Handling robot and cleaning apparatus

Abstract

The application provides a carrying manipulator and a cleaning device, wherein the carrying manipulator comprises a workbench, a frame, a first lifting assembly, a first driving assembly, a second lifting assembly, a second driving assembly and a gripper assembly; the frame is slidingly arranged on the workbench; one side of the frame is provided with a first guide rail, and the other side of the frame is provided with a second guide rail; the first lifting assembly is slidingly arranged on the first guide rail; the first driving assembly is connected to the first lifting assembly; the second lifting assembly is slidingly arranged on the second guide rail; the second driving assembly is connected to the second lifting assembly; and the gripper assembly is connected to the first lifting assembly and the second lifting assembly. The carrying manipulator can adjust the position and the inclination angle of the gripper assembly during the carrying of the workpiece, facilitates the gripper assembly to grasp the workpiece to be carried, and can grasp workpieces to be carried with different specifications and shapes. When the workpiece needs to be cleaned, the cleaning angle of the workpiece can be adjusted, the workpiece can be thoroughly cleaned, and the cleaning efficiency can be improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor equipment, in particular to a carrying manipulator and a cleaning device. BACKGROUND

[0002] In the field of semiconductors, it is necessary to clean furnace pipes. Currently, conventional furnace pipe cleaning is completed by pickling, water washing and drying. In the cleaning process, the furnace pipes are horizontally or obliquely arranged on the carrying manipulator, and the furnace pipes remain in this state during the entire cleaning and carrying process. In the furnace pipe cleaning process, there are dead angles, and different specifications of furnace pipes cannot be cleaned in a targeted manner, resulting in poor cleaning effect of the furnace pipes. SUMMARY

[0003] The present application aims to at least solve one of the technical problems existing in the prior art.

[0004] To this end, the first aspect of the present application provides a carrying manipulator.

[0005] The second aspect of the present application provides a cleaning device.

[0006] Therefore, according to the first aspect of the present application, a carrying manipulator is provided, comprising: a workbench; a frame, the frame being slidingly arranged on the workbench, one side of the frame being provided with a first guide rail, and the other side of the frame being provided with a second guide rail; a first lifting assembly, the first lifting assembly being slidingly arranged on the first guide rail; a first driving assembly, the first driving assembly being connected to the first lifting assembly and being used to drive the first lifting assembly to move on the first guide rail; a second lifting assembly, the second lifting assembly being slidingly arranged on the second guide rail; a second driving assembly, the second driving assembly being connected to the second lifting assembly and being used to drive the second lifting assembly to move on the second guide rail; and a gripper assembly, the gripper assembly being connected to the first lifting assembly and the second lifting assembly.

[0007] The carrying manipulator provided by the present application can adjust the position and inclination angle of the gripper assembly by adjusting the positions of the first lifting assembly and the second lifting assembly, so as to facilitate the gripper assembly to grasp the workpiece to be carried, and can grasp workpieces to be carried of different specifications and shapes. After the gripper assembly grasps the workpiece to be carried, the displacement of the workpiece to be carried can be realized by sliding the frame on the workbench. It can be understood that the carrying manipulator as a whole can also be moved by other devices.

[0008] The carrying manipulator can drive the first lifting assembly to move on the first guide rail through the first driving assembly to adjust the position of the first lifting assembly, drive the second lifting assembly to move on the second guide rail through the second driving assembly to adjust the position of the second lifting assembly, and then adjust the cleaning angle of the workpiece, so that the workpiece can be thoroughly cleaned, and the cleaning efficiency can be improved.

[0009] In addition, the carrying manipulator in the above technical solution can further have the following additional technical features.

[0010] In the above technical solution, further, the first lifting assembly comprises: a first sliding block slidingly arranged on the first guide rail; a first fixed plate connected to the first sliding block; a first lifting rod, one end of the first lifting rod being hingedly connected to the first fixed plate; and a first connecting piece arranged at the other end of the first lifting rod; the second lifting assembly comprises: a second sliding block slidingly arranged on the second guide rail; a second fixed plate connected to the second sliding block; a second lifting rod, one end of the second lifting rod being hingedly connected to the second fixed plate; and a second connecting piece arranged at the other end of the second lifting rod; wherein the first sliding block is connected to the first driving assembly, the second sliding block is connected to the second driving assembly, and the gripper assembly is connected to the first connecting piece and the second connecting piece.

[0011] In the technical solution, the first lifting assembly and the second lifting assembly are further provided.

[0012] Specifically, the first lifting assembly comprises the first sliding block, the first fixed plate, the first lifting rod and the first connecting piece. The first sliding block is arranged to achieve the sliding connection between the first lifting assembly and the first guide rail; the first fixed plate is arranged to provide a mounting position for the first lifting rod, and the first lifting rod is hingedly connected to the first fixed plate, so that the first lifting rod can be inclined relative to the frame to facilitate the adjustment of the angle of the gripper assembly, and then the angle of the workpiece fixed by the gripper assembly can be adjusted; and the first connecting piece is arranged to facilitate the connection of the first lifting rod to the gripper assembly.

[0013] Specifically, the second lifting assembly comprises the second sliding block, the second fixed plate, the second lifting rod and the second connecting piece. The second sliding block is arranged to achieve the sliding connection between the second lifting assembly and the second guide rail; the second fixed plate is arranged to provide a mounting position for the second lifting rod, and the second lifting rod is hingedly connected to the second fixed plate, so that the second lifting rod can be inclined relative to the frame to facilitate the adjustment of the angle of the gripper assembly, and then the angle of the workpiece fixed by the gripper assembly can be adjusted; and the second connecting piece is arranged to facilitate the connection of the second lifting rod to the gripper assembly.

[0014] Specifically, the first lifting assembly can have the same structure as the second lifting assembly, so as to facilitate the machining and assembly of the carrying manipulator.

[0015] In any of the above technical solutions, further, the first driving assembly comprises: a first motor arranged on the frame; a first driving gear connected to the output end of the first motor; a first driven gear meshed with the first driving gear; a first lead screw connected to the first driven gear; a third sliding block sleeved on the first lead screw and connected to the first fixed plate; and the second driving assembly comprises: a second motor arranged on the frame; a second driving gear connected to the output end of the second motor; a second driven gear meshed with the second driving gear; a second lead screw connected to the second driven gear; and a fourth sliding block sleeved on the second lead screw and connected to the second fixed plate.

[0016] In the technical solution, the composition of the first driving assembly and the second driving assembly is further provided.

[0017] Specifically, the first driving assembly comprises: a first motor, a first driving gear, a first driven gear, a first lead screw and a third sliding block. The first motor is turned on to drive the first driving gear to rotate, the first driving gear drives the first driven gear to rotate, the first driven gear drives the first lead screw to rotate, the first lead screw rotates to cause the third sliding block to displace, and then the third sliding block drives the first sliding block to move on the first guide rail through the first fixed plate, thereby realizing the movement of the first lifting assembly.

[0018] Specifically, the second driving assembly comprises: a second motor, a second driving gear, a second driven gear, a second lead screw and a fourth sliding block. The second motor is turned on to drive the second driving gear to rotate, the second driving gear drives the second driven gear to rotate, the second driven gear drives the second lead screw to rotate, the second lead screw rotates to cause the fourth sliding block to displace, and then the fourth sliding block drives the second sliding block to move on the second guide rail through the second fixed plate, thereby realizing the movement of the second lifting assembly.

[0019] Specifically, the first driving assembly can have the same structure as the second driving assembly, so as to facilitate the processing and assembly of the carrying manipulator.

[0020] In any of the above technical solutions, further, the gripper assembly comprises: a cross beam connected to the first lifting assembly and the second lifting assembly; a hook connected to one end of the cross beam; and a limiting plate arranged at both ends of the cross beam.

[0021] In the technical scheme, the specific structure of the gripper assembly is further provided, the gripper assembly comprises a cross beam, a hook and a limiting plate, the cross beam is arranged to facilitate the connection of the gripper assembly with the first lifting assembly and the second lifting assembly, the cross beam, the hook and the limiting plate are arranged to facilitate the fixation of the tubular workpiece, and the gripper assembly can be applied to the fixation of tubular workpieces of different shapes and specifications, and is particularly suitable for the fixation of furnace pipes of different specifications in the semiconductor field, the handling of furnace pipes of different specifications can be realized by using one handling mechanical gripper, the work efficiency is improved, and the production cost is reduced.

[0022] Specifically, in the fixation process of the tubular workpiece, the position of the first lifting assembly and the second lifting assembly is adjusted, so that the cross beam is above the tubular workpiece, then one end of the hook is connected to the cross beam, the tubular workpiece is arranged on the hook, the hook can support and fix the tubular workpiece, and the limiting plate is arranged at both ends of the cross beam to axially position the tubular workpiece and prevent the tubular workpiece from shaking.

[0023] Specifically, the cross section of the hook is C-shaped, and the contact surface of the hook and the tubular workpiece is adapted to the shape of the tubular workpiece. Further, in order to improve the fixing strength of the gripper assembly, the hook can be multiple.

[0024] Specifically, the limiting plate can be multiple, and the structures of the multiple limiting plates are different to be suitable for tubular workpieces of different shapes, for example, the lengths of the multiple limiting plates are different to be suitable for tubular workpieces of different diameters.

[0025] In any of the above technical schemes, further comprising: a first bolt and a second bolt, the cross beam is provided with at least two connecting holes, the first bolt passes through one of the at least two connecting holes and one end of the first lifting assembly, and the second bolt passes through another of the at least two connecting holes and one end of the second lifting assembly; and / or a pressing plate, one end of the hook is hung on the cross beam, and the pressing plate is connected to the hook and the cross beam; a limiting block, a bayonet is formed on the limiting plate, the limiting plate is clamped to the cross beam through the bayonet, and the limiting block is arranged on the cross beam to limit the limiting plate.

[0026] In the technical scheme, the first bolt and the second bolt are further included, the connecting holes are arranged on the cross beam, so that the cross beam can be stably connected to one end of the first lifting assembly and the second lifting assembly.

[0027] In the technical scheme, the pressing plate is further included, the pressing plate is arranged to be connected to the hook and the cross beam to fix the hook, so as to avoid the hook from falling off and causing accidents during the cleaning or handling of the workpiece.

[0028] In the technical scheme, the limiting block is further included, the limiting block is arranged to avoid the limiting plate from falling off through the cross beam, and the reliability of the handling mechanical gripper is improved.

[0029] In any of the above technical solutions, further, the workbench is of a frame structure, the frame is arranged at one side of the workbench, the gripper assembly is arranged at the other side of the workbench, the first guide rail and the second guide rail are arranged along the length direction of the frame, one end of the first lifting assembly passes through the workbench and is connected to the gripper assembly, and one end of the second lifting assembly passes through the workbench and is connected to the gripper assembly.

[0030] In the technical solution, further, the workbench is of a frame structure, so that one end of the first lifting assembly and the second lifting assembly can pass through the workbench and be connected to the gripper assembly, the first lifting assembly and the second lifting assembly do not need to be connected to the gripper assembly through the two sides of the workbench, the width of the carrying manipulator can be reduced, and the carrying manipulator is suitable for different environments.

[0031] In the technical solution, further, the arrangement direction of the first guide rail and the second guide rail is provided, the first guide rail and the second guide rail are arranged along the length direction of the frame, so as to facilitate the first lifting assembly and the second lifting assembly to drive the gripper assembly to lift relative to the workbench.

[0032] In any of the above technical solutions, further, the third slide rail is arranged on the workbench along the length direction of the workbench, the frame is slidably connected to the third slide rail, the third driving assembly is connected to the frame and is used to drive the frame to move on the third slide rail, the third driving assembly comprises a rack and a third motor, the rack is arranged on the workbench along the length direction of the workbench, and the output end of the third motor is engaged with the rack through a transmission gear.

[0033] In the technical solution, further, the third slide rail and the third driving assembly are provided, so as to facilitate the frame to slide on the workbench and facilitate the carrying of the workpiece.

[0034] In the technical solution, further, the specific composition of the third driving assembly is provided, the third driving assembly comprises the third motor and the rack, the third motor is started, the third driving motor drives the transmission gear to rotate, the transmission gear is engaged with the rack, and the frame can be driven to move on the rack.

[0035] In any of the above technical solutions, further, the anticorrosive layer is arranged on the surface of the first lifting assembly, the second lifting assembly and the gripper assembly, and the anticorrosive layer is made of polyvinylidene fluoride or polyvinyl chloride material.

[0036] In the technical solution, further, the anticorrosive layer is provided, and the material of the anticorrosive layer is provided, so that when the carrying manipulator grasps the workpiece to move or the carrying manipulator grasps the workpiece to clean the workpiece, the liquid with corrosive property in the working area will not damage the carrying manipulator, and the service life of the carrying manipulator is improved.

[0037] In any of the above technical solutions, further comprising: a first position detection member arranged on the workbench, configured to obtain position information of the frame; a second position detection member arranged on the frame, configured to obtain position information of the first lifting assembly and position information of the second lifting assembly; and / or a controller connected to the first driving assembly and the second driving assembly; the controller is capable of controlling the first driving assembly and the second driving assembly to drive synchronously or to drive asynchronously.

[0038] In the technical solution, the first position detection member and the second position detection member are further arranged, the position information of the frame can be obtained through the arrangement of the first position detection member, the position of the frame moving can be obtained, and the accurate carrying of the workpiece can be realized; the position information of the first lifting assembly and the position information of the second lifting assembly can be obtained through the arrangement of the second position detection member, and then the tilt angle of the gripper assembly can be obtained, and the accurate grabbing of different workpieces can be realized.

[0039] In the technical solution, the controller is further included, the controller is connected to the first driving assembly and the second driving assembly, the controller is capable of controlling the first driving assembly and the second driving assembly to drive synchronously or to drive asynchronously, the first lifting assembly and the second lifting assembly are raised or lowered relative to the frame at the same speed in the case that the controller controls the first driving assembly and the second driving assembly to drive synchronously, and the workpiece can be in a horizontal state; in the case that the controller controls the first driving assembly and the second driving assembly to drive asynchronously, the first lifting assembly and the second lifting assembly are raised or lowered relative to the frame at different speeds, and the workpiece can be in an inclined state.

[0040] Further, the workpiece can be left inclined or right inclined in the workpiece cleaning process, and the cleaning of the workpiece is facilitated.

[0041] According to the second aspect of the present application, a cleaning device is provided, comprising the carrying manipulator of any of the above technical solutions.

[0042] The cleaning device provided by the present application has all the beneficial technical effects of the carrying manipulator.

[0043] Specifically, the cleaning device comprises a spray head and a liquid supply pipe, one end of the liquid supply pipe is connected to a liquid storage unit, and the other end is connected to the spray head. The liquid storage unit can store liquid for cleaning the workpiece, and the liquid supplied to the spray head through the liquid supply pipe can clean the workpiece grabbed by the carrying manipulator.

[0044] Additional aspects and advantages of the present application will become apparent from the following description section, or will be appreciated by those skilled in the art by practice of the present application. BRIEF DESCRIPTION OF DRAWINGS

[0045] The above and / or additional aspects and advantages of the present application will become apparent and more readily appreciated from the following description, taken in conjunction with the following drawings of which:

[0046] Figure 1 A structural schematic diagram of a carrying manipulator provided according to one embodiment of the present application is shown;

[0047] Figure 2 is attached Figure 1 An enlarged schematic diagram at A in FIG. 4 is shown;

[0048] Figure 3 A front view of a carrying manipulator provided according to one embodiment of the present application is shown;

[0049] Figure 4 A side view of a carrying manipulator provided according to one embodiment of the present application is shown;

[0050] Figure 5 A structural schematic diagram of a cross beam of a carrying manipulator provided according to one embodiment of the present application is shown.

[0051] wherein, Figures 1 to 5 The correspondence between the reference signs and the component names in FIG. 4 is as follows:

[0052] 2 workbench, 4 frame, 6 first lifting assembly, 8 first driving assembly, 10 second lifting assembly, 12 second driving assembly, 14 gripper assembly, 16 first bolt, 18 second bolt, 20 pressing plate, 22 limiting block, 26 third sliding rail, 28 third driving assembly, 30 piece to be cleaned;

[0053] 402 first guide rail, 404 second guide rail;

[0054] 602 first sliding block, 604 first fixed plate, 606 first lifting rod, 608 first connecting piece;

[0055] 802 first motor, 804 first driving gear, 806 first driven gear, 808 first lead screw, 810 third sliding block;

[0056] 102 second sliding block, 104 second fixed plate, 106 second lifting rod, 108 second connecting piece;

[0057] 122 second motor, 124 second driving gear, 126 second driven gear;

[0058] 142 cross beam, 144 hook, 146 limiting plate;

[0059] 282 rack, 284 third motor, 286 transmission gear. DETAILED DESCRIPTION

[0060] To better understand the above-mentioned objectives, features, and advantages of the present invention, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be noted that, unless otherwise specified, the embodiments and features described in these embodiments can be combined with each other.

[0061] Many specific details are set forth in the following description in order to provide a full understanding of the invention. However, the invention may also be practiced in other ways different from those described herein, and therefore the scope of protection of the invention is not limited to the specific embodiments disclosed below.

[0062] The following reference Figures 1 to 5 A handling robot and a cleaning device are described according to some embodiments of the present invention.

[0063] Example 1

[0064] like Figures 1 to 5 As shown, one embodiment of the present invention provides a handling robot, including: a worktable 2, a frame 4, a first lifting component 6, a first driving component 8, a second lifting component 10, a second driving component 12, and a gripper component 14.

[0065] The frame 4 is slidably mounted on the workbench 2. A first guide rail 402 is provided on one side of the frame 4, and a second guide rail 404 is provided on the other side. A first lifting component 6 is slidably mounted on the first guide rail 402. A first drive component 8 is connected to the first lifting component 6 and is used to drive the first lifting component 6 to move on the first guide rail 402. A second lifting component 10 is slidably mounted on the second guide rail 404. A second drive component 12 is connected to the second lifting component 10 and is used to drive the second lifting component 10 to move on the second guide rail 404. A gripper component 14 is connected to the first lifting component 6 and the second lifting component 10.

[0066] The handling robot provided by this invention, during the process of handling a workpiece, has its frame 4 slide onto the workpiece via the worktable 2. The first drive assembly 8 drives the first lifting assembly 6 to move on the first guide rail 402, adjusting the position of the first lifting assembly 6. The second drive assembly 12 drives the second lifting assembly 10 to move on the second guide rail 404, adjusting the position of the second lifting assembly 10. By adjusting the positions of the first lifting assembly 6 and the second lifting assembly 10, the position and tilt angle of the gripper assembly 14 can be adjusted, making it easier for the gripper assembly 14 to grasp the workpiece to be handled. It can grasp workpieces of different specifications and shapes. After the gripper assembly 14 grasps the workpiece to be handled, the workpiece can be moved by sliding the frame 4 on the worktable 2. It is understood that the handling robot can also be moved as a whole by other equipment.

[0067] The handling robot provided by the present invention can, when the workpiece fixed by the gripper assembly 14 needs to be cleaned, drive the first lifting assembly 6 to move on the first guide rail 402 through the first driving assembly 8 to adjust the position of the first lifting assembly 6, and drive the second lifting assembly 10 to move on the second guide rail 404 through the second driving assembly 12 to adjust the position of the second lifting assembly 10, thereby adjusting the cleaning angle of the workpiece, so as to facilitate thorough cleaning of the workpiece and improve cleaning efficiency.

[0068] Example 2

[0069] like Figures 1 to 5 As shown, one embodiment of the present invention provides a handling robot, including: a worktable 2, a frame 4, a first lifting component 6, a first driving component 8, a second lifting component 10, a second driving component 12, and a gripper component 14.

[0070] The frame 4 is slidably mounted on the workbench 2. A first guide rail 402 is provided on one side of the frame 4, and a second guide rail 404 is provided on the other side. A first lifting component 6 is slidably mounted on the first guide rail 402. A first drive component 8 is connected to the first lifting component 6 and is used to drive the first lifting component 6 to move on the first guide rail 402. A second lifting component 10 is slidably mounted on the second guide rail 404. A second drive component 12 is connected to the second lifting component 10 and is used to drive the second lifting component 10 to move on the second guide rail 404. A gripper component 14 is connected to the first lifting component 6 and the second lifting component 10.

[0071] like Figure 1 and Figure 2 As shown, the first lifting assembly 6 further includes: a first slider 602, slidably disposed on the first guide rail 402; a first fixing plate 604, connected to the first slider 602; a first lifting rod 606, one end of which is hinged to the first fixing plate 604; and a first connecting member 608, disposed at the other end of the first lifting rod 606. The second lifting assembly 10 includes: a second slider 102, slidably disposed on the second guide rail 404; a second fixing plate 104, connected to the second slider 102; a second lifting rod 106, one end of which is hinged to the second fixing plate 104; and a second connecting member 108, disposed at the other end of the second lifting rod 106. The first slider 602 is connected to the first driving assembly, the second slider 102 is connected to the second driving assembly, and the gripper assembly 14 is connected to the first connecting member 608 and the second connecting member 108.

[0072] In this embodiment, a first lifting component 6 and a second lifting component 10 are further provided.

[0073] Specifically, the first lifting assembly 6 includes a first slider 602, a first fixing plate 604, a first lifting rod 606, and a first connector 608. The first slider 602 enables a sliding connection between the first lifting assembly 6 and the first guide rail 402; the first fixing plate 604 provides an installation position for the first lifting rod 606, and the first lifting rod 606 is hinged to the first fixing plate 604, allowing the first lifting rod 606 to tilt relative to the frame 4 to facilitate adjustment of the angle of the gripper assembly 14, thereby adjusting the angle of the workpiece fixed by the gripper assembly 14; the first connector 608 facilitates the connection of the first lifting rod 606 to the gripper assembly 14.

[0074] Specifically, the second lifting assembly 10 includes a second slider 102, a second fixing plate 104, a second lifting rod 106, and a second connector 108. The second slider 102 enables a sliding connection between the second lifting assembly 10 and the second guide rail 404. The second fixing plate 104 provides an installation position for the second lifting rod 106. The second lifting rod 106 is hinged to the second fixing plate 104, allowing it to tilt relative to the frame 4, facilitating the adjustment of the angle of the gripper assembly 14, and thus the angle of the workpiece fixed by the gripper assembly 14. The second connector 108 facilitates the connection of the second lifting rod 106 to the gripper assembly 14.

[0075] Specifically, the first lifting component 6 can have the same structure as the second lifting component 10 to facilitate the processing and assembly of the handling robot.

[0076] Example 3

[0077] like Figures 1 to 5 As shown, one embodiment of the present invention provides a handling robot, including: a worktable 2, a frame 4, a first lifting component 6, a first driving component 8, a second lifting component 10, a second driving component 12, and a gripper component 14.

[0078] The frame 4 is slidably mounted on the workbench 2. A first guide rail 402 is provided on one side of the frame 4, and a second guide rail 404 is provided on the other side. A first lifting component 6 is slidably mounted on the first guide rail 402. A first drive component 8 is connected to the first lifting component 6 and is used to drive the first lifting component 6 to move on the first guide rail 402. A second lifting component 10 is slidably mounted on the second guide rail 404. A second drive component 12 is connected to the second lifting component 10 and is used to drive the second lifting component 10 to move on the second guide rail 404. A gripper component 14 is connected to the first lifting component 6 and the second lifting component 10.

[0079] like Figure 1 and Figure 2As shown, further, the first lifting assembly 6 comprises: a first sliding block 602 slidingly arranged on the first guide rail 402; a first fixed plate 604 connected to the first sliding block 602; a first lifting rod 606, one end of the first lifting rod 606 being hingedly connected to the first fixed plate 604; a first connecting piece 608 arranged at the other end of the first lifting rod 606; the second lifting assembly 10 comprises: a second sliding block 102 slidingly arranged on the second guide rail 404; a second fixed plate 104 connected to the second sliding block 102; a second lifting rod 106, one end of the second lifting rod 106 being hingedly connected to the second fixed plate 104; a second connecting piece 108 arranged at the other end of the second lifting rod 106; wherein the first sliding block 602 is connected to the first driving assembly 8, the second sliding block 102 is connected to the second driving assembly 12, and the gripper assembly 14 is connected to the first connecting piece 608 and the second connecting piece 108.

[0080] As shown in Figure 1 and Figure 2 As shown, further, the first driving assembly 8 comprises: the first driving assembly 8 comprises: a first motor 802 arranged on the frame 4; a first driving gear 804, the output end of the first motor 802 being connected to the first driving gear 804; a first driven gear 806 meshing with the first driving gear 804; a first lead screw 808 connected to the first driven gear 806; a third sliding block 810, the third sliding block 810 being sleeved on the first lead screw 808, the third sliding block 810 being connected to the first fixed plate 604; the second driving assembly 12 comprises: a second motor 122 arranged on the frame 4; a second driving gear 124, the output end of the second motor 122 being connected to the second driving gear 124; a second driven gear 126 meshing with the second driving gear 124; a second lead screw connected to the second driven gear 126; a fourth sliding block, the fourth sliding block being sleeved on the second lead screw, the fourth sliding block being connected to the second fixed plate 104.

[0081] In this embodiment, the composition of the first driving assembly 8 and the second driving assembly 12 is further provided.

[0082] Specifically, the first driving assembly 8 comprises: the first motor 802, the first driving gear 804, the first driven gear 806, the first lead screw 808 and the third sliding block 810, the first motor 802 is started to drive the first driving gear 804 to rotate, the first driving gear 804 drives the first driven gear 806 to rotate, the first driven gear 806 drives the first lead screw 808 to rotate, the first lead screw 808 drives the third sliding block 810 to displace, and then the third sliding block 810 drives the first sliding block 602 to move on the first guide rail 402 through the first fixed plate 604, realizing the movement of the first lifting assembly 6.

[0083] Specifically, the second drive assembly 12 includes a second motor 122, a second drive gear 124, a second driven gear 126, a second lead screw, and a third slider 810. The second motor 122 drives the second drive gear 124 to rotate, which in turn drives the second driven gear 126 to rotate. The second driven gear 126 then drives the second lead screw to rotate, which in turn causes the fourth slider to move. The fourth slider then moves the second slider 102 on the second guide rail 404 via the second fixed plate 104, thus moving the second lifting assembly 10.

[0084] Specifically, the first drive component 8 can have the same structure as the second drive component 12 to facilitate the processing and assembly of the handling robot.

[0085] Example 4

[0086] like Figures 1 to 5 As shown, one embodiment of the present invention provides a handling robot, including: a worktable 2, a frame 4, a first lifting component 6, a first driving component 8, a second lifting component 10, a second driving component 12, and a gripper component 14.

[0087] The frame 4 is slidably mounted on the workbench 2. A first guide rail 402 is provided on one side of the frame 4, and a second guide rail 404 is provided on the other side. A first lifting component 6 is slidably mounted on the first guide rail 402. A first drive component 8 is connected to the first lifting component 6 and is used to drive the first lifting component 6 to move on the first guide rail 402. A second lifting component 10 is slidably mounted on the second guide rail 404. A second drive component 12 is connected to the second lifting component 10 and is used to drive the second lifting component 10 to move on the second guide rail 404. A gripper component 14 is connected to the first lifting component 6 and the second lifting component 10.

[0088] like Figure 3 and Figure 4 As shown, the gripper assembly 14 further includes: a crossbeam 142 connected to the first lifting assembly 6 and the second lifting assembly 10; a hook 144, one end of which is connected to the crossbeam 142; and a limiting plate 146 disposed at both ends of the crossbeam 142.

[0089] In this embodiment, the specific structure of the gripper assembly 14 is further provided. The gripper assembly 14 includes a crossbeam 142, a hook 144, and a limiting plate 146. The crossbeam 142 facilitates the connection between the gripper assembly 14 and the first lifting assembly 6 and the second lifting assembly 10. The crossbeam 142, hook 144, and limiting plate 146 facilitate the fixing of tubular workpieces. It is applicable to fixing tubular workpieces of different shapes and specifications. In the semiconductor field, it is particularly suitable for fixing furnace tubes of different specifications. Different specifications of furnace tubes can be transported by a single handling mechanical gripper, which improves work efficiency and reduces production costs.

[0090] Specifically, during the fixing process of the tubular workpiece, the positions of the first lifting component 6 and the second lifting component 10 are adjusted so that the crossbeam 142 is above the tubular workpiece. Then, one end of the hook 144 is connected to the crossbeam 142, and the tubular workpiece is placed on the hook 144. The hook 144 can support and fix the tubular workpiece. The limiting plate 146 is placed at both ends of the crossbeam 142 to axially position the tubular workpiece and prevent it from shaking.

[0091] Specifically, the cross-section of the hook 144 is C-shaped, and the contact surface between the hook 144 and the tubular workpiece is adapted to the shape of the tubular workpiece. Furthermore, in order to improve the fixing strength of the gripper assembly 14, there can be multiple hooks 144.

[0092] Specifically, there can be multiple limiting plates 146, and the structures of the multiple limiting plates 146 are different to suit tubular workpieces of different shapes. For example, the lengths of the multiple limiting plates 146 are different to suit tubular workpieces of different diameters.

[0093] Example 5

[0094] like Figures 1 to 5 As shown, one embodiment of the present invention provides a handling robot, including: a worktable 2, a frame 4, a first lifting component 6, a first driving component 8, a second lifting component 10, a second driving component 12, and a gripper component 14.

[0095] The frame 4 is slidably mounted on the workbench 2. A first guide rail 402 is provided on one side of the frame 4, and a second guide rail 404 is provided on the other side. A first lifting component 6 is slidably mounted on the first guide rail 402. A first drive component 8 is connected to the first lifting component 6 and is used to drive the first lifting component 6 to move on the first guide rail 402. A second lifting component 10 is slidably mounted on the second guide rail 404. A second drive component 12 is connected to the second lifting component 10 and is used to drive the second lifting component 10 to move on the second guide rail 404. A gripper component 14 is connected to the first lifting component 6 and the second lifting component 10.

[0096] like Figure 4and Figure 5 As shown in the figure, further, the gripper assembly 14 comprises: a crossbeam 142 connected to the first lifting assembly 6 and the second lifting assembly 10; a hook 144, one end of which is connected to the crossbeam 142; and a limiting plate 146 arranged at both ends of the crossbeam 142.

[0097] As shown in the figure, further, the gripper assembly 14 comprises: a crossbeam 142 connected to the first lifting assembly 6 and the second lifting assembly 10; a hook 144, one end of which is connected to the crossbeam 142; and a limiting plate 146 arranged at both ends of the crossbeam 142. Figure 4 As shown in the figure, further, the gripper assembly 14 comprises: a crossbeam 142 connected to the first lifting assembly 6 and the second lifting assembly 10; a hook 144, one end of which is connected to the crossbeam 142; and a limiting plate 146 arranged at both ends of the crossbeam 142.

[0098] In this embodiment, further comprising the first bolt 16 and the second bolt 18, by opening the connecting hole on the crossbeam 142, the crossbeam 142 can be stably connected to one end of the first lifting assembly 6 and the second lifting assembly 10.

[0099] In this embodiment, further comprising the pressing plate 20, by connecting the hook 144 and the crossbeam 142 through the setting of the pressing plate 20, the hook 144 is fixed to avoid accidents caused by the hook 144 falling off during the process of workpiece cleaning or carrying.

[0100] In this embodiment, further comprising the limiting block 22, by setting the limiting block 22, the limiting plate 146 can be prevented from falling off through the crossbeam 142, and the reliability of the carrying manipulator is improved.

[0101] Embodiment six

[0102] As shown in the figure, further, on the basis of any one of the embodiments one to five, the workbench 2 is of a frame structure, the frame 4 is arranged at one side of the workbench 2, the gripper assembly 14 is located at the other side of the workbench 2, the first guide rail 402 and the second guide rail 404 are arranged along the length direction of the frame 4, one end of the first lifting assembly 6 passes through the workbench 2 and is connected to the gripper assembly 14, and one end of the second lifting assembly 10 passes through the workbench 2 and is connected to the gripper assembly 14. Figures 1 to 5

[0103] ​In this embodiment, the workbench 2 is further designed as a frame structure, allowing one end of the first lifting component 6 and the second lifting component 10 to pass through the workbench 2 and connect to the gripper component 14. The first lifting component 6 and the second lifting component 10 do not need to be connected to the gripper component 14 through the two sides of the workbench 2, which reduces the width of the handling robot and makes it suitable for different open environments.

[0104] In this embodiment, the first guide rail 402 and the second guide rail 404 are further provided in a setting direction. The first guide rail 402 and the second guide rail 404 are set along the length direction of the frame 4 to facilitate the first lifting component 6 and the second lifting component 10 to drive the gripper component 14 to rise and fall relative to the worktable 2.

[0105] Example 7

[0106] like Figures 1 to 5 As shown, based on any one of the embodiments from Embodiment 1 to Embodiment 5, it further includes: a third slide rail 26, which is disposed on the worktable 2 along the length direction of the worktable 2, and the worktable 2 is slidably connected to the third slide rail 26; and a third drive assembly 28, which is connected to the frame 4 and is used to drive the frame 4 to move on the third slide rail 26.

[0107] In this embodiment, a third slide rail 26 and a third drive assembly 28 are further included. The arrangement of the third slide rail 26 and the third drive assembly 28 facilitates the sliding of the frame 4 on the worktable 2, which facilitates the handling of the workpiece.

[0108] Example 8

[0109] like Figures 1 to 5 As shown, based on any one of the embodiments from Embodiment 1 to Embodiment 5, it further includes: a third slide rail 26, which is disposed on the worktable 2 along the length direction of the worktable 2, and the frame 4 is slidably connected to the third slide rail 26; and a third drive assembly 28, which is connected to the frame 4 and is used to drive the frame 4 to move on the third slide rail 26.

[0110] like Figure 4 As shown, the third drive assembly 28 further includes: a rack 282, which is disposed on the worktable 2 along the length direction of the worktable 2; and a third motor 284, which is disposed on the frame 4, and the output end of the third motor 284 meshes with the rack 282 through a transmission gear 286.

[0111] In this embodiment, the specific composition of the third drive component 28 is further provided. The third drive component 28 includes a third motor 284 and a rack 282. When the third motor 284 is turned on, the third drive motor drives the transmission gear 286 to rotate. The transmission gear 286 meshes with the rack 282, which can drive the frame 4 to move on the rack 282.

[0112] Example 9

[0113] like Figures 1 to 5 As shown, based on any one of Embodiments 1 to 5, it further includes: an anti-corrosion layer, which is disposed on the surface of the first lifting component 6, the second lifting component 10 and the gripper component 14; wherein the anti-corrosion layer is made of polyvinylidene fluoride or polyvinyl chloride material.

[0114] In this embodiment, an anti-corrosion layer is further included, and the material selection for the anti-corrosion layer is provided. By determining the anti-corrosion layer and the material selection, when the handling robot grabs and moves the workpiece or when the handling robot grabs the workpiece for cleaning, the corrosive liquid in the working area will not damage the handling robot, thereby improving the service life of the handling robot.

[0115] Example 10

[0116] like Figures 1 to 5 As shown, based on any one of Embodiments 1 to 5, it further includes: a first position detection component, disposed on the workbench 2, for acquiring the position information of the frame 4; a second position detection component, disposed on the frame 4, for acquiring the position information of the first lifting component 6 and the position information of the second lifting component 10; and / or a controller, the controller being connected to the first driving component 8 and the second driving component 12; the controller is capable of controlling the first driving component 8 and the second driving component 12 to drive synchronously or to drive the first driving component 8 and the second driving component 12 asynchronously.

[0117] In this embodiment, a first position detection component and a second position detection component are further provided. The position information of the frame 4 can be obtained by setting the first position detection component, which makes it easier to know the position of the frame 4 so as to realize the accurate handling of the workpiece. The position information of the first lifting component 6 and the second lifting component 10 can be obtained by setting the second position detection component, which can then know the tilt angle of the gripper component 14 and realize the accurate gripping of different workpieces.

[0118] This technical solution further includes a controller connected to the first drive component 8 and the second drive component 12. The controller can control the first drive component 8 and the second drive component 12 to drive synchronously or asynchronously. When the controller controls the first drive component 8 and the second drive component 12 to drive synchronously, the first lifting component 6 and the second lifting component 10 lift or lower relative to the frame 4 at the same speed, which can keep the workpiece in a horizontal state. When the controller controls the first drive component 6 and the second drive component 12 to drive asynchronously, the first lifting component 6 and the second lifting component 10 lift or lower relative to the frame 4 at different speeds, which can keep the workpiece in an inclined state.

[0119] Further, the workpiece can be inclined to the left or right during the workpiece cleaning process, facilitating the cleaning of the workpiece.

[0120] Embodiment eleven

[0121] As Figures 1 to 5 shown, one embodiment of the present application provides a cleaning device, comprising: the handling robot of any of the above embodiments.

[0122] The cleaning device provided by the embodiment has all the beneficial technical effects of the handling robot.

[0123] Specifically, the cleaning device comprises a spray head and a liquid supply pipe, one end of the liquid supply pipe being connected to a liquid storage unit and the other end being connected to the spray head. The liquid storage unit can store liquid for cleaning the workpiece, and the liquid supplied to the spray head through the liquid supply pipe can clean the workpiece held by the handling robot.

[0124] Specifically, as Figure 1 shown, the workpiece to be cleaned 30 can be fixed by the gripper assembly 14 of the handling robot, and the workpiece to be cleaned 30 can be inclined or horizontally arranged by the first lifting assembly 6 and the second lifting assembly 10, so as to facilitate the cleaning of the workpiece to be cleaned 30. Specific embodiments

[0126] As Figures 1 to 5 shown, the embodiment provides a handling robot comprising: a cross beam 142, a first lifting assembly 6, a second lifting assembly 10, a hook 144, and a limiting plate 146.

[0127] The materials of the cross beam 142, the first lifting assembly 6, the second lifting assembly 10, the hook 144, and the limiting plate 146 that are in contact with air or liquid are corrosion-resistant and clean special plastic materials.

[0128] The first connecting piece 608 and the second connecting piece 108 that are in contact with air or liquid are corrosion-resistant and clean special plastic materials; the first connecting piece 608 and the second connecting piece 108 have a height gap reserved with the cross beam 142 to ensure that the cross beam 142 can realize different motion states.

[0129] The cross beam 142 is made of a rigid structure inside and is wrapped with a corrosion-resistant and clean material (PVDF, PVC, etc.) outside and is sealed; the cross beam 142 is provided with two connecting holes, and the first connecting piece 608 and the second connecting piece 108 are fixed through the first bolt 16 and the second bolt 18; the first bolt 16 and the second bolt 18 are light shaft parts in the connecting holes of the cross beam 142.

[0130] The first lifting assembly 6 and the second lifting assembly 10 are made of rigid structures inside and are wrapped with corrosion-resistant and clean materials (PVDF, PVC, etc.) outside and are sealed. The first connecting piece 608 is fixedly connected with the first lifting rod 606 of the first lifting assembly 6 through bolts, and the second connecting piece 108 is fixedly connected with the second lifting rod 106 through bolts.

[0131] The hooks 144 and the pressing plates 20 are assembled on the cross beam 142, and the whole is made of corrosion-resistant and clean materials (PVDF, PVC, etc.). Each set of carrying manipulator is equipped with two or more groups of hooks 144, and the hooks 144 can be freely adjusted and assembled on the cross beam 142 according to the outer shape and gravity center of the furnace tube. The hook 144 group is in an irregular C-shaped structure, and the structure specification is obtained after force analysis by simulation software.

[0132] The first lifting rod 606 of the first lifting assembly 6 and the second lifting rod 106 of the second lifting assembly 10 are made of corrosion-resistant and clean materials (PVDF, PVC, etc.).

[0133] The limiting plate 146 is a profiled baffle made according to the outer shape of the furnace tube to prevent the furnace tube from falling during cleaning and is made of corrosion-resistant and clean PVDF, PVC, etc. It can be freely adjusted and assembled on the bracket cross beam assembly according to the outer shape and size of the furnace tube. Each set of manipulator is equipped with two groups of movable hooks 144.

[0134] Further, the carrying manipulator further comprises a manipulator platform, a third driving assembly 28 for driving the frame 4 to move on the workbench 2, a first position detection piece for obtaining the position of the frame 4, and a second position detection piece for obtaining the positions of the first lifting assembly 6 and the second lifting assembly 10. The workbench 2 and the third driving assembly 28 are both made of corrosion-resistant metal materials and are subjected to corrosion-resistant treatment on the surface of the materials.

[0135] The manipulator platform comprises a workbench 2, a third sliding rail 26 and a rack 282.

[0136] The workbench 2 is a motion reference platform made to ensure the stability of the horizontal movement of the carrying manipulator. The platform is installed at a specified position of the furnace tube cleaning equipment and can integrate the overhead furnace tube cleaning and carrying manipulator with the furnace tube cleaning equipment.

[0137] The third sliding rail 26 is provided with a fourth sliding block, the third sliding rail 26 is installed on the workbench 2, and the fourth sliding block is installed at the bottom of the frame 4 and is slidingly arranged on the third sliding rail 26, thereby integrating the frame 4 with the workbench 2.

[0138] The rack 282 is installed and fixed on the workbench 2 according to the horizontal movement path of the manipulator and is subjected to corrosion-resistant treatment on the surface.

[0139] The frame 4 is assembled by a material with high rigidity, good processability and corrosion resistance, and is a mounting reference platform of other components in the lifting assembly of the manipulator.

[0140] The first lifting assembly 6 and the second lifting assembly 10 are two sets of completely same structures, and the first driving assembly 8 and the second driving assembly 12 are two sets of same driving systems. In the operation process, the left and right power driving systems are controlled respectively, and the furnace pipe can be switched among the horizontal, left tilt and right tilt states in different cleaning stages by controlling the different operation speeds of the first motor 802 and the second motor 122 in the same time period and the different start-stop of the motors.

[0141] The first driving assembly 8 includes the first motor 802 and a speed reducer, and the second driving assembly 12 is a same power driving system as the first driving assembly 8.

[0142] The first lifting rod 606 and the second lifting rod 106 are assembled by a material with high rigidity, good processability and corrosion resistance, and are respectively assembled with the first guide rail 402 and the second guide rail 404, and are respectively fixed with the first lead screw 808 and the second lead screw in the first driving assembly 8 and the second driving assembly 12, and are lifted with the lead screw, and are divided into two groups of completely same lifting assembly fixed components.

[0143] The first driving assembly 8 is assembled by the first driving gear 804, the first driven gear 806 and the first lead screw assembly, the second driving assembly 12 is assembled by the second driving gear 124, the second driven gear 126 and the second lead screw assembly, the driving gear is installed on the speed reducer in the power driving system and is engaged with the driven gear, the driven gear is assembled with the lead screw assembly, the lead screw assembly is fixed on the frame 4, and the driving assembly is divided into two groups of completely same transmission systems.

[0144] The carrying manipulator further includes a third driving assembly 28 for driving the frame 4 to move transversely on the workbench 2, the third driving assembly 28 includes a third motor 284, a speed reducer, a transmission gear 286 and a rack 282, the rack 282 is fixed on the workbench 2, the transmission gear 286 is engaged with the rack 282, and the precise walking of the carrying manipulator is realized by driving the transmission gear 286.

[0145] The first position detecting member and the second position detecting member are various position detecting components, which are installed on the frame 4 and the worktable 2 according to the stroke path of the movement (lifting, horizontal movement) of the carrying manipulator, and decompose the position information of the frame 4, the position information of the first lifting assembly 6 and the position information of the second lifting assembly 10, so as to prevent the carrying manipulator from overshooting.

[0146] In the present application, the terms "mounting", "connecting", "connecting", "fixing" and the like should be understood in a broad sense. For example, "connecting" can be fixed connection, detachable connection or integral connection; "connecting" can be direct connection or indirect connection through an intermediate medium. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0147] In the description of the present application, the terms "one embodiment", "some embodiments", "a specific embodiment" and the like mean that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In the present application, the illustrative description of the above terms does not necessarily mean the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0148] The above description is only the preferred embodiment of the present application and is not intended to limit the present application. For those skilled in the art, the present application can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. within the spirit and principles of the present application shall be included in the protection scope of the present application.

Claims

1. A transfer robot characterized by comprising: The utility model relates to a kind of carrying manipulator, including: Workbench (2); Frame (4), the frame (4) is slidably arranged on the workbench (2), one side of the frame (4) is provided with first guide rail (402), the other side is provided with second guide rail (404); First lifting assembly (6), the first lifting assembly (6) is slidably arranged on the first guide rail (402); First drive assembly (8) is connected to the first lifting assembly (6), for driving the first lifting assembly (6) moves on the first guide rail (402); Second lifting assembly (10), the second lifting assembly (10) is slidably arranged on the second guide rail (404); Second drive assembly (12) is connected to the second lifting assembly (10), for driving the second lifting assembly (10) moves on the second guide rail (404); Gripper assembly (14), the gripper assembly (14) is connected to the first lifting assembly (6) and the second lifting assembly (10); The first lifting assembly (6) includes: First slider (602), slidably arranged on the first guide rail (402); First fixed plate (604) is connected to the first slider (602); First lifting rod (606), one end of the first lifting rod (606) is hinged to the first fixed plate (604); First connecting piece (608), the first connecting piece (608) is arranged at the other end of the first lifting rod (606), and the first connecting piece (608) is connected to the gripper assembly (14); The second lifting assembly (10) includes: Second slider (102), slidably arranged on the second guide rail (404); Second fixed plate (104) is connected to the second slider (102); Second lifting rod (106), one end of the second lifting rod (106) is hinged to the second fixed plate (104); Second connecting piece (108) is arranged at the other end of the second lifting rod (106); Wherein, the first slider (602) is connected to the first drive assembly (8), the second slider (102) is connected to the second drive assembly (12), and the gripper assembly (14) is connected to the first connecting piece (608) and the second connecting piece (108); The gripper assembly (14) includes: Crossbeam (142), the crossbeam (142) is connected to the first lifting assembly (6) and the second lifting assembly (10), and the crossbeam (142) is reserved with height gap with the first connecting piece (608) and the second connecting piece (108); Hook (144), one end of the hook (144) is connected to the crossbeam (142); Limiting plate (146) is arranged at both ends of the crossbeam (142); The carrying manipulator further includes: Pressing plate (20), one end of the hook (144) is hung on the crossbeam (142), and the pressing plate (20) is connected to the hook (144) and the crossbeam (142); A limiting block (22) is arranged on the cross beam (142) to limit the limiting plate (146); A controller is connected to the first driving assembly (8) and the second driving assembly (12); the controller can control the first driving assembly (8) and the second driving assembly (12) to drive synchronously or control the first driving assembly (8) and the second driving assembly (12) to drive asynchronously.

2. The carrying manipulator according to claim 1, wherein The first driving assembly (8) comprises: A first motor (802) arranged on the frame (4); A first driving gear (804) connected to the output end of the first motor (802); A first driven gear (806) engaged with the first driving gear (804); A first lead screw (808) connected to the first driven gear (806); A third sliding block (810) sleeved on the first lead screw (808) and connected to the first fixed plate (604); The second driving assembly (12) comprises: A second motor (122) arranged on the frame (4); A second driving gear (124) connected to the output end of the second motor (122); A second driven gear (126) engaged with the second driving gear (124); A second lead screw connected to the second driven gear (126); A fourth sliding block sleeved on the second lead screw and connected to the second fixed plate (104).

3. The handling robot according to claim 1, characterized in that Further comprising: A first bolt (16) and a second bolt (18), the cross beam (142) is provided with at least two connecting holes, the first bolt (16) passes through one of the connecting holes and one end of the first lifting assembly (6), and the second bolt (18) passes through another connecting hole and one end of the second lifting assembly (10).

4. The carrying manipulator according to any one of claims 1 to 3, wherein The workbench (2) is of a frame structure, the frame (4) is arranged on one side of the workbench (2), the gripper assembly (14) is located on the other side of the workbench (2), the first guide rail (402) and the second guide rail (404) are arranged along the length direction of the frame (4), one end of the first lifting assembly (6) passes through the workbench (2) and is connected to the gripper assembly (14), and one end of the second lifting assembly (10) passes through the workbench (2) and is connected to the gripper assembly (14).

5. The handling robot according to any one of claims 1 to 3, characterized in that, Further comprising: A third sliding rail (26) is arranged on the workbench (2) along the length direction of the workbench (2), and the frame (4) is slidingly connected to the third sliding rail (26); A third driving assembly (28) is connected to the frame (4) and used to drive the frame (4) to move on the third sliding rail (26); The third driving assembly (28) comprises: A rack (282) arranged on the workbench (2) along the length direction of the workbench (2); A third motor (284) arranged on the frame (4), and an output end of the third motor (284) is engaged with the rack (282) through a transmission gear (286).

6. The handling robot according to any one of claims 1 to 3, characterized in that, Further comprising: A corrosion-resistant layer arranged on the surfaces of the first lifting assembly (6), the second lifting assembly (10) and the gripper assembly (14); The corrosion-resistant layer is made of polyvinylidene fluoride or polyvinyl chloride material.

7. The handling robot according to any one of claims 1 to 3, characterized in that, Further comprising: A first position detection member arranged on the workbench (2) and used to acquire position information of the frame (4); A second position detection member arranged on the frame (4) and used to acquire position information of the first lifting assembly (6) and position information of the second lifting assembly (10).

8. A cleaning apparatus characterized by, The handling robot comprises: The handling robot according to any one of claims 1 to 7.

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