A dual-probe nanomeasuring instrument

Abstract

The application discloses a kind of double-probe nanometer measuring instruments, including measurer main body;The front end of the measurer main body is equipped with first probe, second probe;The first probe is used to detect the signal of the measured object under external environmental interference;The second probe is used to detect the interference signal of the nearby environment of the measured object;The beneficial effects of the application are that: the design adopts double probe, one probe detects the signal of the measured object under external environmental interference, another detects the interference signal of the nearby environment of the measured object, by calculating two signal values, finally two values are subtracted, the value obtained is the value of the measured object;Let nanometer measurement system save traditional closed bad mirror equipment, and can measure large measured object.

Description

Technical Field

[0001] This invention relates to the field of nanometer measurement system technology, and in particular to a dual-probe nanometer measurement instrument. Background Technology

[0002] Nanometry is one of the fundamental sciences of nanoscience and technology. The rapid development of nanoscience and technology has provided new opportunities for the development of nanometry.

[0003] In industrial production, it is often necessary to measure key parameters in the manufacturing process of industrial products, with these parameters ranging from the nanometer scale. For example, the glass back panel of an LED display; by measuring the nanometer-scale key parameters of the LED display's back panel, the quality of the LED display can be determined. Existing nanometer measurement systems operate on the following principles: Figure 8 The probe, driven by a scanning mechanism, detects the surface of the object being measured. The probe's tip diameter is approximately on the nanoscale. When scanning the object's surface, the unevenness at the nanoscale inevitably causes minute vibrations in the probe. A light beam emitted from the light source hits the probe and is reflected onto the optical sensor, forming a reflected signal. This signal is then calculated to obtain the nanoscale signal value. However, in a microscopic environment, even the slightest noise can cause minute vibrations in the object. Therefore, theoretically, the signal measured by the nanometer measurement system is... Figure 9 The actual signal below; however, in reality, only signals like these can be measured. Figure 9 The detection signal above is the signal from the object being measured, which is affected by environmental interference. Environmental interference can be noise interference or ground movement interference; therefore, engineers construct a sealed external soundproof environment device, such as... Figure 10 In this enclosed environment, the detected signal is as follows: Figure 9 The actual signal is then used to calculate nanoscale values.

[0004] Existing nanometer measurement systems all have soundproof and enclosed environmental equipment, such as Figure 10 However, as technology advances, the size of the objects being measured is getting larger and larger, even larger than a house. Soundproof and enclosed environmental equipment cannot be made as large as a house, which makes it impossible to achieve nanometer measurements. Summary of the Invention

[0005] The main technical problem solved by this invention is to provide a dual-probe nanometer measuring instrument, which adopts a dual-probe measuring structure, eliminating the need for traditional closed and faulty mirror equipment, and is capable of measuring large objects.

[0006] To address the aforementioned problems, this invention provides a dual-probe nanometer measuring instrument, comprising a measuring instrument body; the front end of the measuring instrument body is provided with a first probe and a second probe; the first probe is used to detect the signal of the object under test under external environmental interference; the second probe is used to detect interference signals in the environment near the object under test.

[0007] Furthermore, the first probe is provided with a first tip and a first physical decoder; the second probe is provided with a second tip and a second physical decoder.

[0008] Furthermore, the tip curvature radius of the first needle tip is on the nanoscale, the tip curvature radius of the second needle tip is larger than that of the first needle tip, and the tip curvature radius of the second needle tip is greater than 1 micrometer.

[0009] Furthermore, the first physical decoder is a row of grids that can be used to reflect light signals; similarly, the second physical decoder is a row of grids that can be used to reflect light signals.

[0010] Furthermore, the grid distance of the first physical decoder is 685 nanometers; the grid distance of the second physical decoder is 1 micrometer.

[0011] Furthermore, when the first needle tip is used for detection, it enables the first physical decoding of the reflected light signal, and the signal is the signal of the object under environmental interference; similarly, when the second needle tip is used for detection, it enables the second physical decoding of the reflected light signal, and the signal is the interference signal of the surrounding environment of the object under test.

[0012] Furthermore, the measuring device body is designed for mounting on a nanometer measuring system.

[0013] Furthermore, the radius of curvature of the second needle tip can be used to create a spatial effect through physical phenomena such as electrostatic force fields and air damping force fields.

[0014] This invention discloses a dual-probe nanometer measuring instrument, comprising a measuring body; the front end of the measuring body is provided with a first probe and a second probe; the first probe is used to detect the signal of the object under test under external environmental interference; the second probe is used to detect the interference signal of the surrounding environment of the object under test; the beneficial effects of this invention are: this design uses dual probes, one probe detects the signal of the object under test under external environmental interference, and the other probe detects the interference signal of the surrounding environment of the object under test. By calculating the two signal values, the two values ​​are subtracted to obtain the value of the object under test; this eliminates the need for traditional closed and damaged mirror equipment in the nanometer measuring system and enables the measurement of large objects. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings in the description are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0016] Figure 1 This is a schematic diagram of the present invention.

[0017] Figure 2 This is a schematic diagram of the front end of the measuring device body of the present invention.

[0018] Figure 3 This is a schematic diagram of the present invention installed on a nanometer measurement system.

[0019] Figure 4 This is a schematic diagram of the signal detected by the present invention installed on the nanometer measurement system.

[0020] Figure 5 This is a schematic diagram of the tip of the first needle of the present invention working on the object being tested.

[0021] Figure 6 This is a schematic diagram of the tip of the second needle of the present invention working on the object being tested.

[0022] Figure 7 This is a schematic diagram illustrating the subtraction of two signals to obtain the actual nano-signal in this invention.

[0023] Figure 8 This is a schematic diagram of the working principle of an existing nanometer measurement system.

[0024] Figure 9 This is a schematic diagram of signals detected by existing nanometer measurement systems.

[0025] Figure 10 This is a schematic diagram of an existing nanometer measurement system with a soundproof and enclosed environment.

[0026] The following description, in conjunction with embodiments and the accompanying drawings, further illustrates the realization of the objectives, functional characteristics, and advantages of the present invention. Detailed Implementation

[0027] To make the objectives, technical solutions, and advantages of the invention clearer, the technical solutions of the embodiments of the invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the invention, not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of the invention without creative effort are within the scope of protection of the invention.

[0028] Example 1:

[0029] like Figures 1 to 7 As shown, the dual-probe nanometer measuring instrument includes a measuring body 10; the front end of the measuring body 10 is provided with a first probe 11 and a second probe 12; the first probe 11 is used to detect the signal of the object under external environmental interference; the second probe 12 is used to detect the interference signal of the environment near the object under test.

[0030] Specifically: the measuring device body 10 is used to mount on a nanometer measurement system; the first probe 11 is provided with a first tip 111 and a first physical decoder 112; the second probe 12 is provided with a second tip 121 and a second physical decoder 122; the tip curvature radius of the first tip 111 is on the nanoscale, and the tip curvature radius of the second tip 121 is larger than that of the first tip 111, and the tip curvature radius of the second tip 121 is greater than 1 micrometer; the second tip 121 does not have the resolution to detect the internal surface of the measured object, such as... Figure 6 However, the longitudinal resolution detected by the second tip 121 perpendicular to the object being measured is consistent with the longitudinal resolution detected by the first tip 111 perpendicular to the object being measured; therefore, the measurement by the first tip 111 reflects the nanoscale resolution change of the object being measured, such as... Figure 5 The second needle tip 121 reflects changes in the environment, particularly changes caused by longitudinal vibrations perpendicular to the object being measured. Figure 6 The radius of curvature of the second needle tip 121 can be achieved through a flat geometric tip, such as... Figure 5 It can also be achieved through other physical phenomena that do not have lateral spatial resolution; the electrostatic field formed between the second tip 121 and the object being measured, damping force, long-range van der Waals force, etc.; the second tip 121 only measures the relative changes between the object being measured and the nanometer measurement system over a larger area; therefore, the working principle of the measuring device body 10 mounted on the nanometer measurement system is as follows: Figure 3 The scanning drive moves the first probe 11 and the second probe 12 to probe the surface of the object being measured. The first probe tip 111, as... Figure 5 When scanning the surface of the object being measured, the first probe 11 vibrates extremely slightly. At this time, a light beam emitted from the light source emitter is reflected onto the first physical decoder 112 and then onto the optical sensor, forming a reflected signal. This signal represents the object being measured under external environmental interference. Figure 4 Topmost signal; Second needle tip 121 as Figure 6When scanning the surface of the object being measured, since the second tip 121 only detects the upper part of the object's surface, and the second probe 12 only detects the interference from the surrounding environment, causing extremely small vibrations, a second light beam emitted from the second light source emitter is reflected onto the second physical decoder 122 and then onto the second optical sensor, forming a reflected signal. This reflected signal represents the interference signal from the surrounding environment of the object being measured. Figure 4 The signal at the bottom; the second probe 12 and the first probe 11 are in roughly the same spatial position, therefore their noise impact is exactly the same as the interference signal detected by the second probe 12; such as Figure 7 The two signals are used to calculate two nanometer values. The value obtained by subtracting the two nanometer values ​​is the nanometer value of the measured object.

[0031] like Figure 1 , Figure 2 As shown, the first probe 11 is provided with a first tip 111 and a first physical decoder 112; the second probe 12 is provided with a second tip 121 and a second physical decoder 122.

[0032] like Figure 1 , Figure 2 , Figure 5 , Figure 6 As shown, the tip curvature radius of the first needle tip 111 is on the nanoscale, and the tip curvature radius of the second needle tip 121 is larger than that of the first needle tip 111, and the tip curvature radius of the second needle tip 121 is greater than 1 micrometer.

[0033] like Figure 1 , Figure 2 As shown, the first physical decoder 112 is a row of grids that can be used to reflect light signals; similarly, the second physical decoder 122 is a row of grids that can be used to reflect light signals.

[0034] like Figure 1 , Figure 2 As shown, the grid distance of the first physical decoder 112 is 685 nanometers; the grid distance of the second physical decoder 122 is 1 micrometer.

[0035] like Figure 1 , Figure 2 , Figure 5 , Figure 6 As shown, when the first needle tip 111 is used for detection, it causes the first physical decoder 112 to reflect a light signal, and the signal is the signal of the object under environmental interference; similarly, when the second needle tip 121 is used for detection, it causes the second physical decoder 122 to reflect a light signal, and the signal is the interference signal of the surrounding environment of the object under test.

[0036] like Figure 1 , Figure 2As shown, the measuring device body 10 is used to be mounted on a nanometer measuring system.

[0037] like Figure 1 , Figure 2 , Figure 6 As shown, the radius of curvature of the second needle tip 121 can be utilized in space by physical phenomena such as electrostatic force field and air damping force field.

[0038] The above embodiments are only used to illustrate the technical solutions of the present invention, and are not intended to limit it. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A dual-probe nanometer measuring instrument, comprising a measuring instrument body (10); characterized in that, The front end of the measuring instrument body (10) is provided with a first probe (11) and a second probe (12); the first probe (11) is used to detect the signal of the object under external environmental interference; the second probe (12) is used to detect the interference signal of the environment near the object under test; the first probe (11) is provided with a first tip (111) and a first physical decoder (112); the second probe (12) is provided with a second tip (121) and a second physical decoder (122); the tip curvature radius of the first tip (111) is on the nanoscale, the tip curvature radius of the second tip (121) is larger than that of the first tip (111), and the tip curvature radius of the second tip (121) is greater than 1 micrometer; The first physical decoder (112) is a row of grids that can be used to reflect light signals; similarly, the second physical decoder (122) is a row of grids that can be used to reflect light signals. The grid distance of the first physical decoder (112) is 685 nanometers; the grid distance of the second physical decoder (122) is 1 micrometer; The measuring device body (10) is used to be mounted on the nanometer measuring system.

2. The dual-probe nanometer measuring instrument according to claim 1, characterized in that, When the first tip (111) is used for detection, it causes the first physical decoder (112) to reflect a light signal, and its signal is the signal of the object under environmental interference; similarly, when the second tip (121) is used for detection, it causes the second physical decoder (122) to reflect a light signal, and its signal is the interference signal of the surrounding environment of the object under test.

3. The dual-probe nanometer measuring instrument according to claim 1, characterized in that, The radius of curvature of the second needle tip (121) can be realized through the physical phenomena of electrostatic force field or air damping force field.

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