An adsorption tower for preparing high-purity tungsten hexafluoride

Abstract

The present invention relates to an adsorption tower for preparing high-purity tungsten hexafluoride, and belongs to the technical field of tungsten hexafluoride preparation. The adsorption tower includes an adsorption tower body, an adsorbent, a feeding mechanism and a discharging mechanism, and may also include at least one of a stirring mechanism, a recycling mechanism and a cleaning mechanism. A baffle and a filter are sequentially arranged in the adsorption tower body from top to bottom. The baffle is filled with adsorbent particles capable of adsorbing HF. The filter is used to filter granular impurities. The feeding mechanism is used to add new adsorbent particles into the adsorption tower body. The discharging mechanism is used to discharge adsorbent particles with high utilization rate at the bottom of the adsorbent filled on the baffle, the stirring mechanism is used to stir the adsorbent particles filled on the baffle, the recycling mechanism is used to desorb the discharged adsorbent particles for recycling, and the cleaning mechanism is used to clean the filter. The adsorption tower of the present invention can greatly improve the utilization rate of the adsorbent and improve the adsorption effect through reasonable structural design.

Description

Technical Field

[0001] The invention relates to an adsorption tower for preparing high-purity tungsten hexafluoride, belonging to the technical field of tungsten hexafluoride preparation. Background Art

[0002] Tungsten hexafluoride is mainly used as a raw material for the chemical vapor deposition (CVD) process of metal tungsten in the electronics industry. WSi2 made from WF6 can be used as a wiring material in large-scale integrated circuits (LSI). With the improvement of the precision of electronic industrial products, extremely high requirements are also placed on the purity of WF6 as a raw material. When the purity is required to reach more than 99.999%, the industrial WF6 must be purified to meet the needs of the semiconductor industry.

[0003] The preparation of high-purity tungsten hexafluoride often requires filtering the metal impurities and HF it contains. At present, an adsorption tower is generally used to adsorb HF in tungsten hexafluoride, and the adsorbent particles filled in the adsorption tower are used to adsorb and remove HF. However, the utilization rate of the adsorbent filled in the adsorption tower at the bottom is much greater than that at the top, which affects the adsorption effect. Summary of the invention

[0004] In view of the deficiencies in the prior art, the present invention provides an adsorption tower for preparing high-purity tungsten hexafluoride, which mainly pushes out adsorbent particles with high utilization rate at the bottom of the adsorbent and adds new adsorbent particles at the same time, which can not only greatly improve the utilization rate of the adsorbent, but also improve the adsorption effect.

[0005] The objectives of the present invention are achieved through the following technical solutions.

[0006] An adsorption tower for preparing high-purity tungsten hexafluoride, the adsorption tower comprising an adsorption tower body, an adsorbent, a feeding mechanism and a discharging mechanism;

[0007] The adsorption tower body is provided with a baffle and a filter from top to bottom in sequence, the baffle is filled with an adsorbent, and the filter is used to filter granular impurities in tungsten hexafluoride; an air inlet pipe is installed on the adsorption tower body below the filter, a discharge port is provided on the side wall of the adsorption tower body above the baffle and close to the baffle, a valve is installed in the discharge port, and a feed port and an air outlet pipe are installed on the adsorption tower body above the filled adsorbent;

[0008] The adsorbent is in granular form and is used to adsorb HF in tungsten hexafluoride;

[0009] The feeding mechanism cooperates with the feed port to add new adsorbent particles into the adsorption tower body;

[0010] The discharging mechanism cooperates with the discharging port to discharge the adsorbent particles at the bottom of the adsorbent filled in the adsorption tower body;

[0011] With the cooperation of the feeding mechanism and the discharging mechanism, the adsorbent particles with high utilization rate at the bottom of the filled adsorbent can be discharged, and new adsorbent particles can be added at the same time to ensure the adsorption effect.

[0012] Furthermore, the adsorbent particles are selected from sodium fluoride particles.

[0013] Further, the feeding mechanism includes a storage box, a screw conveyor, a feeding cylinder, a first cylinder and a first push plate;

[0014] A first cylinder is installed at one end of the feed barrel, and the other end of the feed barrel is connected to the feed port; the storage box and the feed barrel are connected through a screw conveyor; the first push plate is located inside the feed barrel and is fixedly connected to the telescopic end of the first cylinder, and a sealing ring is sleeved on the outer wall of the first push plate in contact with the inner wall of the feed barrel;

[0015] When not feeding, the first push plate is located at one end of the feed barrel close to the feed port; when feeding, the first push plate is first pulled to the end of the feed barrel away from the feed port by the first cylinder, and then the new adsorbent particles stored in the storage box are transported to the feed barrel by the screw conveyor, and then the first push plate is pushed by the first cylinder to push the new adsorbent particles in the feed barrel into the adsorption tower body.

[0016] Further, the discharging mechanism includes a second cylinder and a second push plate;

[0017] The telescopic end of the second cylinder extends into the adsorption tower body, the second push plate is placed on the baffle and fixedly connected to the telescopic end of the second cylinder, and the second cylinder is used to drive the second push plate to move, thereby pushing out the propellant particles at the bottom of the accumulated propellant on the baffle.

[0018] Furthermore, the second push plate is a wedge-shaped plate, the bottom of the wedge-shaped plate is close to the upper surface of the baffle, the plane end of the wedge-shaped plate faces the discharge port, and the inclined end of the wedge-shaped plate faces away from the discharge port.

[0019] Furthermore, the adsorption tower further comprises at least one of a recycling mechanism, a cleaning mechanism and a stirring mechanism;

[0020] The recycling mechanism is used to desorb the adsorbent particles discharged from the adsorption tower body and store the desorbed adsorbent particles in a storage box, thereby improving the utilization rate of the adsorbent and reducing resource waste;

[0021] The cleaning mechanism is used to clean the impurity particles that are blocked in the mesh of the filter to ensure that the tungsten hexafluoride gas can pass through the filter;

[0022] The stirring mechanism is used to stir the adsorbent particles accumulated in the adsorption tower body, thereby increasing the contact area between tungsten hexafluoride and the adsorbent particles, increasing the utilization rate of the adsorbent, and improving the adsorption effect.

[0023] Furthermore, the recycling mechanism includes a discharge channel, a processing box, a connecting pipe and a heating system;

[0024] An exhaust pipe is installed on the processing box;

[0025] One end of the discharge channel is connected to the processing box, and the other end of the discharge channel is connected to the discharge port; one end of the connecting pipe is connected to the processing box, and the other end of the connecting pipe is connected to the storage box; the heating system is used to heat the processing box to enable the collected adsorbent particles discharged from the adsorption tower body to be thermally desorbed;

[0026] The adsorbent particles discharged from the adsorption tower body enter the processing box through the discharge channel, the discharged adsorbent particles are thermally desorbed in the processing box, the gas generated by thermal desorption is discharged from the exhaust pipe of the processing box, and the adsorbent particles after thermal desorption enter the storage box through the connecting pipe for recycling.

[0027] Furthermore, the cleaning mechanism includes a cleaning brush, a scraper, a discharge plate and a reciprocating motion system, and an impurity outlet is processed on the side wall at the bottom of the adsorption tower body;

[0028] The cleaning brush is located above the filter screen, and the bristles of the cleaning brush penetrate the mesh of the filter screen; the scraper is located below the filter screen and contacts the lower surface of the filter screen; the reciprocating motion system is used to drive the cleaning brush and the scraper to reciprocate on the filter screen; the discharge plate is installed at one end of the bottom of the adsorption tower body close to the impurity outlet, and the scraper is located above the discharge plate and has a clearance fit with the discharge plate;

[0029] Cleaning principle: The cleaning brush can effectively clean out the impurity particles that are blocked in the mesh of the filter. The cleaned impurity particles stick to the lower surface of the filter under the action of the airflow, and are pushed to the top of the discharge plate by the scraper. Since the air pressure on one side of the discharge plate close to the impurity outlet is greatly reduced, the impurity particles can fall freely and be discharged through the impurity outlet.

[0030] Further, the reciprocating motion system includes a connecting plate, a stop rod, a connecting rod, a mounting plate, a reciprocating screw, a screw sleeve and a first motor;

[0031] A first cavity is processed on the mounting plate;

[0032] One end of the two push rods that pass through the adsorption tower body are fixedly connected to the connecting plate, the other end of one push rod is fixedly connected to the cleaning brush, and the other end of the other push rod is fixedly connected to the scraper; the mounting plate is fixedly installed on the outer wall of the adsorption tower body, the first motor is installed at one end of the mounting plate, the output shaft end of the first motor extends into the first cavity and is fixedly connected to one end of the reciprocating screw, the other end of the reciprocating screw is rotatably connected to the inner wall of the first cavity, and the reciprocating screw is sleeved with a screw sleeve that matches it; one end of the connecting rod that passes through the first cavity is fixedly connected to the screw sleeve, and the other end of the connecting rod is fixedly connected to the connecting plate;

[0033] The first motor is started to drive the reciprocating screw to rotate, the reciprocating screw drives the screw sleeve to move, the connecting rod and the connecting plate drive the push rod to move, and the two push rods respectively drive the cleaning brush and the scraper to move.

[0034] Further, the stirring mechanism includes a stirring paddle and a driving system;

[0035] The driving system is used to drive the stirring paddle to rotate, so as to stir the adsorbent particles accumulated in the adsorption tower body.

[0036] Furthermore, the driving system includes a first bevel gear, a second bevel gear, a rotating rod, a first pulley, a second pulley and a belt, and a second cavity is processed on the mounting plate; the output shaft end of the first motor passes through the second cavity and extends into the first cavity; the first bevel gear and the second bevel gear are both located in the second cavity, the first bevel gear is fixedly mounted on the output shaft of the first motor, and the second bevel gear is meshed with the first bevel gear; the lower end of the rotating rod is fixedly connected to the second bevel gear, the upper end of the rotating rod is fixedly connected to the first pulley, the second pulley is fixedly connected to the stirring paddle, and a belt is sleeved between the first pulley and the second pulley;

[0037] Start the first motor, the first bevel gear drives the second bevel gear to rotate, the second bevel gear drives the rotating rod to rotate, the rotating rod drives the first pulley to rotate, the belt drives the second pulley to rotate, and then drives the stirring paddle to rotate, which greatly increases the contact area between the adsorbent particles and the tungsten hexafluoride gas and improves the utilization rate, and flattens the new adsorbent particles pushed into the adsorption tower body;

[0038] Alternatively, the driving system includes a second motor, a first bevel gear, a second bevel gear, a rotating rod, a first pulley, a second pulley and a belt; the second motor is installed on the outside of the adsorption tower body, the first bevel gear is fixedly installed on the output shaft of the second motor, the second bevel gear is fixedly connected to one end of the rotating rod, and the second bevel gear is meshed with the first bevel gear; the other end of the rotating rod is fixedly connected to the first pulley, the second pulley is fixedly connected to the stirring paddle, and a belt is sleeved between the first pulley and the second pulley; in this case, the second motor is started, the first bevel gear drives the second bevel gear to rotate, the second bevel gear drives the rotating rod to rotate, the rotating rod drives the first pulley to rotate, and the second pulley is driven to rotate by the belt, thereby driving the stirring paddle to rotate;

[0039] Alternatively, the drive system includes a second motor, a first bevel gear and a second bevel gear; the second motor is installed on the outside of the adsorption tower body, the first bevel gear is fixedly installed on the output shaft of the second motor, the second bevel gear is fixedly connected to the stirring paddle, and the second bevel gear is meshed with the first bevel gear; in this case, start the second motor, the first bevel gear drives the second bevel gear to rotate, and the second bevel gear drives the stirring paddle to rotate.

[0040] Compared with the prior art, the present invention has the following beneficial effects:

[0041] (1) By setting up a feeding mechanism and a discharging mechanism, the adsorbent particles with high utilization rate at the bottom of the adsorbent filled in the adsorption tower body can be pushed out, and new adsorbent particles can be added at the same time, thereby improving the overall utilization rate of the adsorbent and improving the adsorption effect;

[0042] (2) Through the recycling mechanism, the used adsorbent particles discharged from the adsorption tower body can be desorbed to achieve the reuse of the adsorbent particles, improve the utilization rate of the adsorbent, and reduce resource waste;

[0043] (3) The impurity particles in tungsten hexafluoride can be filtered out through the filter and cleaning mechanism, and the filter is continuously cleaned to ensure the passage of tungsten hexafluoride gas;

[0044] (4) The stirring mechanism can make the adsorbent particles accumulated in the adsorption tower body flow, thereby increasing the contact area between the adsorbent particles and tungsten hexafluoride and improving the utilization rate of the adsorbent.

[0045] In summary, the adsorption tower of the present invention can greatly improve the utilization rate of the adsorbent, reduce resource waste, and ensure the adsorption effect through reasonable structural design. BRIEF DESCRIPTION OF THE DRAWINGS

[0046] Figure 1 Schematic diagram of the structure of the adsorption tower used to prepare high-purity tungsten hexafluoride in the embodiment.

[0047] Figure 2 It is a front view of the adsorption tower used for preparing high-purity tungsten hexafluoride in the embodiment.

[0048] Figure 3 for Figure 1 A local enlarged schematic diagram of point A in the middle.

[0049] Figure 4 for Figure 2 A local enlarged schematic diagram of point B in the middle.

[0050] Figure 5 Schematic diagram of the working state of the adsorption tower used to prepare high-purity tungsten hexafluoride in the embodiment.

[0051] Among them, 1-adsorption tower body, 2-discharge plate, 3-blocking net, 4-filter net, 5-discharge port, 6-first push plate, 7-air inlet pipe, 8-connecting plate, 9-second cylinder, 10-second push plate, 11-stirring blade, 12-adsorbent particles, 13-air outlet pipe, 14-stirring shaft, 15 first cylinder, 16 feed barrel, 17-screw conveyor, 18-discharge channel, 19-processing box, 20-connecting pipe, 21-storage box, 22-first motor, 23-reciprocating screw, 24-first cavity, 25-mounting plate, 26-screw sleeve, 27-resist rod, 28-connecting rod, 29-second pulley, 30-belt, 31-first pulley, 32-rotating rod, 33-scraper, 34-cleaning brush, 35-second bevel gear, 36-second cavity, 37-first bevel gear. DETAILED DESCRIPTION

[0052] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0053] In the description of the present invention, it is necessary to understand that the terms "upper", "lower", "front", "back", "left", "right", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0054] Example 1

[0055] An adsorption tower for preparing high-purity tungsten hexafluoride, the adsorption tower mainly comprises an adsorption tower body 1, an adsorbent, a feeding mechanism and a discharging mechanism, and may also comprise at least one of a recycling mechanism, a cleaning mechanism and a stirring mechanism;

[0056] like Figure 1As shown, a baffle 3 and a filter 4 are sequentially arranged in the adsorption tower body 1 from top to bottom, the baffle 3 is filled with an adsorbent, and the filter 4 is used to filter granular impurities in tungsten hexafluoride; an air inlet pipe 7 is installed on the adsorption tower body 1 below the filter 4, a discharge port 5 is arranged on the side wall of the adsorption tower body 1 above the baffle 3 and close to the baffle 3, a valve is installed in the discharge port 5, a through hole is processed on the side wall of the adsorption tower body 1 opposite to the discharge port, a feed port and an air outlet pipe 13 are arranged on the adsorption tower body 1 above the filled adsorbent, and an impurity outlet is processed on the side wall at the bottom of the adsorption tower body 1;

[0057] The adsorbent is in granular form, and sodium fluoride particles can be selected to adsorb HF in tungsten hexafluoride;

[0058] like Figure 1 As shown, the feeding mechanism is used to add new adsorbent particles into the adsorption tower body 1, and the feeding mechanism includes a storage box 21, a screw conveyor 17, a feed barrel 16, a first cylinder 15 and a first push plate 6;

[0059] like Figure 1 As shown, the discharging mechanism is used to discharge the adsorbent particles 12 at the bottom of the adsorbent filled in the adsorption tower body 1, and the discharging mechanism includes a second cylinder 9 and a second push plate 10; wherein the second push plate 10 can be designed as a wedge-shaped structure, the bottom of the wedge-shaped plate is close to the upper surface of the baffle 3, the plane end of the wedge-shaped plate faces the discharging port 5, and the inclined end of the wedge-shaped plate faces away from the discharging port 5;

[0060] like Figure 1 As shown, the recycling mechanism is used to desorb the used adsorbent particles 12 discharged from the adsorption tower body 1, and store the desorbed adsorbent particles 12 in the storage box 21; the recycling mechanism includes a discharge channel 18, a processing box 19, a connecting pipe 20 and a heating system; wherein the processing box 19 is equipped with an exhaust pipe for discharging the gas generated by the desorption of the adsorbent particles 12;

[0061] like Figure 1 , Figure 2 and Figure 3 As shown, the cleaning mechanism is used to clean the foreign particles blocked in the mesh of the filter 4, and the cleaning mechanism includes a cleaning brush 34, a scraper 33, a discharge plate 2 and a reciprocating motion system; wherein the reciprocating motion system includes a connecting plate 8, a stop rod 27, a connecting rod 28, a mounting plate 25, a reciprocating screw 23, a screw sleeve 26 and a first motor 22; the mounting plate 25 is processed with a first cavity 24 and a second cavity 36, the first cavity 24 is a strip cavity, and the second cavity 36 is a circular cavity;

[0062] like Figure 2 and Figure 4As shown, the stirring mechanism is used to stir the adsorbent particles 12 accumulated in the adsorption tower body 1, and the stirring mechanism includes a stirring paddle and a driving system, the driving system includes a first bevel gear 37, a second bevel gear 35, a rotating rod 32, a first pulley 31, a second pulley 29 and a belt 30, and the stirring paddle includes a stirring shaft 14 and a stirring blade 11;

[0063] Combination Figure 1 to Figure 4 , the connection relationship between the components is as follows:

[0064] A first cylinder 15 is installed at one end of the feed barrel 16, and the other end of the feed barrel 16 is connected to the feed port; the storage box 21 is connected to the feed barrel 16 through a screw conveyor 17; the first push plate 6 is located inside the feed barrel 16 and is fixedly connected to the telescopic end of the first cylinder 15, and a sealing ring is sleeved on the outer wall of the first push plate 6 that contacts the inner wall of the feed barrel 16, and when no material is fed, the first push plate 6 is located at one end of the feed barrel 16 close to the feed port; the second cylinder 9 is installed at the through hole on the adsorption tower body 1, and the second push plate 10 is placed on the baffle 3 and is fixedly connected to the telescopic end of the second cylinder 9; one end of the discharge channel 18 is connected to the processing box 19, and the discharge channel 18 is connected to the processing box 19. The other end of the channel 18 is connected to the discharge port 5; one end of the connecting pipe 20 is connected to the processing box 19, and the other end of the connecting pipe 20 is connected to the storage box 21; the heating system is arranged on the inner wall of the processing box 19; the cleaning brush 34 is located above the filter screen 4, and the bristles of the cleaning brush 34 pass through the mesh of the filter screen 4; the scraper 33 is located below the filter screen 4 and contacts the lower surface of the filter screen 4; one end of the two push rods 27 that pass through the adsorption tower body 1 are fixedly connected to the connecting plate 8, the other end of one push rod 27 is fixedly connected to the cleaning brush 34, and the other end of the other push rod 27 is fixedly connected to the scraper 33; the mounting plate 25 is fixedly mounted on the adsorption tower body On the outer wall of the body 1, the first motor 22 is installed at one end of the mounting plate 25, and the end of the output shaft of the first motor 22 passes through the second cavity 36 and extends into the first cavity; one end of the reciprocating screw 23 is fixedly connected to the end of the output shaft of the first motor 22, and the other end of the reciprocating screw 23 is rotatably connected to the inner wall of the first cavity 24, and a screw sleeve 26 matching it is sleeved on the reciprocating screw 23; one end of the connecting rod 28 passing through the first cavity 24 is fixedly connected to the screw sleeve 26, and the other end of the connecting rod 28 is fixedly connected to the connecting plate 8; the discharge plate 2 is installed at one end of the bottom of the adsorption tower body 1 close to the impurity outlet, and the scraper 33 is connected to the discharge plate 2 when it is located above the discharge plate 2. Clearance fit; the first bevel gear 37 and the second bevel gear 35 are both located in the second cavity 36, the first bevel gear 37 is fixedly mounted on the output shaft of the first motor 22, and the second bevel gear 35 is meshed with the first bevel gear 37; the lower end of the rotating rod 32 is fixedly connected to the second bevel gear 35, the upper end of the rotating rod 32 is fixedly connected to the first pulley 31, the second pulley 29 is fixedly connected to the upper end of the stirring shaft 14, and a belt 30 is sleeved between the first pulley 31 and the second pulley 29; the lower end of the stirring shaft 14 is located in the adsorption tower body 1, and multiple groups of stirring blades 11 are installed on the stirring shaft 14, and the stirring blades are located inside the adsorbent particles 12 filled on the baffle 3.

[0065] The working principle of the adsorption tower used to prepare high-purity tungsten hexafluoride is as follows:

[0066] The tungsten hexafluoride gas enters the adsorption tower body 1 through the air inlet pipe 7, firstly filters out the granular impurities contained in the tungsten hexafluoride gas through the filter screen 4, and then enters the filled adsorbent particles 12 through the retaining net 3. The adsorbent particles 12 can adsorb HF in the tungsten hexafluoride gas, and after the adsorption is completed, the high-purity tungsten hexafluoride gas is discharged through the air outlet pipe 13; wherein, during use, the adsorbent particles 12 at the bottom of the adsorbent filled on the retaining net 3 are pushed out at regular intervals and new adsorbent particles 12 are added at the same time, and the filter screen 4 is cleaned at regular intervals;

[0067] like Figure 5 As shown, the specific process of feeding and discharging is as follows: start the first cylinder 15, pull the first push plate 6 to the end of the feed barrel 16 away from the feed port, start the screw conveyor 17 to transport the new adsorbent particles 12 in the storage box 21 to the feed barrel 16, and start the first cylinder 15 again to push the first push plate 6 to push the new adsorbent particles 12 into the adsorption tower body 1; while feeding, start the second cylinder 9 to push the second push plate 10 forward to push out the adsorbent particles 12 with high utilization rate at the bottom of the adsorbent filled on the baffle 3, open the valve of the discharge port 5, and push out the adsorbent particles. The adsorbent particles 12 enter the processing box 19 through the discharge channel 18, and the temperature in the processing box 19 is heated to above 250°C (preferably 250°C to 350°C) through the heating system, so that the attached substances on the adsorbent particles are desorbed, and the gas generated by desorption is discharged from the exhaust pipe of the processing box 19. The desorbed adsorbent particles 12 enter the storage box 21 through the connecting pipe 20 for recycling; through the one-in-one-out method, the adsorbent particles 12 are always at a high adsorption rate, ensuring the adsorption effect and improving the utilization rate of the adsorbent particles 12;

[0068] like Figure 5 As shown, the specific process of cleaning and stirring is as follows: start the first motor 22 to drive the reciprocating screw 23 to rotate, the reciprocating screw 23 drives the screw sleeve 26 to move, and drives the push rod 27 to move through the connecting rod 28 and the connecting plate 8, and the two push rods 27 drive the cleaning brush 34 and the scraper 33 to move, the cleaning brush 34 can effectively clean out the impurity particles blocked in the mesh of the filter screen 4, and the cleaned impurity particles are attached to the lower surface of the filter screen 4 under the action of the airflow, and the cleaned impurity particles are pushed to the top of the discharge plate 2 by the scraper 33. Since the air pressure on the side of the discharge plate 2 close to the impurity outlet is greatly reduced, the impurity particles can fall freely and be discharged through the impurity outlet; at the same time, the first bevel gear 37 drives the second bevel gear 35 to rotate, the second bevel gear 35 drives the rotating rod 32 to rotate, the rotating rod 32 drives the first pulley 31 to rotate, and drives the second pulley 29 to rotate through the belt 30, thereby driving the stirring paddle to rotate.

[0069] In this embodiment, since the stirring mechanism and the cleaning mechanism share a motor (i.e., the first motor 22), the stirring process and the cleaning process are performed simultaneously, and the stirring process can be performed continuously, or stirring and cleaning can be performed only during the feeding and discharging process. However, in actual operation, the stirring mechanism and the cleaning mechanism can be equipped with a motor (i.e., the first motor 22 and the second motor) respectively, and the stirring process and the cleaning process are performed independently, the stirring process can be performed continuously, and the stirring process can also be performed simultaneously with the feeding and discharging process. In this case, the cleaning process can be performed according to actual needs and is not related to the stirring process and the feeding and discharging process.

[0070] In summary, the above are only preferred embodiments of the present invention and are not intended to limit the protection scope of the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. An adsorption tower for preparing high-purity tungsten hexafluoride, characterized in that: The adsorption tower comprises an adsorption tower body, an adsorbent, a feeding mechanism and a discharging mechanism; The adsorption tower body is provided with a baffle and a filter from top to bottom in sequence, the baffle is filled with an adsorbent, and the filter is used to filter granular impurities in tungsten hexafluoride; an air inlet pipe is installed on the adsorption tower body below the filter, a discharge port is provided on the side wall of the adsorption tower body above the baffle and close to the baffle, a valve is installed in the discharge port, and a feed port and an air outlet pipe are installed on the adsorption tower body above the filled adsorbent; The adsorbent is in granular form and is used to adsorb HF in tungsten hexafluoride; The feeding mechanism cooperates with the feed port to add new adsorbent particles into the adsorption tower body; The discharging mechanism cooperates with the discharging port to discharge the adsorbent particles at the bottom of the adsorbent filled in the adsorption tower body; The adsorption tower also includes a recycling mechanism, a cleaning mechanism and a stirring mechanism; The recycling mechanism is used to desorb the adsorbent particles discharged from the adsorption tower body and store the desorbed adsorbent particles in a storage box; The cleaning mechanism is used to clean the foreign particles that are blocked in the mesh of the filter; The stirring mechanism is used to stir the adsorbent particles accumulated in the adsorption tower body; The cleaning mechanism includes a cleaning brush, a scraper, a discharge plate and a reciprocating motion system, and an impurity outlet is processed on the side wall at the bottom of the adsorption tower body; The cleaning brush is located above the filter, and the bristles of the cleaning brush penetrate the mesh of the filter; the scraper is located below the filter and contacts the lower surface of the filter; the reciprocating motion system is used to drive the cleaning brush and the scraper to reciprocate on the filter; the discharge plate is installed at one end of the bottom of the adsorption tower body close to the impurity outlet, and the scraper is located above the discharge plate and fits in the gap with the discharge plate.

2. An adsorption tower for preparing high-purity tungsten hexafluoride according to claim 1, characterized in that: The feeding mechanism comprises a material storage box, a screw conveyor, a feeding cylinder, a first cylinder and a first push plate; A first cylinder is installed at one end of the feed barrel, and the other end of the feed barrel is connected to the feed port; the storage box and the feed barrel are connected through a screw conveyor; the first push plate is located inside the feed barrel and is fixedly connected to the telescopic end of the first cylinder, and a sealing ring is sleeved on the outer wall of the first push plate in contact with the inner wall of the feed barrel; Wherein, when no material is fed, the first push plate is located at one end of the feed barrel close to the feed inlet.

3. An adsorption tower for preparing high-purity tungsten hexafluoride according to claim 1, characterized in that: The discharging mechanism comprises a second cylinder and a second push plate; The telescopic end of the second cylinder extends into the adsorption tower body, the second push plate is placed on the baffle and fixedly connected to the telescopic end of the second cylinder, and the second cylinder is used to drive the second push plate to move.

4. An adsorption tower for preparing high-purity tungsten hexafluoride according to claim 3, characterized in that: The second push plate is a wedge-shaped plate, the bottom of the wedge-shaped plate is close to the upper surface of the baffle, the plane end of the wedge-shaped plate faces the discharge port, and the inclined end of the wedge-shaped plate faces away from the discharge port.

5. The adsorption tower for preparing high-purity tungsten hexafluoride according to claim 1, characterized in that: The recycling mechanism includes a discharge channel, a processing box, a connecting pipe and a heating system; An exhaust pipe is installed on the processing box; One end of the discharge channel is connected to the processing box, and the other end of the discharge channel is connected to the discharge port; one end of the connecting pipe is connected to the processing box, and the other end of the connecting pipe is connected to the storage box; the heating system is used to heat the processing box to allow the collected adsorbent particles discharged from the adsorption tower body to be thermally desorbed.

6. The adsorption tower for preparing high-purity tungsten hexafluoride according to claim 1, characterized in that: The reciprocating motion system comprises a connecting plate, a stop rod, a connecting rod, a mounting plate, a reciprocating screw, a screw sleeve and a first motor; A first cavity is processed on the mounting plate; One ends of the two push rods passing through the adsorption tower body are fixedly connected to the connecting plate, the other end of one push rod is fixedly connected to the cleaning brush, and the other end of the other push rod is fixedly connected to the scraper; the mounting plate is fixedly installed on the outer wall of the adsorption tower body, the first motor is installed at one end of the mounting plate, the output shaft end of the first motor extends into the first cavity and is fixedly connected to one end of the reciprocating screw, the other end of the reciprocating screw is rotatably connected to the inner wall of the first cavity, and a screw sleeve is sleeved on the reciprocating screw; one end of the connecting rod passing through the first cavity is fixedly connected to the screw sleeve, and the other end of the connecting rod is fixedly connected to the connecting plate.

7. An adsorption tower for preparing high-purity tungsten hexafluoride according to claim 6, characterized in that: The stirring mechanism comprises a stirring paddle, a first bevel gear, a second bevel gear, a rotating rod, a first pulley, a second pulley and a belt, and a second cavity is processed on the mounting plate; The output shaft end of the first motor passes through the second cavity and extends into the first cavity; the first bevel gear and the second bevel gear are both located in the second cavity, the first bevel gear is fixedly mounted on the output shaft of the first motor, and the second bevel gear is meshed with the first bevel gear; the lower end of the rotating rod is fixedly connected to the second bevel gear, the upper end of the rotating rod is fixedly connected to the first pulley, the second pulley is fixedly connected to the stirring paddle, and a belt is sleeved between the first pulley and the second pulley.

8. An adsorption tower for preparing high-purity tungsten hexafluoride according to claim 1, characterized in that: The stirring mechanism comprises a stirring paddle and a driving system, and the driving system is used to drive the stirring paddle to rotate so as to stir the adsorbent particles accumulated in the adsorption tower body.

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