A rolling stirring linear micro-anodic electrodeposition device

Abstract

The present invention discloses a rolling stirring linear micro-anode electrodeposition device, comprising a cathode substrate, an anode paddle, a linear micro-anode, an electrodeposition power supply and an electrolyte, characterized in that: it also comprises a rolling paddle. A groove is arranged at the bottom of the anode paddle. The rolling paddle comprises a circular rotating rod and a flexible brush wrapping the circular rotating rod. The rolling paddle is rotatably fixed in the groove, and the linear micro-anode is placed between two rolling paddles. The rotation axis of the rolling paddle is parallel to the linear micro-anode. The flexible brush is in slight contact with the cathode substrate. This device has better deposition localization, higher processing accuracy, faster deposition speed, higher processing efficiency, and better quality of electrodeposited parts.

Description

Technical Field

[0001] The invention belongs to the field of electrochemical processing, and in particular relates to a rolling stirring linear micro-anodal electrodeposition processing device. Background Art

[0002] Linear micro-anode scanning electrodeposition is a new type of electrodeposition processing method with a unique working mode and can achieve extremely high thickness uniformity (application number 201810456008.1). It achieves layer-by-layer stacking of metal layers by reciprocating linear motion of the linear micro-anode close to the cathode surface, thereby obtaining electrodeposited parts with extremely high thickness uniformity. However, the efficiency of electrodeposition processing based on a single linear micro-anode is very low and cannot meet application requirements well. Therefore, the researchers have developed a new mode in which multiple linear micro-anodes work in parallel, as described in the invention patents with application numbers 201910158272.7 and 201910310746.5, in order to achieve higher processing efficiency. However, the actual effect is still not ideal, mainly because: (1) The inert linear micro-anode located at the center of the lower surface of the stirring paddle is very easy to release oxygen and form a large number of bubbles due to its small area. These bubbles cannot be discharged in time due to the small processing gap and slow electrolyte flow rate, which will lead to a series of problems such as increased pinholes in the electrocast parts and slow deposition speed; (2) The mass transfer in the processing gap is slow, which not only limits the improvement of the limiting current density and the increase in the electrodeposition speed (processing efficiency), but also easily leads to various deposition defects. In addition, the existing linear micro-anode scanning electrodeposition method inevitably has the phenomenon of current overflow, which seriously reduces the localization and processing accuracy of the electrodeposition process. Therefore, it is necessary to provide a linear micro-anode scanning electrodeposition processing device with better localization and higher electrodeposition efficiency. Summary of the invention

[0003] The present invention aims to provide a new rolling stirring linear micro-anodic electrodeposition processing device to further increase the deposition speed, reduce deposition defects and improve processing quality.

[0004] A rolling stirring linear micro-anode electrodeposition device comprises a cathode substrate, an anode paddle, a linear micro-anode, an electrodeposition power supply and an electrolyte, and is characterized in that: it also comprises a rolling paddle; a groove is arranged at the bottom of the anode paddle; the rolling paddle comprises a circular rotating rod and a flexible brush wrapping the circular rotating rod; the rolling paddle is rotatably fixed in the groove; the linear micro-anode is placed between two rolling paddles; the rotation axis of the rolling paddle is parallel to the linear micro-anode; and the flexible brush is in slight contact with the cathode substrate.

[0005] The linear micro-anode is fixed to the bottom of the anode paddle, and its lowermost edge is flush with the bottom of the anode paddle.

[0006] The horizontal distance between the rolling paddle and the linear micro-anode is adjustable.

[0007] The anode paddle can perform reciprocating linear motion relative to the cathode substrate.

[0008] The rolling paddles rotate in the same direction, with adjustable speed and variable direction. The purpose of the rolling paddles rotating in the same direction is to achieve a continuous process of electrolyte entering and exiting the bottom of the anode paddle, to transfer the solution, to timely update the electrolyte between the electrodes, and to promote product removal.

[0009] The material of the circular rotating rod is polypropylene.

[0010] The material of the flexible brush is polypropylene.

[0011] The negative electrode of the electrodeposition power source is connected to the cathode substrate, and the positive electrode is connected to the linear micro-anode.

[0012] Compared with the prior art, the present invention has the following notable features and advantages:

[0013] 1. Better deposition localization and higher processing accuracy.

[0014] The electrically insulating rolling paddles arranged on both sides of the linear micro-anode can effectively shield the electric field lines and effectively prevent the current from overflowing to the unintended deposition area, making the instantaneous electrodeposition area smaller, the deposition localization better, and the processing accuracy higher.

[0015] 2. Faster deposition speed and higher processing efficiency.

[0016] In this patent, the rolling paddle can serve as an external power source for stirring the electrolyte in the electrodeposition microspace, and provide power for the external electrolyte to continuously and rapidly enter and quickly flow out of the electrodeposition microspace at the bottom of the anode paddle in the same direction, which greatly improves the mass transfer rate and effectively solves the mass transfer limitation problem existing in the existing linear micro-anode scanning electrodeposition. Good mass transfer conditions can timely replenish the metal cations required for the electrodeposition reaction, increase the limiting current density, and accelerate the deposition rate.

[0017] 3. The quality of electrodeposited parts is better.

[0018] During the electrochemical reaction, oxygen evolution will inevitably occur at the inert anode, and when the mass transfer conditions are poor, hydrogen will also be precipitated on the cathode surface. These precipitated hydrogen and oxygen bubbles are easily adsorbed on the surfaces of the anode and cathode under poor mass transfer conditions. On the one hand, their presence will cause a large number of pinhole defects in the electrodeposited parts. When there are a large number of pinhole defects, they will block the processing gap, resulting in serious mass transfer restriction, and then cause a series of electrodeposition defects. The patent of this invention introduces a rolling paddle for forced convection mass transfer, which avoids the mass transfer restriction phenomenon existing in the prior art and greatly improves the quality of electrodeposited parts. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a cross-sectional view of the device of the present invention.

[0020] Figure 2 Schematic diagram of the electric field line distribution without a rolling paddle.

[0021] Figure 3 Schematic diagram of the electric field line distribution of the present invention.

[0022] Figure 4 Schematic diagram of a rolling paddle promoting electrolyte flow.

[0023] In the figure, 1. cathode substrate; 2. anode paddle; 2-1. groove; 3. rolling paddle; 3-1. circular rotating rod; 3-2. flexible brush; 4. linear micro anode; 5. electrodeposition power supply; 6. electrolyte. DETAILED DESCRIPTION

[0024] The present invention is further described below in conjunction with the accompanying drawings.

[0025] like Figure 1 As shown, the device of the present invention includes a cathode substrate 1, an anode paddle 2, a linear micro-anode 4, an electrodeposition power source 5 and an electrolyte 6, and also includes a rolling paddle 3. A groove 2-1 is provided at the bottom of the anode paddle 2. The rolling paddle 3 includes a circular rotating rod 3-1 made of polypropylene and a flexible brush 3-2 made of polypropylene that wraps the circular rotating rod 3-1, and the rolling paddle 3 is rotatably fixed in the groove 2-1. The linear micro-anode 4 is placed between the two rolling paddles 3, and the rotation axis of the rolling paddle 3 is parallel to the linear micro-anode 4. The flexible brush 3-2 is in slight contact with the cathode substrate 1.

[0026] The linear micro-anode 4 is fixed to the bottom of the anode paddle 2, and its lowermost edge is flush with the bottom of the anode paddle 2. The outer diameter of the rolling paddle 3 and the horizontal distance between the linear micro-anode 4 are adjusted within the range of 5 to 20 mm. The negative electrode of the electrodeposition power supply 5 is connected to the cathode substrate 1, and the positive electrode is connected to the linear micro-anode 4.

[0027] The electrodeposition power source 5 is turned on, and the anode paddle 2 makes a reciprocating linear motion relative to the cathode substrate 1. The rolling paddle 3 has the same direction of rotation, and the rotation speed of the rolling paddle 3 is adjusted so that the maximum linear speed of the rolling paddle 3 is greater than the speed of the reciprocating linear motion. When the deposited layer reaches the expected thickness requirement, the electrodeposition power source 5 is turned off to obtain the deposited layer.

Claims

1. A rolling stirring linear micro-anode electrodeposition device, comprising a cathode substrate (1), an anode paddle (2), a linear micro-anode (4), an electrodeposition power source (5) and an electrolyte (6), characterized in that: It also includes a rolling paddle (3); a groove (2-1) is arranged at the bottom of the anode paddle (2); the rolling paddle (3) includes a circular rotating rod (3-1) and a flexible brush (3-2) wrapping the circular rotating rod (3-1); the rolling paddle (3) is rotatably fixed in the groove (2-1); the linear micro-anode (4) is placed between the two rolling paddles (3); the rotation axis of the rolling paddle (3) is parallel to the linear micro-anode (4); and the flexible brush (3-2) is in slight contact with the cathode substrate (1).

2. The rolling stirring linear micro-anodic electrodeposition device according to claim 1, characterized in that: The linear micro-anode (4) is fixed to the bottom of the anode paddle (2), and its lowermost edge is flush with the bottom of the anode paddle (2).

3. The rolling stirring linear micro-anodic electrodeposition device according to claim 1, characterized in that: The horizontal distance between the rolling paddle (3) and the linear micro-anode (4) is adjustable.

4. The rolling stirring linear micro-anodic electrodeposition device according to claim 1, characterized in that: The anode paddle (2) can perform reciprocating linear motion relative to the cathode base (1).

5. The rolling stirring linear micro-anodic electrodeposition device according to claim 1, characterized in that: The rolling paddles (3) have the same rotation direction, and the rotation speed and direction are adjustable.

6. The rolling stirring linear micro-anodic electrodeposition device according to claim 1, characterized in that: The circular rotating rod (3-1) is made of polypropylene.

7. The rolling stirring linear micro-anodic electrodeposition device according to claim 1, characterized in that: The flexible brush (3-2) is made of polypropylene.

8. The rolling stirring linear micro-anodic electrodeposition device according to claim 1, characterized in that: The negative electrode of the electrodeposition power source (5) is connected to the cathode substrate (1), and the positive electrode is connected to the linear micro-anode (4).

9. The rolling stirring linear micro-anodic electrodeposition device according to claim 1, characterized in that: The flexible brush (3-2) is a sleeve with fluff on the surface and a certain elasticity.

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