrolytic machining electrode, the processing method comprises:

[0015] S1: providing a numerical control machine tool, and importing preset geometric model data of the electrode with the flow slot into the numerical control machine tool;

[0016] S2: providing a preset number of electrode sheets to be processed, stacking the electrode sheets to be processed to form an electrode sheet assembly to be processed, clamping one end of the electrode sheet assembly to be processed on the fixture of the CNC machine tool and horizontally arranging the electrode sheets to be processed, respectively providing a first gear lever and a second gear lever above and below the CNC machine tool and the other end of the electrode sheet assembly to be processed, the other end of the electrode sheet assembly to be processed is moved upward and abutted against the first gear lever, and the processing position of the CNC machine tool is located between the first gear lever and the second gear lever;

[0017] S3: Pushing the electrode sheet to be processed that is in direct contact with the first stop bar downward, so that the electrode sheet to be processed passes over the first stop bar and is laid flat in the processing position;

[0018] S4: According to the preset electrode geometric model data, the processing mechanism of the CNC machine tool cuts the electrode sheet to be processed in the processing position to produce the corresponding electrode sheet, the corresponding two-dimensional microstructure on the electrode sheet, and the corresponding flow groove on the electrode sheet;

[0019] S5: Pushing the processed electrode sheet downward by external force, so that the processed electrode sheet passes over the processing position and the second gear lever and abuts against the bottom of the second gear lever;

[0020] S6: Repeat step S3 to step S5 until a preset number of the electrode sheets to be processed are completely processed to obtain the micro-electrolytic machining electrode.

[0021] Optionally, after step 6, the method further includes:

[0022] S7: A low-melting-point metal film layer is plated on the two opposite surfaces of each electrode sheet. Dry electric spark wire cutting is used to perform micro-trim on the two opposite side walls of the micro-electrolytic machining electrode parallel to the stacking direction of each electrode sheet. At the same time, the instantaneous high temperature generated by spark discharge is used to melt each low-melting-point metal film layer and allow it to remain on the side wall of the micro-electrolytic machining electrode to form the connecting layer, thereby connecting each electrode sheet into a whole.

[0023] Specifically, the processing and manufacturing method of the embodiment of the present invention first imports the preset electrode geometry model data with the flow slot into the data machine tool, and then clamps one end of a preset number of stacked electrode sheets to be processed on a fixture on the CNC machine tool, and then bends the other end of each electrode sheet to be processed upward, so that each electrode sheet to be processed passes the first gear bar and the electrode sheet located at the bottom abuts against the first gear bar, and then directly abuts a sheet to be processed and bends it downward, so that the electrode sheet to be processed is located in the processing position after passing the first gear bar, and then starts the processing mechanism of the CNC machine tool, and the processing mechanism According to the electrode geometric model data, the electrode sheet to be processed is cut to produce the corresponding two-dimensional microstructure, and finally one electrode sheet is subjected to the above steps, until all the electrode sheets to be processed are processed, wherein, when the processing mechanism processes the electrode sheet to be processed where a flow groove needs to be set, the processing mechanism needs to process the corresponding flow groove at the same time on the basis of processing the corresponding two-dimensional microstructure of the electrode sheet, and finally the micro-electrolytic processing electrode is obtained; the processing and manufacturing method utilizes the first block and the second block to process each electrode sheet in turn, and the processing method is simpler and the processing efficiency is higher. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0025] Figure 1 A schematic diagram of layer-by-layer scanning electrochemical machining of a three-dimensional microstructure on a workpiece as described in the background art using micro-columnar electrodes.

[0026] Figure 2 A schematic diagram of the structure of a micro-electrolytic machining electrode provided in an embodiment of the present invention.

[0027] Figure 3 for Figure 1 Exploded view of the micro electrochemical machining electrode shown.

[0028] Figure 4A schematic structural diagram of a micro-electrolytic machining electrode provided in another embodiment of the present invention.

[0029] Figure 5 for Figure 4 Schematic diagram of electrolyte flow when micro-electrochemical machining electrode is used to process workpiece.

[0030] Figure 6 A schematic structural diagram of a CNC machine tool used in a method for manufacturing a micro-electrolytic machining electrode provided in another embodiment of the present invention.

[0031] Among them, the reference numerals in the figure are:

[0032] 10—electrode sheet assembly 11—electrode sheet 12—three-dimensional chamber

[0033] 13—Connection layer 20—CNC machine tool 21—Fixture

[0034] 22 - first gear lever 23 - second gear lever 24 - processing mechanism

[0035] 25—Processing position 30—Workpiece 40—Micro-columnar electrode

[0036] 111 —Two-dimensional microstructure 112 —Flow channel. DETAILED DESCRIPTION

[0037] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. Figures 2 to 6 The described embodiments are exemplary and intended to be used to explain the present invention, but should not be construed as limiting the present invention.

[0038] In the description of the present invention, it should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0039] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0040] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0041] like Figures 2 to 6 As shown, in one embodiment of the present invention, a micro-electrochemical machining electrode is provided, which is suitable for scanning the three-dimensional microstructure on the electrochemically machined workpiece 30 layer by layer.

[0042] See also Figure 2 and Figure 3 As shown, the micro-electrolytic machining electrode includes a plurality of electrode sheets 11, which are stacked in sequence to form an electrode sheet assembly 10, wherein a plurality of electrode sheets 11 in the electrode sheet assembly 10 are provided with a two-dimensional microstructure 111 at one end, and each two-dimensional microstructure 111 is arranged one by one and surrounds a three-dimensional chamber 12 that matches the shape of the three-dimensional microstructure on the workpiece 30; a flow slot 112 is provided on the surface of one or more electrode sheets 11 in the electrode sheet assembly 10, wherein the first end of the flow slot 112 extends out of the corresponding electrode sheet 11, and the second end of the flow slot 112 is connected to the three-dimensional chamber 12. Figure 2 and Figure 3 As shown, the two-dimensional microstructure 111 may be in a notch shape, and a plurality of stacked corresponding two-dimensional microstructures 111 in a notch shape are together arranged to form a three-dimensional chamber 12 .

[0043] Specifically, when the micro-electrolytic machining electrode of the embodiment of the present invention is working, first, the end of the electrode sheet assembly 10 facing away from the three-dimensional chamber 12 is clamped on the fixture in the micro-electrolytic machining device, and the end of the three-dimensional chamber 12 provided on the electrode sheet assembly 10 is exposed outside the fixture and faces the machining area on the workpiece 30. Then, the electrode sheet assembly 10 is connected to the negative electrode of the pulse power supply, and the workpiece 30 is connected to the positive electrode of the pulse power supply. At the same time, the electrolyte is supplied to the machining chamber through the flow groove 112 on the laminated electrode sheet 11, so that the electrolyte is directly and quickly supplied to the machining area of ​​the workpiece 30. Finally, the electrode sheet assembly 10 is continuously fed to the workpiece 30 at a suitable speed, so as to realize the micro-electrolytic machining of the three-dimensional microstructure on the workpiece 30. In this process, refer to Figure 5As shown, fresh electrolyte continuously enters the processing area on the workpiece 30 from the flow groove 112 on the electrode sheet 11, so that the electrolyte in the processing area continuously overflows, and the overflowing electrolyte carries away the electrolysis products, thereby promoting the timely renewal of the electrolyte in the processing area of ​​the workpiece 30 and the rapid discharge of the electrolysis products, ensuring a good processing environment, avoiding the appearance of "dead water areas" when processing complex microstructure surfaces, and thus improving the stability, processing efficiency and quality of the processing process, thereby meeting the processing and use requirements of large-depth three-dimensional microstructures.

[0044] In this embodiment, compared with the existing micro-columnar electrode 40 that electrochemically processes three-dimensional microstructures layer by layer, the micro-electrochemical machining electrode has a larger cross-sectional area and only requires one-way feeding to obtain a deep three-dimensional microstructure. It has a simple machining method and strong anti-interference ability.

[0045] In this embodiment, the flow groove 112 may penetrate the electrode sheet 11 along the thickness direction of the electrode sheet 11 , thereby dividing the electrode sheet 11 into two parts.

[0046] In this embodiment, the shape of the three-dimensional chamber 12 can be designed according to the shape of the processed part of the workpiece 30 , and the shape of the processed part of the workpiece 30 after processing is consistent with the shape of the three-dimensional chamber 12 .

[0047] In another embodiment of the present invention, refer to Figure 2 and Figure 5 As shown, the flow slot 112 of the provided micro-electrolytic machining electrode is linear and extends back to the three-dimensional chamber 12. Specifically, the flow slot 112 is linear, the flow of the electrolyte in the flow slot 112 is smoother, and the electrolyte flows rapidly, which further promotes the timely renewal of the electrolyte in the processing area of ​​the workpiece 30 and the rapid discharge of the electrolytic products, ensuring that the deep three-dimensional microstructure has a good processing effect and good processing quality; at the same time, the micro-electrolytic machining electrode is vertically arranged for processing, and the three-dimensional chamber 12 of the micro-electrolytic machining electrode is located below and directly facing the processing area below the micro-electrolytic machining electrode; more specifically, the flow slot 112 extends vertically back to the three-dimensional chamber 12, so that when the electrolyte flows in the flow slot 112, under the action of its own gravity, the flow speed of the electrolyte is fast, thereby greatly promoting the timely renewal of the electrolyte in the processing area of ​​the workpiece 30 and the rapid discharge of the electrolytic products, so as to ensure that the deep three-dimensional microstructure has a better processing effect and better processing quality.

[0048] In another embodiment of the present invention, when the micro-electrolytic machining electrode is provided with flow slots 112 on multiple electrode sheets 11, each flow slot 112 is arranged opposite to each other and connected and is jointly surrounded to form a flow channel for electrolyte circulation. Specifically, multiple electrode sheets 11 are provided with flow slots 112, and multiple flow slots 112 are surrounded to form a flow channel, the cross-sectional size of the flow channel is large, and the flow rate of the electrolyte in the flow channel is fast, so that the electrolyte in the processing area of ​​the workpiece 30 is replaced quickly, the electrolytic product is discharged faster, the processing effect is better, the processing quality is better, and the operation of pouring the electrolyte into the flow channel is simpler.

[0049] In another embodiment of the present invention, refer to Figure 4 As shown, the two opposite side walls parallel to the stacking direction of each electrode sheet 11 in the provided micro-electrolytic machining electrode are provided with connection layers 13, and the two opposite side walls of each electrode sheet 11 are respectively connected to two connection layers 13. Specifically, each electrode sheet 11 is connected as a whole through the connection layer 13, so that the exposed electrode sheet 11 can be prevented from being opened and separated due to force when the electrode sheet assembly 10 is clamped, thereby affecting the processing quality; at the same time, the electrode sheets 11 will not be relatively dislocated and moved due to external force, so as to ensure that the shape of the three-dimensional chamber 12 remains unchanged and the workpiece 30 after processing meets the design requirements.

[0050] In another embodiment of the present invention, the two opposite surfaces of each electrode sheet 11 of the provided micro-electrolytic machining electrode are plated with a low-melting-point metal film layer, and the connecting layer 13 is made by utilizing the instantaneous high temperature generated by spark discharge to melt the low-melting-point metal film layer at the corresponding edge of each electrode sheet 11 and then stay on the side wall surface of the micro-electrolytic machining electrode. Specifically, during the process of machining the opposite side walls of the electrode sheet assembly 10 by dry electric spark wire, the instantaneous high temperature generated by spark discharge melts the low-melting-point metal film layer at the upper edge of each electrode sheet 11, and finally the melted low-melting-point metal film layer on each electrode sheet 11 is connected with the melted low-melting-point metal film layer on the adjacent electrode sheet 11, thereby connecting the electrode sheets 11 located on the same side wall together, so that the stacked electrode sheets 11 are connected as a whole, and the manufacturing method is simple to operate, convenient and fast.

[0051] In another embodiment of the present invention, the electrode sheet 11 of the micro-electrolytic machining electrode is a copper foil plated with a low-melting-point metal film layer; specifically, the electrode sheet 11 uses the copper foil as a substrate, and copper has good electrical conductivity, which can ensure a good processing effect; at the same time, the surface of the copper foil is provided with a low-melting-point metal film layer, which makes it easy to use the high temperature in dry electric spark wire cutting to melt the low-melting-point metal on the wall surfaces on both sides of the electrode sheet 11, thereby forming a connecting layer 13, and then connecting each electrode sheet 11 into a whole.

[0052] In another embodiment of the present invention, the electrode sheet 11 of the micro-electrolytic machining electrode is a stainless steel foil plated with a low-melting-point metal film layer. Specifically, the electrode sheet 11 is based on a stainless steel foil. On the basis of having good electrical conductivity, stainless steel also has good strength, so that the electrode sheet 11 is not easy to deform, and the deformation of the three-dimensional chamber 12 caused by long-term use is avoided, resulting in the workpiece 30 obtained by processing failing to meet the requirements, thereby improving the service life of the micro-electrolytic machining electrode; at the same time, the surface of the stainless steel foil is provided with a low-melting-point metal film layer, so that it is convenient to use the high temperature in dry electric spark wire cutting to melt the low-melting-point metal on the wall surfaces of both sides of the electrode sheet 11, thereby forming a connecting layer 13, and then connecting each electrode sheet 11 into a whole.

[0053] In another embodiment of the present invention, the low-melting-point metal film layer of the micro-electrolytic machining electrode is a tin film layer; specifically, the low-melting-point metal film layer is made of tin. Since tin has a low melting point and is easy to melt, and at the same time, tin has good ductility, the melted tin will adhere to the side wall surfaces of two adjacent electrode sheets 11, thereby stably connecting the electrode sheets 11 together, and the connection reliability is good.

[0054] In another embodiment of the present invention, the low melting point metal film layer of the micro electrolytic machining electrode is a tin-bismuth alloy film layer. Specifically, the low melting point metal film layer is made of tin-bismuth alloy. Since the tin-bismuth alloy has a low melting point and is easy to melt, and the tin-bismuth alloy has good ductility, the melted tin-bismuth alloy will adhere to the side wall surfaces of two adjacent electrode sheets 11, thereby stably connecting the electrode sheets 11 together, and the connection reliability is good.

[0055] In another embodiment of the present invention, the electrode sheet 11 of the micro-electrolytic machining electrode has a thickness ranging from 40 μm to 120 μm. Specifically, the thickness of the electrode sheet 11 can be 40 μm, 50 μm, 60 μm, 70 μm, 80 μm, 90 μm, 100 μm, 110 μm or 120 μm, and the electrode sheet 11 within this thickness range can meet the processing requirements of most workpieces 30.

[0056] In another embodiment of the present invention, the thickness of the low-melting-point metal film layer of the micro-electrolytic machining electrode is in the range of 3μm to 10μm. Specifically, the thickness of the low-melting-point metal film layer can be 3μm, 5μm, 7μm, 9μm or 10μm. The low-melting-point metal film layer within this thickness range can stably connect the electrode sheets 11 together after melting, which can not only avoid poor connection stability due to too small thickness, but also avoid excessive accumulation of material on the side wall of the electrode sheet 11 due to too large thickness, which causes deformation of the electrode sheet 11, changes in the shape of the three-dimensional chamber 12, and ultimately causes machining failure.

[0057] In another embodiment of the present invention, a micro-electrolytic machining device is provided, comprising the above-mentioned micro-electrolytic machining electrode.

[0058] Specifically, the micro-electrolytic machining device of the embodiment of the present invention adopts the above-mentioned micro-electrolytic machining electrode. Therefore, during the process of processing the workpiece 30 by the micro-electrolytic machining device, fresh electrolyte continuously enters the processing area on the workpiece 30 from the flow groove 112 on the electrode sheet 11, which promotes the timely renewal of the electrolyte in the processing area of ​​the workpiece 30 and the rapid discharge of the electrolysis products, ensures a good processing environment, avoids the occurrence of "dead water areas" when processing the surface of complex microstructures, and thus improves the stability, processing efficiency and quality of the processing process, thereby meeting the processing and use requirements of deep three-dimensional microstructures.

[0059] In another embodiment of the present invention, refer to Figure 6 As shown, a method for processing the above-mentioned micro electrolytic machining electrode is provided, and the processing method comprises:

[0060] S1: providing a CNC machine tool 20, and importing the preset electrode geometric model data having the flow slot 112 into the CNC machine tool 20;

[0061] S2: Provide a preset number of electrode sheets 11 to be processed, stack the electrode sheets 11 to be processed to form an electrode sheet assembly 10 to be processed, clamp one end of the electrode sheet assembly 10 to be processed on the fixture 21 of the CNC machine tool 20 and arrange each electrode sheet 11 to be processed horizontally, and provide a first gear rod 22 and a second gear rod 23 above and below the CNC machine tool 20 and the other end of the electrode sheet assembly 10 to be processed, respectively, the other end of the electrode sheet assembly 10 to be processed is pushed upward and abutted against the first gear rod 22, and the processing position 25 of the CNC machine tool 20 is located between the first gear rod 22 and the second gear rod 23; preferably, the electrode sheet to be processed can be a foil.

[0062] S3: Pushing the electrode sheet 11 to be processed that is in direct contact with the first stopper 22 downward, so that the electrode sheet 11 to be processed passes over the first stopper 22 and is laid flat in the processing position 25;

[0063] S4: According to the preset electrode geometric model data, the processing mechanism 24 of the CNC machine tool 20 cuts the electrode sheet 11 to be processed in the processing position 25 to produce the corresponding electrode sheet 11, the two-dimensional microstructure 111 on the corresponding electrode sheet 11, and the flow groove 112 on the corresponding electrode sheet 11;

[0064] S5: Pushing the processed electrode sheet 11 downward by external force, so that the processed electrode sheet 11 passes over the processing position 25 and the second gear rod 23 and abuts against the bottom of the second gear rod 23;

[0065] S6: Repeat steps S3 to S5 until a preset number of electrode sheets 11 to be processed are completely processed to obtain a micro-electrolytic machining electrode.

[0066] Specifically, the processing and manufacturing method of the embodiment of the present invention first imports the preset electrode geometry model data with the flow groove 112 into the data machine tool, and then clamps one end of the preset number of stacked electrode sheets 11 to be processed on the fixture 21 on the CNC machine tool 20, and then bends the other end of each electrode sheet 11 to be processed upward, so that each electrode sheet 11 to be processed passes the first gear bar and the electrode sheet 11 located at the bottom abuts against the first gear bar 22, and then, bends a directly abutting sheet to be processed downward, so that the electrode sheet 11 to be processed passes the first gear bar and is located in the processing position 25, and then starts the processing mechanism 24 of the CNC machine tool 20, and the processing mechanism 24 is turned on. According to the electrode geometric model data, the electrode sheet 11 to be processed is cut to produce the corresponding two-dimensional microstructure 111, and finally one electrode sheet 11 is subjected to the above steps, until all the electrode sheets 11 to be processed are processed, wherein when the processing mechanism 24 processes the electrode sheet 11 to be processed where a flow groove 112 needs to be set, the processing mechanism 24 needs to process the corresponding flow groove 112 on the basis of processing the two-dimensional microstructure 111 corresponding to the electrode sheet 11, and finally the micro-electrolytic processing electrode is obtained; the processing and manufacturing method utilizes the first block and the second block to process each electrode sheet 11 in turn, and the processing method is simpler and the processing efficiency is higher.

[0067] In this embodiment, the micro-electrolytic machining electrode obtained by the processing method has a flow groove 112 inside. When the micro-electrolytic machining device processes the workpiece 30, fresh electrolyte continuously enters the processing area on the workpiece 30 from the flow groove 112 on the electrode sheet 11, so that the electrolyte in the processing area continuously overflows. At the same time, the overflowing electrolyte takes away the electrolysis products, thereby promoting the timely renewal of the electrolyte in the processing area of ​​the workpiece 30 and the rapid discharge of the electrolysis products, ensuring a good processing environment, avoiding the appearance of "dead water areas" when processing complex microstructures, and thus improving the stability, efficiency and quality of the processing process, thereby meeting the requirements of efficient and stable processing of deep three-dimensional microstructures.

[0068] In the present embodiment, it should be noted that, according to the preset geometric model of the micro-electrolytic machining electrode, the geometric model is discretely sliced ​​according to the preset number of layers to obtain the contour data corresponding to each layer of electrode sheets 11. The contour data and arrangement data of each layer of electrode sheets 11 are used as the electrode geometric model data. In this way, it can be ensured that the shapes and arrangement order of all electrode sheets 11 in the micro-electrolytic machining electrode obtained after all the electrode sheets 11 to be processed are completely processed are completely consistent with the preset shapes and arrangement order.

[0069] In this embodiment, it should be noted that the toggling may be manual toggling or mechanical toggling.

[0070] Furthermore, the processing mechanism 24 in the CNC machine tool 20 can be a laser cutting processing mechanism 24 or an electrospark processing mechanism 24. The electrode sheet 11 obtained by laser cutting or electrospark processing has a regular edge shape and will not produce burrs and other problems, so that the processing quality of the micro-electrolytic processing electrode is better. At the same time, its processing operation is simple and efficient.

[0071] In another embodiment of the present invention, the processing and manufacturing method provided, after step S6, further includes:

[0072] S7: A low-melting-point metal film layer is plated on the two opposite surfaces of each electrode sheet 11. Dry electric spark wire cutting is used to perform slight trimming on the two opposite side walls of the micro-electrolytic machining electrode parallel to the stacking direction of each electrode sheet 11. The instantaneous high temperature generated by spark discharge is used to melt each low-melting-point metal film layer and allow it to remain on the side wall of the micro-electrolytic machining electrode to form a connecting layer, thereby connecting each electrode sheet 11 into a whole.

[0073] Specifically, dry electric spark wire cutting is used to perform micro-trim on the opposite side walls of the micro-electrolytic machining electrode, and the instantaneous high temperature generated by spark discharge is used to melt each low-melting point metal film layer. The melted low-melting point metal film layer connects each electrode sheet 11, and finally the melted low-melting point metal film layer is cooled and solidified, thereby connecting each electrode sheet 11 into a whole. Compared with the existing connection processing method using thermal diffusion welding sintering, this connection processing method is simpler, more convenient and faster to operate, and greatly improves the preparation efficiency of micro-electrolytic machining electrodes.

[0074] See also Figure 2 , Figure 3 and Figure 6 As shown, the following is an explanation of the processing method of a micro-electrolytic machining electrode having 11 electrode sheets 11 and a flow slot 112:

[0075] The raw material of the electrode sheet 11 to be processed is tin-plated copper foil with a thickness of 106 μm, and the thickness of the tin film on both surfaces of the tin-plated copper foil is 3 μm.

[0076] The specific steps include:

[0077] 1. According to the geometric model of the micro-electrolytic machining electrode to be processed, the three-dimensional micro-electrode geometric model is discretely sliced ​​to obtain the contour data of the multilayer electrode sheet 11;

[0078] 2. Stack 11 pieces of 106μm thick tin-plated copper foil together and clamp one end on the fixture 21 of the CNC machine tool 20; elastically bend all the electrode sheets 11 to be processed upward under the action of external force and fix them with a first gear rod, then, elastically bend the first layer of electrode sheets 11 to be processed downward under the action of external force, pass over the first gear rod and enter the processing area, and then cut the first layer of electrode sheets 11 to be processed by electric spark wire cutting or laser cutting according to the obtained electrode geometry processing data. After the processing is completed, the first layer of electrode sheets 11 are elastically bent downward under the action of external force, pass over the second gear rod 23 and rest on the second gear rod 23, and the electrode sheets 11 to be processed and the processed electrode sheets 11 are separated by the first gear rod and the second gear rod 23 to facilitate the processing of the lower layer of electrode sheets 11 to be processed, and the same method is used to complete the processing of the remaining 10 layers of electrode sheets 11 to be processed in sequence, and finally a plurality of electrode sheets 11 are stacked. Among them, a flow groove 112 needs to be processed on the electrode sheet 11 to be processed on the sixth layer to serve as a supply channel for the electrolyte.

[0079] 3. The stacked electrode sheets 11 are clamped by a fixture 21 to expose a portion of the two-dimensional microstructure 111 on the electrode sheet 11, and dry electric spark wire cutting is used to slightly trim the opposite side walls of the stacked electrode sheets 11. The instantaneous high temperature generated by spark discharge is used to melt the tin film on the side walls of the electrode sheets 11, and the electrode sheets 11 of each layer are connected as a whole through the melted tin film, thereby obtaining a micro-electrolytic machining electrode with a flow groove 112.

[0080] Fourth, the micro-electrolytic machining electrode is connected to the negative electrode of the pulse power supply, and the workpiece 30 is connected to the positive electrode of the pulse power supply. The electrolyte is supplied to the processing area of ​​the workpiece 30 through the flow slot 112 in the laminated electrode sheet 11. At the same time, the electrode sheet 11 continuously feeds the workpiece 30 at a suitable speed for micro-electrolytic machining. Fresh electrolyte continuously enters the processing area on the workpiece 30 from the microchannel on the electrode sheet 11, so that the electrolyte in the processing area continuously overflows, and the overflowing electrolyte takes away the electrolysis product, thereby promoting the timely renewal of the electrolyte in the processing area of ​​the workpiece 30 and the rapid discharge of the electrolysis product, ensuring a good processing environment, thereby realizing the processing of a large-depth three-dimensional microstructure.

[0081] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A micro electrolytic machining electrode, characterized in that: The invention comprises a plurality of electrode sheets, which are stacked in sequence to form an electrode sheet assembly, wherein one end of a plurality of electrode sheets in the electrode sheet assembly is provided with a two-dimensional microstructure for processing a workpiece, and each of the two-dimensional microstructures is arranged one by one and surrounds a three-dimensional cavity that matches the shape of the three-dimensional microstructure on the workpiece; a flow groove is opened on the surface of one or more electrode sheets in the electrode sheet assembly, wherein a first end of the flow groove extends out of the corresponding electrode sheet, and a second end of the flow groove is connected to the three-dimensional cavity; and the flow groove penetrates the electrode sheet along the thickness direction of the electrode sheet; The two opposite side walls of the micro-electrolytic machining electrode parallel to the stacking direction of each electrode sheet are provided with connection layers, and the two opposite side walls of each electrode sheet are respectively connected to two of the connection layers; A low-melting-point metal film layer is plated on the two opposite surfaces of each electrode sheet, and the connecting layer is made by utilizing the instantaneous high temperature generated by dry spark discharge to melt the low-melting-point metal film layer at the corresponding edge of each electrode sheet and then allowing it to remain on the side wall surface of the micro-electrolytic machining electrode.

2. The micro electrolytic machining electrode according to claim 1, characterized in that: The flow channel is linear and extends away from the three-dimensional chamber.

3. The micro electrolytic machining electrode according to claim 1, characterized in that: When the circulation grooves are provided on a plurality of the electrode sheets, the circulation grooves are arranged opposite to each other and are jointly arranged to form a flow channel for the electrolyte to flow.

4. The micro-electrolytic machining electrode according to claim 1, characterized in that: The electrode sheet is a copper foil sheet plated with a low melting point metal or a stainless steel foil sheet plated with a low melting point metal.

5. The micro electrolytic machining electrode according to any one of claims 1 to 4, characterized in that: The low melting point metal film layer is a tin film layer or a tin-bismuth alloy film layer.

6. A micro electrolytic machining device, characterized in that: The micro electrolytic machining electrode comprises the micro electrolytic machining electrode according to any one of claims 1 to 5.

7. A method for manufacturing the micro electrolytic machining electrode according to any one of claims 1 to 5, characterized in that: The processing and manufacturing method comprises: S1: providing a numerical control machine tool, and importing preset geometric model data of the electrode with the flow slot into the numerical control machine tool; S2: providing a preset number of electrode sheets to be processed, stacking the electrode sheets to be processed to form an electrode sheet assembly to be processed, clamping one end of the electrode sheet assembly to be processed on the fixture of the CNC machine tool and horizontally arranging the electrode sheets to be processed, respectively providing a first gear lever and a second gear lever above and below the CNC machine tool and the other end of the electrode sheet assembly to be processed, the other end of the electrode sheet assembly to be processed is moved upward and abutted against the first gear lever, and the processing position of the CNC machine tool is located between the first gear lever and the second gear lever; S3: Pushing the electrode sheet to be processed that is in direct contact with the first stop bar downward, so that the electrode sheet to be processed passes over the first stop bar and is laid flat in the processing position; S4: According to the preset electrode geometric model data, the processing mechanism of the CNC machine tool cuts the electrode sheet to be processed in the processing position to produce the corresponding electrode sheet, the corresponding two-dimensional microstructure on the electrode sheet, and the corresponding flow groove on the electrode sheet; S5: Pushing the processed electrode sheet downward by external force, so that the processed electrode sheet passes over the processing position and the second gear lever and abuts against the bottom of the second gear lever; S6: Repeat step S3 to step S5 until a preset number of the electrode sheets to be processed are completely processed to obtain the micro-electrolytic machining electrode.

8. The processing and manufacturing method according to claim 7, characterized in that: After step 6, it also includes: S7: A low-melting-point metal film layer is plated on the two opposite surfaces of each electrode sheet. Dry electric spark wire cutting is used to perform micro-trim on the two opposite side walls of the micro-electrolytic machining electrode parallel to the stacking direction of each electrode sheet. At the same time, the instantaneous high temperature generated by spark discharge is used to melt each low-melting-point metal film layer and allow it to remain on the side wall of the micro-electrolytic machining electrode to form the connecting layer, thereby connecting each electrode sheet into a whole.

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