A fixture for manufacturing a piezoelectric actuator

By using fixtures during the production process of piezoelectric drivers and using the design of base and locking parts, the problem of low alignment accuracy of chip porcelain is solved, and high-quality and efficient production of piezoelectric drivers is achieved.

CN111673648BActive Publication Date: 2025-08-01SHENZHEN ZHENHUA FU ELECTRONICS
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Patent Information

Application Number
CN202010611228.X
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2020-06-30
Publication Date
2025-08-01
Estimated Expiration
2040-06-30

AI Technical Summary

Technical Problem

In the prior art, the alignment accuracy of the chip porcelain body is low during the production process, resulting in defects in the resulting piezoelectric driver.

Method used

A clamp is adopted, including a base and a locking member, with grooves and through holes on the base. The locking member extends into the grooves through the through holes to lock the target member to ensure that the chip porcelain body does not displace during sintering and improve alignment accuracy.

Benefits of technology

Through the use of fixtures, the alignment accuracy of the chip porcelain body is improved, the quality stability and reliability of the piezoelectric driver are ensured, and the glue curing efficiency is improved, reducing production costs.

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Abstract

The present invention provides a fixture for manufacturing a piezoelectric actuator, which includes a base and a locking member. The base is provided with a groove for placing a target member, and an opening is provided at the top of the groove. The target member is placed in the groove through the opening. The base is further provided with a through hole corresponding to and communicating with the groove. One end of the locking member extends into the groove through the through hole and locks the target member in the groove. The process of manufacturing a piezoelectric actuator using the fixture is as follows: a plurality of chip ceramics are preliminarily bonded together by an inorganic glue to obtain a stack structure; the stack structure is placed into the groove through the opening of the groove, and one end of the locking member extends into the groove through the through hole and abuts against the stack structure to prevent the stack structure from detaching from the groove; the fixture and the stack structure thereon are placed in a sintering furnace for sintering to cure the glue; during the curing process of the glue, the plurality of chip ceramics on the stack structure are aligned through the groove, so the chip ceramics will not shift, and thus the alignment accuracy of the chip ceramics can be greatly improved.
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Description

Technical Field

[0001] The present invention belongs to the technical field of manufacturing piezoelectric actuators, and more specifically, relates to a fixture for manufacturing piezoelectric actuators. Background Art

[0002] The longitudinal piezoelectric actuator is a kind of component that utilizes the inverse piezoelectric effect to control the mechanical deformation of the piezoelectric body through an electric field to generate longitudinal linear motion, and is widely used in fields such as aviation technology, measurement technology, precision machining, and medical instruments. At present, the most widely used longitudinal piezoelectric actuator is a large-stroke actuator stack with a height greater than 10 mm. A discrete stack made by bonding multiple chip ceramics together with glue is one of the most common structures. However, when bonding multiple chip ceramics together with glue, it is difficult to align and cure the chip ceramics, which easily leads to defects in the manufactured discrete piezoelectric actuator stack. Summary of the Invention

[0003] An object of an embodiment of the present invention is to provide a fixture for manufacturing a piezoelectric actuator to solve the technical problem of low alignment accuracy of chip ceramics in the manufacturing process of the existing discrete piezoelectric actuator stack.

[0004] To achieve the above object, the technical solution adopted by the present invention is: providing a fixture for manufacturing a piezoelectric actuator, including a base and a locking member. A groove for placing a target member is formed on the base, an opening is provided at the top of the groove, the target member is placed in the groove through the opening, the target member includes stacked target units, the same side surfaces of all the target units are closely attached to the bottom wall of the groove, a through hole corresponding to the groove and communicating with the groove is further formed on the base, and one end of the locking member extends into the groove through the through hole to lock the target member in the groove.

[0005] In one embodiment, the fixture includes a plurality of locking members, a plurality of the grooves and a plurality of the through holes are formed on the base, the plurality of locking members correspond to the plurality of grooves one by one, and each locking member extends into the groove through the corresponding through hole.

[0006] In one embodiment, the plurality of grooves are arranged in an array.

[0007] In one embodiment, the plurality of grooves are arranged in two columns on the surface of the base, and the plurality of through holes are respectively arranged on the surfaces of opposite sides of the base.

[0008] In one embodiment, the through hole is a threaded hole, and the locking member is in threaded fit with the through hole.

[0009] In one embodiment, the locking member is a screw, and the length of the screw rod of the screw is 13 mm to 23 mm.

[0010] In one embodiment, the length of the groove is 12 mm to 40 mm, the width of the groove is 3 mm to 10 mm, and the depth of the groove is 2 mm to 8 mm.

[0011] In one embodiment, the end face of the end of the locking member extending into the groove is subjected to planar polishing treatment, and the inner wall of the groove is subjected to planar polishing treatment.

[0012] In one embodiment, the tolerable temperatures of the base and the locking member are both greater than 1600 °C.

[0013] In one embodiment, both the base and the locking member are alumina ceramic parts.

[0014] The present invention provides a fixture for manufacturing a piezoelectric actuator, including a base and a locking member. A groove for placing a target part is formed on the base. An opening is provided at the top of the groove. The target part is placed in the groove through the opening. The target part includes stacked target units. The same side surfaces of all the target units are closely attached to the bottom wall of the groove. A through hole corresponding to the groove and communicating with the groove is further formed on the base. One end of the locking member extends into the groove through the through hole and locks the target part in the groove. The process of manufacturing a piezoelectric actuator using the above fixture is as follows: First, a plurality of chip ceramics are preliminarily bonded together by an inorganic glue to obtain a stack structure. Then, the stack structure is placed into the groove through the opening of the groove. One end of the locking member extends into the groove through the through hole and abuts against the stack structure, thereby preventing the stack structure from separating from the groove. Next, the fixture and the stack structure thereon are placed in a sintering furnace for sintering to cure the glue. During the curing process of the glue, the plurality of chip ceramics on the stack structure are aligned through the groove. Therefore, the chip ceramics will not shift, so the alignment accuracy of the chip ceramics can be greatly improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following will briefly introduce the drawings required for use in the embodiments or the description of the prior art. Obviously, the following drawings are only some embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0016] Figure 1 It is a schematic three-dimensional structure diagram of the fixture for manufacturing a piezoelectric actuator provided by the embodiment of the present invention;

[0017] Figure 2 It is a schematic exploded structure diagram of the fixture for manufacturing a piezoelectric actuator provided by the embodiment of the present invention;

[0018] Figure 3 This is a schematic diagram of the use of the fixture for manufacturing a piezoelectric actuator provided by an embodiment of the present invention.

[0019] Among them, each reference numeral in the figure:

[0020] 100 - base; 110 - groove; 120 - opening; 130 - through hole; 200 - locking member; 300 - target member. Detailed implementation manners

[0021] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention more clearly understood, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0022] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0023] It should be understood that the orientation or positional relationship indicated by terms such as "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus cannot be understood as a limitation to the present invention.

[0024] In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the present invention, "a plurality of" means two or more unless otherwise specifically defined.

[0025] Please refer to Figure 1 and Figure 2, an embodiment of the present invention provides a fixture for manufacturing a piezoelectric actuator, which includes a base 100 and a locking member 200. A groove 110 for placing a target member 300 and a through hole 130 communicating with the groove 110 and correspondingly arranged are formed on the base 100. An opening 120 is provided at the top of the groove 110. The target member 300 is placed in the groove 110 through the opening 120. The target member 300 includes stacked target units (not shown in the figure). The same side of each target unit is closely attached to the bottom wall of the groove 110. One end of the locking member 200 extends into the groove 110 through the through hole 130 and locks the target member 300 in the groove 110 to prevent the target member 300 from detaching from the groove 110.

[0026] It should be noted that the fixture of the embodiment of the present invention is mainly used for manufacturing a piezoelectric actuator. The target member 300 is a stack structure formed by initially bonding multiple chip ceramics together. Specifically, multiple chip ceramics are stacked layer by layer in sequence, and adjacent two chip ceramics are initially bonded by uncured glue. Of course, according to actual situation selection, the target member 300 can also be other objects, and the present invention does not limit this here.

[0027] Specifically, please also combine with Figure 3 , the process of manufacturing a piezoelectric actuator using the above fixture is as follows: First, multiple chip ceramics are initially bonded together by inorganic glue to obtain a stack structure, which is the above-mentioned target member 300; then, the stack structure is placed into the groove 110 through the opening 120 of the groove 110. One end of the locking member 200 extends into the groove 110 through the through hole 130 and abuts against the stack structure, thereby preventing the stack structure from detaching from the groove 110; then, the fixture and the stack structure thereon are placed in a sintering furnace for sintering to cure the glue; during the curing process of the glue, the multiple chip ceramics on the stack structure are aligned through the groove 110, so the chip ceramics will not shift, and thus the alignment accuracy of the chip ceramics can be greatly improved, and further the quality of the manufactured piezoelectric actuator is stable and reliable.

[0028] Specifically, in an embodiment of the present invention, as Figure 1 and Figure 2As shown, the fixture includes a plurality of locking members 200. A plurality of grooves 110 and a plurality of through holes 130 are formed in the base 100. Each groove 110 is for placing a stack structure correspondingly. The plurality of locking members 200 correspond to the plurality of grooves 110 one by one. Each locking member 200 extends into the groove 110 through the corresponding through hole 130. When manufacturing the piezoelectric actuator using the above fixture, a plurality of stack structures can be respectively placed into the corresponding grooves 110 at one time, and one end of each of the plurality of locking members 200 extends into the corresponding groove 110 through the through hole 130 and abuts against the stack structure, thereby preventing the stack structure from separating from the groove 110. Then, the fixture and the stack structures thereon are placed in a sintering furnace for sintering to cure the glue. It can be seen that, on the basis of ensuring the alignment accuracy of the chip ceramic body, the fixture in the embodiment of the present invention can also improve the curing efficiency of the glue by curing the glue on a plurality of stack structures at one time, greatly improving the production capacity, thereby reducing the manufacturing cost and improving the economic benefits of the product.

[0029] It can be understood that, according to the actual situation, only one locking member 200 can be provided on the fixture. Correspondingly, only one groove 110 and one through hole 130 are formed in the base 100. In this case, the fixture can be miniaturized. Therefore, the sintering furnace can accommodate a plurality of fixtures. In order to improve the curing efficiency, a plurality of fixtures with stack structures can be placed in the sintering furnace for sintering to cure the glue at one time, and it can also achieve the same effect as the embodiment with a plurality of locking members 200, a plurality of grooves 110 and a plurality of through holes 130. The present invention does not make special limitations here.

[0030] Specifically, in an embodiment of the present invention, as Figure 1 and Figure 2 shown, the plurality of grooves 110 are arranged in an array. Specifically, the plurality of grooves 110 can be arranged in two columns on the two side edges of the surface of the base 100. The plurality of through holes 130 are respectively arranged on the surfaces of the opposite sides of the base 100. It can be understood that, according to the actual situation, the plurality of grooves 110 can also be arranged in other arrangements as long as the above effects can be achieved. The present invention does not make special limitations here.

[0031] As an alternative embodiment of the present invention, the through hole 130 can be a threaded hole, and the locking member 200 is in threaded fit with the through hole 130. As Figure 3As shown, after placing the stack structure in the groove 110 of the base 100, rotate the locking member 200 so that one end of the locking member 200 extends into the interior of the groove 110 and abuts against the stack structure, clamping the stack structure between the inner wall of the groove 110 and the end of the locking member 200 extending into the groove 110, thereby preventing the stack structure from disengaging from the groove 110 and ensuring that after the glue cures, the chip ceramics are tightly connected, making the piezoelectric actuator produced have stable and reliable quality. In this embodiment, the locking member 200 can be, but is not limited to, a screw, and the screw thread of the screw is threadedly connected to the through hole 130. It can be understood that according to the actual situation, the connection between the locking member 200 and the through hole 130 can also be a connection method, as long as it is ensured that the locking member 200 can lock the stack structure in the groove 110, and the present invention does not make special limitations here.

[0032] Specifically, the size of the groove 110 is adapted to the size of the stack structure. Specifically, the length of the groove 110 is slightly larger than the thickness of the stack structure, and the width of the groove 110 is slightly larger than the width of the stack structure, so that the stack structure can be just placed in the groove 110 to facilitate the alignment of multiple chip ceramics of the stack structure. In this embodiment, the depth of the groove 110 is slightly less than the length of the stack structure, so that when the stack structure is placed in the groove 110, a part of the stack structure can protrude from the opening 120 of the groove 110 to facilitate the subsequent clamping and removal of the stack structure from the groove 110.

[0033] It should be noted that in the embodiment of the present invention, the length of the groove 110 refers to the dimension of the groove 110 along the assembly direction parallel to the locking member 200, the depth of the groove 110 refers to the dimension of the groove 110 along the direction parallel to the placement direction of the stack structure in the groove 110, the width of the groove 110 refers to the dimension of the groove 110 along the direction perpendicular to the assembly direction of the locking member 200 and the placement direction of the stack structure in the groove 110, the thickness of the stack structure refers to the dimension of the stack structure along the arrangement direction of multiple chip ceramics, the length of the stack structure refers to the dimension of the stack structure along the direction parallel to the placement direction of the stack structure in the groove 110, and the width of the stack structure refers to the dimension of the stack structure along the direction perpendicular to the assembly direction of the locking member 200 and the placement direction of the stack structure in the groove 110.

[0034] Specifically, the inner wall of the groove 110 is treated by planar polishing, and the end of the locking member 200 extending into the groove 110 is treated by planar polishing, so that the chip ceramics at both ends of the stack structure are respectively in planar contact with the end of the locking member 200 extending into the groove 110 and the inner wall plane of the groove 110, preventing the chip ceramics from being bruised or scratched.

[0035] Optionally, in the fixture according to the embodiment of the present invention, the length of the groove 110 is 12 mm to 40 mm, the depth is 3 mm to 10 mm, and the width is 2 mm to 8 mm. The length of the screw rod on the screw (locking member 200) is 13 mm to 23 mm. For example, the length of the groove 110 is 20 mm, the depth is 4 mm, the width is 5 ± 0.05 mm, and the length of the screw rod on the screw is 18 mm. It can be understood that, according to the selection of the actual situation, the above dimensions can be appropriately adjusted, and the present invention does not make special limitations here.

[0036] Optionally, both the base 100 and the locking member 200 are ceramic parts, specifically but not limited to alumina ceramic parts. Compared with other materials, the temperature that the alumina ceramic material can withstand is greater than 1600°C. Generally speaking, the glue curing temperature is lower than 1000°C. By using the alumina ceramic material to make the base 100 and the locking member 200, the service life of the two can be greatly improved, and it can effectively ensure that the fixture can fix the stack structure during the sintering process. Of course, according to the selection of the actual situation, the base 100 and the locking member 200 can also be made of other materials with a relatively high temperature tolerance, and the present invention does not make special limitations here.

[0037] The above are only the preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent replacements, and improvements made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A fixture for manufacturing a piezoelectric actuator, characterized in that, It includes a base and a locking member. A groove for placing a target part is formed on the base. An opening is provided at the top of the groove. The target part is placed in the groove through the opening. The target part includes stacked target units. The target unit is a chip ceramic body. The target part is a stack structure formed by initially bonding multiple chip ceramic bodies together. The multiple chip ceramic bodies are stacked layer by layer in sequence, and adjacent two chip ceramic bodies are initially bonded by uncured glue. The same side of each target unit is closely attached to the bottom wall of the groove. A through hole corresponding to the groove and communicating with the groove is also formed on the base. One end of the locking member extends into the groove through the through hole and locks the target part in the groove; during the process of placing the fixture and the stack structure thereon in a sintering furnace for sintering to cure the glue, the multiple target units on the target part are aligned through the groove; The fixture includes multiple locking members. Multiple such grooves and multiple through holes are formed on the base. The multiple locking members correspond to the multiple grooves one by one. Each locking member extends into the groove through the corresponding through hole; Among them, when manufacturing a piezoelectric actuator using the fixture, multiple stack structures are respectively placed into the corresponding grooves at one time, and one end of each of the multiple locking members extends into the corresponding groove through the through hole and abuts against the stack structure to prevent the stack structure from detaching from the groove; then, the fixture and the stack structure thereon are placed in a sintering furnace for sintering to cure the glue; The length of the groove is 12 mm to 40 mm, the width of the groove is 3 mm to 10 mm, and the depth of the groove is 2 mm to 8 mm; The end face of the end of the locking member extending into the groove is polished on a plane, and the inner wall of the groove is polished on a plane; The temperature tolerable by the base and the locking member is greater than 1600 °C; The base and the locking member are both alumina ceramic parts.

2. The fixture according to claim 1, wherein The multiple grooves are distributed in an array.

3. The fixture according to claim 2, characterized in that, The multiple grooves are distributed in two columns on the surface of the base, and the multiple through holes are respectively arranged on the surfaces of the opposite sides of the base.

4. The fixture according to claim 1, characterized in that, The through hole is a threaded hole, and the locking member is in threaded fit with the through hole.

5. The fixture according to claim 4, characterized in that, The locking member is a screw, and the length of the screw rod of the screw is 13 mm to 23 mm.

Citation Information

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