Pneumatic micro-motion platform device

Abstract

The present invention relates to the technical field of high-precision positioning and displacement control, and provides a pneumatically controlled micro-motion platform device. The pneumatically controlled micro-motion platform device comprises a proportional regulating valve and a micro-motion platform, wherein the proportional regulating valve comprises a valve body, wherein the valve body is provided with an air inlet channel, an air branch channel and an air outlet channel, wherein the air inlet channel is connected to the air branch channel through a nozzle, wherein a movable iron core is provided in the air branch channel, wherein a plug adapted to the air outlet of the nozzle is provided at the first end of the movable iron core, wherein the second end of the movable iron core is connected to the micro-motion platform, and the air branch channel is connected to the air outlet channel. The present invention realizes pneumatic pushing of the movable iron core by delivering gas to the air inlet channel, and the gas enters the air branch channel through the nozzle, thereby realizing displacement of the micro-motion platform, and the gas is then discharged from the air outlet channel, and the displacement of the micro-motion platform is controlled by adjusting the air inlet flow rate, wherein the present device has a simple structure, a small volume, and is easy to operate, and adopts closed-loop control to eliminate the influence of environmental factors and improve control accuracy.

Description

Technical Field

[0001] The present invention relates to the technical field of high-precision positioning and displacement control, and in particular to a pneumatically controlled micro-motion platform device. Background Art

[0002] The micro-motion platform is the core content of precision positioning technology research. Currently, high-precision control, medical instruments, precision machinery, cell biology, optical positioning and other fields are inseparable from high-precision positioning technology. Today, advanced positioning technology can achieve micron and nanometer precision positioning, but it usually has certain disadvantages, such as difficulty in implementation, high cost, accuracy is greatly affected by the environment, poor stability, short life, etc.

[0003] The existing driving forms of micro-motion platforms mainly include: piezoelectric type, such as the integral flexible precision positioning platform driven by piezoelectric ceramics with an output displacement accuracy of 10nm. The disadvantage of piezoelectric sensors is that piezoelectric materials require moisture-proof measures, and the output DC response is poor, requiring the use of high input impedance circuits or charge amplifiers; linear motor type, however, linear motors have disadvantages such as high power consumption, high vibration, and high heat generation; there is also mechanical control type, but the purely mechanically controlled micro-motion platform has a complex structure and requires high processing accuracy. Summary of the invention

[0004] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the present invention proposes a pneumatically controlled micro-motion platform device to solve the problem that the existing micro-motion platform is difficult to implement.

[0005] According to an embodiment of the present invention, a pneumatically controlled micro-motion platform device includes a proportional control valve and a micro-motion platform, the proportional control valve includes a valve body, the valve body is provided with an air inlet channel, an air branch channel and an air outlet channel, the air inlet channel is connected with the air branch channel through a nozzle, a movable iron core is provided in the air branch channel, a first end of the movable iron core is provided with a plug matched with the air outlet of the nozzle, the movable iron core is slidably arranged along the axial direction of the air branch channel, the second end of the movable iron core is connected to the micro-motion platform, and the air branch channel is connected with the air outlet channel.

[0006] According to the pneumatically controlled micro-motion platform device of the embodiment of the present invention, gas is delivered to the air inlet channel and enters the air branch channel through the nozzle, so as to achieve pneumatic push on the movable iron core and then achieve displacement of the micro-motion platform. The gas is then discharged from the air outlet channel, and the displacement of the micro-motion platform is controlled by adjusting the air inlet flow rate. The device has a simple structure, a small size, and is easy to operate. It adopts closed-loop control to eliminate the influence of environmental factors and improve control accuracy.

[0007] According to one embodiment of the present invention, a sleeve is sleeved on the outer side of the movable iron core, an electromagnetic coil is wound around the circumference of the sleeve, and the movable iron core can move along the axial direction of the sleeve.

[0008] According to one embodiment of the present invention, it further includes a control circuit, wherein the control circuit is connected to the electromagnetic coil.

[0009] According to an embodiment of the present invention, the air inlet passage is provided with a first pressure sensor, the air outlet passage is provided with a second pressure sensor, and both the first pressure sensor and the second pressure sensor are connected to the control circuit.

[0010] According to an embodiment of the present invention, the air intake channel is connected to a capillary tube, both ends of the capillary tube are respectively connected to the air intake channel, both ends of the capillary tube are respectively wrapped with thermistor wires, and both thermistor wires are connected to the control circuit.

[0011] According to one embodiment of the present invention, a first end of the plug is provided with a groove, the first end of the movable iron core is inserted into the groove, and the second end of the plug is provided at the air outlet of the nozzle.

[0012] According to one embodiment of the present invention, the first end of the movable iron core is provided with a boss adapted to the groove, and a spring is sleeved on the boss. The first end of the spring is clamped on the bottom side of the boss in the branch air channel, and the second end of the spring is clamped on the upper end surface of the side wall of the groove.

[0013] According to an embodiment of the present invention, both ends of the sleeve are respectively provided with outwardly extending clamping edges, and the electromagnetic coil is wound on the sleeve between the two clamping edges.

[0014] According to one embodiment of the present invention, the air inlet of the air inlet channel is provided with a first quick-connect connector, and the air outlet of the air outlet channel is provided with a second quick-connect connector.

[0015] According to one embodiment of the present invention, a support column is provided at the second end of the movable iron core, a first end of the support column is inserted into the second end of the movable iron core, and a second end of the support column is connected to the micro-motion platform.

[0016] Additional aspects and advantages of the present invention will be given in part in the following description and in part will be obvious from the following description, or will be learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0018] Figure 1 A longitudinal sectional view of a pneumatically controlled micro-motion platform device according to an embodiment of the present invention;

[0019] Figure 2 A top view of the pneumatically controlled micro-motion platform device according to an embodiment of the present invention;

[0020] Figure 3 Schematic diagram of the structure of the nozzle in the pneumatically controlled micro-motion platform device according to an embodiment of the present invention.

[0021] Reference numerals:

[0022] 100, proportional control valve; 110, valve body; 120, air inlet channel; 130, air branch channel; 140, air outlet channel; 150, nozzle; 160, movable iron core; 161, sleeve; 162, electromagnetic coil; 170, plug; 171, groove; 180, spring; 190, support column; 200, micro-motion platform; 300, control circuit; 310, first pressure sensor; 320, second pressure sensor; 330, capillary; 340, thermistor wire; 410, first quick-plug connector; 420, second quick-plug connector. DETAILED DESCRIPTION

[0023] The following embodiments of the present invention are described in further detail in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0024] In the description of the embodiments of the present invention, it should be noted that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the embodiments of the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as limitations on the embodiments of the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0025] In the description of the embodiments of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the embodiments of the present invention can be understood according to specific circumstances.

[0026] In the embodiments of the present invention, unless otherwise clearly specified and limited, the first feature being "above" or "below" the second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "above" and "above" the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. The first feature being "below", "below" and "below" the second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0027] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the embodiment of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.

[0028] like Figures 1 to 3As shown, an embodiment of the present invention provides a gas-controlled micro-motion platform device, including a proportional control valve 100 and a micro-motion platform 200. The proportional control valve 100 includes a valve body 110, and the valve body 110 is provided with an air inlet channel 120, an air branch channel 130 and an air outlet channel 140. The air inlet channel 120 is connected to the air branch channel 130 through a nozzle 150. A movable iron core 160 is provided in the air branch channel 130. A plug 170 adapted to the air outlet of the nozzle 150 is provided at the first end of the movable iron core 160. The movable iron core 160 is slidably arranged along the axial direction of the air branch channel 130. The second end of the movable iron core 160 is connected to the micro-motion platform 200, and the air branch channel 130 is connected to the air outlet channel 140. It can be understood that the opening of the proportional control valve 100 is adjusted by controlling the ventilation volume, thereby realizing the control of the displacement of the micro-motion platform 200. Specifically, an air inlet channel 120, an air branch channel 130 and an air outlet channel 140 are provided in the valve body 110. The gas enters the air inlet channel 120 from the air inlet port of the air inlet channel 120. The air inlet end of the nozzle 150 is connected to the air inlet channel 120. The air outlet end of the nozzle 150 is connected to the air branch channel 130. The air enters the air branch channel 130 from the nozzle 150 and is finally discharged from the valve body 110 from the air outlet channel 140.

[0029] Furthermore, the branch passage 130 is vertically arranged, and the movable iron core 160 is arranged in the branch passage 130 along the vertical direction, and the axes of the two coincide with each other, and it is ensured that the movable iron core 160 can move up and down in the branch passage 130 along the vertical direction.

[0030] The first end, i.e., the lower end, of the movable core 160 is provided with a plug 170 that matches the air outlet of the nozzle 150. That is, the air outlet of the nozzle 150 is directly opposite to the center of the plug 170 at the lower end of the movable core 160. The gas output from the air outlet of the nozzle 150 blows the plug 170 and drives the movable core 160 to move upward. The amount of movement is determined by the amount of gas input. The second end of the movable core 160 is connected to the micro-motion platform 200, so that the movable core 160 drives the micro-motion platform 200 to move together, thereby completing the movement control of the object placed on the micro-motion platform 200.

[0031] According to the pneumatically controlled micro-motion platform 200 device of the embodiment of the present invention, gas is delivered to the air inlet channel 120 and enters the branch channel 130 through the nozzle 150, so as to pneumatically push the movable iron core 160 and further realize the displacement of the micro-motion platform 200. The gas is then discharged from the air outlet channel 140. The displacement of the micro-motion platform 200 is controlled by adjusting the air inlet flow rate. The device has a simple structure, a small size, and is easy to operate. It adopts closed-loop control to eliminate the influence of environmental factors and improve control accuracy.

[0032] According to one embodiment of the present invention, a sleeve 161 is sleeved on the outer side of the movable iron core 160, and an electromagnetic coil 162 is wound around the circumference of the sleeve 161, and the movable iron core 160 can move along the axial direction of the sleeve 161. It can be understood that a coaxial sleeve 161 is sleeved on the outer side of the movable iron core 160, and an electromagnetic coil 162 is wound around the outer circumference of the sleeve 161, that is, the electromagnetic coil 162 is arranged around the axis of the sleeve 161. The movable iron core 160 can move up and down along the axial direction of the sleeve 161, and the movement amount of the movable iron core 160 is controlled by controlling the amount of power supplied to the electromagnetic coil 162.

[0033] According to one embodiment of the present invention, a control circuit 300 is further included, and the control circuit 300 is connected to the electromagnetic coil 162. It can be understood that the control circuit 300 is used to control the amount of power supplied to the electromagnetic coil 162 to achieve precise control of the displacement. The control circuit 300 is fixed to the valve body 110 by screws.

[0034] According to one embodiment of the present invention, the air inlet passage 120 is provided with a first pressure sensor 310, and the air outlet passage 140 is provided with a second pressure sensor 320, and both the first pressure sensor 310 and the second pressure sensor 320 are connected to the control circuit 300. It can be understood that the first pressure sensor 310 is used to detect the first pressure of the gas in the air inlet passage 120 in real time, which is set as P 1 The second pressure sensor 320 is used to detect the second pressure P of the gas in the gas outlet channel 140 in real time. 2 , and the first pressure P detected 1 and the second pressure P 2 Transmitted to the control circuit 300, the control circuit 300 performs compensation operation as follows:

[0035] The volume flow rate Q of the gas flowing through the outlet of the nozzle 150 and the first pressure P 1 The relationship between and P (pressure at the nozzle 150 outlet) is:

[0036]

[0037] When the gas flows out of the outlet of the nozzle 150 and contacts the lower end surface of the plug 170 above, the volume flow rate Q is proportional to P and the second pressure P 2 The relationship between them is:

[0038]

[0039] in:

[0040] r 1 is the radius of the nozzle outlet;

[0041] r 2is the radius of the radial bronchial passage;

[0042] L is the length of the nozzle outlet;

[0043] h is the displacement of the movable core that needs to be controlled;

[0044] A is the flow area of ​​the nozzle outlet, A = πr 1 2 ;

[0045] μ is the dynamic viscosity of the gas (its value can be obtained by looking up the table and can be regarded as a constant here).

[0046] Among them, h can be obtained by combining the above two equations:

[0047]

[0048] From formula 1, we can get:

[0049]

[0050] From equation 3 and equation 4, we can deduce:

[0051]

[0052] According to the actual required displacement h 0 The difference between h and h is used to calculate the compensation amount, and then the control circuit 300 outputs the compensation voltage to the electromagnetic coil 162 to control the movable iron core 160 to move the compensation displacement to achieve precise control.

[0053] According to one embodiment of the present invention, the air inlet channel 120 is connected to a capillary 330, and both ends of the capillary 330 are respectively connected to the air inlet channel 120, and both ends of the capillary 330 are respectively wound with thermistor wires 340, and both thermistor wires 340 are connected to the control circuit 300. It can be understood that the capillary 330 is a horizontally arranged U-shaped structure, and its two ends are respectively connected to the air inlet channel 120, the left end of the capillary 330 is the air inlet end, and the right end is the air outlet end, and the gas enters from the left end of the capillary 330 and flows back to the air inlet channel 120 from the right end.

[0054] Furthermore, thermistor wires 340 are provided at both ends of the capillary tube 330. When the gas flows through the capillary tube 330, a temperature difference is formed between the upstream and downstream of the capillary tube 330. The temperature difference acts on the thermistor wire 340 wound on the capillary tube 330 to form a resistance difference. The resistance difference signal is converted into a differential voltage signal through a Wheatstone bridge and input into the control circuit 300 to obtain the volume flow rate Q.

[0055] According to one embodiment of the present invention, a first end of the plug 170 is provided with a groove 171, the first end of the movable iron core 160 is inserted into the groove 171, and the second end of the plug 170 is provided at the gas outlet of the nozzle 150. It can be understood that a plug 170 is provided between the gas outlet of the nozzle 150 and the movable iron core 160, and the two-phase back sides of the plug 170 are respectively adapted to the nozzle 150 and the movable iron core 160. The plug 170 is cylindrical, and a groove 171 is provided at the upper end, and an inner side wall of the groove 171 is provided with an internal thread, and the first end of the movable iron core 160 is provided with an external thread, so as to realize the threaded connection between the plug 170 and the movable iron core 160 and ensure the connection strength.

[0056] According to an embodiment of the present invention, the first end of the movable iron core 160 is provided with a boss matched with the groove 171, and a spring 180 is sleeved on the boss. The first end of the spring 180 is clamped on the bottom side of the clamp in the bronchial passage 130, and the second end of the spring 180 is clamped on the upper end surface of the side wall of the groove 171. It can be understood that the upper side of the plug 170 is provided with a groove 171, and the first end, that is, the lower end of the spring 180 is provided with a boss clamped in the groove 171, and the boss is provided with a thread to achieve threaded matching connection between the boss and the groove.

[0057] Furthermore, a spring 180 is sleeved on the boss, and a clamping platform is provided on the inner side wall of the lower end of the air passage 130. The clamping platform is annular and is connected to the boss. At the same time, an annular baffle is provided on the bottom side of the clamping platform. The first end, i.e., the upper end, of the spring 180 is clamped on the bottom side of the baffle and cannot be moved. The second end, i.e., the lower end, of the spring 180 is clamped on the upper end surface of the side wall of the groove 171 to realize the elastic support of the spring 180 on the movable iron core 160. In other words, the upper end of the spring 180 is fixed relative to the air passage 130. When the gas ejected from the air outlet of the nozzle 150 acts on the lower end surface of the plug 170, the plug 170 drives the movable iron core 160 to move upward, and the lower end of the spring 180 moves upward with the plug 170. At this time, the spring 180 is compressed, generating a downward elastic force on the plug 170, thereby adjusting the upward movement of the movable iron core 160 to achieve precise control.

[0058] According to one embodiment of the present invention, the two ends of the sleeve 161 are respectively provided with card edges extending outward, and the electromagnetic coil 162 is wound on the sleeve 161 between the two card edges. It can be understood that the upper and lower ends of the sleeve 161 are respectively provided with card edges extending outward, that is, away from the axis of the sleeve 161, and the electromagnetic coil 162 is wound on the sleeve 161 between the two card edges, so as to achieve the winding limit of the electromagnetic coil 162.

[0059] According to one embodiment of the present invention, the air inlet of the air inlet channel 120 is provided with a first quick-connect connector 410, and the air outlet of the air outlet channel 140 is provided with a second quick-connect connector 420. It can be understood that by providing the first quick-connect connector 410 and the second quick-connect connector 420, disassembly and assembly are facilitated, and the entire device is simplified.

[0060] According to one embodiment of the present invention, a support column 190 is provided at the second end of the movable iron core 160, a first end of the support column 190 is connected to the second end of the movable iron core 160, and a second end of the support column 190 is connected to the micro-motion platform 200. It can be understood that the first end, i.e., the lower end, of the support column 190 is fixedly connected to the second end, i.e., the upper end, of the movable iron core 160, and the second end, i.e., the upper end, of the support column 190 is fixedly connected to the micro-motion platform 200. Both ends of the support column 190 are fixedly connected to ensure control accuracy.

[0061] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

[0062] The above embodiments are only used to illustrate the present invention, but not to limit the present invention. Although the present invention is described in detail with reference to the embodiments, it should be understood by those skilled in the art that various combinations, modifications or equivalent substitutions of the technical solutions of the present invention do not depart from the spirit and scope of the technical solutions of the present invention, and should be included in the scope of the claims of the present invention.

Claims

1. A pneumatically controlled micro-motion platform device, characterized in that: It comprises a proportional regulating valve and a micro-motion platform, wherein the proportional regulating valve comprises a valve body, wherein the valve body is provided with an air inlet channel, an air branch channel and an air outlet channel, wherein the air inlet channel is communicated with the air branch channel through a nozzle, wherein a movable iron core is arranged in the air branch channel, wherein a plug adapted to the air outlet of the nozzle is arranged at the first end of the movable iron core, wherein the movable iron core is slidably arranged along the axial direction of the air branch channel, wherein the second end of the movable iron core is connected to the micro-motion platform, and the air branch channel is communicated with the air outlet channel; A sleeve is sleeved on the outer side of the movable iron core, an electromagnetic coil is wound around the circumference of the sleeve, and the movable iron core can move along the axial direction of the sleeve; Also includes a control circuit, the control circuit is connected to the electromagnetic coil; The air inlet passage is provided with a first pressure sensor, the air outlet passage is provided with a second pressure sensor, and both the first pressure sensor and the second pressure sensor are connected to the control circuit; The air inlet channel is connected with a capillary tube, both ends of the capillary tube are connected with the air inlet channel respectively, both ends of the capillary tube are wound with thermistor wires respectively, and both thermistor wires are connected with the control circuit.

2. The pneumatically controlled micro-motion platform device according to claim 1, characterized in that: A first end of the plug is provided with a groove, the first end of the movable iron core is inserted into the groove, and the second end of the plug is arranged at the air outlet of the nozzle.

3. The pneumatically controlled micro-motion platform device according to claim 2, characterized in that: The first end of the movable iron core is provided with a boss adapted to the groove, and a spring is sleeved on the boss. The first end of the spring is clamped on the bottom side of the boss in the branch air channel, and the second end of the spring is clamped on the upper end surface of the side wall of the groove.

4. The pneumatically controlled micro-motion platform device according to claim 1, characterized in that: The two ends of the sleeve are respectively provided with outwardly extending clamping edges, and the electromagnetic coil is wound on the sleeve between the two clamping edges.

5. The pneumatically controlled micro-motion platform device according to claim 1, characterized in that: The air inlet of the air inlet channel is provided with a first quick-plug connector, and the air outlet of the air outlet channel is provided with a second quick-plug connector.

6. The pneumatically controlled micro-motion platform device according to any one of claims 1 to 5, characterized in that: A support column is provided at the second end of the movable iron core, a first end of the support column is inserted into the second end of the movable iron core, and a second end of the support column is connected to the micro-motion platform.

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