Laser head module of laser lift-off device
A laser peeling and laser head technology, applied in laser welding equipment, welding equipment, metal processing equipment, etc., can solve problems such as the increase in the price of the overall equipment, the increase in operating time, the pollution of the substrate welding liquid, etc., to prevent thermal damage from burning or melting , Improve the effect of temperature deviation
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Publication Date
- 2020-08-14
- Estimated Expiration
- Not applicable · inactive patent
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Abstract
Description
technical field
[0001] The present invention relates to a laser lift-off device, and more specifically, to a laser head module of a laser lift-off device capable of removing electronic components melted at soldering sites by laser irradiation without contaminating a substrate. Background technique
[0002] In industrial laser processing, micro-laser processing is the field of application with micron (μm)-level precision, and it is widely used in the semiconductor industry, display industry, printed circuit board (PCB) industry, and smartphone industry. In memory chips used in all electronic devices, in order to achieve integration, performance and ultra-high-speed communication speed, technology is developing towards the direction of minimizing the circuit line width and line width spacing. However, at present, only by reducing the circuit line width and line width A wide pitch cannot achieve the required technical level, and is only at the level of stacking a plurality of m...
Examples
Embodiment Construction
[0031] The terms used in this specification are for describing specific embodiments only, and do not limit the present invention. Expressions in the singular include expressions in the plural unless the context clearly indicates otherwise. In this specification, terms such as "comprising", "having" or "having" are used to designate the existence of features, numbers, steps, actions, structural elements, components or combinations thereof described in this specification, rather than prior The existence or additional possibility of one or more other features or numbers, steps, actions, structural elements, parts or their combinations is excluded.
[0032] In this specification, unless otherwise defined, all terms used herein including technical or scientific terms assume the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs.
[0033] Terms having the same meaning as those defined by commonly used dictionaries should be inter...