Ion source device for preventing ion bombardment

Abstract

The present invention relates to the technical field of ion sources, and in particular, to an ion source device for preventing ion bombardment, comprising: a shell, a magnet, a magnetic conductive member, an anode member, a graphite cathode, a first pole shoe, and a second pole shoe. The shell is provided with a first groove; the first pole shoe is arranged in the first groove, the magnet is arranged at both ends of the first pole shoe and is attached to the inner wall of the first groove, the magnetic conductive member is arranged in the second groove formed by the first pole shoe and the magnet, the anode member is arranged in the inner cavity of the magnetic conductive member, the second pole shoe is arranged on the supporting platform formed by the magnetic conductive member and the magnet, and the graphite cathode is wrapped in the second pole shoe, and the graphite cathode is used to block the electrons emitted from the anode member from bombarding the second pole shoe. In this way, when the ions bombard the product under the acceleration of the anode, the graphite cathode can block the ions emitted from the anode member from bombarding the second pole shoe, thereby effectively protecting the second pole shoe and avoiding pollution to the environment.

Description

Technical Field

[0001] The invention relates to the technical field of ion sources, and in particular to an ion source device that is resistant to ion bombardment. Background Art

[0002] An ion source is a device that ionizes neutral atoms or molecules and draws out ion beams from them. It is an indispensable component in various types of ion accelerators, mass spectrometers, electromagnetic isotope separators, ion implanters, ion beam etching devices, ion thrusters, and neutral beam injectors in controlled fusion devices.

[0003] The traditional ion source is a magnet that forms a magnetic field surface through the pole shoe to capture electrons to bombard the inert gas, thereby generating plasma. In the process of ion bombardment of the product under the acceleration of the anode, the pole shoe will be etched by the ion beam. In this way, the pole shoe cannot be effectively protected and will also cause pollution to the environment. Summary of the invention

[0004] The present invention provides an ion source device for preventing ion bombardment, wherein a first pole shoe is arranged in a first groove of a housing, further, magnets are arranged at both ends of the first pole shoe, a magnetic conductive member is arranged in a second groove formed by the first pole shoe and the magnet, an anode is arranged in an inner cavity of the magnetic conductive member, a second pole shoe is arranged on a bearing platform formed by the magnetic conductive member and the magnet, and a graphite cathode is wrapped in the second pole shoe. In this way, when ions bombard a product under the acceleration of the anode, the graphite cathode can block ions emitted from the anode member from bombarding the second pole shoe, thereby effectively protecting the second pole shoe and avoiding pollution to the environment.

[0005] The present invention provides an ion source device for preventing ion bombardment, comprising: a shell, a magnet, a magnetic conductive member, an anode member, a graphite cathode, a first pole shoe and a second pole shoe;

[0006] The shell is provided with a first groove;

[0007] The first pole shoe is disposed in the first groove, and the magnet is disposed at both ends of the first pole shoe and adheres to the inner wall of the first groove;

[0008] The magnetic conductive member is disposed in a second groove formed by the first pole shoe and the magnet;

[0009] The anode member is arranged in the inner cavity of the magnetic conductive member;

[0010] The second pole shoe is arranged on a bearing platform formed by the magnetic conductive member and the magnet;

[0011] The graphite cathode is wrapped in the second pole piece;

[0012] The graphite cathode is used to block the ions emitted from the anode member from bombarding the second pole piece.

[0013] In an alternative embodiment, there are two second pole shoes, which are located opposite to each other; and there is a gap between the graphite cathodes wrapped in each second pole shoe.

[0014] In an alternative embodiment, the gap is opposite to the anode member.

[0015] In an alternative embodiment, a reaction chamber is formed between the graphite cathode, the magnetic conductive member and the anode member.

[0016] In an alternative embodiment, there are two magnets, and the magnetic conductive member connects the N poles and S poles of the two magnets to form a magnetic flux.

[0017] In an alternative embodiment, the north pole of one magnet is connected to the first pole shoe and the south pole is connected to the second pole shoe, and the south pole of another magnet is connected to the first pole shoe and the north pole is connected to the second pole shoe.

[0018] In an alternative embodiment, the graphite cathode and the second pole shoe are fixed via a connecting member.

[0019] In an alternative embodiment, the connecting member is a screw.

[0020] In an alternative embodiment, a cooling cavity for containing cooling liquid is provided at the bottom of the housing.

[0021] In an alternative embodiment, the anode component is clamped in the inner cavity of the magnetic conductive component.

[0022] Compared with the prior art, the present invention has the following beneficial effects:

[0023] The present invention provides an ion source device that is resistant to ion bombardment. A first pole shoe is arranged in a first groove of a shell. Furthermore, magnets are arranged at both ends of the first pole shoe, a magnetic conductive part is arranged in a second groove formed by the first pole shoe and the magnet, an anode is arranged in an inner cavity of the magnetic conductive part, a second pole shoe is arranged on a supporting platform formed by the magnetic conductive part and the magnet, and a graphite cathode is wrapped around the second pole shoe. In this way, when ions bombard a product under the acceleration of the anode, the graphite cathode can block ions emitted from the anode part from bombarding the second pole shoe, thereby effectively protecting the second pole shoe and avoiding pollution to the environment. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for use in the embodiments are briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without creative work.

[0025] Figure 1 A schematic structural diagram of an ion source device for protecting against ion bombardment provided by an embodiment of the present invention.

[0026] In the figure:

[0027] 1- housing;

[0028] 21-first pole shoe; 22-second pole shoe;

[0029] 3- Magnet;

[0030] 4-Magnetic conductive parts;

[0031] 5- anode piece;

[0032] 6-graphite cathode;

[0033] 7- reaction chamber;

[0034] 8-Cooling chamber. DETAILED DESCRIPTION

[0035] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings here can be arranged and designed in various different configurations.

[0036] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the invention claimed for protection, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0037] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0038] Example:

[0039] Please refer to Figure 1, an ion source device for preventing ion bombardment provided by an embodiment of the present invention, includes: a shell 1, a magnet 3, a magnetic conductive member 4, an anode member 5, a graphite cathode 6, a first pole shoe 21 and a second pole shoe 22.

[0040] Furthermore, the shell 1 is provided with a first groove, the first pole shoe 21 is arranged in the first groove, the magnet 3 is arranged at both ends of the first pole shoe 21 and is attached to the inner wall of the first groove, the magnetic conductive component 4 is arranged in the second groove formed by the first pole shoe 21 and the magnet 3, and the anode component 5 is arranged in the inner cavity of the magnetic conductive component 4. It can be understood that the anode component 5 can be clamped in the inner cavity of the magnetic conductive component 4.

[0041] Furthermore, the second pole shoe 22 is disposed on a supporting platform formed by the magnetic conductive member 4 and the magnet 3 , and the graphite cathode 6 is wrapped around the second pole shoe 22 . The graphite cathode 6 is used to block the ions emitted from the anode member 5 from bombarding the second pole shoe 22 .

[0042] It can be understood that the graphite cathode 6 is wrapped in the second pole shoe 22, which can prevent the second pole shoe 22 from being etched by the ion beam, and can also prevent the metal from splashing onto the product after etching, thereby affecting the quality of the product. At the same time, it can also prevent the conductive metal material from splashing onto the conductive joint and causing a short circuit.

[0043] It can be understood that by setting the above structure, when ions bombard the product under the acceleration of the anode member 5, the graphite cathode 6 can block the ions emitted from the anode member 5 from bombarding the second pole shoe 22, thereby effectively protecting the second pole shoe 22 and avoiding pollution to the environment.

[0044] Please refer to Figure 1 There are two second pole shoes 22, which are positioned opposite to each other. There is a gap between the graphite cathode 6 wrapped in each second pole shoe 22, wherein the gap is opposite to the anode member 5, and the gap is used to release the ion beam accelerated by the anode member 5 for bombarding the product.

[0045] Furthermore, a reaction chamber 7 is formed between the graphite cathode 6, the magnetic conductive member 4 and the anode member 5, wherein the reaction chamber 7 is used for the magnet to capture electrons through the magnetic field surface formed by the pole shoe, thereby bombarding the inert gas.

[0046] In a replaceable embodiment, there are two magnets 3, and the magnetic conductive member 4 connects the N pole and S pole of the two magnets 3 to form a magnetic flux, wherein the N pole of one magnet 3 is connected to the first pole shoe 21, and the S pole is connected to the second pole shoe 22, and the S pole of the other magnet 3 is connected to the first pole shoe 21, and the N pole is connected to the second pole shoe 22, and the magnetic field mainly exists in the gap, so that the magnetic field can be prevented from leaking.

[0047] In this embodiment, the graphite cathode 6 and the second pole piece 22 can be fixed by a connector, wherein the connector is a screw, which is a detachable connection, thereby facilitating disassembly and maintenance. It can be understood that graphite can be a non-magnetic, high temperature resistant, ion etching resistant and conductive material.

[0048] In an alternative embodiment, a cooling chamber 8 for containing a coolant may be provided at the bottom of the housing 1. When the ions bombard the product under the acceleration of the anode member 5, the temperature of the reaction chamber 7 may rise, thereby causing the second pole shoe to deform. By injecting cold water into the cooling chamber 8, the temperature in the reaction chamber 7 is reduced, and the second pole shoe can be effectively protected.

[0049] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. An ion source device for preventing ion bombardment, characterized in that: include: A housing (1), a magnet (3), a magnetic conductive member (4), an anode member (5), a graphite cathode (6), a first pole shoe (21), and a second pole shoe (22); The housing (1) is provided with a first groove; The first pole shoe (21) is arranged in the first groove, and the magnet (3) is arranged at the two ends of the first pole shoe (21) and is attached to the inner wall of the first groove; there are two magnets (3), one of which has an N pole connected to the first pole shoe (21) and an S pole connected to the second pole shoe (22), and the other magnet (3) has an S pole connected to the first pole shoe (21) and an N pole connected to the second pole shoe (22), and the magnetic conductive member (4) connects the N poles and S poles of the two magnets (3) to form a magnetic flux; The magnetic conductive member (4) is arranged in a second groove formed by the first pole shoe (21) and the magnet (3); The anode component (5) is arranged in the inner cavity of the magnetic conductive component (4); The second pole shoe (22) is arranged on a supporting platform formed by the magnetic conductive member (4) and the magnet (3); there are two second pole shoes (22), and the two second pole shoes (22) are located opposite to each other; there is a gap between the graphite cathodes (6) wrapped in each second pole shoe (22); The graphite cathode (6) is wrapped around the second pole piece (22); The graphite cathode (6) is used to prevent ions emitted from the anode member (5) from bombarding the second pole piece (22).

2. The ion source device for preventing ion bombardment according to claim 1, characterized in that: The gap is opposite to the anode member (5).

3. The ion source device for preventing ion bombardment according to claim 2, characterized in that: A reaction chamber (7) is formed between the graphite cathode (6), the magnetic conductive component (4) and the anode component (5).

4. The ion source device for preventing ion bombardment according to claim 1, characterized in that: The graphite cathode (6) and the second pole shoe (22) are fixed via a connecting piece.

5. The ion source device for preventing ion bombardment according to claim 4, characterized in that: The connecting piece is a screw.

6. The ion source device for preventing ion bombardment according to claim 1, characterized in that: A cooling cavity (8) for containing cooling liquid is provided at the bottom of the housing (1).

7. The ion source device for preventing ion bombardment according to claim 1, characterized in that: The anode component (5) is clamped in the inner cavity of the magnetic conductive component (4).

Images